CN220846265U - Air inlet cavity and film plating equipment - Google Patents
Air inlet cavity and film plating equipment Download PDFInfo
- Publication number
- CN220846265U CN220846265U CN202322438031.2U CN202322438031U CN220846265U CN 220846265 U CN220846265 U CN 220846265U CN 202322438031 U CN202322438031 U CN 202322438031U CN 220846265 U CN220846265 U CN 220846265U
- Authority
- CN
- China
- Prior art keywords
- dispersing
- air inlet
- ring
- cavity
- reaction cavity
- Prior art date
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- 238000007747 plating Methods 0.000 title description 4
- 239000006185 dispersion Substances 0.000 claims abstract description 35
- 239000011248 coating agent Substances 0.000 claims abstract description 15
- 238000000576 coating method Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 abstract description 55
- 239000007789 gas Substances 0.000 abstract description 42
- 239000011261 inert gas Substances 0.000 abstract description 34
- 238000007789 sealing Methods 0.000 description 11
- 230000009286 beneficial effect Effects 0.000 description 7
- 230000008021 deposition Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
The utility model discloses an air inlet cavity and coating equipment, wherein the air inlet cavity comprises: the shell and the dispersion ring are provided with a reaction cavity with an upward opening, and the outer wall of the shell is provided with an air inlet communicated with the reaction cavity; the dispersing ring is arranged in the reaction cavity, a dispersing channel communicated with the air inlet is arranged between the dispersing ring and the shell, a plurality of dispersing channels communicated with the dispersing channel and dispersing holes of the reaction cavity are arranged at equal intervals in the circumferential direction of the dispersing ring, and the inert gas flows into the reaction cavity after entering through the air inlet and flowing to the dispersing holes along the dispersing channels, so that the inert gas has good fluidity; the dispersing holes on the dispersing ring are circumferentially arranged at intervals, inert gas flowing out of the dispersing holes can uniformly and rapidly fill the reaction cavity, and when the inert gas flows out, an annular gas curtain facing the center of the reaction cavity can be formed, so that the stability of the gas curtain is good, and process gas can be better blocked above the gas curtain.
Description
Technical Field
The utility model relates to the technical field of coating equipment manufacturing, in particular to an air inlet cavity and coating equipment.
Background
When the process table of the coating equipment is positioned in the reaction cavity and is used for carrying out process processing, process gas needs to be injected into the reaction cavity to carry out deposition coating, in the process of injecting the process gas, the process gas enters from the upper part of the reaction cavity so as to facilitate the process gas to be in contact with a substrate on the process table, inert gas enters from the lower part of the reaction cavity so as to prevent the process gas from entering into the lower part of the process table, and the pollution of the process gas to the process table and other parts below the process table is reduced.
Disclosure of utility model
The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides the air inlet cavity which can better block the process gas above, and is beneficial to reducing the pollution of the process gas to the process table and other parts below the process table.
In a second aspect, the utility model further provides coating equipment applying the air inlet cavity.
According to an embodiment of the first aspect of the present utility model, there is provided an air intake chamber, including: the device comprises a shell and a dispersion ring, wherein the shell is provided with a reaction cavity with an upward opening, and the outer wall of the shell is provided with an air inlet communicated with the reaction cavity; the dispersing ring is arranged in the reaction cavity, a dispersing channel communicated with the air inlet hole is arranged between the dispersing ring and the shell, and a plurality of dispersing holes communicated with the dispersing channel and the reaction cavity are formed in the circumference of the dispersing ring at equal intervals.
The air inlet cavity provided by the embodiment of the first aspect of the utility model has at least the following beneficial effects: during operation, inert gas enters the dispersing channel through the air inlet hole and is dispersed preliminarily, then the inert gas flows into the reaction cavity after flowing to the dispersing hole along the dispersing channel, and the overall fluidity of the inert gas is good; as the dispersing holes on the dispersing ring are circumferentially arranged at intervals, the inert gas flowing out of the dispersing holes can uniformly and quickly fill the reaction cavity, and when the inert gas flows out, an annular gas curtain facing the center of the reaction cavity can be formed, so that the stability of the gas curtain is better, the process gas can be better blocked from the upper part, and the pollution of the process gas to the process table and other parts below the process table can be reduced.
According to the air inlet cavity provided by the embodiment of the first aspect of the utility model, a detachable dispersing piece is arranged between the dispersing ring and the shell, and the dispersing channel is positioned in the middle of the dispersing piece.
