CN220760285U

CN220760285U - Environment-friendly degumming machine

Info

Publication number: CN220760285U
Application number: CN202322487395.XU
Authority: CN
Inventors: 朱仁德
Original assignee: Wuxi Jingyuntong Technology Co Ltd
Current assignee: Wuxi Jingyuntong Technology Co Ltd
Priority date: 2023-09-13
Filing date: 2023-09-13
Publication date: 2024-04-12
Anticipated expiration: 2033-09-13

Abstract

The utility model discloses an environment-friendly degumming machine, which comprises a degumming machine body, wherein mounting holes are formed in two sides of the degumming machine body, rotating beads are arranged in the mounting holes, connecting pipes are arranged in the rotating beads, one ends of the connecting pipes extend out of the rotating beads to be fixedly connected with spray heads, the other ends of the connecting pipes extend out of the rotating beads to be fixedly connected with hoses, water tanks are fixedly connected to the outer walls of the two sides of the degumming machine body, water pumps communicated with the water tanks are fixedly connected to the bottoms of the water tanks, the hoses are communicated with the water pumps, and the outer walls of the two sides of the degumming machine body are fixedly connected with fixing seats. The utility model not only can spray the spray heads at multiple angles, can wash the silicon wafers in multiple directions and improve the washing efficiency, but also can save water resources, improve the environmental protection performance of the degumming machine, further expand the washing range of the degumming machine to the silicon wafers and further improve the washing of the degumming machine.

Description

Environment-friendly degumming machine

Technical Field

The utility model relates to the technical field of degumming machines, in particular to an environment-friendly degumming machine.

Background

In the process of silicon wafer production, the silicon wafer must be strictly cleaned, and trace pollution can also cause device failure, and when in cleaning, the silicon wafer needs to be degummed by a degumping machine.

As disclosed in the patent number CN215696290U, there is a spraying structure of a degumming machine in the prior art, in which, the spraying pipe is generally fixed, and the flushing angle is fixed during flushing, so that the flushing effective part is relatively single, the actual flushing result is relatively poor, and in order to solve such a problem, the application provides an environment-friendly degumming machine.

Disclosure of Invention

The utility model aims to solve the defects in the prior art and provides an environment-friendly degumming machine.

In order to achieve the above purpose, the present utility model adopts the following technical scheme:

the utility model provides an environment-friendly degumming machine, includes the degumming machine body, the mounting hole has all been seted up to the both sides of degumming machine body, is equipped with the changeing the pearl in the mounting hole, is equipped with the connecting pipe in the changeing the pearl, and changeing pearl fixedly connected with shower nozzle is extended to the one end of connecting pipe, and changeing pearl fixedly connected with hose is extended to the other end of connecting pipe, the equal fixedly connected with water tank of both sides outer wall of degumming machine body, the bottom fixedly connected with of water tank and the suction pump that the water tank is linked together, and the hose is linked together with the suction pump, the equal fixedly connected with fixing base of both sides outer wall of degumming machine body, the spacing groove has been seted up to the upper surface of fixing base, and sliding connection has two slide, two adjacent one side of slide has all been seted up the spout, two adjacent spout sliding connection has same slide bar on the slide, fixedly connected with spring in the spout, and spring is fixed mutually with slide bar, the equal fixedly connected with fixed block of both sides outer wall of degumming machine body, the bottom fixedly connected with wedge of fixed block, be equipped with driving mechanism that reciprocating motion carries out in the spacing groove.

As a still further scheme of the utility model, the driving mechanism comprises a reciprocating screw rod, the reciprocating screw rod is rotationally connected with the limiting groove, the reciprocating screw rod penetrates through the two sliding plates and is in threaded connection with the two sliding plates, one side of the fixing seat is fixedly connected with a motor, and an output shaft of the motor extends into the limiting groove to be fixed with the reciprocating screw rod.

As a still further proposal of the utility model, one side of the fixed seat is fixedly connected with a connecting plate for supporting the motor.

As a still further proposal of the utility model, the upper surface of the connecting plate is fixedly connected with a shock pad, and the shock pad is positioned between the motor and the connecting plate.

As a still further scheme of the utility model, the inner walls of the two sides of the degumming machine body are fixedly connected with auxiliary spray pipes, and the two ends of each auxiliary spray pipe penetrate through the degumming machine body and are communicated with the water tank.

As a still further scheme of the utility model, the top of the water tank is provided with a cover plate for sealing the water tank.

As a still further scheme of the utility model, the upper surface of the cover plate is fixedly connected with a handle.

As still further scheme of the utility model, the guide rod is fixedly connected in the chute and penetrates through the slide rod.

The beneficial effects of the utility model are as follows:

1. through the cooperation of slide and wedge, actuating mechanism drives two slides and carries out reciprocating motion, and the slide can promote the connecting pipe and rotate through changeing the pearl, and the wedge can extrude the connecting pipe simultaneously, makes the connecting rod rotate through changeing the pearl again to make the shower nozzle carry out the multi-angle and spray, can dive the silicon chip, improved the washing effect.

2. Through setting up shower nozzle and auxiliary nozzle with the degummed machine body inside, shower nozzle and auxiliary nozzle spun water can collect inside the degummed machine body, to water unified collection, after washing the completion to the silicon chip, can discharge the inside water of degummed machine body, recycle after purifying, saved the water resource, improved the environmental protection performance of degummed machine.

3. Through the setting of auxiliary spray pipe, auxiliary spray pipe can carry out supplementary spraying to the silicon chip and wash to can further enlarge the washing scope of degumming machine to the silicon chip, further improve the washing effect of degumming machine.

Drawings

FIG. 1 is a schematic perspective view of an environment-friendly degumming machine according to the present utility model;

FIG. 2 is a schematic cross-sectional view of an environment-friendly degumming machine according to the present utility model;

fig. 3 is a schematic diagram of a partial enlarged structure of an environment-friendly degumming machine according to the present utility model.

In the figure: 1. a water tank; 2. a cover plate; 3. a handle; 4. an auxiliary spray pipe; 5. rotating the beads; 6. a spray head; 7. a degummed machine body; 8. a shock pad; 9. a connecting plate; 10. a slide plate; 11. a fixing seat; 12. a hose; 13. a water pump; 14. a fixed block; 15. a slide bar; 16. a chute; 17. a spring; 18. a guide rod; 19. a reciprocating screw rod; 20. a limit groove; 21. wedge blocks; 22. and (5) connecting pipes.

Detailed Description

The technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model, and all other embodiments obtained by those skilled in the art without making any inventive effort are within the scope of the present utility model.

Referring to fig. 1-3, an environment-friendly degumming machine comprises a degumming machine body 7, wherein mounting holes are formed in two sides of the degumming machine body 7, rotating beads 5 are arranged in the mounting holes, connecting pipes 22 are arranged in the rotating beads 5, one ends of the connecting pipes 22 extend out of the rotating beads 5 and are fixedly provided with spray heads 6 through bolts, the other ends of the connecting pipes 22 extend out of the rotating beads 5 and are adhered with hoses 12, water tanks 1 are fixedly arranged on two outer walls of the degumming machine body 7 through bolts, water pumps 13 communicated with the water tanks 1 are fixedly arranged at the bottoms of the water tanks 1 through bolts, the hoses 12 are communicated with the water pumps 13, fixing seats 11 are welded on two outer walls of the degumming machine body 7, limiting grooves 20 are formed in the upper surfaces of the fixing seats 11, two sliding plates 10 are connected in a sliding mode in the limiting grooves 20, the sliding plates 10 are contacted with the connecting pipes 22, sliding grooves 16 are formed in one sides adjacent to the two sliding plates 10, the same slide bar 15 is connected in a sliding way in the slide grooves 16 on the two adjacent slide plates 10 in a sliding way, the slide bar 15 is contacted with the connecting pipe 22, the spring 17 is welded in the slide groove 16, the spring 17 is fixed with the slide bar 15, the outer walls of the two sides of the degumming machine body 7 are both fixed with the fixed block 14 through bolts, the bottom of the fixed block 14 is fixed with the wedge block 21 through bolts, the wedge block 21 is contacted with the connecting pipe 22, the limiting groove 20 is internally provided with a driving mechanism for driving the slide plate 10 to reciprocate, the water suction pump 13 is started, the water suction pump 13 pumps water in the water tank 1 into the connecting pipe 22 through the hose 12, finally, the silicon wafer is sprayed out through the spray head 6, the two slide plates 10 are driven to reciprocate through the driving mechanism, the connecting pipe 22 is pushed to rotate left and right through the rotating beads 5 in the reciprocation process of the two slide plates 10, and the slide bar 15 is driven to reciprocate, and when connecting pipe 22 rotates about, wedge 21 can extrude connecting pipe 22 through self inclined plane and rotate downwards through changeing pearl 5, connecting pipe 22 can extrude slide bar 15 along spout 16 downwardly moving, slide bar 15 can extrude spring 17, when connecting pipe 22 rotates the opposite side of wedge 21, spring 17 can promote slide bar 15 upward movement reset, slide bar 15 can promote connecting pipe 22 and rotate upwards, so the circulation, thereby make connecting pipe 22 drive shower nozzle 6 and carry out the swing about, make shower nozzle 6 carry out the multi-angle and spray, can diversely wash the silicon chip, the washing effect has been improved.

According to the utility model, the driving mechanism comprises a reciprocating screw rod 19, the reciprocating screw rod 19 is rotationally connected with a limit groove 20, the reciprocating screw rod 19 penetrates through two sliding plates 10 and is in threaded connection with the two sliding plates 10, a motor is fixed on one side of a fixed seat 11 through bolts, an output shaft of the motor extends into the limit groove 20 and is fixed with the reciprocating screw rod 19, the motor is started to drive the reciprocating screw rod 19 to rotate, the reciprocating screw rod 19 drives the two sliding plates 10 to reciprocate along the limit groove 20, a connecting plate 9 for supporting the motor is welded on one side of the fixed seat 11, a shock pad 8 is adhered to the upper surface of the connecting plate 9, the shock pad 8 is positioned between the motor and the connecting plate 9, the shock pad 8 can reduce shock effect caused by starting of the motor, two side inner walls of a degumming machine body 7 are both side walls of the auxiliary spraying pipe 4 are fixedly connected with a water tank 1 through bolts, the auxiliary spraying pipe 4 can assist in flushing the water tank 1, a cover plate 2 for sealing the water tank 1 is arranged at the top of the water tank 1, a guide rod 18 is fixed on the upper surface of the cover plate 2 through bolts, and a guide rod 18 is fixed in the sliding groove 16 through bolts, and the guide rod 18 penetrates through the guide rod 18 and moves to the guide rod 15.

