CN220670801U - High-stability overload-resistant suspended differential pressure sensor structure - Google Patents
High-stability overload-resistant suspended differential pressure sensor structure Download PDFInfo
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- CN220670801U CN220670801U CN202322394980.5U CN202322394980U CN220670801U CN 220670801 U CN220670801 U CN 220670801U CN 202322394980 U CN202322394980 U CN 202322394980U CN 220670801 U CN220670801 U CN 220670801U
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- 239000003921 oil Substances 0.000 claims abstract description 68
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 16
- 239000000919 ceramic Substances 0.000 claims description 14
- 238000009530 blood pressure measurement Methods 0.000 claims description 10
- 238000003466 welding Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 6
- 229920002545 silicone oil Polymers 0.000 abstract description 5
- 238000011010 flushing procedure Methods 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000007774 longterm Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000005404 monopole Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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Abstract
The utility model relates to the technical field of differential pressure sensors, in particular to a high-stability overload-resistant suspended differential pressure sensor structure which comprises a threaded connection shell and an outer ring, wherein the outer ring is welded below the threaded connection shell, a negative pressure cavity body is welded on the left side of the lower part of the outer ring, a positive pressure cavity body is welded on the right side of the lower part of the outer ring, a measuring device is arranged in the outer ring, and a connecting device is arranged below the measuring device. When a differential pressure is applied to the negative pressure cavity measuring diaphragm and the positive pressure cavity measuring diaphragm, the pressure in the positive pressure cavity body is transmitted from the oil inlet of the positive pressure measuring oil way to the negative pressure cavity measuring diaphragm connected with the oil inlet of the negative pressure measuring oil way through internal silicone oil, at the moment, a Wheatstone bridge at the position of the single crystal silicon differential pressure chip matched with the central overload resisting diaphragm generates a voltage signal in direct proportion to the pressure when the pressure is deformed, namely, the physical quantity of the differential pressure signal is converted into a voltage signal in the same proportion, and the measurement is realized, so that the use effect is better.
Description
Technical Field
The utility model relates to the technical field of differential pressure sensors, in particular to a high-stability overload-resistant suspended differential pressure sensor structure.
Background
The suspended differential pressure sensor is the most commonly used capacitive sensor in measurement control occasions, the sensitivity of the differential capacitive sensor is doubled compared with that of a monopole type differential pressure sensor, the nonlinearity is greatly reduced, meanwhile, the influence of electrostatic attraction on measurement can be reduced, the error caused by environmental influence such as temperature can be effectively improved, and the differential pressure sensor has wide application in the aspects of small displacement, load and vibration measurement.
A floating differential capacitive sensor, such as the grant publication CN203037405U, includes two symmetrical half-cup components. The problem that the common electrode of the traditional differential capacitance sensor is connected with the metal shell of the sensor is solved, so that the traditional differential capacitance sensor realizes electrical isolation between the common electrode and the metal shell, and the anti-interference capability of the sensor is improved. However, in the suspended differential capacitance sensor, the stress of the differential pressure sensor chip, the thermal stability of the central diaphragm and the oil flushing quantity of the positive and negative pressure cavities are uneven, the long-term stability is poor, especially the tiny measuring ranges of 1kpa and 6kpa and the unidirectional overload are easy to damage, the overload resistance is poor or the overload is not reset after the overload, so that the use effect is not good.
Disclosure of Invention
The utility model aims to solve the problems that in the suspension differential capacitance sensor in the above-mentioned comparison patent, the stress of a differential pressure sensor chip, the thermal stability of a central diaphragm and the oil flushing quantity of a positive and negative pressure cavity are uneven, the long-term stability is poor, especially the tiny measuring ranges of 1kpa and 6kpa and unidirectional overload are easy to damage, the overload resistance is poor or the overload is not returned to zero after overload, so that the use effect is not good, and provides a high-stability overload-resistance suspension differential pressure sensor structure.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides a high stable anti overload suspended differential pressure sensor structure, includes threaded connection shell and outer loop, threaded connection shell's below welding has the outer loop, the below left side welding of outer loop has the negative pressure chamber body, the below right side welding of outer loop has the malleation chamber body, the internally mounted of outer loop has measuring device, connecting device is installed to measuring device's below.
Preferably, the measuring device comprises a ceramic filling ring, the outer wall of the ceramic filling ring is connected with the inner wall of the outer ring, a monocrystalline silicon differential pressure chip is connected in the ceramic filling ring, and a differential pressure sensor chip negative pressure measuring end and a differential pressure sensor chip positive pressure measuring end are respectively processed above and below the monocrystalline silicon differential pressure chip.
