CN220691255U - Double-sided exposure machine - Google Patents

Abstract

The utility model discloses a double-sided exposure machine, which comprises: a main body; two exposure lamps which are vertically arranged at intervals; the exposure platform is arranged in the host body in a penetrating way and positioned between the two exposure lamps, and is used for conveying a belt; and an upper exposure plate and a lower exposure plate which are vertically distributed, wherein the lower exposure plate is fixedly connected with the main body and is suspended above the exposure platform, and the lower exposure plate is vertically movably connected with the main body. The technical scheme of the utility model aims to enable the exposure machine to have a double-sided exposure function by additionally arranging the exposure plate and the exposure lamp, thereby improving the production efficiency of the exposure machine.

Description

Double-sided exposure machine

Technical Field

The utility model relates to the technical field of exposure machines, in particular to a double-sided exposure machine.

Background

The exposure process is one of the important steps in the semiconductor production process, and specifically refers to: ultraviolet light emitted by the exposure lamp irradiates the surface of the substrate with a layer of film adhesive through the film plate, and causes the film adhesive in the exposure area to react chemically. In the exposure process, two exposure processes of front exposure and back exposure are needed, the processing time is long, and the production efficiency is low.

Disclosure of Invention

The utility model mainly aims to provide a double-sided exposure machine, which aims to enable the exposure machine to have a double-sided exposure function by additionally arranging an exposure plate and an exposure lamp, and simultaneously realize front exposure and back exposure through one procedure, thereby improving the production efficiency of the exposure machine.

In order to achieve the above object, the present utility model provides a double-sided exposure machine comprising: a main body; two exposure lamps which are vertically arranged at intervals; the exposure platform is arranged in the host body in a penetrating way and positioned between the two exposure lamps, and is used for conveying a belt; and an upper exposure plate and a lower exposure plate which are vertically distributed, wherein the lower exposure plate is fixedly connected with the main body and is suspended above the exposure platform, and the lower exposure plate is vertically movably connected with the main body.

Optionally, the upper exposure plate and the lower exposure plate are both configured as glass plates, and the exposure plates are used for pasting a baffle.

Optionally, the both sides of host computer body are equipped with the supporting seat, the supporting seat is including being the first supporting part and the second supporting part that L type connects, first supporting part connect in the inner wall of host computer body to extend along vertical, the second supporting part extends along transversely towards the contralateral side, and connect in the lateral part of lower exposure board.

Optionally, the exposure machine further comprises a vertical adjusting mechanism, wherein the vertical adjusting mechanism comprises an adjusting motor, a conveyor belt, a transverse adjusting rod and two vertical adjusting rods, two ends of the transverse adjusting rod are respectively in transmission connection with one ends of the two vertical adjusting rods, and the other ends of the two vertical adjusting rods are in transmission connection with the upper exposure plate; the adjusting motor is arranged on the main body, the conveyor belt is sleeved on the output shaft of the adjusting motor and the transverse adjusting rod at the same time, the adjusting motor runs and can drive the transverse adjusting rod to rotate, and the upper exposure plate is driven to vertically move through the two vertical adjusting rods.

Optionally, driving gears are arranged at two ends of the transverse adjusting rod, a driven gear is arranged at one end of the vertical adjusting rod, and the driven gears of the two vertical adjusting rods are meshed with the driving gears at two ends of the transverse adjusting rod respectively; the exposure machine further comprises a mounting frame, the upper exposure plate is mounted on the mounting frame, the mounting frame is provided with four support posts, the two support posts located on the same side are fixedly connected through a connecting plate, the main machine body is provided with a sliding rail extending vertically, the connecting plate is connected with the sliding rail in a sliding mode, and the vertical adjusting rod penetrates through the connecting plate and is connected with the connecting plate in a threaded mode.

Optionally, the exposure machine further comprises a first deviation rectifying mechanism, the first deviation rectifying mechanism is installed on the exposure platform, and the first deviation rectifying mechanism is used for adjusting the conveying direction of the material belt.

Optionally, the exposure machine further includes a second deviation rectifying mechanism, the exposure platform is movable relative to the main machine body, the second deviation rectifying mechanism is installed on the main machine body, and the second deviation rectifying mechanism is used for driving the exposure platform to move relative to the main machine body so as to adjust the relative position of the material belt and the exposure platform.

Optionally, a jelly is coated on the surface of the feeding roller, and the jelly is used for adhering impurities on the surface of the material belt.

Optionally, the surface of the receiving roller is provided with a plurality of vacuum adsorption holes for adsorbing the material belt.

Optionally, the exposure machine further comprises a cooling system, a liquid channel is arranged in the exposure lamp, and the cooling system is communicated with the liquid channel.

According to the technical scheme, the exposure machine is additionally provided with the exposure lamps and the exposure plates, so that the exposure machine is vertically provided with the two exposure lamps at intervals, and the exposure plates attached with the baffle plates are respectively arranged corresponding to the two exposure lamps at intervals.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of the whole structure of an embodiment of a double-sided exposure machine according to the present utility model;

FIG. 2 is a schematic view of the internal structure of the machine body of the embodiment of FIG. 1;

FIG. 3 is a schematic view of the connection structure of the mounting frame and the vertical adjustment mechanism of FIG. 2;

FIG. 4 is a schematic view of the connection structure of the lateral adjustment lever and the adjustment motor of FIG. 3;

FIG. 5 is a schematic view showing the connection structure of the exposure frame, the lower exposure plate and the CCD camera in FIG. 2;

FIG. 6 is a schematic view of a connection structure of the exposure frame in FIG. 2;

FIG. 7 is an enlarged view at A in FIG. 6;

FIG. 8 is a schematic view of the first deviation rectifying mechanism and the base of FIG. 2 at a view angle;

FIG. 9 is an enlarged view at B in FIG. 8;

FIG. 10 is a schematic view of the first deviation rectifying mechanism and the base of FIG. 2 from another perspective;

FIG. 11 is a schematic diagram of a second deviation correcting mechanism in FIG. 2;

fig. 12 is an exploded view of the second deviation rectifying mechanism shown in fig. 11.

Reference numerals illustrate:

the achievement of the objects, functional features and advantages of the present utility model will be further described with reference to the accompanying drawings, in conjunction with the embodiments.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present utility model are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly.

In the present utility model, unless specifically stated and limited otherwise, the terms "connected," "affixed," and the like are to be construed broadly, and for example, "affixed" may be a fixed connection, a removable connection, or an integral body; can be mechanically or electrically connected; either directly or indirectly through intermediaries, or in abutment, or in communication between two elements or in interaction with each other, unless explicitly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In addition, if there is a description of "first", "second", etc. in the embodiments of the present utility model, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" as it appears throughout includes three parallel schemes, for example "A and/or B", including the A scheme, or the B scheme, or the scheme where A and B are satisfied simultaneously. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present utility model.

The utility model provides a double-sided exposure machine.

Referring to fig. 1 to 12, in an embodiment of the present utility model, the double-sided exposure machine includes: a main body 100; two exposure lamps 200 arranged at intervals in the vertical direction; an exposure platform 300 penetrating the main body 100 and located between the two exposure lamps 200, wherein the exposure platform 300 is used for conveying the belt 10; and an upper exposure plate 310 and a lower exposure plate 320 which are vertically distributed, wherein the lower exposure plate 320 is fixedly connected to the main body 100 and is suspended above the exposure stage 300, and the lower exposure plate 320 is vertically movably connected to the main body 100. So set up, when the material area 10 is transported to between the upper exposure board 310 and the lower exposure board 320, the material area 10 both sides can receive the illumination of the exposure lamp 200 simultaneously, accomplish the double-side exposure operation of material area 10 in time, have promoted the operating efficiency of exposure machine.

In the technical scheme of the utility model, by additionally arranging the exposure lamps 200 and the exposure plates on the exposure machine, the exposure machine is provided with two exposure lamps 200 at vertical intervals, and each exposure plate with a baffle is arranged at intervals corresponding to the two exposure lamps 200, so that when the material belt 10 passes through an exposure work area, both sides of the material belt 10 are simultaneously irradiated by the exposure lamps 200, and the material belt 10 can complete double-sided exposure operation at the same time and at the same position, thereby improving the operation efficiency of the exposure machine.

Optionally, referring to fig. 2, the double-sided exposure machine further includes: the first deviation correcting mechanism 400 is installed on the exposure platform 300, and the first deviation correcting mechanism 400 is used for adjusting the conveying direction of the material belt 10; and a second deviation rectifying mechanism 500, where the second deviation rectifying mechanism 500 is used to drive the main machine body 100 to move, so as to adjust the relative position of the material belt 10 and the exposure platform 300, and the first deviation rectifying mechanism 400 and the second deviation rectifying mechanism 500 can rectify the material belt 10 transported on the exposure platform 300, so as to ensure that the area where the material belt 10 needs to be exposed coincides with the area irradiated by the exposure lamp 200, thus further improving the operation precision of the exposure machine and the production efficiency of the exposure machine. In other embodiments, the exposure machine manually rectifies the material belt 10 to ensure the exposure effect of the material belt 10.

Alternatively, one of the exposure plates is disposed between the material tape 10 and one of the exposure lamps 200, respectively, and the exposure plate is configured as a glass plate for attaching a shutter. On the other hand, the glass exposure plate has high light transmittance, and can improve the exposure effect of the exposure lamp 200; on the other hand, the glass plate is easy to clean, and when the baffle plate required by exposure needs to be replaced, the residual pasting marks on the glass are convenient to clean, so that the pasting effect of other baffle plates and the exposure plate is not affected. In other embodiments, the exposure plate is configured as a transparent plastic.

Referring to fig. 2 and 5, alternatively, the main body 100 is provided at both sides thereof with a support base 110, the support base 110 includes a first support portion 111 and a second support portion 112 connected in an L-shape, the first support portion 111 is connected to an inner wall of the main body 100 and extends vertically, and the second support portion 112 extends laterally toward the opposite side and is connected to a side portion of the lower exposure plate 320, so that the lower exposure plate 320 is stably connected to the main body 100 through the support base 110; further, the support base 110 may also support the lower exposure plate 320 above the exposure stage 300 in a floating manner, such that there is no interference between the exposure stage 300 and the lower exposure plate 320 when the exposure stage 300 moves relative to the main body 100. In other embodiments, the support base 110 for connecting the lower exposure plate 320 is disposed on two sides of the exposure stage 300, and the support base 110 is slidably connected to the exposure stage 300, so that the lower exposure plate 320 can move relative to the exposure stage 300.

Referring to fig. 3 and 4, optionally, the double-sided exposure machine further includes a vertical adjustment mechanism 600, where the vertical adjustment mechanism 600 includes an adjustment motor 610, a conveyor belt 620, a lateral adjustment lever 630, and two vertical adjustment levers 640, two ends of the lateral adjustment lever 630 are respectively connected to one ends of the two vertical adjustment levers 640 in a transmission manner, and the other ends of the two vertical adjustment levers 640 are connected to the upper exposure plate 310 in a transmission manner; the adjusting motor 610 is mounted on the main body 100, and the conveyor belt 620 is simultaneously sleeved on the output shaft 551 of the adjusting motor 610 and the lateral adjusting lever 630, so that when the adjusting motor 610 runs, the lateral adjusting lever 630 can be driven to rotate, and the upper exposure plate 310 is driven to vertically move by the two vertical adjusting levers 640, so as to adjust the relative position between the upper exposure plate 310 and the main body 100. In other embodiments, the upper exposure plate 310 is fixed on the host portion.

With continued reference to fig. 3 and fig. 4, further, driving gears 631 are disposed at both ends of the lateral adjustment rod 630, a driven gear 641 is disposed at one end of the vertical adjustment rod 640, and the driven gears 641 of the two vertical adjustment rods 640 are respectively meshed with the driving gears 631 at both ends of the lateral adjustment rod 630; the double-sided exposure machine further comprises a mounting frame 700, the upper exposure plate 310 is mounted on the mounting frame 700, the mounting frame 700 is provided with four support posts 710, two support posts 710 located on the same side are fixedly connected through a connecting plate 720, the main machine body 100 is provided with a sliding rail 120 extending vertically, the connecting plate 720 is slidably connected with the sliding rail 120, the vertical adjusting rod 640 penetrates through and is screwed with the connecting plate 720, specifically, when the adjusting motor 610 works, an output shaft 551 of the adjusting motor 610 drives the conveying belt 620 to operate, the conveying belt 620 drives the transverse adjusting rod 630 to rotate, the driving gear 631 and the transverse adjusting rod 630 synchronously rotate, the driving gear 631 meshes with the driven gear 641 to drive the vertical adjusting rod 640 to rotate relative to the connecting plate 720, the connecting plate 720 generates vertical displacement relative to the vertical adjusting rod 640 under the screwing effect between the driving gear 631, and therefore the vertical adjusting rod 640 drives the mounting frame 700 to vertically move along the sliding rail 120 of the main machine body 100, and further drives the upper exposure plate 310 to vertically move.

Referring to fig. 5 and 6, optionally, the double-sided exposure machine further includes a first deviation rectifying mechanism 400, the first deviation rectifying mechanism 400 is mounted on the exposure platform 300, and the first deviation rectifying mechanism 400 is configured to adjust the conveying direction of the material belt 10, so as to ensure the exposure accuracy of the material belt 10.

Referring to fig. 8 to 10, optionally, the first deviation rectifying mechanism 400 includes a base plate 410 and a deviation rectifying assembly, the deviation rectifying assembly includes a conveying roller 421, a first deviation rectifying motor (not shown), a knuckle bearing 423 and a guide rod 424, the conveying roller 421 is rotatably disposed on an upper side of the base plate 410, the material belt 10 is conveyed by the conveying roller 421, a first support 411 is disposed on a lower side of the base plate 410, the knuckle bearing 423 is mounted on the first support 411, the guide rod 424 is fixedly connected to the exposure platform 300 and is movably inserted into the knuckle bearing 423, and the first deviation rectifying motor is drivingly connected to the base plate 410. Specifically, after the first deviation rectifying motor operates, the bottom plate 410 has a tendency to rotate relative to the exposure platform 300, and meanwhile, due to the cooperation of the knuckle bearing 423 and the guide rod 424, the bottom plate 410 is twisted by a small extent, so as to drive the conveying roller 421 to twist by a small extent relative to the exposure platform 300, and then, through interaction between the conveying roller 421 and the material belt 10, the material belt 10 is interfered in the conveying direction, so that deviation rectifying of the conveying direction of the material belt 10 is realized.

Further, referring to fig. 6 and 8, a base 430 is disposed above the exposure platform 300, the base 430 is disposed corresponding to the first deviation rectifying mechanism 400, a second support 431 is disposed above the base 430, the guide rod 424 is disposed on the second support 431, and the bottom plate 410 is connected to the second support 431 through the first support 411, the joint bearing 423 and the guide rod 424, that is, the bottom plate 410 is connected to the base 430, so that the first deviation rectifying mechanism 400 is connected to the exposure platform 300 through the base 430. Alternatively, the first deviation rectifying motor may be disposed in the base 430 to drive the first deviation rectifying mechanism 400 to operate.

