CN220772111U - Directional level detects frock - Google Patents

Abstract

The application discloses directional horizontal detection tool relates to the technical field of semiconductor detection and comprises a tool main body, an abutting piece and a measuring instrument; the bottom surface of the abutting piece is an abutting plane which can be contacted with one end surface of the crystal bar to be tested; a connecting piece is fixed on the abutting piece; the abutting piece is connected with the tool main body in a swinging manner through the connecting piece and can be adjusted in height along the vertical direction; the measuring instrument is arranged on the tool main body and connected with the abutting piece and is used for obtaining the parallelism error of the upper end face and the lower end face of the crystal bar to be measured by detecting the swing angle of the abutting piece. The detection tool is simple to operate, high in measurement speed and capable of obtaining detection results faster and more conveniently. The technical problem that the subsequent process operation is complicated due to the fact that parallelism of the upper end face and the lower end face cannot be detected after the existing crystal bar is oriented is effectively solved.

Description

Directional level detects frock

Technical Field

The application relates to the technical field of semiconductor detection, in particular to a directional level detection tool for detecting the levelness of upper and lower end faces of a semiconductor crystal bar.

Background

The ingot orientation is the coordinate system selected on the crystal. In plane geometry, the position of a point on a plane is determined, or the orientation of a certain straight line on a plane is determined, only two coordinate axes orthogonal to each other are selected on the plane, and the length unit on the coordinate axes is determined. The oriented crystals are influenced by angles and growth factors to obtain an inclined cylinder or a cylinder crystal bar; the next process bonding needs to have very high requirements on the upper end face and the lower end face of the crystal bar (the situation that the upper end face and the lower end face are oriented due to angle errors is approximately understood to be that the upper end face and the lower end face are in parallel state under ideal conditions), but the requirements are not met in many cases, and often, the upper end face and the lower end face have parallel errors (in non-parallel condition), and influence factors are X-ray machine measurement errors, orientation equipment errors and the like, so that errors are increased, and the processed crystal bar does not meet the requirements.

After the alignment at the present stage, the parallelism of the upper end face and the lower end face of the crystal bar cannot be detected, the correction is often carried out in the bonding process, inconvenience is brought to the subsequent process, the excessive error of the parallelism of the upper end face and the lower end face can lead to incapability of bonding, and the parallelism of the upper end face and the lower end face needs to be re-aligned after glue withdrawal.

Disclosure of Invention

In view of this, the purpose of this application is to provide a directional horizontal detection frock to solve current crystal bar orientation and probably lead to the technical problem of follow-up procedure complex operation because of unable detection upper and lower terminal surface parallelism.

In order to achieve the technical purpose, the application provides an orientation level detection tool, which comprises a tool main body, an abutting piece and a measuring instrument;

the bottom surface of the abutting piece is an abutting plane which can be contacted with one end surface of the crystal bar to be tested;

a connecting piece is fixed on the abutting piece;

the abutting piece is connected with the tool main body in a swinging manner through the connecting piece and can be adjusted in height along the vertical direction;

the measuring instrument is arranged on the tool main body and connected with the abutting piece, and is used for obtaining parallelism errors of the upper end face and the lower end face of the crystal bar to be measured by detecting the swing angle of the abutting piece.

Further, the abutting piece is of a straight plate structure.

Further, one end of the connecting piece is fixedly connected with the abutting piece, and the other end of the connecting piece is provided with a matching part;

a guide rail piece is arranged on the tool main body along the vertical direction;

the matching part is slidably mounted on the guide rail piece and can be rotatably arranged so that the abutting piece can swing.

Further, the connecting piece is of an L-shaped rod structure.

Further, the device also comprises a locking piece;

the locking piece is used for locking the connecting piece and the tool main body together so as to lock the abutting piece.

Further, a guide rail groove is formed in the guide rail piece;

the matching part is slidably arranged in the guide rail groove;

a communicating groove penetrating through the outside is formed in the inner side wall of the guide rail groove along the vertical direction;

the locking piece comprises a head and a threaded rod part connected with the head;

the threaded rod part movably passes through the communication groove and is in sliding fit with the communication groove;

the matching part is provided with a threaded hole for the threaded rod part to be inserted into and matched with the threaded rod part in a threaded way;

the head and the matching part can form clamping and fixing for the guide rail piece.

