KR20200008443A - Plasma electrolytic oxidation apparatus and method - Google Patents

Abstract

The present invention relates to a plasma electrolytic oxidation apparatus and a method thereof for uniformly coating the surface of an object such as a shower head in which micro holes are formed. The plasma electrolytic oxidation apparatus can include: a plurality of first electrode pins penetrating through one side of the micro holes, respectively so that a coating material can be anodized and coated on the inner surface of the micro holes formed in the object; and a first electrode plate disposed in front of the object, supporting one end of the first electrode pins, and electrically connecting the first electrode pins.

Description

Plasma electrolytic oxidation apparatus and method

The present invention relates to a plasma electrolytic oxidation apparatus and method, and more particularly, to a plasma electrolytic oxidation apparatus and method for uniformly coating the surface of the object formed with micro holes, such as a shower head.

In the process of manufacturing a semiconductor substrate or a display device, various substrate processing processes such as etching and film formation may be performed on an object such as a substrate in a vacuum environment.

For example, various types of plasma processing apparatuses such as a chamber or a shower head may be used to perform the substrate processing process using plasma.

In general, aluminum may be applied as a material of the plasma processing apparatus. At this time, during the plasma treatment process, the inner surface of the plasma processing apparatus is damaged by the action of plasma or a corrosive gas, which is likely to corrode.

Therefore, conventionally, the anodizing coating layer is formed on the surface of the aluminum plasma processing apparatus of such a plasma processing apparatus to improve corrosion resistance.

Conventional anodizing apparatus can be carried out by immersing the object in an electrolyte solution containing sulfuric acid or hydroxyl acid and forming an electric field.

As an anodizing technique for processing large substrates in accordance with the recent trend of larger substrates, such as substrates, as described in Japanese Patent Laid-Open No. 2000-26999, a rod-shaped body is formed along an inner surface of a cylindrical body (sleeve inserted into a cylinder block of an internal combustion engine). A method of inserting an electrode, using a cylindrical body as an anode, and using a rod-shaped electrode as a cathode to flow an electrolyte solution inside the cylindrical body to perform anodization treatment has been proposed.

However, these conventional anodic oxidation devices, such as the shower head, when the fine holes are formed in the object, the coating is not made enough in the inner diameter of the micro holes due to the abnormal discharge shape, severe corrosion or particle generation in the shower head There were many problems such as cause.

The idea of the present invention is to solve these problems, and has a plurality of electrode pins that can penetrate the micro-holes of the object, and provides a guide insulation member for aligning the positions so that these electrode pins can be spaced apart from the object The present invention provides a plasma electrolytic oxidation apparatus and method for enabling homogeneous anodic oxidation and stably forming a uniform and excellent coating layer by performing fine hole anodic oxidation and total anodic oxidation stepwise. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

Plasma electrolytic oxidation apparatus according to the spirit of the present invention for solving the above problems, a plurality of first to penetrate one side of each of the micro holes so that the coating material is anodized and coated on the inner surface of the micro holes formed in the object; Electrode pins; And a first electrode plate disposed in front of the object, supporting one end of the first electrode pins, and electrically connecting the first electrode pins.

In addition, according to the present invention, the object is a shower head in which a plurality of micro holes are formed to uniformly inject the process gas, the first electrode pin is inserted into the micro holes may be spaced apart from the micro holes. It may be a diameter smaller than the inner diameter of the micro-holes.

In addition, in the plasma electrolytic oxidation apparatus according to the present invention, the first electrode pin is guided to the correct position to align the position of the first electrode pin by using a guide inclined surface so as to be spaced apart from the micro holes, and the insulating material It may further include a guide insulating member made of.

In addition, the plasma electrolytic oxidation apparatus according to the present invention may further include a protective insulating member formed on the first electrode plate to prevent the object from being anodized by the first electrode plate.

In addition, the plasma electrolytic oxidation apparatus according to the present invention, disposed behind the object, is fastened to the other end of the first electrode pins, and further comprises a second electrode plate for electrically connecting the first electrode pins; can do.

In addition, according to the present invention, an accommodating groove portion may be formed in the second electrode plate to accommodate the other end of the first electrode pins.

In addition, the plasma electrolytic oxidation apparatus according to the present invention may penetrate the other side of the micro holes, respectively, so that a coating material may be anodized and coated on the inner surface of the micro holes formed in the object, and electrically connected to the first electrode pin. A plurality of second electrode pins that can be connected to; And a second electrode plate disposed behind the object, supporting one end of the second electrode pins, and electrically connecting the second electrode pins.

In addition, the plasma electrolytic oxidation apparatus according to the present invention may further include a third electrode plate or a fourth electrode plate which is installed in front or rear of the object is formed so as to anodize the front or rear of the object. have.

On the other hand, the plasma electrolytic oxidation method according to the idea of the present invention for solving the above problems, in the plasma electrolytic oxidation method of the object with the fine holes, the coating material is anodized and coated on the inner surface of the micro holes formed in the object A plurality of first electrode pins that may penetrate one side of the micro holes so as to respectively penetrate the micro holes; And a first electrode plate disposed in front of the object, supporting one end of the first electrode pins, and electrically connecting the first electrode pins to anodize the microholes. ; And a third electrode plate or a fourth electrode plate installed at the front or rear of the object so as to anodize the front or rear surface of the object after or before the microhole anodic oxidation step. Or an entire anodic oxidation step of anodizing the back surface as a whole.

According to some embodiments of the present invention made as described above, there is provided a guide insulating member having a plurality of electrode pins that can penetrate through the micro-holes of the object, and aligning positions such that the electrode pins can be spaced apart from the object By providing a homogeneous anodic oxidation, and by performing a step of fine hole anodic oxidation and total anodic oxidation step by step has the effect of forming a uniform and excellent coating layer of solid. Of course, the scope of the present invention is not limited by these effects.

1 is a schematic diagram schematically showing a plasma electrolytic oxidation apparatus according to some embodiments of the present invention.
2 is a schematic diagram schematically showing a plasma electrolytic oxidation apparatus according to some other embodiments of the present invention.
3 is an enlarged cross-sectional view illustrating an enlarged plasma electrolytic oxidation device of FIG. 2.
4 is an enlarged cross-sectional view illustrating a plasma electrolytic oxidation device in accordance with some other embodiments of the present invention.
FIG. 5 is an exploded perspective view showing a part of a plasma electrolytic oxidation apparatus according to still another embodiment of the present invention.
FIG. 6 is an exploded perspective view showing a part of a plasma electrolytic oxidation apparatus according to still another embodiment of the present invention.
7 is a schematic diagram illustrating a plasma electrolytic oxidation device according to some other embodiments of the present invention.
8 is a flowchart illustrating a plasma electrolytic oxidation method according to some embodiments of the present invention.
9 is a flow chart illustrating a plasma electrolytic oxidation method in accordance with some other embodiments of the present invention.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more fully explain the present invention to those skilled in the art, and the following examples can be modified in many different forms, and the scope of the present invention is as follows. It is not limited to an Example. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In addition, the thickness or size of each layer in the drawings are exaggerated for convenience and clarity of description.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" may include the plural forms as well, unless the context clearly indicates otherwise. Also, as used herein, "comprise" and / or "comprising" specify the shapes, numbers, steps, actions, members, elements and / or presence of these groups mentioned. It is not intended to exclude the presence or addition of one or more other shapes, numbers, operations, members, elements and / or groups.

Embodiments of the present invention will now be described with reference to the drawings, which schematically illustrate ideal embodiments of the present invention. In the drawings, for example, variations in the shape shown may be expected, depending on manufacturing techniques and / or tolerances. Accordingly, embodiments of the inventive concept should not be construed as limited to the specific shapes of the regions shown herein, but should include, for example, changes in shape resulting from manufacture.

Hereinafter, an apparatus and method for plasma electrolytic oxidation according to various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic diagram schematically showing a plasma electrolytic oxidation apparatus 100 according to some embodiments of the present invention.

First, as shown in FIG. 1, in the plasma electrolytic oxidation apparatus 100 according to some embodiments of the present invention, an object 1 is immersed in an electrolyte solution 3 contained in an electrolytic cell 2. The plasma electrolytic oxidizing apparatus 100 includes a plurality of plasma penetrating devices that may penetrate one side of the microholes 1a so that a coating material may be coated by anodizing the inner surface of the microholes 1a formed in the object 1. A first electrode plate disposed in front of the first electrode pin 10 and the object 1, supporting one end of the first electrode pins 10, and electrically connecting the first electrode pins 10 to each other; 20 may be included.

For example, the object 1 may be a plate-like or mesh-like structure similar to a shower head or a shower head in which a plurality of fine holes 1a are formed to uniformly inject process gas.

Here, the first electrode pin 10 is a thin wire-shaped electrode body that can be finely spaced so as not to contact the inner diameter of the fine hole (1a), the longitudinal direction so as to correspond to the shape of the fine hole (1a) It can be formed long.

In addition, the first electrode plate 20 is installed on one side such that the plurality of first electrode pins 10 correspond to the micro holes 1a, and is electrically connected to the plurality of first electrode pins 10. It may be a plate shape that can be connected to.

Thus, as shown in FIG. 1, when the operation process of the plasma electrolytic oxidation apparatus 100 according to some embodiments of the present invention is described, for example, the object 1 is an anode and the first electrode plate is described. The surface of the object 1, in particular, is agitated while the electrolytic solution 3 is agitated while the potential difference is generated using the 20 and the first electrode pins 10 as a cathode. In addition, a fine surface arc is generated in the inner diameter portion of the microhole 1a of the object 1 so that the oxide layer may be uniformly and firmly coated.

For example, the object 1 may be an aluminum plasma treatment shower head, and an anodized surface may be formed with an aluminum oxide layer to correspond to the plasma environment.

FIG. 2 is a schematic view schematically showing a plasma electrolytic oxidation apparatus 200 according to some other embodiments of the present invention, and FIG. 3 is an enlarged cross-sectional view showing an enlarged plasma electrolytic oxidation apparatus 200 of FIG.

For example, as shown in FIG. 2, the plasma electrolytic oxidation apparatus 200 according to some other embodiments of the present invention is disposed behind the object 1 and the other of the first electrode pins 10. A second electrode plate 30 coupled to the end and electrically connecting the first electrode pins 10 may be further included.

More specifically, for example, as shown in FIGS. 2 and 3, an accommodating groove portion H is formed in the second electrode plate 30 to accommodate the other end of the first electrode pins 10. Can be.

3, the inner diameter D2 of the microhole 1a may be inserted into the microhole 1a to be spaced apart from the microhole 1a. Smaller diameter D1.

For example, as illustrated in FIG. 3, in the plasma electrolytic oxidation apparatus 200 according to some other embodiments of the present invention, the first electrode pin 10 is guided to a proper position so that the microhole 1a is formed. Align the position of the first electrode pin 10 using a guide inclined surface (G) so as to be spaced apart from each other, and the guide insulating member 40 and the object 1 made of an insulating material are formed on the first electrode plate. A protective insulating member 50 formed on the first electrode plate 20 may be further included to prevent anodization by 20.

Therefore, when the first electrode pin 10 is inserted into the fine hole 1a, the guide inclined surface G of the guide insulation member 40 positions the position of the first electrode pin 10 in the correct position. Can be sorted by

That is, the first electrode pin 10 is preferably located in the center of the fine hole 1a. As shown in FIG. 3, one end of the first electrode pin 10 is disposed in the guide insulating member ( The guide inclined surface (G) of 40 is guided to the home position, the other end of the first electrode pin 10 is inserted into the receiving groove (H) of the second electrode plate 30 to the home position Can be guided.

Here, it is preferable that the receiving groove portion H also has an inclined surface so that the other end of the first electrode pin 10 can be inclined guided in position.

At this time, anodization may be somewhat insufficient at the inlet of the fine hole 1a by the guide insulation member 40, but it may be firmly reinforced by the second anodization process to be described later. have.

In addition, the protective insulating member 50 may be used to prevent anodization of the remaining portion except for the inner diameter surface of the microhole 1a. Therefore, it is possible to prevent the anodizing oxide layer of the remaining portions except for the inner diameter surface of the fine hole 1a from becoming too large, and to induce the anodization to concentrate on the weak inner diameter surface portion of the fine hole 1a.

Therefore, the plurality of electrode pins 10 may penetrate the micro holes 1a of the object 1, and the electrode pins 10 may be positioned to be spaced apart from the object 1. By providing a guide insulating member 40 for aligning the homogeneous anodic oxidation, and fine hole anodic oxidation and total anodic oxidation can be performed step by step two times to form a uniform and excellent coating layer firmly have.

4 is an enlarged cross-sectional view illustrating an enlarged plasma electrolytic oxidation apparatus 300 according to some other embodiments of the present invention.

As illustrated in FIG. 4, the plasma electrolytic oxidation apparatus 300 according to some other embodiments of the present invention may correspond to the first electrode pin 10 and the first electrode plate 20 described above. It is possible to penetrate the other side of the micro holes (1a) so that the coating material is anodized on the inner surface of the micro holes (1a) formed in the object 1 so as to be coated, and the first electrode pin (10) And a plurality of second electrode pins 60, which may be electrically connected to each other, and are disposed behind the object 1, support one end of the second electrode pins 60, and the second electrode pins 60. It may further include a second electrode plate 70 for electrically connecting them.

Therefore, as shown in FIG. 4, one end of the first electrode pin 10 is guided in position by the guide inclined surface G of the guide insulation member 40, and the first electrode pin 10 The other end of the) is engaged with the second electrode pin 60, one end of the second electrode pin 60 is guided in position by the guide inclined surface (G) of the guide insulating member 40 The other end of the second electrode pin 60 may be engaged with the first electrode pin 10.

Here, the engagement portion of the first electrode pin 10 and the second electrode pin 60 is also formed with an inclined surface to guide the first electrode pin 10 and the second electrode pin 60 to the inclined position. It is desirable to be able to.

5 is an exploded perspective view of a part of a plasma electrolytic oxidation apparatus 400 according to some other embodiments of the present invention, and FIG. 6 is a plasma electrolytic oxidation apparatus 500 according to some other embodiments of the present invention. It is an exploded perspective view of parts shown.

5 and 6, in the plasma electrolytic oxidation apparatus 400 according to some other embodiments of the present disclosure, when the shape of the object 1 is a disc shape, the first electrode plate may be adjusted accordingly. 20 and the second electrode plate 30 may also have a disk shape, and the plasma electrolytic oxidation apparatus 500 according to some other embodiments of the present invention may have a rectangular plate shape. In this case, the first electrode plate 20 and the second electrode plate 30 may also have a rectangular plate shape according to this.

However, the shapes of the first electrode plate 20 and the second electrode plate 30 may be formed in various ways according to the shape of the object 1, and are not necessarily limited to the drawings.

7 is a schematic diagram illustrating a plasma electrolytic oxidation apparatus 600 in accordance with some other embodiments of the present invention.

As illustrated in FIG. 7, the plasma electrolytic oxidation apparatus 600 according to some other embodiments of the present invention includes the object 1 formed to anodize the front or rear surface of the object 1. It may further include a third electrode plate 80 or the fourth electrode plate 90 is installed in the front or rear of the object formed in a shape corresponding to the front or rear of the object (1).

Accordingly, the third electrode plate 80 and the fourth electrode plate 90 may be used to perform anodization on the remaining portions of the object 1 except for the fine holes 1a.

Therefore, the fine hole anodic oxidation process and the entire anodic oxidation process may be performed step by step in order to form a uniform and excellent coating layer firmly.

8 is a flowchart illustrating a plasma electrolytic oxidation method according to some embodiments of the present invention.

1 to 8, in the plasma electrolytic oxidation method according to some embodiments of the present invention, in the plasma electrolytic oxidation method of the object 1 in which the microholes 1a are formed, the object 1 is formed. A plurality of first electrode pins 10 and the object 1 which may penetrate one side of the micro holes 1a, respectively, so that a coating material may be anodized and coated on the inner surface of the micro holes 1 a formed in the first hole. The micro holes 1a are disposed in front of the first electrode pins and support one ends of the first electrode pins 10 and electrically connect the first electrode pins 10 to each other. Fine hole anodic oxidation step (S1) for anodizing; And a third electrode plate 80 or fourth installed at the front or rear of the object 1 so as to anodize the front or rear surface of the object 1 after the fine hole anodization step S1. It may include; a total anodizing step (S2) for anodizing the front or rear of the object (1) using the electrode plate (90) as a whole.

