CN220611590U - Cleaning device of vacuum pump - Google Patents

Abstract

The utility model discloses a cleaning device of a vacuum pump, which is detachably arranged on the vacuum pump and comprises a separation piece and a containing cavity; the isolating piece is used for being connected with the air inlet of the vacuum pump in a sealing way, and is provided with a medium inlet structure; the accommodating cavity is used for being in sealing connection with one side of the vacuum pump, the inner cavity of the accommodating cavity is communicated with the inner cavity of the vacuum pump, a medium discharge port is formed in the accommodating cavity, and a cleaning medium channel is formed between the medium inlet structure and the medium discharge port. According to the utility model, the isolating piece and the accommodating cavity are respectively connected with the vacuum pump in a sealing way, and the cleaning medium is introduced into the vacuum pump through the medium introducing structure, so that the inner cavity of the vacuum pump can be effectively cleaned, the cleaning cost is saved, and the service life of the vacuum pump is prolonged.

Description

Cleaning device of vacuum pump

Technical Field

The utility model relates to the technical field of vacuum pumps, in particular to a cleaning device of a vacuum pump.

Background

Along with the continuous updating of the technical field of semiconductors and the gradual shrinking of the manufacturing size of integrated circuits, the requirements of the process procedures on various process equipment are also higher and higher; during the process, some devices in the process equipment often need to be kept at a low pressure, such as a reaction chamber, and conventional methods use vacuum pumps to evacuate these devices to be evacuated to achieve internal pressure control of the devices to be evacuated. However, some of the process residues in the device to be vacuumized also adhere to the inside of the vacuum pump along with the vacuumization process, thereby causing defects of the product.

In the prior art, the interior of a vacuum pump is cleaned, and the conventional method is to detach the vacuum pump from process equipment and then to clean the interior of the vacuum pump by outward transportation; however, the cleaning mode can lead to overlong maintenance time and cleaning period of equipment, also can shorten the actual service life of a vacuum pump, and the continuous accumulation of dirt can also cause the increase of the later cleaning process and cleaning difficulty, so that the daily maintenance is very inconvenient.

Disclosure of Invention

Aiming at the problems in the prior art, the utility model provides the cleaning device for the vacuum pump, which has the advantages of simple structure, effective cleaning of dirt in the inner cavity of the vacuum pump, no need of disassembling the vacuum pump, convenient and easy cleaning and cleaning cost saving.

The utility model provides a cleaning device of a vacuum pump, which comprises a separator and a containing cavity;

the isolating piece is used for being connected with the air inlet of the vacuum pump in a sealing way, and is provided with a medium inlet structure;

the accommodating cavity is used for being in sealing connection with one side of the vacuum pump, an inner cavity of the accommodating cavity is communicated with an inner cavity of the vacuum pump, a medium discharge port is formed in the accommodating cavity, and a cleaning medium channel is formed between the medium inlet structure and the medium discharge port.

Further, the medium inlet structure seals the vacuum pump inner cavity in a closed state, and the vacuum pump inner cavity can be communicated with the medium inlet device through the medium inlet structure.

Further, the medium introducing structure includes a plurality of air bowl sealing parts, the cleaning medium flowing to the bearing of the vacuum pump through at least one of the plurality of air bowl sealing parts, and the cleaning medium flowing to the impeller of the vacuum pump through at least one of the plurality of air bowl sealing parts.

Further, the plurality of air bowl sealing parts are uniformly arranged at intervals.

Further, an air inlet of the vacuum pump is provided with a device connecting piece for fixedly connecting with a device to be vacuumized; the spacer includes a sealed connection that is matingly connectable with the device connection.

Further, the spacer further comprises a spacer portion, and the sealing connection portion is an upper vertical structure fixedly connected to the spacer portion.

Further, the outer diameter of the sealing connection is smaller than the outer diameter of the barrier.

Further, the spacer further comprises a handle fixedly connected with the barrier portion.

Further, the vacuum pump is provided with a connecting port for connecting the accommodating cavity, the accommodating cavity comprises an opening end and a discharging end which are oppositely arranged, the opening end can be in sealing connection with the connecting port, and the medium discharging port is arranged on the discharging end.

Further, an air inlet of the vacuum pump is provided with a device connecting piece fixedly connected with the device to be vacuumized, and the isolating piece can extend into the air inlet of the vacuum pump through the connecting port, and a sealing connecting part of the isolating piece is abutted with the device connecting piece.

Further, an air inlet of the vacuum pump is provided with a device connecting piece fixedly connected with the device to be vacuumized, the accommodating cavity is provided with a spacer through inlet, the spacer through inlet is provided with a sealing cover body capable of being opened and closed, and the spacer can extend into the air inlet of the vacuum pump through the spacer through inlet until a sealing connecting part of the spacer is abutted with the device connecting piece.

The implementation of the utility model has the following beneficial effects:

1. according to the utility model, the isolating piece with a simple structure and the accommodating cavity are respectively connected with the inner cavity of the vacuum pump in a sealing way, so that a cleaning medium channel is formed among the isolating piece, the inner cavity of the vacuum pump and the accommodating cavity, and cleaning medium is introduced into the vacuum pump through the medium introducing structure of the isolating piece, so that dirt in the inner cavity of the vacuum pump can be effectively cleaned, and the daily maintenance quality of the vacuum pump is improved; meanwhile, the vacuum pump is not required to be disassembled and transported outwards, the on-line cleaning is convenient and easy to implement, the maintenance time and the cleaning period of the vacuum pump and process equipment are greatly shortened, the cleaning and daily maintenance cost is saved, and the service life of the vacuum pump is prolonged.

2. Through the cleaning medium of at least one of a plurality of gas bowl sealing parts can flow to the bearing or the impeller of the vacuum pump in a targeted manner, the bearing or the impeller can be cleaned in a targeted manner, the cleaning degree is further improved, the cleaning efficiency is improved, and the cleaning time is saved.

3. The sealing connecting part adopts an upper vertical structure fixed on the baffle part, so that the sealing connecting part is convenient to stably connect with the device connecting piece on one hand, and the sealing property between the baffle part and the air inlet of the vacuum pump is improved; on the other hand, the position of the isolation piece can be effectively positioned, the isolation piece is convenient to position and install at the air inlet of the vacuum pump, and the installation convenience is improved.

4. Be provided with the connector that can expose on the vacuum pump, perhaps hold and be equipped with the spacer access opening that can expose on the cavity, the spacer can stretch into the vacuum pump inside through this connector or spacer access opening and install, easy dismounting is laborsaving, reduces the clean degree of difficulty, also is favorable to shortening clean time.

Drawings

In order to more clearly illustrate the technical solution of the present utility model, the following description will briefly explain the drawings used in the embodiments, in which like elements are denoted by like reference numerals. It is evident that the drawings in the following description are only some embodiments of the present utility model and that other drawings may be obtained from these drawings without inventive effort for a person of ordinary skill in the art.

FIG. 1 is a schematic diagram of an assembly structure of a cleaning device and a vacuum pump according to the present utility model;

FIG. 2 is a schematic view of a spacer according to the present utility model;

fig. 3 is a simplified cross-sectional view of a partial structure of a vacuum pump chamber and a cleaning device.

Wherein, the reference numerals in the figures correspond to: 1-spacer, 11-medium inlet structure, 110-air bowl sealing part, 12-sealing connection part, 13-spacer, 14-handle, 2-containing cavity, 21-medium discharge port, 22-discharge end, 23-connection structure, 24-avoidance structure, 3-vacuum pump, 31-bearing, 32-impeller, 33-device connection piece, 34-connection port.

Detailed Description

In the following, the technical solutions in the embodiments of the present utility model will be clearly and completely described with reference to the drawings in the embodiments of the present utility model, and it should be noted that the azimuth or positional relationships indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", etc. are based on the azimuth or positional relationships shown in the drawings, only for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the referred device or structure must have a specific azimuth, be configured and operated in a specific azimuth, and therefore should not be construed as limiting the present utility model; also, the described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

To the problem that the clearance is taken too long and the clearance is difficult with the vacuum pump dismantlement outward movement in prior art, this embodiment provides a cleaning device of vacuum pump, can carry out online disassembly-free to vacuum pump 3 and clean, and this cleaning device can dismantle the setting on vacuum pump 3, can install the cleaning work on vacuum pump 3 during the cleaning, can dismantle from vacuum pump 3 after the cleaning finishes, does not influence vacuum pump 3's evacuation performance, and is clean convenient laborsaving, and is consuming time short.

