CN220627749U - High-precision solution adding and supplementing device for texturing machine - Google Patents
High-precision solution adding and supplementing device for texturing machine Download PDFInfo
- Publication number
- CN220627749U CN220627749U CN202321880799.9U CN202321880799U CN220627749U CN 220627749 U CN220627749 U CN 220627749U CN 202321880799 U CN202321880799 U CN 202321880799U CN 220627749 U CN220627749 U CN 220627749U
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- cup type
- measuring cup
- type solvent
- liquid
- solution
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- 230000001502 supplementing effect Effects 0.000 title claims abstract description 29
- 239000002904 solvent Substances 0.000 claims abstract description 66
- 239000007788 liquid Substances 0.000 claims abstract description 62
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 14
- 239000010703 silicon Substances 0.000 claims abstract description 14
- 210000002268 wool Anatomy 0.000 claims abstract description 10
- 238000001514 detection method Methods 0.000 claims description 6
- 239000000243 solution Substances 0.000 description 49
- 239000000126 substance Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 210000004027 cell Anatomy 0.000 description 4
- 239000003814 drug Substances 0.000 description 4
- 210000005056 cell body Anatomy 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The utility model relates to the technical field of solar battery processing, and particularly discloses a high-precision solution adding and liquid supplementing device for a texturing machine, which comprises a tank body for accommodating a silicon wafer to be soaked, a measuring cup type solvent barrel suspended above the tank body and provided with scale marks on the surface, a miniature constant delivery pump communicated with the measuring cup type solvent barrel, and a controller electrically connected with the miniature constant delivery pump, wherein the capacity of the measuring cup type solvent barrel is smaller than the solution amount to be added or the liquid supplementing amount, the input end of the measuring cup type solvent barrel is connected with a solvent input pipeline, the output end of the measuring cup type solvent barrel is provided with a liquid drain pipeline for adding or supplementing the liquid to the tank body, the solvent input pipeline is provided with a liquid inlet electromagnetic valve electrically connected with the controller, and the liquid drain pipeline is provided with a liquid drain electromagnetic valve electrically connected with the controller. The high-precision solution adding and supplementing device is combined with the miniature quantitative pump through the measuring cup type solvent barrel, so that the solution is quickly and accurately added, the error of solution adding is reduced, and the solution adding precision and the wool making quality are improved.
Description
Technical Field
The utility model relates to the technical field of solar cell processing, in particular to a high-precision solution adding and supplementing device for a texturing machine.
Background
The texturing machine is equipment for processing a plurality of tiny pyramid structures on the surface of a silicon wafer in the production process of the solar cell, and is mainly used for the texturing corrosion and cleaning operation before the diffusion of the single-polysilicon solar cell and the polysilicon solar cell. At present, chemical liquid is adopted to soak the surface of a silicon wafer to produce a suede in the process of texturing the solar silicon wafer, when the suede is produced by soaking the chemical liquid, the silicon wafer and the chemical liquid react chemically, so that the chemical liquid is consumed, in addition, the silicon wafer is continuously bubbled when soaked in a tank, the chemical liquid is partially volatilized, and part of the chemical liquid is taken away when the silicon wafer is taken out. Therefore, accurate liquid replenishing is required (the process requirement needs to reach 1% precision), so that the concentration of the liquid in the tank is maintained within a certain range, and the quality of the suede on the surface of the silicon wafer is ensured. The liquid adding device of the conventional texturing machine in the market is used for measuring the added liquid medicine amount through a flow meter, and as the solar silicon wafer texturing liquid supply system is driven by a diaphragm pump at the far end, a PFA (perfluoralkony, fusible polytetrafluoroethylene) pipe is used as a liquid conveying pipe for conveying liquid medicine to the texturing machine, in actual work, the liquid flow rate in the liquid conveying pipe is non-uniform, and when the liquid medicine adding amount is measured through the flow meter, the error is larger, so that the liquid medicine adding precision and the silicon wafer texturing quality are affected.
Disclosure of Invention
In view of the above, it is desirable to provide a high-precision solution adding and replenishing device for a wool making machine that has high liquid feeding precision.
The utility model provides a high accuracy solution adds and liquid supplementing device for making up machine, includes the cell body that is used for acceping the silicon chip that waits to soak, suspension in cell body top and surface be equipped with graduated mark's graduated flask formula solvent drum, with the miniature constant delivery pump of graduated flask formula solvent drum intercommunication and with miniature constant delivery pump electric connection's controller, the capacity of graduated flask formula solvent drum is less than waiting to add solution volume or liquid supplementing volume, the input of graduated flask formula solvent drum is connected with the solvent input pipeline, and the output of graduated flask formula solvent drum is equipped with the fluid-discharge line to cell body liquid feeding or liquid supplementing, is equipped with the feed liquor solenoid valve with controller electric connection on the solvent input pipeline, is equipped with the fluid-discharge solenoid valve with controller electric connection on the fluid-discharge line.
In one embodiment, the ratio of the amount of solution to be added to the capacity of the graduated cup type solvent drum is an integer; the ratio of the liquid supplementing amount to the capacity of the measuring cup type solvent barrel is an integer.
In one embodiment, the ratio of the amount of solution to be added to the capacity of the graduated cup type solvent drum is a non-integer; the ratio of the liquid supplementing amount to the capacity of the measuring cup type solvent barrel is a non-integer.
In one embodiment, the controller is a PLC.
In one embodiment, the miniature metering pump is turned off when the liquid discharge pipe is communicated.
In one embodiment, the high-precision solution adding and replenishing device further comprises an exhaust pipeline communicated with the top of the measuring cup type solvent barrel.
In one embodiment, the exhaust pipe is provided with a detection sensor electrically connected with the controller.
In one embodiment, the detection sensor is a gas sensor.
The high-precision solution adding and supplementing device for the wool making machine is characterized in that the measuring cup type solvent barrel and the miniature quantitative pump are arranged, the measuring cup type solvent barrel is filled to quickly inject solution into the tank body in the process of adding or supplementing the solution, the residual small amount of solution is injected into the tank body by the miniature quantitative pump, the measuring cup type solvent barrel is fixed in capacity, the numerical value is accurate, after the measuring cup type solvent barrel is added or supplemented with the solution, only the miniature quantitative pump is controlled to supplement the residual solution into the tank body, the miniature quantitative pump is accurately added, the measuring cup type solvent barrel is combined with the miniature quantitative pump, the quick and accurate solution adding is realized, the error of adding the solution is reduced, and the liquid adding precision and the wool making quality are improved.
Drawings
Fig. 1 is a schematic structural diagram of a high-precision solution adding and replenishing device for a pile machine according to an embodiment of the present utility model.
Detailed Description
In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.
Referring to fig. 1, the utility model discloses a high-precision solution adding and supplementing device 10 for a wool making machine, which has high liquid adding precision, is quick in adding and supplementing time and accurate in measurement, can meet the requirement of adding and supplementing liquid of the wool making machine, and has the precision controlled within 1% and the adding time controlled within 30 s. Specifically, the high-precision solution adding and replenishing device comprises a tank body 100 for accommodating a silicon wafer to be soaked, a measuring cup type solvent barrel 200 suspended above the tank body 100 and provided with scale marks on the surface, a miniature metering pump 300 communicated with the measuring cup type solvent barrel 200, and a controller (not shown) electrically connected with the miniature metering pump 300. Preferably, the controller is a PLC, and the controller can be a control device for independently controlling the high-precision solution adding and supplementing device to work or a control device of the wool making machine. In this embodiment, the capacity of the measuring cup type solvent barrel 200 is smaller than the solution amount to be added or the solution supplementing amount, the input end of the measuring cup type solvent barrel 200 is connected with a solvent input pipeline 210, the output end of the measuring cup type solvent barrel 200 is provided with a liquid discharge pipeline 220 for adding or supplementing liquid to the tank body 100, the solvent input pipeline 210 is provided with a liquid inlet electromagnetic valve 230 electrically connected with a controller, and the liquid discharge pipeline 220 is provided with a liquid discharge electromagnetic valve 240 electrically connected with the controller. Further preferably, the micro dosing pump 300 is turned off when the drain pipe 220 is penetrated, i.e., the micro dosing pump 300 is not operated when the liquid is fed to the measuring cup type solvent barrel 200, and only one of the micro dosing pump 300 and the measuring cup type solvent barrel 200 is fed to the tank body 100 at the same time, so as to control the liquid feeding amount in the tank body 100.
In this embodiment, the capacity of the measuring cup type solvent barrel 200 is set to be smaller than the solution to be added or the solution replenishing amount, so that the solution is only required to be filled in the measuring cup type solvent barrel 200 and injected into the tank body 100 in each solution adding or solution replenishing process. It should be noted that, the high-precision solution adding and replenishing device of the present embodiment includes two working conditions when adding solution to the tank body 100, namely, only the measuring cup type solvent barrel 200 is needed to add solution in the solution adding operation; secondly, the liquid is filled into the tank body 100 by the combination of the measuring cup type solvent barrel 200 and the miniature quantitative pump 300 in the liquid filling operation. In one embodiment, the volume ratio of the solution to be added to the graduated cup type solvent barrel 200 is an integer; the ratio of the liquid replenishment amount to the capacity of the measuring cup type solvent barrel 200 is an integer, in which case only the measuring cup type solvent barrel 200 is required to be charged. Specifically, the controller controls the micro dosing pump 300 and the drain solenoid valve 240 to be closed, and simultaneously controls the liquid inlet solenoid valve 230 to be opened, and when the solution in the equivalent cup type solvent barrel 200 is filled, the controller controls the liquid inlet solenoid valve 230 and simultaneously controls the drain solenoid valve 240 to be opened so as to add liquid into the tank body 100. And repeating the above operation for multiple times according to the solution amount to be added or the liquid supplementing amount until all the liquid adding or liquid supplementing operation is completed.
In another embodiment, the ratio of the amount of solution to be added to the capacity of the graduated cup type solvent drum 200 is a non-integer; the ratio of the liquid replenishment amount to the capacity of the measuring cup type solvent barrel 200 is a non-integer, and in this case, the liquid needs to be filled into the tank body 100 by the cooperation of the measuring cup type solvent barrel 200 and the micro metering pump 300. Specifically, the amount of the replenishing solution to be added to the tank body 100=the number of times of the filling of the volume x of the measuring cup type solvent tank 200+the amount of the injection of the micro metering pump 300, for example, the amount of the replenishing solution to be added to the tank body 100 is 230ml, and the volume of the measuring cup type solvent tank 200 is 50ml, so that the tank body 100 is filled with the measuring cup type solvent tank 200 four times and filled with 50ml x4 times, and the total amount of 200ml of solution is pumped into the tank body 100 by the micro metering pump 300, and the remaining 30ml of solution is just needed.
In one embodiment, the high-precision solution adding and replenishing device further comprises an exhaust pipeline 250 communicated with the top of the measuring cup type solvent barrel 200, wherein the exhaust pipeline 250 is connected with an external fan and used for exhausting gas generated by soaking the silicon wafer in the solution in the tank body 100. Further, the exhaust pipe 250 is provided with a detection sensor 260 electrically connected to the controller. Preferably, the detection sensor 260 is a gas sensor for detecting the volume of gas flowing through the exhaust conduit 250, converting the gas volume fraction into a corresponding electrical signal and transmitting it to a controller for the operator to derive the electrical signal for further processing.
By arranging the measuring cup type solvent barrel 200 and the miniature quantitative pump 300, the high-precision solution adding and supplementing device 10 for the wool making machine is implemented, in the process of adding or supplementing the solution, the solution is firstly filled into the tank body 100 through the measuring cup type solvent barrel 200, and the rest small amount of solution is injected into the tank body 100 through the miniature quantitative pump 300, and as the capacity of the measuring cup type solvent barrel 200 is fixed, the numerical value is accurate, after the measuring cup type solvent barrel 200 is added or supplemented with the solution, only the miniature quantitative pump 300 is controlled to supplement the rest solution into the tank body 100, the miniature quantitative pump 300 is accurately added, the measuring cup type solvent barrel 200 is combined with the miniature quantitative pump 300, so that the quick and accurate solution adding is realized, the error of the solution adding is reduced, and the liquid adding precision and the wool making quality are improved.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.
Claims (8)
1. The high-precision solution adding and supplementing device for the wool making machine is characterized by comprising a tank body for accommodating a silicon wafer to be soaked, a measuring cup type solvent barrel suspended above the tank body and provided with scale marks on the surface, a miniature quantitative pump communicated with the measuring cup type solvent barrel, and a controller electrically connected with the miniature quantitative pump, wherein the capacity of the measuring cup type solvent barrel is smaller than the solution amount to be added or the solution supplementing amount, the input end of the measuring cup type solvent barrel is connected with a solvent input pipeline, the output end of the measuring cup type solvent barrel is provided with a liquid drain pipeline for adding or supplementing the liquid to the tank body, the solvent input pipeline is provided with a liquid inlet electromagnetic valve electrically connected with the controller, and the liquid drain pipeline is provided with a liquid drain electromagnetic valve electrically connected with the controller.
2. The high-precision solution adding and replenishing device according to claim 1, wherein a capacity ratio of an amount of solution to be added to a measuring cup type solvent barrel is an integer; the ratio of the liquid supplementing amount to the capacity of the measuring cup type solvent barrel is an integer.
3. The high-precision solution adding and replenishing device according to claim 1, wherein a capacity ratio of an amount of solution to be added to a measuring cup type solvent barrel is a non-integer; the ratio of the liquid supplementing amount to the capacity of the measuring cup type solvent barrel is a non-integer.
4. A high precision solution addition and replenishment device according to claim 2 or 3 wherein the controller is a PLC.
5. The high-precision solution adding and replenishing device according to claim 4, wherein the miniature metering pump is closed when the liquid discharge pipe is penetrated.
6. The high precision solution adding and replenishing apparatus of claim 5, further comprising an exhaust conduit in communication with a top of the measuring cup type solvent barrel.
7. The high-precision solution adding and replenishing device according to claim 6, wherein a detection sensor electrically connected with the controller is arranged on the exhaust pipeline.
8. The high-precision solution adding and replenishing device according to claim 7, wherein the detection sensor is a gas sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202321880799.9U CN220627749U (en) | 2023-07-18 | 2023-07-18 | High-precision solution adding and supplementing device for texturing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202321880799.9U CN220627749U (en) | 2023-07-18 | 2023-07-18 | High-precision solution adding and supplementing device for texturing machine |
Publications (1)
Publication Number | Publication Date |
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CN220627749U true CN220627749U (en) | 2024-03-19 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202321880799.9U Active CN220627749U (en) | 2023-07-18 | 2023-07-18 | High-precision solution adding and supplementing device for texturing machine |
Country Status (1)
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2023
- 2023-07-18 CN CN202321880799.9U patent/CN220627749U/en active Active
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