CN220216051U - SEM sample stage floating dust purging device - Google Patents
SEM sample stage floating dust purging device Download PDFInfo
- Publication number
- CN220216051U CN220216051U CN202321786869.4U CN202321786869U CN220216051U CN 220216051 U CN220216051 U CN 220216051U CN 202321786869 U CN202321786869 U CN 202321786869U CN 220216051 U CN220216051 U CN 220216051U
- Authority
- CN
- China
- Prior art keywords
- sem sample
- sample stage
- air
- positioning
- shell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000428 dust Substances 0.000 title claims abstract description 61
- 238000007667 floating Methods 0.000 title claims abstract description 35
- 238000010926 purge Methods 0.000 title claims description 17
- 238000007664 blowing Methods 0.000 claims abstract description 36
- 239000011261 inert gas Substances 0.000 claims abstract description 18
- 238000001914 filtration Methods 0.000 claims abstract description 11
- 238000000605 extraction Methods 0.000 claims abstract description 9
- 150000002500 ions Chemical class 0.000 claims description 15
- 239000004744 fabric Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 150000001450 anions Chemical class 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 7
- 239000007789 gas Substances 0.000 description 11
- 238000005086 pumping Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000010408 sweeping Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Abstract
The utility model discloses an SEM sample stage floating dust blowing device which comprises a shell with a closed inner cavity, wherein a positioning seat is arranged in the shell, a positioning mechanism for positioning an SEM sample stage is arranged on the positioning seat, a blowing pipe is arranged at the top of the shell, and the lower end of the blowing pipe faces to the positioning seat; the upper end of the air blowing pipe is connected with an air blowing mechanism through a first pipeline, and is connected with a negative ion inert gas supply mechanism through a second pipeline, and valves are arranged on the first pipeline and the second pipeline; the bottom of casing is provided with air extraction mechanism, air extraction mechanism is connected with floating dust filtering mechanism. According to the utility model, the SEM sample table is purged in the closed cavity, so that floating dust is prevented from entering the outside air, and the SEM sample table is purged by adopting two kinds of air successively, so that the dust removal effect is good.
Description
Technical Field
The utility model belongs to the field of dust removal equipment, and particularly relates to a floating dust sweeping device of an SEM (scanning electron microscope) sample table.
Background
The SEM sample stage (namely the scanning electron microscope sample positioning stage) is used for bearing an SEM sample, and when scanning is performed, the SEM sample is placed on the SEM sample stage, then the SEM sample stage is placed in a cabin door of the scanning electron microscope, and then the SEM sample stage is observed by using the electron microscope. There is often floating dust on the SEM stage, and after the floating dust enters the electron microscope, the electron microscope is damaged, so before scanning, the floating dust on the surface of the SEM stage needs to be removed. At present, floating dust is generally removed by wiping or adopting a compressed air blowing mode, and the problems of poor dust removal effect and influence on air quality caused by the fact that the floating dust enters the air are existed.
Disclosure of Invention
The utility model aims to provide a floating dust blowing device for an SEM sample table, which has good dust removal effect and prevents dust from escaping into the air.
The purpose of the utility model is realized in the following way: the floating dust purging device for the SEM sample table comprises a shell with a closed inner cavity, wherein a positioning seat is arranged in the shell, a positioning mechanism for positioning the SEM sample table is arranged on the positioning seat, an air blowing pipe is arranged at the top of the shell, and the lower end of the air blowing pipe faces the positioning seat; the upper end of the air blowing pipe is connected with an air blowing mechanism through a first pipeline, and is connected with a negative ion inert gas supply mechanism through a second pipeline, and valves are arranged on the first pipeline and the second pipeline; the bottom of casing is provided with air extraction mechanism, air extraction mechanism is connected with floating dust filtering mechanism.
Further, the top of the shell is a detachable top cover, and the air blowing pipe is arranged on the top cover.
Further, a sealing gasket is arranged between the top cover and the shell.
Further, the positioning mechanism comprises a horizontal positioning sheet, and a vertical positioning hole is formed in the positioning sheet.
Further, the air blowing pipe is provided with a plurality of air outlets.
Further, the blowing mechanism is a compressed air storage container.
Further, the negative ion inert gas supply mechanism is a negative ion inert gas storage container.
Further, the air extraction mechanism is a vacuum pump.
Further, the floating dust filtering mechanism is a dust removing cloth bag.
The beneficial effects of the utility model are as follows: during dust removal, the SEM sample table is fixed on the positioning seat, air is blown to the SEM sample table by utilizing the blowing mechanism, most of floating dust is removed, then negative ion inert gas is blown to the SEM sample table, stubborn floating dust and chips are further removed, and the two gases are blown successively, so that the removal effect of the floating dust can be ensured. The air in the shell is continuously pumped out together with the floating dust by the air pumping mechanism, and the floating dust is filtered by the floating dust filtering mechanism, so that the floating dust can be effectively prevented from being dissipated into the air.
Drawings
FIG. 1 is a schematic diagram of a floating dust purge apparatus for an SEM sample stage of the present utility model.
