CN220963266U - Ceramic disc handling mechanism - Google Patents

Ceramic disc handling mechanism Download PDF

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Publication number
CN220963266U
CN220963266U CN202322264530.4U CN202322264530U CN220963266U CN 220963266 U CN220963266 U CN 220963266U CN 202322264530 U CN202322264530 U CN 202322264530U CN 220963266 U CN220963266 U CN 220963266U
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China
Prior art keywords
assembly
handling
rail
ceramic disc
ceramic
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Active
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CN202322264530.4U
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Chinese (zh)
Inventor
赵元亚
崔思远
文国昇
金从龙
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Jiangxi Zhao Chi Semiconductor Co Ltd
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Jiangxi Zhao Chi Semiconductor Co Ltd
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Abstract

The utility model provides a ceramic disc carrying mechanism which comprises a first rail, a second rail, a first carrying assembly and a second carrying assembly, wherein the first rail and the second rail are arranged at an included angle, the first carrying assembly and the second carrying assembly are respectively arranged on the first rail and the second rail, the first carrying assembly slides on the first rail through the sliding assembly, the second carrying assembly slides on the second rail through the sliding assembly, a plurality of production stations are arranged at intervals along the arrangement direction of the first rail and the second rail and close to the first rail and the second rail, each production station is provided with a carrying assembly and a jacking assembly positioned below the carrying assembly, the carrying assembly is used for placing ceramic discs, the first carrying assembly and the second carrying assembly are positioned above the carrying assembly, the ceramic discs positioned on the carrying assembly are jacked up by the jacking assembly through each production station, so that the ceramic discs can be supported by the first carrying assembly and the second carrying assembly.

Description

Ceramic disc handling mechanism
Technical Field
The utility model relates to the technical field of LED chip production and processing, in particular to a ceramic disc conveying mechanism.
Background
The chip substrate material is mainly composed of sapphire, a silicon substrate and a silicon carbide substrate, before the epitaxial layer grows, the surface of the wafer must have extremely high flatness, smoothness and cleanliness, and polishing is the most effective wafer planarization technology at present; and (3) pasting the wafer subjected to linear cutting, grinding and annealing on the surface of a flat circular ceramic disc by using a wax pasting machine, then carrying the ceramic disc pasted with the wafer on a polishing machine for single-sided polishing, dewaxing the wafer after polishing, taking out the wafer, and cleaning and checking.
At present, a mode of liquid wax patch is commonly adopted in the industry, a wafer is attached to the surface of a ceramic disc, the ceramic disc needs to be preheated during the patch, then the patch is pressed by a silica gel plane after the patch is carried out, and then the patch is cooled, the thickness and TTV after the patch are detected, and then the next polishing process is carried out for processing.
Disclosure of utility model
Aiming at the defects of the prior art, the utility model aims to provide a ceramic disc conveying mechanism, which aims to solve the technical problems of complex equipment mechanism and higher manufacturing cost in the prior art by adopting a mechanical arm conveying mode.
In order to achieve the above object, the present utility model is achieved by the following technical scheme:
The utility model provides a ceramic dish handling mechanism, is including being the first track and the second track that the contained angle set up each other, and install respectively first handling subassembly and the second handling subassembly on the first track with on the second track, first handling subassembly is in through sliding component slide on the first track, the second handling subassembly is through sliding component slide on the second track, be close to first track with second track department, follow first track with the orbital direction of arrangement of second, the interval is equipped with a plurality of production stations, every production station department all is equipped with the carrier assembly, and is located carrier assembly below jacking subassembly, carrier assembly is used for placing the ceramic dish, first handling subassembly with second handling subassembly is located carrier assembly's top, first handling subassembly with second handling subassembly is through every production station, jacking subassembly will be located ceramic dish on the carrier assembly jacks up, so that first carrier assembly with second ceramic dish is accepted.
Compared with the prior art, the utility model has the beneficial effects that:
Through having set up first track and the second track that are contained angle each other to make first transport subassembly and second transport subassembly slide on first track and second track respectively through sliding component, then be provided with a plurality of production stations near first track and second track's nearby interval, wherein every production station all includes bearing assembly and jacking subassembly, when needs carry out processing to the LED chip in the ceramic dish, only need jack-up the ceramic dish from supporting component through the jacking subassembly, then slide first transport subassembly to production station department, the jacking subassembly descends, make the ceramic dish fall in first transport subassembly department, then slide first transport subassembly to next production station, until slide to the last production station that is close to first track setting, and the last production station that is close to first track setting is the first production station that is close to the second track setting, slide second transport subassembly this moment, carry out the production flow that follows, and first transport subassembly can get back to first track's starting point, carry out the transport of ceramic dish down, this design structure makes first transport subassembly and second transport subassembly carry out the transport efficiency, this design simultaneously, and the mass production cost is reasonable, this mass production is easy, and the mass production is manufactured to the cost is reasonable.
Further, the sliding assembly comprises a first ball screw, a second ball screw, a first sliding block and a second sliding block, the first ball screw is arranged on the first track along the extension direction of the first track, the second ball screw is arranged on the second track along the extension direction of the second track, the first sliding block connected with the first ball screw is arranged on the first carrying assembly, the second sliding block connected with the second ball screw is arranged on the second carrying assembly, the ceramic disc carrying mechanism further comprises a driving assembly connected with the ball screw, the driving assembly drives the first ball screw to rotate, so that the first carrying assembly slides along the first track, and the driving assembly drives the second ball screw to rotate, so that the second carrying assembly slides along the second track.
Further, the driving assembly comprises a first servo motor arranged on the first track and a first synchronous belt structure connected with the first servo motor, the first synchronous belt structure is connected with the first ball screw, the driving assembly further comprises a second servo motor arranged on the second track and a second synchronous belt structure connected with the second servo motor, and the second synchronous belt structure is connected with the second ball screw.
Further, the first handling assembly further comprises a first supporting portion connected with the first sliding block, a first connecting shaft connected with the first supporting portion, and a supporting structure fixed below the first connecting shaft, wherein the first connecting shaft extends towards the production station and is perpendicular to the first track, the supporting structure is arranged corresponding to the position of the ceramic disc, and the supporting structure is used for supporting the ceramic disc.
Further, the second handling assembly further comprises a second supporting portion connected with the second sliding block, a second connecting shaft connected with the second supporting portion, and a supporting structure fixed below the second connecting shaft, wherein the second connecting shaft extends towards the production station and is perpendicular to the second track.
Further, a plurality of limit posts are arranged on the supporting structure, the size of an accommodating space formed by enclosing the limit posts is consistent with the size of the ceramic disc, so that when the ceramic disc is supported by the supporting structure, the ceramic disc is tightly attached to the limit posts.
Further, the bearing assembly support assembly comprises a bearing part for placing the ceramic disc and a stand part for supporting the bearing part.
Further, the jacking component comprises a lifting cylinder arranged below the bearing part and a jacking structure arranged at the end part of the lifting cylinder, and the jacking structure penetrates through the bearing part to be in contact with the ceramic disc so as to enable the ceramic disc to ascend.
Further, the ejection structure comprises a disc fixed at the end part of the lifting cylinder and ejection pin shafts distributed above the disc, and through holes for the pin shafts to pass through are formed in the bearing part and correspond to the ejection pin shafts.
Further, a plurality of positioning blocks are distributed above the bearing part, and the accommodating space formed by encircling the plurality of positioning blocks is consistent with the size of the ceramic disc, so that the ceramic disc is tightly attached to the plurality of positioning blocks when the ceramic disc is borne by the bearing part.
Drawings
FIG. 1 is a perspective view of a ceramic disc handling mechanism in a first operational state according to an embodiment of the present utility model;
FIG. 2 is a perspective view of a ceramic disc handling mechanism in a second operational state according to an embodiment of the present utility model;
FIG. 3 is a schematic view of the first handling assembly of FIG. 1;
FIG. 4 is a schematic view of the structure at the production station of FIG. 1;
FIG. 5 is a schematic elevational view of the production station of FIG. 1;
Description of main reference numerals:
Ceramic dish 10 First track 20
First ball screw 21 First servo motor 22
First synchronous belt structure 23 Second track 30
Second ball screw 31 Second synchronous belt structure 33
First carrying assembly 40 First slider 41
Bottom plate 42 First clamping block 43
Second clamping block 44 Third clamping block 45
First connecting shaft 46 Holding claw 47
Supporting plate 48 Spacing post 49
Second handling assembly 50 Production station 60
Bearing part 61 Stand portion 62
Lifting cylinder 63 Disc 64
Ejection pin shaft 65 Positioning block 66
The utility model will be further described in the following detailed description in conjunction with the above-described figures.
Detailed Description
In order that the utility model may be readily understood, a more complete description of the utility model will be rendered by reference to the appended drawings. Several embodiments of the utility model are presented in the figures. This utility model may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "mounted" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1 to 5, there is shown a ceramic disc handling mechanism according to an embodiment of the present utility model, which includes a first rail 20 and a second rail 30 disposed at an angle to each other, and a first handling component 40 and a second handling component 50 mounted on the first rail 20 and the second rail 30, respectively, wherein the first handling component 40 slides on the first rail 20 through a sliding component, the second handling component 50 slides on the second rail 30 through the sliding component, a plurality of production stations 60 are disposed at intervals along an arrangement direction of the first rail 20 and the second rail 30 near the first rail 20 and along an arrangement direction of the second rail 30, each production station 60 is provided with a carrying component, and a lifting component located below the carrying component, the carrying component is used for placing a ceramic disc 10, the first handling component 40 and the second handling component 50 slide on the second rail 30 through each production station 60, and the carrying component is located above the carrying component 10 by lifting the carrying component, and the ceramic disc 10 is lifted by the lifting component.
Preferably, the first rail 20 and the second rail 30 are disposed at 90 ° and the production stations 60 are disposed on a side forming an internal angle between the first rail 20 and the second rail 30, and the last production station 60 adjacent to the first rail 20 is the first production station 60 adjacent to the second rail 30.
In some embodiments, the sliding assembly is simply a fit of a slider and a rail.
By way of example and not limitation, in this embodiment, the first rail 20 and the second rail 30 are each mounted on the mechanism base plate 42 via a support column, the sliding assembly includes a first ball screw 21, a second ball screw 31, a first slider 41, and a second slider, the first ball screw 21 is disposed on the first rail 20 along the extension direction of the first rail 20, the second ball screw 31 is disposed on the second rail 30 along the extension direction of the second rail 30, the first slider 41 connected to the first ball screw 21 is disposed on the first carrying assembly 40, the second slider connected to the second ball screw 31 is disposed on the second carrying assembly 50, and the ceramic disc carrying mechanism further includes a driving assembly connected to the ball screw, the driving assembly drives the first ball screw 21 to rotate so as to slide the first carrying assembly along the first rail 20, and the driving assembly drives the second ball screw 31 to rotate so as to slide the second carrying assembly along the second rail 30.
Specifically, the driving assembly includes a first servo motor 22 installed on the first track 20, and a first synchronous belt structure 23 connected with the first servo motor 22, the first synchronous belt structure 23 is connected with the first ball screw 21, the driving assembly further includes a second servo motor installed on the second track 30, and a second synchronous belt structure 33 connected with the second servo motor, the second synchronous belt structure 33 is connected with the second ball screw 31, so as to save space, the first servo motor 22 and the second servo motor are all installed on the inner side of the support column, and the first synchronous belt structure 23 and the second synchronous belt structure 33 are all installed on the outer side of the support column.
It will be appreciated that by providing the first rail 20 and the second rail 30 disposed at an angle of 90 ° with respect to each other, and by using the sliding assembly to enable the first handling assembly and the second handling assembly to slide on the first rail 20 and the second rail 30, respectively, then a plurality of production stations 60 are disposed near the first rail 20 and the second rail 30 at intervals, wherein each production station 60 includes the carrying assembly and the lifting assembly, when the ceramic disc 10 on one of the production stations 60 is processed at this point, the ceramic disc 10 is required to be lifted from the supporting assembly by the lifting assembly, and then the first servo motor 22 is controlled to rotate the first timing belt structure 23, so that the first handling assembly slides to the production station 60 through the first slider 41, then the first servo motor 22 is stopped and the jacking assembly is lowered at the same time, the ceramic disc 10 drops at the first handling assembly, then the servo motor is continuously started, the first handling assembly reaches the next production station 60, and the steps are repeated until the first handling assembly conveys the ceramic disc 10 to the last production station 60 near the first track 20, the last production station 60 near the first track 20 is the first production station 60 near the second track 30, at this time, the second servo motor is started, the second handling assembly performs the next production process, and the first handling assembly can be reversed through the first servo motor 22, so that the first carrying assembly returns to the starting point of the first rail 20 to carry out the next carrying of the ceramic disc 10, the design structure can enable the first carrying assembly and the second carrying assembly to work simultaneously, the production efficiency is improved, and meanwhile, the design structure is simple and reasonable, the manufacturing cost is low, and the ceramic disc carrying device can be applied to mass production.
Further, the first handling assembly 40 further includes a first supporting portion connected to the first slider 41, a first connecting shaft 46 connected to the first supporting portion, and a lifting structure fixed below the first connecting shaft 46, wherein the first connecting shaft 46 extends toward the production station 60 and is disposed perpendicular to the first rail 20, and the lifting structure is disposed corresponding to the position of the ceramic disc 10, and is used for receiving the ceramic disc 10; the second handling assembly 50 further comprises a second supporting portion connected with the second slider, a second connecting shaft connected with the second supporting portion, and the lifting structure fixed below the second connecting shaft, wherein the second connecting shaft extends towards the production station 60 and is perpendicular to the second rail 30;
The supporting structure is provided with a plurality of limit posts 49, and the size of an accommodating space formed by enclosing the limit posts 49 is consistent with the size of the ceramic disc 10, so that when the ceramic disc 10 is supported by the supporting structure, the ceramic disc 10 is tightly attached to the limit posts 49.
Since the first handling unit 40 and the second handling unit 50 have the same structural form, the first handling unit 40 is exemplified herein, specifically, the first supporting portion includes a bottom plate 42 connected to the first slider 41, first and second clamping blocks 43 and 44 spaced apart from each other on the bottom plate 42, and a third clamping block 45 positioned at a distal end, the first connecting shaft 46 passes through the first and second clamping blocks 43 and 44 and is connected to the third clamping block 45 at an end thereof, the supporting structure includes a supporting claw 47 fixedly connected to the second clamping block 44, and a supporting plate 48 fixedly connected to the third clamping block 45, the supporting claw 47 and the supporting plate 48 are disposed opposite to each other, a gap is left between the supporting claw 47 and the supporting plate 48, and two limiting posts 49 are disposed on the supporting claw 47 and the supporting plate 48, respectively.
It can be appreciated that, because the end of the first carrying assembly carrying the ceramic disc 10 is of a cantilever structure, the closer to the free end, the larger the bending moment is, and the above structural form, through the cooperation of the three clamping blocks, the stability of the structure is improved, the ceramic disc 10 is more stable and can not shake when being carried, meanwhile, the supporting claws 47 and the supporting plates 48 are separated, the weight of one end of the cantilever is reduced, the carrying capacity of the ceramic disc 10 can be ensured, and the stability of the ceramic disc 10 in the transportation process is improved due to the design of the limiting columns 49.
Further, the carrier support assembly includes a carrier 61 for placing the ceramic disc 10, a stand 62 for supporting the carrier 61, and the jacking assembly includes a lifting cylinder 63 below the carrier 61, and a jacking structure at an end of the lifting cylinder 63, and the jacking structure penetrates through the carrier 61 to contact with the ceramic disc 10 so as to lift the ceramic disc 10.
It will be appreciated that the ceramic disc 10 after processing at this production station 60 is placed on the carrier 61, then the lifting cylinder 63 is activated, the ceramic disc 10 is lifted by the ejector structure to a position higher than the holding claws 47 and the supporting plates 48, then the first servo motor 22 is activated, the holding claws 47 and the supporting plates 48 of the first handling assembly are positioned below the ceramic disc 10, then the ejector structure is lowered, the ceramic disc 10 is dropped on the placement platform formed by the holding claws 47 and the supporting plates 48, and a gap is left between the holding claws 47 and the supporting plates 48 in order to avoid that the ejector structure restricts the movement of the first handling assembly.
Preferably, the ejection structure includes a disc 64 fixed at an end of the lifting cylinder 63, and ejection pins 65 distributed above the disc 64, through holes for the pins to pass through are provided on the bearing portion 61 and corresponding to the ejection pins 65, a plurality of positioning blocks 66 are distributed above the bearing portion 61, and a containing space enclosed by the plurality of positioning blocks 66 is consistent with the size of the ceramic disc 10, so that when the bearing portion 61 bears the ceramic disc 10, the ceramic disc 10 is tightly attached to the plurality of positioning blocks 66.
It can be understood that, in order to ensure that the ejection structure does not generate instability when the ceramic disc 10 is lifted, the lifting cylinder 63 is provided with the disc 64, and a plurality of ejection pins 65 are annularly arranged on the disc 64, so that the contact area between the ejection pins 65 and the bottom of the ceramic disc 10 is larger, and the ejection pins are more stable when the ceramic disc 10 is lifted;
The positioning blocks 66 have a positioning function, so that the ceramic disc 10 is fixed on the bearing part 61, and the center of gravity of the ceramic disc 10 can be ensured to be stable every time the ejection pin 65 contacts with the ceramic disc 10.
In summary, the ceramic tray carrying mechanism in the above embodiment of the present utility model can make the first carrying assembly and the second carrying assembly work simultaneously, thereby improving the production efficiency.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing examples illustrate only a few embodiments of the utility model and are described in detail herein without thereby limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims (10)

1. The utility model provides a ceramic dish handling mechanism, its characterized in that, is including first track and the second track that are the contained angle setting each other, and install respectively first handling subassembly and the second handling subassembly on the first track with on the second track, first handling subassembly is in through sliding component slide on the first track, second handling subassembly is through sliding component slide on the second track, be close to first track with second track department, follow first track with the orbital arrangement direction of second, the interval is equipped with a plurality of production stations, every production station department all is equipped with the carrier assembly, and is located carrier assembly below jacking subassembly, carrier assembly is used for placing ceramic dish, first handling subassembly with second handling subassembly is located carrier assembly's top, first handling subassembly with second handling subassembly is through every production station, jacking subassembly will be located carrier assembly is last ceramic dish jack-up, so that first handling subassembly with second is accepted to carry the ceramic dish.
2. The ceramic disc handling mechanism of claim 1, wherein the sliding assembly comprises a first ball screw, a second ball screw, a first slider and a second slider, the first ball screw is disposed on the first rail along the extension direction of the first rail, the second ball screw is disposed on the second rail along the extension direction of the second rail, the first slider connected to the first ball screw is disposed on the first handling assembly, the second slider connected to the second ball screw is disposed on the second handling assembly, and the driving assembly is connected to the ball screw and drives the first ball screw to rotate so that the first handling assembly slides along the first rail, and the driving assembly drives the second ball screw to rotate so that the second handling assembly slides along the second rail.
3. The ceramic disc handling mechanism of claim 2, wherein the drive assembly comprises a first servomotor mounted on the first rail and a first timing belt structure connected to the first servomotor, the first timing belt structure being connected to the first ball screw, the drive assembly further comprising a second servomotor mounted on the second rail and a second timing belt structure connected to the second servomotor, the second timing belt structure being connected to the second ball screw.
4. The ceramic disc handling mechanism of claim 2, wherein the first handling assembly further comprises a first support connected to the first slider, a first connecting shaft connected to the first support, and a lift structure secured below the first connecting shaft, the first connecting shaft extending toward the production station and disposed perpendicular to the first rail, the lift structure disposed corresponding to a position of the ceramic disc, the lift structure for receiving the ceramic disc.
5. The ceramic disc handling mechanism of claim 4, wherein the second handling assembly further comprises a second support connected to the second slider, a second connecting shaft connected to the second support, and the lift structure secured below the second connecting shaft, the second connecting shaft extending toward the production station and disposed perpendicular to the second rail.
6. The ceramic tray handling mechanism of claim 5, wherein the lifting structure is provided with a plurality of limiting posts, and a size of an accommodating space defined by the plurality of limiting posts is identical to a size of the ceramic tray, so that the ceramic tray is closely attached to the plurality of limiting posts when the lifting structure receives the ceramic tray.
7. The ceramic disc handling mechanism of claim 1, wherein the carrier assembly support assembly comprises a carrier portion on which the ceramic disc is placed, and a stand portion supporting the carrier portion.
8. The ceramic disc handling mechanism of claim 7, wherein the jacking assembly comprises a lifting cylinder below the carrier and an ejector structure at an end of the lifting cylinder, the ejector structure contacting the ceramic disc through the carrier to raise the ceramic disc.
9. The ceramic disc handling mechanism of claim 8, wherein the ejector structure comprises a disc fixed to an end of the lifting cylinder, and ejector pins distributed over the disc, and through holes are formed in the bearing portion at positions corresponding to the ejector pins for the pins to pass through.
10. The ceramic disc handling mechanism of claim 7, wherein a plurality of positioning blocks are distributed above the bearing portion, and a receiving space defined by the plurality of positioning blocks is identical to the ceramic disc in size, so that the ceramic disc is tightly attached to the plurality of positioning blocks when the bearing portion bears the ceramic disc.
CN202322264530.4U 2023-08-22 2023-08-22 Ceramic disc handling mechanism Active CN220963266U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202322264530.4U CN220963266U (en) 2023-08-22 2023-08-22 Ceramic disc handling mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202322264530.4U CN220963266U (en) 2023-08-22 2023-08-22 Ceramic disc handling mechanism

Publications (1)

Publication Number Publication Date
CN220963266U true CN220963266U (en) 2024-05-14

Family

ID=91008042

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202322264530.4U Active CN220963266U (en) 2023-08-22 2023-08-22 Ceramic disc handling mechanism

Country Status (1)

Country Link
CN (1) CN220963266U (en)

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