Specifically, as shown in fig. 1, the cleaning device includes a spacer 1 and a housing chamber 2; the vacuum pump 3 comprises an air inlet, the air inlet is connected with a device to be vacuumized, and a device connecting piece 33 used for being fixedly connected with the device to be vacuumized is arranged on the air inlet, so that the vacuum pump 3 is tightly communicated with the device to be vacuumized through the device connecting piece 33, and the effective control of the internal pressure of the device to be vacuumized is realized when the vacuum pump 3 works; the spacer 1 is used for being connected with an air inlet of the vacuum pump 3 in a sealing way so as to isolate the inner cavity of the vacuum pump 3 from a device to be vacuumized during cleaning, and the inner cavity of the vacuum pump 3 is cleaned in a targeted way.

Specifically, as shown in fig. 1, the spacer 1 is provided with a medium inlet structure 11, the medium inlet structure is an openable structure, and in a closed state, the medium inlet structure 11 can seal the inner cavity of the vacuum pump 3, so that the inner cavity of the vacuum pump 3 is isolated from a device to be vacuumized or the outside, and the tightness of the spacer 1 is improved; under the communication state, through this medium lets in structure 11, vacuum pump 3 inner chamber can be with medium lets in the device intercommunication to make the medium lets in the device and carry cleaning medium to vacuum pump 3 inner chamber through medium lets in structure 11 and clean, clean swiftly convenient.

Specifically, the medium inlet structure 11 is connected with the medium inlet device, wherein the medium inlet device comprises a medium storage device and a connecting pipeline, the medium storage device stores cleaning medium, one end of the connecting pipeline is communicated with the medium storage device, the other end of the connecting pipeline is connected with the medium inlet structure 11, so that the medium inlet structure 11 is in a communicating state, the inner cavity of the vacuum pump 3 is communicated with the medium storage device through the medium inlet structure 11, and the cleaning medium can be stably conveyed to the inner cavity of the vacuum pump 3 for cleaning; optionally, the cleaning medium includes any one of a cleaning gas and a liquid cleaning agent; preferably, the cleaning medium is cleaning gas, the cleaning gas has good sweeping effect on the inner cavity of the vacuum pump 3, and the cleaning medium cannot be remained in the vacuum pump 3, so that the cleaning degree is greatly improved; more preferably, the cleaning medium is a high pressure gas having a pressure of 60psi to 120psi, it being understood that the pressure may be selected to any point value of 60psi to 120psi, and illustratively, the pressure of the high pressure gas is 60psi,70psi,90psi,100psi,120psi, etc.; so, high-pressure gas can high-speed undershoot after the medium lets in structure 11 lets in to can be by vacuum pump 3 bottom rebound when high-pressure gas flows to the bottom, high-pressure gas can further the reverse undershoot, promotes the clean sufficiency of vacuum pump 2 inner chamber greatly.

Specifically, as shown in fig. 2, the medium introducing structure 11 includes at least one air bowl sealing part 110, and under the condition that no external force is applied, the air bowl connecting part 110 automatically maintains a closed state, so that the whole isolator 1 can be assisted to effectively seal the air inlet of the vacuum pump 3; the air bowl sealing part 110 is connected with the medium inlet device, so that the air bowl sealing part 110 can stably and reliably continuously input cleaning medium into the vacuum pump 3 in a communicated state, and the cleaning degree of the interior of the vacuum pump 3 is improved; in a preferred embodiment, the air bowl sealing part 110 is a leather bowl, which has good sealing performance in a closed state, is beneficial to improving the inflow stability of the cleaning medium in a communicating state, improves the stability of the cleaning process, and has good durability.

Optionally, the medium inlet structure 11 comprises an air bowl sealing part 110, avoiding reducing the structural strength of the spacer 1; still optionally, the medium introducing structure 11 includes a plurality of air bowl sealing parts 110, so as to promote the flow of the cleaning medium, greatly promote the cleaning degree of the vacuum pump 3, and avoid cleaning failure caused by blockage of part of the air bowl sealing parts 110, so that the flexibility and reliability are good; for example, as shown in FIG. 2, the media access structure 11 includes 9 air bowl seals 110; furthermore, in an alternative embodiment, at least one of the plurality of air bowl sealing parts 110 may be selected to communicate with the medium inlet device, while the air bowl sealing part 110 not communicating with the medium inlet device remains in a closed state, so as to save cleaning medium, on the premise of meeting the cleaning requirement.

