CN220986091U - Display device - Google Patents
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
技术领域Technical Field
本公开的一些实施例的方面涉及一种显示装置。An aspect of some embodiments of the present disclosure relates to a display device.
背景技术Background technique
随着信息化社会发展,对显示装置的需求不断增加。例如,显示装置正在被诸如智能电话、数码相机、膝上型计算机、导航装置和智能电视的多种电子装置采用。显示装置可以是诸如液晶显示装置、场发射显示装置和有机发光显示装置的平板显示装置。在这样的平板显示装置之中,发光显示装置包括可以自发光的发光元件,使得显示面板的像素中的每个可以自发光。因此,发光显示装置可以在没有对显示面板供应光的背光单元的情况下显示图像。With the development of information society, the demand for display devices is increasing. For example, display devices are being adopted by a variety of electronic devices such as smart phones, digital cameras, laptop computers, navigation devices and smart TVs. The display device can be a flat panel display device such as a liquid crystal display device, a field emission display device and an organic light emitting display device. Among such flat panel display devices, the light emitting display device includes a light emitting element that can emit light by itself, so that each of the pixels of the display panel can emit light by itself. Therefore, the light emitting display device can display an image without a backlight unit that supplies light to the display panel.
显示装置可以包括显示图像的显示区域和在显示区域周围的非显示区域。最近,为了观看者更多地沉浸在显示区域上显示的内容中并增加显示装置的美观性,非显示区域的宽度不断减小。The display device may include a display area displaying an image and a non-display area around the display area. Recently, in order to immerse viewers more in the content displayed on the display area and to increase the aesthetics of the display device, the width of the non-display area has been continuously reduced.
顺便提及,在制造显示装置的工艺中,可以通过沿着形成在母基底上的多个显示单元切割母基底来形成显示装置。例如,可以通过在母基底上切割显示装置来形成显示装置中的通孔,其中诸如相机的光学器件定位在通孔中。在形成通孔的工艺中,通孔的附近的膜可能由于激光的高热量而损坏,例如,分层。因此,存在减少对这种显示装置的损坏的方法。By the way, in the process of manufacturing a display device, a display device can be formed by cutting a mother substrate along a plurality of display units formed on a mother substrate. For example, a through hole in a display device can be formed by cutting the display device on a mother substrate, wherein an optical device such as a camera is positioned in the through hole. In the process of forming the through hole, a film near the through hole may be damaged, for example, delaminated, due to the high heat of the laser. Therefore, there is a method of reducing damage to such a display device.
在该背景技术部分中公开的上述信息仅用于增强对背景技术的理解,因此在该背景技术部分中讨论的信息不必构成现有技术。The above information disclosed in this Background section is only for enhancement of understanding of the background technology and therefore the information discussed in this Background section does not necessarily constitute prior art.
实用新型内容Utility Model Content
本实用新型的目的在于提供一种可以减少对显示装置的损坏的显示装置。The utility model aims to provide a display device which can reduce damage to the display device.
应当注意的是,根据本公开的实施例的特性不限于上述特性;并且通过以下描述,本公开的其他特性对于本领域技术人员而言将是明显的。It should be noted that the characteristics of the embodiments according to the present disclosure are not limited to the above-mentioned characteristics; and other characteristics of the present disclosure will be apparent to those skilled in the art through the following description.
根据一些实施例,一种显示装置包括基底,基底包括承载发光元件的上表面、面向上表面的底表面以及穿透上表面和底表面的通孔;其中,基底包括:侧表面,在通孔中与上表面相交;第一表面,与底表面相交;第二表面,与侧表面相交;以及第三表面,在第一表面与第二表面之间,并且其中,第一表面和第二表面彼此间隔开,且第三表面在第一表面与第二表面之间,并且第一表面和第二表面是倾斜表面。According to some embodiments, a display device includes a substrate, the substrate including an upper surface carrying a light-emitting element, a bottom surface facing the upper surface, and a through hole penetrating the upper surface and the bottom surface; wherein the substrate includes: a side surface intersecting with the upper surface in the through hole; a first surface intersecting with the bottom surface; a second surface intersecting with the side surface; and a third surface between the first surface and the second surface, and wherein the first surface and the second surface are spaced apart from each other, and the third surface is between the first surface and the second surface, and the first surface and the second surface are inclined surfaces.
根据一些实施例,第三表面的一端与第一表面相交,第三表面的相对端与第二表面相交。According to some embodiments, one end of the third surface intersects the first surface, and an opposite end of the third surface intersects the second surface.
根据一些实施例,底表面与第一表面之间的角度和第三表面与第二表面之间的角度是钝角。According to some embodiments, an angle between the bottom surface and the first surface and an angle between the third surface and the second surface are obtuse angles.
根据一些实施例,表面与第一表面之间的角度等于、大于或小于第三表面与第二表面之间的角度。According to some embodiments, the angle between the surface and the first surface is equal to, greater than, or less than the angle between the third surface and the second surface.
根据一些实施例,第一表面在倾斜方向上的长度等于、大于或小于第二表面在倾斜方向上的长度。According to some embodiments, a length of the first surface in the inclined direction is equal to, greater than, or less than a length of the second surface in the inclined direction.
根据一些实施例,第三表面与底表面或上表面平行地延伸;或者,第三表面是倾斜表面。According to some embodiments, the third surface extends parallel to the bottom surface or the upper surface; or, the third surface is an inclined surface.
根据一些实施例,第一表面和第二表面中的至少一个是平坦表面或弯曲表面。According to some embodiments, at least one of the first surface and the second surface is a flat surface or a curved surface.
根据一些实施例,在由第一表面、第二表面和第三表面形成的平面上在底表面与侧表面之间的长度为100μm至500μm。According to some embodiments, a length between the bottom surface and the side surface on a plane formed by the first surface, the second surface, and the third surface is 100 μm to 500 μm.
根据一些实施例,一种显示装置包括基底,基底包括承载发光元件的上表面、面向上表面的底表面以及穿透上表面和底表面的通孔,其中,基底包括:侧表面,在通孔中与上表面相交;第一表面,与底表面相交;第二表面,与侧表面相交;以及第三表面,在第一表面与第二表面之间,其中,底表面与第一表面之间的角度和第三表面与第二表面之间的角度是钝角,并且其中,底表面和第三表面形成台阶边缘。According to some embodiments, a display device includes a substrate, the substrate including an upper surface carrying a light-emitting element, a bottom surface facing the upper surface, and a through hole penetrating the upper surface and the bottom surface, wherein the substrate includes: a side surface intersecting with the upper surface in the through hole; a first surface intersecting with the bottom surface; a second surface intersecting with the side surface; and a third surface between the first surface and the second surface, wherein an angle between the bottom surface and the first surface and an angle between the third surface and the second surface are obtuse angles, and wherein the bottom surface and the third surface form a step edge.
根据一些实施例,显示装置还包括:光学器件,至少部分地嵌入到通孔中。According to some embodiments, the display device further includes: an optical device at least partially embedded in the through hole.
根据本公开的一些实施例,一种显示装置包括基底和发光元件层,基底包括上表面、面向上表面的底表面以及穿透上表面和底表面的通孔,发光元件层在基底的上表面上,其中,基底包括:侧表面,在通孔中与上表面相交;第一表面,与底表面相交;第二表面,与侧表面相交;以及第三表面,在第一表面与第二表面之间,并且其中,第一表面和第二表面彼此间隔开,且第三表面在第一表面与第二表面之间,并且第一表面和第二表面是倾斜表面。According to some embodiments of the present disclosure, a display device includes a substrate and a light-emitting element layer, the substrate includes an upper surface, a bottom surface facing the upper surface, and a through hole penetrating the upper surface and the bottom surface, the light-emitting element layer is on the upper surface of the substrate, wherein the substrate includes: a side surface intersecting with the upper surface in the through hole; a first surface intersecting with the bottom surface; a second surface intersecting with the side surface; and a third surface between the first surface and the second surface, and wherein the first surface and the second surface are spaced apart from each other, and the third surface is between the first surface and the second surface, and the first surface and the second surface are inclined surfaces.
根据一些实施例,第三表面的一端与第一表面相交,并且第三表面的相对端与第二表面相交。According to some embodiments, one end of the third surface intersects the first surface, and an opposite end of the third surface intersects the second surface.
根据一些实施例,底表面与第一表面之间的角度和第三表面与第二表面之间的角度是钝角。According to some embodiments, an angle between the bottom surface and the first surface and an angle between the third surface and the second surface are obtuse angles.
根据一些实施例,底表面与第一表面之间的角度等于第三表面与第二表面之间的角度。According to some embodiments, an angle between the bottom surface and the first surface is equal to an angle between the third surface and the second surface.
根据一些实施例,底表面与第一表面之间的角度大于第三表面与第二表面之间的角度。According to some embodiments, an angle between the bottom surface and the first surface is greater than an angle between the third surface and the second surface.
根据一些实施例,第三表面与第二表面之间的角度大于底表面与第一表面之间的角度。According to some embodiments, an angle between the third surface and the second surface is greater than an angle between the bottom surface and the first surface.
根据一些实施例,第一表面在倾斜方向上的长度等于第二表面在倾斜方向上的长度。According to some embodiments, a length of the first surface in the inclined direction is equal to a length of the second surface in the inclined direction.
根据一些实施例,第一表面在倾斜方向上的长度大于第二表面在倾斜方向上的长度。According to some embodiments, a length of the first surface in the inclined direction is greater than a length of the second surface in the inclined direction.
根据一些实施例,第二表面在倾斜方向上的长度大于第一表面在倾斜方向上的长度。According to some embodiments, a length of the second surface in the inclined direction is greater than a length of the first surface in the inclined direction.
根据一些实施例,第三表面与底表面或上表面平行地延伸。According to some embodiments, the third surface extends parallel to the bottom surface or the upper surface.
根据一些实施例,第三表面是倾斜表面。According to some embodiments, the third surface is an inclined surface.
根据一些实施例,第一表面和第二表面中的至少一个是平坦表面或弯曲表面。According to some embodiments, at least one of the first surface and the second surface is a flat surface or a curved surface.
根据一些实施例,在由第一表面、第二表面和第三表面形成的平面上在底表面与侧表面之间的长度为100μm至500μm。According to some embodiments, a length between the bottom surface and the side surface on a plane formed by the first surface, the second surface, and the third surface is 100 μm to 500 μm.
根据本公开的一些实施例,一种显示装置包括基底和发光元件层,基底包括上表面、面向上表面的底表面以及穿透上表面和底表面的通孔,发光元件层在基底的上表面上,其中,基底包括:侧表面,在通孔中与上表面相交;第一表面,与底表面相交;第二表面,与侧表面相交;以及第三表面,在第一表面与第二表面之间,其中,底表面与第一表面之间的角度和第三表面与第二表面之间的角度是钝角,并且其中,底表面和第三表面形成台阶边缘。According to some embodiments of the present disclosure, a display device includes a substrate and a light-emitting element layer, the substrate includes an upper surface, a bottom surface facing the upper surface, and a through hole penetrating the upper surface and the bottom surface, the light-emitting element layer is on the upper surface of the substrate, wherein the substrate includes: a side surface intersecting with the upper surface in the through hole; a first surface intersecting with the bottom surface; a second surface intersecting with the side surface; and a third surface between the first surface and the second surface, wherein the angle between the bottom surface and the first surface and the angle between the third surface and the second surface are obtuse angles, and wherein the bottom surface and the third surface form a step edge.
根据一些实施例,底表面与第一表面之间的角度大于第三表面与第二表面之间的角度。According to some embodiments, an angle between the bottom surface and the first surface is greater than an angle between the third surface and the second surface.
根据一些实施例,第一表面在倾斜方向上的长度大于第二表面在倾斜方向上的长度。According to some embodiments, a length of the first surface in the inclined direction is greater than a length of the second surface in the inclined direction.
根据一些实施例,在由第一表面、第二表面和第三表面形成的平面上在底表面与侧表面之间的长度为100μm至500μm。According to some embodiments, a length between the bottom surface and the side surface on a plane formed by the first surface, the second surface, and the third surface is 100 μm to 500 μm.
根据一些实施例,显示装置还包括:至少部分地嵌入到通孔中的光学器件。According to some embodiments, the display device further includes: an optical device at least partially embedded in the through hole.
根据本公开的一些实施例,一种制造显示装置的方法包括以下步骤:在母基底的第一表面上形成多个显示单元;通过在母基底的面向第一表面的第二表面上照射第一激光来形成用于切割多个显示单元的第一激光照射区域;在母基底的第二表面上照射第二激光和第三激光,以沿着多个显示单元中的每个显示单元的通孔的边缘形成第二激光照射区域和第三激光照射区域;以及通过在母基底的第二表面上喷射蚀刻剂并沿着母基底的第一激光照射区域和第二激光照射区域切割母基底来使多个显示单元分离。According to some embodiments of the present disclosure, a method for manufacturing a display device includes the following steps: forming a plurality of display units on a first surface of a mother substrate; forming a first laser irradiation area for cutting the plurality of display units by irradiating a first laser on a second surface of the mother substrate facing the first surface; irradiating a second laser and a third laser on the second surface of the mother substrate to form a second laser irradiation area and a third laser irradiation area along the edge of a through hole of each of the plurality of display units; and separating the plurality of display units by spraying an etchant on the second surface of the mother substrate and cutting the mother substrate along the first laser irradiation area and the second laser irradiation area of the mother substrate.
根据一些实施例,第三激光照射区域被形成为围绕第二激光照射区域。According to some embodiments, the third laser irradiation region is formed to surround the second laser irradiation region.
根据一些实施例,第二激光照射区域距母基底的第一表面的深度大于第三激光照射区域距母基底的第一表面的深度。According to some embodiments, a depth of the second laser irradiation region from the first surface of the mother substrate is greater than a depth of the third laser irradiation region from the first surface of the mother substrate.
根据一些实施例,第一激光和第三激光的重复率在10kHz至250kHz的范围内,并且第二激光的重复率在1kHz至50kHz的范围内。According to some embodiments, the repetition rate of the first laser and the third laser is in the range of 10 kHz to 250 kHz, and the repetition rate of the second laser is in the range of 1 kHz to 50 kHz.
根据一些实施例,第一激光和第三激光的处理速度在10mm/s至250mm/s的范围内,并且第二激光的处理速度在1mm/s至50mm/s的范围内。According to some embodiments, the processing speeds of the first laser and the third laser are in the range of 10 mm/s to 250 mm/s, and the processing speed of the second laser is in the range of 1 mm/s to 50 mm/s.
根据一些实施例,第一激光和第三激光的脉冲能量以及第二激光的脉冲能量在10μJ至300μJ的范围内。According to some embodiments, the pulse energies of the first and third lasers and the pulse energy of the second laser are in a range of 10 μJ to 300 μJ.
根据一些实施例,该方法还包括:通过沿着通孔的边缘在与第二激光照射区域间隔开并且在第二激光照射区域的内侧上的位置处照射第四激光来形成第四激光照射区域。According to some embodiments, the method further includes forming a fourth laser irradiation region by irradiating a fourth laser along an edge of the through hole at a position spaced apart from the second laser irradiation region and on an inner side of the second laser irradiation region.
根据本公开的一些实施例,通过照射激光然后喷射蚀刻剂的方式,以下可以是可能的:减小母基底的厚度,将多个显示单元中的每个与母基底分开,并且形成贯通中空。以这种方式,提高制造工艺的效率可以是可能的。According to some embodiments of the present disclosure, by irradiating laser and then spraying etchant, it may be possible to reduce the thickness of the mother substrate, separate each of the plurality of display units from the mother substrate, and form a through hollow. In this way, it may be possible to improve the efficiency of the manufacturing process.
另外,通过在显示装置的通孔中减小基底的侧表面的边缘的角度,可以改善基底的耐冲击性。In addition, by reducing the angle of the edge of the side surface of the substrate in the through hole of the display device, the impact resistance of the substrate may be improved.
另外,可以在显示装置的通孔处相对容易地使基底与母基底分离,从而防止或减少对基底的损坏。In addition, the substrate may be relatively easily separated from the mother substrate at the through hole of the display device, thereby preventing or reducing damage to the substrate.
另外,防止或减少由于激光的高热量而对显示装置的通孔附近的损坏可以是可能的。In addition, it may be possible to prevent or reduce damage near the through hole of the display device due to high heat of the laser.
应当注意的是,根据本公开的实施例的特性不限于上述那些,并且通过以下描述,本公开的其他效果对于本领域技术人员而言将是明显的。It should be noted that the characteristics according to the embodiments of the present disclosure are not limited to those described above, and other effects of the present disclosure will be apparent to those skilled in the art through the following description.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
通过参照附图更详细地描述根据本公开的实施例的一些实施例的方面,根据本公开的实施例的上述和其他方面及特征将变得更加明显。The above and other aspects and features according to embodiments of the present disclosure will become more apparent by describing in more detail aspects of some embodiments according to embodiments of the present disclosure with reference to the accompanying drawings.
图1是根据本公开的一些实施例的显示装置的透视图。FIG. 1 is a perspective view of a display device according to some embodiments of the present disclosure.
图2是示出根据本公开的一些实施例的显示面板的平面图。FIG. 2 is a plan view showing a display panel according to some embodiments of the present disclosure.
图3是示出沿着图1的线I-I'截取的显示装置的示例的剖视图。FIG. 3 is a cross-sectional view illustrating an example of the display device taken along line II′ of FIG. 1 .
图4是示出当电路板弯曲时图3的显示像素的示例的剖视图。FIG. 4 is a cross-sectional view illustrating an example of the display pixel of FIG. 3 when a circuit board is bent.
图5是示出根据本公开的一些实施例的显示面板的显示区域的示例的剖视图。FIG. 5 is a cross-sectional view illustrating an example of a display area of a display panel according to some embodiments of the present disclosure.
图6是更详细地示出图2的区域A的示例的布局图。FIG. 6 is a layout diagram illustrating an example of the region A of FIG. 2 in more detail.
图7是更详细地示出图2的区域B的示例的布局图。FIG. 7 is a layout diagram illustrating an example of the region B of FIG. 2 in more detail.
图8是更详细地示出图2的区域D的示例的布局图。FIG. 8 is a layout diagram illustrating an example of the region D of FIG. 2 in more detail.
图9是示出沿着图6的线II-II'截取的显示面板的示例的剖视图。FIG. 9 is a cross-sectional view illustrating an example of a display panel taken along line II-II′ of FIG. 6 .
图10是示出沿着图7的线III-III'截取的显示面板的示例的剖视图。FIG. 10 is a cross-sectional view illustrating an example of a display panel taken along line III-III′ of FIG. 7 .
图11是示出沿着图8的线IV-IV'截取的显示面板的示例的剖视图。FIG. 11 is a cross-sectional view illustrating an example of a display panel taken along line IV-IV′ of FIG. 8 .
图12是更详细地示出图9的区域E的示例的放大剖视图。FIG. 12 is an enlarged cross-sectional view showing an example of the region E of FIG. 9 in more detail.
图13是更详细地示出图10的区域F的示例的放大剖视图。FIG. 13 is an enlarged cross-sectional view showing an example of the region F of FIG. 10 in more detail.
图14是更详细地示出图11的区域G的示例的放大剖视图。FIG. 14 is an enlarged cross-sectional view showing an example of the region G of FIG. 11 in more detail.
图15是示出根据一些实施例的图2的区域I的显示面板的通孔、无机封装区域、布线区域和显示区域的示例的布局图。15 is a layout diagram illustrating an example of a through hole, an inorganic encapsulation region, a wiring region, and a display region of a display panel of region I of FIG. 2 according to some embodiments.
图16是示出沿着图15的线V-V'截取的显示面板的示例的剖视图。FIG. 16 is a cross-sectional view illustrating an example of a display panel taken along line VV′ of FIG. 15 .
图17是更详细地示出图16的区域K的示例的放大剖视图。FIG. 17 is an enlarged cross-sectional view showing an example of the region K of FIG. 16 in more detail.
图18至图22是示出图16的区域L的各种示例的放大剖视图。18 to 22 are enlarged cross-sectional views showing various examples of the region L of FIG. 16 .
图23是用于示出根据本公开的一些实施例的制造显示装置的方法的流程图。FIG. 23 is a flowchart for illustrating a method of manufacturing a display device according to some embodiments of the present disclosure.
图24至图39是用于示出根据本公开的一些实施例的制造显示装置的方法的视图。24 to 39 are views for illustrating a method of manufacturing a display device according to some embodiments of the present disclosure.
图40至图42是用于示出根据本公开的一些实施例的制造显示装置的方法的剖视图。40 to 42 are cross-sectional views for illustrating a method of manufacturing a display device according to some embodiments of the present disclosure.
图43是示出根据对比示例的显示装置的通孔的图像。FIG. 43 is an image showing a through hole of a display device according to a comparative example.
图44是示出根据本公开的一些实施例的显示装置的通孔的图像。FIG. 44 is an image showing a through hole of a display device according to some embodiments of the present disclosure.
具体实施方式Detailed ways
现在将在下文中参照附图更充分地描述本公开,在附图中示出了实用新型的一些实施例的方面。然而,本实用新型可以以不同的形式实施,并且不应被解释为限于这里阐述的实施例。相反,提供这些实施例使得本公开将是彻底的和完整的,并且将向本领域技术人员充分地传达实用新型的范围。The present disclosure will now be described more fully below with reference to the accompanying drawings, in which aspects of some embodiments of the utility model are shown. However, the utility model can be implemented in different forms and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that the present disclosure will be thorough and complete, and will fully convey the scope of the utility model to those skilled in the art.