Working principle: when the silicon wafer flushing device is required to be used, the water suction pump 13 is started, the water in the water tank 1 is pumped out by the water suction pump 13 and conveyed into the connecting pipe 22 through the hose 12, finally, the silicon wafer is flushed through the spray nozzle 6, the motor is started, the motor drives the reciprocating screw rod 19 to rotate, the reciprocating screw rod 19 drives the two sliding plates 10 to reciprocate along the limiting groove 20, the two sliding plates 10 can push the connecting pipe 22 to rotate left and right through the rotating beads 5 in the reciprocating movement process, meanwhile, the two sliding plates 10 can drive the sliding rod 15 to reciprocate, when the connecting pipe 22 rotates left and right, the wedge block 21 can extrude the connecting pipe 22 to rotate downwards through the rotating beads 5 through the inclined plane of the wedge block 21, the connecting pipe 22 can extrude the sliding rod 15 to move downwards along the sliding groove 16, the sliding rod 15 can extrude the spring 17, and when the connecting pipe 22 rotates to the other side of the wedge block 21, the spring 17 can push the sliding rod 15 to move upwards for resetting, the sliding rod 15 can push the connecting pipe 22 to rotate upwards, and circulate like, so that the connecting pipe 22 drives the spray nozzle 6 in a plurality of angles, and the silicon wafer flushing effect is improved.

Furthermore, the terms "disposed," "configured," "connected," "coupled," and "sleeved" are to be construed broadly. For example, it may be a fixed connection, it may be a mechanical connection; either directly or indirectly via an intermediary. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.

Claims

1. The utility model provides an environment-friendly degumming machine, includes degumming machine body (7), its characterized in that, mounting hole has all been seted up to the both sides of degumming machine body (7), is equipped with in the mounting hole and changes pearl (5), changes and is equipped with connecting pipe (22) in pearl (5), and the one end of connecting pipe (22) extends and changes pearl (5) fixedly connected with shower nozzle (6), and the other end of connecting pipe (22) extends and changes pearl (5) fixedly connected with hose (12), the equal fixedly connected with water tank (1) of both sides outer wall of degumming machine body (7), the bottom fixedly connected with of water tank (1) is linked together with suction pump (13), and hose (12) are linked together with suction pump (13), the both sides outer wall of degumming machine body (7) is all fixedly connected with fixing base (11), and limit groove (20) have been seted up on the upper surface of fixing base (11), limit groove (20) are connected with two slide (10), and two slide (16) have all been seted up to one side that the adjacent slide (10), slide (16) on two slide (16) are adjacent slide (15) are connected with one another in the same slide (17) and slide bar (17), the two-side outer walls of the degumming machine body (7) are fixedly connected with fixing blocks (14), the bottoms of the fixing blocks (14) are fixedly connected with wedge blocks (21), and a driving mechanism for driving the sliding plate (10) to reciprocate is arranged in the limiting groove (20).

2. An environment-friendly degumming machine according to claim 1, wherein the driving mechanism comprises a reciprocating screw rod (19), the reciprocating screw rod (19) is rotationally connected with the limiting groove (20), the reciprocating screw rod (19) penetrates through the two sliding plates (10) and is in threaded connection with the two sliding plates (10), a motor is fixedly connected to one side of the fixing seat (11), and an output shaft of the motor extends into the limiting groove (20) to be fixed with the reciprocating screw rod (19).

3. An environment-friendly degumming machine according to claim 2, characterized in that a connecting plate (9) for supporting the motor is fixedly connected to one side of the fixing seat (11).

4. An environment-friendly degumming machine according to claim 3, characterized in that the upper surface of the connecting plate (9) is fixedly connected with a shock pad (8), and the shock pad (8) is positioned between the motor and the connecting plate (9).

5. The environment-friendly degumming machine according to claim 1, wherein the two side inner walls of the degumming machine body (7) are fixedly connected with auxiliary spray pipes (4), and the two ends of the auxiliary spray pipes (4) are communicated with the water tank (1) through the degumming machine body (7).

6. An environmental protection degumming machine according to claim 1, characterised in that the top of the water tank (1) is provided with a cover plate (2) closing the water tank (1).

7. The environment-friendly degumming machine according to claim 6, wherein a handle (3) is fixedly connected to the upper surface of the cover plate (2).

8. An environment-friendly degumming machine according to claim 1, wherein a guide rod (18) is fixedly connected in the chute (16), and the guide rod (18) passes through the slide rod (15).