Specifically, as shown in fig. 2, the plurality of air bowl sealing portions 110 are uniformly arranged at intervals, that is, in the same direction, the intervals between two adjacent air bowl sealing portions 110 are equal, which is favorable for improving the uniformity of the flow of the cleaning medium into the inner cavity of the vacuum pump 3, improving the cleaning uniformity and greatly improving the cleaning degree.

Specifically, as shown in fig. 3, in an alternative embodiment, the cleaning medium flowing through at least one of the plurality of air bowl sealing parts 110 to the bearing 31 of the vacuum pump 3, to clean the bearing 31 in a targeted manner, is advantageous in that the cleaning degree of the bearing 31 is improved; in another alternative embodiment, the cleaning medium flowing through at least one of the plurality of air bowl sealing parts 110 to the impeller 32 of the vacuum pump 3, so as to purposefully clean the impeller 32, thereby facilitating the improvement of the cleaning degree of the impeller 32; preferably, the cleaning medium flowing through at least one of the plurality of air bowl sealing parts 110 flows to the bearing 31 of the vacuum pump 3, and the cleaning medium flowing through at least one of the plurality of air bowl sealing parts 110 flows to the impeller 32 of the vacuum pump 3, so that the condition that the flow speed of the cleaning medium flowing into the bearing 31 is weakened and cannot reach the impeller 32 for effective cleaning is avoided, the flowing range of the cleaning medium in the inner cavity of the vacuum pump 3 is enlarged, the cleaning of the bearing 31, the impeller 32 and other parts in the vacuum pump 3 is considered, and the cleaning efficiency and the cleaning degree are greatly improved.

Specifically, the device connecting piece 33 is fixedly connected to the air inlet, as shown in fig. 1, the isolation piece 1 comprises a sealing connecting portion 12, the sealing connecting portion 12 can be in matched connection with the device connecting piece 33, the matching degree of the sealing connecting portion 12 and the device connecting piece 33 is high, the sealing tightness between the isolation piece 1 and the device connecting piece 33 is greatly improved, the cleaning medium is prevented from leaking in the cleaning process, and the reliability is good.

Specifically, as shown in fig. 2, the spacer 1 further includes a blocking portion 13, the seal connection portion 12 is an upper vertical structure fixedly connected to the blocking portion 13, on one hand, the upper vertical structure is highly matched with the inner side surface of the device connection member 33, so that the seal connection portion 12 is conveniently and tightly connected with the device connection member 33, the connection stability is good, no gap exists between the seal connection portion and the device connection member, and the tightness between the spacer 1 and the air inlet of the vacuum pump 3 is improved; on the other hand, the upper vertical structure can effectively position the relative position of the isolating piece 1 and the air inlet, so that the isolating piece 1 is convenient to position and install at the air inlet of the vacuum pump 3, and the installation convenience is improved.

Specifically, the sealing connection portion 12 is an upper vertical ring structure disposed on the barrier portion 13, and the outer diameter of the sealing connection portion 12 is smaller than the outer diameter of the barrier portion 13; further, the outer diameter of the baffle part 13 is equal to or larger than the diameter of the air inlet of the vacuum pump 3, that is, the outer diameter of the baffle part 13 is equal to or larger than the inner diameter of the device connector 33, when the spacer 1 is installed at the air inlet, the edge of the baffle part 13 can be abutted with the air inlet towards the side wall of the inner cavity of the vacuum pump 3, meanwhile, the sealing connection part 12 of the upper vertical structure can be abutted with the inner side surface of the device connector 33 in the air inlet, and the sealing performance between the spacer 1 and the air inlet and between the device connector 33 is greatly improved.

In an alternative embodiment, the outer diameter of the sealing connection part 12 is smaller than or equal to the diameter of the air inlet of the vacuum pump 3, that is, the outer diameter of the sealing connection part 12 is smaller than or equal to the inner diameter of the device connection part 33, so that the installation is convenient and the positioning is quick; in another alternative embodiment, the outer diameter of the sealing connection part 12 is larger than the diameter of the air inlet of the vacuum pump 3, namely, the outer diameter of the sealing connection part 12 is larger than the inner diameter of the device connection part 33, and the sealing connection part 12 and the device connection part 33 are in interference fit, so that the positioning is convenient, the connection convenience and the connection reliability are improved, and the tightness is improved; in other alternative embodiments, the outer peripheral surface of the sealing connection portion 12 is further provided with a sealing ring, one side of the sealing ring can be in interference fit with the sealing connection portion 12, and the other side of the sealing ring can be in interference fit with the device connection member 33, so that the sealing performance is further improved.

In an alternative embodiment, a clamping structure is arranged between the sealing connection part 12 and the device connection piece 31, and the clamping structure is used for firmly clamping the sealing connection part 12 and the device connection piece 31 so as to further improve the connection reliability between the isolation piece 1 and the air inlet of the vacuum pump 3 and avoid the isolation piece 1 from falling off accidentally; the clamping structure comprises a clamping protrusion and a clamping groove, optionally, the clamping protrusion is arranged on the inner wall of the device connecting piece 31, and the clamping groove is arranged on the outer side surface of the sealing connecting part 12; still alternatively, the clamping protrusion is disposed on the outer side surface of the sealing connection portion 12, and the clamping groove is disposed on the inner wall of the device connection member 31, so that the arrangement is flexible and convenient, and the clamping is firm.

Specifically, as shown in fig. 1, the accommodating cavity 2 is used for being connected with one side of the vacuum pump 3 in a sealing manner, the vacuum pump 3 is provided with a connecting port 34 for connecting the accommodating cavity 2, the connecting port 34 is a closed end when the vacuum pump 3 is normally vacuumized, the connecting port 34 is exposed during cleaning and is used for being connected with the accommodating cavity 2 in a sealing manner, then the inner cavity of the accommodating cavity 2 is communicated with the inner cavity of the vacuum pump 3 through the connecting port 34, during cleaning, the accommodating cavity 2 can temporarily store dirt such as residues cleaned out of the inner cavity of the vacuum pump 3, and the like, and after cleaning is finished, the accommodating cavity 2 is detached for centralized treatment of the dirt.

Optionally, the accommodating cavity 2 is arranged at one side of the top of the vacuum pump 3, so that the isolation piece 1 is conveniently installed through the connection port 34, when the cleaning medium is high-pressure gas, the high-pressure gas is firstly downwards flushed and then upwards flushed in the inner cavity of the vacuum pump 3, and the accommodating cavity 2 is positioned at the tail end of the cleaning medium channel, so that stains can be reliably blown out, and the cleaning smoothness and the cleaning reliability are improved; still alternatively, the accommodating cavity 2 is disposed on a sidewall of the air outlet of the vacuum pump 3, so that the cleaning medium channel penetrates through the vacuumizing channel, and cleaning sufficiency of the inner cavity of the vacuum pump 3 is improved.

Specifically, as shown in fig. 1, the accommodating cavity 2 is provided with a medium discharge port 21, the medium discharge port 21 is used for discharging cleaning medium, a cleaning medium channel is formed between the medium inlet structure 11 and the medium discharge port 21 on the vacuum pump 3, the cleaning medium channel penetrates through the inner cavity of the vacuum pump 3, the interior of the vacuum pump 3 is effectively cleaned, and in the cleaning process, some dirt can be discharged from the medium discharge port 21 along with the cleaning medium, so that a large amount of accumulation of the dirt in the accommodating cavity 2 is reduced, and the cleaning effect is prevented from being influenced; in an alternative embodiment, the medium discharge port is communicated with the outside, and can be optionally connected with a waste treatment device through a pipeline so as to further treat dirt, thereby avoiding polluting the external environment and protecting the environment.

Specifically, corresponding to the connection port 34 of the vacuum pump 3, as shown in fig. 1, the accommodating cavity 2 includes an opening end and a discharge end 22 which are relatively arranged, wherein the opening end can be in sealing connection with the connection port 34, so that the inner cavity of the vacuum pump 3 is communicated with the interior of the accommodating cavity 2, the medium discharge port 21 is opened on the discharge end 22, that is, the medium discharge port 21 is relatively arranged with the connection port 34 of the vacuum pump 3, so that the cleaning medium flows from the opening end towards the discharge end 22, the uniformity and the sufficiency of the flow of the cleaning medium are improved, and the cleaning effect is improved.

Specifically, as shown in fig. 1, at least one group of connection structures 23 are arranged on the side wall of the opening end of the accommodating cavity 2, the connection structures 23 comprise a first mounting opening, a second mounting opening and a fastener, wherein the first mounting opening is arranged on the side wall of the connecting opening 34 of the vacuum pump 3, the second mounting opening is arranged on the side wall of the opening end, the first mounting opening and the second mounting opening are of a penetrating structure, the first mounting opening and the second mounting opening are correspondingly arranged and are used for the fastener to penetrate through, the accommodating cavity 2 and the vacuum pump 3 are in fastening connection, and the connection reliability is good.