Fig. 2 is a schematic diagram of an SEM sample stage.
Detailed Description
The utility model will be further described with reference to the drawings and examples.
As shown in fig. 1, the floating dust purging device for the SEM sample stage comprises a shell 1 with a closed inner cavity, wherein a positioning seat 2 is arranged in the shell 1, a positioning mechanism 3 for positioning the SEM sample stage is arranged on the positioning seat 2, a gas blowing pipe 4 is arranged at the top of the shell 1, and the lower end of the gas blowing pipe 4 faces to the positioning seat 2; the upper end of the air blowing pipe 4 is connected with an air blowing mechanism 5 through a first pipeline 7, and is connected with an anion inert gas supply mechanism 6 through a second pipeline 8, and valves 13 are arranged on the first pipeline 7 and the second pipeline 8; the bottom of the shell 1 is provided with an air extraction mechanism 9, and the air extraction mechanism 9 is connected with a floating dust filtering mechanism 10.
Wherein, the shell 1 can be a plastic shell or a metal shell, and the cavity inside the shell can be sealed, so that floating dust is prevented from being dissipated into the outside air when the floating dust is purged. The housing 1 may be cylindrical or rectangular. To facilitate the handling of the SEM sample stage, the housing 1 comprises a base and a top cover 11 on top of the base, the top cover 11 being detachably mounted on the base. During purging, the top cover 11 can be opened, the SEM sample stage is placed in the base, and then the top cover 11 is closed, so that the inside of the shell 1 can be kept closed. In order to improve the sealing property between the top cover 11 and the base, a gasket 12 is provided between the top cover 11 and the housing 1, and the gasket 12 may be a rubber gasket or the like. The blow pipe 4 is provided on the top cover 11. In addition, a door that can be opened and closed may be provided on the side wall of the housing 1, and the door may be opened when the SEM sample stage is taken and placed.
The positioning seat 2 and the positioning mechanism 3 are used for positioning the SEM sample table and preventing the SEM sample table from moving when being purged, so that the purging effect is ensured. The conventional SEM sample stage is shown in fig. 2, and comprises a disc and a positioning shaft positioned at one side of the disc, and according to the structural characteristics of the SEM sample stage, the positioning mechanism 3 of the utility model adopts a horizontal positioning plate, and the positioning plate is fixed on the positioning seat 2, specifically, can be fixed by a screw or can be fixed by welding. The locating plate is provided with a vertical locating hole 14. The diameter of the positioning hole 14 is matched with the diameter of the positioning shaft of the SEM sample stage, so that the positioning shaft of the SEM sample stage can be stably inserted into the positioning hole 14, and the SEM sample stage is supported by the positioning plate. In the dust removal process, the positioning shaft of the SEM sample stage is inserted into the positioning hole 14. By adopting the positioning mode, the SEM sample stage can be quickly fixed, and meanwhile, the SEM sample stage can be conveniently taken down.
The air blowing pipe 4 is used for blowing air to the upper surface of the SEM sample stage, so that floating dust is blown off. The air blowing pipe 4 is provided with a plurality of air outlets, and the air blowing range can cover the upper surface of the SEM sample table more comprehensively, so that the dust removal effect is ensured.
The blowing mechanism 5 is used for carrying air to the blowing pipe 4, can adopt air pump etc. in order to provide clean air, and the blowing mechanism 5 adopts compressed air storage container, and compressed air storage container can be gas bomb, gas holder etc. inside stores the compressed air after filtering, and this compressed air is cleaner than outside air, is favorable to improving the sweeping effect. During purging, the valve 13 on the first pipeline 7 is opened, and the compressed air in the compressed air storage container can automatically enter the air blowing pipe 4 and be blown to the SEM
A sample stage. When the compressed air is required to be stopped from being fed into the air blowing pipe 4, the valve 13 on the first pipeline 7 is closed.
The compressed air can blow away most dust on the surface of the SEM sample table, but a small amount of stubborn dust is difficult to remove, so after the compressed air is adopted to blow for a period of time, the compressed air is stopped being introduced, and the negative ion inert gas is introduced instead, so that the negative ion inert gas can adsorb the dust, and the residual stubborn dust is taken out. The negative ion inert gas supply mechanism 6 is used for providing negative ion inert gas, and can adopt a negative ion inert gas storage container, wherein the negative ion inert gas storage container stores compressed negative ion inert gas, and when the negative ion inert gas storage container is used, the negative ion inert gas can be introduced into the gas blowing pipe 4 by opening the valve 13 on the second pipeline 8.
The first pipeline 7 and the second pipeline 8 are both flexible pipes, and the valve 13 is an electromagnetic valve.
