CN220912530U - Backboard structure with star-shaped arrangement vent holes and capacitive air pressure sensor - Google Patents
Backboard structure with star-shaped arrangement vent holes and capacitive air pressure sensor Download PDFInfo
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- CN220912530U CN220912530U CN202322429024.6U CN202322429024U CN220912530U CN 220912530 U CN220912530 U CN 220912530U CN 202322429024 U CN202322429024 U CN 202322429024U CN 220912530 U CN220912530 U CN 220912530U
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- ventilation
- ventilation structure
- back plate
- star
- vent
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- 238000009423 ventilation Methods 0.000 claims abstract description 68
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 17
- 229920005591 polysilicon Polymers 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000003571 electronic cigarette Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 238000013022 venting Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Measuring Fluid Pressure (AREA)
Abstract
The utility model discloses a back plate structure with star-shaped arrangement of vent holes and a capacitive air pressure sensor, wherein the star-shaped arrangement of the vent holes of the back plate is adopted, the distance between the vent holes is reduced from inside to outside, the first ventilation structure is used as a main ventilation structure to be opposite to a main deformation area of a vibrating diaphragm, the large-hole small-distance structure enables the air pressure outside the vibrating diaphragm to be closer to the actual air pressure outside the sensor, the air pressure sensing value of the sensor is more accurate, the first ventilation structure is embedded in other ventilation structures, the back plate strength is improved, the back plate deformation is reduced, the polycrystalline silicon vibrating diaphragm is adopted, good toughness and deformation are guaranteed when the polycrystalline silicon vibrating diaphragm is extruded and deformed by pressure difference on two sides, and further the capacitance change and the air pressure detection sensitivity and accuracy of the sensor are guaranteed.
Description
Technical Field
The utility model relates to the technical field of airflow pressure detection, in particular to a back plate structure with star-shaped air holes and a capacitive air pressure sensor.
Background
The capacitive air pressure sensing chip is used as a core component for detecting air flow pressure, converts air flow pressure or air pressure into an electric signal and outputs the electric signal, so that the work of products such as electronic cigarettes, intelligent masks and the like is controlled. The working principle is as follows: when the air is sucked, negative pressure is formed, so that the vibrating diaphragm of the air pressure sensor chip moves towards the direction of the back plate, the distance between the back plate and the vibrating diaphragm is reduced, and the capacitance is increased. And the external AS IC (application specific integrated circuit) controls the electronic cigarette or the intelligent mask to work by detecting the capacitance variation.
The prior traditional technical scheme is as follows: according to the scheme of the electret capacitive air pressure sensor, a flexible high-molecular diaphragm is used as a vibrating diaphragm, a metal shell with a vent hole is used as a back plate, and the middle of the metal shell is isolated by an insulating lining ring. The diameter of the diaphragm is 2 to 5mm, and the gap between the two polar plates is tens of micrometers. The device has the advantages of large volume, intolerance to high temperature, poor isolation to water vapor or oil gas and poor product consistency. In the application process, miniaturization of the terminal product is inconvenient, and abnormal opening of the terminal product and the like can be caused.
In the scheme of the existing MEMS capacitive air pressure sensor, semiconductor technology is adopted for processing, heavily doped polysilicon is used as a conductive structure material of the back plate and the vibrating diaphragm, silicon oxide is used as an insulating layer between the back plate and the vibrating diaphragm, and a supporting structure is a silicon substrate. Due to the characteristics of the technology and the materials, the size of the product can be within 1 mm, and the product has higher consistency and high temperature resistance. Because the back plate is thinner and the back plate is uniformly fully distributed by the vent holes, the back plate has lower strength. In the process of airflow impact or air pressure change, the backboard is deformed, the capacitance change is reduced, the sensitivity is reduced, and the air pressure outside the vibrating diaphragm is deviated from the actual air pressure outside the sensor, so that the sensing value of the sensor is not accurate enough.
Disclosure of utility model
The utility model aims at: in order to solve the problems that the back plate in the capacitive air pressure sensor is low in strength and easy to deform, the air pressure outside the vibrating diaphragm deviates from the actual air pressure outside the sensor, and the back plate structure with the star-shaped vent holes and the capacitive air pressure sensor are provided.
In order to achieve the above purpose, the present utility model adopts the following technical scheme: the utility model provides a backplate structure that air vent star was arranged, backplate includes first ventilation structure, second ventilation structure, third ventilation structure and fourth ventilation structure, and the ventilation structure on backplate surface presents star-shaped, and many second ventilation structures are outwards radial distribution by the center of backplate, and in the radiation structure of first ventilation structure setting second ventilation structure in advance, third ventilation structure and fourth ventilation structure were annular and set gradually from inside to outside along the outward flange of first ventilation structure, second ventilation structure.
As a further description of the above technical solution:
The backboard is sequentially provided with a silicon nitride layer and a polysilicon layer from inside to outside.
As a further description of the above technical solution:
The first ventilation structure, the second ventilation structure, the third ventilation structure and the fourth ventilation structure are internally provided with ventilation holes, the diameters of the ventilation holes are sequentially reduced, and the intervals between the ventilation holes are sequentially increased.
As a further description of the above technical solution:
The diameters and the distances of the vent holes in the first vent structure, the second vent structure, the third vent structure and the fourth vent structure are 2 micrometers to 20 micrometers.
A capacitive air pressure sensor comprises a silicon substrate, a silicon oxide insulating layer, a polysilicon vibrating diaphragm, a silicon oxide sacrificial layer, a backboard of a backboard structure with star-shaped vent holes and metal bonding pads.
As a further description of the above technical solution:
The two ends of the polysilicon vibrating diaphragm are clamped and fixed between the silicon oxide insulating layer and the silicon oxide sacrificial layer, and the upper surface and the lower surface of the polysilicon vibrating diaphragm are respectively provided with a vibrating cavity.
In summary, due to the adoption of the technical scheme, compared with the prior art, the utility model has the following beneficial effects:
According to the utility model, through the star-shaped arrangement mode of the back plate vent holes, the distance between the vent holes is reduced from inside to outside, the first vent structure is used as a main vent structure to be opposite to a main deformation area of the vibrating diaphragm, the large-hole small-distance structure enables the air pressure outside the vibrating diaphragm to be closer to the actual air pressure outside the sensor, so that the air pressure sensing value of the sensor is more accurate, the first vent structure is embedded in other vent structures, the back plate strength is improved, the back plate deformation is reduced, the polycrystalline silicon vibrating diaphragm is adopted, good toughness and deformation when the polycrystalline silicon vibrating diaphragm is extruded and deformed by pressure difference on two sides are ensured, and further the capacitance change amount, the air pressure detection sensitivity and the accuracy of the sensor are ensured.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a front view of a back plate structure with star-shaped arrangement of vent holes.
Fig. 2 is an enlarged view at a in fig. 1.
Fig. 3 is a front cross-sectional view of a capacitive barometric sensor.
Fig. 4 is a front view of a capacitive barometric sensor.
Legend description:
1. a back plate; 2. a metal pad; 3. a silicon oxide sacrificial layer; 4. a silicon oxide insulating layer; 5. a polysilicon diaphragm; 11. a polysilicon layer; 12. a silicon nitride layer; 13. a first venting structure; 14. a second venting structure; 15. a third ventilation structure; 16. fourth air-through structure.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present utility model and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
Embodiment one:
Referring to fig. 1-2, the present utility model provides a technical solution: the utility model provides a backplate structure that air vent star was arranged, backplate 1 includes first ventilation structure 13, second ventilation structure 14, third ventilation structure 15 and fourth ventilation structure 16, the ventilation structure on backplate 1 surface presents star-shaped, many second ventilation structure 14 outwards radiate the distribution by the center of backplate 1, in the radiation structure of first ventilation structure 13 setting second ventilation structure 14 in advance, third ventilation structure 15 and fourth ventilation structure 16 are annular and set gradually from inside to outside along the outward flange of first ventilation structure 13, second ventilation structure 14.
The back plate 1 is provided with a silicon nitride layer 12 and a polysilicon layer 11 in sequence from inside to outside.
Referring to fig. 3-4, a capacitive air pressure sensor includes a sensor chip, a PCB board and a housing, wherein the housing includes a silicon substrate, a silicon oxide insulating layer 4, a polysilicon diaphragm 5, a silicon oxide sacrificial layer 3, a back plate 1 and a metal pad 2 from inside to outside.
The two ends of the polysilicon vibrating diaphragm 5 are clamped and fixed between the silicon oxide insulating layer 4 and the silicon oxide sacrificial layer 3, and the upper surface and the lower surface of the polysilicon vibrating diaphragm 5 are respectively provided with a vibrating cavity.
Embodiment two:
with continued reference to fig. 1-2, in the first embodiment, it is preferable that the first ventilation structure 13, the second ventilation structure 14, the third ventilation structure 15, and the fourth ventilation structure 16 are each provided with ventilation holes whose diameters are sequentially reduced and whose pitches are sequentially increased.
The vent diameters and pitches within the first vent structure 13, the second vent structure 14, the third vent structure 15, and the fourth vent structure 16 are 2 micrometers to 20 micrometers.
The backplate structure that a ventilation hole star was arranged of this embodiment and capacitive air pressure sensor's theory of operation includes: the mode that the air vent on the backplate adopted star to arrange, first ventilation structure 13 play main ventilation effect, it just to the main deformation region of vibrating diaphragm, the big hole is closely outside the air pressure that makes the vibrating diaphragm outside is more close to the outer actual atmospheric pressure of sensor to the cooperation is with the big interval air vent structure of the aperture of the second ventilation structure 14 of its both sides, improve ventilation structure intensity, the third ventilation structure 15 and the big interval of ventilation structure 16 relative to the vent diameter of above-mentioned two kinds of ventilation structures is bigger, further improve ventilation structure and sensor's connection structure's intensity and stability, in order to reduce backplate and receive the influence indent deformation and lead to sensor capacitance variation to reduce, sensitivity reduces. The polycrystalline silicon vibrating diaphragm 5 ensures good toughness and deformation when the vibrating diaphragm is extruded and deformed by pressure difference on two sides, and the silicon oxide sacrificial layer 3 and the silicon oxide insulating layer 4 clamp and fix the vibrating diaphragm, so that the stable connection of electrical elements, circuits and a sensor shell in the sensor is ensured.
In summary, due to the adoption of the technical scheme, the back plate structure with the star-shaped arrangement of the vent holes and the capacitive air pressure sensor have the following beneficial effects compared with the prior art:
According to the utility model, through the star-shaped arrangement mode of the back plate vent holes, the distance between the vent holes is reduced from inside to outside, the first vent structure is used as a main vent structure to be opposite to a main deformation area of the vibrating diaphragm, the large-hole small-distance structure enables the air pressure outside the vibrating diaphragm to be closer to the actual air pressure outside the sensor, so that the air pressure sensing value of the sensor is more accurate, the first vent structure is embedded in other vent structures, the back plate strength is improved, the back plate deformation is reduced, the polycrystalline silicon vibrating diaphragm is adopted, good toughness and deformation when the polycrystalline silicon vibrating diaphragm is extruded and deformed by pressure difference on two sides are ensured, and further the capacitance change amount, the air pressure detection sensitivity and the accuracy of the sensor are ensured.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.
Claims (6)
1. The utility model provides a backplate structure that air vent star was arranged, its characterized in that backplate (1) include first ventilation structure (13), second ventilation structure (14), third ventilation structure (15) and fourth ventilation structure (16), the ventilation structure on backplate (1) surface presents star-shaped, and is many second ventilation structure (14) by the outside radiation distribution in center of backplate (1), first ventilation structure (13) set up in advance in the radiation structure of second ventilation structure (14), third ventilation structure (15) and fourth ventilation structure (16) are annular and along the outward flange of first ventilation structure (13), second ventilation structure (14) is set gradually from interior to exterior.
2. The back plate structure with the star-shaped arrangement of the vent holes according to claim 1, wherein the back plate (1) is sequentially provided with a silicon nitride layer (12) and a polysilicon layer (11) from inside to outside.
3. The back plate structure with the star-shaped arrangement of the vent holes according to claim 1, wherein the vent holes are arranged in the first vent structure (13), the second vent structure (14), the third vent structure (15) and the fourth vent structure (16) and the diameters of the vent holes are sequentially reduced and the intervals between the vent holes are sequentially increased.
4. A back plate structure with star-shaped arrangement of ventilation holes according to claim 3, characterized in that the diameter and spacing of ventilation holes in the first ventilation structure (13), the second ventilation structure (14), the third ventilation structure (15) and the fourth ventilation structure (16) are 2-20 micrometers.
5. A capacitive air pressure sensor, characterized by comprising a silicon substrate, a silicon oxide insulating layer (4), a polysilicon diaphragm (5), a silicon oxide sacrificial layer (3), the back plate (1) of the back plate structure with star-shaped arrangement of vent holes according to any one of claims 1-4, and metal pads (2).
6. The capacitive barometric sensor of claim 5, wherein, the two ends of said polysilicon diaphragm (5) are clamped and fixed between said silicon oxide insulating layer (4) and silicon oxide sacrificial layer (3), and the upper and lower surfaces of said polysilicon diaphragm (5) are provided with vibration cavities.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322429024.6U CN220912530U (en) | 2023-09-06 | 2023-09-06 | Backboard structure with star-shaped arrangement vent holes and capacitive air pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322429024.6U CN220912530U (en) | 2023-09-06 | 2023-09-06 | Backboard structure with star-shaped arrangement vent holes and capacitive air pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220912530U true CN220912530U (en) | 2024-05-07 |
Family
ID=90913028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322429024.6U Active CN220912530U (en) | 2023-09-06 | 2023-09-06 | Backboard structure with star-shaped arrangement vent holes and capacitive air pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220912530U (en) |
-
2023
- 2023-09-06 CN CN202322429024.6U patent/CN220912530U/en active Active
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