According to the air inlet cavity provided by the embodiment of the first aspect of the utility model, the dispersing piece comprises an upper inner sleeve and a lower inner sleeve, the upper inner sleeve is connected with the lower inner sleeve, and the dispersing channel is positioned between the upper inner sleeve and the lower inner sleeve.
According to the air inlet cavity provided by the embodiment of the first aspect of the utility model, the dispersion holes are horn-shaped.
According to the air inlet cavity provided by the embodiment of the first aspect of the utility model, the sealing ring is arranged between the shell and the dispersion ring.
According to the air inlet cavity provided by the embodiment of the first aspect of the utility model, the end face of the shell is provided with the sealing groove, and the sealing ring is arranged on the sealing groove.
According to the air inlet cavity provided by the embodiment of the first aspect of the utility model, the end face of the shell is provided with the shielding coil.
According to the air inlet cavity provided by the embodiment of the first aspect of the utility model, the end face of the shell is provided with the shielding groove, and the shielding coil is arranged in the shielding groove.
According to the air inlet cavity provided by the embodiment of the first aspect of the utility model, the outer wall of the shell is circumferentially provided with a plurality of air inlets at equal intervals.
According to a second aspect of the utility model, a coating device is provided, which comprises an air inlet cavity according to the first aspect of the utility model.
According to the coating equipment provided by the embodiment of the second aspect of the utility model, the coating equipment has at least the following beneficial effects: when the coating equipment operates, inert gas enters the dispersing channel through the air inlet hole and is dispersed preliminarily, then the inert gas flows into the reaction cavity after flowing to the dispersing hole along the dispersing channel, and the overall fluidity of the inert gas is good; as the dispersing holes on the dispersing ring are circumferentially arranged at intervals, the inert gas flowing out of the dispersing holes can uniformly and quickly fill the reaction cavity, and when the inert gas flows out, an annular gas curtain facing the center of the reaction cavity can be formed, so that the stability of the gas curtain is better, the process gas can be better blocked from the upper part, and the pollution of the process gas to the process table and other parts below the process table can be reduced.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
Additional aspects and advantages of the present utility model will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:
Fig. 1 is an overall schematic view of an air intake cavity according to an embodiment of the first aspect of the present utility model;
FIG. 2 is a cross-sectional view of an air intake cavity provided in an embodiment of the first aspect of the present utility model;
FIG. 3 is a cross-sectional view of an air intake cavity provided by other embodiments of the first aspect of the present utility model;
FIG. 4 is an enlarged schematic view of FIG. 3 at A
FIG. 5 is a cross-sectional view of an air intake cavity provided by other embodiments of the first aspect of the present utility model;
FIG. 6 is a cross-sectional view of an air intake cavity provided by other embodiments of the first aspect of the present utility model;
Fig. 7 is a cross-sectional view of an air intake cavity provided by further embodiments of the first aspect of the present utility model.
The reference numerals are as follows:
A housing 100; a reaction chamber 110; an air intake hole 120; a dispersion ring 200; dispersion holes 210; dispersion channel 300; a dispersing member 400; an upper inner sleeve 410; a lower inner sleeve 420; a seal ring 500; shielding coil 600.
Detailed Description
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.
In the description of the present utility model, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present utility model and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.
In the description of the present utility model, the description of the first and second is only for the purpose of distinguishing technical features, and should not be construed as indicating or implying relative importance or implying the number of technical features indicated or the precedence of the technical features indicated.
In the description of the present utility model, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present utility model can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.
When the process table of the coating equipment is positioned in the reaction cavity and is used for carrying out process processing, process gas needs to be injected into the reaction cavity to carry out deposition coating, in the process of injecting the process gas, the process gas enters from the upper part of the reaction cavity so as to enable the process gas to be in contact with a substrate on the process table, inert gas enters from the lower part of the reaction cavity to block the process gas from entering into the lower part of the process table, so that the pollution of the process gas to the process table and other parts below the process table is reduced, in the related art, the space of the lower part of the process table is larger, when the inert gas enters from the lower part of the cavity, the inert gas needs a certain time to be filled, the flowing power of the inert gas which enters firstly is correspondingly reduced, and the inert gas cannot be uniformly diffused to the lower part of the process table, so that the gas density of the lower part area of the process table is uneven, and the process gas cannot be effectively blocked.
In order to solve the problem, an embodiment of the first aspect of the present utility model provides an air intake cavity, which can better block the process gas above, and is beneficial to reducing the pollution of the process gas to the process table and other components below the process table.
Referring to fig. 1 and 2, an air intake cavity provided according to an embodiment of a first aspect of the present utility model includes: the device comprises a shell 100 and a dispersion ring 200, wherein a reaction cavity 110 with an upward opening is formed in the middle of the shell 100, and an air inlet hole 120 communicated with the reaction cavity 110 is formed in the outer wall of the shell 100; the dispersion ring 200 is disposed in the reaction chamber 110, an annular dispersion channel 300 communicating with the air inlet 120 is disposed between the dispersion ring 200 and the housing 100, and a plurality of dispersion holes 210 communicating with the dispersion channel 300 and the reaction chamber 110 are circumferentially disposed on the dispersion ring 200.
According to the gas inlet cavity provided by the embodiment of the first aspect of the present utility model, during operation, inert gas enters the dispersion channel 300 through the gas inlet holes 120 and is primarily dispersed, then the inert gas flows into the reaction cavity 110 after flowing to each dispersion hole 210 in the circumferential direction of the dispersion ring 200 along the dispersion channel 300, and the overall fluidity of the inert gas is good; because the dispersing holes 210 on the dispersing ring 200 are circumferentially spaced, the inert gas flowing out from the dispersing holes 210 can uniformly and rapidly fill the reaction chamber 110, and when the inert gas flows out, an annular gas curtain facing the center of the reaction chamber 110 is formed, so that the gas curtain has better stability, can better block the process gas above, and is beneficial to reducing the pollution of the process gas to the process table and other components below the process table.
It should be noted that, the housing 100 may be annular, square, etc., and the shape of the housing 100 may be changed according to actual requirements during the production process; the number and the aperture of the air intake holes 120 and the dispersion holes 210 may be set according to actual needs.
Referring to fig. 1, 3 and 4, according to the air inlet cavity provided in the first aspect of the present utility model, a detachable dispersing member 400 is provided between the dispersing ring 200 and the housing 100, the dispersing channel 300 is located in the middle of the dispersing member 400, when the dispersing member 300 needs to be cleaned, the dispersing member 400 can be detached integrally, so that the dispersing member 300 can be cleaned, and further maintenance is facilitated, and when the dispersing member 400 is damaged or aged, the dispersing member 400 can be detached and replaced.
It should be noted that, the dispersing member 400 may be pressed by the cooperation between the dispersing ring 200 and the housing 100; the material of the dispersing member 400 may be metal, ceramic, etc., and may be replaced according to actual needs.
It should be noted that, the dispersing member 400 is directly disposed at the air outlet end of the air inlet hole 120, and referring to fig. 2, the dispersing member 400 may be integrally formed with the housing 100; the dispersion channel 300 may be a ring-shaped member, or may be formed integrally with the housing 100.
Referring to fig. 1, 3 and 4, according to the air inlet cavity provided in the first aspect of the present utility model, the dispersing member 400 includes an upper inner sleeve 410 and a lower inner sleeve 420, the upper inner sleeve 410 is connected with the lower inner sleeve 420, the dispersing channel is disposed between the lower side of the upper inner sleeve 410 and the upper side of the lower inner sleeve 420, and the space of the entire dispersing channel 300 is smaller, which is advantageous for reducing the time for filling the dispersing channel 300 with inert gas.
It should be noted that, referring to fig. 5, the lower inner sleeve 420 of the dispersing member 400 may be integrally formed with the housing 100, and the upper inner sleeve 410 may be detachably connected to the housing 100, so as to facilitate detachment and cleaning.
Referring to fig. 6, the upper inner sleeve 410 and the lower inner sleeve 420 of the dispersing member 400 may be integrally formed with the housing 100, and the dispersing ring 200 may be clamped on the lower inner sleeve 420.
It should be noted that, referring to fig. 7, the lower inner sleeve 420 of the dispersing member 400 may be integrally formed with the housing 100, and the dispersing ring 200 is clamped on the lower inner sleeve 420.
Referring to fig. 4, in the gas inlet cavity provided in the first embodiment of the present utility model, along the direction of the dispersion channel 300 toward the reaction chamber 110, the inner diameter of the dispersion holes 210 increases, and the dispersion holes 210 are overall horn-shaped, so that the inert gas passing through the dispersion holes 210 can be uniformly diffused, thereby better forming a gas curtain and filling the reaction chamber 110 with the inert gas.
Referring to fig. 1, according to the air inlet cavity provided by the embodiment of the first aspect of the present utility model, a sealing ring 500 is disposed between the housing 100 and the dispersion ring 200, and when the air inlet cavity is applied to a film plating apparatus, the sealing ring 500 on the housing 100 can effectively ensure the sealing between the air inlet cavity and an adjacent component. Referring to fig. 1, according to the air intake cavity provided by the embodiment of the first aspect of the present utility model, the upper end surface of the housing 100 is provided with a sealing groove, the sealing ring 500 is mounted on the sealing groove, and the fixing manner of the sealing ring 500 is stable and reliable.
Referring to fig. 1, 3 and 4, according to the air inlet cavity provided in the embodiment of the first aspect of the present utility model, the end surface of the housing 100 is provided with the shielding coil 600, and when the air inlet cavity is applied to a film plating apparatus, the shielding coil 600 on the housing 100 can effectively prevent substances in the reaction cavity 110 from leaking.
Referring to fig. 4, according to the air intake cavity provided by the embodiment of the first aspect of the present utility model, the end surface of the housing 100 is provided with a shielding groove, the shielding coil 600 is mounted in the shielding groove, and the fixing manner of the shielding coil 600 is stable and reliable.
Referring to fig. 1 to 3, according to the air intake cavity provided in the first aspect of the present utility model, a plurality of air intake holes 120 are circumferentially arranged on the outer wall of the housing 100 at intervals, and the plurality of air intake holes 120 can intake air simultaneously, which is beneficial to improving air intake efficiency and reducing filling time of inert gas.
According to a second aspect of the utility model, the coating equipment comprises the air inlet cavity according to the first aspect of the utility model.
According to the coating apparatus provided by the second embodiment of the present utility model, during operation, inert gas enters the dispersion channel 300 through the air inlet 120 and is dispersed primarily, and then the inert gas flows into the reaction chamber 110 after flowing along the dispersion channel 300 to the dispersion hole 210, so that the overall fluidity of the inert gas is good; because the dispersing holes 210 on the dispersing ring 200 are circumferentially spaced, the inert gas flowing out from the dispersing holes 210 can uniformly and rapidly fill the reaction chamber 110, and when the inert gas flows out, an annular gas curtain facing the center of the reaction chamber 110 is formed, so that the gas curtain has better stability, can better block the process gas above, and is beneficial to reducing the pollution of the process gas to the process table and other components below the process table.
The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings, and the embodiments are only for illustrating the technical scheme of the present utility model, but not for limiting the same, and the present utility model is not limited to the embodiments, and various changes can be made without departing from the spirit of the present utility model within the knowledge of those skilled in the art.
Claims (10)
1. An intake cavity, comprising:
The shell is provided with a reaction cavity with an upward opening, and the outer wall of the shell is provided with an air inlet communicated with the reaction cavity;
The dispersing ring is arranged in the reaction cavity, a dispersing channel communicated with the air inlet hole is arranged between the dispersing ring and the shell, and a plurality of dispersing holes communicated with the dispersing channel and the reaction cavity are formed in the circumference of the dispersing ring at equal intervals.
2. The air intake chamber of claim 1, wherein a removable dispersion member is disposed between the dispersion ring and the housing, the dispersion channel being located in a middle portion of the dispersion member.
3. The intake chamber of claim 2, wherein the dispersion member comprises an upper inner sleeve and a lower inner sleeve, the upper inner sleeve being coupled to the lower inner sleeve, the dispersion channel being located between the upper inner sleeve and the lower inner sleeve.
4. The intake chamber of claim 1, wherein the dispersion holes are flared.
5. The intake chamber of claim 1, wherein an upper end surface of the housing is provided with a seal ring.
6. The intake chamber of claim 5, wherein an end face of the housing is provided with a seal groove, and the seal ring is mounted to the seal groove.
7. The intake cavity of claim 1, wherein an end face of the housing is provided with a shield coil.
8. The intake chamber of claim 7, wherein an end face of the housing is provided with a shield groove, the shield coil being mounted to the shield groove.
9. The air inlet cavity according to claim 8, wherein a plurality of the air inlet holes are circumferentially equally spaced in the outer wall of the housing.
10. A coating apparatus comprising an air inlet chamber according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322438031.2U CN220846265U (en) | 2023-09-07 | 2023-09-07 | Air inlet cavity and film plating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322438031.2U CN220846265U (en) | 2023-09-07 | 2023-09-07 | Air inlet cavity and film plating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220846265U true CN220846265U (en) | 2024-04-26 |
Family
ID=90739704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322438031.2U Active CN220846265U (en) | 2023-09-07 | 2023-09-07 | Air inlet cavity and film plating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220846265U (en) |
-
2023
- 2023-09-07 CN CN202322438031.2U patent/CN220846265U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |