CN219396290U - Piezoelectric sensor for electronic cigarette and electronic cigarette - Google Patents
Piezoelectric sensor for electronic cigarette and electronic cigarette Download PDFInfo
- Publication number
- CN219396290U CN219396290U CN202320942257.3U CN202320942257U CN219396290U CN 219396290 U CN219396290 U CN 219396290U CN 202320942257 U CN202320942257 U CN 202320942257U CN 219396290 U CN219396290 U CN 219396290U
- Authority
- CN
- China
- Prior art keywords
- piezoelectric
- cavity
- layer
- substrate
- sensing layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The utility model provides a piezoelectric sensor for an electronic cigarette and the electronic cigarette, wherein the piezoelectric sensor for the electronic cigarette comprises: a substrate and a piezoelectric sensing layer fixedly connected with the substrate; be provided with the back of body chamber that runs through the substrate on the substrate, the piezoelectric sensing layer covers back of body chamber completely, the piezoelectric sensing layer includes corresponding first side and the second side in the thickness direction, first side communicates with the outside environment of electron cigarette through back of body chamber, the second side communicates with the inside cigarette chamber of electron cigarette for piezoelectric sensing layer can the perception the pressure differential between the atmospheric pressure of the atmospheric pressure in the cigarette chamber and the atmospheric pressure of outside environment, piezoelectric sensor need not set up the clearance, be provided with the first pressure equalizing balance hole that runs through piezoelectric sensing in the thickness direction on the piezoelectric sensing layer, the one end and the back of body chamber intercommunication of first pressure equalizing balance hole, the other end communicates with the cigarette chamber of electron cigarette, thereby avoid tobacco tar entering sensor inside to lead to the inefficacy, further only signal processing circuit needs the power supply, piezoelectric sensor's consumption greatly reduced.
Description
Technical Field
The utility model relates to the technical field of electronic cigarettes, in particular to a piezoelectric sensor for an electronic cigarette and the electronic cigarette.
Background
Currently, the popular electronic cigarette sensor sensing modes on the market include capacitive pressure sensors of MEMS technology. A capacitance type pressure sensor based on MEMS technology forms capacitance between a vibrating diaphragm and a back plate. When a user smokes, the vibrating diaphragm deforms, and the distance between the deformed vibrating diaphragm and the back electrode plate changes, so that capacitance change is generated.
As shown in fig. 1A and 1B, the capacitive pressure sensor 9 for electronic cigarette application based on MEMS technology includes a first substrate 13, a diaphragm 10 and a back plate 12, an air hole 2 is formed on the substrate 1, a bonding pad 3 is disposed on the lower surface of the substrate 1, a region 16 is disposed between the diaphragm 10 and the back plate 12, the first substrate 13 has a cavity 16', and the cavity 16' is in communication with the gap region 16. When the tobacco tar 17 enters the capacitive pressure sensor 9, the tobacco tar is easy to clamp in the capacitive gap area 16, and the deformation of the vibrating diaphragm 10 is affected due to the viscosity of the tobacco tar, so that the sensor is invalid, and the user experience feel bad. In addition, the diaphragm 10 and the back plate 12 of the capacitive pressure sensor 9 need to be energized to operate, and in a standby state (the user does not perform smoking), the voltage is also clamped on the capacitive sensor, so that certain power consumption is generated.
Disclosure of Invention
Compared with a capacitive pressure sensor, the piezoelectric sensor for the electronic cigarette provided by the utility model has the advantages that as long as pressure acts on the piezoelectric sensor, voltage output is generated due to piezoelectric effect, the piezoelectric sensor does not need to be provided with a gap, so that the phenomenon that tobacco tar enters the sensor to cause failure is avoided, only a signal processing circuit needs to supply power, compared with the capacitive pressure, the power consumption is greatly reduced, and a first voltage-equalizing balance hole is arranged on a piezoelectric sensing layer, so that when the smoking force of a user is large, or the blowing force of the user is large, the damage to each film layer of the piezoelectric sensor is avoided, and the specific scheme is as follows:
in a first aspect, there is provided a piezoelectric sensor for an electronic cigarette, comprising: a substrate and a piezoelectric sensing layer fixedly connected with the substrate;
the piezoelectric sensing layer completely covers the back cavity, the piezoelectric sensing layer comprises a first side and a second side which correspond to each other in the thickness direction, the first side is communicated with the external environment of the electronic cigarette through the back cavity, and the second side is communicated with the cigarette cavity in the electronic cigarette, so that the piezoelectric sensing layer can sense the pressure difference between the air pressure in the cigarette cavity and the air pressure of the external environment;
further, a first pressure equalizing balance hole penetrating through the piezoelectric sensing layer in the thickness direction is formed in the piezoelectric sensing layer, one end of the first pressure equalizing balance hole is communicated with the back cavity, and the other end of the first pressure equalizing balance hole is communicated with the cigarette cavity of the electronic cigarette.
Further, the piezoelectric sensing layer comprises a first dielectric layer fixedly connected with the substrate, a piezoelectric dielectric layer covered on the first dielectric layer, a lower electrode layer covered on the first dielectric layer, a piezoelectric sensitive film layer covered on the lower electrode layer and an upper electrode layer arranged on the piezoelectric sensitive film layer.
Further, the piezoelectric sensor further comprises a first electrical lead-out element and a second electrical lead-out element, wherein the first electrical lead-out element penetrates through the piezoelectric sensitive film layer and is in electrical contact with the lower electrode layer, and the second electrical lead-out element is arranged on the piezoelectric sensitive film layer and is electrically connected with the upper electrode layer through a connecting element.
Further, the first pressure equalizing balance hole is located at the middle position of the piezoelectric induction layer, and the upper electrode layer is provided with a vent hole communicated with the first pressure equalizing balance hole.
Further, the vent hole is coaxial with the first pressure equalizing balancing hole, and the diameter of the first pressure equalizing balancing hole is smaller than that of the vent hole.
Further, the number of the first voltage-equalizing balance holes is plural, projections of the first voltage-equalizing balance holes do not overlap with projections of the upper electrode layer on a plane perpendicular to the thickness direction of the substrate, and the first voltage-equalizing balance holes are distributed around the upper electrode layer.
Further, the back cavity comprises a first cavity and a second cavity which are communicated, wherein the first cavity is close to the first side of the piezoelectric sensing layer, the projection of the first cavity completely covers the projection of the second cavity on a plane perpendicular to the thickness direction of the substrate, and the first voltage equalizing balance hole and the vent hole are communicated with the first cavity.
Further, the back cavity comprises a first cavity and a second cavity which are communicated, wherein the first cavity is close to the first side of the piezoelectric sensing layer, the projection of the first cavity completely covers the projection of the second cavity on a plane perpendicular to the thickness direction of the substrate, and a plurality of first voltage equalizing balance holes are communicated with the first cavity.
Further, a second voltage-sharing balance hole penetrating through the first dielectric layer, the piezoelectric dielectric layer and the lower electrode layer is formed in the piezoelectric sensing layer, a first hollowed-out area communicated with the second voltage-sharing balance hole is formed in the piezoelectric sensing film layer, a second hollowed-out area communicated with the first hollowed-out area is formed in the upper electrode layer, and on a plane perpendicular to the thickness direction of the substrate, projection of the second hollowed-out area completely covers projection of the first hollowed-out area, and projection of the first hollowed-out area completely covers projection of the second voltage-sharing balance hole;
the back cavity comprises a first cavity and a second cavity which are communicated, wherein the first cavity is close to the first side of the piezoelectric sensing layer, the projection of the first cavity completely covers the projection of the second cavity on a plane perpendicular to the thickness direction of the substrate, and the second voltage equalizing balance hole is communicated with the first cavity.
In a second aspect, there is provided an electronic cigarette comprising a piezoelectric sensor as described above.
The piezoelectric sensor for the electronic cigarette in the utility model comprises: a substrate and a piezoelectric sensing layer fixedly connected with the substrate; be provided with the back of body chamber that runs through the substrate on the substrate, the piezoelectric sensing layer covers the back of body chamber completely, the piezoelectric sensing layer includes corresponding first side and the second side in the thickness direction, first side is through back of body chamber and the outside environment intercommunication of electron cigarette, the second side communicates with the inside cigarette chamber of electron cigarette for the piezoelectric sensing layer can perceive the pressure differential between the atmospheric pressure in the cigarette chamber and the atmospheric pressure of outside environment, when pressure P on piezoelectric sensing layer of perpendicular to piezoelectric sensor acts on, piezoelectric sensing layer of piezoelectric sensor takes place to bend, produce stress on the membrane. The piezoelectric sensing layer generates a corresponding electrical signal due to the positive piezoelectric effect of the piezoelectric material. Compared with a capacitive pressure sensor, the pressure sensor has the advantages that only pressure acts on a membrane, and voltage output is generated due to the piezoelectric effect. Therefore, when the piezoelectric sensor is applied to the electronic cigarette device, a gap is not required to be arranged, only the signal processing circuit is required to supply power, and compared with capacitive pressure, the power consumption is greatly reduced. In addition, the piezoelectric sensor is of a single-layer membrane structure, piezoelectric materials are mixed between the upper electrode and the lower electrode, gaps are avoided, the problem of failure caused by tobacco tar is avoided, and the reliability is high. Further, the piezoelectric sensing layer is provided with the first pressure equalizing balance hole, so that when the smoking strength of a user is large, or the blowing strength of the user is large, damage to each film layer of the piezoelectric sensor is avoided.
Drawings
The technical solution and other advantageous effects of the present utility model will be made apparent by the following detailed description of the specific embodiments of the present utility model with reference to the accompanying drawings.
FIG. 1A is a schematic diagram of a capacitive sensor for use in an electronic cigarette according to the prior art;
FIG. 1B is a schematic diagram of a capacitive sensor of the prior art after entry into tobacco tar;
fig. 2A is a schematic structural diagram of a piezoelectric sensor for an electronic cigarette according to a first embodiment of the present utility model;
fig. 2B is a schematic diagram of a piezoelectric sensor for electronic cigarette according to a first embodiment of the present utility model, in which a first pressure equalizing balancing hole is formed on the piezoelectric sensor;
FIG. 2C is a schematic diagram of a piezoelectric sensor for an electronic cigarette when an external force is applied to the piezoelectric sensor according to the first embodiment of the present utility model;
FIG. 2D is a top view of the piezoelectric sensor of FIG. 2B according to one embodiment of the present utility model;
fig. 3A is a schematic structural diagram of a piezoelectric sensor for an electronic cigarette according to a second embodiment of the present utility model;
FIG. 3B is a top view of the piezoelectric sensor of FIG. 3A according to a second embodiment of the present utility model;
fig. 4 is a schematic structural diagram of a piezoelectric sensor for an electronic cigarette according to a third embodiment of the present utility model;
fig. 5 is a schematic structural diagram of a piezoelectric sensor for an electronic cigarette according to a fourth embodiment of the present utility model;
fig. 6A is a schematic structural diagram of a piezoelectric sensor for an electronic cigarette according to a fifth embodiment of the present utility model;
FIG. 6B is a top view of the piezoelectric sensor of FIG. 6A in a fifth embodiment of the utility model;
fig. 7 is a schematic structural diagram of an electronic cigarette according to a sixth embodiment of the present utility model.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. It will be apparent that the described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The piezoelectric sensor for the electronic cigarette and the electronic cigarette in the utility model are described in detail below with reference to the accompanying drawings and the detailed description.
Example 1
As shown in fig. 2A to 2D, a piezoelectric sensor 100 for an electronic cigarette includes: a substrate 18 and a piezoelectric sensing layer 20 fixedly connected to the substrate 18;
the back cavity 19 penetrating through the substrate 18 is arranged on the substrate 18, the back cavity 19 is completely covered by the piezoelectric sensing layer 20, the piezoelectric sensing layer 20 comprises a first side and a second side which correspond to each other in the thickness direction, the first side is communicated with the external environment of the electronic cigarette through the back cavity 19, the second side is communicated with the cigarette cavity inside the electronic cigarette, and the piezoelectric sensing layer 20 can sense the pressure difference between the air pressure in the cigarette cavity and the air pressure of the external environment.