还将理解的是,当层被称为“在”另一层或基底“上”时,所述层可以直接在所述另一层或基底上,或者也可以存在居间层。在整个说明书中,相同的附图标记表示相同的组件。It will also be understood that when a layer is referred to as being “on” another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present. Throughout the specification, the same reference numerals refer to the same components.
将理解的是,尽管这里可以使用术语“第一”、“第二”等来描述各种元件,但是这些元件不应受这些术语限制。这些术语仅用于将一个元件与另一元件区分开。例如,在不脱离本公开的教导的情况下,下面讨论的第一元件可以被称为第二元件。类似地,第二元件也可以被称为第一元件。It will be understood that although the terms "first", "second", etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, without departing from the teachings of the present disclosure, the first element discussed below may be referred to as the second element. Similarly, the second element may also be referred to as the first element.
本公开的各种实施例的特征中的每个可以部分地或全部地组合或彼此组合,并且在技术上各种互锁和驱动是可能的。每个实施例可以彼此独立地实现,或者可以关联地一起实现。Each of the features of the various embodiments of the present disclosure can be combined in part or in whole or in combination with each other, and various interlocks and drives are technically possible. Each embodiment can be implemented independently of each other, or can be implemented together in association.
在下文中,将参照附图更详细地描述本公开的一些实施例的方面。Hereinafter, aspects of some embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings.
图1是根据本公开的一些实施例的显示装置的透视图。图2是示出根据本公开的一些实施例的显示面板的平面图。Fig. 1 is a perspective view of a display device according to some embodiments of the present disclosure. Fig. 2 is a plan view showing a display panel according to some embodiments of the present disclosure.
参照图1和图2,根据本公开的一些实施例的显示装置10用于显示运动图像或静止图像。显示装置10可以用作诸如移动电话、智能电话、平板PC、智能手表、手表电话、移动通信终端、电子笔记本、电子书、便携式多媒体播放器(PMP)、导航装置和超移动PC(UMPC)的便携式电子装置的显示屏幕,以及诸如电视、笔记本、监视器、广告牌和物联网装置的各种产品的显示屏幕。1 and 2, the display device 10 according to some embodiments of the present disclosure is used to display a moving image or a still image. The display device 10 can be used as a display screen of a portable electronic device such as a mobile phone, a smart phone, a tablet PC, a smart watch, a watch phone, a mobile communication terminal, an electronic notebook, an electronic book, a portable multimedia player (PMP), a navigation device, and an ultra mobile PC (UMPC), as well as a display screen of various products such as a television, a notebook, a monitor, a billboard, and an Internet of Things device.
根据本公开的一些实施例,显示装置10可以是诸如使用有机发光二极管的有机发光显示装置、包括量子点发光层的量子点发光显示装置、包括无机半导体的无机发光显示装置以及使用微米或纳米发光二极管(微米LED或纳米LED)的微LED显示装置的发光显示装置。在以下描述中,有机发光显示装置被描述为显示装置10的示例。然而,将要理解的是,根据本公开的实施例不限于此。According to some embodiments of the present disclosure, the display device 10 may be a light-emitting display device such as an organic light-emitting display device using an organic light-emitting diode, a quantum dot light-emitting display device including a quantum dot light-emitting layer, an inorganic light-emitting display device including an inorganic semiconductor, and a micro-LED display device using a micro- or nano-light-emitting diode (micro-LED or nano-LED). In the following description, the organic light-emitting display device is described as an example of the display device 10. However, it will be understood that the embodiments according to the present disclosure are not limited thereto.
根据一些实施例的显示装置10包括显示面板100、驱动集成电路(IC)200和电路板300。The display device 10 according to some embodiments includes a display panel 100 , a driving integrated circuit (IC) 200 , and a circuit board 300 .
显示面板100可以形成为矩形平面,矩形平面具有在第一方向(X轴方向)上的长边和在与第一方向(X轴方向)相交的第二方向(Y轴方向)上的短边。第一方向(X轴方向)上的长边与第二方向(Y轴方向)上的短边交汇的拐角中的每个可以形成为直角,或者可以是具有曲率的圆形(倒圆)。当从顶部观看时,显示面板100的形状不限于四边形形状,而是可以形成为不同的多边形形状、圆形形状或椭圆形形状。The display panel 100 may be formed as a rectangular plane having a long side in a first direction (X-axis direction) and a short side in a second direction (Y-axis direction) intersecting the first direction (X-axis direction). Each of the corners where the long side in the first direction (X-axis direction) and the short side in the second direction (Y-axis direction) meet may be formed as a right angle, or may be rounded (rounded) with a curvature. When viewed from the top, the shape of the display panel 100 is not limited to a quadrilateral shape, but may be formed in various polygonal shapes, circular shapes, or elliptical shapes.
显示面板100可以形成为平坦的,但不限于此。例如,显示面板100可以形成为在左端和右端处包括具有恒定曲率或变化曲率的弯曲部分。另外,显示面板100可以是柔性的,使得其可以弯曲、弯折、折叠或卷曲。The display panel 100 may be formed to be flat, but is not limited thereto. For example, the display panel 100 may be formed to include curved portions having a constant curvature or a varying curvature at the left and right ends. In addition, the display panel 100 may be flexible so that it can be bent, curved, folded, or rolled.
显示面板100可以包括显示图像的显示区域DA和布置在显示区域DA周围(例如,在显示区域DA的外围区域中,或者在显示区域DA的占用面积外部)的非显示区域NDA。The display panel 100 may include a display area DA displaying an image and a non-display area NDA arranged around the display area DA (eg, in a peripheral area of the display area DA, or outside an occupied area of the display area DA).
显示区域DA可以占据显示面板100的大部分区域。显示区域DA可以定位在显示面板100的中心处。在显示区域DA中,可以形成各自包括多个发射区域的像素以显示图像。The display area DA may occupy most of the area of the display panel 100. The display area DA may be positioned at the center of the display panel 100. In the display area DA, pixels each including a plurality of emission areas may be formed to display an image.
非显示区域NDA可以定位为与显示区域DA相邻(例如,在显示区域DA的占用面积外部,或者在显示区域DA的外围中)。非显示区域NDA可以定位在显示区域DA的外侧上。非显示区域NDA可以围绕显示区域DA。非显示区域NDA可以限定为显示面板100的边界。The non-display area NDA may be positioned adjacent to the display area DA (e.g., outside the occupied area of the display area DA, or in the periphery of the display area DA). The non-display area NDA may be positioned on the outside of the display area DA. The non-display area NDA may surround the display area DA. The non-display area NDA may be defined as a boundary of the display panel 100.
在非显示区域NDA中,显示垫(pad,又称为“焊盘”或“焊垫”)PD可以布置为连接到电路板300。显示垫PD可以定位在显示面板100的一个边缘处。例如,显示垫PD可以定位在显示面板100的下边缘处。In the non-display area NDA, a display pad (also called a "pad" or "solder pad") PD may be arranged to be connected to the circuit board 300. The display pad PD may be positioned at one edge of the display panel 100. For example, the display pad PD may be positioned at the lower edge of the display panel 100.
驱动集成电路(IC)200可以生成数据电压、电源电压、扫描时序信号等。驱动IC200可以输出数据电压、电源电压、扫描时序信号等。The driving integrated circuit (IC) 200 may generate a data voltage, a power voltage, a scan timing signal, etc. The driving IC 200 may output a data voltage, a power voltage, a scan timing signal, etc.
驱动IC 200可以在非显示区域NDA中定位在显示垫PD与显示区域DA之间。驱动IC200中的每个可以通过玻璃上芯片(COG)技术附着到显示面板100的非显示区域NDA。可选地,驱动IC 200可以通过塑料上芯片(COP)技术分别附着到电路板300。The driver IC 200 may be positioned between the display pad PD and the display area DA in the non-display area NDA. Each of the driver ICs 200 may be attached to the non-display area NDA of the display panel 100 by a chip on glass (COG) technology. Alternatively, the driver ICs 200 may be attached to the circuit board 300 by a chip on plastic (COP) technology, respectively.
电路板300可以定位在定位于显示面板100的一个边缘处的显示垫PD上。电路板300可以使用诸如各向异性导电膜和各向异性导电粘合剂的导电粘合构件附着到显示垫PD。因此,电路板300可以电连接到显示面板100的信号线。电路板300可以是柔性印刷电路板、诸如膜上芯片的柔性膜。The circuit board 300 may be positioned on the display pad PD positioned at one edge of the display panel 100. The circuit board 300 may be attached to the display pad PD using a conductive adhesive member such as an anisotropic conductive film and an anisotropic conductive adhesive. Thus, the circuit board 300 may be electrically connected to a signal line of the display panel 100. The circuit board 300 may be a flexible printed circuit board, a flexible film such as a chip on film.
弯曲区域BA可以在非显示区域NDA中定位在驱动IC 200与显示区域DA之间。弯曲区域BA可以弯曲,使得驱动IC 200和电路板300定位在基底SUB(见图3)下方。The bending area BA may be positioned between the driving IC 200 and the display area DA in the non-display area NDA. The bending area BA may be bent so that the driving IC 200 and the circuit board 300 are positioned under the substrate SUB (see FIG. 3 ).
通孔TH可以形成在显示区域DA的一侧处。通孔TH可以透射光,光学器件可以定位在通孔TH中。A through hole TH may be formed at one side of the display area DA. The through hole TH may transmit light, and an optical device may be positioned in the through hole TH.
图3是示出沿着图1的线I-I'截取的显示装置的示例的剖视图。图4是示出当电路板弯曲时图3的显示像素的示例的剖视图。参照图3,根据一些实施例的显示装置10可以包括显示面板100、偏振膜PF、覆盖窗CW和面板底盖PB。显示面板100可以包括基底SUB、显示层DISL、封装层ENC和传感器电极层SENL。FIG3 is a cross-sectional view showing an example of a display device taken along line II' of FIG1. FIG4 is a cross-sectional view showing an example of a display pixel of FIG3 when a circuit board is bent. Referring to FIG3, a display device 10 according to some embodiments may include a display panel 100, a polarizing film PF, a cover window CW, and a panel bottom cover PB. The display panel 100 may include a substrate SUB, a display layer DISL, an encapsulation layer ENC, and a sensor electrode layer SENL.
基底SUB是刚性基底,并且可以是例如玻璃基底。The substrate SUB is a rigid substrate, and may be, for example, a glass substrate.
显示层DISL可以定位在基底SUB的第一表面上。显示层DISL可以显示图像。显示层DISL可以包括其中形成有薄膜晶体管的薄膜晶体管层TFTL(见图5)和其中发射光的发光元件定位在发射区域中的发光元件层EML(见图5)。The display layer DISL may be positioned on the first surface of the substrate SUB. The display layer DISL may display an image. The display layer DISL may include a thin film transistor layer TFTL (see FIG. 5 ) in which a thin film transistor is formed and a light emitting element layer EML (see FIG. 5 ) in which a light emitting element emitting light is positioned in an emission region.
在显示层DISL的显示区域DA中,可以布置扫描线、数据线、电压线等,使得在发射区域中发射光。在显示层DISL的非显示区域NDA中,可以布置将扫描信号输出到扫描线的扫描驱动电路、将数据线与驱动IC 200连接的扇出线等。In the display area DA of the display layer DISL, scan lines, data lines, voltage lines, etc. may be arranged so that light is emitted in the emission area. In the non-display area NDA of the display layer DISL, a scan driving circuit that outputs a scan signal to the scan line, a fan-out line that connects the data line to the driver IC 200, etc. may be arranged.
封装层ENC可以封装显示层DISL的发光元件层EML,以防止或减少氧或湿气渗透到显示层DISL的发光元件层EML中的情况。封装层ENC可以定位在显示层DISL上。封装层ENC可以定位在显示层DISL的上表面和侧表面上。封装层ENC可以布置为覆盖显示层DISL。The encapsulation layer ENC may encapsulate the light emitting element layer EML of the display layer DISL to prevent or reduce the penetration of oxygen or moisture into the light emitting element layer EML of the display layer DISL. The encapsulation layer ENC may be positioned on the display layer DISL. The encapsulation layer ENC may be positioned on the upper surface and the side surface of the display layer DISL. The encapsulation layer ENC may be arranged to cover the display layer DISL.
传感器电极层SENL可以定位在封装层ENC上。传感器电极层SENL可以包括传感器电极。传感器电极层SENL可以使用传感器电极来感测用户的触摸。The sensor electrode layer SENL may be positioned on the encapsulation layer ENC. The sensor electrode layer SENL may include sensor electrodes. The sensor electrode layer SENL may sense a user's touch using the sensor electrodes.
偏振膜PF可以定位在传感器电极层SENL上。偏振膜PF可以定位在显示面板100上,以减少外部光的反射。偏振膜PF可以包括第一基体构件、线性偏振器、延迟膜(诸如λ/4(四分之一波)片)和第二基体构件。偏振膜PF的第一基体构件、延迟膜、线性偏振器和第二基体构件可以顺序地堆叠在显示面板100上。The polarizing film PF may be positioned on the sensor electrode layer SENL. The polarizing film PF may be positioned on the display panel 100 to reduce reflection of external light. The polarizing film PF may include a first base member, a linear polarizer, a retardation film (such as a λ/4 (quarter wave) plate), and a second base member. The first base member, the retardation film, the linear polarizer, and the second base member of the polarizing film PF may be sequentially stacked on the display panel 100.
覆盖窗CW可以定位在偏振膜PF上。覆盖窗CW可以通过透明粘合构件(诸如光学透明粘合剂(OCA)膜)附着到偏振膜PF上。The cover window CW may be positioned on the polarizing film PF. The cover window CW may be attached to the polarizing film PF by a transparent adhesive member such as an optically clear adhesive (OCA) film.
面板底盖PB可以定位在显示面板100的基底SUB的第二表面上。基底SUB的第二表面可以与第一表面相对。面板底盖PB可以通过粘合构件附着到显示面板100的基底SUB的第二表面。粘合构件可以是压敏粘合剂(PSA)。The panel cover bottom PB may be positioned on the second surface of the substrate SUB of the display panel 100. The second surface of the substrate SUB may be opposite to the first surface. The panel cover bottom PB may be attached to the second surface of the substrate SUB of the display panel 100 by an adhesive member. The adhesive member may be a pressure sensitive adhesive (PSA).
面板底盖PB可以包括以下中的至少一个:用于吸收从外部入射的光的光阻挡构件、用于吸收外部冲击的缓冲构件和用于有效地从显示面板100排出热量的散热构件。The panel cover bottom PB may include at least one of a light blocking member for absorbing light incident from the outside, a buffer member for absorbing external impact, and a heat dissipation member for effectively discharging heat from the display panel 100 .
光阻挡构件可以定位在显示面板100下方。光阻挡构件阻挡光的透射,以防止或减少从显示面板100上方看到定位在其下方的元件(诸如电路板300)的情况。光阻挡构件可以包括诸如黑色颜料和黑色染料的吸光材料。The light blocking member may be positioned below the display panel 100. The light blocking member blocks transmission of light to prevent or reduce viewing of elements positioned below the display panel 100, such as the circuit board 300, from above the display panel 100. The light blocking member may include a light absorbing material such as a black pigment and a black dye.
缓冲构件可以定位在光阻挡构件下方。缓冲构件吸收外部冲击,以防止或减少对显示面板100的损坏。缓冲构件可以由单层或多层构成。例如,缓冲构件可以由诸如聚氨酯、聚碳酸酯、聚丙烯和聚乙烯的聚合物树脂形成,或者可以由具有弹性的材料(诸如橡胶和通过使氨基甲酸乙酯类材料或丙烯酸类材料发泡而获得的海绵)形成。The buffer member may be positioned below the light blocking member. The buffer member absorbs external impact to prevent or reduce damage to the display panel 100. The buffer member may be composed of a single layer or multiple layers. For example, the buffer member may be formed of a polymer resin such as polyurethane, polycarbonate, polypropylene, and polyethylene, or may be formed of a material having elasticity such as rubber and a sponge obtained by foaming a urethane material or an acrylic material.
散热构件可以定位在缓冲构件下方。散热构件可以包括第一散热层和第二散热层,第一散热层包括石墨或碳纳米管,第二散热层由可以阻挡电磁波并具有高热导性的薄金属膜(诸如铜、镍、铁素体和银)形成。The heat dissipation member may be positioned below the buffer member. The heat dissipation member may include a first heat dissipation layer including graphite or carbon nanotubes and a second heat dissipation layer formed of a thin metal film (such as copper, nickel, ferrite, and silver) that can block electromagnetic waves and has high thermal conductivity.
驱动IC 200和电路板300可以弯曲,使得它们定位在显示面板100下方。电路板300可以通过粘合构件310附着到面板底盖PB的下表面(或底表面)。粘合构件310可以是压敏粘合剂。The driving IC 200 and the circuit board 300 may be bent so that they are positioned below the display panel 100. The circuit board 300 may be attached to the lower surface (or bottom surface) of the panel cover bottom PB by an adhesive member 310. The adhesive member 310 may be a pressure sensitive adhesive.
根据一些实施例,通孔TH可以形成在显示装置10中。通孔TH可以使光通过其穿过,并且可以是穿透面板底盖PB和偏振膜PF以及显示面板100的物理孔。然而,应当理解的是,根据本公开的实施例不限于此。通孔TH可以穿透面板底盖PB,但是可以不穿透显示面板100或偏振膜PF。覆盖窗CW可以布置为覆盖通孔TH。According to some embodiments, a through hole TH may be formed in the display device 10. The through hole TH may allow light to pass therethrough, and may be a physical hole that penetrates the panel bottom cover PB and the polarizing film PF as well as the display panel 100. However, it should be understood that the embodiments according to the present disclosure are not limited thereto. The through hole TH may penetrate the panel bottom cover PB, but may not penetrate the display panel 100 or the polarizing film PF. The cover window CW may be arranged to cover the through hole TH.
通孔TH可以穿透显示面板100的基底SUB、显示层DISL、封装层ENC和传感器电极层SENL。The through holes TH may penetrate the substrate SUB, the display layer DISL, the encapsulation layer ENC, and the sensor electrode layer SENL of the display panel 100 .
根据一些实施例的包括显示装置10的电子装置还可以包括定位在通孔TH中的光学器件OPD。光学器件OPD可以与显示面板100、面板底盖PB和偏振膜PF间隔开。光学器件OPD可以是感测通过通孔TH入射的光的光学传感器(诸如接近传感器、照度传感器和相机传感器)。The electronic device including the display device 10 according to some embodiments may further include an optical device OPD positioned in the through hole TH. The optical device OPD may be spaced apart from the display panel 100, the panel bottom cover PB, and the polarizing film PF. The optical device OPD may be an optical sensor (such as a proximity sensor, an illumination sensor, and a camera sensor) that senses light incident through the through hole TH.
图5是示出根据本公开的一些实施例的显示面板的显示区域的示例的剖视图。FIG. 5 is a cross-sectional view illustrating an example of a display area of a display panel according to some embodiments of the present disclosure.
参照图5,根据本公开的一些实施例的显示面板100可以是包括发光元件LEL的有机发光显示面板,发光元件LEL均包括有机发射层172。5 , the display panel 100 according to some embodiments of the present disclosure may be an organic light emitting display panel including light emitting elements LEL each including an organic emission layer 172 .
显示层DISL可以包括包含多个薄膜晶体管TFT的薄膜晶体管层TFTL和包含多个发光元件LEL的发光元件层EML。The display layer DISL may include a thin film transistor layer TFTL including a plurality of thin film transistors TFT and a light emitting element layer EML including a plurality of light emitting elements LEL.
缓冲膜BF可以定位在基底SUB上。缓冲膜BF可以由诸如氮化硅、氮氧化硅、氧化硅、氧化钛和氧化铝的无机材料形成。可选地,缓冲膜BF可以由其中氮化硅层、氮氧化硅层、氧化硅层、氧化钛层和氧化铝层中的两个或更多个彼此堆叠的多个层构成。The buffer film BF may be positioned on the substrate SUB. The buffer film BF may be formed of an inorganic material such as silicon nitride, silicon oxynitride, silicon oxide, titanium oxide, and aluminum oxide. Alternatively, the buffer film BF may be composed of a plurality of layers in which two or more of a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, and an aluminum oxide layer are stacked on each other.
包括薄膜晶体管TFT的沟道区TCH、源区TS和漏区TD的有源层可以定位在缓冲膜BF上。有源层可以由多晶硅、单晶硅、低温多晶硅、非晶硅或氧化物半导体制成。当有源层包括多晶硅或氧化物半导体材料时,有源层中的源区TS和漏区TD可以是掺杂有离子或杂质以具有导电性的导电区。An active layer including a channel region TCH, a source region TS, and a drain region TD of a thin film transistor TFT may be positioned on the buffer film BF. The active layer may be made of polycrystalline silicon, single crystal silicon, low temperature polycrystalline silicon, amorphous silicon, or an oxide semiconductor. When the active layer includes polycrystalline silicon or an oxide semiconductor material, the source region TS and the drain region TD in the active layer may be conductive regions doped with ions or impurities to have conductivity.
栅极绝缘体130可以定位在薄膜晶体管TFT的有源层上。栅极绝缘体130可以由例如氮化硅层、氮氧化硅层、氧化硅层、氧化钛层或氧化铝层的无机层形成。The gate insulator 130 may be positioned on the active layer of the thin film transistor TFT. The gate insulator 130 may be formed of an inorganic layer such as a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, or an aluminum oxide layer.
包括薄膜晶体管TFT的栅电极TG、电容器Cst的第一电容器电极CAE1和扫描线的第一栅极金属层可以定位在栅极绝缘体130上。薄膜晶体管TFT的栅电极TG可以在第三方向(Z轴方向)上与沟道区TCH叠置。第一栅极金属层可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。A first gate metal layer including a gate electrode TG of the thin film transistor TFT, a first capacitor electrode CAE1 of the capacitor Cst, and a scan line may be positioned on the gate insulator 130. The gate electrode TG of the thin film transistor TFT may overlap the channel region TCH in a third direction (Z-axis direction). The first gate metal layer may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
第一层间介电膜141可以定位在第一栅极金属层上。第一层间介电膜141可以由例如氮化硅层、氮氧化硅层、氧化硅层、氧化钛层或氧化铝层的无机层形成。第一层间介电膜141可以包括多个无机层。The first interlayer dielectric film 141 may be positioned on the first gate metal layer. The first interlayer dielectric film 141 may be formed of an inorganic layer such as a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, or an aluminum oxide layer. The first interlayer dielectric film 141 may include a plurality of inorganic layers.
包括电容器Cst的第二电容器电极CAE2的第二栅极金属层可以定位在第一层间介电膜141上。第二电容器电极CAE2可以在第三方向(Z轴方向)上与第一电容器电极CAE1叠置。因此,电容器Cst可以由第一电容器电极CAE1、第二电容器电极CAE2和定位在其间并用作介电膜的第一层间介电膜141形成。第二栅极金属层可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。The second gate metal layer including the second capacitor electrode CAE2 of the capacitor Cst may be positioned on the first interlayer dielectric film 141. The second capacitor electrode CAE2 may overlap with the first capacitor electrode CAE1 in the third direction (Z-axis direction). Therefore, the capacitor Cst may be formed by the first capacitor electrode CAE1, the second capacitor electrode CAE2, and the first interlayer dielectric film 141 positioned therebetween and serving as a dielectric film. The second gate metal layer may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
第二层间介电膜142可以定位在第二栅极金属层上。第二层间介电膜142可以由例如氮化硅层、氮氧化硅层、氧化硅层、氧化钛层或氧化铝层的无机层形成。第二层间介电膜142可以包括多个无机层。The second interlayer dielectric film 142 may be positioned on the second gate metal layer. The second interlayer dielectric film 142 may be formed of an inorganic layer such as a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, or an aluminum oxide layer. The second interlayer dielectric film 142 may include a plurality of inorganic layers.
包括第一连接电极CE1和数据线的第一数据金属层可以定位在第二层间介电膜142上。第一连接电极CE1可以通过穿透栅极绝缘体130、第一层间介电膜141和第二层间介电膜142的第一接触孔CT1连接到漏区TD。第一数据金属层可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。The first data metal layer including the first connection electrode CE1 and the data line may be positioned on the second interlayer dielectric film 142. The first connection electrode CE1 may be connected to the drain region TD through a first contact hole CT1 penetrating the gate insulator 130, the first interlayer dielectric film 141, and the second interlayer dielectric film 142. The first data metal layer may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
第一有机膜160可以布置在第一连接电极CE1之上,用以在具有不均匀高度的薄膜晶体管TFT上方提供平坦表面。第一有机膜160可以形成为包括诸如丙烯酸树脂、环氧树脂、酚醛树脂、聚酰胺树脂和聚酰亚胺树脂的有机层。The first organic film 160 may be disposed on the first connection electrode CE1 to provide a flat surface over the thin film transistor TFT having an uneven height. The first organic film 160 may be formed as an organic layer including acrylic resin, epoxy resin, phenol resin, polyamide resin, and polyimide resin.
包括第二连接电极CE2的第二数据金属层可以定位在第一有机膜160上。第二数据金属层可以通过穿透第一有机膜160的第二接触孔CT2连接到第一连接电极CE1。第二数据金属层可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。The second data metal layer including the second connection electrode CE2 may be positioned on the first organic film 160. The second data metal layer may be connected to the first connection electrode CE1 through a second contact hole CT2 penetrating the first organic film 160. The second data metal layer may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
第二有机膜180可以定位在第二连接电极CE2上。第二有机膜180可以形成为包括诸如丙烯酸树脂、环氧树脂、酚醛树脂、聚酰胺树脂和聚酰亚胺树脂的有机层。The second organic film 180 may be positioned on the second connection electrode CE2. The second organic film 180 may be formed to include an organic layer such as acrylic resin, epoxy resin, phenol resin, polyamide resin, and polyimide resin.
应当注意的是,可以去除第二有机膜180和包括第二连接电极CE2的第二数据金属层。It should be noted that the second organic film 180 and the second data metal layer including the second connection electrode CE2 may be removed.
发光元件层EML定位在薄膜晶体管层TFTL上。发光元件层EML可以包括发光元件LEL和堤190。The light emitting element layer EML is positioned on the thin film transistor layer TFTL. The light emitting element layer EML may include a light emitting element LEL and a bank 190 .
发光元件LEL中的每个可以包括像素电极171、发射层172和共电极173。在发射区域EA中的每个中,像素电极171、发射层172和共电极173顺序地彼此堆叠,使得来自像素电极171的空穴和来自共电极173的电子在发射层172中彼此复合以发射光。在这种情况下,像素电极171可以是阳极电极,而共电极173可以是阴极电极。Each of the light emitting elements LEL may include a pixel electrode 171, an emission layer 172, and a common electrode 173. In each of the emission areas EA, the pixel electrode 171, the emission layer 172, and the common electrode 173 are sequentially stacked on each other so that holes from the pixel electrode 171 and electrons from the common electrode 173 are recombined with each other in the emission layer 172 to emit light. In this case, the pixel electrode 171 may be an anode electrode, and the common electrode 173 may be a cathode electrode.
包括像素电极171的像素电极层可以形成在第二有机膜180上。像素电极171可以通过穿透第二有机膜180的第三接触孔CT3连接到第二连接电极CE2。像素电极层可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。A pixel electrode layer including a pixel electrode 171 may be formed on the second organic film 180. The pixel electrode 171 may be connected to the second connection electrode CE2 through a third contact hole CT3 penetrating the second organic film 180. The pixel electrode layer may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
在光从发射层172朝向共电极173出射的顶部发射结构中,像素电极171可以由钼(Mo)、钛(Ti)、铜(Cu)或铝(Al)的单层构成,或者可以由铝和钛的堆叠结构(Ti/Al/Ti)、铝和ITO的堆叠结构(ITO/Al/ITO)、APC合金以及APC合金和ITO的堆叠结构(ITO/APC/ITO)构成,以增加反射率。APC合金是银(Ag)、钯(Pd)和铜(Cu)的合金。In a top emission structure in which light is emitted from the emission layer 172 toward the common electrode 173, the pixel electrode 171 may be composed of a single layer of molybdenum (Mo), titanium (Ti), copper (Cu), or aluminum (Al), or may be composed of a stacked structure of aluminum and titanium (Ti/Al/Ti), a stacked structure of aluminum and ITO (ITO/Al/ITO), an APC alloy, and a stacked structure of an APC alloy and ITO (ITO/APC/ITO) to increase reflectivity. The APC alloy is an alloy of silver (Ag), palladium (Pd), and copper (Cu).
堤190可以限定像素的发射区域EA。为此,堤190可以形成在第二有机膜180上以暴露像素电极171的一部分。堤190可以覆盖像素电极171的边缘。堤190可以定位在第三接触孔CT3内。换句话说,第三接触孔CT3可以填充有堤190。堤190可以由包括诸如丙烯酸树脂、环氧树脂、酚醛树脂、聚酰胺树脂和聚酰亚胺树脂的有机层形成。The bank 190 may define the emission area EA of the pixel. To this end, the bank 190 may be formed on the second organic film 180 to expose a portion of the pixel electrode 171. The bank 190 may cover the edge of the pixel electrode 171. The bank 190 may be positioned within the third contact hole CT3. In other words, the third contact hole CT3 may be filled with the bank 190. The bank 190 may be formed of an organic layer including, for example, acrylic resin, epoxy resin, phenolic resin, polyamide resin, and polyimide resin.
间隔件191可以定位在堤190上。间隔件191可以在制造发射层172的工艺期间支撑掩模。间隔件191可以由包括诸如丙烯酸树脂、环氧树脂、酚醛树脂、聚酰胺树脂和聚酰亚胺树脂的有机层形成。The spacer 191 may be positioned on the bank 190. The spacer 191 may support a mask during a process of manufacturing the emission layer 172. The spacer 191 may be formed of an organic layer including, for example, acrylic resin, epoxy resin, phenolic resin, polyamide resin, and polyimide resin.
发射层172形成在像素电极171上。发射层172可以包括有机材料以发射某种颜色的光。例如,发射层172可以包括空穴传输层、有机材料层和电子传输层。有机材料层可以包括主体和掺杂剂。有机材料层可以包括发射预定光的材料,并且可以使用磷光体或荧光材料形成。The emission layer 172 is formed on the pixel electrode 171. The emission layer 172 may include an organic material to emit light of a certain color. For example, the emission layer 172 may include a hole transport layer, an organic material layer, and an electron transport layer. The organic material layer may include a host and a dopant. The organic material layer may include a material that emits a predetermined light and may be formed using a phosphor or a fluorescent material.
共电极173形成在发射层172上。共电极173可以形成为覆盖发射层172。共电极173可以是跨发射区域EA1、EA2、EA3和EA4(见图6)形成的公共层。盖层可以形成在共电极173上。The common electrode 173 is formed on the emission layer 172. The common electrode 173 may be formed to cover the emission layer 172. The common electrode 173 may be a common layer formed across the emission areas EA1, EA2, EA3, and EA4 (see FIG. 6). A capping layer may be formed on the common electrode 173.
在顶部发射结构中,共电极173可以由可以透射光的透明导电材料(TCP)(诸如ITO和IZO)或半透射导电材料(诸如镁(Mg)、银(Ag)以及镁(Mg)和银(Ag)的合金)形成。当共电极173由半透射金属材料形成时,通过使用微腔可以提高光提取效率。In the top emission structure, the common electrode 173 may be formed of a transparent conductive material (TCP) that can transmit light, such as ITO and IZO, or a semi-transmissive conductive material, such as magnesium (Mg), silver (Ag), and an alloy of magnesium (Mg) and silver (Ag). When the common electrode 173 is formed of a semi-transmissive metal material, light extraction efficiency may be improved by using a microcavity.
封装层ENC可以定位在发光元件层EML上。封装层ENC可以包括一个或更多个无机封装膜TFE1和TFE3,以防止或减少氧或湿气渗透到发光元件层EML中。另外,封装层ENC可以包括至少一个有机封装膜TFE2,以保护发光元件层EML免受诸如灰尘的颗粒的影响。例如,封装层ENC可以包括第一无机封装膜TFE1、有机封装膜TFE2和第二无机封装膜TFE3。The encapsulation layer ENC may be positioned on the light emitting element layer EML. The encapsulation layer ENC may include one or more inorganic encapsulation films TFE1 and TFE3 to prevent or reduce oxygen or moisture from penetrating into the light emitting element layer EML. In addition, the encapsulation layer ENC may include at least one organic encapsulation film TFE2 to protect the light emitting element layer EML from particles such as dust. For example, the encapsulation layer ENC may include a first inorganic encapsulation film TFE1, an organic encapsulation film TFE2, and a second inorganic encapsulation film TFE3.
第一无机封装膜TFE1可以定位在共电极173上,有机封装膜TFE2可以定位在第一无机封装膜TFE1上,第二无机封装膜TFE3可以定位在有机封装膜TFE2上。第一无机封装膜TFE1和第二无机封装膜TFE3可以由其中氮化硅层、氮氧化硅层、氧化硅层、氧化钛层和氧化铝层中的一个或更多个无机层彼此交替堆叠的多层构成。有机封装膜TFE2可以是包括诸如丙烯酸树脂、环氧树脂、酚醛树脂、聚酰胺树脂、聚酰亚胺树脂等的有机膜。The first inorganic encapsulation film TFE1 may be positioned on the common electrode 173, the organic encapsulation film TFE2 may be positioned on the first inorganic encapsulation film TFE1, and the second inorganic encapsulation film TFE3 may be positioned on the organic encapsulation film TFE2. The first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 may be composed of a multilayer in which one or more inorganic layers of a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, and an aluminum oxide layer are alternately stacked. The organic encapsulation film TFE2 may be an organic film including, for example, acrylic resin, epoxy resin, phenolic resin, polyamide resin, polyimide resin, etc.
传感器电极层SENL可以定位在封装层ENC上。传感器电极层SENL可以包括传感器电极TE和RE。The sensor electrode layer SENL may be positioned on the encapsulation layer ENC. The sensor electrode layer SENL may include sensor electrodes TE and RE.
第二缓冲膜BF2可以定位在封装层ENC上。第二缓冲膜BF2可以包括至少一个无机膜。例如,第二缓冲膜BF2可以由其中氮化硅层、氮氧化硅层、氧化硅层、氧化钛层和氧化铝层中的一个或更多个无机层彼此交替堆叠的多层构成。可以去除第二缓冲膜BF2。The second buffer film BF2 may be positioned on the encapsulation layer ENC. The second buffer film BF2 may include at least one inorganic film. For example, the second buffer film BF2 may be composed of a multilayer in which one or more inorganic layers of a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, and an aluminum oxide layer are alternately stacked. The second buffer film BF2 may be removed.
第一桥BE1可以定位在第二缓冲膜BF2上。第一桥BE1可以由钼(Mo)、钛(Ti)、铜(Cu)或铝(Al)的单层构成,或者可以由铝和钛的堆叠结构(Ti/Al/Ti)、铝和ITO的堆叠结构(ITO/Al/ITO)、APC合金以及APC合金和ITO的堆叠结构(ITO/APC/ITO)构成。The first bridge BE1 may be positioned on the second buffer film BF2. The first bridge BE1 may be composed of a single layer of molybdenum (Mo), titanium (Ti), copper (Cu), or aluminum (Al), or may be composed of a stacked structure of aluminum and titanium (Ti/Al/Ti), a stacked structure of aluminum and ITO (ITO/Al/ITO), an APC alloy, and a stacked structure of an APC alloy and ITO (ITO/APC/ITO).
第一传感器绝缘膜TINS1可以定位在第一桥BE1上。第一传感器绝缘膜TINS1可以由例如氮化硅层、氮氧化硅层、氧化硅层、氧化钛层或氧化铝层的无机层形成。The first sensor insulating film TINS1 may be positioned on the first bridge BE1. The first sensor insulating film TINS1 may be formed of an inorganic layer, for example, a silicon nitride layer, a silicon nitride oxide layer, a silicon oxide layer, a titanium oxide layer, or an aluminum oxide layer.
传感器电极(即,驱动电极TE和感测电极RE)可以定位在第一传感器绝缘膜TINS1上。另外,虚设图案可以定位在第一传感器绝缘膜TINS1上。驱动电极TE、感测电极RE和虚设图案不与发射区域EA叠置。驱动电极TE、感测电极RE和虚设图案可以由钼(Mo)、钛(Ti)、铜(Cu)或铝(Al)的单层构成,或者可以由铝和钛的堆叠结构(Ti/Al/Ti)、铝和ITO的堆叠结构(ITO/Al/ITO)、APC合金以及APC合金和ITO的堆叠结构(ITO/APC/ITO)构成。驱动电极TE可以通过穿透第一传感器绝缘膜TINS1的第一传感器电极接触孔TCNT1电连接到第一桥BE1。The sensor electrodes (i.e., the drive electrode TE and the sensing electrode RE) may be positioned on the first sensor insulating film TINS1. In addition, a dummy pattern may be positioned on the first sensor insulating film TINS1. The drive electrode TE, the sensing electrode RE, and the dummy pattern do not overlap with the emission area EA. The drive electrode TE, the sensing electrode RE, and the dummy pattern may be composed of a single layer of molybdenum (Mo), titanium (Ti), copper (Cu), or aluminum (Al), or may be composed of a stacked structure of aluminum and titanium (Ti/Al/Ti), a stacked structure of aluminum and ITO (ITO/Al/ITO), an APC alloy, and a stacked structure of an APC alloy and ITO (ITO/APC/ITO). The drive electrode TE may be electrically connected to the first bridge BE1 through a first sensor electrode contact hole TCNT1 penetrating the first sensor insulating film TINS1.
第二传感器绝缘膜TINS2可以定位在驱动电极TE、感测电极RE和虚设图案上。第二传感器绝缘膜TINS2可以包括无机膜和有机膜中的至少一个。无机膜可以是氮化硅层、氮氧化硅层、氧化硅层、氧化钛层或氧化铝层。有机膜可以包括丙烯酸树脂、环氧树脂、酚醛树脂、聚酰胺树脂和聚酰亚胺树脂。The second sensor insulating film TINS2 may be positioned on the driving electrode TE, the sensing electrode RE, and the dummy pattern. The second sensor insulating film TINS2 may include at least one of an inorganic film and an organic film. The inorganic film may be a silicon nitride layer, a silicon oxynitride layer, a silicon oxide layer, a titanium oxide layer, or an aluminum oxide layer. The organic film may include an acrylic resin, an epoxy resin, a phenolic resin, a polyamide resin, and a polyimide resin.
图6是更详细地示出图2的区域A的示例的布局图。图6是示出根据一些实施例的定位在显示面板100的右侧上的显示区域DA和非显示区域NDA的布局图。Fig. 6 is a layout diagram illustrating an example of the area A of Fig. 2 in more detail. Fig. 6 is a layout diagram illustrating a display area DA and a non-display area NDA positioned on the right side of the display panel 100 according to some embodiments.
参照图6,显示区域DA可以包括多个发射区域EA1、EA2、EA3和EA4。多个发射区域EA1、EA2、EA3和EA4可以包括发射第一颜色的光的第一发射区域EA1、发射第二颜色的光的第二发射区域EA2和第四发射区域EA4以及发射第三颜色的光的第三发射区域EA3。例如,第一颜色的光可以是在近似600nm至750nm的红色波长范围内的光,第二颜色的光可以是在近似480nm至560nm的绿色波长范围内的光,第三颜色的光可以是在近似370nm至460nm的蓝色波长范围内的光。然而,应当理解的是,本公开不限于此。6, the display area DA may include a plurality of emission areas EA1, EA2, EA3, and EA4. The plurality of emission areas EA1, EA2, EA3, and EA4 may include a first emission area EA1 that emits light of a first color, a second emission area EA2 and a fourth emission area EA4 that emit light of a second color, and a third emission area EA3 that emits light of a third color. For example, the light of the first color may be light in a red wavelength range of approximately 600nm to 750nm, the light of the second color may be light in a green wavelength range of approximately 480nm to 560nm, and the light of the third color may be light in a blue wavelength range of approximately 370nm to 460nm. However, it should be understood that the present disclosure is not limited thereto.
尽管在图6中示出的示例中第二发射区域EA2和第四发射区域EA4发射相同颜色的光(即,第二颜色的光),但是本公开的实施例不限于此。第二发射区域EA2和第四发射区域EA4可以发射不同颜色的光。例如,第二发射区域EA2可以发射第二颜色的光,第四发射区域EA4可以发射第四颜色的光。Although the second emission area EA2 and the fourth emission area EA4 emit the same color of light (i.e., the second color of light) in the example shown in FIG. 6, the embodiments of the present disclosure are not limited thereto. The second emission area EA2 and the fourth emission area EA4 may emit light of different colors. For example, the second emission area EA2 may emit light of the second color, and the fourth emission area EA4 may emit light of the fourth color.
另外,尽管在图6中示出的示例中当从顶部观看时第一发射区域EA1、第二发射区域EA2、第三发射区域EA3和第四发射区域EA4中的每个可以具有矩形形状,但是本公开的实施例不限于此。当从顶部观看时,第一发射区域EA1、第二发射区域EA2、第三发射区域EA3和第四发射区域EA4中的每个可以具有除四边形形状之外的其他多边形形状、圆形形状或椭圆形形状。In addition, although each of the first emission area EA1, the second emission area EA2, the third emission area EA3, and the fourth emission area EA4 may have a rectangular shape when viewed from the top in the example shown in FIG. 6, embodiments of the present disclosure are not limited thereto. When viewed from the top, each of the first emission area EA1, the second emission area EA2, the third emission area EA3, and the fourth emission area EA4 may have a polygonal shape other than a quadrilateral shape, a circular shape, or an elliptical shape.
另外,如图6中所示,第三发射区域EA3可以是最大的,而第二发射区域EA2和第四发射区域EA4可以是最小的。第二发射区域EA2和第四发射区域EA4可以具有相同的尺寸。6, the third emission area EA3 may be the largest, and the second emission area EA2 and the fourth emission area EA4 may be the smallest. The second emission area EA2 and the fourth emission area EA4 may have the same size.
第二发射区域EA2和第四发射区域EA4可以在第一方向(X轴方向)上交替布置。第二发射区域EA2可以在第二方向(Y轴方向)上布置。第四发射区域EA4可以在第二方向(Y轴方向)上布置。第四发射区域EA4中的每个可以具有在第一斜线方向DD1上的长边和在第二斜线方向DD2上的短边,而第二发射区域EA2中的每个可以具有在第二斜线方向DD2上的长边和在第一斜线方向DD1上的短边。第一斜线方向DD1可以指第一方向(X轴方向)与第二方向(Y轴方向)之间的斜线方向,第二斜线方向DD2可以与第一斜线方向DD1垂直。The second emission areas EA2 and the fourth emission areas EA4 may be arranged alternately in the first direction (X-axis direction). The second emission areas EA2 may be arranged in the second direction (Y-axis direction). The fourth emission areas EA4 may be arranged in the second direction (Y-axis direction). Each of the fourth emission areas EA4 may have a long side in the first oblique direction DD1 and a short side in the second oblique direction DD2, and each of the second emission areas EA2 may have a long side in the second oblique direction DD2 and a short side in the first oblique direction DD1. The first oblique direction DD1 may refer to an oblique direction between the first direction (X-axis direction) and the second direction (Y-axis direction), and the second oblique direction DD2 may be perpendicular to the first oblique direction DD1.
第一发射区域EA1和第三发射区域EA3可以在第一方向(X轴方向)上交替布置。第一发射区域EA1可以在第二方向(Y轴方向)上布置。第三发射区域EA3可以在第二方向(Y轴方向)上布置。当从顶部观看时,第一发射区域EA1和第三发射区域EA3中的每个可以具有正方形形状,但是本公开的实施例不限于此。在这种情况下,第一发射区域EA1和第三发射区域EA3中的每个可以包括在第一斜线方向DD1上彼此平行的两条边和在第二斜线方向DD2上彼此平行的两条边。The first emission area EA1 and the third emission area EA3 may be alternately arranged in the first direction (X-axis direction). The first emission area EA1 may be arranged in the second direction (Y-axis direction). The third emission area EA3 may be arranged in the second direction (Y-axis direction). When viewed from the top, each of the first emission area EA1 and the third emission area EA3 may have a square shape, but the embodiments of the present disclosure are not limited thereto. In this case, each of the first emission area EA1 and the third emission area EA3 may include two sides parallel to each other in the first oblique direction DD1 and two sides parallel to each other in the second oblique direction DD2.
非显示区域NDA可以包括第一非显示区域NDA1和第二非显示区域NDA2。在第一非显示区域NDA1中,可以定位有用于驱动显示区域DA的像素的结构。第二非显示区域NDA2可以定位在第一非显示区域NDA1的外侧上。第二非显示区域NDA2可以是非显示区域NDA的边缘区域。另外,第二非显示区域NDA2可以是显示面板100的边缘区域。The non-display area NDA may include a first non-display area NDA1 and a second non-display area NDA2. In the first non-display area NDA1, a structure for driving pixels of the display area DA may be positioned. The second non-display area NDA2 may be positioned on the outer side of the first non-display area NDA1. The second non-display area NDA2 may be an edge area of the non-display area NDA. In addition, the second non-display area NDA2 may be an edge area of the display panel 100.
第一非显示区域NDA1可以包括扫描驱动电路SDC、第一电源电压线VSL、第一坝DAM1和第二坝DAM2。The first non-display area NDA1 may include a scan driving circuit SDC, a first power voltage line VSL, a first dam DAM1, and a second dam DAM2.
扫描驱动电路SDC可以包括多个级STA。多个级STA可以相应地连接到显示区域DA的在第一方向(X轴方向)上延伸的扫描线。也就是说,多个级STA可以分别连接到显示区域DA的在第一方向(X轴方向)上延伸的扫描线。级STA可以将扫描信号顺序地施加到扫描线。The scan driving circuit SDC may include a plurality of stages STA. The plurality of stages STA may be connected to the scan lines extending in the first direction (X-axis direction) of the display area DA, respectively. That is, the plurality of stages STA may be connected to the scan lines extending in the first direction (X-axis direction) of the display area DA, respectively. The stages STA may sequentially apply scan signals to the scan lines.
第一电源电压线VSL可以定位在扫描驱动电路SDC的外侧上。也就是说,第一电源电压线VSL可以定位为比扫描驱动电路SDC靠近显示面板100的边缘EG。第一电源电压线VSL可以在显示面板100的右侧上在非显示区域NDA中在第二方向(Y轴方向)上延伸。The first power supply voltage line VSL may be positioned on the outer side of the scan driving circuit SDC. That is, the first power supply voltage line VSL may be positioned closer to the edge EG of the display panel 100 than the scan driving circuit SDC. The first power supply voltage line VSL may extend in the second direction (Y-axis direction) in the non-display area NDA on the right side of the display panel 100.
第一电源电压线VSL可以电连接到共电极173,并且因此共电极173可以从第一电源电压线VSL接收第一电源电压。The first power voltage line VSL may be electrically connected to the common electrode 173 , and thus the common electrode 173 may receive the first power voltage from the first power voltage line VSL.
第一坝DAM1和第二坝DAM2是用于防止或减少封装层ENC的有机封装膜TFE2溢出到显示面板100的边缘EG的情况的结构。第一坝DAM1和第二坝DAM2可以在显示面板100的右侧上在非显示区域NDA中在第二方向(Y轴方向)上延伸。第二坝DAM2可以定位在第一坝DAM1的外侧上。第一坝DAM1可以定位为比第二坝DAM2靠近扫描驱动电路SDC,第二坝DAM2可以定位为比第一坝DAM1靠近显示面板100的边缘EG。The first dam DAM1 and the second dam DAM2 are structures for preventing or reducing the situation where the organic encapsulation film TFE2 of the encapsulation layer ENC overflows to the edge EG of the display panel 100. The first dam DAM1 and the second dam DAM2 may extend in the second direction (Y-axis direction) in the non-display area NDA on the right side of the display panel 100. The second dam DAM2 may be positioned on the outer side of the first dam DAM1. The first dam DAM1 may be positioned closer to the scan driving circuit SDC than the second dam DAM2, and the second dam DAM2 may be positioned closer to the edge EG of the display panel 100 than the first dam DAM1.
尽管在图6中示出的示例中第一坝DAM1和第二坝DAM2定位在第一电源电压线VSL上,但是本公开的实施例不限于此。例如,第一坝DAM1和第二坝DAM2中的一个可以不定位在第一电源电压线VSL上。可选地,第一坝DAM1和第二坝DAM2中没有一个可以定位在第一电源电压线VSL上。在这种情况下,第一坝DAM1和第二坝DAM2可以定位在第一电源电压线VSL的外侧上。Although the first dam DAM1 and the second dam DAM2 are positioned on the first power supply voltage line VSL in the example shown in FIG. 6 , the embodiments of the present disclosure are not limited thereto. For example, one of the first dam DAM1 and the second dam DAM2 may not be positioned on the first power supply voltage line VSL. Alternatively, none of the first dam DAM1 and the second dam DAM2 may be positioned on the first power supply voltage line VSL. In this case, the first dam DAM1 and the second dam DAM2 may be positioned on the outside of the first power supply voltage line VSL.
另外,尽管如图6中示出根据一些实施例的显示面板100包括两个坝DAM1和DAM2,但是本公开的实施例不限于此。例如,根据一些实施例的显示面板100可以包括三个或更多个坝。6 , the display panel 100 according to some embodiments includes two dams DAM1 and DAM2 , but embodiments of the present disclosure are not limited thereto. For example, the display panel 100 according to some embodiments may include three or more dams.
第二非显示区域NDA2可以包括裂缝坝CRD和边缘区域EGA。The second non-display area NDA2 may include a crack dam CRD and an edge area EGA.
裂缝坝CRD可以是用于在制造显示装置10的工艺中防止或减少在切割基底SUB的工艺期间发生裂缝的情况的结构。裂缝坝CRD可以是定位在显示面板100的右侧上的最外位置处的最外结构。裂缝坝CRD可以在显示面板100的右侧上在非显示区域NDA中在第二方向(Y轴方向)上延伸。The crack dam CRD may be a structure for preventing or reducing a situation where a crack occurs during a process of cutting the substrate SUB in a process of manufacturing the display device 10. The crack dam CRD may be an outermost structure positioned at an outermost position on the right side of the display panel 100. The crack dam CRD may extend in the second direction (Y-axis direction) in the non-display area NDA on the right side of the display panel 100.
边缘区域EGA可以沿着显示面板100的边缘EG延伸。边缘区域EGA可以是在切割基底SUB的工艺期间其中出现处理标记的区域。The edge area EGA may extend along the edge EG of the display panel 100. The edge area EGA may be a region in which a processing mark occurs during a process of cutting the substrate SUB.
图7是更详细地示出图2的区域B的示例的布局图。图7是示出根据一些实施例的定位在显示面板100的下侧上的非显示区域NDA的布局图。Fig. 7 is a layout diagram illustrating an example of the area B of Fig. 2 in more detail. Fig. 7 is a layout diagram illustrating a non-display area NDA positioned on the lower side of the display panel 100 according to some embodiments.
参照图7,第一非显示区域NDA1可以包括多个显示垫PD、多个第一驱动垫DPD1、多个第二驱动垫DPD2、多条垫线PDL、多条扇出线FL、第一坝DAM1和第二坝DAM2。7 , the first non-display area NDA1 may include a plurality of display pads PD, a plurality of first driving pads DPD1 , a plurality of second driving pads DPD2 , a plurality of pad lines PDL, a plurality of fan-out lines FL, a first dam DAM1 , and a second dam DAM2 .
多个显示垫PD可以通过诸如各向异性导电膜和各向异性导电粘合剂的导电粘合构件电连接到电路板300。多个显示垫PD可以分别连接到垫线PDL。垫线PDL可以将显示垫PD与第一驱动垫DPD1连接。The plurality of display pads PD may be electrically connected to the circuit board 300 through a conductive adhesive member such as an anisotropic conductive film and an anisotropic conductive adhesive. The plurality of display pads PD may be respectively connected to pad lines PDL. The pad lines PDL may connect the display pads PD with the first driving pad DPD1.
多个第一驱动垫DPD1和多个第二驱动垫DPD2可以通过诸如各向异性导电膜和各向异性导电粘合剂的导电粘合构件电连接到驱动IC 200。多个第一驱动垫DPD1可以是用于驱动IC 200以接收电路板300的信号(例如,数字视频数据、数据时序控制信号等)的输入垫。多个第二驱动垫DPD2可以是用于输出驱动IC 200的信号(例如,数据电压)的输出垫。多个第二驱动垫DPD2可以分别连接到扇出线FL。扇出线FL可以将第二驱动垫DPD2与显示区域DA的数据线连接。The plurality of first driving pads DPD1 and the plurality of second driving pads DPD2 may be electrically connected to the driving IC 200 through a conductive adhesive member such as an anisotropic conductive film and an anisotropic conductive adhesive. The plurality of first driving pads DPD1 may be input pads for the driving IC 200 to receive signals (e.g., digital video data, data timing control signals, etc.) of the circuit board 300. The plurality of second driving pads DPD2 may be output pads for outputting signals (e.g., data voltages) of the driving IC 200. The plurality of second driving pads DPD2 may be connected to fan-out lines FL, respectively. The fan-out lines FL may connect the second driving pads DPD2 to the data lines of the display area DA.
多个第一驱动垫DPD1可以定位为在第二方向(Y轴方向)上比与其连接的显示垫PD靠近显示区域DA。也就是说,在彼此连接的显示垫PD和第一驱动垫DPD1之中,显示垫PD可以定位为在第二方向(Y轴方向)上比第一驱动垫DPD1靠近显示面板100的边缘EG。The plurality of first driving pads DPD1 may be positioned closer to the display area DA in the second direction (Y-axis direction) than the display pad PD connected thereto. That is, among the display pad PD and the first driving pad DPD1 connected to each other, the display pad PD may be positioned closer to the edge EG of the display panel 100 in the second direction (Y-axis direction) than the first driving pad DPD1.
多个第二驱动垫DPD2中的每个可以定位为在第二方向(Y轴方向)上比多个第一驱动垫DPD1中的对应的第一驱动垫靠近显示区域DA。也就是说,第一驱动垫DPD1可以定位为在第二方向(Y轴方向)上比多个第二驱动垫DPD2靠近显示面板100的边缘EG。Each of the plurality of second drive pads DPD2 may be positioned closer to the display area DA in the second direction (Y-axis direction) than a corresponding first drive pad among the plurality of first drive pads DPD1. That is, the first drive pad DPD1 may be positioned closer to the edge EG of the display panel 100 in the second direction (Y-axis direction) than the plurality of second drive pads DPD2.
第一坝DAM1和第二坝DAM2可以与扇出线FL交叉。第一坝DAM1和第二坝DAM2可以在显示面板100的下侧上在非显示区域NDA中在第一方向(X轴方向)上延伸。第二坝DAM2可以定位在第一坝DAM1的外侧上。第一坝DAM1可以定位为比第二坝DAM2靠近显示区域DA,第二坝DAM2可以定位为比第一坝DAM1靠近显示面板100的边缘EG。The first dam DAM1 and the second dam DAM2 may cross the fan-out line FL. The first dam DAM1 and the second dam DAM2 may extend in the first direction (X-axis direction) in the non-display area NDA on the lower side of the display panel 100. The second dam DAM2 may be positioned on the outer side of the first dam DAM1. The first dam DAM1 may be positioned closer to the display area DA than the second dam DAM2, and the second dam DAM2 may be positioned closer to the edge EG of the display panel 100 than the first dam DAM1.
图8是更详细地示出图2的区域D的示例的布局图。图8是示出根据一些实施例的定位在显示面板100的上侧上的显示区域DA和非显示区域NDA的布局图。Fig. 8 is a layout diagram illustrating an example of the area D of Fig. 2 in more detail. Fig. 8 is a layout diagram illustrating a display area DA and a non-display area NDA positioned on an upper side of the display panel 100 according to some embodiments.
参照图8,第一非显示区域NDA1可以包括第一电源电压线VSL、第一坝DAM1和第二坝DAM2。第一非显示区域NDA1可以不包括扫描驱动电路SDC。8 , the first non-display area NDA1 may include a first power supply voltage line VSL, a first dam DAM1, and a second dam DAM2. The first non-display area NDA1 may not include a scan driving circuit SDC.
第一电源电压线VSL可以在显示面板100的上侧上在非显示区域NDA中在第一方向(X轴方向)上延伸。第一电源电压线VSL可以电连接到共电极173,并且因此共电极173可以从第一电源电压线VSL接收第一电源电压。The first power voltage line VSL may extend in a first direction (X-axis direction) in the non-display area NDA on the upper side of the display panel 100. The first power voltage line VSL may be electrically connected to the common electrode 173, and thus the common electrode 173 may receive a first power voltage from the first power voltage line VSL.
第一坝DAM1和第二坝DAM2可以在显示面板100的上侧上在非显示区域NDA中在第一方向(X轴方向)上延伸。第二坝DAM2可以定位在第一坝DAM1的外侧上。第一坝DAM1可以定位为比第二坝DAM2靠近显示区域DA,第二坝DAM2可以定位为比第一坝DAM1靠近显示面板100的边缘EG。The first dam DAM1 and the second dam DAM2 may extend in the first direction (X-axis direction) in the non-display area NDA on the upper side of the display panel 100. The second dam DAM2 may be positioned on the outer side of the first dam DAM1. The first dam DAM1 may be positioned closer to the display area DA than the second dam DAM2, and the second dam DAM2 may be positioned closer to the edge EG of the display panel 100 than the first dam DAM1.
尽管在图8中示出的示例中第一坝DAM1和第二坝DAM2定位在第一电源电压线VSL上,但是本公开的实施例不限于此。例如,第一坝DAM1和第二坝DAM2中的一个可以不定位在第一电源电压线VSL上。可选地,第一坝DAM1和第二坝DAM2中没有一个可以定位在第一电源电压线VSL上。在这种情况下,第一坝DAM1和第二坝DAM2可以定位在第一电源电压线VSL的外侧上。Although the first dam DAM1 and the second dam DAM2 are positioned on the first power supply voltage line VSL in the example shown in FIG8 , the embodiments of the present disclosure are not limited thereto. For example, one of the first dam DAM1 and the second dam DAM2 may not be positioned on the first power supply voltage line VSL. Alternatively, none of the first dam DAM1 and the second dam DAM2 may be positioned on the first power supply voltage line VSL. In this case, the first dam DAM1 and the second dam DAM2 may be positioned on the outside of the first power supply voltage line VSL.
第二非显示区域NDA2可以包括裂缝坝CRD和边缘区域EGA。The second non-display area NDA2 may include a crack dam CRD and an edge area EGA.
裂缝坝CRD可以是定位在显示面板100的上侧上的最外位置处的最外结构。裂缝坝CRD可以在显示面板100的上侧上在非显示区域NDA中在第一方向(X轴方向)上延伸。The crack dam CRD may be an outermost structure positioned at an outermost position on the upper side of the display panel 100. The crack dam CRD may extend in a first direction (X-axis direction) in the non-display area NDA on the upper side of the display panel 100.
边缘区域EGA可以沿着显示面板100的边缘EG延伸。边缘区域EGA可以是在切割基底SUB的工艺期间其中出现处理标记的区域。The edge area EGA may extend along the edge EG of the display panel 100. The edge area EGA may be a region in which a processing mark occurs during a process of cutting the substrate SUB.
图9是示出沿着图6的线II-II'截取的显示面板的示例的剖视图。图10是示出沿着图7的线III-III'截取的显示面板的示例的剖视图。图11是示出沿着图8的线IV-IV'截取的显示面板的示例的剖视图。Fig. 9 is a cross-sectional view showing an example of a display panel taken along line II-II' of Fig. 6. Fig. 10 is a cross-sectional view showing an example of a display panel taken along line III-III' of Fig. 7. Fig. 11 is a cross-sectional view showing an example of a display panel taken along line IV-IV' of Fig. 8.
在图9至图11的剖视图中,示出了当通过照射激光然后喷射蚀刻剂来切割显示面板100的基底SUB时显示面板100的边缘EG。In the cross-sectional views of FIGS. 9 to 11 , an edge EG of the display panel 100 is shown when the substrate SUB of the display panel 100 is cut by irradiating laser and then spraying etchant.
参照图9至图11,当通过照射激光然后喷射蚀刻剂来切割基底SUB时,通过蚀刻剂可以在基底SUB的上表面US上在边缘区域EGA中形成处理标记。边缘区域EGA可以在近似30μm内。9 to 11 , when the substrate SUB is cut by irradiating laser and then spraying etchant, a process mark may be formed in the edge area EGA on the upper surface US of the substrate SUB by the etchant. The edge area EGA may be within approximately 30 μm.
边缘区域EGA可以包括通过照射激光然后喷射蚀刻剂而形成的第一倾斜表面IP1_1。侧表面SS1与上表面US之间的角度θ1可以是近似90度。换句话说,侧表面SS1可以与上表面US基本上垂直。侧表面SS1与第一倾斜表面IP1_1之间的角度θ2以及第一倾斜表面IP1_1与底表面BS之间的角度θ3可以是钝角。形成在基底SUB的上表面US上的处理标记可以在第三方向(Z轴方向)上与第一倾斜表面IP1_1叠置。The edge area EGA may include a first inclined surface IP1_1 formed by irradiating a laser and then spraying an etchant. An angle θ1 between the side surface SS1 and the upper surface US may be approximately 90 degrees. In other words, the side surface SS1 may be substantially perpendicular to the upper surface US. An angle θ2 between the side surface SS1 and the first inclined surface IP1_1 and an angle θ3 between the first inclined surface IP1_1 and the bottom surface BS may be an obtuse angle. A processing mark formed on the upper surface US of the substrate SUB may overlap with the first inclined surface IP1_1 in a third direction (Z-axis direction).
裂缝坝CRD可以是用于在制造显示装置10的工艺中防止或减少在切割基底SUB的工艺期间发生裂缝的情况的结构。裂缝坝CRD可以是定位在显示面板100的右侧上的最外位置处的最外结构。裂缝坝CRD与边缘区域EGA之间的距离D1可以等于或小于近似70μm。The crack dam CRD may be a structure for preventing or reducing a situation where a crack occurs during a process of cutting the substrate SUB in a process of manufacturing the display device 10. The crack dam CRD may be an outermost structure positioned at an outermost position on the right side of the display panel 100. A distance D1 between the crack dam CRD and the edge area EGA may be equal to or less than approximately 70 μm.
从裂缝坝CRD到显示面板100的边缘EG的最小距离可以等于边缘区域EGA的宽度与从裂缝坝CRD到边缘区域EGA的最小距离D1之和。当通过照射激光然后喷射蚀刻剂来切割基底SUB时,裂缝坝CRD与显示面板100的边缘EG之间的最小距离可以根据激光的单侧公差而变化。例如,当激光的单侧公差为50μm时,裂缝坝CRD与边缘区域EGA之间的距离D1可以为至少50μm或至多150μm。The minimum distance from the crack dam CRD to the edge EG of the display panel 100 may be equal to the sum of the width of the edge area EGA and the minimum distance D1 from the crack dam CRD to the edge area EGA. When the substrate SUB is cut by irradiating a laser and then spraying an etchant, the minimum distance between the crack dam CRD and the edge EG of the display panel 100 may vary according to the single-sided tolerance of the laser. For example, when the single-sided tolerance of the laser is 50 μm, the distance D1 between the crack dam CRD and the edge area EGA may be at least 50 μm or at most 150 μm.
从显示垫PD到显示面板100的边缘EG的最小距离可以等于边缘区域EGA的宽度与从显示垫PD到边缘区域EGA的最小距离D2之和。当通过照射激光然后喷射蚀刻剂来切割基底SUB时,显示垫PD与基底SUB的边缘之间的最小距离可以根据激光的单侧公差而变化。例如,当激光的单侧公差为50μm时,显示垫PD与边缘区域EGA之间的距离D2可以为至少50μm或至多150μm。The minimum distance from the display pad PD to the edge EG of the display panel 100 may be equal to the sum of the width of the edge area EGA and the minimum distance D2 from the display pad PD to the edge area EGA. When the substrate SUB is cut by irradiating a laser and then spraying an etchant, the minimum distance between the display pad PD and the edge of the substrate SUB may vary according to the single-sided tolerance of the laser. For example, when the single-sided tolerance of the laser is 50 μm, the distance D2 between the display pad PD and the edge area EGA may be at least 50 μm or at most 150 μm.
另外,当在制造显示面板100的工艺期间通过照射激光然后喷射蚀刻剂来切割显示面板100的基底SUB时,显示面板100的侧表面SS1和第一倾斜表面IP1_1可以被蚀刻剂蚀刻。在这种情况下,显示面板100的侧表面SS1和第一倾斜表面IP1_1的粗糙度可以为近似50μm或更小。当通过照射激光然后喷射蚀刻剂来切割显示面板100的基底SUB时显示面板100的侧表面SS1和第一倾斜表面IP1_1的粗糙度可以小于当用切割构件切割基底SUB然后执行抛光工艺时显示面板100的侧表面SS1和第一倾斜表面IP1_1的粗糙度。In addition, when the substrate SUB of the display panel 100 is cut by irradiating laser and then spraying etchant during the process of manufacturing the display panel 100, the side surface SS1 and the first inclined surface IP1_1 of the display panel 100 may be etched by the etchant. In this case, the roughness of the side surface SS1 and the first inclined surface IP1_1 of the display panel 100 may be approximately 50 μm or less. The roughness of the side surface SS1 and the first inclined surface IP1_1 of the display panel 100 when the substrate SUB of the display panel 100 is cut by irradiating laser and then spraying etchant may be less than the roughness of the side surface SS1 and the first inclined surface IP1_1 of the display panel 100 when the substrate SUB is cut with a cutting member and then a polishing process is performed.
当通过照射激光然后喷射蚀刻剂来切割显示面板100的基底SUB时,可以减小从裂缝坝CRD到显示面板100的边缘EG的最小距离。因此,当通过照射激光然后喷射蚀刻剂来切割显示面板100的基底SUB时,可以大大地减小第二非显示区域NDA2的宽度。换句话说,可以减小非显示区域NDA的宽度。When the substrate SUB of the display panel 100 is cut by irradiating laser and then spraying etchant, the minimum distance from the crack dam CRD to the edge EG of the display panel 100 can be reduced. Therefore, when the substrate SUB of the display panel 100 is cut by irradiating laser and then spraying etchant, the width of the second non-display area NDA2 can be greatly reduced. In other words, the width of the non-display area NDA can be reduced.
图12是更详细地示出图9的区域E的示例的放大剖视图。FIG. 12 is an enlarged cross-sectional view showing an example of the region E of FIG. 9 in more detail.
参照图12,裂缝坝CRD可以包括与第一有机膜160相同的材料。裂缝坝CRD可以定位在缓冲膜BF上。裂缝坝CRD可以由包括诸如丙烯酸树脂、环氧树脂、酚醛树脂、聚酰胺树脂和聚酰亚胺树脂的有机层形成。12 , the crack dam CRD may include the same material as the first organic film 160. The crack dam CRD may be positioned on the buffer film BF. The crack dam CRD may be formed of an organic layer including, for example, acrylic resin, epoxy resin, phenolic resin, polyamide resin, and polyimide resin.
尽管在图12中示出的示例中裂缝坝CRD包括一个有机膜层,但是本公开的实施例不限于此。例如,裂缝坝CRD还可以包括包含与第二有机膜180相同的材料的另一有机膜层。可选地,裂缝坝CRD还可以包括包含与堤190相同的材料的另一有机膜层。可选地,裂缝坝CRD还可以包括包含与间隔件191(见图5)相同的材料的又一有机膜层。Although the crack dam CRD includes one organic film layer in the example shown in FIG. 12 , the embodiments of the present disclosure are not limited thereto. For example, the crack dam CRD may further include another organic film layer including the same material as the second organic film 180. Alternatively, the crack dam CRD may further include another organic film layer including the same material as the bank 190. Alternatively, the crack dam CRD may further include another organic film layer including the same material as the spacer 191 (see FIG. 5 ).
第一电源电压线VSL可以包括与包含第一连接电极CE1和数据线的第一数据金属层相同的材料,并且可以定位在同一层。第一电源电压线VSL可以定位在第二层间介电膜142上。第一电源电压线VSL可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。The first power supply voltage line VSL may include the same material as the first data metal layer including the first connection electrode CE1 and the data line, and may be positioned at the same layer. The first power supply voltage line VSL may be positioned on the second interlayer dielectric film 142. The first power supply voltage line VSL may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
第一坝DAM1和第二坝DAM2可以定位在第一电源电压线VSL上。第一坝DAM1可以包括第一子坝SDAM1和第二子坝SDAM2,第二坝DAM2可以包括第一子坝SDAM1、第二子坝SDAM2和第三子坝SDAM3。第一子坝SDAM1可以包括与第一有机膜160相同的材料,并且可以定位在同一层。第二子坝SDAM2可以包括与第二有机膜180相同的材料,并且可以定位在同一层。第三子坝SDAM3可以包括与堤190相同的材料,并且可以定位在同一层。The first dam DAM1 and the second dam DAM2 may be positioned on the first power supply voltage line VSL. The first dam DAM1 may include a first sub-dam SDAM1 and a second sub-dam SDAM2, and the second dam DAM2 may include a first sub-dam SDAM1, a second sub-dam SDAM2, and a third sub-dam SDAM3. The first sub-dam SDAM1 may include the same material as the first organic film 160 and may be positioned at the same layer. The second sub-dam SDAM2 may include the same material as the second organic film 180 and may be positioned at the same layer. The third sub-dam SDAM3 may include the same material as the bank 190 and may be positioned at the same layer.
第一坝DAM1的高度可以低于第二坝DAM2的高度,但是本公开的实施例不限于此。第一坝DAM1的高度可以基本上等于或高于第二坝DAM2的高度。The height of the first dam DAM1 may be lower than that of the second dam DAM2 , but the embodiment of the present disclosure is not limited thereto. The height of the first dam DAM1 may be substantially equal to or higher than that of the second dam DAM2 .
共电极173可以连接到第一电源电压线VSL的暴露而未被第一有机膜160、第二有机膜180和第一坝DAM1覆盖的部分。因此,共电极173可以从第一电源电压线VSL接收第一电源电压。The common electrode 173 may be connected to a portion of the first power voltage line VSL that is exposed and not covered by the first organic film 160, the second organic film 180, and the first dam DAM1. Thus, the common electrode 173 may receive a first power voltage from the first power voltage line VSL.
第一无机封装膜TFE1可以在显示面板100的右侧上在非显示区域NDA中覆盖第一坝DAM1、第二坝DAM2和裂缝坝CRD。第一无机封装膜TFE1可以在显示面板100的右侧上在非显示区域NDA中延伸到显示面板100的边缘EG附近。第一无机封装膜TFE1的侧表面可以与基底SUB的侧表面对准。The first inorganic encapsulation film TFE1 may cover the first dam DAM1, the second dam DAM2, and the crack dam CRD in the non-display area NDA on the right side of the display panel 100. The first inorganic encapsulation film TFE1 may extend to near the edge EG of the display panel 100 in the non-display area NDA on the right side of the display panel 100. A side surface of the first inorganic encapsulation film TFE1 may be aligned with a side surface of the substrate SUB.
有机封装膜TFE2可以布置为覆盖第一坝DAM1的顶表面,但不覆盖第二坝DAM2的顶表面。然而,应当理解的是,本公开不限于此。有机封装膜TFE2可以既不覆盖第一坝DAM1的顶表面也不覆盖第二坝DAM2的顶表面。借助于第一坝DAM1和第二坝DAM2,防止或减少有机封装膜TFE2溢出到显示面板100的边缘EG的情况可以是可能的。The organic encapsulation film TFE2 may be arranged to cover the top surface of the first dam DAM1 but not the top surface of the second dam DAM2. However, it should be understood that the present disclosure is not limited thereto. The organic encapsulation film TFE2 may cover neither the top surface of the first dam DAM1 nor the top surface of the second dam DAM2. With the aid of the first dam DAM1 and the second dam DAM2, it may be possible to prevent or reduce the situation where the organic encapsulation film TFE2 overflows to the edge EG of the display panel 100.
第二无机封装膜TFE3可以在显示面板100的右侧上在非显示区域NDA中覆盖第一坝DAM1、第二坝DAM2和裂缝坝CRD。第二无机封装膜TFE3可以在显示面板100的右侧上在非显示区域NDA中延伸到显示面板100的边缘EG附近。第二无机封装膜TFE3的侧表面可以与基底SUB的侧表面对准。The second inorganic encapsulation film TFE3 may cover the first dam DAM1, the second dam DAM2, and the crack dam CRD in the non-display area NDA on the right side of the display panel 100. The second inorganic encapsulation film TFE3 may extend to near the edge EG of the display panel 100 in the non-display area NDA on the right side of the display panel 100. A side surface of the second inorganic encapsulation film TFE3 may be aligned with a side surface of the substrate SUB.
可以形成从第二坝DAM2到显示面板100的边缘EG的无机封装区域,在无机封装区域中第一无机封装膜TFE1和第二无机封装膜TFE3彼此接触。无机封装区域可以围绕第二坝DAM2。An inorganic encapsulation region in which the first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 contact each other may be formed from the second dam DAM2 to the edge EG of the display panel 100. The inorganic encapsulation region may surround the second dam DAM2.
顺便提及,在图12中示出了扫描驱动电路SDC的扫描薄膜晶体管STFT(包括扫描沟道区STCH、扫描源区STS、扫描漏区STD和扫描栅电极STG)。由于扫描薄膜晶体管STFT与上面参照图5描述的薄膜晶体管TFT基本上相同;因此,将不描述扫描薄膜晶体管STFT。Incidentally, a scanning thin film transistor STFT (including a scanning channel region STCH, a scanning source region STS, a scanning drain region STD, and a scanning gate electrode STG) of the scanning driving circuit SDC is shown in Fig. 12. Since the scanning thin film transistor STFT is substantially the same as the thin film transistor TFT described above with reference to Fig. 5; therefore, the scanning thin film transistor STFT will not be described.
图13是更详细地示出图10的区域F的示例的放大剖视图。FIG. 13 is an enlarged cross-sectional view showing an example of the region F of FIG. 10 in more detail.
参照图13,显示垫PD、第一驱动垫DPD1和第二驱动垫DPD2中的每个可以包括第一辅助垫SPD1、第二辅助垫SPD2和第三辅助垫SPD3。13 , each of the display pad PD, the first driving pad DPD1 , and the second driving pad DPD2 may include a first auxiliary pad SPD1 , a second auxiliary pad SPD2 , and a third auxiliary pad SPD3 .
第一辅助垫SPD1可以包括与包含栅电极TG、电容器Cst的第一电容器电极CAE1和扫描线的第一栅极金属层相同的材料,并且可以定位在同一层。第一辅助垫SPD1可以定位在栅极绝缘体130上。第一辅助垫SPD1可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。The first auxiliary pad SPD1 may include the same material as the first gate metal layer including the gate electrode TG, the first capacitor electrode CAE1 of the capacitor Cst, and the scan line, and may be positioned on the same layer. The first auxiliary pad SPD1 may be positioned on the gate insulator 130. The first auxiliary pad SPD1 may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
第二辅助垫SPD2可以包括与包含第二电容器电极CAE2的第二栅极金属层相同的材料,并且可以定位在同一层。第二辅助垫SPD2可以定位在第一层间介电膜141上。第二辅助垫SPD2可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。The second auxiliary pad SPD2 may include the same material as the second gate metal layer including the second capacitor electrode CAE2, and may be positioned at the same layer. The second auxiliary pad SPD2 may be positioned on the first interlayer dielectric film 141. The second auxiliary pad SPD2 may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
第三辅助垫SPD3可以包括与包含第一连接电极CE1和数据线的第一数据金属层相同的材料,并且可以定位在同一层。第三辅助垫SPD3可以定位在第二层间介电膜142上。第三辅助垫SPD3可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。The third auxiliary pad SPD3 may include the same material as the first data metal layer including the first connection electrode CE1 and the data line, and may be positioned at the same layer. The third auxiliary pad SPD3 may be positioned on the second interlayer dielectric film 142. The third auxiliary pad SPD3 may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
显示垫PD的第三辅助垫SPD3可以通过诸如各向异性导电膜和各向异性导电粘合剂的导电粘合构件电连接到电路板300。第一驱动垫DPD1的第三辅助垫SPD3可以通过诸如各向异性导电膜和各向异性导电粘合剂的导电粘合构件电连接到驱动IC 200的输入凸块IBP。第二驱动垫DPD2的第三辅助垫SPD3可以通过诸如各向异性导电膜和各向异性导电粘合剂的导电粘合构件电连接到驱动IC 200的输出凸块OBP。在图13中,为了便于说明,简要地示出了驱动IC 200和电路板300。The third auxiliary pad SPD3 of the display pad PD may be electrically connected to the circuit board 300 through a conductive adhesive member such as an anisotropic conductive film and an anisotropic conductive adhesive. The third auxiliary pad SPD3 of the first driving pad DPD1 may be electrically connected to the input bump IBP of the driving IC 200 through a conductive adhesive member such as an anisotropic conductive film and an anisotropic conductive adhesive. The third auxiliary pad SPD3 of the second driving pad DPD2 may be electrically connected to the output bump OBP of the driving IC 200 through a conductive adhesive member such as an anisotropic conductive film and an anisotropic conductive adhesive. In FIG. 13 , for convenience of explanation, the driving IC 200 and the circuit board 300 are briefly shown.
第一无机封装膜TFE1和第二无机封装膜TFE3可以布置为覆盖第一坝DAM1并部分地覆盖第二坝DAM2。例如,第一无机封装膜TFE1和第二无机封装膜TFE3可以布置为使得其不覆盖第二坝DAM2的上表面的一部分。可选地,第一无机封装膜TFE1和第二无机封装膜TFE3可以覆盖第一坝DAM1和第二坝DAM2,但是在这种情况下,第一无机封装膜TFE1和第二无机封装膜TFE3可以不覆盖第二驱动垫DPD2的第三辅助垫SPD3。也就是说,第一无机封装膜TFE1和第二无机封装膜TFE3可以不延伸到与显示面板100的边缘EG相邻定位的显示垫PD、第一驱动垫DPD1和第二驱动垫DPD2。The first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 may be arranged to cover the first dam DAM1 and partially cover the second dam DAM2. For example, the first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 may be arranged so that they do not cover a portion of the upper surface of the second dam DAM2. Optionally, the first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 may cover the first dam DAM1 and the second dam DAM2, but in this case, the first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 may not cover the third auxiliary pad SPD3 of the second driving pad DPD2. That is, the first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 may not extend to the display pad PD, the first driving pad DPD1 and the second driving pad DPD2 located adjacent to the edge EG of the display panel 100.
图14是更详细地示出图11的区域G的示例的放大剖视图。FIG. 14 is an enlarged cross-sectional view showing an example of the region G of FIG. 11 in more detail.
参照图14,第一无机封装膜TFE1和第二无机封装膜TFE3可以布置为使得其在显示面板100的上侧上在非显示区域NDA中不覆盖裂缝坝CRD。也就是说,在显示面板100的上侧上在非显示区域NDA中,第一无机封装膜TFE1和第二无机封装膜TFE3可以不延伸到显示面板100的边缘EG。14 , the first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 may be arranged so that they do not cover the crack dam CRD in the non-display area NDA on the upper side of the display panel 100. That is, the first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 may not extend to the edge EG of the display panel 100 in the non-display area NDA on the upper side of the display panel 100.
另外,第一无机封装膜TFE1和第二无机封装膜TFE3可以布置为使得除了在显示面板100的上侧上的非显示区域NDA之外,它们在显示面板100的左侧和右侧上在非显示区域NDA中覆盖裂缝坝CRD。也就是说,除了在显示面板100的上侧上的非显示区域NDA之外,第一无机封装膜TFE1和第二无机封装膜TFE3可以在显示面板100的左侧和右侧上在非显示区域NDA中延伸到显示面板100的边缘EG。In addition, the first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 may be arranged such that they cover the crack dam CRD in the non-display area NDA on the left and right sides of the display panel 100, except for the non-display area NDA on the upper side of the display panel 100. That is, the first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 may extend to the edge EG of the display panel 100 in the non-display area NDA on the left and right sides of the display panel 100, except for the non-display area NDA on the upper side of the display panel 100.
图15是示出根据一些实施例的图2的区域I的显示面板的通孔、无机封装区域、布线区域和显示区域的示例的布局图。图16是示出沿着图15的线V-V'截取的显示面板的示例的剖视图。图17是更详细地示出图16的区域K的示例的放大剖视图。图18至图22是示出图16的区域L的各种示例的放大剖视图。FIG15 is a layout diagram showing examples of through holes, inorganic encapsulation areas, wiring areas, and display areas of a display panel of region I of FIG2 according to some embodiments. FIG16 is a cross-sectional view showing an example of a display panel taken along line V-V' of FIG15. FIG17 is an enlarged cross-sectional view showing an example of region K of FIG16 in more detail. FIG18 to FIG22 are enlarged cross-sectional views showing various examples of region L of FIG16.
参照图15至图17,根据本公开的一些实施例的显示面板100包括围绕通孔TH的无机封装区域IEA和围绕无机封装区域IEA的布线区域WLA。15 to 17 , the display panel 100 according to some embodiments of the present disclosure includes an inorganic encapsulation area IEA surrounding the through hole TH and a wiring area WLA surrounding the inorganic encapsulation area IEA.
在无机封装区域IEA中,封装层ENC的第一无机封装膜TFE1和第二无机封装膜TFE3彼此接触,以防止或减少氧或湿气由于通孔TH而渗透到显示层DISL的发光元件层EML中的情况。In the inorganic encapsulation area IEA, the first and second inorganic encapsulation films TFE1 and TFE3 of the encapsulation layer ENC contact each other to prevent or reduce penetration of oxygen or moisture into the light emitting element layer EML of the display layer DISL through the through holes TH.
无机封装区域IEA可以包括至少一个坝、至少一个尖端和至少一个凹槽。例如,如图17中所示,无机封装区域IEA可以包括第一坝HDAM1、第二坝HDAM2、第一尖端T1至第八尖端T8以及第一凹槽GR1至第三凹槽GR3,这将稍后描述。The inorganic encapsulation area IEA may include at least one dam, at least one tip, and at least one groove. For example, as shown in FIG. 17 , the inorganic encapsulation area IEA may include a first dam HDAM1, a second dam HDAM2, first to eighth tips T1 to T8, and first to third grooves GR1 to GR3, which will be described later.
第一尖端T1和第二尖端T2可以定位为比第一坝HDAM1靠近布线区域WLA。第一尖端T1可以定位为比第二尖端T2靠近布线区域WLA。第二尖端T2可以定位在第一尖端T1与第一坝HDAM1之间。The first tip T1 and the second tip T2 may be positioned closer to the wiring area WLA than the first dam HDAM1. The first tip T1 may be positioned closer to the wiring area WLA than the second tip T2. The second tip T2 may be positioned between the first tip T1 and the first dam HDAM1.
第三尖端T3、第四尖端T4、第五尖端T5和第六尖端T6可以定位在第一坝HDAM1与第二坝HDAM2之间。第三尖端T3的至少一部分可以在第三方向(Z轴方向)上与第一坝HDAM1叠置。The third tip T3, the fourth tip T4, the fifth tip T5, and the sixth tip T6 may be positioned between the first dam HDAM1 and the second dam HDAM2. At least a portion of the third tip T3 may overlap the first dam HDAM1 in the third direction (Z-axis direction).
第七尖端T7和第八尖端T8可以定位为比第二坝HDAM2靠近通孔TH。第七尖端T7的至少一部分可以在第三方向(Z轴方向)上与第二坝HDAM2叠置。第八尖端T8与通孔TH之间的距离可以是近似50μm。The seventh and eighth tips T7 and T8 may be located closer to the through hole TH than the second dam HDAM2. At least a portion of the seventh tip T7 may overlap the second dam HDAM2 in the third direction (Z-axis direction). The distance between the eighth tip T8 and the through hole TH may be approximately 50 μm.
第一凹槽GR1可以定位在第一尖端T1与第二尖端T2之间。第二凹槽GR2可以定位在第三尖端T3与第四尖端T4之间。第三凹槽GR3可以定位在第五尖端T5与第六尖端T6之间。The first groove GR1 may be positioned between the first tip T1 and the second tip T2. The second groove GR2 may be positioned between the third tip T3 and the fourth tip T4. The third groove GR3 may be positioned between the fifth tip T5 and the sixth tip T6.
在布线区域WLA中,线在通孔TH周围延伸。这些线中的一些可以连接到数据线,而它们中的一些其他线可以连接到高于第一电源电压的第二电源电压从其施加的第二电源电压线。它们中的又一些其他线可以连接到扫描线。布线区域WLA可以被显示区域DA围绕。In the wiring area WLA, wires extend around the through hole TH. Some of these wires may be connected to the data line, and some other of them may be connected to the second power supply voltage line from which a second power supply voltage higher than the first power supply voltage is applied. Still other of them may be connected to the scan line. The wiring area WLA may be surrounded by the display area DA.
在图16的剖视图中示出了当通过照射激光然后喷射蚀刻剂来切割显示面板100的基底SUB时的通孔TH的边缘TEG。The edge TEG of the through hole TH when the substrate SUB of the display panel 100 is cut by irradiating laser and then spraying etchant is shown in the cross-sectional view of FIG. 16 .
参照图16,当通过照射激光然后喷射蚀刻剂来切割基底SUB时,通过蚀刻剂可以在基底SUB的上表面US上在通孔边缘区域TEGA中形成处理标记。通孔边缘区域TEGA可以在近似30μm内。16, when the substrate SUB is cut by irradiating laser and then spraying etchant, a process mark may be formed in the through hole edge area TEGA on the upper surface US of the substrate SUB by the etchant. The through hole edge area TEGA may be within approximately 30 μm.
通孔边缘区域TEGA可以包括第一表面IS1、第二表面IS2和在第一表面IS1与第二表面IS2之间的第三表面IS3,这些表面是在照射激光之后通过喷射蚀刻剂而形成的。第一表面IS1和第二表面IS2可以是倾斜表面。第一表面IS1和第二表面IS2可以彼此间隔开,且第三表面IS3在其间。换句话说,基底SUB可以包括彼此间隔开的多个倾斜表面。The through hole edge area TEGA may include a first surface IS1, a second surface IS2, and a third surface IS3 between the first surface IS1 and the second surface IS2, which are formed by spraying an etchant after irradiating the laser. The first surface IS1 and the second surface IS2 may be inclined surfaces. The first surface IS1 and the second surface IS2 may be spaced apart from each other, with the third surface IS3 therebetween. In other words, the substrate SUB may include a plurality of inclined surfaces spaced apart from each other.
侧表面SS1与上表面US之间的角度θ4可以是近似90度。换句话说,侧表面SS1可以与上表面US基本上垂直。底表面BS与第一表面IS1之间的角度θ5和第三表面IS3与第二表面IS2之间的角度θ6可以是钝角。形成在基底SUB的上表面US上的处理标记可以在第三方向(Z轴方向)上与第二表面IS2叠置。然而,应当理解的是,本公开不限于此。形成在基底SUB的上表面US上的处理标记可以与第一表面IS1、第二表面IS2和第三表面IS3叠置。The angle θ4 between the side surface SS1 and the upper surface US may be approximately 90 degrees. In other words, the side surface SS1 may be substantially perpendicular to the upper surface US. The angle θ5 between the bottom surface BS and the first surface IS1 and the angle θ6 between the third surface IS3 and the second surface IS2 may be an obtuse angle. The processing mark formed on the upper surface US of the substrate SUB may overlap with the second surface IS2 in the third direction (Z-axis direction). However, it should be understood that the present disclosure is not limited thereto. The processing mark formed on the upper surface US of the substrate SUB may overlap with the first surface IS1, the second surface IS2, and the third surface IS3.
当通过照射激光然后喷射蚀刻剂来切割显示面板100的基底SUB时,底表面BS与第一表面IS1之间的角度θ5和第三表面IS3与第二表面IS2之间的角度θ6可以根据通过激光形成的激光照射区域的深度而变化。用于沿着显示面板100的边缘EG切割而通过激光形成的激光照射区域的深度可以与用于沿着通孔TH的边缘TEG切割而通过激光形成的激光照射区域的深度不同。将参照稍后将要描述的图18至图22更详细地描述第一表面IS1、第二表面IS2和第三表面IS3。When the substrate SUB of the display panel 100 is cut by irradiating laser and then spraying etchant, the angle θ5 between the bottom surface BS and the first surface IS1 and the angle θ6 between the third surface IS3 and the second surface IS2 may vary according to the depth of the laser irradiation area formed by the laser. The depth of the laser irradiation area formed by the laser for cutting along the edge EG of the display panel 100 may be different from the depth of the laser irradiation area formed by the laser for cutting along the edge TEG of the through hole TH. The first surface IS1, the second surface IS2, and the third surface IS3 will be described in more detail with reference to FIGS. 18 to 22 to be described later.
参照图17,第一虚设图案DP1可以包括与包含电容器Cst的第二电容器电极CAE2的第二栅极金属层相同的材料,并且可以定位在同一层。例如,第一虚设图案DP1可以定位在第一层间介电膜141上。第一虚设图案DP1可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。17, the first dummy pattern DP1 may include the same material as the second gate metal layer including the second capacitor electrode CAE2 of the capacitor Cst, and may be positioned at the same layer. For example, the first dummy pattern DP1 may be positioned on the first interlayer dielectric film 141. The first dummy pattern DP1 may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
第二虚设图案DP2可以包括与包含第一连接电极CE1和数据线的第一数据金属层相同的材料,并且可以定位在同一层。例如,第二虚设图案DP2可以定位在第二层间介电膜142上。第二虚设图案DP2可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。The second dummy pattern DP2 may include the same material as the first data metal layer including the first connection electrode CE1 and the data line, and may be positioned on the same layer. For example, the second dummy pattern DP2 may be positioned on the second interlayer dielectric film 142. The second dummy pattern DP2 may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
第二虚设图案DP2可以在第三方向(Z轴方向)上与第一虚设图案DP1叠置。The second dummy pattern DP2 may overlap the first dummy pattern DP1 in the third direction (Z-axis direction).
第一尖端T1至第八尖端T8可以包括与包含第二连接电极CE2的第二数据金属层相同的材料,并且可以定位在同一层。例如,第一尖端T1至第八尖端T8可以定位在第一有机膜160上。第一尖端T1至第八尖端T8可以由钼(Mo)、铝(Al)、铬(Cr)、金(Au)、钛(Ti)、镍(Ni)、钕(Nd)和铜(Cu)中的一种或其合金的单层或多层构成。The first to eighth tips T1 to T8 may include the same material as the second data metal layer including the second connection electrode CE2, and may be positioned at the same layer. For example, the first to eighth tips T1 to T8 may be positioned on the first organic film 160. The first to eighth tips T1 to T8 may be composed of a single layer or multiple layers of one of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), and copper (Cu), or an alloy thereof.
第一尖端T1至第八尖端T8中的每个可以通过穿透第一有机膜160的接触孔连接到第二虚设图案DP2。第一尖端T1至第八尖端T8中的每个可以包括檐结构,檐结构具有未被第一有机膜160、第二有机膜180、第一坝HDAM1和第二坝HDAM2覆盖而暴露的下表面(或底表面)和上表面。第四尖端T4和第五尖端T5可以一体地形成。第一尖端T1至第八尖端T8中的每个可以是用于形成凹槽(或沟槽)的突起图案或沟槽图案。第八尖端T8可以是与通孔TH的边缘TEG相邻的最外结构。尽管第八尖端T8在图17中被描绘为与通孔TH的边缘TEG相邻的最外结构,但是本公开的实施例不限于此。例如,如果去除第七尖端T7和第八尖端T8,则第二坝HDAM2可以是与通孔TH的边缘TEG相邻的最外结构,该最外结构可以防止或减少封装层ENC的有机封装膜TFE2溢出的情况。可选地,如果去除第七尖端T7和第八尖端T8,则将发射层172与共电极173分离的凹槽可以是与通孔TH的边缘TEG相邻的最外结构。Each of the first tip T1 to the eighth tip T8 may be connected to the second dummy pattern DP2 through a contact hole penetrating the first organic film 160. Each of the first tip T1 to the eighth tip T8 may include an eaves structure having a lower surface (or bottom surface) and an upper surface that are not covered and exposed by the first organic film 160, the second organic film 180, the first dam HDAM1 and the second dam HDAM2. The fourth tip T4 and the fifth tip T5 may be formed integrally. Each of the first tip T1 to the eighth tip T8 may be a protrusion pattern or a groove pattern for forming a groove (or a groove). The eighth tip T8 may be the outermost structure adjacent to the edge TEG of the through hole TH. Although the eighth tip T8 is depicted as the outermost structure adjacent to the edge TEG of the through hole TH in FIG. 17, the embodiments of the present disclosure are not limited thereto. For example, if the seventh tip T7 and the eighth tip T8 are removed, the second dam HDAM2 may be the outermost structure adjacent to the edge TEG of the through hole TH, which may prevent or reduce the overflow of the organic encapsulation film TFE2 of the encapsulation layer ENC. Alternatively, if the seventh and eighth tip ends T7 and T8 are removed, the groove separating the emission layer 172 from the common electrode 173 may be an outermost structure adjacent to the edge TEG of the through hole TH.
从第八尖端T8到通孔TH的边缘TEG的距离可以是近似300μm。通孔边缘区域TEGA可以定位在第八尖端T8与通孔TH的边缘TEG之间。A distance from the eighth tip T8 to the edge TEG of the through hole TH may be approximately 300 μm. A through hole edge area TEGA may be positioned between the eighth tip T8 and the edge TEG of the through hole TH.
第一凹槽GR1可以形成在第一尖端T1与第二尖端T2之间,第二凹槽GR2可以形成在第三尖端T3与第四尖端T4之间,第三凹槽GR3可以形成在第五尖端T5与第六尖端T6之间。第一凹槽GR1可以具有由第一尖端T1和第二尖端T2形成的檐结构,第二凹槽GR2可以具有由第三尖端T3和第四尖端T4形成的檐结构,第三凹槽GR3可以具有由第五尖端T5和第六尖端T6形成的檐结构。The first groove GR1 may be formed between the first tip T1 and the second tip T2, the second groove GR2 may be formed between the third tip T3 and the fourth tip T4, and the third groove GR3 may be formed between the fifth tip T5 and the sixth tip T6. The first groove GR1 may have an eaves structure formed by the first tip T1 and the second tip T2, the second groove GR2 may have an eaves structure formed by the third tip T3 and the fourth tip T4, and the third groove GR3 may have an eaves structure formed by the fifth tip T5 and the sixth tip T6.
由于通过蒸发沉积发射层172,而通过溅射沉积共电极173,因此台阶覆盖度低,因而其可能在第一凹槽GR1、第二凹槽GR2和第三凹槽GR3的每个中断裂。另一方面,由于通过化学气相沉积、原子层沉积等沉积第一无机封装膜TFE1和第二无机封装膜TFE3,因此它们具有高台阶覆盖度,并因而在第一凹槽GR1、第二凹槽GR2和第三凹槽GR3中的每个中不会断裂。这里,台阶覆盖度指施用在倾斜部分上的薄膜与施用在平坦部分上的薄膜的比率。在第一凹槽GR1、第二凹槽GR2和第三凹槽GR3中的每个中,可以存在与发射层172断开的残留物172_D和与共电极173断开的残留物173_D。Since the emission layer 172 is deposited by evaporation and the common electrode 173 is deposited by sputtering, the step coverage is low, and thus it may be broken in each of the first groove GR1, the second groove GR2, and the third groove GR3. On the other hand, since the first inorganic encapsulation film TFE1 and the second inorganic encapsulation film TFE3 are deposited by chemical vapor deposition, atomic layer deposition, etc., they have high step coverage and thus will not be broken in each of the first groove GR1, the second groove GR2, and the third groove GR3. Here, the step coverage refers to the ratio of the film applied on the inclined portion to the film applied on the flat portion. In each of the first groove GR1, the second groove GR2, and the third groove GR3, there may be a residue 172_D disconnected from the emission layer 172 and a residue 173_D disconnected from the common electrode 173.
第一坝HDAM1可以包括第一子坝HDA1、第二子坝HDA2、第三子坝HDA3和第四子坝HDA4。第一子坝HDA1可以定位在第一有机膜160上,并且可以包括与第二有机膜180相同的材料。第一子坝HDA1可以定位在第二尖端T2和第三尖端T3上。第二子坝HDA2可以定位在第一子坝HDA1上,并且可以包括与堤190相同的材料。第三子坝HDA3和第四子坝HDA4可以定位在第二子坝HDA2上,并且可以包括与间隔件191相同的材料。然而,应当理解的是,本公开不限于此。第四子坝HDA4可以定位为比第三子坝HDA3靠近通孔TH。第四子坝HDA4的厚度可以大于第三子坝HDA3的厚度。The first dam HDAM1 may include a first sub-dam HDA1, a second sub-dam HDA2, a third sub-dam HDA3, and a fourth sub-dam HDA4. The first sub-dam HDA1 may be positioned on the first organic film 160, and may include the same material as the second organic film 180. The first sub-dam HDA1 may be positioned on the second tip T2 and the third tip T3. The second sub-dam HDA2 may be positioned on the first sub-dam HDA1, and may include the same material as the embankment 190. The third sub-dam HDA3 and the fourth sub-dam HDA4 may be positioned on the second sub-dam HDA2, and may include the same material as the spacer 191. However, it should be understood that the present disclosure is not limited thereto. The fourth sub-dam HDA4 may be positioned closer to the through hole TH than the third sub-dam HDA3. The thickness of the fourth sub-dam HDA4 may be greater than the thickness of the third sub-dam HDA3.
第二坝HDAM2可以包括第五子坝HDA5、第六子坝HDA6和第七子坝HDA7。第五子坝HDA5可以定位在第一有机膜160上,并且可以包括与第二有机膜180相同的材料。第五子坝HDA5可以定位在第七尖端T7上。第六子坝HDA6可以定位在第五子坝HDA5上,并且可以包括与堤190相同的材料。第七子坝HDA7可以定位在第六子坝HDA6上,并且可以包括与间隔件191相同的材料。然而,应当理解的是,本公开不限于此。The second dam HDAM2 may include a fifth sub-dam HDA5, a sixth sub-dam HDA6, and a seventh sub-dam HDA7. The fifth sub-dam HDA5 may be positioned on the first organic film 160, and may include the same material as the second organic film 180. The fifth sub-dam HDA5 may be positioned on the seventh tip T7. The sixth sub-dam HDA6 may be positioned on the fifth sub-dam HDA5, and may include the same material as the embankment 190. The seventh sub-dam HDA7 may be positioned on the sixth sub-dam HDA6, and may include the same material as the spacer 191. However, it should be understood that the present disclosure is not limited thereto.
借助于第一坝HDAM1和第二坝HDAM2,防止或减少有机封装膜TFE2溢出到通孔TH中可以是可能的。With the help of the first dam HDAM1 and the second dam HDAM2 , it may be possible to prevent or reduce the overflow of the organic encapsulation film TFE2 into the through hole TH.
残留物172_D、残留物173_D、第一无机封装膜TFE1和第二无机封装膜TFE3可以延伸到通孔TH的边缘TEG。残留物172_D的端部、残留物173_D的端部、第一无机封装膜TFE1的端部和第二无机封装膜TFE3的端部可以与通孔TH的边缘TEG对准。The residue 172_D, the residue 173_D, the first inorganic encapsulation film TFE1, and the second inorganic encapsulation film TFE3 may extend to the edge TEG of the through hole TH. Ends of the residue 172_D, the residue 173_D, the first inorganic encapsulation film TFE1, and the second inorganic encapsulation film TFE3 may be aligned with the edge TEG of the through hole TH.
如图17中示出的,发射层172和共电极173在由第一尖端T1至第八尖端T8形成的第一凹槽GR1、第二凹槽GR2和第三凹槽GR3中的每个中断开,防止或减少氧、湿气等渗透通过经由通孔TH暴露的发射层172和共电极173的情况可以是可能的。As shown in Figure 17, the emission layer 172 and the common electrode 173 are disconnected in each of the first groove GR1, the second groove GR2 and the third groove GR3 formed by the first tip T1 to the eighth tip T8, and it may be possible to prevent or reduce the penetration of oxygen, moisture, etc. through the emission layer 172 and the common electrode 173 exposed through the through hole TH.
根据如图18中示出的一些实施例,在基底SUB的通孔TH中在侧表面SS1与底表面BS之间可以存在台阶边缘。例如,基底SUB可以包括在侧表面SS1与底表面BS之间的第一表面IS1、第二表面IS2和第三表面IS3。第一表面IS1可以与底表面BS相交,并且可以以预定的角度从底表面BS延伸。第二表面IS2可以与侧表面SS1相交,并且可以以预定的角度从侧表面SS1延伸。第三表面IS3可以定位在第一表面IS1与第二表面IS2之间,并且一端可以与第一表面IS1相交,另一端可以与第二表面IS2相交。According to some embodiments as shown in FIG. 18, there may be a step edge between the side surface SS1 and the bottom surface BS in the through hole TH of the substrate SUB. For example, the substrate SUB may include a first surface IS1, a second surface IS2, and a third surface IS3 between the side surface SS1 and the bottom surface BS. The first surface IS1 may intersect with the bottom surface BS and may extend from the bottom surface BS at a predetermined angle. The second surface IS2 may intersect with the side surface SS1 and may extend from the side surface SS1 at a predetermined angle. The third surface IS3 may be positioned between the first surface IS1 and the second surface IS2, and one end may intersect with the first surface IS1 and the other end may intersect with the second surface IS2.
底表面BS与第一表面IS1之间的角度θ5和第二表面IS2与第三表面IS3之间的角度θ6可以是钝角。第一表面IS1与第三表面IS3之间的角度θ7可以等于底表面BS与第一表面IS1之间的角度θ5。第一表面IS1与第三表面IS3之间的角度θ7可以是基底SUB的外角。An angle θ5 between the bottom surface BS and the first surface IS1 and an angle θ6 between the second surface IS2 and the third surface IS3 may be an obtuse angle. An angle θ7 between the first surface IS1 and the third surface IS3 may be equal to the angle θ5 between the bottom surface BS and the first surface IS1. An angle θ7 between the first surface IS1 and the third surface IS3 may be an outer angle of the substrate SUB.
根据本公开的一些实施例,在侧表面SS1与底表面BS之间的第一表面IS1、第二表面IS2和第三表面IS3可以形成在基底SUB上。在底表面BS与第三表面IS3之间和在第三表面IS3与侧表面SS1之间可以存在台阶边缘(即,两个台阶)。这些台阶可以通过激光照射区域形成,激光照射区域通过激光照射两次或更多次形成,这将稍后描述。下面将给出对其更详细的描述。According to some embodiments of the present disclosure, the first surface IS1, the second surface IS2, and the third surface IS3 between the side surface SS1 and the bottom surface BS may be formed on the substrate SUB. There may be step edges (i.e., two steps) between the bottom surface BS and the third surface IS3 and between the third surface IS3 and the side surface SS1. These steps may be formed by a laser irradiation area, which is formed by laser irradiation twice or more, which will be described later. A more detailed description thereof will be given below.
第一表面IS1和第二表面IS2可以是倾斜表面。第一表面IS1在倾斜方向上的长度可以等于第二表面IS2在倾斜方向上的长度。第一表面IS1和第二表面IS2的长度可以根据激光照射区域的间隔或深度来调节,这将稍后描述。第三表面IS3可以延伸为与底表面BS或上表面US平行。第三表面IS3在第一表面IS1与第二表面IS2之间的长度可以小于第一表面IS1和第二表面IS2中的每个的长度。然而,应当理解的是,本公开不限于此。The first surface IS1 and the second surface IS2 may be inclined surfaces. The length of the first surface IS1 in the inclined direction may be equal to the length of the second surface IS2 in the inclined direction. The lengths of the first surface IS1 and the second surface IS2 may be adjusted according to the interval or depth of the laser irradiation area, which will be described later. The third surface IS3 may extend parallel to the bottom surface BS or the upper surface US. The length of the third surface IS3 between the first surface IS1 and the second surface IS2 may be less than the length of each of the first surface IS1 and the second surface IS2. However, it should be understood that the present disclosure is not limited thereto.
另外,由第一表面IS1、第二表面IS2和第三表面IS3在侧表面SS1与底表面BS之间形成的长度TAL可以是近似100μm至500μm。例如,当从顶部观看时,底表面BS的端部与侧表面SS1之间的长度TAL可以是近似100μm至500μm。然而,将要理解的是,本公开不限于此。随着由第一表面IS1、第二表面IS2和第三表面IS3形成的长度TAL增加,基底SUB可以容易地在通孔TH处与母基底分离。如果基底SUB不容易与母基底分离,则可以考虑通过物理撞击来分离基底SUB。然而,可能出现基底SUB在通孔TH的边缘处被损坏的破裂问题。根据一些实施例,通过形成包括第一表面IS1、第二表面IS2和第三表面IS3的基底SUB,使基底SUB在通孔TH处容易地分离可以是可能的。In addition, the length TAL formed by the first surface IS1, the second surface IS2, and the third surface IS3 between the side surface SS1 and the bottom surface BS may be approximately 100 μm to 500 μm. For example, when viewed from the top, the length TAL between the end of the bottom surface BS and the side surface SS1 may be approximately 100 μm to 500 μm. However, it will be understood that the present disclosure is not limited to this. As the length TAL formed by the first surface IS1, the second surface IS2, and the third surface IS3 increases, the substrate SUB may be easily separated from the mother substrate at the through hole TH. If the substrate SUB is not easily separated from the mother substrate, it may be considered to separate the substrate SUB by physical impact. However, there may be a problem of fracture in which the substrate SUB is damaged at the edge of the through hole TH. According to some embodiments, by forming a substrate SUB including a first surface IS1, a second surface IS2, and a third surface IS3, it may be possible to easily separate the substrate SUB at the through hole TH.
根据本公开的一些实施例,基底SUB具有在底表面BS与第三表面IS3之间的台阶以及在第三表面IS3与侧表面SS1之间的台阶,从而减小基底SUB的侧表面的边缘的角度。以这种方式,防止或减少由于基底SUB的侧表面上的尖锐边缘而导致基底SUB被外部冲击容易地损坏的情况可以是可能的。According to some embodiments of the present disclosure, the substrate SUB has a step between the bottom surface BS and the third surface IS3 and a step between the third surface IS3 and the side surface SS1, thereby reducing the angle of the edge of the side surface of the substrate SUB. In this way, it may be possible to prevent or reduce the situation where the substrate SUB is easily damaged by an external impact due to a sharp edge on the side surface of the substrate SUB.
参照图19和图20,在根据一些实施例的基底SUB中,第一表面IS1在倾斜方向上的长度可以与第二表面IS2在倾斜方向上的长度不同,底表面BS与第一表面IS1之间的角度θ5可以与第二表面IS2与第三表面IS3之间的角度θ6不同。19 and 20 , in a substrate SUB according to some embodiments, a length of the first surface IS1 in an inclined direction may be different from a length of the second surface IS2 in the inclined direction, and an angle θ5 between the bottom surface BS and the first surface IS1 may be different from an angle θ6 between the second surface IS2 and the third surface IS3.
如图19中所示,第二表面IS2在倾斜方向上的长度可以大于第一表面IS1在倾斜方向上的长度。第二表面IS2在倾斜方向上的长度可以通过增加稍后将要描述的第二激光照射区域的深度来形成,第二激光照射区域通过照射第二激光而形成。另外,第二表面IS2在倾斜方向上的长度可以通过增加稍后将要描述的第三激光照射区域与第二激光照射区域之间的间隔来形成,第三激光照射区域通过照射第三激光而形成。As shown in FIG. 19, the length of the second surface IS2 in the oblique direction may be greater than the length of the first surface IS1 in the oblique direction. The length of the second surface IS2 in the oblique direction may be formed by increasing the depth of a second laser irradiation region to be described later, the second laser irradiation region being formed by irradiating the second laser. In addition, the length of the second surface IS2 in the oblique direction may be formed by increasing the interval between a third laser irradiation region to be described later and the second laser irradiation region, the third laser irradiation region being formed by irradiating the third laser.
另外,底表面BS与第一表面IS1之间的角度θ5可以大于第二表面IS2与第三表面IS3之间的角度θ6。这样的结构特征可以通过调节如上所述的激光照射区域的间隔或深度来形成。In addition, an angle θ5 between the bottom surface BS and the first surface IS1 may be greater than an angle θ6 between the second surface IS2 and the third surface IS3 Such a structural feature may be formed by adjusting the interval or depth of the laser irradiation region as described above.
在图19中所示的示例中,第二表面IS2在倾斜方向上的长度大于第一表面IS1在倾斜方向上的长度,底表面BS与第一表面IS1之间的角度θ5大于第二表面IS2与第三表面IS3之间的角度θ6。然而,应当理解的是,本公开不限于此。第二表面IS2在倾斜方向上的长度可以大于第一表面IS1在倾斜方向上的长度,底表面BS与第一表面IS1之间的角度θ5可以等于第二表面IS2与第三表面IS3之间的角度θ6。另外,底表面BS与第一表面IS1之间的角度θ5可以大于第二表面IS2与第三表面IS3之间的角度θ6,第二表面IS2在倾斜方向上的长度可以等于第一表面IS1在倾斜方向上的长度。In the example shown in FIG. 19 , the length of the second surface IS2 in the inclined direction is greater than the length of the first surface IS1 in the inclined direction, and the angle θ5 between the bottom surface BS and the first surface IS1 is greater than the angle θ6 between the second surface IS2 and the third surface IS3. However, it should be understood that the present disclosure is not limited thereto. The length of the second surface IS2 in the inclined direction may be greater than the length of the first surface IS1 in the inclined direction, and the angle θ5 between the bottom surface BS and the first surface IS1 may be equal to the angle θ6 between the second surface IS2 and the third surface IS3. In addition, the angle θ5 between the bottom surface BS and the first surface IS1 may be greater than the angle θ6 between the second surface IS2 and the third surface IS3, and the length of the second surface IS2 in the inclined direction may be equal to the length of the first surface IS1 in the inclined direction.
如图20中所示,第一表面IS1在倾斜方向上的长度可以大于第二表面IS2在倾斜方向上的长度。第一表面IS1在倾斜方向上的长度可以通过增加稍后将要描述的第三激光照射区域的深度来形成,第三激光照射区域通过照射第三激光而形成。另外,第二表面IS2与第三表面IS3之间的角度θ6可以大于底表面BS与第一表面IS1之间的角度θ5。这样的结构特征可以通过调节如上所述的激光照射区域的深度来形成。As shown in FIG. 20, the length of the first surface IS1 in the inclined direction may be greater than the length of the second surface IS2 in the inclined direction. The length of the first surface IS1 in the inclined direction may be formed by increasing the depth of a third laser irradiation region to be described later, the third laser irradiation region being formed by irradiating a third laser. In addition, the angle θ6 between the second surface IS2 and the third surface IS3 may be greater than the angle θ5 between the bottom surface BS and the first surface IS1. Such a structural feature may be formed by adjusting the depth of the laser irradiation region as described above.
在图20中所示的示例中,第一表面IS1在倾斜方向上的长度大于第二表面IS2在倾斜方向上的长度,第二表面IS2与第三表面IS3之间的角度θ6大于底表面BS与第一表面IS1之间的角度θ5。然而,应当理解的是,本公开不限于此。第一表面IS1在倾斜方向上的长度可以大于第二表面IS2在倾斜方向上的长度,底表面BS与第一表面IS1之间的角度θ5可以等于第二表面IS2与第三表面IS3之间的角度θ6。另外,第二表面IS2与第三表面IS3之间的角度θ6可以大于底表面BS与第一表面IS1之间的角度θ5,第一表面IS1在倾斜方向上的长度可以等于第二表面IS2在倾斜方向上的长度。In the example shown in FIG. 20, the length of the first surface IS1 in the inclined direction is greater than the length of the second surface IS2 in the inclined direction, and the angle θ6 between the second surface IS2 and the third surface IS3 is greater than the angle θ5 between the bottom surface BS and the first surface IS1. However, it should be understood that the present disclosure is not limited thereto. The length of the first surface IS1 in the inclined direction may be greater than the length of the second surface IS2 in the inclined direction, and the angle θ5 between the bottom surface BS and the first surface IS1 may be equal to the angle θ6 between the second surface IS2 and the third surface IS3. In addition, the angle θ6 between the second surface IS2 and the third surface IS3 may be greater than the angle θ5 between the bottom surface BS and the first surface IS1, and the length of the first surface IS1 in the inclined direction may be equal to the length of the second surface IS2 in the inclined direction.
顺便提及,基底SUB的第三表面IS3可以不与底表面BS或上表面US平行。Incidentally, the third surface IS3 of the substrate SUB may not be parallel to the bottom surface BS or the upper surface US.
参照图21,根据一些实施例,第三表面IS3可以是倾斜表面。例如,第三表面IS3与第一表面IS1之间的角度θ7可以不同于底表面BS与第一表面IS1之间的角度θ5。第三表面IS3与第一表面IS1之间的角度θ7可以大于底表面BS与第一表面IS1之间的角度θ5。另外,第三表面IS3与第一表面IS1之间的角度θ7可以大于第三表面IS3与第二表面IS2之间的角度θ6。21, according to some embodiments, the third surface IS3 may be an inclined surface. For example, the angle θ7 between the third surface IS3 and the first surface IS1 may be different from the angle θ5 between the bottom surface BS and the first surface IS1. The angle θ7 between the third surface IS3 and the first surface IS1 may be greater than the angle θ5 between the bottom surface BS and the first surface IS1. In addition, the angle θ7 between the third surface IS3 and the first surface IS1 may be greater than the angle θ6 between the third surface IS3 and the second surface IS2.
另外,与根据图18至图21的上述实施例的平坦表面不同,基底SUB的第一表面IS1和第二表面IS2可以是弯曲表面。In addition, unlike the flat surfaces according to the above-described embodiments of FIGS. 18 to 21 , the first and second surfaces IS1 and IS2 of the substrate SUB may be curved surfaces.
参照图22,根据一些实施例,基底SUB的第一表面IS1和第二表面IS2可以是弯曲表面。例如,第一表面IS1可以是底表面BS与第三表面IS3之间的凸出表面。第二表面IS2可以是侧表面SS1与第三表面IS3之间的凸出表面。然而,应当理解的是,本公开不限于此。第一表面IS1和第二表面IS2中的一个可以是弯曲表面,而另一个可以是平坦表面。22, according to some embodiments, the first surface IS1 and the second surface IS2 of the substrate SUB may be curved surfaces. For example, the first surface IS1 may be a convex surface between the bottom surface BS and the third surface IS3. The second surface IS2 may be a convex surface between the side surface SS1 and the third surface IS3. However, it should be understood that the present disclosure is not limited thereto. One of the first surface IS1 and the second surface IS2 may be a curved surface, and the other may be a flat surface.
尽管在图22中第一表面IS1和第二表面IS2是凸出表面,但是本公开不限于此。第一表面IS1和第二表面IS2中的至少一个可以是凹进表面。另外,尽管第三表面IS3是平坦表面,但是本公开不限于此。第三表面IS3可以不与底表面BS平行,并且可以是凸出表面。Although the first surface IS1 and the second surface IS2 are convex surfaces in FIG. 22, the present disclosure is not limited thereto. At least one of the first surface IS1 and the second surface IS2 may be a concave surface. In addition, although the third surface IS3 is a flat surface, the present disclosure is not limited thereto. The third surface IS3 may not be parallel to the bottom surface BS and may be a convex surface.
在下文中,将参照其他附图描述制造上述显示装置的方法。Hereinafter, a method of manufacturing the above-mentioned display device will be described with reference to other drawings.
图23是用于示出根据本公开的一些实施例的制造显示装置的方法的流程图。图24至图39是用于示出根据本公开的一些实施例的制造显示装置的方法的视图。在制造显示装置的方法的描述中,图27是沿着图26的线VII-VII'截取的剖视图,除此之外,剩余的剖视图是沿着相应的平面图的线VI-VI'截取的剖视图。FIG23 is a flow chart for illustrating a method for manufacturing a display device according to some embodiments of the present disclosure. FIG24 to FIG39 are views for illustrating a method for manufacturing a display device according to some embodiments of the present disclosure. In the description of the method for manufacturing a display device, FIG27 is a cross-sectional view taken along line VII-VII' of FIG26, and in addition, the remaining cross-sectional views are cross-sectional views taken along line VI-VI' of the corresponding plan view.
首先,如图24和图25中所示,在母基底MSUB的第一表面上形成多个显示单元DPC(图23的S110)。First, as shown in FIGS. 24 and 25 , a plurality of display cells DPC are formed on a first surface of a mother substrate MSUB ( S110 of FIG. 23 ).
在母基底MSUB的第一表面上形成多个显示单元DPC中的每个的显示层DISL。显示层DISL包括薄膜晶体管层TFTL、发光元件层EML、封装层ENC和传感器电极层SENL。A display layer DISL of each of the plurality of display cells DPC is formed on the first surface of the mother substrate MSUB. The display layer DISL includes a thin film transistor layer TFTL, a light emitting element layer EML, an encapsulation layer ENC, and a sensor electrode layer SENL.
其次,如图26和图27中所示,将多个第一保护膜PRF1附着在多个显示单元DPC上,并检查多个显示单元DPC(图23的S120)。Next, as shown in FIG. 26 and FIG. 27 , a plurality of first protection films PRF1 are attached to a plurality of display cells DPC, and the plurality of display cells DPC are inspected ( S120 of FIG. 23 ).
首先,附着第一保护膜层以覆盖多个显示单元DPC和多个显示单元DPC之间的母基底MSUB。然后,通过部分地去除定位在母基底MSUB上的第一保护膜层,多个第一保护膜PRF1可以分别定位在多个显示单元DPC上。也就是说,可以部分地去除第一保护膜层,并且剩余部分可以是多个第一保护膜PRF1。因此,多个第一保护膜PRF1可以分别定位在多个显示单元DPC上。换句话说,第一保护膜PRF1的数量可以等于多个显示单元DPC的数量。First, a first protective film layer is attached to cover the plurality of display units DPC and the mother substrate MSUB between the plurality of display units DPC. Then, by partially removing the first protective film layer positioned on the mother substrate MSUB, the plurality of first protective films PRF1 can be positioned on the plurality of display units DPC, respectively. That is, the first protective film layer can be partially removed, and the remaining portion can be the plurality of first protective films PRF1. Therefore, the plurality of first protective films PRF1 can be positioned on the plurality of display units DPC, respectively. In other words, the number of the first protective films PRF1 can be equal to the number of the plurality of display units DPC.
多个第一保护膜PRF1中的每个可以是用于保护显示单元DPC免受外部冲击的缓冲膜。多个第一保护膜PRF1可以由透明材料制成。Each of the plurality of first protection films PRF1 may be a buffer film for protecting the display unit DPC from external impact. The plurality of first protection films PRF1 may be made of a transparent material.
第三,如图26和图27中所示,将第一激光LR1照射到母基底MSUB的第二表面上,使得沿着多个显示单元DPC的边缘形成多个第一激光照射区域CH1(图23的S130)。Third, as shown in FIGS. 26 and 27 , the first laser LR1 is irradiated onto the second surface of the mother substrate MSUB so that a plurality of first laser irradiation regions CH1 are formed along the edges of the plurality of display cells DPC ( S130 of FIG. 23 ).
根据本公开的一些实施例,可以使用各种激光中的任一种作为第一激光LR1。这里,作为示例,第一激光LR1是具有近似1030nm的波长的红外贝塞尔光束。According to some embodiments of the present disclosure, any of various lasers may be used as the first laser LR1. Here, as an example, the first laser LR1 is an infrared Bessel beam having a wavelength of approximately 1030 nm.
第一切割线CL1可以定义为通过连接多个第一激光照射区域CH1而形成的假想线。可以通过照射由第一激光模块LD1发射的第一激光LR1以沿着多个显示单元DPC的边缘形成多个第一激光照射区域CH1来形成第一切割线CL1。The first cutting line CL1 may be defined as an imaginary line formed by connecting a plurality of first laser irradiation regions CH1. The first cutting line CL1 may be formed by irradiating the first laser LR1 emitted by the first laser module LD1 to form a plurality of first laser irradiation regions CH1 along edges of the plurality of display cells DPC.
当将第一激光LR1照射在母基底MSUB的第二表面上时,可以通过调节重复率、处理速度和脉冲能量来调节如图28中所示的通过第一激光LR1形成的多个第一激光照射区域CH1中的每个的深度(或概略长度)TCH1。例如,如图28中的a中所示,多个第一激光照射区域CH1中的每个的深度TCH1可以距母基底MSUB的第一表面至少200μm。另外,由于母基底MSUB的厚度是近似500μm,因此如图28中的b中所示多个第一激光照射区域CH1中的每个的深度TCH1可以高达500μm。也就是说,多个第一激光照射区域CH1中的每个的深度TCH1可以距母基底MSUB的第一表面近似225μm至500μm。根据一些实施例,第一激光照射区域CH1的深度TCH1等于母基底MSUB的厚度。When the first laser LR1 is irradiated on the second surface of the mother substrate MSUB, the depth (or approximate length) TCH1 of each of the plurality of first laser irradiation areas CH1 formed by the first laser LR1 as shown in FIG. 28 may be adjusted by adjusting the repetition rate, the processing speed, and the pulse energy. For example, as shown in a of FIG. 28 , the depth TCH1 of each of the plurality of first laser irradiation areas CH1 may be at least 200 μm from the first surface of the mother substrate MSUB. In addition, since the thickness of the mother substrate MSUB is approximately 500 μm, the depth TCH1 of each of the plurality of first laser irradiation areas CH1 may be as high as 500 μm as shown in b of FIG. 28 . That is, the depth TCH1 of each of the plurality of first laser irradiation areas CH1 may be approximately 225 μm to 500 μm from the first surface of the mother substrate MSUB. According to some embodiments, the depth TCH1 of the first laser irradiation area CH1 is equal to the thickness of the mother substrate MSUB.
可以以10kHz至250kHz的重复率、10mm/s至250mm/s的处理速度和10μJ至300μJ的脉冲能量照射用于形成第一激光照射区域CH1的第一激光LR1。为了使第一激光LR1具有距母基底MSUB的第一表面近似225μm的深度,期望的是,以近似17.5kHz至125kHz的重复率、17.5mm/s至125mm/s的处理速度和25μJ至178μJ的脉冲能量照射第一激光LR1。The first laser LR1 for forming the first laser irradiation area CH1 may be irradiated at a repetition rate of 10 kHz to 250 kHz, a process speed of 10 mm/s to 250 mm/s, and a pulse energy of 10 μJ to 300 μJ. In order for the first laser LR1 to have a depth of approximately 225 μm from the first surface of the mother substrate MSUB, it is desirable that the first laser LR1 be irradiated at a repetition rate of approximately 17.5 kHz to 125 kHz, a process speed of 17.5 mm/s to 125 mm/s, and a pulse energy of 25 μJ to 178 μJ.
第四,如图29至图32中所示,通过在母基底MSUB的第二表面上照射第二激光LR2和第三激光LR3,形成用于在多个显示单元DPC中的每个中形成通孔的多个第二激光照射区域CH2和第三激光照射区域CH3(图23的S140)。Fourth, as shown in Figures 29 to 32, by irradiating the second laser LR2 and the third laser LR3 on the second surface of the mother substrate MSUB, a plurality of second laser irradiation areas CH2 and third laser irradiation areas CH3 for forming a through hole in each of the plurality of display units DPC are formed (S140 of Figure 23).
尽管在图29中所示的示例中在执行步骤S130之后执行步骤S140,但是本公开的实施例不限于此。为了缩短工艺时间,可以利用多个激光模块(例如,第二激光模块LD2和第三激光模块LD3)同时进行步骤S130和步骤S140。Although step S140 is performed after step S130 in the example shown in FIG29 , the embodiments of the present disclosure are not limited thereto. To shorten the process time, steps S130 and S140 may be performed simultaneously using a plurality of laser modules (eg, the second laser module LD2 and the third laser module LD3 ).
第二切割线CL2可以定义为通过连接多个第二激光照射区域CH2而形成的假想线。可以通过照射第二激光LR2以沿着通孔TH的边缘形成多个第二激光照射区域CH2来形成第二切割线CL2。第二切割线CL2可以取决于通孔的形状。例如,当在从顶部观看时通孔TH具有圆形形状时,第二切割线CL2可以形成为圆形形状。The second cutting line CL2 may be defined as an imaginary line formed by connecting a plurality of second laser irradiation regions CH2. The second cutting line CL2 may be formed by irradiating the second laser LR2 to form a plurality of second laser irradiation regions CH2 along the edge of the through hole TH. The second cutting line CL2 may depend on the shape of the through hole. For example, when the through hole TH has a circular shape when viewed from the top, the second cutting line CL2 may be formed in a circular shape.
第三切割线CL3可以定义为通过连接多个第三激光照射区域CH3而形成的假想线。可以通过照射第三激光LR3以沿着第二切割线CL2的边缘形成多个第三激光照射区域CH3来形成第三切割线CL3。第三切割线CL3可以取决于通孔的形状。例如,当在从顶部观看时通孔TH具有圆形形状时,第三切割线CL3可以形成为圆形形状。The third cutting line CL3 may be defined as an imaginary line formed by connecting a plurality of third laser irradiation regions CH3. The third cutting line CL3 may be formed by irradiating the third laser LR3 to form a plurality of third laser irradiation regions CH3 along the edge of the second cutting line CL2. The third cutting line CL3 may depend on the shape of the through hole. For example, when the through hole TH has a circular shape when viewed from the top, the third cutting line CL3 may be formed in a circular shape.
根据本公开的一些实施例,可以使用各种激光中的任一种作为第二激光LR2和第三激光LR3。这里,作为示例,第二激光LR2和第三激光LR3中的每个是具有近似1030nm的波长的红外贝塞尔光束。According to some embodiments of the present disclosure, any of various lasers may be used as the second laser LR2 and the third laser LR3. Here, as an example, each of the second laser LR2 and the third laser LR3 is an infrared Bessel beam having a wavelength of approximately 1030 nm.
通过第二激光LR2形成的第二激光照射区域CH2中的每个的深度可以与通过第三激光LR3形成的第三激光照射区域CH3中的每个的深度(概略长度)不同。第二激光照射区域CH2的深度可以定义为第二激光照射区域CH2的深度(或概略长度),第三激光照射区域CH3的深度可以定义为第三激光照射区域CH3的深度(或概略长度)。The depth of each of the second laser irradiation regions CH2 formed by the second laser LR2 may be different from the depth (approximate length) of each of the third laser irradiation regions CH3 formed by the third laser LR3. The depth of the second laser irradiation region CH2 may be defined as the depth (or approximate length) of the second laser irradiation region CH2, and the depth of the third laser irradiation region CH3 may be defined as the depth (or approximate length) of the third laser irradiation region CH3.
多个第二激光照射区域CH2中的每个可以具有距母基底MSUB的第一表面约500μm的深度。由于母基底MSUB的厚度是近似500μm,因此多个第二激光照射区域CH2中的每个可以具有距母基底MSUB的第一表面近似500μm的深度。也就是说,多个第二激光照射区域CH2中的每个的深度可以等于母基底MSUB的厚度。Each of the plurality of second laser irradiation regions CH2 may have a depth of approximately 500 μm from the first surface of the mother substrate MSUB. Since the thickness of the mother substrate MSUB is approximately 500 μm, each of the plurality of second laser irradiation regions CH2 may have a depth of approximately 500 μm from the first surface of the mother substrate MSUB. That is, the depth of each of the plurality of second laser irradiation regions CH2 may be equal to the thickness of the mother substrate MSUB.
多个第三激光照射区域CH3中的每个可以具有距母基底MSUB的第一表面近似225μm的深度。由于母基底MSUB的厚度是近似500μm,因此多个第三激光照射区域CH3中的每个可以具有距母基底MSUB的第一表面近似200μm至500μm的深度。根据本公开的一些实施例,第二激光照射区域CH2距母基底MSUB的第一表面的深度可以大于第三激光照射区域CH3距母基底MSUB的第一表面的深度。Each of the plurality of third laser irradiation regions CH3 may have a depth of approximately 225 μm from the first surface of the mother substrate MSUB. Since the thickness of the mother substrate MSUB is approximately 500 μm, each of the plurality of third laser irradiation regions CH3 may have a depth of approximately 200 μm to 500 μm from the first surface of the mother substrate MSUB. According to some embodiments of the present disclosure, the depth of the second laser irradiation region CH2 from the first surface of the mother substrate MSUB may be greater than the depth of the third laser irradiation region CH3 from the first surface of the mother substrate MSUB.
如图32中所示,可以根据第二激光LR2和第三激光LR3的重复率、处理速度和脉冲能量来调节激光照射区域CH2和CH3的深度(或概略长度)。如果通过第二激光LR2形成的第二激光照射区域CH2的深度(或概略长度)与通过第三激光LR3形成的第三激光照射区域CH3的深度(或概略长度)不同,则第二激光LR2和第三激光LR3具有不同的重复率、处理速度、脉冲能量等。As shown in FIG32, the depth (or approximate length) of the laser irradiation areas CH2 and CH3 can be adjusted according to the repetition rate, processing speed, and pulse energy of the second laser LR2 and the third laser LR3. If the depth (or approximate length) of the second laser irradiation area CH2 formed by the second laser LR2 is different from the depth (or approximate length) of the third laser irradiation area CH3 formed by the third laser LR3, the second laser LR2 and the third laser LR3 have different repetition rates, processing speeds, pulse energies, etc.
例如,可以以1kHz至50kHz的重复率、1mm/s至50mm/s的处理速度和10μJ至300μJ的脉冲能量照射第二激光LR2。为了使第二激光LR2具有距母基底MSUB的第一表面近似400μm至500μm的深度,可以以近似10kHz的重复率、10mm/s的处理速度和60μJ至178μJ的脉冲能量照射第二激光LR2。For example, the second laser LR2 may be irradiated at a repetition rate of 1 kHz to 50 kHz, a processing speed of 1 mm/s to 50 mm/s, and a pulse energy of 10 μJ to 300 μJ. In order for the second laser LR2 to have a depth of approximately 400 μm to 500 μm from the first surface of the mother substrate MSUB, the second laser LR2 may be irradiated at a repetition rate of approximately 10 kHz, a processing speed of 10 mm/s, and a pulse energy of 60 μJ to 178 μJ.
例如,可以以10kHz至250kHz的重复率、10mm/s至250mm/s的处理速度和10μJ至300μJ的脉冲能量照射第三激光LR3。为了使第三激光LR3具有距母基底MSUB的第一表面近似225μm或更高的深度,期望的是,以近似17.5kHz至125kHz的重复率、17.5mm/s至125mm/s的处理速度和25μJ至178μJ的脉冲能量照射第三激光LR3。For example, the third laser LR3 may be irradiated at a repetition rate of 10 kHz to 250 kHz, a processing speed of 10 mm/s to 250 mm/s, and a pulse energy of 10 μJ to 300 μJ. In order for the third laser LR3 to have a depth of approximately 225 μm or more from the first surface of the mother substrate MSUB, it is desirable that the third laser LR3 be irradiated at a repetition rate of approximately 17.5 kHz to 125 kHz, a processing speed of 17.5 mm/s to 125 mm/s, and a pulse energy of 25 μJ to 178 μJ.
第二激光LR2和第三激光LR3中的每个的单侧公差可以在近似50μm内,并且双侧公差可以在近似100μm内。这里,单侧公差可以指当用激光形成激光照射区域时在一方向(例如,X轴方向)上的切割误差。The single-side tolerance of each of the second laser LR2 and the third laser LR3 may be within approximately 50 μm, and the double-side tolerance may be within approximately 100 μm. Here, the single-side tolerance may refer to a cutting error in one direction (eg, X-axis direction) when forming a laser irradiation area with laser.
另外,通过第二激光LR2形成的第二激光照射区域CH2与通过第三激光LR3形成的第三激光照射区域CH3之间的间隔SDL可以是近似50μm。第二激光照射区域CH2与第三激光照射区域CH3之间的间隔SDL可以确定基底SUB的第一表面IS1和第二表面IS2的长度。例如,随着第二激光照射区域CH2与第三激光照射区域CH3之间的间隔SDL增加,第二表面IS2在倾斜方向上的长度可以变得大于第一表面IS1在倾斜方向上的长度。In addition, the interval SDL between the second laser irradiation area CH2 formed by the second laser LR2 and the third laser irradiation area CH3 formed by the third laser LR3 may be approximately 50 μm. The interval SDL between the second laser irradiation area CH2 and the third laser irradiation area CH3 may determine the length of the first surface IS1 and the second surface IS2 of the substrate SUB. For example, as the interval SDL between the second laser irradiation area CH2 and the third laser irradiation area CH3 increases, the length of the second surface IS2 in the oblique direction may become greater than the length of the first surface IS1 in the oblique direction.
第五,如图33中所示,将第二保护膜PRF2附着在多个第一保护膜PRF1上(图23的S150)。Fifth, as shown in FIG. 33 , the second protection film PRF2 is attached on the plurality of first protection films PRF1 ( S150 of FIG. 23 ).
可以将第二保护膜PRF2附着在第一保护膜PRF1以及母基底MSUB的未被多个第一保护膜PRF1覆盖的暴露部分上。第二保护膜PRF2可以覆盖多个第一激光照射区域CH1、多个第二激光照射区域CH2和多个第三激光照射区域CH3。第二保护膜PRF2可以是用于在蚀刻母基底MSUB的后续工艺中保护多个显示单元DPC免受蚀刻剂的影响的耐酸膜。The second protective film PRF2 may be attached to the first protective film PRF1 and the exposed portion of the mother substrate MSUB not covered by the plurality of first protective films PRF1. The second protective film PRF2 may cover the plurality of first laser irradiation regions CH1, the plurality of second laser irradiation regions CH2, and the plurality of third laser irradiation regions CH3. The second protective film PRF2 may be an acid-resistant film for protecting the plurality of display cells DPC from the influence of an etchant in a subsequent process of etching the mother substrate MSUB.
第六,如图34至图37中所示,在没有附加掩模的情况下在母基底MSUB的第二表面上喷射蚀刻剂,使得减小母基底MSUB的厚度。另外,沿着多个第一激光照射区域CH1和第二激光照射区域CH2切割母基底MSUB,并且使第二保护膜PRF2分离(图23的S160)。Sixth, as shown in Figures 34 to 37, an etchant is sprayed on the second surface of the mother substrate MSUB without an additional mask, so that the thickness of the mother substrate MSUB is reduced. In addition, the mother substrate MSUB is cut along the plurality of first laser irradiation regions CH1 and the second laser irradiation regions CH2, and the second protective film PRF2 is separated (S160 of Figure 23).
当在母基底MSUB的第二表面上喷射蚀刻剂时,母基底MSUB可以从第一厚度T1'(见图24)减小到第二厚度T2'。由于母基底MSUB在没有附加掩模的情况下被蚀刻,因此母基底MSUB可以遍及第二表面的整个区域被均匀地蚀刻。When the etchant is sprayed on the second surface of the mother substrate MSUB, the mother substrate MSUB can be reduced from the first thickness T1' (see FIG. 24) to the second thickness T2'. Since the mother substrate MSUB is etched without an additional mask, the mother substrate MSUB can be uniformly etched throughout the entire area of the second surface.
第一激光照射区域CH1中的每个可以包括通过第一激光LR1形成的物理孔和作为物理孔的外围的其中物理性质被激光改变的区域。可选地,多个第一激光照射区域CH1中的每个可以是其中物理性质被第一激光LR1改变而没有物理孔的区域。因此,蚀刻剂在多个第一激光照射区域CH1中的每个中的蚀刻速率可以高于母基底MSUB的未照射激光的其他区域中的蚀刻速率。Each of the first laser irradiation regions CH1 may include a physical hole formed by the first laser LR1 and a region where the physical property is changed by the laser as the periphery of the physical hole. Alternatively, each of the plurality of first laser irradiation regions CH1 may be a region where the physical property is changed by the first laser LR1 without the physical hole. Therefore, the etching rate of the etchant in each of the plurality of first laser irradiation regions CH1 may be higher than the etching rate in other regions of the mother substrate MSUB where the laser is not irradiated.
第二激光照射区域CH2中的每个可以包括通过第二激光LR2形成的物理孔和作为物理孔的外围的其中物理性质被激光改变的区域。可选地,多个第二激光照射区域CH2中的每个可以是其中物理性质被第二激光LR2改变而没有物理孔的区域。因此,蚀刻剂在多个第二激光照射区域CH2中的每个中的蚀刻速率可以高于母基底MSUB的未照射激光的其他区域中的蚀刻速率。Each of the second laser irradiation regions CH2 may include a physical hole formed by the second laser LR2 and an area where the physical property is changed by the laser as the periphery of the physical hole. Alternatively, each of the plurality of second laser irradiation regions CH2 may be an area where the physical property is changed by the second laser LR2 without the physical hole. Therefore, the etching rate of the etchant in each of the plurality of second laser irradiation regions CH2 may be higher than the etching rate in other areas of the mother substrate MSUB that are not irradiated with the laser.
第三激光照射区域CH3中的每个可以包括通过第三激光LR3形成的物理孔和作为物理孔的外围的其中物理性质被激光改变的区域。可选地,多个第三激光照射区域CH3中的每个可以是其中物理性质被第三激光LR3改变而没有物理孔的区域。因此,蚀刻剂在多个第三激光照射区域CH3中的每个中的蚀刻速率可以高于母基底MSUB的未照射激光的其他区域中的蚀刻速率。第三激光照射区域CH3可以围绕第二激光照射区域CH2。Each of the third laser irradiation regions CH3 may include a physical hole formed by the third laser LR3 and an area where the physical property is changed by the laser as the periphery of the physical hole. Alternatively, each of the plurality of third laser irradiation regions CH3 may be an area where the physical property is changed by the third laser LR3 without the physical hole. Therefore, the etching rate of the etchant in each of the plurality of third laser irradiation regions CH3 may be higher than the etching rate in other areas of the mother substrate MSUB not irradiated with the laser. The third laser irradiation region CH3 may surround the second laser irradiation region CH2.
如图35中所示,用蚀刻剂进行减薄以减小母基底MSUB的厚度。同时,蚀刻剂渗透到通过第二激光LR2形成的多个第二激光照射区域CH2中。由于多个第二激光照射区域CH2中的每个的深度大于多个第三激光照射区域CH3中的每个的深度,因此蚀刻剂可以首先渗透到多个第二激光照射区域CH2中。当蚀刻剂渗透到第二激光照射区域CH2中时,第二激光照射区域CH2与未形成第二激光照射区域CH2的区域之间的蚀刻速率可能存在差异。结果,可以在第二激光照射区域CH2的附近以倾斜进行减薄。As shown in FIG. 35 , thinning is performed with an etchant to reduce the thickness of the mother substrate MSUB. At the same time, the etchant penetrates into the plurality of second laser irradiation regions CH2 formed by the second laser LR2. Since the depth of each of the plurality of second laser irradiation regions CH2 is greater than the depth of each of the plurality of third laser irradiation regions CH3, the etchant may first penetrate into the plurality of second laser irradiation regions CH2. When the etchant penetrates into the second laser irradiation region CH2, there may be a difference in etching rate between the second laser irradiation region CH2 and the region where the second laser irradiation region CH2 is not formed. As a result, thinning may be performed at an inclination near the second laser irradiation region CH2.
如图36中所示,当蚀刻剂渗透到第三激光照射区域CH3中时,第三激光照射区域CH3与未形成第三激光照射区域CH3的区域之间的蚀刻速率可能存在差异。具体地,第三激光照射区域CH3与第二激光照射区域CH2之间的蚀刻速率可能存在差异。因此,在第二激光照射区域CH2和第三激光照射区域CH3的附近以倾斜执行减薄。当第三激光照射区域CH3与第二激光照射区域CH2之间的一些区域处可以减小倾斜度时,可以执行减薄。As shown in FIG. 36, when the etchant penetrates into the third laser irradiation region CH3, there may be a difference in etching rate between the third laser irradiation region CH3 and the region where the third laser irradiation region CH3 is not formed. Specifically, there may be a difference in etching rate between the third laser irradiation region CH3 and the second laser irradiation region CH2. Therefore, thinning is performed at an inclination in the vicinity of the second laser irradiation region CH2 and the third laser irradiation region CH3. When the inclination can be reduced at some regions between the third laser irradiation region CH3 and the second laser irradiation region CH2, thinning can be performed.
如图37中所示,由于首先在第二激光照射区域CH2中进行蚀刻,因此可以在通过第二激光照射区域CH2形成的第二切割线CL2处切割基底SUB,使得基底SUB可以与母基底MSUB分离。因此,基底SUB可以形成通孔TH,并且在通孔TH中在侧表面SS1与底表面BS之间可以存在台阶,使得可以形成第一表面IS1、第二表面IS2以及在第一表面IS1与第二表面IS2之间的第三表面IS3。As shown in FIG37, since etching is first performed in the second laser irradiation region CH2, the substrate SUB may be cut at the second cutting line CL2 formed by the second laser irradiation region CH2, so that the substrate SUB may be separated from the mother substrate MSUB. Therefore, the substrate SUB may form a through hole TH, and a step may exist between the side surface SS1 and the bottom surface BS in the through hole TH, so that the first surface IS1, the second surface IS2, and the third surface IS3 between the first surface IS1 and the second surface IS2 may be formed.
另外,随着蚀刻剂渗透到通过第一激光LR1形成的多个第一激光照射区域CH1中,可以沿着第一切割线CL1使母基底MSUB分离。换句话说,多个显示单元DPC中的每个可以与母基底MSUB分离。In addition, as the etchant penetrates into the plurality of first laser irradiation regions CH1 formed by the first laser LR1 , the mother substrate MSUB may be separated along the first cutting line CL1 . In other words, each of the plurality of display cells DPC may be separated from the mother substrate MSUB.
蚀刻剂因第二保护膜PRF2而不渗透到与母基底MSUB分离的基底SUB的第一表面中,而基底SUB的第二表面被蚀刻剂蚀刻。因此,基底SUB的第一表面和第二表面可以在粗糙度、硬度、透光率、光反射率、局部密度、表面化学结构等方面具有差异。The etchant does not penetrate into the first surface of the substrate SUB separated from the mother substrate MSUB due to the second protection film PRF2, while the second surface of the substrate SUB is etched by the etchant. Therefore, the first surface and the second surface of the substrate SUB may have differences in roughness, hardness, light transmittance, light reflectivity, local density, surface chemical structure, etc.
在完成蚀刻工艺之后,可以使第二保护膜PRF2分离。After the etching process is completed, the second protection film PRF2 may be separated.
第七,如图38和图39中所示,将驱动IC 200和电路板300附着到多个显示单元DPC中的每个,并且使第一保护膜PRF1与多个显示单元DPC中的每个分离(图23的S170)。Seventh, as shown in FIGS. 38 and 39 , the driving IC 200 and the circuit board 300 are attached to each of the plurality of display cells DPC, and the first protection film PRF1 is separated from each of the plurality of display cells DPC ( S170 of FIG. 23 ).
如上所述,通过使用蚀刻工艺,可以减小母基底MSUB的厚度,可以将多个显示单元DPC中的每个的基底SUB与母基底MSUB分离,并且可以形成通孔TH。以这种方式,提高制造工艺的效率可以是可能的。As described above, by using an etching process, the thickness of the mother substrate MSUB can be reduced, the substrate SUB of each of the plurality of display cells DPC can be separated from the mother substrate MSUB, and the through hole TH can be formed. In this way, it may be possible to improve the efficiency of the manufacturing process.
图40至图42是用于示出根据本公开的一些实施例的制造显示装置的方法的剖视图。40 to 42 are cross-sectional views for illustrating a method of manufacturing a display device according to some embodiments of the present disclosure.
参照图40至图42,根据一些实施例,在照射上述第二激光LR2和第三激光LR3之后,可以通过照射第四激光LR4进一步形成第四激光照射区域CH4。40 to 42 , according to some embodiments, after the second laser LR2 and the third laser LR3 are irradiated, a fourth laser irradiation region CH4 may be further formed by irradiating a fourth laser LR4 .
可以在第三激光照射区域CH3之间与第二激光照射区域CH2相邻地照射第四激光LR4。当通孔TH在从顶部观看时具有圆形形状时,通过第四激光LR4形成的第四激光照射区域CH4在从顶部观看时可以具有圆形形状。第四激光LR4与第三激光LR3类似可以是具有近似1030nm的波长的红外贝塞尔光束,并且可以在与第三激光LR3相同的条件下照射。The fourth laser LR4 may be irradiated between the third laser irradiation regions CH3 adjacent to the second laser irradiation region CH2. When the through hole TH has a circular shape when viewed from the top, the fourth laser irradiation region CH4 formed by the fourth laser LR4 may have a circular shape when viewed from the top. The fourth laser LR4 may be an infrared Bessel beam having a wavelength of approximately 1030 nm similar to the third laser LR3, and may be irradiated under the same conditions as the third laser LR3.
通过第四激光LR4形成的第四激光照射区域CH4的深度可以小于第三激光照射区域CH3的深度。这是因为如果第四激光照射区域CH4的深度相对大,则可能在第四激光照射区域CH4处切割基底SUB。The depth of the fourth laser irradiation region CH4 formed by the fourth laser LR4 may be smaller than the depth of the third laser irradiation region CH3 because if the depth of the fourth laser irradiation region CH4 is relatively large, the substrate SUB may be cut at the fourth laser irradiation region CH4.
如图41中所示,当蚀刻剂渗透到第四激光照射区域CH4中时,第四激光照射区域CH4与未形成第四激光照射区域CH4的区域之间的蚀刻速率可能存在差异。具体地,第四激光照射区域CH4与第二激光照射区域CH2之间的蚀刻速率可能存在差异。因此,在第四激光照射区域CH4的附近以倾斜执行减薄。当第四激光照射区域CH4与第二激光照射区域CH2之间基本上没有倾斜时,可以执行减薄。As shown in FIG41, when the etchant penetrates into the fourth laser irradiation region CH4, there may be a difference in etching rate between the fourth laser irradiation region CH4 and the region where the fourth laser irradiation region CH4 is not formed. Specifically, there may be a difference in etching rate between the fourth laser irradiation region CH4 and the second laser irradiation region CH2. Therefore, thinning is performed with an inclination in the vicinity of the fourth laser irradiation region CH4. When there is substantially no inclination between the fourth laser irradiation region CH4 and the second laser irradiation region CH2, thinning can be performed.
如图42中所示,由于首先在第二激光照射区域CH2中进行蚀刻,因此可以在通过第二激光照射区域CH2形成的第二切割线CL2处切割基底SUB,使得基底SUB可以与母基底MSUB分离。母基底MSUB的形成有通孔TH的侧表面形成与基底SUB类似的台阶边缘。母基底MSUB的侧表面的台阶边缘可以减小母基底MSUB的边缘的角度,并且可以增加台阶边缘的宽度。因此,当母基底MSUB与基底SUB分离时,通孔TH具有较大的宽度,从而可以更容易地使其分离。As shown in FIG. 42, since etching is first performed in the second laser irradiation region CH2, the substrate SUB can be cut at the second cutting line CL2 formed by the second laser irradiation region CH2, so that the substrate SUB can be separated from the mother substrate MSUB. The side surface of the mother substrate MSUB formed with the through hole TH forms a step edge similar to that of the substrate SUB. The step edge of the side surface of the mother substrate MSUB can reduce the angle of the edge of the mother substrate MSUB and can increase the width of the step edge. Therefore, when the mother substrate MSUB is separated from the substrate SUB, the through hole TH has a larger width, so that it can be separated more easily.
图43是示出根据对比示例的显示装置的通孔的图像。图44是示出根据本公开的一些实施例的显示装置的通孔的图像。Fig. 43 is an image showing a through hole of a display device according to a comparative example. Fig. 44 is an image showing a through hole of a display device according to some embodiments of the present disclosure.
图43示出了经由激光烧蚀工艺形成的通孔。图44示出了通过上述激光照射和蚀刻剂形成的通孔。Figure 43 shows a via formed via a laser ablation process. Figure 44 shows a via formed by laser irradiation and etchant as described above.
从图43可以看出的是,根据对比示例的显示装置因通孔TH的附近的高热量而被损坏。相反,如图44中所示,在根据一些实施例的显示装置中,在通孔TH的附近几乎没有发生损坏。It can be seen from Fig. 43 that the display device according to the comparative example is damaged due to high heat in the vicinity of the through hole TH. In contrast, as shown in Fig. 44, in the display device according to some embodiments, damage hardly occurs in the vicinity of the through hole TH.
鉴于上述情况,通过使用激光照射和蚀刻剂形成通孔的方式,防止或减少根据一些实施例的显示装置在通孔的附近被损坏可以是可能的。In view of the above, it may be possible to prevent or reduce the display device according to some embodiments from being damaged near the through hole by forming the through hole using laser irradiation and an etchant.
在总结详细描述时,本领域技术人员将理解的是,在基本上不脱离本实用新型的原理的情况下,可以对示例实施例进行许多变化和修改。因此,所公开的实用新型的示例实施例仅在一般性和描述性意义上使用,而不是为了限制的目的。In summarizing the detailed description, it will be appreciated by those skilled in the art that many changes and modifications may be made to the exemplary embodiments without departing substantially from the principles of the present invention. Therefore, the exemplary embodiments of the disclosed utility model are used only in a general and descriptive sense, and not for the purpose of limitation.
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