CN220693640U

CN220693640U - Vacuum infrared annealing device

Info

Publication number: CN220693640U
Application number: CN202321860724.4U
Authority: CN
Inventors: 童国庆; 蒋阳
Original assignee: Hefei Zhaoyangneng Technology Co ltd
Current assignee: Hefei Zhaoyangneng Technology Co ltd
Priority date: 2023-07-17
Filing date: 2023-07-17
Publication date: 2024-03-29
Anticipated expiration: 2033-07-17

Abstract

The utility model provides a vacuum infrared annealing device applied to the technical field of annealing, which comprises a vacuum pump, wherein the vacuum pump is connected with a heating sleeve through a vacuum exhaust pipe, a heat-conducting pipe is arranged in the center of the heating sleeve, a vacuum cavity is arranged in the middle of the heat-conducting pipe, a plurality of infrared heating pipes are uniformly arranged on the outer wall of the heat-conducting pipe in a circumferential manner, the left end and the right end of the vacuum cavity are respectively a vacuum cavity inlet and a vacuum cavity outlet, the vacuum exhaust pipe is connected with the vacuum cavity outlet through the vacuum pump, and the vacuum infrared annealing is adopted.

Description

Vacuum infrared annealing device

Technical Field

The application relates to the technical field of annealing, in particular to a vacuum infrared annealing device.

Background

Through rapid development in recent years, the novel halide perovskite solar cell has achieved an efficiency of more than 25%, but there are many factors that restrict the development of the perovskite solar cell. Among them, the defects of perovskite materials themselves are one of the main reasons for influencing the efficiency and stability of perovskite solar cells. In the manufacturing process of the perovskite solar cell, people promote the growth of perovskite crystal grains in an annealing mode, so that the morphology of the perovskite is improved, and the defects of the thin film are reduced.

The annealing effect on the perovskite is an important factor affecting the perovskite morphology. A muffle furnace or a heating plate is generally used for perovskite annealing. The self-heating and cooling rate is slow; the temperature response sensitivity is low, and hysteresis is provided; meanwhile, the perovskite film is easy to be heated at uneven temperature, so that cracks and residual stress are generated.

In this regard, we propose a vacuum infrared annealing apparatus to solve the above-mentioned problems.

Disclosure of Invention

This application aim at makes the temperature that is heated in the perovskite solar cell annealing process even, the rising and falling rate of temperature is fast, temperature response sensitivity is higher, compare prior art and provide a vacuum infrared annealing device, including the vacuum pump, the vacuum pump is connected with heating sleeve through the vacuum exhaust tube, heating sleeve central point puts and is provided with the heat pipe, be equipped with the vacuum chamber in the middle of the heat pipe, the heat pipe outer wall is the circumference and arranges a plurality of infrared heating pipes uniformly, both ends are vacuum chamber entry and vacuum chamber export respectively about the vacuum chamber, the vacuum exhaust tube passes through the vacuum pump and connects in vacuum chamber export, infrared heating pipe has connected gradually infrared emitter through connecting wire, temperature detector, display panel, through having adopted vacuum infrared annealing, this kind of annealing mode heating rate is fast, the stability of temperature is good, temperature distribution is even, can guarantee that perovskite crystal grain better crystal growth, form the dense film of no cavity defect, and then promote the absorption of perovskite light-absorbing layer to light better, reduce electron and hole's complex, make perovskite solar cell have higher photoelectric conversion efficiency.

Further, an infrared temperature measuring sensor is arranged in the vacuum cavity and is electrically connected to the temperature detector, and signals emitted from the infrared temperature measuring sensor to the infrared emitter can be transmitted to the temperature detector, so that the display panel can display actual temperature values through the temperature sensor.

Further, the infrared heating pipe is connected with the heat conducting pipe through welding.

Furthermore, the vacuum cavity is of a cube structure, and the cube structure is more convenient for taking and placing FTO or ITO conductive glass for manufacturing the perovskite solar cell.

Further, ITO and FTO conductive glass used for manufacturing the perovskite solar cell enter the heat conduction pipe through the vacuum cavity inlet.

Further, an insulation layer is arranged outside the heating sleeve.

Compared with the prior art, the advantage of this application lies in:

(1) The vacuum infrared annealing is adopted, the annealing mode has the advantages of high heating rate, good temperature stability and uniform temperature distribution, perovskite crystal grains can be ensured to be better crystallized and grown, a dense film without void defects is formed, further, the absorption of light by a perovskite light absorption layer is better promoted, the recombination of electrons and holes is reduced, and the perovskite solar cell has higher photoelectric conversion efficiency.

(2) The cavity of the heat-conducting pipe is different from the traditional circular ring shape, and adopts a cubic cavity, so that the cavity is more beneficial to placing and taking out the FTO or ITO conductive glass used for manufacturing the perovskite solar cell, the annealing treatment of the perovskite layer is convenient to complete, and meanwhile, the conductive glass is heated more uniformly, and the growth of the perovskite film is more beneficial to.

Drawings

FIG. 1 is a schematic view of a vacuum annealing apparatus according to the present application;

FIG. 2 is a schematic view of the joint structure of the infrared heating pipe and the heat conducting pipe;

fig. 3 is a cross-sectional view of the junction of the infrared heating tube and the heat conducting tube of the present application.

The reference numerals in the figures illustrate:

1. an infrared heating tube; 2. a heat conduction pipe; 3. an infrared emitter; 4. a temperature detector; 5. a display panel; 6. a vacuum pump; 7. a vacuum exhaust pipe; 8. connecting wires; 9. a vacuum chamber inlet; 10. and a vacuum chamber outlet.

Detailed Description

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model; it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments, and that all other embodiments obtained by persons of ordinary skill in the art without making creative efforts based on the embodiments in the present utility model are within the protection scope of the present utility model.

In the description of the present utility model, it should be noted that the positional or positional relationship indicated by the terms such as "upper", "lower", "inner", "outer", "top/bottom", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "configured to," "engaged with," "connected to," and the like are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of the element of the adapting model. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Example 1:

the utility model provides a vacuum infrared annealing device, referring to fig. 1-3, comprising a vacuum pump 6, wherein the vacuum pump 6 is connected with a heating sleeve through a vacuum exhaust pipe 7, a heat conducting pipe 2 is arranged in the center of the heating sleeve, a vacuum cavity is arranged in the middle of the heat conducting pipe 2, a plurality of infrared heating pipes 1 are uniformly arranged on the outer wall of the heat conducting pipe 2 in a circumferential manner, a vacuum cavity inlet 9 and a vacuum cavity outlet 10 are respectively arranged at the left end and the right end of the vacuum cavity, the vacuum exhaust pipe 7 is connected with the vacuum cavity outlet 10 through the vacuum pump 6, and the infrared heating pipes 1 are sequentially connected with an infrared emitter 3, a temperature detector 4 and a display panel 5 through connecting wires 8.

Specifically, through adopting vacuum infrared annealing, the annealing mode has the advantages of high heating rate, good temperature stability and uniform temperature distribution, perovskite crystal grains can be ensured to be better crystallized and grown, a film without cavity defects is formed, the absorption of a perovskite light absorption layer to light is further better promoted, the recombination of electrons and cavities is reduced, the perovskite solar cell has higher photoelectric conversion efficiency, and simultaneously, infrared rays are emitted to an evenly distributed infrared heating pipe 1 through an infrared emitter 3 to heat the perovskite solar cell until the required temperature in a cavity is reached, so that the annealing temperature is controlled more stably and uniformly.

The display panel controls the opening and closing of the whole device, and simultaneously displays the actual temperature value, the set temperature value and the set heat preservation time value of the whole cavity.

An infrared temperature sensor is arranged in the vacuum cavity and is electrically connected with the temperature detector 4.

Specifically, the signal emitted from the infrared temperature measurement sensor to the infrared emitter 3 may be transmitted to the temperature detector 4, so that the temperature sensor may display the actual temperature value on the display panel, and when the temperature in the cavity is higher or lower than the specified temperature value, the infrared temperature measurement sensor emits the signal to the infrared emitter, so that the infrared emitter 3 adjusts the infrared emission frequency until the required temperature in the cavity is reached.

Example 2:

the utility model provides a vacuum infrared annealing device, referring to fig. 2-3, an infrared heating pipe 1 and a heat conducting pipe 2 are connected through welding, so that the infrared heating pipe 1 and the heat conducting pipe 2 are kept as a whole, and the stability of the device is improved.

The vacuum cavity is of a cube structure, and the cube structure is more convenient for taking and placing FTO or ITO conductive glass for manufacturing perovskite solar cells.

ITO and FTO conductive glass used for manufacturing the perovskite solar cell enter the heat conduction pipe 2 through the vacuum cavity inlet 9.

The heat insulation layer is arranged outside the heating sleeve, and can reduce heat loss and improve the temperature rising rate of the whole device.

Working principle: the staff puts ITO and FTO conductive glass into the cavity of the heat conduction pipe 2 through the vacuum cavity inlet 9, vacuumizes the cavity of the heat conduction pipe 2 through the vacuum pump 6, turns on the start switch of the display panel 5, sets a temperature value and a heat preservation time value, takes CsPbBr3 as an example, and has an annealing temperature of 350 ℃ and a heat preservation time of 20min. When the actual temperature is lower than or higher than the set temperature, the infrared temperature measuring sensor arranged in the cavity transmits signals to the infrared emitter 3, the infrared emission frequency is changed, and then the heating power of the infrared heating pipe 1 is changed, so that the temperature of the cavity is stabilized at the set temperature. When the holding time reaches the set holding time, the infrared emitter 3 stops working, thereby completing the annealing process of the perovskite.

The foregoing is merely a preferred embodiment of the present application, which is used in connection with the actual requirement, but the scope of the present application is not limited thereto.

Claims

1. The utility model provides a vacuum infrared annealing device, includes vacuum pump (6), its characterized in that, vacuum pump (6) are connected with heating sleeve through vacuum exhaust tube (7), heating sleeve central point puts and is provided with heat pipe (2), be equipped with the vacuum chamber in the middle of heat pipe (2), heat pipe (2) outer wall is evenly and is circumference and arranges has a plurality of infrared heating pipes (1), both ends are vacuum chamber entry (9) and vacuum chamber export (10) respectively about the vacuum chamber, vacuum exhaust tube (7) are connected in vacuum chamber export (10) through vacuum pump (6), infrared heating pipe (1) have connected gradually infrared emitter (3), temperature detector (4), display panel (5) through connecting wire (8).

2. The vacuum infrared annealing device according to claim 1, wherein an infrared temperature sensor is disposed inside the vacuum chamber, and the infrared temperature sensor is electrically connected to the temperature detector (4).

3. Vacuum infrared annealing device according to claim 1, characterized in that the infrared heating tube (1) and the heat conducting tube (2) are connected by welding.

4. The vacuum infrared annealing apparatus according to claim 1, wherein said vacuum chamber has a cubic structure.

5. The vacuum infrared annealing device according to claim 4, wherein the ITO and FTO conductive glass used for manufacturing the perovskite solar cell enters the heat conduction pipe (2) through the vacuum cavity inlet (9).

6. The vacuum infrared annealing device according to claim 5, wherein an insulating layer is provided outside the heating sleeve.