In this embodiment, the piezoelectric sensing layer 20 is disposed above the substrate 18, the piezoelectric sensing layer 20 is made of a material capable of elastically deforming, under the action of pressure, the piezoelectric sensing layer 20 can be elastically deformed as a whole, an electric signal is generated by the principle of the piezoelectric sensing layer 20 through pressure difference, when a user smokes, the piezoelectric sensing layer 20 is elastically deformed towards a direction away from the substrate 18, so that the piezoelectric sensing layer 20 correspondingly generates an electric signal, a signal processing element in the electronic cigarette obtains the electric signal, a corresponding control signal is generated, an atomization component in the electronic cigarette is controlled to be started, and the heating power of the atomization component can be controlled according to the smoking force of the user, so that more smoke can be generated when the smoking force of the user is large, the user experience is improved, when the user blows, the piezoelectric sensing layer 20 is elastically deformed towards a direction close to the substrate 18, and at this time, the back cavity 19 plays a role of providing an elastic deformation space for the piezoelectric sensing layer 20.
Further, as shown in fig. 2B, the piezoelectric sensing layer 20 is provided with a first pressure equalizing balance hole 29 penetrating through the piezoelectric sensing layer in the thickness direction, one end of the first pressure equalizing balance hole 29 is communicated with the back cavity 19, and the other end is communicated with the smoke cavity of the electronic cigarette.
In this embodiment, the films of the piezoelectric sensor 100 are very thin, and in the actual processing process, the films are very easily affected by the stress of the media of each layer, and film wrinkles or film breaks can be generated, which directly affect the performance or fail, so that the first voltage equalizing balance holes 29 are provided on the piezoelectric sensing layer 20, so that when the smoking force of the user is large, or the blowing force of the user is large, the damage to each film layer of the piezoelectric sensor 100 is avoided.
Further, the first pressure equalizing balancing hole 29 is located at the middle position of the piezoelectric sensing layer 20, and the upper electrode layer 25 is provided with a vent hole 30 communicated with the first pressure equalizing balancing hole 29.
In this embodiment, the shape of the first pressure equalizing hole 29 may be various shapes such as a circle, a square, and a triangle, which is not limited in this embodiment, the shape of the vent hole 30 may be various shapes such as a circle, a square, and a triangle, which is not limited in this embodiment, and the shape of the vent hole 30 may be the same as or different from the shape of the first pressure equalizing hole 29.
Further, the vent hole 30 is coaxial with the first pressure equalizing hole 29, and the diameter of the first pressure equalizing hole 29 is smaller than the diameter of the vent hole 30.
In the present embodiment, the diameter of the first pressure equalizing hole 29 is smaller than the diameter of the vent hole 30, so that the vent hole 30 is prevented from affecting the equalizing effect of the first pressure equalizing hole 29.
In the electronic cigarette in the present embodiment, as shown in fig. 2C, the working principle of the piezoelectric sensor 100 is schematically shown. When a pressure P is applied perpendicular to the piezoelectric sensing layer 20 of the piezoelectric sensor 100, the sensitive membrane bends and stresses are created on the membrane. Due to the positive piezoelectric effect of the piezoelectric material of the piezoelectric sensitive film, the lower surface of the piezoelectric sensitive film generates positive 31 charges, the lower surface generates negative charges 32, and finally voltage signals are output from the upper electrode and the lower electrode. Compared with a capacitive pressure sensor, the pressure sensor has the advantages that only pressure acts on a membrane, and voltage output is generated due to the piezoelectric effect. So when applied to an electronic cigarette device, the piezoelectric sensor 100 does not need to set a gap, only the signal processing circuit needs to supply power, and the power consumption is greatly reduced compared with the capacitive pressure. In addition, the piezoelectric sensor is of a single-layer membrane structure, piezoelectric materials are mixed between the upper electrode and the lower electrode, gaps are avoided, the problem of failure caused by tobacco tar is avoided, and the reliability is high.
Further, the piezoelectric sensing layer 20 includes a first dielectric layer 21 fixedly connected to the substrate 18, a piezoelectric dielectric layer 22 covering the first dielectric layer 21, a lower electrode layer 23 covering the first dielectric layer 21, a piezoelectric sensitive film layer 24 covering the lower electrode layer 23, and an upper electrode layer 25 disposed on the piezoelectric sensitive film layer 24.
In this embodiment, the substrate 18 may be a silicon substrate 18 or other substrate 18. The first dielectric layer 21 is preferably an aluminum nitride piezoelectric material because the aluminum nitride piezoelectric material has low intrinsic loss, is compatible with CMOS (Complementary Metal Oxide Semiconductor ) process, is easy to prepare, has high deposition rate, and has low temperature coefficient; of course, other piezoelectric materials are also possible, such as zinc oxide, PZT (lead zirconate titanate piezoelectric ceramic), etc. The thickness of the piezoelectric dielectric layer 22 is about 30nm as a growth seed layer. The lower electrode layer 23, preferably metallic molybdenum, aids in the c-axis oriented growth of the piezoelectric dielectric layer 22. The piezoelectric sensitive film layer 24 is preferably an aluminum nitride material.
In the present embodiment, the shape of the upper electrode layer 25 may be a circle or other shape, and the present embodiment is not limited thereto.
Further, as shown in fig. 2D, the piezoelectric sensor further includes a first electrical lead-out element 26 and a second electrical lead-out element 27, wherein the first electrical lead-out element 26 penetrates through the piezoelectric sensitive film layer 24 and is electrically contacted with the lower electrode layer 23, and the second electrical lead-out element 27 is disposed on the piezoelectric sensitive film layer 24 and is electrically connected with the upper electrode layer 25 through a connecting element 28.
In this embodiment, the upper electrode layer does not cover the piezoelectric sensitive film completely, the first electrical lead-out element 26, the second electrical lead-out element 27, the connecting element 28 and the upper electrode layer 25 do not interfere in position, so that the first electrode lead-out element penetrates the piezoelectric sensitive film layer 24 for electrical lead-out, and in an exemplary embodiment, the first electrical lead-out element 26 is T-shaped, a part of the first electrode lead-out element is fixed on the piezoelectric sensitive film layer 24, another part of the first electrode lead-out element penetrates the piezoelectric sensitive film layer 24, and the second electrical lead-out element 27 is disposed on the piezoelectric sensitive film layer 24.
The first electrical extraction element 26 and the second electrical extraction element 27 are preferably metallic Al, but may also be metallic molybdenum or other materials. When molybdenum is used, a further layer of metal, such as Al and au, is required to facilitate wire bonding.
Example two
Unlike the first embodiment, in connection with fig. 3A and 3B, the first voltage equalizing holes 29 are plural, and on a plane perpendicular to the thickness direction of the substrate 18, projections of the plural first voltage equalizing holes 29 do not overlap with projections of the upper electrode layer 25, and the plural first voltage equalizing holes 29 are distributed around the upper electrode layer 25.
In the present embodiment, referring to fig. 3A and 3B, the upper electrode layer 25 is circular, and thus, the first pressure equalizing holes 29 are provided along the circumference of the upper electrode layer 25.
Example III
Unlike the first embodiment, as shown in fig. 4, the back cavity 19 includes a first cavity 191 and a second cavity 192 that are connected, wherein the first cavity 191 is close to the first side of the piezoelectric sensing layer 20, and the projection of the first cavity 191 completely covers the projection of the second cavity 192 on a plane perpendicular to the thickness direction of the substrate 18, and the first pressure equalizing hole 29 and the vent hole 30 are both connected to the first cavity 191.
In this embodiment, the Cavity-SOI (Silicon-On-Insulator) based On the Silicon On the insulating substrate 18 has two benefits compared to the etching of the back Cavity 19 On the Silicon substrate 18: first, the Cavity on the substrate 18 defines the size boundary of the piezoelectric sensitive film, and the sensitivity uniformity is high. Second, the second cavity 192 may be small in size, and the area of the substrate 18 other than the second cavity 192 is large in size, so that the fixing area is large and the strength of the piezoelectric sensing layer 20 is high.
Example IV
Unlike the second embodiment, as shown in fig. 5, the back cavity 19 includes a first cavity 191 and a second cavity 192 that are connected, wherein the first cavity 191 is close to the first side of the piezoelectric sensing layer 20, and on a plane perpendicular to the thickness direction of the substrate 18, the projection of the first cavity 191 completely covers the projection of the second cavity 192, and the plurality of first pressure equalizing holes 29 are all connected with the first cavity 191.
In this embodiment, the Cavity-based SOI (Silicon-On-Insulator) On the insulating substrate 18 has two benefits compared to the etching of the back Cavity 19 On the Silicon substrate 18: first, the Cavity on the substrate 18 defines the size boundary of the piezoelectric sensitive film, and the sensitivity uniformity is high. Second, the second cavity 192 may be small in size, and the area of the substrate 18 other than the second cavity 192 is large in size, so that the fixing area is large and the strength of the piezoelectric sensing layer 20 is high.
Example five
Unlike the first embodiment, referring to fig. 6A and 6B, the piezoelectric sensing layer 20 is provided with a second voltage equalizing balance hole 33 penetrating the first dielectric layer 21, the piezoelectric dielectric layer 22 and the lower electrode layer 23, the piezoelectric sensing layer 24 is provided with a first hollow area 241 communicating with the second voltage equalizing balance hole 33, the upper electrode layer 25 is provided with a second hollow area 251 communicating with the second hollow area 251, on a plane perpendicular to the thickness direction of the substrate 18, the projection of the second hollow area 251 completely covers the projection of the first hollow area 241, and the projection of the first hollow area 241 completely covers the projection of the second voltage equalizing balance hole 33;
the back cavity 19 comprises a first cavity 191 and a second cavity 192 which are communicated, wherein the first cavity 191 is close to the first side of the piezoelectric sensing layer 20, the projection of the first cavity 191 completely covers the projection of the second cavity 192 on a plane perpendicular to the thickness direction of the substrate 18, and the second voltage equalizing hole 33 is communicated with the first cavity 191.
In this embodiment, the piezoelectric sensitive film does not cover the lower electrode layer 23 entirely, a portion of the middle is etched to form a first hollow region 241, and a portion of the middle of the upper electrode layer 25 is etched to form a second hollow region 251, so that the upper electrode layer 25 forms a ring shape. Thus, the thickness of the middle area is lower than that of the periphery, and a stress concentration area is formed on the periphery. That is, the deformation amounts of the first dielectric layer 21, the piezoelectric dielectric layer 22, and the lower electrode layer 23 corresponding to the second hollowed-out region 251 are large under the same pressure, and larger stress is generated in the annular region, thereby improving the sensitivity.
Example six
As shown in fig. 7, the present embodiment provides an electronic cigarette including the piezoelectric sensor 100 as in any one of the first to fifth embodiments.
Specifically, fig. 7 is an assembly schematic diagram of a device of the piezoelectric sensor 100 applied to an electronic cigarette, where an assembly structure of the piezoelectric sensor 100 includes a package 200 of the piezoelectric sensor 100, a signal processing circuit 300, and a substrate 400, where the piezoelectric sensor 100 and the signal processing circuit 300 are fixed on the same side of the substrate 400, and the assembly structure of the piezoelectric sensor 100 is soldered to a printed circuit board 500 by solder, and the printed circuit board 500 is provided with a first opening 600 facing a back cavity 19 of the piezoelectric sensor 100. The printed circuit board 500 is fixedly connected with the housing 700, and a second opening 800 is provided at a position corresponding to the first opening, the piezoelectric sensor 100 is communicated with the external environment through the second opening 800, and a third opening 900 is provided on the piezoelectric sensor 100 package 200.
When a user creates an airflow within the housing 700 in the smoking chamber, at which time the airflow flows through the third opening 900 to the housing 700, a pressure P will be created on the piezoelectric sensor 100, bending of the piezoelectric sensor 100 will occur, and stress will be created on the membrane, according to bernoulli's equation of the fluid. Due to positive piezoelectric effect of the piezoelectric material, positive and negative charges are generated on the upper and lower surfaces of the piezoelectric material, and finally voltage signals are output from the upper and lower electrodes. The signal processing circuit 300 may detect the magnitude of its voltage output to perform a corresponding action. When the sensed voltage value reaches the threshold voltage (set according to a specific scheme), the electronic cigarette starts to start normally, and corresponding actions are executed, such as checking whether the user sucks the power according to the change of the voltage, so as to control the power of the atomizer.
It will be appreciated that the various numerical numbers referred to in the embodiments of the present utility model are merely for ease of description and are not intended to limit the scope of the embodiments of the present utility model. The sequence number of each process does not mean the sequence of the execution sequence, and the execution sequence of each process should be determined according to the function and the internal logic.
The foregoing has outlined some of the more detailed description of the embodiments of the present utility model, wherein specific examples are provided herein to illustrate the principles and embodiments of the present utility model, and the above examples are provided to assist in the understanding of the method and core ideas of the present utility model; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in accordance with the ideas of the present utility model, the present description should not be construed as limiting the present utility model in view of the above.
Claims (10)
1. A piezoelectric sensor for an electronic cigarette, comprising: a substrate (18) and a piezoelectric sensing layer (20) fixedly connected with the substrate (18);
the piezoelectric sensing layer (20) completely covers the back cavity (19), the piezoelectric sensing layer (20) comprises a first side and a second side which correspond to each other in the thickness direction, the first side is communicated with the external environment of the electronic cigarette through the back cavity (19), and the second side is communicated with the cigarette cavity in the electronic cigarette, so that the piezoelectric sensing layer (20) can sense the pressure difference between the air pressure in the cigarette cavity and the air pressure of the external environment;
the piezoelectric sensing layer (20) is provided with a first pressure equalizing balance hole (29) penetrating through piezoelectric sensing in the thickness direction, one end of the first pressure equalizing balance hole (29) is communicated with the back cavity (19), and the other end of the first pressure equalizing balance hole is communicated with a smoke cavity of the electronic cigarette.
2. Piezoelectric sensor according to claim 1, characterized in that the piezoelectric sensing layer (20) comprises a first dielectric layer (21) fixedly connected to the substrate (18), a piezoelectric dielectric layer (22) covering the first dielectric layer (21), a lower electrode layer (23) covering the first dielectric layer (21), a piezoelectric sensitive film layer (24) covering the lower electrode layer (23), and an upper electrode layer (25) arranged on the piezoelectric sensitive film layer (24).
3. Piezoelectric transducer according to claim 2, further comprising a first electrical lead-out element (26) and a second electrical lead-out element (27), wherein the first electrical lead-out element (26) penetrates the piezoelectric sensitive film layer (24) and is in electrical contact with the lower electrode layer (23), and the second electrical lead-out element (27) is arranged on the piezoelectric sensitive film layer (24) and is electrically connected with the upper electrode layer (25) by means of a connecting element (28).
4. Piezoelectric sensor according to claim 2, characterized in that the first pressure equalizing balancing hole (29) is located in the middle of the piezoelectric sensing layer (20), and that the upper electrode layer (25) is provided with a vent hole (30) communicating with the first pressure equalizing balancing hole (29).
5. Piezoelectric sensor according to claim 4, characterized in that the vent hole (30) is coaxial with the first pressure equalizing balancing hole (29), and in that the diameter of the first pressure equalizing balancing hole (29) is smaller than the diameter of the vent hole (30).
6. Piezoelectric sensor according to claim 2, characterized in that the number of the first pressure equalizing holes (29) is a plurality, the projections of the plurality of the first pressure equalizing holes (29) do not overlap with the projections of the upper electrode layer (25) on a plane perpendicular to the thickness direction of the substrate (18), and the plurality of the first pressure equalizing holes (29) are distributed around the upper electrode layer (25).
7. The piezoelectric sensor according to claim 4, wherein the back cavity (19) comprises a first cavity (191) and a second cavity (192) which are communicated, wherein the first cavity (191) is close to the first side of the piezoelectric sensing layer (20), a projection of the first cavity (191) completely covers a projection of the second cavity (192) on a plane perpendicular to a thickness direction of the substrate (18), and the first pressure equalizing hole (29) and the vent hole (30) are both communicated with the first cavity (191).
8. The piezoelectric sensor according to claim 6, wherein the back cavity (19) comprises a first cavity (191) and a second cavity (192) which are communicated, wherein the first cavity (191) is close to the first side of the piezoelectric sensing layer (20), and a projection of the first cavity (191) completely covers a projection of the second cavity (192) on a plane perpendicular to a thickness direction of the substrate (18), and a plurality of the first pressure equalizing holes (29) are communicated with the first cavity (191).
9. Piezoelectric sensor according to claim 2, characterized in that a second voltage-equalizing balancing hole (33) penetrating through the first dielectric layer (21), the piezoelectric dielectric layer (22) and the lower electrode layer (23) is arranged on the piezoelectric sensing layer (20), a first hollowed-out area (241) communicated with the second voltage-equalizing balancing hole (33) is arranged on the piezoelectric sensitive film layer (24), a second hollowed-out area (251) communicated with the first hollowed-out area (241) is arranged on the upper electrode layer (25), and on a plane perpendicular to the thickness direction of the substrate (18), the projection of the first hollowed-out area (241) is completely covered by the projection of the second hollowed-out area (251), and the projection of the first hollowed-out area (241) is completely covered by the projection of the second voltage-equalizing balancing hole (33);
the back cavity (19) comprises a first cavity (191) and a second cavity (192) which are communicated, wherein the first cavity (191) is close to the first side of the piezoelectric sensing layer (20), the projection of the first cavity (191) completely covers the projection of the second cavity (192) on a plane perpendicular to the thickness direction of the substrate (18), and the second pressure equalizing balance hole (33) is communicated with the first cavity (191).
10. An electronic cigarette comprising a piezoelectric sensor as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320942257.3U CN219396290U (en) | 2023-04-24 | 2023-04-24 | Piezoelectric sensor for electronic cigarette and electronic cigarette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320942257.3U CN219396290U (en) | 2023-04-24 | 2023-04-24 | Piezoelectric sensor for electronic cigarette and electronic cigarette |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219396290U true CN219396290U (en) | 2023-07-25 |
Family
ID=87209148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320942257.3U Active CN219396290U (en) | 2023-04-24 | 2023-04-24 | Piezoelectric sensor for electronic cigarette and electronic cigarette |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219396290U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116986550A (en) * | 2023-09-26 | 2023-11-03 | 苏州敏芯微电子技术股份有限公司 | Airflow sensor and airflow sensor packaging structure |
-
2023
- 2023-04-24 CN CN202320942257.3U patent/CN219396290U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116986550A (en) * | 2023-09-26 | 2023-11-03 | 苏州敏芯微电子技术股份有限公司 | Airflow sensor and airflow sensor packaging structure |
| CN116986550B (en) * | 2023-09-26 | 2023-11-28 | 苏州敏芯微电子技术股份有限公司 | Airflow sensor and airflow sensor packaging structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN219396290U (en) | Piezoelectric sensor for electronic cigarette and electronic cigarette | |
| KR100424704B1 (en) | Micromechanical sensor | |
| US7570773B2 (en) | Sound detecting mechanism | |
| TWI835954B (en) | Micromechanical component for a capacitive pressure sensor device | |
| EP2381698A1 (en) | Microphone | |
| CN106535071B (en) | Integrated device of MEMS microphone and environmental sensor and manufacturing method thereof | |
| KR20170094428A (en) | Integrated structure of mems microphone and pressure sensor, and manufacturing method thereof | |
| CN103139691A (en) | Micro-electromechanical system (MEMS) silicon microphone utilizing multi-hole signal operation instruction (SOI) silicon bonding and manufacturing method thereof | |
| CN110577185B (en) | MEMS structure, manufacturing method of MEMS structure and tire pressure sensor | |
| CN104378724A (en) | MEMS silicon microphone without large back acoustic cavity | |
| CN112188374A (en) | MEMS microphone chip, manufacturing method of chip module and electronic equipment | |
| Dehé et al. | Silicon micromachined microphone chip at Siemens | |
| CN218679380U (en) | Vibration sensor | |
| EP3742465B1 (en) | An air pressure switch, power supply device and e-cigarettes containing the same | |
| JP3697862B2 (en) | Pressure detection device | |
| JP4863571B2 (en) | Pressure sensor | |
| CN214257962U (en) | Electronic cigarette sensor device | |
| US11560303B2 (en) | MEMS device with a diaphragm having a net compressive stress | |
| CN212414754U (en) | Sensing device and electronic cigarette | |
| JP3461984B2 (en) | Capacitive absolute pressure sensor | |
| CN220912530U (en) | Backboard structure with star-shaped arrangement vent holes and capacitive air pressure sensor | |
| JPH06323939A (en) | Capacitance-type sensor | |
| CN218164276U (en) | Airflow sensor and electronic cigarette comprising same | |
| CN115334434B (en) | Microphone assembly and electronic equipment | |
| CN219578301U (en) | Variable-sensitivity airflow sensor switch assembly and electronic equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |