CN220670802U - High-stability overload-resistant differential pressure sensor structure with suspension type symmetrical structure - Google Patents
High-stability overload-resistant differential pressure sensor structure with suspension type symmetrical structure Download PDFInfo
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- CN220670802U CN220670802U CN202322395138.3U CN202322395138U CN220670802U CN 220670802 U CN220670802 U CN 220670802U CN 202322395138 U CN202322395138 U CN 202322395138U CN 220670802 U CN220670802 U CN 220670802U
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- tube seat
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- 239000000725 suspension Substances 0.000 title claims abstract description 21
- 238000005245 sintering Methods 0.000 claims abstract description 24
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 13
- 239000000956 alloy Substances 0.000 claims abstract description 13
- 229910000833 kovar Inorganic materials 0.000 claims abstract description 10
- 239000000919 ceramic Substances 0.000 claims abstract description 5
- 238000003466 welding Methods 0.000 claims description 42
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 7
- 238000012856 packing Methods 0.000 claims description 2
- 238000011010 flushing procedure Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 239000003921 oil Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 229920002545 silicone oil Polymers 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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Abstract
The utility model relates to the technical field of differential pressure sensors, in particular to a high-stability overload-resistant differential pressure sensor structure with a suspension type symmetrical structure, which comprises a combined differential pressure sensor sintering tube seat, wherein a ceramic filling ring is arranged on the inner wall of the bottom of the combined differential pressure sensor sintering tube seat, the bottom of the combined differential pressure sensor sintering tube seat is connected with a kovar alloy gasket, the annual stability of the range from 1kpa to 6kpa of the differential pressure sensor can reach 0.1%, the annual stability of the range from 40kpa to 3MPa can reach 0.05%, and the unidirectional overload can reach 40MPa. The use of a suspension sensor can increase the measured medium temperature to 120 degrees. The sintering tube seat of the low-expansion combined differential pressure sensor is adopted to achieve low stress and high stability of the differential pressure sensor chip; the range of 1kpa to 250kpa adopts low expansion low stress alloy 3J53 to achieve extremely high temperature stability and repeatability; the special process is adopted to ensure that the oil flushing quantity in the positive and negative pressure cavities is consistent to achieve the stability and consistency of the temperatures at two sides.
Description
Technical Field
The utility model relates to the technical field of differential pressure sensors, in particular to a high-stability overload-resistant suspended symmetrical structure differential pressure sensor structure.
Background
Differential pressure sensors are widely used in many fields as basic pressure measurement and control field instruments. With the improvement of automation and refinement of the control engineering operation in China, new requirements are put forward on the measurement precision, the measurement stability, the measurement reliability and the like of the differential pressure sensor
For example, the patent publication CN217819158U discloses a high-stability differential pressure sensor, the above document is sealed by adopting a rubber ring between a chip component and a sensor matrix, the influence of welding stress on monocrystalline silicon wafers is reduced, the measurement accuracy of products is improved, the sensor can perform nondestructive transmission of pressure through silicone oil, the stability of the sensor is improved, the sensor is welded with a central diaphragm, the unilateral overload performance of the sensor can be improved, and the differential pressure sensor is suitable for complex working conditions, however, the differential pressure sensor structure in the document cannot solve the problems that the differential pressure sensor is poor in long-term stability, especially the micro range 1kpa and 6kpa and unidirectional overload are easy to damage, the main reasons of poor stability are the problem of the stress of the differential pressure sensor chip and the problem of heat stability of the central diaphragm, the problem of uneven oil flushing quantity of positive and negative pressure cavities, the problem of protecting diaphragm materials and the welding process are mainly the problem that the overload resistance is poor or non-zero after overload. And meanwhile, the high-temperature resistant medium is realized. The positive and negative pressure cavity adopts a symmetrical structure and a suspension type welding base, so that the oil flushing quantity is reduced, the production process is simplified, and the stability and the reliability are improved.
Disclosure of Invention
The utility model aims to solve the problems in the prior art, and provides a high-stability overload-resistant differential pressure sensor structure with a suspension type symmetrical structure.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides a high stable anti overload suspended type symmetrical structure differential pressure sensor structure, includes combination formula differential pressure sensor sintering tube seat, the bottom inner wall of combination formula differential pressure sensor sintering tube seat is provided with ceramic packing ring, combination formula differential pressure sensor sintering tube seat bottom is connected with kovar alloy gasket, the middle part of combination formula differential pressure sensor sintering tube seat is equipped with suspension cavity, the inside of kovar alloy gasket is equipped with monocrystalline silicon differential pressure chip, the outer wall of combination formula differential pressure sensor sintering tube seat is connected with the sensor welding outer loop, the bottom of sensor welding outer loop is fixed to link to each other with suspension type welding base, the outer wall of sensor welding outer loop is fixed to link to each other with the casing welding ring, the outer wall of casing welding ring is fixed to link to each other with threaded connection shell, suspension type welding base's bottom both sides are fixed to link to each other with malleation chamber body and negative pressure chamber body respectively.
Preferably, the outer wall of the positive pressure cavity body is fixedly connected with the positive pressure cavity measuring diaphragm.
Preferably, the outer wall of the negative pressure cavity body is fixedly connected with the negative pressure cavity measuring diaphragm.
Preferably, a thread groove is formed in the top of the outer wall of the threaded connection shell.
Preferably, the bottom ends of the positive pressure cavity body and the negative pressure cavity body are fixedly connected with the central overload-resistant membrane.
The utility model provides a high-stability overload-resistant suspended symmetrical structure differential pressure sensor structure, which has the beneficial effects that: the annual stability can reach 0.1% by measuring range from 1kpa to 6kpa through a differential pressure sensor, the annual stability can reach 0.05% by measuring range from 40kpa to 3MPa, and the unidirectional overload can reach 40MPa. The use of a suspension sensor can increase the measured medium temperature to 120 degrees. The sintering tube seat of the low-expansion combined differential pressure sensor is adopted to achieve low stress and high stability of the differential pressure sensor chip;
the range of 1kpa to 250kpa adopts low expansion low stress alloy 3J53 to achieve extremely high temperature stability and repeatability;
the special process is adopted to ensure that the oil flushing quantity in the positive and negative pressure cavities is consistent to achieve the stability and consistency of the temperatures at two sides. The problems of high unidirectional overload and zero return after overload are achieved by adopting the low-expansion low-stress alloy 3J 53. The suspension type welding base is adopted, and the installation stress of the clamping blocks is not affected during the installation. Meanwhile, the structure can resist medium high temperature, solves the problems of long-term stability, unidirectional overload and medium high temperature resistance of 120 ℃ of the differential pressure sensor, saves materials and reduces the labor cost of production by more than 30% compared with the prior structure by adopting a suspension type welding base and a laser welding process.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic diagram of a front view structure of the present utility model;
fig. 3 is a schematic view of a partial structure of the present utility model.
In the figure: 1. the combined differential pressure sensor sintering tube seat, 2, kovar alloy gaskets, 3, a suspension cavity, 4, a monocrystalline silicon differential pressure chip, 5, a rubber pad, 6, a ceramic filling ring, 7, a suspension welding base, 8, a shell welding ring, and 9, a sensor welding outer ring, 10, a threaded connection shell, 11, a positive pressure cavity body, 12, a negative pressure cavity measuring diaphragm, 13, a positive pressure cavity measuring diaphragm, 14, a negative pressure cavity body, 15, a thread groove, 16 and a central overload-resistant diaphragm.
Detailed Description
The utility model is further described below with reference to the accompanying drawings:
example 1:
referring to fig. 1-3: in the embodiment, the high-stability overload-resistant suspended symmetrical structure differential pressure sensor structure comprises a combined differential pressure sensor sintering tube seat 1, wherein a ceramic filling ring 6 is arranged on the inner wall of the bottom of the combined differential pressure sensor sintering tube seat 1, the bottom of the combined differential pressure sensor sintering tube seat 1 is connected with a kovar alloy gasket 2, and glue is coated on the combined differential pressure sensor sintering tube seat 1; then placing the kovar alloy gasket 2 on a sintering seat, welding firmly by a resistance welder, arranging a suspension cavity 3 in the middle of a combined differential pressure sensor sintering tube seat 1, arranging a monocrystalline silicon differential pressure chip 4 in the kovar alloy gasket 2, then coating the upper surface of the kovar alloy gasket 2, then placing the monocrystalline silicon differential pressure sensor chip 4, after the coating is dried, welding a gold wire to a designated position by a binding machine, connecting the outer wall of the combined differential pressure sensor sintering tube seat 1 with a sensor welding outer ring 9, fixedly connecting the bottom end of the sensor welding outer ring 9 with a suspension type welding base 7, fixedly connecting the outer wall of the sensor welding outer ring 9 with a shell welding ring 8, fixedly connecting the outer wall of the shell welding ring 8 with a threaded connection shell 10, fixedly connecting the two sides of the bottom end of the suspension type welding base 7 with a positive pressure cavity body 11 and a negative pressure cavity body 14 respectively, welding the combined differential pressure sensor sintering tube seat 1 welded with the monocrystalline silicon differential pressure chip 4 on a suspension type welding base 7, welding a sensor welding outer ring 9, then filling oil into a seal by using vacuumizing oil flushing equipment, finally welding a shell welding ring 8 and a threaded connection shell 10 to remove the outer wall of a positive pressure cavity body 11 and fixedly connect with a positive pressure cavity measuring diaphragm 13, fixedly connecting the outer wall of a negative pressure cavity body 14 with a negative pressure cavity measuring diaphragm 12, processing a thread groove 15 at the top of the outer wall of the threaded connection shell 10, fixedly connecting the bottom ends of the positive pressure cavity body 11 and the negative pressure cavity body 14 with a central overload resisting diaphragm 16, welding the negative pressure cavity measuring diaphragm 12 on the negative pressure cavity body 14, welding the positive pressure cavity measuring diaphragm 13 on the positive pressure cavity body 13, welding the positive pressure cavity 13 with the negative pressure cavity body 14 and the central overload resisting diaphragm 16 together, the floating type welding base 7 is welded on again.
Working principle:
when a differential pressure is applied to the negative pressure sensor and the positive pressure diaphragm, the pressure of the positive pressure cavity of the sensor is transmitted to the positive pressure measurement of the differential pressure sensor chip through internal silicone oil, the pressure of the negative pressure cavity of the sensor is transmitted to the negative pressure measurement of the differential pressure sensor chip through internal silicone oil, and the Wheatstone bridge in the differential pressure sensor chip generates a voltage signal in proportion to the pressure when the pressure is deformed, namely, the physical quantity of the differential pressure signal is converted into the voltage signal in the same proportion.
Example 2:
referring to fig. 1-3: in this embodiment, a high-stability overload-resistant suspended symmetrical structure differential pressure sensor structure, the top of the inner wall of the threaded connection housing 10 is fixedly connected with the rubber pad 5, and the stability of connection with an external structure is increased through the rubber pad 5.
While the utility model has been shown and described with reference to a preferred embodiment, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the scope of the utility model.
Claims (5)
1. The utility model provides a high stable anti overload suspended type symmetrical structure differential pressure sensor structure, includes combination formula differential pressure sensor sintering tube seat (1), its characterized in that: the utility model provides a ceramic packing ring (6) is provided with to the bottom inner wall of combination formula differential pressure sensor sintering tube seat (1), combination formula differential pressure sensor sintering tube seat (1) bottom is connected with kovar alloy gasket (2), the middle part of combination formula differential pressure sensor sintering tube seat (1) is equipped with suspension cavity (3), the inside of kovar alloy gasket (2) is equipped with monocrystalline silicon differential pressure chip (4), the outer wall of combination formula differential pressure sensor sintering tube seat (1) is connected with sensor welding outer loop (9), the bottom of sensor welding outer loop (9) is fixed to link to each other with suspension type welding base (7), the outer wall of sensor welding outer loop (9) is fixed to link to each other with casing welding ring (8), the outer wall of casing welding ring (8) is fixed to link to each other with threaded connection shell (10), the bottom both sides of suspension type welding base (7) are fixed to link to each other with positive pressure chamber body (11) and negative pressure chamber body (14) respectively.
2. The high stability overload resistant suspended symmetrical differential pressure sensor structure of claim 1, wherein: the outer wall of the positive pressure cavity body (11) is fixedly connected with the positive pressure cavity measuring diaphragm (13).
3. The high stability overload resistant suspended symmetrical differential pressure sensor structure of claim 1, wherein: the outer wall of the negative pressure cavity body (14) is fixedly connected with the negative pressure cavity measuring diaphragm (12).
4. The high stability overload resistant suspended symmetrical differential pressure sensor structure of claim 1, wherein: a thread groove (15) is formed in the top of the outer wall of the threaded connection shell (10).
5. The high stability overload resistant suspended symmetrical differential pressure sensor structure of claim 1, wherein: the bottom ends of the positive pressure cavity body (11) and the negative pressure cavity body (14) are fixedly connected with the central overload-resistant diaphragm (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322395138.3U CN220670802U (en) | 2023-09-05 | 2023-09-05 | High-stability overload-resistant differential pressure sensor structure with suspension type symmetrical structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322395138.3U CN220670802U (en) | 2023-09-05 | 2023-09-05 | High-stability overload-resistant differential pressure sensor structure with suspension type symmetrical structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220670802U true CN220670802U (en) | 2024-03-26 |
Family
ID=90342384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322395138.3U Active CN220670802U (en) | 2023-09-05 | 2023-09-05 | High-stability overload-resistant differential pressure sensor structure with suspension type symmetrical structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220670802U (en) |
-
2023
- 2023-09-05 CN CN202322395138.3U patent/CN220670802U/en active Active
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