Further, the locking piece is one of a screw, a bolt and a screw.

Further, the measuring instrument is a pointer instrument;

the pointer instrument comprises a dial and a pointer member;

the pointer member is mounted on the dial, connected with the connecting member or the abutting member, and swings along with the abutting member.

Further, the scale areas on the dial are partitioned according to the preset area range and are distinguished by different colors.

Further, the tool main body comprises a base and a vertical plate;

the vertical plate is vertically arranged on the base;

the abutting piece and the measuring instrument are mounted on the vertical plate.

According to the technical scheme, the directional horizontal detection tool designed by the application is used, when the directional horizontal detection tool is used, the crystal bar to be detected is placed on the detection station of the tool main body, the height of the abutting piece is adjusted to enable the abutting plane of the abutting piece to be in contact with the upper end face of the crystal bar to be detected on the detection station, under the action of gravity of the abutting piece, after the abutting plane is in contact with the upper end face of the crystal bar to be detected, the abutting piece can be in a state of corresponding swing angle according to the parallelism condition of the upper end, and the measuring instrument can obtain the parallelism errors of the upper end face and the lower end face of the crystal bar to be detected by detecting the swing angle of the abutting piece. The detection tool is simple to operate, high in measurement speed and capable of obtaining detection results faster and more conveniently. The technical problem that the subsequent process operation is complicated due to the fact that parallelism of the upper end face and the lower end face cannot be detected after the existing crystal bar is oriented is effectively solved.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive faculty for a person skilled in the art.

Fig. 1 is a perspective view of an orientation level detection tool provided in the present application;

FIG. 2 is a schematic diagram of a measurement direction and a cutting direction of a crystal bar of the directional horizontal detection tool provided in the present application;

in the figure: 1. a tool main body; 11. a base; 12. a vertical plate; 2. an abutment; 3. a connecting piece; 31. a mating portion; 4. a locking member; 5. a guide rail member; 51. a guide rail groove; 6. a measuring instrument; 61. a dial; 62. a pointer member; 71. a first measurement direction; 72. a second measurement direction; 73. cutting direction.

Detailed Description

The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the embodiments of the present application, are within the scope of the embodiments of the present application.

In the description of the embodiments of the present application, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are based on directions or positional relationships shown in the drawings, are merely for convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific direction, be configured and operated in the specific direction, and thus should not be construed as limiting the embodiments of the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the embodiments of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, interchangeably connected, integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected through an intermediary, or in communication between two elements. The specific meaning of the terms in the embodiments of the present application will be understood by those of ordinary skill in the art in a specific context.

The embodiment of the application discloses directional level detection frock.

Referring to fig. 1 and fig. 2, an embodiment of an orientation level detection tool provided in an embodiment of the present application includes:

tool body 1, abutment 2 and measuring instrument 6.

The bottom surface of the abutting piece 2 is an abutting plane which can be contacted with one end surface of the crystal bar to be tested; the abutting piece 2 is fixedly provided with a connecting piece 3; the abutting piece 2 is connected with the tool main body 1 in a swinging manner and with an adjustable height along the vertical direction through the connecting piece 3. The sliding arrangement of the abutting piece 2 can be suitable for crystal bar measurement with a certain length range, and the applicability is better. The abutting piece 2 swings in the vertical direction.

The measuring instrument 6 is installed on the tool main body 1 and is connected with the abutting piece 2, and is used for obtaining the parallelism error of the upper end face and the lower end face of the crystal bar to be measured by detecting the swing angle of the abutting piece 2.

The directional level that this application designed detects frock, during the use, place the crystal bar that awaits measuring on the detection station of frock main part 1, the height of readjustment butt piece 2 is so that the butt plane of butt piece 2 and the up end contact of the crystal bar that awaits measuring on the detection station, under the gravity effect of butt piece 2 self, after the up end contact of butt plane and crystal bar that awaits measuring, the parallelism error of the up and down terminal surfaces of crystal bar that awaits measuring can be obtained to measuring instrument 6 through detecting the swing angle of butt piece 2 according to the state that parallelism condition butt piece 2 can be in corresponding swing angle of upper end. The detection tool is simple to operate, high in measurement speed and capable of obtaining detection results faster and more conveniently. The technical problem that the subsequent process operation is complicated due to the fact that parallelism of the upper end face and the lower end face cannot be detected after the existing crystal bar is oriented is effectively solved.

In the measurement of the detection tool according to the present application, as shown in fig. 2, the cutting direction 73 of the ingot needs to be considered, one end surface/the other end surface of the ingot is measured from two directions, the first measuring direction 71 is parallel to the cutting direction 73, and the second measuring direction 72 is perpendicular to the cutting direction 73. Taking the first measurement direction 71 as an example, when placing the ingot, rotating the ingot until the cutting direction 73 is perpendicular to the swinging center line of the abutment 2, and then performing measurement; taking the second measurement direction 72 as an example, the ingot is placed by rotating the ingot until the cutting direction 73 is parallel to the swing center line of the abutment 2, and then the measurement is performed. And when the two measuring directions are qualified, the parallelism error of the upper end face and the lower end face of the crystal bar to be measured is qualified.

The foregoing is an embodiment one of an orientation level detection tool provided in the embodiments of the present application, and the following is an embodiment two of an orientation level detection tool provided in the embodiments of the present application, specifically please refer to fig. 1.

Based on the scheme of the first embodiment:

further, the abutment member 2 is a straight plate structure, and the bottom surface thereof forms an abutment plane; of course, other shapes and structures are possible, but the bottom surface may be formed with an abutment plane.

Further, one end of the connecting member 3 is fixedly connected to the abutting member 2, and the other end is provided with a fitting portion 31.

The tool main body 1 is provided with a guide rail member 5 along the vertical direction, and the matching part 31 is slidably mounted on the guide rail member 5 and rotatably arranged so that the abutting member 2 can swing. It will be appreciated that the engagement portion 31 is both slidably engaged with the rail member 5 and rotatable on the rail member 5 to effect swinging of the abutment member 2.

Further, the connecting member 3 has an L-shaped rod structure. Compared with a straight rod, the tool has better structural strength, and a certain gap is reserved between the abutting piece 2 and the tool main body 1, so that the abutting piece 2 can not be interfered during swinging.

Further, a locking member 4 is included.

The locking piece 4 is used for locking the connecting piece 3 and the tool main body 1 together so as to lock the abutting piece 2. After the abutting plane of the abutting piece 2 is attached to the upper end face of the crystal bar to be tested, a certain swinging angle state can be presented according to the parallelism error of the upper end face and the lower end face, and then the swinging angle state can be locked through the locking piece 4 so as to avoid the influence on the detection result caused by false contact.

Further, in the case of the guide member 5, a guide groove 51 is provided thereon, and the fitting portion 31 is slidably mounted in the guide groove 51, and a communicating groove (not shown) penetrating the outside is provided on an inner side wall of the guide groove 51 in the vertical direction.

The locking piece 4 comprises a head part and a threaded rod part connected with the head part, and the threaded rod part movably penetrates through the communication groove and is in sliding fit with the communication groove; the matching part 31 is provided with a threaded hole for the insertion of the threaded rod part and in threaded matching with the threaded rod part; the head and the mating portion 31 can form a clamping fixation for the rail member 5.

The clamping of the head part and the matching part 31 to the guide rail part 5 can be loosened by screwing the locking part 4, so that the height of the abutting part 2 can be adjusted according to the length of the crystal bar to be measured, and when the abutting part 2 finishes measurement, the locking part 4 can be screwed again to enable the head part and the matching part 31 to form clamping fixation to the guide rail part 5, and then the swinging state of the abutting part 2 at the time is fixed.

By this design of the locking member 4, the fitting portion 31 can further enhance the fitting reliability with the rail member 5 by utilizing the sliding fit between the locking member 4 and the communicating groove.

Further, the locking member 4 may be one of a screw, a bolt, and a screw.

Further, the gauge 6 may be a pointer gauge.

The pointer instrument includes a dial 61 and a pointer member 62; the pointer member 62 is attached to the dial 61, is connected to the connector 3 or the abutment 2, and swings following the abutment 2.

The abutting piece 2 is vertically swinging, that is, the abutting piece 2 swings left and right when seen from the front, and the connecting piece 3 is connected to the center of one side edge of the abutting piece 3; the pointer 62 is also arranged to swing vertically, i.e. to swing left and right as seen from the front. The pointer member 62 is connected with the abutting member 2 in a synchronous swinging way through the connecting member 3, so that the swinging directions of the pointer member 62 and the abutting member 2 are consistent; the pointer 62 swings at the same time as the abutting piece 2 swings.

Further, in order to better read and understand the detection result corresponding to the scale result pointed by the pointer member 62, the scale area on the dial 61 is divided into areas according to the preset area range and is divided into different colors. Specifically, the three-dimensional display device can be divided into five areas, one green scale area which is positioned in the middle and has a scale range of-0.017 degrees to +0.017 degrees, two yellow scale areas which are positioned at two sides of the green scale area and have a scale range of-0.017 degrees to-0.034 degrees and +0.017 degrees to +0.034 degrees respectively, and two red scale areas which are positioned at two sides of the two yellow scale areas and have a scale range of-0.034 degrees or less and +0.034 degrees or more respectively. When the pointer 62 points to the green scale area or the yellow scale area, it is considered to be within the error range, and when the pointer 62 points to the red scale area, it is considered to be outside the error range, and the reorientation is required.

Further, for the design of the tool main body 1, the tool main body can comprise a base 11 and a vertical plate 12, wherein the vertical plate 12 is vertically arranged on the base 11; the abutment 2 and the gauge 6 are mounted on the riser 12.

The foregoing describes a specific orientation level detection tool provided in the present application, and those skilled in the art, based on the concepts of the embodiments of the present application, may change in terms of specific embodiments and application ranges, so that the disclosure should not be construed as limiting the application.

Claims (10)

1. The directional horizontal detection tool is characterized by comprising a tool main body (1), an abutting piece (2) and a measuring instrument (6);

the bottom surface of the abutting piece (2) is an abutting plane which can be contacted with one end surface of the crystal bar to be tested;

a connecting piece (3) is fixed on the abutting piece (2);

the abutting piece (2) is connected with the tool main body (1) in a swinging manner through the connecting piece (3) and can be adjusted in height along the vertical direction;

the measuring instrument (6) is arranged on the tool main body (1) and connected with the abutting piece (2) and is used for obtaining parallelism errors of the upper end face and the lower end face of the crystal bar to be measured by detecting the swing angle of the abutting piece (2).

2. The orientation level detection tool according to claim 1, wherein the abutment (2) is a straight plate structure.

3. The directional level detection tool according to claim 1, wherein one end of the connecting piece (3) is fixedly connected with the abutting piece (2), and the other end is provided with a matching part (31);

a guide rail piece (5) is arranged on the tool main body (1) along the vertical direction;

the matching part (31) is slidably mounted on the guide rail piece (5) and can be rotatably arranged so that the abutting piece (2) can swing.

4. A directional level detection tool as claimed in claim 3, wherein the connector (3) is of L-shaped rod construction.

5. The orientation level detection tool according to claim 4, further comprising a locking member (4);

the locking piece (4) is used for locking the connecting piece (3) and the tool main body (1) together so as to lock the abutting piece (2).

6. The orientation level detection tool according to claim 5, wherein the guide rail member (5) is provided with a guide rail groove (51);

the matching part (31) is slidably arranged in the guide rail groove (51);

a communicating groove penetrating the outside is formed in the inner side wall of the guide rail groove (51) along the vertical direction;

the locking piece (4) comprises a head and a threaded rod part connected with the head;

the threaded rod part movably passes through the communication groove and is in sliding fit with the communication groove;

the matching part (31) is provided with a threaded hole for the threaded rod part to be inserted into and matched with in a threaded way;

the head and the matching part (31) can form clamping fixation for the guide rail piece (5).

7. The orientation level detection tool according to claim 6, wherein the locking member (4) is one of a screw, a bolt, and a screw.

8. The orientation level detection tool according to claim 1, wherein the measuring instrument (6) is a pointer instrument;

the pointer instrument comprises a dial (61) and a pointer member (62);

the pointer member (62) is mounted on the dial (61), connected to the connecting member (3) or the abutting member (2), and swings following the abutting member (2).

9. The orientation level detection tool according to claim 8, wherein the graduation areas on the dial (61) are divided by a preset area range and are distinguished by different colors.

10. The orientation level detection tool according to claim 1, wherein the tool body (1) comprises a base (11) and a riser (12);

the vertical plate (12) is vertically arranged on the base (11);

the abutting piece (2) and the measuring instrument (6) are mounted on the vertical plate (12).