Specifically, be equipped with at least one on the lateral wall that holds cavity 2 and dodge structure 24, this dodge structure 24 and connection structure 23 correspond the setting, and dodge structure 24 is by holding the structure that the limit wall of cavity 2 is sunken to inside for expose connection structure 23, promote the convenience when connection structure 23 is fixed.

Specifically, in an alternative embodiment, the spacer 1 can extend into the air inlet of the vacuum pump 3 through the connection port 34, until the sealing connection portion 12 of the spacer 1 abuts against the device connection member 33, and then the accommodating cavity 2 is in sealing connection with the connection port 34 of the vacuum pump 3, so that the assembly is convenient, and the whole online cleaning process is simplified.

Specifically, in another alternative embodiment, the accommodating cavity 2 is provided with a spacer access port, an openable sealing cover body is arranged at the spacer access port, the width of the spacer access port or the sealing cover body is larger than or equal to the outer diameter of the baffle part 13 of the spacer 1, the spacer 1 can extend into the air inlet of the vacuum pump 3 through the spacer access port, and the sealing connection part 12 of the spacer 1 is abutted with the device connection part 33, so that the assembly convenience is improved; optionally, the separator access opening is arranged on any side wall of the accommodating cavity 2, and the arrangement position is flexible; preferably, the sealing cover body is arranged at the discharge end 22, the medium discharge port 21 is optionally arranged on the sealing cover body, the width of the accommodating cavity body 2 is larger than the outer diameter of the baffle part 13 in the isolation member 1, the height of the accommodating cavity body 2 is not limited, the occupied space of the accommodating cavity body 2 can be reduced, other devices on the process equipment can be effectively avoided, and the application range of the cleaning device is enlarged.

Specifically, as shown in fig. 2, the spacer 1 further includes a handle 14, the handle 14 is fixedly connected with the barrier portion 13, and when in installation, the handle 14 can be held to extend the spacer 1 into the vacuum pump 3, so that the convenience of the spacer 1 installation is improved.

Specific examples of the present utility model are described below based on the above-described specific embodiments.

Example 1

The present embodiment provides a cleaning device for a vacuum pump, which is detachably disposed with the vacuum pump, as shown in fig. 1-2, and includes a spacer 1 and a housing cavity 2, wherein the vacuum pump 3 is a vertical turbo molecular pump, and includes an air inlet at the top and a connection port 34 at one side of the top, the air inlet is provided with a device connection member 33 for fixedly connecting with a device to be vacuumized, the air inlet with the device connection member 33 is in sealing connection with the spacer, the connection port 34 is in sealing connection with the housing cavity 2, and before the connection port 34 is connected with the housing cavity 2, the spacer 1 can extend into the cavity of the vacuum pump 3 through the connection port 34, and reach the air inlet from the inside to abut against the device connection member 33.

Specifically, as shown in fig. 1, the spacer 1 is provided with a medium inlet structure 11, the medium inlet structure 11 can seal the inner cavity of the vacuum pump 3 in a closed state, and in a communicating state, the inner cavity of the vacuum pump 3 can be used for introducing cleaning gas through the medium inlet structure, so that the cleaning is quick and convenient; in this embodiment, as shown in fig. 2, the medium introducing structure 11 includes nine air bowl sealing parts 110 arranged at uniform intervals, wherein one air bowl sealing part 110 is disposed above the bearing 31 of the vacuum pump 3, and the cleaning gas passing through the air bowl sealing part 110 can flow to the bearing 31 to perform targeted cleaning on the bearing 31; the other eight air bowl sealing parts 110 are arranged above the impeller 32 of the vacuum pump 3, so that the cleaning gas passing through the eight air bowl sealing parts 110 can flow to the impeller 32 for cleaning, and the cleaning sufficiency is improved.

Specifically, the spacer 1 includes a sealing connection portion 12 and a blocking portion 13, the sealing connection portion 12 is an upper vertical ring structure fixed on the blocking portion 13, and the outer diameter of the sealing connection portion 12 is smaller than the outer diameter of the blocking portion 13, so that when the spacer 1 is in sealing connection with the device connection member 33, the sealing connection portion 12 is in matching connection with the device connection member 33, and the sealing connection portion 12 has the effects of positioning and enhancing sealing.

Specifically, as shown in fig. 2, the spacer 1 further includes a handle 14 fixedly connected to the barrier portion 13, and when in installation, the handle 14 can be held to extend the spacer 1 into the connection port 34, thereby improving the installation convenience.

Specifically, the accommodating cavity 2 includes an opening end and a discharge end 22 disposed opposite to each other, wherein the opening end is adapted to be correspondingly connected to the connection port 34, and the discharge end 22 is provided with a medium discharge port 21 for facilitating the discharge of the cleaning gas.

Specifically, four groups of connection structures 23 are arranged between the opening end and the connection port 34, the connection structures 23 comprise a first installation port formed in the side wall of the connection port 34 of the vacuum pump 3, a second installation port formed in the side wall of the opening end, and a fastener, and the fastener can penetrate through the first installation port and the second installation port, so that the accommodating cavity 2 is in fastening connection with the vacuum pump 3, and meanwhile, the opening end is matched with the connection port 34 to seal between the inner cavity of the accommodating cavity 2 and the inner cavity of the vacuum pump 3.

Specifically, four sets of avoidance structures 24 are arranged on the side wall of the accommodating cavity 2, the avoidance structures 24 are structures recessed inwards from the side wall of the accommodating cavity 2, and each set of avoidance structures 24 corresponds to one set of connection structures 23, so that the connection structures 23 are arranged in an aligned manner.

The handling and workflow of the cleaning device will be described below in connection with this embodiment.

Firstly, when the vacuum pump 3 works normally, an air inlet of the vacuum pump 3 is connected with a device to be vacuumized through a device connecting piece 33, so that the inside of the vacuum pump 3 is communicated with the device to be vacuumized; the connection port 34 of the vacuum pump 3 for connecting with the accommodating cavity 2 is a closed end and isolated from the external environment; the vacuum pump 3 further includes an air outlet that communicates with the inside of the vacuum pump 3 to stably evacuate.

When the vacuum pump is installed, the device to be vacuumized of the process equipment is opened, namely in an atmospheric state, the closed end of the vacuum pump 3 is detached to expose the connecting port 34 of the vacuum pump 3, the handle 14 of the isolation piece 1 is held, the isolation piece 1 extends into the inner cavity of the vacuum pump 3 from the exposed connecting port 34 to reach the air inlet of the vacuum pump 3, the isolation piece 1 is lifted upwards to be in contact with the sealing connecting part 12 of the isolation piece 1 and the device connecting part 33, and the upper vertical ring structure of the sealing connecting part 12 plays a role in positioning and sealing; and the opening end of the accommodating cavity 2 is connected with a connecting port 34 of the vacuum pump 3 in an aligned manner, and the inside of the accommodating cavity 2 is communicated with the inside of the vacuum pump 3 after sealing.

The air outlet of the vacuum pump 3 can be closed when the cleaning device is installed, and can be closed when the cleaning device is cleaned, so that the whole inner cavity of the vacuum pump 3 is in an isolated state, and the cleaning sufficiency and the cleaning stability are conveniently improved; during cleaning, nine air bowl sealing parts 110 arranged on the isolating piece 1 are respectively connected with a medium inlet device through interfaces, a connecting pipeline in the medium inlet device passes through a device to be vacuumized in an atmosphere breaking state and is connected with an external medium storage device, so that cleaning gas is conveyed into the vacuum pump 3 through the air bowl sealing parts 110 to clean the interior of the vacuum pump 3, and the pressure of the cleaning gas is 60psi; the cleaning gas passing through one gas bowl sealing part 110 flows to the bearing 31 of the vacuum pump 3, the cleaning gas passing through the other eight gas bowl sealing parts 110 flows to the impeller 32 of the vacuum pump 3, the high-pressure cleaning gas integrally downwards rushes through the inner cavity of the vacuum pump 3 and is rebounded by the bottom of the vacuum pump 3, flows upwards, fully cleans the inner cavity of the vacuum pump 3, and the cleaned gas flows towards the direction of the accommodating cavity 2 and is discharged through the medium discharge port 21, so that cleaning is realized; after cleaning, the accommodating cavity 2 is removed, the handle 14 is held to remove the partition 1 from the air inlet and remove the partition from the connecting port 34, and the connecting port 34 is closed again, so that the whole structure of the vacuum pump 3 can be restored and reused for normal vacuumizing operation.

Example 2

The difference between this embodiment and embodiment 1 is that four air bowl sealing portions 110 are provided on the spacer 1, the four air bowl sealing portions 110 are provided at even intervals, each air bowl sealing portion 110 is provided above a corresponding position of the impeller 32, flows to different areas of the impeller 32 in the vacuum pump 3 through the air bowl sealing portions 110, and can further flow to the position of the bearing 31 in the vacuum pump 3, thereby realizing sufficient cleaning.

Example 3

The difference between this embodiment and embodiment 1 is that the housing chamber 2 is provided with a separator access port, the separator access port is provided with a sealing cover body capable of opening and closing, the sealing cover body is provided with a discharge end 22, and the medium discharge port 21 is provided on the sealing cover body, the width of the sealing cover body is larger than the outer diameter of the baffle portion 13 in the separator 1, the separator 1 can extend into the air inlet of the vacuum pump 3 through the separator access port, and the sealing connection portion 12 of the separator 1 abuts against the device connection member 33, so that the assembly is convenient.

While the utility model has been described with respect to certain embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the utility model, and it is intended to cover the utility model as defined by the appended claims.

Claims (11)

1. A cleaning device of a vacuum pump, which is detachably arranged on a vacuum pump (3), and is characterized by comprising a spacer (1) and a containing cavity (2);

the isolating piece (1) is used for being connected with the air inlet of the vacuum pump (3) in a sealing way, and the isolating piece (1) is provided with a medium inlet structure (11);

the accommodating cavity (2) is used for being in sealing connection with one side of the vacuum pump (3), an inner cavity of the accommodating cavity (2) is communicated with the inner cavity of the vacuum pump (3), a medium discharge port (21) is formed in the accommodating cavity (2), and a cleaning medium channel is formed between the medium inlet structure (11) and the medium discharge port (21).

2. A cleaning device according to claim 1, characterized in that the medium inlet structure (11) seals the vacuum pump (3) lumen in a closed state, through which medium inlet structure (11) the vacuum pump (3) lumen can communicate with the medium inlet device.

3. The cleaning device according to claim 1, wherein the medium inlet structure (11) comprises a plurality of air bowl seals (110), the cleaning medium flowing through at least one of the plurality of air bowl seals (110) to the bearing (31) of the vacuum pump (3), the cleaning medium flowing through at least one of the plurality of air bowl seals (110) to the impeller (32) of the vacuum pump (3).

4. A cleaning device according to claim 3, wherein the plurality of air bowl seals (110) are evenly spaced.

5. Cleaning device according to any one of claims 1-4, the air inlet of the vacuum pump (3) being provided with a device connection (33) for a fixed connection with a device to be evacuated; the spacer (1) is characterized in that the spacer comprises a sealing connection (12), and the sealing connection (12) can be connected with the device connection (33) in a matching way.

6. The cleaning device according to claim 5, wherein the spacer (1) further comprises a barrier portion (13), and the sealing connection portion (12) is an upper upright structure fixedly connected to the barrier portion (13).

7. A cleaning device according to claim 6, characterized in that the outer diameter of the sealing connection (12) is smaller than the outer diameter of the barrier (13).

8. A cleaning device according to claim 6, characterized in that the spacer (1) further comprises a handle (14), the handle (14) being fixedly connected with the barrier (13).

9. Cleaning device according to any one of claims 1-4, wherein the vacuum pump (3) is provided with a connection opening (34) for connecting the receiving chamber (2), characterized in that the receiving chamber (2) comprises an oppositely arranged open end and a discharge end (22), which open end can be connected with the connection opening (34) in a sealing manner, and that the medium discharge opening (21) is provided on the discharge end (22).

10. Cleaning device according to claim 9, the air inlet of the vacuum pump (3) being provided with a device connection (33) for a fixed connection with a device to be evacuated, characterized in that the partition (1) can be inserted into the air inlet of the vacuum pump (3) through the connection opening (34), the sealing connection (12) to the partition (1) abutting the device connection (33).

11. Cleaning device according to any one of claims 1-4, the air inlet of the vacuum pump (3) being provided with a device connection piece (33) for fixed connection with a device to be evacuated, characterized in that the receiving chamber (2) is provided with a spacer access opening, which is provided with an openable sealing cover, the spacer (1) can extend into the air inlet of the vacuum pump (3) through the spacer access opening, and the sealing connection (12) to the spacer (1) abuts against the device connection piece (33).