In the purging process, floating dust on an SEM sample table enters gas in the shell 1, and the air pressure in the shell 1 is increased, in order to prevent dust from escaping from the shell 1 to the outside air, the bottom of the shell 1 is provided with an air pumping mechanism 9, the air pumping mechanism 9 is used for pumping out the gas in the shell 1 together with the dust and conveying the gas to a floating dust filtering mechanism 10, and the floating dust filtering mechanism 10 filters the dust in the gas and then empties the gas. The air extracting mechanism 9 specifically adopts a vacuum pump. The floating dust filtering mechanism 10 is preferably a dust removing cloth bag.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (9)
- SEM sample stage floating dust sweeps device, its characterized in that: the SEM sample stage positioning device comprises a shell (1) with a closed inner cavity, wherein a positioning seat (2) is arranged in the shell (1), a positioning mechanism (3) for positioning an SEM sample stage is arranged on the positioning seat (2), an air blowing pipe (4) is arranged at the top of the shell (1), and the lower end of the air blowing pipe (4) faces the positioning seat (2); the upper end of the air blowing pipe (4) is connected with an air blowing mechanism (5) through a first pipeline (7), and is connected with an anion inert gas supply mechanism (6) through a second pipeline (8), and valves (13) are arranged on the first pipeline (7) and the second pipeline (8); the bottom of casing (1) is provided with air extraction mechanism (9), air extraction mechanism (9) are connected with floating dust filtering mechanism (10).
- 2. The SEM sample stage dust purge apparatus according to claim 1, wherein: the top of the shell (1) is a detachable top cover (11), and the air blowing pipe (4) is arranged on the top cover (11).
- 3. The SEM sample stage dust purge apparatus according to claim 2, wherein: a sealing gasket (12) is arranged between the top cover (11) and the shell (1).
- 4. The SEM sample stage dust purge apparatus according to claim 1, wherein: the positioning mechanism (3) comprises a horizontal positioning sheet, and a vertical positioning hole (14) is formed in the positioning sheet.
- 5. The SEM sample stage dust purge apparatus according to claim 1, wherein: the air blowing pipe (4) is provided with a plurality of air outlets.
- 6. The SEM sample stage dust purge apparatus according to claim 1, wherein: the blowing mechanism (5) is a compressed air storage container.
- 7. The SEM sample stage dust purge apparatus according to claim 1, wherein: the negative ion inert gas supply mechanism (6) is a negative ion inert gas storage container.
- 8. The SEM sample stage dust purge apparatus according to claim 1, wherein: the air suction mechanism (9) is a vacuum pump.
- 9. The SEM sample stage dust purge apparatus according to claim 1, wherein: the floating dust filtering mechanism (10) is a dust removing cloth bag.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321786869.4U CN220216051U (en) | 2023-07-10 | 2023-07-10 | SEM sample stage floating dust purging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321786869.4U CN220216051U (en) | 2023-07-10 | 2023-07-10 | SEM sample stage floating dust purging device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220216051U true CN220216051U (en) | 2023-12-22 |
Family
ID=89172762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321786869.4U Active CN220216051U (en) | 2023-07-10 | 2023-07-10 | SEM sample stage floating dust purging device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220216051U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117549351A (en) * | 2024-01-11 | 2024-02-13 | 诺宸智能装备(常州)有限公司 | Robot testing device |
-
2023
- 2023-07-10 CN CN202321786869.4U patent/CN220216051U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117549351A (en) * | 2024-01-11 | 2024-02-13 | 诺宸智能装备(常州)有限公司 | Robot testing device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN220216051U (en) | SEM sample stage floating dust purging device | |
| US7314068B2 (en) | Apparatus for replacing gas in storage container and method for replacing gas therewith | |
| CN211515422U (en) | Plastic bottle cap cleaning device | |
| CN214261083U (en) | Filtering tank | |
| US20200367712A1 (en) | Filter cassette | |
| CN214160673U (en) | Surface cleaning device for precise electronic parts | |
| CN217780118U (en) | Recovery mechanism based on powder spraying developing device | |
| CN209173655U (en) | A kind of pesticide synthesis dust removal system for workshop | |
| CN210701470U (en) | Purging and purifying device and production line | |
| CN209790987U (en) | Residual liquid recovery device | |
| CN212859057U (en) | Spray paint polishing water curtain cabinet | |
| CN208145581U (en) | Filter cleaner mechanisms | |
| CN211374214U (en) | Pollutant collecting device for chemical pollution detection | |
| CN219209308U (en) | Filter and filtering gas tank thereof | |
| CN109693313B (en) | Mortar tank with automatic dust collection function | |
| CN216259733U (en) | Dust remover ash discharging device for long-distance conveying | |
| CN214577712U (en) | Energy-saving vacuum pump for producing environment-friendly water treatment agent | |
| CN220611590U (en) | Cleaning device of vacuum pump | |
| CN211799451U (en) | Automatic dust removal and recovery device | |
| CN215625305U (en) | Dust removal system for negative-pressure vacuum feeding | |
| CN213912873U (en) | Briquette production tailing recycling and cleaning equipment | |
| CN215754260U (en) | Improved ton bag | |
| CN213316591U (en) | Semi-closed nitrogen purging device | |
| CN214132167U (en) | Magnetic filter capable of continuously working | |
| CN217454569U (en) | Engineering plastic suction machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |