CN220867544U - Surface roughening device - Google Patents

Surface roughening device Download PDF

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Publication number
CN220867544U
CN220867544U CN202322440948.6U CN202322440948U CN220867544U CN 220867544 U CN220867544 U CN 220867544U CN 202322440948 U CN202322440948 U CN 202322440948U CN 220867544 U CN220867544 U CN 220867544U
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China
Prior art keywords
plate
anode
roughening
shielding
shield
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CN202322440948.6U
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杨浩基
关耀辉
邱俊浩
高证良
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Advanced Semiconductor Materials Anhui Co ltd
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Advanced Semiconductor Materials Anhui Co ltd
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Abstract

A surface roughening apparatus, comprising: an electrophoresis tank; a chemical solution filled in the electrophoresis tank; a plurality of anode roughening assemblies disposed in the electrophoresis tank, wherein the anode roughening assemblies comprise: an anode plate; and the shielding plate is in fit connection with the anode plate and is provided with a plurality of through holes, and the through holes expose the surface of the anode plate. Through increasing the shield plate between anode plate and waiting to coarsen the negative plate, can shield the marginal effect through the shield plate to play the effect of shielding marginal electric current, and then can improve coarsening degree homogeneity, promote coarsening quality, the simple structure of shield plate moreover, the cost is with lower costs. In addition, because the anode plate and the shielding plate are arranged in a fitting way, the current path of the anode plate can be consistent with the through direction of the through hole on the shielding plate, and then the extending direction of the coarsening micro-pit finally formed on the cathode plate to be coarsened can be consistent with the through direction of the through hole, so that the requirements of different coarsening on the extending direction of the micro-pit are met.

Description

Surface roughening device
Technical Field
The utility model relates to the technical field of lead frame roughening, in particular to a surface roughening device.
Background
At present, in order to improve the adhesion of the molding compound on the lead frame in the package structure, a surface roughening treatment method is generally used to change the texture of the lead frame, and the adhesion between the molding compound and the lead frame is enhanced, so that the Moisture sensitive element level (moistur SENSITIVITY LEVEL: MSL) of the whole package can be effectively improved.
However, the surface roughening device in the prior art still has a plurality of problems.
Disclosure of utility model
The utility model solves the technical problem of providing a surface roughening device, improving roughening quality and meeting the requirements of different roughening on the extending direction of micro pits.
In order to solve the above problems, the technical solution of the present utility model provides a surface roughening device, including: an electrophoresis tank; a chemical solution filled in the electrophoresis tank; the anode coarsening assembly is arranged in the electrophoresis tank and is parallel to the first direction, the anode coarsening assembly is immersed in the chemical solution, and the anode coarsening assembly comprises: an anode plate; the shielding plate is connected with the anode plate in a fitting mode, the anode plate and the shielding plate are arranged in parallel along the first direction, the shielding plate is provided with a plurality of through holes, and the through holes expose the surface of the anode plate.
Optionally, the anode plate includes relative first polar plate face and second polar plate face, the shielding plate includes relative first shielding face and second shielding face, the first polar plate face of anode plate with the second shielding face of shielding plate is along the laminating contact of direction.
Optionally, the area of the anode plate is smaller than the area of the shielding plate, and the projection of the anode plate towards the first direction is located in the projection range of the shielding plate towards the first direction.
Optionally, the through hole runs through the direction of shielding plate with have the contained angle that runs through between the shielding plate surface, the scope of contained angle that runs through is: 45 degrees to 135 degrees.
Optionally, the shielding plate includes an edge area and a central area, the edge area surrounds the central area, and the plurality of through holes are located in the central area.
Optionally, the area of the anode plate is larger than the area of the central area, and the projection of the central area towards the first direction is located in the projection range of the anode plate towards the first direction.
Optionally, the area of the central area is 30% to 80% of the surface area of one side of the shielding plate.
Optionally, the shielding plate is an insulating plate.
Optionally, the plurality of anode roughening components includes: the first anode roughening assembly and the second anode roughening assembly are arranged in parallel along the first direction, and the first anode roughening assembly and the second anode roughening assembly have a distance along the first direction.
Optionally, the spacing is greater than the thickness of the cathode plate to be roughened.
Compared with the prior art, the technical scheme of the utility model has the following advantages:
According to the surface roughening device, the shielding plate is additionally arranged between the anode plate and the cathode plate to be roughened, and the shielding plate can shield the edge effect, so that the effect of shielding the edge current is achieved, the uniformity of the roughening degree can be improved, the roughening quality is improved, the structure of the shielding plate is simple, and the manufacturing cost is low. In addition, because the anode plate and the shielding plate are arranged in a fitting way, the current path of the anode plate can be consistent with the through direction of the through hole on the shielding plate, and then the extending direction of the coarsening micro-pit finally formed on the cathode plate to be coarsened can be ensured to be consistent with the through direction of the through hole, so that the requirements of different coarsening on the extending direction of the micro-pit are met.
Further, the area of the anode plate is smaller than that of the shielding plate, and the projection of the anode plate towards the first direction is located in the projection range of the shielding plate towards the first direction, so that the shielding effect of the shielding plate on edge current is guaranteed.
Further, the area of the anode plate is larger than that of the central region, the projection of the central region towards the first direction is located in the projection range of the anode plate towards the first direction, so that the appearance of a coarsening region on the cathode plate to be coarsened can be ensured to be consistent with that of the central region, and the appearance of the central region can be adjusted, so that the demands on the coarsening region in different coarsening processes can be ensured.
Drawings
FIG. 1 is a schematic diagram of current distribution of a cathode plate and an anode plate during roughening;
FIG. 2 is a schematic diagram of a surface roughening device according to an embodiment of the present utility model;
FIG. 3 is a schematic view of an anode roughening assembly of a surface roughening device according to an embodiment of the present utility model;
FIG. 4 is a schematic view of micro-pits formed on a cathode plate to be roughened after roughening in an embodiment of the utility model.
Detailed Description
As described in the background art, the surface roughening device in the prior art still has a plurality of problems. The following detailed description will be given of the geometric drawings.
Fig. 1 is a schematic diagram of current distribution of a cathode plate and an anode plate at coarsening.
Referring to fig. 1, in particular, in the roughening process of the conventional surface roughening device, the most commonly encountered problem is uneven roughening degree on the cathode plate surface, which is due to the larger edge current of the cathode plate and the anode plate, so that the roughening degree of the edge position of the final cathode plate is deeper, and the roughening quality of the cathode plate is further improved.
On the basis, the utility model provides the surface roughening device, the shielding plate is added between the anode plate and the cathode plate to be roughened, and the shielding plate can shield the edge effect, so that the effect of shielding the edge current is achieved, the uniformity of the roughening degree can be improved, the roughening quality is improved, the structure of the shielding plate is simple, and the manufacturing cost is low. In addition, because the anode plate and the shielding plate are in fit arrangement, the current path of the anode plate can be consistent with the through direction of the through hole on the shielding plate, and then the extending direction of the coarsening micro-pit finally formed on the cathode plate to be coarsened can be ensured to be consistent with the through direction of the through hole, so that the requirements of different coarsening on the extending direction of the micro-pit are met.
In order that the utility model may be readily understood, a more complete description of the utility model will be rendered by reference to the appended drawings. Exemplary embodiments of the present utility model are illustrated in the accompanying drawings. This utility model may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model.
FIG. 2 is a schematic diagram of a surface roughening device according to an embodiment of the present utility model; FIG. 3 is a schematic view of an anode roughening assembly of a surface roughening device according to an embodiment of the present utility model; FIG. 4 is a schematic view of micro-pits formed on a cathode plate to be roughened after roughening in an embodiment of the utility model.
Referring to fig. 2 and 3, a surface roughening apparatus includes: an electrophoresis tank 100; a chemical solution 101 filled in the electrophoresis tank 100; the anode roughening assemblies 102 are disposed in the electrophoresis tank 100 and arranged in parallel along a first direction X, and the anode roughening assemblies 102 are immersed in the chemical solution 101, wherein the anode roughening assemblies 102 include: an anode plate 1021; the shielding plate 1022 is attached to the anode plate 1021, the anode plate 1021 and the shielding plate 1022 are arranged in parallel along the first direction X, the shielding plate 1022 has a plurality of through holes 1023, and the through holes 1023 expose the surface of the anode plate 1021.
In this embodiment, by adding the shielding plate 1022 between the anode plate 1021 and the cathode plate 200 to be roughened, the shielding plate 1022 can shield the edge effect, thereby playing a role of shielding the edge current, further improving the uniformity of the roughening degree, improving the roughening quality, and having simple structure and lower manufacturing cost of the shielding plate 1022. In addition, since the anode plate 1021 and the shielding plate 1022 are attached, the current path of the anode plate 1021 can be consistent with the penetrating direction of the through hole 1023 on the shielding plate 1022, so that the extending direction of the roughening micro-pit finally formed on the cathode plate 200 to be roughened can be consistent with the penetrating direction of the through hole 1023, and the requirement of the extending direction of the micro-pit in different roughening is met.
It should be noted that, in the present embodiment, the cathode plate 200 to be roughened is a product to be roughened, such as a copper lead frame.
In this embodiment, the anode plate 1021 includes a first opposite electrode surface 1021a and a second opposite electrode surface 1021b, the shielding plate 1022 includes a first opposite shielding surface 1022a and a second opposite shielding surface 1022b, and the first electrode surface 1021a of the anode plate 1021 is in contact with the second shielding surface 1022b of the shielding plate 1022 along a direction.
With continued reference to fig. 2, in this embodiment, taking 2 anode roughening assemblies 102 as an example, namely a first anode roughening assembly 102a and a second anode roughening assembly 102b, the first anode roughening assembly 102a and the second anode roughening assembly 102b are arranged in parallel along the first direction X, and the first anode roughening assembly 102a and the second anode roughening assembly 102b have a distance D along the first direction X.
In this embodiment, the distance D is greater than the thickness of the cathode plate 200 to be roughened, so as to leave enough space for the cathode plate 200 to be roughened to move between the first anode roughening assembly 102a and the second anode roughening assembly 102 b.
In this embodiment, the area of the anode plate 1021 is smaller than the area of the shielding plate 1022, and the projection of the anode plate 1021 in the first direction X is located within the projection range of the shielding plate 1022 in the first direction X, so as to ensure the shielding effect of the shielding plate 1022 on the edge current.
Referring to fig. 4, in this embodiment, a penetrating angle is formed between the direction in which the through hole 1023 penetrates the shielding plate 1022 and the surface of the shielding plate 1022, and the penetrating angle ranges from: 45 degrees to 135 degrees (the morphology of the micropits extending direction is 45 degrees and 90 degrees respectively is shown in fig. 4).
In this embodiment, the shielding plate 1022 is an insulating plate.
In this embodiment, the shielding plate 1022 includes an edge area A1 and a central area A2, the edge area A1 surrounds the central area A2, and the plurality of through holes 1023 are located in the central area A2.
In this embodiment, the area of the anode plate 1021 is larger than the area of the central area A2, and the projection of the central area A2 toward the first direction X is located in the projection range of the anode plate 1021 toward the first direction X, so as to ensure that the morphology of the roughened area on the cathode plate 200 to be roughened is consistent with the morphology of the central area A2, and further, the morphology of the central area A2 can be adjusted, so as to ensure the requirements of the roughened area in different roughening.
In the present embodiment, the area of the central area A2 is 30% to 80% of the surface area of one side of the shielding plate 1022.
Although the present utility model is disclosed above, the present utility model is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the utility model, and the scope of the utility model should be assessed accordingly to that of the appended claims.

Claims (10)

1. A surface roughening apparatus, comprising:
An electrophoresis tank;
a chemical solution filled in the electrophoresis tank;
The anode coarsening assembly is arranged in the electrophoresis tank and is parallel to the first direction, the anode coarsening assembly is immersed in the chemical solution, and the anode coarsening assembly comprises:
An anode plate;
The shielding plate is connected with the anode plate in a fitting mode, the anode plate and the shielding plate are arranged in parallel along the first direction, the shielding plate is provided with a plurality of through holes, and the through holes expose the surface of the anode plate.
2. The surface roughening apparatus of claim 1 wherein the anode plate comprises opposing first and second plate faces, the shield plate comprises opposing first and second shield faces, and the first plate face of the anode plate is in abutting contact with the second shield face of the shield plate in a direction.
3. The surface roughening apparatus of claim 1 wherein the anode plate has an area smaller than an area of the shielding plate, and a projection of the anode plate toward the first direction is within a projection range of the shielding plate toward the first direction.
4. The surface roughening apparatus of claim 1 wherein a through angle is formed between a direction in which the through hole penetrates the shielding plate and the surface of the shielding plate, and the through angle is in a range of: 45 degrees to 135 degrees.
5. The surface roughening apparatus of claim 1 wherein the shield plate includes an edge region and a central region, the edge region surrounding the central region, the plurality of through holes being located in the central region.
6. The surface roughening apparatus of claim 5 wherein the anode plate has an area greater than an area of the central region and a projection of the central region toward the first direction is within a projection range of the anode plate toward the first direction.
7. The surface roughening apparatus of claim 5 wherein the area of the central region is 30% to 80% of the surface area of one side of the shield plate.
8. The surface roughening apparatus of claim 1 wherein the shield plate is an insulating plate.
9. The surface roughening apparatus of claim 1 wherein the plurality of anode roughening assemblies comprises: the first anode roughening assembly and the second anode roughening assembly are arranged in parallel along the first direction, and the first anode roughening assembly and the second anode roughening assembly have a distance along the first direction.
10. The surface roughening apparatus of claim 9 wherein the spacing is greater than the thickness of the cathode plate to be roughened.
CN202322440948.6U 2023-09-07 2023-09-07 Surface roughening device Active CN220867544U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202322440948.6U CN220867544U (en) 2023-09-07 2023-09-07 Surface roughening device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202322440948.6U CN220867544U (en) 2023-09-07 2023-09-07 Surface roughening device

Publications (1)

Publication Number Publication Date
CN220867544U true CN220867544U (en) 2024-04-30

Family

ID=90821087

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202322440948.6U Active CN220867544U (en) 2023-09-07 2023-09-07 Surface roughening device

Country Status (1)

Country Link
CN (1) CN220867544U (en)

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