Referring to fig. 8, further, the first support 411, the knuckle bearing 423, and the guide rod 424 are disposed at two angles in a one-to-one correspondence, so that the first deviation rectifying mechanism 400 can twist at multiple angles with respect to the base 430, and the deviation rectifying effect on the material belt 10 is better achieved. In other embodiments, the base 410 is provided with only one first support 411, the base 430 is provided with only one second support 431, and the first support 411 is rotatable relative to the second support 431.

Referring to fig. 8 to 10, further, the first deviation rectifying mechanism 400 further includes a sensor assembly 440, the sensor assembly 440 includes a fine tuning connection plate 441, a fine tuning rod 442, a fine tuning rotation handle 443, and a U-shaped deviation rectifying sensor, the fine tuning connection plate 441 is mounted on the side surface of the base 430, the fine tuning rod 442 passes through the fine tuning connection plate 441, the fine tuning rotation handle 443 passes through the fine tuning connection plate 441 to be in threaded connection with the fine tuning rod 442, and the U-shaped deviation rectifying sensor is connected with the fine tuning rod 442 through a connection block 445. Specifically, the U-shaped deviation correcting sensor measures the position of the material belt 10 through the detecting part 446, so as to infer the angle of the material belt 10 to be corrected, and feeds back to the first deviation correcting motor through the corresponding controller, and twists through the bottom plate 410 of the first deviation correcting motor, so as to adjust the advancing direction of the material belt 10. Meanwhile, the sensor assembly 440 can manually adjust its position relative to the base 430, and the fine adjustment lever 442 is driven to rotate by manually rotating the fine adjustment lever 443, so that the position of the U-shaped deviation correcting sensor relative to the base 430 is adjusted by the screw connection between the fine adjustment lever 442 and the fine adjustment connection plate 441.

Referring to fig. 2, 5 and 6, optionally, the double-sided exposure machine further includes a second deviation rectifying mechanism 500, the exposure platform 300 is movable relative to the main body 100, the second deviation rectifying mechanism 500 is mounted on the main body 100, and the second deviation rectifying mechanism 500 is configured to drive the exposure platform 300 to move relative to the main body 100 so as to adjust the relative position of the material belt 10 and the exposure platform 300, so that the exposure platform 300 drives the material belt 10 to move relative to the lower exposure board 320, so as to implement a deviation rectifying function on the material belt 10.

Referring to fig. 11 and 12, further, the second deviation correcting mechanism 500 includes a first slider 510, a second slider 520, a first slider 530 and a second slider 540, specifically, the first slider 510 is fixedly connected to the main body 100, the first slider 530 is slidably connected to the first slider 510, the second slider 520 is rotatably connected to the exposure platform 300, and the second slider 540 is disposed between the first slider 530 and the second slider 520 and is slidably connected to the first slider 530 and the second slider 520 along the same direction on both sides, wherein a sliding direction of one of the first slider 530 and the second slider 540 is parallel to a length direction of the exposure platform 300, and a sliding direction of the other is parallel to a width direction of the exposure platform 300, so that the exposure platform 300 can move relative to the main body 100.

With continued reference to fig. 11 and 12, optionally, the second deviation rectifying mechanism 500 further includes a second deviation rectifying motor 550, an output shaft 551 of the second deviation rectifying motor 550 is configured as a screw rod structure, the first slider 530 is sleeved and screwed to the output shaft 551 of the second deviation rectifying motor 550, and the second deviation rectifying mechanism 500 is provided with a plurality of second deviation rectifying mechanisms, and sliding directions of the first sliders 530 of at least two second deviation rectifying mechanisms 500 are different. Specifically, the second deviation rectifying motor 550 drives the first sliding block 530 to slide through the output shaft 551, so as to drive the exposure platform 300 to move; the exposure stage 300 is provided with a plurality of deviation rectifying motors to better drive the exposure stage 300 to move.

Referring to fig. 2, 5 and 6, optionally, four second deviation correcting mechanisms 500 are provided, and are respectively disposed corresponding to four corners of the exposure platform 300, and the sliding directions of the first sliders 530 of the two second deviation correcting mechanisms 500 disposed diagonally are the same. Thus, when the two second deviation correcting mechanisms 500 in the diagonal direction drive the exposure plate to move, the second sliding blocks 540 of the two second deviation correcting mechanisms 500 in the other diagonal direction passively slide along the first sliding blocks 530, and at the same time, the second sliding seat 520 can rotate relative to the exposure platform 300, so as to counteract the torsion effect caused by the rotation of the exposure platform 300 relative to the main body 100; in addition, the sliding directions of the first sliding blocks 530 of the two second deviation correcting mechanisms 500 arranged diagonally are the same, so that the deviation correcting effect of the exposure platform 300 can be better ensured, and the two sides of the exposure platform 300 can synchronously move in the same direction. In other embodiments, two second deviation correcting mechanisms 500 are disposed at the same side angle of the exposure platform 300, and the sliding directions of the first sliders 530 of the two second deviation correcting mechanisms 500 are perpendicular to each other.

Referring to fig. 2, optionally, the main body 100 is provided with a controller (not shown) and a CCD camera, the CCD camera is disposed on each of the upstream and downstream sides of the exposure lamp 200, the controller (not shown) is electrically connected to the CCD camera, and the controller (not shown) can control the second deviation rectifying mechanism 500 to operate according to the photographed image of the CCD camera. It should be noted that, the CCD camera disposed upstream of the exposure lamp 200 is mainly used for capturing an image of the edge of the tape 10, so as to obtain the position information of the edge of the tape 10 relative to the exposure platform 300; the CCD camera disposed downstream of the exposure lamp 200 is mainly used for capturing an image of the exposed surface pattern of the material belt 10 to obtain the position information of the pattern relative to the material belt 10, so that the controller sends a corresponding deviation rectifying instruction to the second deviation rectifying motor 550 in combination with the photo information captured by the CCD cameras on both sides, and the deviation rectifying of the material belt 10 is achieved by moving the exposure platform 300.

Further, a plurality of CCD cameras are respectively disposed on the two sides of the upstream and downstream of the exposure lamp 200, so that the image of the material belt 10 can be comprehensively photographed, and the defect of the photographed image due to the limitation of the photographing field of view of the CCD cameras is avoided, so that the controller cannot obtain complete data information, and the deviation rectifying effect of the second deviation rectifying mechanism 500 is affected.

Referring to fig. 8, optionally, the surface of the feeding roller is coated with a jelly, which is used to adhere impurities on the surface of the material belt 10, so as to ensure the exposure effect of the material belt 10.

Referring to fig. 6 and 7, optionally, the surface of the receiving roller 800 is provided with a plurality of vacuum adsorption holes 810 for adsorbing the material belt 10, when the exposure machine is not in operation, the end of the material belt 10 on the roll up roller 1000 is manually pulled to the receiving roller 800, and after the exposure machine is started, the end of the material belt 10 is adsorbed to the receiving roller 800 through the vacuum adsorption holes 810, so that the material belt 10 is stably connected to the receiving roller 800; along with the rotation of the material receiving roller 800, the material belt 10 on the material receiving roller 800 moves forward along the exposure platform 300, that is, the material receiving roller 800 provides the kinetic energy for transporting the material belt 10; and after the exposure machine is closed, the vacuum adsorption holes 810 no longer adsorb the material belt 10, the material belt 10 and the surface of the material receiving roller 800 no longer interact, and the loss of the material belt 10 is reduced. In other embodiments, the end of the material belt 10 is attached to the material receiving roller 800.

Referring to fig. 1, optionally, the double-sided exposure machine further includes a cooling system 900, a liquid channel is disposed in the exposure lamp 200, and the cooling system 900 is connected to the liquid channel, so as to prolong the service life of the exposure lamp 200, and avoid the failure of the light emitting portion of the exposure lamp 200 due to the over-high temperature, so that the service life of the exposure machine is improved.

The foregoing description is only of the optional embodiments of the present utility model, and is not intended to limit the scope of the utility model, and all the equivalent structural changes made by the description of the present utility model and the accompanying drawings or the direct/indirect application in other related technical fields are included in the scope of the utility model.

Claims (10)

1. A double-sided exposure machine, comprising:

a main body;

two exposure lamps which are vertically arranged at intervals;

the exposure platform is arranged in the host body in a penetrating way and positioned between the two exposure lamps, and is used for conveying a belt; and

the upper exposure plate and the lower exposure plate are distributed up and down, the lower exposure plate is fixedly connected with the main body and is suspended above the exposure platform, and the lower exposure plate is vertically movably connected with the main body.

2. The double-sided exposure machine of claim 1, wherein the upper exposure plate and the lower exposure plate are each configured as a glass plate, the exposure plates being used to affix a shutter.

3. The double-sided exposure machine of claim 1, wherein the main body is provided with supporting seats at both sides thereof, the supporting seats comprise a first supporting portion and a second supporting portion connected in an L-shape, the first supporting portion is connected to an inner wall of the main body and extends vertically, and the second supporting portion extends laterally toward opposite sides and is connected to a side portion of the lower exposure plate.

4. The double-sided exposure machine according to claim 1, further comprising a vertical adjusting mechanism, wherein the vertical adjusting mechanism comprises an adjusting motor, a conveyor belt, a transverse adjusting rod and two vertical adjusting rods, two ends of the transverse adjusting rod are respectively connected with one ends of the two vertical adjusting rods in a transmission manner, and the other ends of the two vertical adjusting rods are connected with the upper exposure plate in a transmission manner;

the adjusting motor is arranged on the main body, the conveyor belt is sleeved on the output shaft of the adjusting motor and the transverse adjusting rod at the same time, the adjusting motor runs and can drive the transverse adjusting rod to rotate, and the upper exposure plate is driven to vertically move through the two vertical adjusting rods.

5. The double-sided exposure machine of claim 4, wherein both ends of the transverse adjusting rod are provided with driving gears, one end of the vertical adjusting rod is provided with driven gears, and the driven gears of the two vertical adjusting rods are respectively meshed with the driving gears at both ends of the transverse adjusting rod;

the exposure machine further comprises a mounting frame, the upper exposure plate is mounted on the mounting frame, the mounting frame is provided with four support posts, the two support posts located on the same side are fixedly connected through a connecting plate, the main machine body is provided with a sliding rail extending vertically, the connecting plate is connected with the sliding rail in a sliding mode, and the vertical adjusting rod penetrates through the connecting plate and is connected with the connecting plate in a threaded mode.

6. The double-sided exposure machine of claim 1, further comprising a first deviation-correcting mechanism mounted to the exposure stage, the first deviation-correcting mechanism configured to adjust a conveying direction of the material web.

7. The double-sided exposure machine of claim 1, further comprising a second deviation correcting mechanism, wherein the exposure platform is movable relative to the main machine body, the second deviation correcting mechanism is mounted on the main machine body, and the second deviation correcting mechanism is used for driving the exposure platform to move relative to the main machine body so as to adjust the relative position of the material belt and the exposure platform.

8. The double-sided exposure machine of claim 1, further comprising a feed roller, wherein a surface of the feed roller is coated with a gel, and wherein the gel is configured to adhere to impurities on a surface of the material belt.

9. The double-sided exposure machine of claim 1, further comprising a take-up roller, wherein a surface of the take-up roller is provided with a plurality of vacuum suction holes for sucking the material tape.

10. The double-sided exposure machine of any one of claims 1-9, further comprising a cooling system, wherein a liquid channel is provided in the exposure lamp, and wherein the cooling system is in communication with the liquid channel.