9 is a flow chart illustrating a plasma electrolytic oxidation method in accordance with some other embodiments of the present invention.

1 to 9, in the plasma electrolytic oxidation method according to some embodiments of the present invention, in the plasma electrolytic oxidation method of the object 1 in which the fine holes 1a are formed, the object 1 A plurality of first electrode pins 10 and the object 1 which may penetrate one side of the micro holes 1a, respectively, so that a coating material may be anodized and coated on the inner surface of the micro holes 1 a formed in the first hole. The micro holes 1a are disposed in front of the first electrode pins and support one ends of the first electrode pins 10 and electrically connect the first electrode pins 10 to each other. Fine hole anodic oxidation step (S1) for anodizing; And a third electrode plate 80 or fourth installed at the front or rear of the object 1 so as to anodize the front or rear surface of the object 1 before the fine hole anodic oxidation step S1. It may include; a total anodizing step (S2) for anodizing the front or rear of the object (1) using the electrode plate (90) as a whole.

Although the present invention has been described with reference to the embodiments shown in the drawings, these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

1: object
1a: micro holes
2: electrolyzer
3: electrolyte
10: first electrode pin
20: first electrode plate
G: Guide Slope
30, 70: second electrode plate
40: guide insulation member
50: protective insulation member
60: second electrode pin
80: third electrode plate
90: fourth electrode plate
100: plasma electrolytic oxidation apparatus

Claims (9)

A plurality of first electrode pins respectively penetrating through one side of the micro holes so that a coating material may be anodized and coated on an inner surface of the micro holes formed in an object; And
A first electrode plate disposed in front of the object, supporting one end of the first electrode pins, and electrically connecting the first electrode pins;
Including, plasma electrolytic oxidation apparatus. The method of claim 1,
The object is a shower head in which a plurality of fine holes are formed to uniformly inject the process gas,
The first electrode pin has a diameter smaller than the inner diameter of the micro holes so that the first electrode pin is inserted into the micro holes to be spaced apart from the micro holes. The method of claim 2,
A guide insulating member made of an insulating material to align the position of the first electrode pin using a guide inclined surface such that the first electrode pin is guided to a predetermined position and spaced apart from the microhole;
Further comprising, plasma electrolytic oxidation apparatus. The method of claim 3, wherein
A protective insulating member formed on the first electrode plate to prevent the object from being anodized by the first electrode plate;
Further comprising, plasma electrolytic oxidation apparatus. The method of claim 1,
A second electrode plate disposed at the rear of the object, fastened to the other ends of the first electrode pins, and electrically connecting the first electrode pins;
Further comprising, plasma electrolytic oxidation apparatus. The method of claim 5, wherein
Plasma electrolytic oxidation apparatus is formed in the second electrode plate, the receiving groove which can accommodate the other end of the first electrode pins. The method of claim 5, wherein
A plurality of second electrode pins penetrating the other sides of the micro holes and electrically connected to the first electrode pins so that a coating material may be coated by anodizing the inner surface of the micro holes formed in the object; And
A second electrode plate disposed at the rear of the object, supporting one end of the second electrode pins, and electrically connecting the second electrode pins;
Further comprising, plasma electrolytic oxidation apparatus. The method of claim 1,
A third electrode plate or a fourth electrode plate provided at the front or the rear of the object, which is formed to anodize the front or rear surface of the object;
Plasma electrolytic oxidation apparatus further comprising. In the plasma electrolytic oxidation method of the object with the fine holes formed,
A plurality of first electrode pins respectively penetrating through one side of the micro holes so that a coating material may be anodized and coated on an inner surface of the micro holes formed in the object; And a first electrode plate disposed in front of the object, supporting one end of the first electrode pins, and electrically connecting the first electrode pins to anodize the microholes. ; And
After or before the microhole anodic oxidation step,
A total anodizing step of anodizing the front or rear of the object as a whole using; a third electrode plate or a fourth electrode plate installed at the front or rear of the object so as to anodize the front or rear of the object;
Including, plasma electrolytic oxidation method.

Images