CN220885328U

CN220885328U - Tilting indication device for PECVD (plasma enhanced chemical vapor deposition) equipment package transportation

Info

Publication number: CN220885328U
Application number: CN202322558113.0U
Authority: CN
Inventors: 刘长见; 魏明洲; 王海龙
Original assignee: Jiezao Technology Ningbo Co ltd
Current assignee: Jiezao Technology Ningbo Co ltd
Priority date: 2023-09-20
Filing date: 2023-09-20
Publication date: 2024-05-03
Anticipated expiration: 2033-09-20

Abstract

The utility model discloses an inclination indicating device for PECVD equipment package transportation, comprising: the comb-shaped ball bearing device comprises a comb-shaped body, wherein the comb-shaped body is provided with a square starting part, an insertion hole is formed in the center of the long side of the square starting part, the included angle between the diagonal line of the square starting part and the long side of the square starting part is 30 degrees, the long side of the square starting part is used as the starting direction, a first branch groove, a second branch groove, a third branch groove, a fourth branch groove and a fifth branch groove are sequentially formed in one side of the square starting part, and the grooves of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove are communicated with one another to form a light ball bearing motion passage. The utility model has the advantages that: the problem that in the prior art, large PECVD equipment is inverted or inclined in the long-distance transportation process or the sea transportation process is solved, and faults caused by inversion are effectively recorded.

Description

Tilting indication device for PECVD (plasma enhanced chemical vapor deposition) equipment package transportation

Technical Field

The utility model relates to the technical field of PECVD (plasma enhanced chemical vapor deposition), in particular to an inclination indicating device for conveying packaging parts of PECVD equipment.

Background

With the rise of new energy technology, the heterojunction domestic PECVD equipment is more and more trusted by foreign manufacturers, foreign orders of companies are stepped on, and after shipment, the heterojunction domestic PECVD equipment needs to be transported by gas, ship or even air to a client company in a long distance, so that the long distance transportation, such as the transportation, transportation and storage processes of large PECVD equipment, is not allowed to be inverted or inclined. This is because, once inverted or tilted, the cartridge electrode and even the vacuum level is lost, and the lubrication oil in the vacuum pump may flow to other locations, causing the compressor to be starved of oil, resulting in product failure.

When the existing logistics vehicle transports the whole vehicle packaging box, the whole pallet can be overturned or the single packaging box falls down due to the reasons of road conditions, personnel negligence, boxing design and the like. And the packaging box may have inclination exceeding the inclination requirement during the handling or loading and unloading process, resulting in the loss of articles. However, after the goods are transported to the destination, the packaging box may be reset, obvious abnormality is not seen from the appearance, and whether the goods are inclined or not in the transporting process cannot be detected. Thereby causing product failure. For faults caused by inversion, the reasons cannot be searched for because a good recording device is not provided, and disputes often exist.

Disclosure of Invention

The utility model provides an inclination indicating device for conveying PECVD equipment packages, which solves the technical problems in the prior art.

According to one aspect of the present utility model, there is provided a tilt indicating device for transporting a package of a PECVD apparatus, comprising: the comb-shaped ball bearing device comprises a comb-shaped body, wherein the comb-shaped body is provided with a square starting part, an insertion hole is formed in the center of the long side of the square starting part, the included angle between the diagonal line of the square starting part and the long side is 30 degrees, the long side of the square starting part is used as the starting direction, a first branch groove, a second branch groove, a third branch groove, a fourth branch groove and a fifth branch groove are sequentially formed in one side of the square starting part, the included angle between the groove edge of the first branch groove and the diagonal line is 40 degrees, the included angle between the groove edge of the second branch groove and the diagonal line is 50 degrees, the included angle between the groove edge of the third branch groove and the diagonal line is 60 degrees, the included angle between the groove edge of the fourth branch groove and the diagonal line is 70 degrees, and the included angles between the groove edge of the fifth branch groove and the diagonal line are 80 degrees, and the grooves of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove are mutually connected to form a light ball bearing path.

Further, an upper portion of the first branch groove forms a first step with respect to the square start portion.

Further, an upper portion of the second branch groove forms a second step with respect to the first branch groove.

Further, an upper portion of the third branch groove forms a third step with respect to the second branch groove.

Further, an upper portion of the fourth branch groove forms a fourth step with respect to the third branch groove.

Further, the upper part of the fifth branch groove and the upper part of the fourth branch groove form an equal plane structure.

Further, the comb-shaped body gum is provided with a fragile paste.

Further, the other long side of the square starting part is used as the starting direction, and symmetrical branch grooves with different angles are also sequentially arranged.

According to the technical scheme provided by the utility model, the portable PECVD device comprises the comb-shaped body, the channels arranged on the comb-shaped body and the light balls arranged in the channels, wherein the channels comprise a 30-degree channel, a 40-degree channel, a 50-degree channel, a 60-degree channel, a 70-degree channel and a 80-degree channel which are communicated, so that the inclination degree can be accurately recorded, the use of fragile labels can be avoided, the use of the portable PECVD device is realized, the use of the portable PECVD device is prevented from being manually interfered, the symmetrical inclination, inclination indications of different directions of a box body and the inclination of an X axis and a Y axis are recorded, the problem that large PECVD device is inverted or inclined in the long-distance transportation process or the sea transportation process in the prior art is solved, and the faults caused by inversion are effectively recorded.

The foregoing description is only an overview of the technology of the present utility model, and it is to be understood that the present utility model may be embodied in the form of specific details for the purpose of providing a more thorough understanding of the present utility model, and is to be understood as being a more complete description of the present utility model, as embodied in the following specific examples.

Drawings

Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the utility model. Also, like reference numerals are used to designate like parts throughout the figures.

FIG. 1 is a schematic view showing the structure of a first embodiment of a tilting indication device for transporting PECVD equipment packages.

FIG. 2 is a schematic diagram of a second embodiment of a PECVD apparatus package transportation tilt indicating device according to the present utility model.

In the drawing, 10-a hole, 11-a first branch groove, 12-a second branch groove, 13-a third branch groove, 14-a fourth branch groove, 15-a fifth branch groove, 16-a first step, 17-a second step, 18-a third step, 19-a fourth step and 20-a light ball.

Detailed Description

Exemplary embodiments of the present utility model will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present utility model are shown in the drawings, it should be understood that the present utility model may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the utility model to those skilled in the art.

The utility model provides a tilting indication device for PECVD equipment package transportation. What is not described in detail in the embodiments of the present utility model belongs to the prior art known to those skilled in the art. The specific conditions are not noted in the examples of the present utility model and are carried out according to the conditions conventional in the art or suggested by the manufacturer.

Referring to fig. 1, the inclination indicating device for transporting the packaging piece of the PECVD apparatus according to the present utility model comprises a comb-shaped body, wherein the comb-shaped body has a square initial portion, an insertion hole 19 is provided at a center position of a long side of the square initial portion, an angle between a diagonal line of the square initial portion and the long side is 30 °, an angle between a groove edge of the fourth branch groove 14 and the diagonal line is 70 °, an angle between a groove edge of the fifth branch groove 15 and the diagonal line is 80 ° sequentially provided at one side of the square initial portion, an angle between a groove edge of the first branch groove 11 and the diagonal line is 40 °, an angle between a groove edge of the second branch groove 12 and the diagonal line is 50 °, an angle between a groove edge of the third branch groove 13 and the diagonal line is 60 °, an angle between a groove edge of the fourth branch groove 14 and the diagonal line is 70 °, and an angle between a groove edge of the fifth branch groove 15 and the diagonal line is 80 °, and ball passages 20 are formed in the first branch groove 11, the second branch groove 12, the third branch groove 13, and the fourth branch groove 14 and the fifth branch groove 15.

As a specific embodiment, the upper portion of the first branch groove forms a first step with respect to the square start portion.

As a specific embodiment, the upper portion of the second branch groove forms a second step with respect to the first branch groove.

As a specific embodiment, an upper portion of the third branch groove forms a third step with respect to the second branch groove.

As a specific embodiment, an upper portion of the fourth branched groove forms a fourth step with respect to the third branched groove.

As a specific embodiment, the upper part of the fifth branch groove and the upper part of the fourth branch groove form an isoplane structure.

As a specific embodiment, the device comprises a comb-shaped body, a channel arranged on the comb-shaped body and a light ball arranged in the channel, wherein the channel comprises a 30-degree channel, a 40-degree channel, a 50-degree channel, a 60-degree channel, a 70-degree channel and an 80-degree channel which are communicated.

As a specific embodiment, the 30 ° channel, the 40 ° channel, the 50 ° channel, the 60 ° channel, the 70 ° channel, and the 80 ° channel are communicated and have a certain depth.

As specific examples, the 30 ° channel, 40 ° channel, 50 ° channel, 60 ° channel, 70 ° channel, 80 ° channel each have a highest end and a lowest end.

As a specific embodiment, the 30 ° channel, 40 ° channel, 50 ° channel, 60 ° channel, 70 ° channel, 80 ° channel are communicated at the highest end, and the ball is located at the lowest position where the 30 ° channel is communicated.

As a specific example, the lightweight pellets of the 30 ° channel can automatically move by gravity when the lowest end encounters inversion or tilting.

As a specific example, the 30 ° channel is provided with an insertion hole, into which a light ball can be inserted before use.

As a specific embodiment, the comb-shaped body back adhesive is provided with a fragile adhesive, and is not easy to take down after being adhered; if the mark is taken down, the relevant trace can be obviously seen, which is favorable for the preservation of the evidence.

As a specific embodiment, the comb-shaped body channel is manufactured by adopting a plastic sucking process, so that the light balls can freely move.

As a specific embodiment, the device is also provided with symmetrical channels, and the purpose is to record inclination indication of different directions of the box body, and the inclination of the X axis and the Y axis.

As a specific embodiment, referring to fig. 2, the comb-shaped body of the present utility model may be designed to have a circular structure with end-to-end grooves, so as to have a record of tilting at 180 °.

By adopting the utility model, once the ball is inclined or inverted, the 30-degree channel automatically rolls under the action of gravity, and the light ball automatically rolls into the 40-degree channel, the 50-degree channel, the 60-degree channel, the 70-degree channel and the 80-degree channel at the lowest end under the action of gravity according to different degrees of inclination along the 30-degree channel. When the box body is placed upside down and the inclination recording device is placed right up again, the small ball is placed at the lowest end of the channel under the action of gravity, so that whether the ball is inclined or inverted in the carrying, transporting and storing processes can be judged according to the positions of the balls, the ball is applied to a packing box of PECVD equipment, once the PECVD equipment is found to be inclined or inverted, a user or a client can reject to receive goods, and a technician checks the inside of a product without oil leakage or confirms to receive goods after repairing, thereby not only avoiding the falsification, but also promoting the carrying personnel to pay more attention in the carrying process and the transporting process, and avoiding the loss caused by improper carrying.

It should be understood that the utility model is not limited to the particular arrangements and instrumentality described above and shown in the drawings. For the sake of brevity, a detailed description of known methods is omitted here. In the above embodiments, several specific steps are described and shown as examples. The method processes of the present utility model are not limited to the specific steps described and shown, but various changes, modifications and additions, or the order between steps may be made by those skilled in the art after appreciating the spirit of the present utility model.

Claims

1. A tilt indicating device for shipping a PECVD apparatus package, comprising: the comb-shaped ball bearing device comprises a comb-shaped body, wherein the comb-shaped body is provided with a square starting part, an insertion hole is formed in the center of the long side of the square starting part, the included angle between the diagonal line of the square starting part and the long side is 30 degrees, the long side of the square starting part is used as the starting direction, a first branch groove, a second branch groove, a third branch groove, a fourth branch groove and a fifth branch groove are sequentially formed in one side of the square starting part, the included angle between the groove edge of the first branch groove and the diagonal line is 40 degrees, the included angle between the groove edge of the second branch groove and the diagonal line is 50 degrees, the included angle between the groove edge of the third branch groove and the diagonal line is 60 degrees, the included angle between the groove edge of the fourth branch groove and the diagonal line is 70 degrees, and the included angles between the groove edge of the fifth branch groove and the diagonal line are 80 degrees, and the grooves of the first branch groove, the second branch groove, the third branch groove, the fourth branch groove and the fifth branch groove are mutually connected to form a light ball bearing path.

2. The apparatus of claim 1, wherein the upper portion of the first leg forms a first step with respect to the square initiation.

3. The apparatus of claim 1, wherein an upper portion of the second groove forms a second step with respect to the first groove.

4. The apparatus of claim 1, wherein an upper portion of the third groove forms a third step with respect to the second groove.

5. The apparatus of claim 1, wherein an upper portion of the fourth groove forms a fourth step with respect to the third groove.

6. The apparatus of claim 1, wherein the upper portion of the fifth branch groove and the upper portion of the fourth branch groove form an isoplanar structure.

7. The apparatus of claim 1, wherein the comb-shaped body is provided with frangible tabs.

8. The tilting indication device for transporting the package of the PECVD apparatus according to claim 1, wherein the other long side of the square starting part is used as a starting direction, and symmetrical branch grooves with different angles are sequentially arranged.