CN221023950U - Handling device - Google Patents

Abstract

The utility model discloses a carrying device, which relates to the technical field of carrying equipment, and comprises a movable chassis and a bearing main body, wherein the movable chassis comprises a chassis main body, a driving wheel and a first motor, and the bearing main body and the driving wheel are respectively arranged at two sides of the chassis main body; the carrying device also comprises an alignment assembly; the alignment assembly comprises an angle detection sensor and a positioning adjustment assembly; the angle detection sensor is arranged at the periphery of the movable chassis and is used for detecting the angle of the bearing main body relative to the material; the first motor is used for driving the driving wheel to rotate according to the angle detected by the angle detection sensor so as to change the direction of the bearing main body; the positioning adjusting assembly comprises a position detecting sensor and a displacement mechanism; the position detection sensor is fixed relative to the bearing main body, and is used for detecting the distance between the bearing main body and the material; the displacement mechanism is arranged between the movable chassis and the bearing main body and is used for relatively moving the bearing main body by the movable chassis, so that high-precision butt joint can be realized.

Description

Handling device

Technical Field

The utility model relates to the technical field of carrying equipment, in particular to a carrying device.

Background

Handling devices, also known as logistics devices or AGV (Automated Guided Vehicle), are automated devices for automatically performing handling and transportation tasks in the industry and logistics. However, in the production process of the display panel, the handling and docking of the reticle pod (MASK CASSETT) still need to be performed manually, resulting in low production efficiency and high production accuracy due to human factors. In addition, with the shortage of labor, the labor cost is high. Although the handling device is intended to gradually replace manual work, the requirement on the butt joint precision of the moving device is high when the photomask box is handled, so that the butt joint success rate is low. The higher cleanliness of the photomask box in the conveying bin is required to be ensured in the conveying process, and the popularization of the conveying device in the production link is greatly hindered. These problems have made there are no more sophisticated solutions within the display panel industry.

For this reason, there is an urgent need to develop a handling device for handling and transporting with high precision, particularly for handling reticle pods in a production shop of a display panel exposure apparatus.

Disclosure of utility model

The present utility model aims to solve one of the technical problems in the related art to a certain extent. Therefore, the utility model provides a carrying device which can realize high-precision butt joint in the loading and unloading processes.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

The carrying device comprises a movable chassis and a bearing main body, wherein the movable chassis comprises a chassis main body, a driving wheel and a first motor, and the bearing main body and the driving wheel are respectively arranged at two sides of the chassis main body; the carrying device further comprises an alignment assembly; the alignment assembly comprises an angle detection sensor and a positioning adjustment assembly;

The angle detection sensor is arranged at the periphery of the movable chassis and is used for detecting the angle of the bearing main body relative to the material;

the first motor is used for driving the driving wheel to rotate according to the angle measured by the angle detection sensor so as to change the direction of the bearing main body;

the positioning adjusting assembly comprises a position detecting sensor and a displacement mechanism;

The position detection sensor is fixed relative to the bearing main body, and is used for detecting the distance between the bearing main body and the material;

The displacement mechanism is arranged between the movable chassis and the bearing body and is used for moving the bearing body relative to the movable chassis.

Optionally, the main bearing body comprises a lifting mechanism and a carrier arranged at one end of the lifting mechanism, the other end of the lifting mechanism is arranged on the displacement mechanism, and the displacement mechanism drives the lifting mechanism to move the carrier.

Optionally, the lifting mechanism comprises a lifting frame and a third driving assembly for driving the lifting frame to stretch and retract.

Optionally, the displacement mechanism includes two sub-moving mechanisms, the two sub-moving mechanisms are stacked along the height direction of the carrying device, the sub-moving mechanism located below is connected with the moving chassis, and the sub-moving mechanism located above is connected with the bearing main body;

The sub-moving mechanism comprises a screw rod sliding rail module and a second motor for driving the screw rod module; the setting directions of the screw rod sliding rail modules in the two sub-moving mechanisms are intersected.

Optionally, the bearing main body further comprises a housing and an openable and closable bin gate arranged on the housing, the lifting mechanism and the carrier are positioned in the housing, and the bin gate is positioned at an opening at one side of the housing for feeding and discharging the carrier. The main bearing body is sealed through the shell, so that the risk is reduced, meanwhile, the cleanliness in the main bearing body is improved by matching with the use of the rolling door (bin door), and meanwhile, the material in the transportation process is ensured not to be polluted by the external environment.

Optionally, the carrier is provided with at least two positioning members for matching with the periphery of the material.

Optionally, the positioning piece is a rod-shaped piece, one end of the positioning piece is fixed on the carrier, and a chamfer is formed at the other end of the positioning piece.

Optionally, the angle detection sensor includes two laser ranging sensors disposed on the carrier, a preset distance exists between the two laser ranging sensors, and a preset angle exists between the light emitting directions of the two laser ranging sensors.

Optionally, the device further comprises a visual sensor for navigation, wherein the visual sensor is arranged on the outer side of the shell and positioned on the same side as the bin gate.

Optionally, the system further comprises an in-place sensor for detecting the position state of the material on the carrier, and the in-place sensor is connected with the carrier.

Optionally, the alignment assembly further includes a rotation mechanism disposed between the moving chassis and the displacement mechanism, for changing the direction of the bearing body according to the angle measured by the angle detection sensor.

Optionally, the rotating mechanism comprises a fixed seat, a rotary table rotatably sleeved outside the fixed seat, and a fifth motor for driving the rotary table to rotate; the fixed seat is connected with the movable chassis, and the rotary table is connected with the displacement mechanism.

These features and advantages of the present utility model will be disclosed in more detail in the following detailed description and the accompanying drawings. The best mode or means of the present utility model will be described in detail with reference to the accompanying drawings, but is not limited to the technical scheme of the present utility model. In addition, these features, elements, and components are shown in plural in each of the following and drawings, and are labeled with different symbols or numerals for convenience of description, but each denote a component of the same or similar construction or function.

Drawings

The utility model is further described below with reference to the accompanying drawings:

Fig. 1 is a schematic view of the handling device and the external device in a docked state.

Fig. 2 is a schematic view of the handling device (with one side of the housing removed).

Fig. 3 is a schematic structural view of the displacement mechanism, the lifting mechanism, the bearing body and the material.

Fig. 4 is a schematic structural view of the displacement mechanism, the lifting mechanism and the bearing body.

Fig. 5a is a schematic view of the material and the positioning portion according to an embodiment.

Fig. 5b is a schematic view of the material and the positioning portion according to an embodiment.

Fig. 6 is a schematic structural diagram of the handling device according to an embodiment.

Fig. 7 is a schematic view of the carrying device in an open state of the door according to an embodiment.

Fig. 8 is a schematic structural view of the external device, showing positions of the first positioning mark and the second positioning mark.

Fig. 9 is a schematic block diagram of the handling device.

Fig. 10 is an enlarged view at B in fig. 2.

Fig. 11 is an enlarged view at a in fig. 2.

Fig. 12 is a schematic structural view of the rotating mechanism according to an embodiment.

10, Moving a chassis; 100. a chassis main body; 110. a driving wheel; 120. a universal wheel; 20. a carrying body; 200. a displacement mechanism; 300. a lifting mechanism; 310. a lifting frame; 311. a fixing frame; 312. a movable frame; 320. a connecting piece; 330. a light shield; 400. a carrier rack; 410. a supporting plate; 411. a positioning part; 420. a positioning pin; 500. a control device; 510. a position detection sensor; 520. a visual sensor; 530. an angle detection sensor; 531. a laser ranging sensor; 540. an in-place sensor; 600. a housing; 610. a bin gate; 700. an external device; 711. a first positioning mark; 712. a second positioning mark; 720. a material; 721. a pin hole; 810. a fixing seat; 820. a turntable; 830. a fifth motor; 840. axially contacts the bearing.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The examples in the embodiments are intended to illustrate the present utility model and are not to be construed as limiting the present utility model.

Reference in the specification to "one embodiment" or "an example" means that a particular feature, structure, or characteristic described in connection with the embodiment itself can be included in at least one embodiment of the disclosure. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment.

Examples:

As shown in fig. 1-3, a handling device is shown for loading and unloading a plate-like material 720 onto an external device 700 or accurately removing the plate-like material from the external device 700 according to a predetermined handling trajectory (in a navigation system), for example, handling a mask (box) between an exposure machine and a mask buffer bin in a display panel factory.

The handling device mainly comprises a mobile chassis 10, a carrying body 20 and an alignment assembly for accurately docking the carrying body 20 with the material (on the external device 700). The mobile chassis 10 includes a chassis main body 100, a driving wheel 110, and a first motor, the carrier main body and the driving wheel being provided on both sides of the chassis main body in the up-down direction, respectively.

The alignment assembly includes an angle detection sensor 530 and a positioning adjustment assembly, wherein the positioning adjustment assembly includes a displacement mechanism and a position detection sensor.

The angle detection sensor is arranged on the periphery of the movable chassis and used for detecting the angle of the bearing main body relative to the material, and the first motor is used for driving the driving wheel to rotate according to the angle detected by the angle detection sensor so as to change the orientation of the bearing main body.

The positioning adjustment assembly comprises a position detection sensor and a displacement mechanism. The position detection sensor is fixed relative to the bearing main body, and the position detection sensor is used for detecting the distance between the bearing main body and the material. The displacement mechanism is arranged between the movable chassis and the bearing main body and is used for relatively moving the movable chassis to move the bearing main body.

When in butt joint, the mobile chassis is firstly used for carrying out preliminary positioning alignment, then the mobile chassis is used for carrying out more accurate positioning through the displacement mechanism, the problem of insufficient adjustment precision of the mobile chassis is solved, and meanwhile, the positioning is assisted through the position detection sensor and the angle detection sensor, so that a foundation is provided for realizing high-precision butt joint in the loading and unloading process, and the positioning precision meeting the working requirement can be achieved.

For example, when the handling device is applied to the production of a display panel, the handling device can be directly and accurately abutted with an exposure Machine (MPA) and a buffer bin (Mask Stocker) after the deviation of the handling device is adjusted by a driving wheel adjusting direction and a displacement mechanism in sequence. In this way, not only can the production efficiency and the production precision be improved, but also the labor cost can be reduced.

In order to realize the automation of the above-described conveying device, a control device is also provided for the conveying device. The control device can adopt electronic equipment with operation and information processing functions such as a PLC (programmable logic controller), a singlechip and the like, and can be directly deployed on the carrying device to form a part of the carrying device, or the control device adopts an independently deployed server, and each electronic equipment in the carrying device is connected with the control device through a data line or a wireless communication module. The person skilled in the art can flexibly set according to the actual situation, and the method is not limited. The present embodiment is described with reference to fig. 9 by taking a control device disposed in a conveying device as an example, and the connection of the control device to each electronic device in the conveying device. The mobile chassis 10 is configured with a navigation system, such as road sign navigation, two-dimensional code navigation, laser SLAM navigation, etc., so as to be capable of moving according to a preset carrying track, and these navigation modes are all of the prior art and are not described in detail herein.

In particular, the mobile chassis 10 may employ an omni-wheel chassis that has the ability to move freely in multiple directions, thereby enabling more flexible and efficient movement of the machine. The omni-wheel chassis in this embodiment includes a chassis main body, and two sets of two-wheel differential driving assemblies disposed on the chassis main body, where each two-wheel differential driving assembly includes two (or a pair of) driving wheels 110 and one driven universal wheel 120 juxtaposed together, and a first motor (not shown in the figure, see fig. 9) for driving the driving wheels, the first motor is electrically connected with the control device, and the turning or adjusting direction is realized by means of the differential of the driving wheels 110, and the first motor may be driven by a motor with a speed reducer or directly by a hub motor. The two differential driving assemblies are composed of four driving wheels 110 and two driven universal wheels 120, the chassis main body disc is rectangular as a whole, one pair of juxtaposed driving wheels 110 is arranged at one corner of the bottom of the movable chassis 10, the other pair of juxtaposed driving wheels 110 is arranged at the opposite corners, and the remaining two driven universal wheels 120 are respectively arranged at the two remaining corners. The two pairs of driving wheels 110 can be independently rotated by driving of the (four) first motors, and the omnidirectional movement is realized by independent control of the two pairs of driving wheels 110.

In addition, in some alternative embodiments the mobile chassis may also employ a three wheel omni wheel chassis, a four wheel Mecanum wheel chassis, a four wheel skid chassis, a four wheel Ackerman chassis, etc. as an option, which is not described in detail herein.

The carrying body 20 includes a lifting mechanism 300, a carrier 400 provided at an upper end of the lifting mechanism, and a housing 600 (with an opening). The lifting mechanism 300 and the carrier 400 are both located within the housing 600, avoiding entry of foreign objects during movement of the handling device.

Only part of the displacement mechanism 200 is wrapped below the housing 600, and a gap is formed between the housing 600 and the mobile chassis 10, so that the housing 600 cannot touch the mobile chassis 10 by mistake when the displacement mechanism 200 is adjusted.

The displacement mechanism 200, i.e. the horizontal movement platform, also comprises two sub-movement mechanisms, which are stacked in the height direction of the handling device, the sub-movement mechanism located below is connected to the movement chassis, and the sub-movement mechanism located above is connected to the carrying body.

The sub-moving mechanism comprises a screw rod sliding rail module and a second motor for driving the screw rod module; the setting directions of the screw rod sliding rail modules in the two sub-moving mechanisms are intersected. Specifically, from lower supreme first backup pad, second backup pad and the parallel and alternate setting of third backup pad of being equipped with in proper order to form the layer space that holds lead screw slide rail module between two adjacent backup pads. The first support plate is fixed with the chassis main body, and the third support plate is fixed with the lifting mechanism.

The screw rod sliding rail module adopts a roller screw rod sliding rail module, and the roller screw rod sliding rail module comprises a linear sliding rail and a roller screw rod transmission piece. The first support plate and the second support plate can realize linear sliding in a first direction through the arranged linear sliding rail, for example, the first direction can be along the length direction or the width direction of the chassis main body and is marked as an X-axis direction; the second support plate and the third support plate can realize linear sliding in a second direction through the arranged linear sliding rail, for example, the first direction can be the width direction or the length direction along the chassis main body and is marked as the Y-axis direction; the X axis and the Y axis are intersected and are generally perpendicular to each other, so that a rectangular coordinate system is formed between the X axis and the Y axis.

The roller screw rod transmission piece comprises a bearing seat, a screw rod shaft and a nut, the setting of a first support plate and a second support plate is taken as an example for explanation, the screw rod shaft is rotatably arranged on the upper surface of the first support plate through the bearing seats at the two ends, the nut is sleeved on a threaded section of the screw rod shaft, rollers which are distributed in a planetary manner are arranged between the nut and the screw rod shaft, the lower surfaces of the nut and the second support plate are fixed together, the second motor drives the screw rod shaft to rotate, so that the rotation of the screw rod shaft is converted into the linear movement of the nut, and the linear slide rail is matched, so that the second support plate can be accurately driven to perform the linear movement. Similarly, the roller screw rod transmission piece in the other direction is arranged between the second support plate and the third support plate, and the roller screw rod transmission piece and the third support plate are combined, so that the lifting mechanism and the bearing main body on the lifting mechanism can be accurately adjusted on the X axis and the Y axis.

Besides adopting roller screw slide rail modules, the screw slide rail modules can also be ball screw slide rail modules, and the screw slide rail modules are not limited.

It should be noted that, in some embodiments, the chassis main body has an upper end surface, the lifting mechanism has a base, at this time, the upper end surface of the chassis main body may be used as the first support plate, the base of the lifting mechanism may be used as the third support plate, and those skilled in the art may flexibly set according to the actual structure, which is not limited herein.

Because the adjustment direction of one screw rod slide rail module is along the length direction setting of handling device, the adjustment direction of another screw rod slide rail module can be along the width direction setting of handling device, and two directions just are located on the horizontal plane mutually perpendicularly. The lifting mechanism 300 is disposed on the horizontal moving mechanism, and the displacement mechanism 200 can adjust the horizontal displacement of the carrier 400 by driving the lifting mechanism 300, and the lifting mechanism 300 can also move the carrier 400 in the vertical direction (corresponding to the Z axis perpendicular to the X axis and the Y axis). And the two are matched with each other to realize the movement of the carrier 400 in the three-axis coordinate system (taking the moving chassis 10 as a reference, namely, in the length direction, the width direction and the height direction of the moving chassis 10).

In this embodiment, the lifting mechanism 300 includes two groups, which are respectively disposed on two sides (in the length direction or in the width direction) of the displacement mechanism 200 and are disposed opposite to each other, so that the difficulty in assembling and processing the mechanical structure can be reduced. The lower ends of the two lifting mechanisms 300 are respectively fixed at two opposite sides of the horizontal moving mechanism, one side of the carrier 400 is fixed at the upper end of one of the lifting mechanisms 300, the other side of the carrier 400 is fixed at the upper end of the other lifting mechanism 300, and the synchronous action of the two lifting mechanisms 300 drives the carrier 400 to move in the vertical direction. In addition, the two lifting mechanisms 300 can be connected and fixed through the connecting piece 320, and the two lifting mechanisms become a whole after being fixed, so that synchronous movement can be better realized.

Taking one of the lifting mechanisms 300 as an example, the lifting mechanism 300 includes a lifting frame 310 that is relatively slidably retractable in a vertical direction and a third driving assembly for driving the lifting frame to be retractable. The lifting frame 310 comprises a fixed frame 311 erected on the displacement mechanism and a movable frame 312 arranged on the fixed frame in a sliding manner, the fixed frame 311 and the movable frame 312 can stretch and retract when sliding up and down through the arrangement of linear guide rails, and the carrier 400 is arranged on the movable frame 312.

Specifically, the third driving assembly includes a roller screw assembly and a third motor for driving the roller screw assembly. The roller screw assembly is disposed between the fixed frame and the movable frame in a manner that is referred to as a displacement mechanism and will not be described in detail herein. The control device is electrically connected with the third motor, and when the third motor rotates, the screw rod shaft is driven, so that a nut on the screw rod shaft generates linear motion, and the movable frame is driven to lift by the nut, so that the movable frame can be switched between a lifting state and a retraction state, and finally the carrier 400 can be driven to be matched with external equipment to load and unload goods.

It should be noted that, in addition to the above-mentioned scheme, the sub-moving mechanism and the lifting mechanism may use a screw rod sliding rail module and a roller screw rod assembly, and those skilled in the art may also use a linear motor, a gear-rack driving, a synchronous belt driving, a worm driving, and other driving modes to make an adaptive adjustment, so as to obtain an alternative scheme.

In this embodiment, in order to ensure that the roller screw assembly is in a good working environment, a dust cover is disposed on the movable frame, a downward movable cavity is formed between the dust cover and the movable frame, and meanwhile, the size of the movable cavity is adapted to the contour of the fixing frame 311 below, so that the roller screw assembly can just move up and down in the movable cavity, which is equivalent to a linear slide rail, and the third motor and the screw portion are located in the movable cavity, which is not shown in the figure.

Wherein the carrier 400 is composed of two parallel trays 410, the two trays 410 are separately disposed on the two lifting mechanisms 300 and are disposed opposite to each other, and the two trays 410 are located on the same level plane to form a plane for supporting the material 720. Specifically, in the present embodiment, two pallets 410 are respectively disposed at both ends in the length direction of the moving chassis 10, and the two pallets 410 extend to both sides in the width direction of the moving chassis 10 (not exceeding the size of the moving chassis 10), so that the pallets 410 have sufficient support for the bottom of the material 720 after being in contact with the material 720. Because the two supporting plates 410 are arranged in a split type, enough space can be reserved in the middle for external equipment to carry out loading and unloading operations. It should be noted that in some exemplary embodiments, the carrier 400 may be formed as a single piece, such as by connecting one end of two pallets 410 to form an n-shaped structure, and accordingly, one lifting mechanism 300 may be reduced and the position of the lifting mechanism 300 readjusted, which is not limited herein.

And on this plane there is a positioning 411 for adapting to the circumference of the material 720 (see fig. 4). Specifically, the supporting plate 410 is provided with a positioning pin 420, and the positioning pin 420 is penetrated through the supporting plate 410 from bottom to top and is vertically arranged on the surface of the supporting plate 410 for supporting the material 720, so as to form a positioning portion 411. Two positioning pins 420 are respectively arranged on each supporting plate 410, and the two supporting plates 410 can position the periphery of the material 720 when being loaded through four positioning pins 420 (the material 720 is provided with pin holes 721 matched with the positioning pins 420, see fig. 3).

To further allow the dowel 420 to be inserted into the dowel bore 721 in one step, the success rate is increased. The positioning pin 420 is provided with a chamfer at its end, so that even if there is still a deviation (for example, a radius deviation of 1mm or less) between the two (after the positioning pin 420 is slightly adjusted by the horizontal displacement platform), the positioning can be performed by guiding, aligning, inserting and positioning by the chamfer. Similarly, a chamfer may be provided at the orifice of the pin hole 721, and the same effect can be achieved.

It should be noted that, the specific manner of setting the positioning portion 411 needs to be changed adaptively according to the structure of the periphery of the material 720, and is not limited to the above embodiment using the positioning pin 420. For example, for the material 720 with no pin holes 721 on the periphery, the positioning parts 411 may be also configured as sections with an L-shaped section, the four positioning parts 411 respectively correspond to four edges of the side surface of the material 720, and after the positioning, the two inner walls of the sections respectively adhere to the side walls of the material 720, so that accurate positioning is realized; or as shown in fig. 5a and 5b, if a vertical reinforcing rib is disposed on the side of the material 720, the reinforcing rib may adopt a concave structure or a convex structure, and the positioning portion 411 is adapted to be adjusted on the surface contacted and combined with the reinforcing rib.

Similarly, the distance between two positioning pins 420 on the same pallet 410, the diameter of the positioning pins 420, and the height of the positioning pins 420 can be adaptively adjusted by those skilled in the art according to the specific structure of the material 720, which is not limited in this embodiment.

The carrier 400 has an opening on at least one side for loading and unloading external equipment. Since the carrier 400 of the present embodiment employs two pallets 410 and the two pallets 410 are spaced apart, the space therebetween can be regarded as an opening formed on both sides in the width direction of the moving chassis 10.

Accordingly, the two doors 610 corresponding to the openings on the housing 600 may be separately provided, so that the external devices may be unhindered when loading and unloading goods through the openings on the two sides. As shown in fig. 6, the bin gate 610 may be configured as a rolling door, and a fourth motor may be configured to drive the rolling door to roll up or roll down, the fourth motor being electrically connected to the control device. And the opening is exposed when the material is lifted during loading and unloading, and the material can be closed after loading and unloading, so that the material 720 is ensured to be in a relatively closed, safe and clean space during the carrying process.

The bin gate 610 on the housing 600 may be provided in one or two according to circumstances, and one skilled in the art may select according to actual use circumstances, and the present embodiment is not limited.

In order to accurately control the execution elements (motors) in the moving chassis 10, the displacement mechanism 200 and the lifting mechanism 300, so as to realize more accurate butt joint with materials on external equipment in the loading and unloading process, as shown in fig. 7, in this embodiment, the carrying device is provided with a visual sensor 520 for navigation on the peripheral side of the moving chassis 10, the visual sensor 520 can adopt a two-dimensional code camera, and the visual sensor 520 is arranged on the housing and is located on the same side of the housing together with the roller shutter door. In this way, when the mobile chassis approaches to the external device, the two-dimensional code camera can collect an image of the second positioning identifier 712 (see the dotted line position in fig. 8) at a designated position (e.g. the front side of the external device), and the control device determines whether the destination is reached after receiving the image, so as to control the start and stop of the first motor in the mobile chassis, and further control the stop of the mobile chassis at a preset position.

It should be noted that, by adopting the method steps of positioning and navigating by the visual sensor in the traveling process of the mobile chassis in this embodiment, the conventional technical means of those skilled in the art are the prior art, and will not be described in detail here.

Since the accuracy of the manner of positioning navigation by the vision sensor is limited in some cases, an angle detection sensor 530 is provided on the peripheral side of the mobile chassis 10 in this embodiment, and the angle detection sensor measures the angle of the carrier body with respect to the material and sends it to the control device.

Specifically, it is possible to directly measure whether the angle information between the movable chassis 10 and the reference object (the surface of the non-material, which may be the surface of an external device, such as a plane to which the second positioning mark is attached) is aligned with the surface of the material, or obtain the angle of the carrier body relative to the material by indirectly measuring, and the latter is used in this embodiment, which is described in detail below.

A position detection sensor is provided on the link 320 below the pallet 410 (between the two elevating mechanisms 300), and the position detection sensor is fixed to the pallet. The position detection sensor can collect the deviation distance of the bearing main body relative to the material and send the deviation distance to the control device, for example, a first positioning mark 711 (see fig. 8) is arranged at the bottom of the external equipment in advance, the corresponding position detection sensor adopts a two-dimensional code camera, the control device can collect images of the first positioning mark during loading and unloading, and the control device determines the relatively accurate deviation distance according to the images.

Meanwhile, the control device configured by the carrying device can control the movable chassis 10 to stop according to the second positioning mark 712, correct the direction of the bearing main body by controlling at least one of the first motors according to the angle, and control the second motor in the displacement mechanism to move the bearing main body according to the deviation distance. Specific connection modes of the control device referring to fig. 9, the angle detection sensor 530, the position detection sensor 510, the vision sensor 520, the mobile chassis 10, the displacement mechanism 200, and the lifting mechanism 300 are all communicatively connected to the control device 500. In addition, a touch display screen connected with the control device 500 is further provided on the housing 600 to facilitate parameter setting.

In fig. 8, the external device is disposed at a predetermined position beside the conveyance path, and a two-dimensional code is attached to the front surface of the base, and the two-dimensional code is used as the second positioning mark 712, and the visual sensor 520 is a two-dimensional code camera. When the carrying device moves to the front of the external device through the mobile chassis 10, the visual sensor 520 can acquire the two-dimension-like code on the front of the base station, the control device 500 recognizes and positions the two-dimension-like code (ARUCO), judges that the carrying vehicle reaches the designated position, and then controls the mobile chassis 10 to stop moving and parking.

The angular alignment required before starting the loading and unloading is accomplished by the angle detection sensor 530 and the drive wheel in the mobile chassis 10. The external device has a telescopic arm (not shown) with a dedicated platform for holding the material 720, the width of the platform being smaller than the distance between the two pallets 410, so that during the process of the telescopic arm extending the material 720 on the platform from the opening on one side to the middle of the two pallets 410, there is sufficient clearance between the two sides of the platform and the pallets 410, and the two will not collide.

Similarly, the fixing structure of the material 720 on the platform in this embodiment can be the same as the positioning portion 411 on the supporting plate 410, that is, the positioning pin 420 and the pin hole 721 are matched, but the positions are different. The platform is also provided with 4 positioning pins 420, and the inner side of the upper periphery of the material 720 is also provided with 4 corresponding pin holes 721. Through the angle calibration work, the angle deviation can be eliminated, and the alignment and alignment can be simultaneously realized only by adjusting the displacement mechanism 200, namely, between 4 positioning pins 420 on the supporting plate 410 and 4 pin holes 721 on the outer side of the periphery of the material 720 and between 4 positioning pins 420 on the platform and four pin holes 721 on the inner side of the periphery of the material 720.

As shown in fig. 3 and 7, in the present embodiment, the angle detection sensor 530 is a pair of laser ranging sensors 531, and the control device is electrically connected to the two laser ranging sensors, respectively. The two laser ranging sensors are relatively fixed according to a preset interval and a preset angle, so that the angle of the bearing body relative to the material is determined according to the difference value between the measured values of the two laser ranging sensors.

Specifically, the laser ranging sensors 531 are respectively disposed at one ends of the two pallets 410, and the two laser ranging sensors 531 face outward through the door 610 on the housing 600. A quadrangle is formed between the two laser ranging sensors 531 and the irradiation points thereof on the front surface of the machine of the external device, the two laser ranging sensors 531 are parallel and respectively perpendicular to the connecting lines between the two laser ranging sensors 531, so that the angle calibration can be determined to be completed when the quadrangle is rectangular. If the two ranging lengths are different, the control device 500 slightly adjusts the azimuth by controlling the mobile chassis 10 to be in place anticlockwise or clockwise until the two ranging lengths are aligned.

After the angle correction, when the external equipment stretches into the conveying device to load and unload, the positioning accuracy of the positioning pin 420 and the pin hole 721 can be met through the fine adjustment of the displacement mechanism 200. As shown in fig. 10, a two-dimensional-like code is also disposed at the bottom of the platform of the external device, the two-dimensional-like code is used as the first positioning identifier 711, the position detection sensor 510 is a two-dimensional code camera, the position detection sensor 510 is fixed on the connecting piece 320 of the lifting mechanism 300 through a bracket, the viewing angle of the position detection sensor 510 is upward, and the two-dimensional-like code located at the bottom of the platform is faced. In order to avoid the influence of external light on the position detection sensor 510 and improve the image acquisition definition of the two-dimensional code camera, in this embodiment, the lens of the position detection sensor 510 is provided with an inverted pyramid-shaped light shield 330.

The specific working principle of the embodiment is as follows: the carrying device goes to an exposure Machine (MPA) or a cache bin (Mask Stocker), namely external equipment, when taking materials, the carrying device is piloted to the front of the exposure machine or the cache bin, a two-dimensional code camera on the side surface of the machine body is used for reading a corresponding two-dimensional code (second positioning mark) on the outer side of the cache bin of the exposure machine, and initial positioning is realized through adjustment of an omnidirectional chassis; after initial positioning, the rolling shutter door is controlled to be pulled up, and an angle detection sensor on the supporting plate is exposed, wherein the angle detection sensor is generally formed by converting the distance from a vehicle body to a base station through two laser ranging sensors which are arranged front and back, so that the vehicle body and the base station are enabled to be parallel with higher precision (the deviation is within 0.1 DEG) through further adjustment of the chassis.

The platform of the bearing material of exposure machine or buffer memory storehouse is that the fork stretches out to the position in storehouse inside of handling device this moment, reads the two-dimensional code (first location sign) that exposure machine or buffer memory storehouse fork bottom pasted through the two-dimensional code camera on the elevating system, moves in the horizontal direction through displacement mechanism and adjusts for four locating pins on exposure machine or the buffer memory storehouse aim at four locating pin holes in material inboard position, lift up the material through elevating system in vertical direction, break away from the fork in exposure machine or buffer memory storehouse, the fork in exposure machine or buffer memory storehouse is retrieved this moment, keep away from the position in storehouse, the rolling slats door is put down and is accomplished the get material operation promptly, the same during the material loading.

The bin gate 610 in this embodiment is a roller shutter door, and is driven by a fourth motor, which is connected to the control device 500. Only when getting material or material loading, can open, can drop in order to guarantee in the storehouse and avoid outside pollution in the transportation, can avoid personnel to touch by mistake simultaneously, avoid the collision.

In addition, an in-place sensor 540 (see fig. 11) for detecting the position state of the material 720 is provided on the carrier 400, the in-place sensor 540 is fixed to one side of the pallet 410, and the control device 500 is connected to the in-place sensor 540. When the material taking or feeding fails, the material taking or feeding can be detected by the in-place sensor, and the control device 500 controls the suspension to wait for the staff to remove the abnormality.

It should be noted that, the adhesion precision of the first positioning identifier and the second positioning identifier on the external device may affect the subsequent positioning precision. For some manufacturers of external devices, the first positioning mark and the second positioning mark are engraved by laser during production, and the positions of the positioning marks are accurate, so that a laser ranging sensor can be omitted, in one embodiment, the image of the second mark acquired by the vision sensor contains angle information with a reference object, and the vision sensor can be used as an angle detection sensor.

In addition, as shown in fig. 12, in some embodiments, the mobile chassis on the handling device does not have very precise movement accuracy. Therefore, in this case, the alignment assembly of the handling device further includes a rotation mechanism disposed between the moving chassis and the displacement mechanism, for changing the orientation of the carrying body according to the angle detected by the angle detection sensor.

Specifically, the rotating mechanism includes a fixed base 810, a turntable 820 rotatably sleeved outside the fixed base 810, and a fifth motor 830 for driving the turntable 820 to rotate; the fixed base 810 is connected with the movable chassis, and the turntable 820 is connected with the displacement mechanism.

The rotary table 820 is externally provided with a gear ring, the fifth motor 830 is fixed with the fixed seat 810, an output shaft of the fifth motor 830 is provided with a gear meshed with the gear ring for transmission, and the number of teeth of the gear is smaller than that of the gear ring, so that the motor can drive the rotary table 820 to rotate with smaller output, thereby driving the displacement mechanism through the rotary table 820, further driving the bearing body, and finally achieving the purpose of adjusting the angle of the bearing body.

The fixing base 810 is provided with a positioning part on the lower end surface, and the positioning part has a concave-convex structure. Correspondingly, the chassis main body is also provided with another positioning part matched with the positioning part. For example, the positioning portion on the chassis main body is a circular protrusion, and the positioning portion on the lower end surface of the fixing base 810 is a groove adapted to the outer diameter of the circular protrusion.

An axial contact bearing 840 is arranged on the end surface of the other side of the fixed seat 810, and the axial contact bearing 840 is provided with two rotating bodies oppositely arranged in the axial direction of the bearing; one of the rotating bodies is fixed to the end face of the fixed base 810, and one of the rotating bodies is connected to the displacement mechanism. The displacement mechanism and the upper mechanism can be effectively supported by the axial contact bearing 840, and resistance can be effectively reduced when the displacement mechanism rotates on the fixing base 810.

The above is only a specific embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and it should be understood by those skilled in the art that the present utility model includes but is not limited to the accompanying drawings and the description of the above specific embodiment. Any modifications which do not depart from the functional and structural principles of the present utility model are intended to be included within the scope of the appended claims.

Claims (13)

1. The carrying device comprises a movable chassis and a bearing main body, wherein the movable chassis comprises a chassis main body, a driving wheel and a first motor, and the bearing main body and the driving wheel are respectively arranged at two sides of the chassis main body; the carrying device is characterized by further comprising an alignment assembly; the alignment assembly comprises an angle detection sensor and a positioning adjustment assembly;

The angle detection sensor is arranged at the periphery of the movable chassis and is used for detecting the angle of the bearing main body relative to the material;

the first motor is used for driving the driving wheel to rotate according to the angle measured by the angle detection sensor so as to change the direction of the bearing main body;

the positioning adjusting assembly comprises a position detecting sensor and a displacement mechanism;

The position detection sensor is fixed relative to the bearing main body, and is used for detecting the distance between the bearing main body and the material;

The displacement mechanism is arranged between the movable chassis and the bearing body and is used for moving the bearing body relative to the movable chassis.

2. The carrier of claim 1, wherein the carrier body comprises a lifting mechanism and a carrier frame disposed at one end of the lifting mechanism, the other end of the lifting mechanism is disposed on the displacement mechanism, and the displacement mechanism moves the carrier frame by driving the lifting mechanism.

3. The handling device of claim 2 wherein the lift mechanism includes a lift frame and a third drive assembly for driving the lift frame to retract.

4. A handling device according to claim 3, wherein the lifting frame comprises a fixed frame erected on the displacement mechanism, and a movable frame provided on the fixed frame; the movable frame is arranged in a sliding manner along the vertical direction of the fixed frame, and the object carrier is arranged on the movable frame; the position detection sensor is positioned below the carrier and fixed on the movable frame.

5. The carrying device according to any one of claims 1 to 4, wherein the displacement mechanism includes two sub-moving mechanisms, the two sub-moving mechanisms being stacked in a height direction of the carrying device, a sub-moving mechanism located below being connected to the moving chassis, a sub-moving mechanism located above being connected to the carrying body;

The sub-moving mechanism comprises a screw rod sliding rail module and a second motor for driving the screw rod module; the setting directions of the screw rod sliding rail modules in the two sub-moving mechanisms are intersected.

6. The carrier of claim 2, wherein the carrier body further comprises a housing and an openable and closable door provided on the housing, the lifting mechanism and the carrier being positioned within the housing, the door being positioned at an opening in one side of the housing for loading and unloading the carrier.

7. The carrier device of claim 2, wherein the carrier is provided with at least two positioning members for engaging the periphery of the material.

8. The carrier of claim 7, wherein the positioning member is a rod-shaped member, one end of the positioning member is fixed to the carrier, and the other end of the positioning member is formed with a chamfer.

9. The handling device of claim 2, wherein the angle detection sensor comprises two laser ranging sensors disposed on the carrier, a predetermined distance exists between the two laser ranging sensors, and a predetermined angle exists between the light emitting directions of the two laser ranging sensors.

10. The carrying device of claim 6, further comprising a vision sensor for navigation, the vision sensor being disposed outside the housing on the same side as the door.

11. The carrier device of claim 2 further comprising an in-place sensor for detecting a status of a material position on the carrier, the in-place sensor being coupled to the carrier.

12. The handling device of claim 1, wherein the alignment assembly further comprises a rotation mechanism disposed between the mobile chassis and the displacement mechanism for changing the orientation of the carrier body based on the angle measured by the angle detection sensor.

13. The carrying device according to claim 12, wherein the rotating mechanism comprises a fixed seat, a turntable rotatably sleeved outside the fixed seat, and a fifth motor for driving the turntable to rotate;

The fixed seat is connected with the movable chassis, and the rotary table is connected with the displacement mechanism.