Preferably, the upper outer wall of the ceramic filling ring is fixedly connected with a combined differential pressure sensor tube seat, and the outer wall of the combined differential pressure sensor tube seat is connected with the inner wall of the outer ring.
Preferably, the connecting device comprises a central overload-resistant diaphragm, the left side and the right side of the central overload-resistant diaphragm are respectively connected with the negative pressure cavity body and the positive pressure cavity body, a negative pressure oil measuring way oil inlet hole and a positive pressure oil measuring way oil inlet hole are respectively arranged in the middle of the left side and the right side of the central overload-resistant diaphragm, and the negative pressure oil measuring way oil inlet hole and the positive pressure oil measuring way oil inlet hole are respectively arranged in the negative pressure cavity body and the positive pressure cavity body.
Preferably, a negative pressure cavity measuring diaphragm is arranged on the left side of the oil inlet hole of the negative pressure measuring oil way, and the right side of the negative pressure cavity measuring diaphragm is connected with the negative pressure cavity body.
Preferably, a positive pressure cavity measuring diaphragm is arranged on the right side of the oil inlet hole of the positive pressure measuring oil way, and the left side of the positive pressure cavity measuring diaphragm is connected with the positive pressure cavity body.
The utility model provides a high-stability overload-resistant suspended differential pressure sensor structure, which has the beneficial effects that: the combined differential pressure sensor tube seat of the low-expansion low-stress alloy 3J53 is adopted to achieve low-stress high stability of the monocrystalline silicon differential pressure chip, so that the high temperature stability and repeatability can be achieved through the measuring range of 1kpa to 250kpa, the oil flushing quantity in the positive pressure cavity body and the negative pressure cavity body can be kept consistent to achieve the temperature stability and consistency of two sides, high unidirectional overload and zero return after overload, when differential pressure is applied to the negative pressure cavity measuring diaphragm and the positive pressure cavity measuring diaphragm, the pressure in the positive pressure cavity body is transmitted from the positive pressure measuring oil way oil inlet hole to the negative pressure cavity measuring diaphragm connected with the negative pressure measuring oil way oil inlet hole through internal silicone oil, at the moment, the monocrystalline silicon differential pressure chip is matched with the Wheatstone bridge at the center anti-overload diaphragm to generate a voltage signal in proportion to the pressure, namely the physical quantity of the differential pressure signal is converted into a voltage signal in the same proportion, and measurement is achieved, and therefore the use effect is better.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a plan cross-sectional view of FIG. 1;
FIG. 3 is a schematic diagram of the combined differential pressure sensor tube seat, ceramic packing ring and single crystal silicon differential pressure chip of FIG. 2;
FIG. 4 is a schematic structural diagram of the negative pressure chamber body, the negative pressure chamber measuring diaphragm and the oil inlet of the negative pressure measuring oil path in FIG. 2;
fig. 5 is a schematic structural diagram of the positive pressure chamber body, the positive pressure chamber measurement diaphragm and the positive pressure measurement oil path oil inlet hole in fig. 2.
In the figure: 1. the device comprises a threaded connection shell, 2, an outer ring, 3, a measuring device, 301, a ceramic filling ring, 302, a monocrystalline silicon differential pressure chip, 303, a differential pressure sensor chip negative pressure measuring end, 304, a differential pressure sensor chip positive pressure measuring end, 4, a connecting device, 401, a central overload-resistant diaphragm, 402, a negative pressure measuring oil way oil inlet hole, 403, a positive pressure measuring oil way oil inlet hole, 4A1, a disc, 4A2, a base, 5, a negative pressure cavity body, 6, a positive pressure cavity body, 7, a combined differential pressure sensor tube seat, 8, a negative pressure cavity measuring diaphragm, 9 and a positive pressure cavity measuring diaphragm.
The specific embodiment is as follows:
the utility model is further described below with reference to the accompanying drawings:
example 1:
referring to fig. 1-5, in this embodiment, a high-stability overload-resistant suspended differential pressure sensor structure includes a threaded connection housing 1 and an outer ring 2, the outer ring 2 is welded below the threaded connection housing 1, a negative pressure cavity body 5 is connected below Zuo Cehan of the outer ring 2, a positive pressure cavity body 6 is welded on the right side below the outer ring 2, channels are processed in the negative pressure cavity body 5 and the positive pressure cavity body 6, silicone oil is injected into the channels, a measuring device 3 is installed in the interior of the outer ring 2, and a connecting device 4 is installed below the measuring device 3.
Referring to fig. 1-3, a measuring device 3 comprises a ceramic filling ring 301, a monocrystalline silicon differential pressure chip 302, a differential pressure sensor chip negative pressure measuring end 303 and a differential pressure sensor chip positive pressure measuring end 304, wherein the outer wall of the ceramic filling ring 301 is connected with the inner wall of an outer ring 2, the monocrystalline silicon differential pressure chip 302 is connected inside the ceramic filling ring 301, the differential pressure sensor chip negative pressure measuring end 303 and the differential pressure sensor chip positive pressure measuring end 304 are respectively processed above and below the monocrystalline silicon differential pressure chip 302, a combined differential pressure sensor tube seat 7 is fixedly connected to the upper outer wall of the ceramic filling ring 301, the outer wall of the combined differential pressure sensor tube seat 7 is connected with the inner wall of the outer ring 2, and the combined differential pressure sensor tube seat 7 adopts a low-expansion low-stress alloy 3J53;
the combined differential pressure sensor tube seat 7 adopting the low-expansion low-stress alloy 3J53 achieves low stress and high stability of the monocrystalline silicon differential pressure chip 302, so that the range of 1kpa to 250kpa can achieve extremely high temperature stability and repeatability, and the oil flushing quantity in the positive pressure cavity body 6 and the negative pressure cavity body 5 can be kept consistent to achieve both-side temperature stability and consistency, high unidirectional overload and zero return after overload.
Referring to fig. 1, 2, 4 and 5, the connecting device 4 includes a central overload-resistant diaphragm 401, a negative pressure measurement oil path oil inlet hole 402 and a positive pressure measurement oil path oil inlet hole 403, the left and right sides of the central overload-resistant diaphragm 401 are respectively connected with the negative pressure chamber body 5 and the positive pressure chamber body 6, the central overload-resistant diaphragm 401 intercepts the passages of the negative pressure chamber body 5 and the positive pressure chamber body 6, the middle of the left and right sides of the central overload-resistant diaphragm 401 is respectively provided with the negative pressure measurement oil path oil inlet hole 402 and the positive pressure measurement oil path oil inlet hole 403, the negative pressure measurement oil path oil inlet hole 402 and the positive pressure measurement oil path oil inlet hole 403 are respectively opened in the negative pressure chamber body 5 and the positive pressure chamber body 6, the left side of the negative pressure measurement oil path oil inlet hole 402 is provided with a negative pressure chamber measurement diaphragm 8, the right side of the negative pressure chamber measurement diaphragm 8 is connected with the negative pressure chamber body 5, the right side of the positive pressure measurement oil path oil inlet hole 403 is provided with a positive pressure chamber measurement diaphragm 9, and the left side of the positive pressure chamber measurement diaphragm 9 is connected with the positive pressure chamber body 6;
when a differential pressure is applied to the negative pressure cavity measuring diaphragm 8 and the positive pressure cavity measuring diaphragm 9, the pressure in the positive pressure cavity body 6 is transmitted from the positive pressure measuring oil way oil inlet hole 403 to the negative pressure cavity measuring diaphragm 8 connected with the negative pressure measuring oil way oil inlet hole 402 through internal silicone oil, at this time, the single crystal silicon differential pressure chip 302 is matched with the Wheatstone bridge at the center overload resisting diaphragm 401 to generate a voltage signal in direct proportion to the pressure when being deformed under pressure, namely, the physical quantity of the differential pressure signal is converted into a voltage signal in the same proportion, so that measurement is realized, and the use effect is better.
In this embodiment, when an operator needs to use the high-stability overload-resistant suspended differential pressure sensor structure, firstly, the combined differential pressure sensor tube seat 7 of the low-expansion low-stress alloy 3J53 is adopted to achieve low stress and high stability of the monocrystalline silicon differential pressure chip 302, so that the range 1kpa to 250kpa can achieve extremely high temperature stability and repeatability, the oil flushing quantity in the positive pressure cavity body 6 and the negative pressure cavity body 5 keeps consistent to achieve two-side temperature stability and consistency, high unidirectional overload and zero return after overload, when a differential pressure is applied to the negative pressure cavity measuring diaphragm 8 and the positive pressure cavity measuring diaphragm 9, the pressure in the positive pressure cavity body 6 is transmitted from the positive pressure measuring oil way oil inlet hole 403 to the negative pressure cavity measuring diaphragm 8 connected with the negative pressure measuring oil way oil inlet hole 402 through internal silicone oil, and at this time, the voltage signal in proportion to the pressure is generated by the pressure deformation of a wheatstone bridge at the center of the monocrystalline silicon differential pressure chip 302, that is the physical quantity of the differential pressure signal is converted into a voltage signal in the same proportion, so that the measurement is achieved, and thus the use effect is better.
Example 2:
referring to fig. 1, 2, 4 and 5, in this embodiment, the present utility model provides a technical solution: the connecting device 4 can also comprise a disc 4A1 and a base 4A2, wherein the middle of the inner part of the disc 4A1 is fixedly connected with the outer wall of the outer ring 2, the base 4A2 is connected below the disc 4A1 through 4 bolts in a threaded manner, and the inner wall of the base 4A2 is in clearance fit with the outer walls of the negative pressure cavity body 5 and the positive pressure cavity body 6 respectively;
the disc 4A1 may be disposed on the outer wall of the outer ring 2, and the base 4A2 may be connected to the lower portion of the disc 4A1 by bolts, so that the inner structure may be protected by the base 4 A2.
In this embodiment, when the operator needs to use the high-stability overload-resistant suspended differential pressure sensor structure, the disc 4A1 may be disposed on the outer wall of the outer ring 2, and the base 4A2 is connected below the disc 4A1 through bolts, so that the internal structure can be protected through the base 4 A2.
While the utility model has been shown and described with reference to a preferred embodiment, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the scope of the utility model.
Claims (6)
1. The utility model provides a high stable anti overload suspended differential pressure sensor structure, includes threaded connection shell (1) and outer loop (2), the below welding of threaded connection shell (1) has outer loop (2), its characterized in that: negative pressure cavity body (5) are welded on the left side below outer loop (2), positive pressure cavity body (6) are welded on the right side below outer loop (2), measuring device (3) are installed to the internally mounted of outer loop (2), connecting device (4) are installed to the below of measuring device (3).
2. The high stability overload-resistant suspended differential pressure sensor structure of claim 1, wherein: the measuring device (3) comprises a ceramic filling ring (301), the outer wall of the ceramic filling ring (301) is connected with the inner wall of the outer ring (2), a monocrystalline silicon differential pressure chip (302) is connected inside the ceramic filling ring (301), and a differential pressure sensor chip negative pressure measuring end (303) and a differential pressure sensor chip positive pressure measuring end (304) are respectively processed above and below the monocrystalline silicon differential pressure chip (302).
3. The high stability overload-resistant suspended differential pressure sensor structure of claim 2, wherein: the upper outer wall of the ceramic filling ring (301) is fixedly connected with a combined differential pressure sensor tube seat (7), and the outer wall of the combined differential pressure sensor tube seat (7) is connected with the inner wall of the outer ring (2).
4. The high stability overload-resistant suspended differential pressure sensor structure of claim 1, wherein: the connecting device (4) comprises a central overload-resistant diaphragm (401), the left side and the right side of the central overload-resistant diaphragm (401) are respectively connected with a negative pressure cavity body (5) and a positive pressure cavity body (6), a negative pressure oil measuring way oil inlet hole (402) and a positive pressure oil measuring way oil inlet hole (403) are respectively arranged in the middle of the left side and the right side of the central overload-resistant diaphragm (401), and the negative pressure oil measuring way oil inlet hole (402) and the positive pressure oil measuring way oil inlet hole (403) are respectively arranged inside the negative pressure cavity body (5) and the positive pressure cavity body (6).
5. The high stability overload resistant suspended differential pressure sensor architecture as claimed in claim 4, wherein: the left side of negative pressure measurement oil circuit inlet port (402) is installed negative pressure chamber and is measured diaphragm (8), and the right side of negative pressure chamber is measured diaphragm (8) and is connected with negative pressure chamber body (5).
6. The high stability overload resistant suspended differential pressure sensor structure of claim 5, wherein: the right side of the oil inlet hole (403) of the positive pressure measuring oil way is provided with a positive pressure cavity measuring diaphragm (9), and the left side of the positive pressure cavity measuring diaphragm (9) is connected with the positive pressure cavity body (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322394980.5U CN220670801U (en) | 2023-09-05 | 2023-09-05 | High-stability overload-resistant suspended differential pressure sensor structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322394980.5U CN220670801U (en) | 2023-09-05 | 2023-09-05 | High-stability overload-resistant suspended differential pressure sensor structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220670801U true CN220670801U (en) | 2024-03-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322394980.5U Active CN220670801U (en) | 2023-09-05 | 2023-09-05 | High-stability overload-resistant suspended differential pressure sensor structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220670801U (en) |
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2023
- 2023-09-05 CN CN202322394980.5U patent/CN220670801U/en active Active
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