CN2205963Y - Absolute amplitude sensor device - Google Patents

Absolute amplitude sensor device Download PDF

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CN2205963Y
CN2205963Y CN 94217820 CN94217820U CN2205963Y CN 2205963 Y CN2205963 Y CN 2205963Y CN 94217820 CN94217820 CN 94217820 CN 94217820 U CN94217820 U CN 94217820U CN 2205963 Y CN2205963 Y CN 2205963Y
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inertial mass
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苏立
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Abstract

The utility model creates and relates to an absolute amplitude sensor, which is applied to the technical field of the vibration measurements of geophysical exploration, earthquake, construction, highway, bridge and transportation tools. In the background technology, the displacement of a vibrating body or the measure of amplitude requires that a displacement sensor is fixed on a quiescent reference point which is near the vibrating body, but which is difficult to realize in practical use. The utility model has the technical proposal that the displacement sensor of current vortex or the displacement sensor of capacitance is caused to be combined with a vibrator, and the output signal of the absolute amplitude sensor is caused to be in direct proportion with the value of amplitude of the measured vibrating body through the design, which realizes that the absolute amplitude sensor is directly fixed on the vibrating body to measure the value of the amplitude without the quiescent reference point. The utility model causes the measure for the amplitude of the vibrating body to be simple, practical, convenient and exact.

Description

Absolute amplitude sensor device
The invention relates to a kind of absolute type amplitude sensor device; Be applied to the vibration monitoring technical field on physical prospecting, earthquake, building, highway, bridge, means of transport and the main equipment; Can be in order to the vibration amplitude of monitoring any direction.
In seismic monitoring with when aligning the vibration monitoring of under steam vehicle, boats and ships and aircraft, be impossible obtain point of fixity in principle, for another ground, building pile foundation and itself have the main equipment of vibration source, also vibrate owing to its self-vibration power makes ground as steam turbine, steam turbine, generator etc. thereupon, so be difficult to search out permanent datum near ground, the vibration signal of measuring like this is obviously inaccurate, or is mingled with the vibration interference on the reference point.For example common current vortex amplitude sensor all belongs to relative formula survey sensor with transformer type sensor.The former, U.S.'s Bentley (Bently) company is placed in other cover degree of a testing the speed instrument on the reference point, in order to survey the vibration of reference point itself, then with two groups of signal inversion stacks.In order to offset disturbing, but not only complexity but also quite difficulty (selecting from the product introduction in 89 years of Bently company) in the practice.The latter, elementary or secondary coil must be fixed near the not kinetoplast of tested vibrating mass, and the spacing on probe and tested vibrating mass surface is very little, the not kinetoplast of low coverage does not have like this, be actually probe is arranged on point for referencial use on the less object of vibration, such value of measuring is obviously not accurate enough.
In addition, name is called No. 87105424 Chinese patents of " suspension type eddy seismonmeter ", though have the advantage that vibrational system adjustable natural and transversal effect are weakened; But in this device, the amplitude of eddy current magnetism is the function of speed of related movement between main magnet and the vortex sleeve; Induction electromotive force in the coil is again the function of eddy current magnetism to the coil pace of change, and " two-stage effect " taken place therebetween, and promptly the electric signal that is produced in the fixed pickup coil is proportional to the acceleration of shell motion.No. 921027745 Chinese patents that are called " earthquake type low-frequency vibration measuring device " for another name, what adopt is a kind of general earthquake type speed pickup, when asking amplitude, also need utilize repeated integral or integrating circuit or utilize Computer Compensation, but all be difficult to draw amplitude data accurately.
The objective of the invention is on the basis that overcomes the above-mentioned background technological deficiency, to provide a kind of measurement absolute amplitude inertia-type sensor accurately, need not stationary base, can be directly installed on the tested vibrating mass and measure as with reference to system.
It is the absolute type amplitude sensor of 0~3000HZ that another object of the present invention provides a kind of vibration signal that is suitable for measuring the Hz-KHz broadness.
A further object of the present invention is to provide a kind of miniaturization integrated sensor of measuring any direction vibration amplitude.
Technical scheme of the present invention (as shown in Figure 1) is that contactless displacement sensing 4 is combined with ticker 5, and ticker is made up of inertial mass, spring, damper casing.Inertial mass is suspended in the sensor device casing 1 by means of spring K and damper r, and makes signal of sensor be directly proportional with the amplitude of tested vibrating mass 3 by design.The number of inertial mass is N, is simple oscialltor when N equals 1, is many oscillators when N equals 2~20.
Described non-contact displacement transducer has electric vortex type displacement sensor and two kinds of forms of capacitive displacement transducer.For electric vortex type: it is made up of probe leading section coil 8, current vortex target 6, inertial mass M, fore-lying device 7, spring K, damper r and casing 1.Described fore-lying device 7 is meant with Parameters Transformation such as measured amplitude, displacements to be resonant circuit, bridge diagram or the coil q test circuit of the output of voltage or electric current, and resonant circuit wherein can be selected frequency modulation, amplitude modulation or FMAM formula.For capacitive: it is made up of capacity plate antenna sensor and ticker, and one of them pole plate and inertial mass are suspended in the casing by the effect of spring and damper, and another pole plate and casing are fixed.
Adjustable pouring weight all is housed on the inertial mass of sensor device of the present invention, the natural frequency of sensor is changed, to adapt to different vibration measuring requirements.Inertial mass is equipped with latch mechanism, and its effect is to lock inertial mass under sensor is in off working state, so that move or transportation, prevents to damage because of high vibration the sensitive element of sensor internal.For range is carried out static demarcating, sensor device is equipped with quiet demarcation socket, in order to insert fixedly clock gauge or dial gauge.In addition, casing top and bottom are equipped with the internal and external screw thread coupling arrangement, so that sensor device is fixed on the tested vibrating mass, the plane is made in top or bottom, so that bonding or imbed in the tested vibrating mass.For the volume and the weight that reduce sensor as much as possible, the fore-lying device that is adopted is made dedicated IC chip, and is provided with shield assembly, to reduce external interference and to improve sensitivity.
The mode difference that sensor device of the present invention suspends owing to inertial mass, used form of springs has following three kinds:
-cantilever draws rectangle spring leaf and taper shape or the date core shaped extension spring in the hanging absolute amplitude sensor.
Paired cylindrical stage clip in the-cylindrical spring formula absolute amplitude sensor, and
Paired circular reed in the-circular reed formula absolute amplitude sensor.
The damper that sensor device of the present invention adopted is the damping cup.Also spring and damper can be integrated, make the taper shape or the date core shaped spring that have damping action.
Add in the probe coil of the eddy current sensor of apparatus of the present invention cored, to improve the sensitivity of sensor.
Because technical scheme of the present invention is that sensor device is directly bonding or with being mechanically anchored on the tested vibrating mass, ticker is under inertia effect, casing vibrates with vibrating mass, and that inertial mass levels off to is motionless, so the relative displacement between casing and the inertial mass can detect by non-contact displacement transducer.This relative displacement promptly is the amplitude of tested vibrating mass.This measuring method is a vibrating mass amplitude absolute type mensuration, has overcome in the relative measurement method of prior art because the vibration interference of reference point greatly influences the accuracy of tested vibrating mass amplitude measurement.
Technical scheme of the present invention by to sensor device with difform spring, give inertial mass simultaneously with different weight, can change the natural frequency of vibration of this sensor device thus, be suitable for measuring the very vibration signal of wide frequency ranges to reach.
Sensor device of the present invention can be used for the amplitude of measuring vibrations body any direction, its method is that inertial mass is vibrated axis and the direction that will the survey row of making even, behind fixation of sensor, suitably regulate counterweight and/or adjusting knob, inertial mass is suspended in casing, and being in best initial position, the amplitude that so records is the amplitude that will survey direction.
The present invention compares with background technology has following beneficial effect:
-(also claim induction type with electrodynamic type, magneto-electric or moving electric formula) sensor compares, difference is that the latter's output signal size is directly proportional with the vibration velocity of tested vibrating mass, when the test anharmonic vibration, especially when transient oscillations such as test impact, be difficult to measure amplitude accurately, both made and utilized the circuit integration, perhaps Computer Compensation all can not draw gratifying amplitude curve over time.And utilize sensor device of the present invention can directly measure vibrating mass amplitude form accurately.
-to compare with piezoeletric quartz sensor, the latter's output signal is proportional to applied force, in other words is directly proportional with the acceleration of tested vibrating mass.When transient oscillations such as measurement impact, the regeneration vibration of sensor itself is difficult to filter in not losing required low-frequency oscillation.When asking amplitude, both made utilize repeated integral circuit or Computer Compensation all do not go out amplitude data accurately.
-compare with transformer type or differential transformer displace, the latter is except that foregoing shortcoming, also be unwell to the high frequency kinetic measurement, and its sensitivity excited target frequency influence is bigger, especially very unfavorable when measuring transient excite such as impact signal, the present invention has then solved an above-mentioned difficult problem well.
In addition, absolute type amplitude sensor device of the present invention makes relative measurement become absolute measurement, and structurally will pop one's head in and be made of one with fore-lying device, and fore-lying device adopts special-purpose integrated circuit (IC) chip, strong interference immunity when making measurement, the loss of signal is little, and is highly sensitive, and volume has advantages such as easy for installation for a short time.
Below the contrast accompanying drawing is described preferred forms of the present invention in detail:
Fig. 1 is an absolute type amplitude sensor device synoptic diagram
Fig. 2 is a simple oscialltor moving-coil plain type current vortex amplitude sensor principle schematic
Fig. 3 is a simple oscialltor moving-coil differential type current vortex sensor principle schematic
Fig. 4 is a simple oscialltor moving-target plain type current vortex sensor principle schematic
Fig. 5 is a simple oscialltor moving-target differential type current vortex sensor principle schematic
Fig. 6 is many oscillators moving-coil plain type current vortex sensor principle schematic
Fig. 7 is many oscillators moving-coil differential type current vortex sensor principle schematic
Fig. 8 is many oscillators moving-target plain type current vortex sensor principle schematic
Fig. 9 is many oscillators moving-target differential type current vortex sensor principle schematic
Figure 10 hangs simple oscialltor moving-coil type current vortex sensor apparatus structure synoptic diagram for cantilever draws
Figure 11 hangs simple oscialltor moving-target differential type current vortex sensor apparatus structure synoptic diagram for cantilever draws
Figure 12 is a bicylindrical stage clip simple oscialltor moving-target formula current vortex sensor apparatus structure synoptic diagram
Figure 13 is a two-man act sheet simple oscialltor moving-coil type current vortex sensor apparatus structure synoptic diagram
The electric vortex type amplitude sensor includes eight kinds of basic structures of Fig. 2 to Fig. 9, because the mode difference that inertial mass suspends respectively is divided into three kinds again, therefore always has 24 kinds of frame modes, below only just wherein exemplary embodiments contrast accompanying drawing do and describe in detail.
Figure 2 shows that the simple oscialltor moving-coil plain type structure that N equals 1, be combined into one object with constant weight of one probe coil 8 and fore-lying device 7 is added or do not add no counterweight and constitutes an inertial mass M, this mass is by spring K, damper r is suspended in the casing 1, current vortex target 6 is fixing with casing 1, the variable quantity of the amplitude of vibrating mass 3 and range (distance between probe coil and current vortex target) d is directly proportional, and promptly is directly proportional with sensor output voltage.
Figure 3 shows that the simple oscialltor moving-coil differential structure that N equals 1, two probe coils 8 and fore-lying device 7 are combined into one, add or do not add counterweight with the object of constant weight and constitute an inertial mass M, this mass is suspended in the casing 1 by spring K and damper r, two current vortex targets and casing are fixed, the amplitude of tested vibrating mass 3 and two range variable quantity absolute values and be directly proportional.
Figure 4 shows that the simple oscialltor moving-target plain type structure that N equals 1, the object of one current vortex target 6 and constant weight is added or do not add counterweight constitute an inertial mass M, this mass is suspended in the casing by spring K and damper R, probe coil 8 and fore-lying device 7 are combined into one fixing with casing 1, and the amplitude of vibrating mass is directly proportional with the variable quantity of range.
Figure 5 shows that the simple oscialltor moving-target differential structure that N equals 1, the object of two current vortex targets 6 and constant weight adds or does not add counterweight and constitutes an inertial mass M, this mass is by spring K, damper R is suspended in the casing 1, two coils 8 and fore-lying device 7 be combined into one and casing 1 fixing, the amplitude of tested vibrating mass 3 and two range variable quantity absolute values be directly proportional.
Figure 6 shows that many oscillators moving-coil plain type structure that N equals 2~20, N probe coil 8 is combined into one with its fore-lying device respectively, object with a constant weight adds or does not add counterweight formation N inertial mass M1, M2 separately ... Mn, these masses are by spring K1, the K2 of different parameters ... Kn, damper r1, r2 ... rn is with being suspended from the casing 1, N current vortex target and casing 1 are fixing, the amplitude of vibrating mass is directly proportional with each range variable quantity, is suitable for the vibration signal that survey frequency haves a wide reach.
Figure 7 shows that many oscillators moving-coil differential structure that N equals 2~20, per two and fore-lying device in 2N the probe coil are combined into one, wherein per two is one group, every group of object with a weight adds or do not add counterweight and constitute an inertial mass, form N mass altogether, by means of spring K1, K2 ... Kn, damper r1, r2 ... rn is suspended in the casing 1, in each coil 8 pairing 2N current vortex target per two be one group fixing with casing 1, the amplitude of vibrating mass is directly proportional with two range variable quantity absolute value sums on the same inertial mass.
Figure 8 shows that many oscillators moving-target plain type structure that N equals 2~20, add or do not add counterweight with the object of constant weight separately by N current vortex target and constitute an inertial mass, form N mass altogether, by spring K1, K2 ... Kn, damper r1, r2 ... rn is suspended in the casing, and pairing probe coil 8 of each target and fore-lying device 7 thereof are combined into one fixing with casing 1, and the amplitude of vibrating mass is directly proportional with the variable quantity of each inertial mass range.
Figure 9 shows that N equals the moving-target of oscillator more than 2~20 differential structure, form one group with per two in 2N the current vortex target, every group of object with a constant weight adds or do not add counterweight and constitute an inertial mass, by spring K1, K2 ... Kn and damper r1, r2 ... rn is suspended in the same casing, the pairing 2N of each a target probe coil and its fore-lying device are combined into one, wherein per two coils and fore-lying device thereof are one group to be fixed with casing, and the variable quantity absolute value sum of two ranges on the amplitude of vibrating mass and each inertial mass is directly proportional.
Figure 10 shows that cantilever draws hangs simple oscialltor moving-coil plain type structure, be combined into one object with constant weight of one probe coil and fore-lying device thereof adds or does not add counterweight and constitutes an inertial mass M and be suspended in the casing 1 by taper that has damping or date core shaped extension spring 10, this extension spring plays the inhibition resonance effect, cross reed 13 is made up of paired rectangle reed, and cross fixation is between casing and inertial mass, and visual concrete vibration measuring requires to be provided with a plurality of cross springs, adjustable counter balance 9 can make the natural frequency of ticker change, to adapt to different vibration measuring requirements, extension spring locking device 15 is regulated the screw rod 12 of extension spring as locking, make the range initial value constant, slide block 11 is in order to connecting taper extension spring 10 and screw rod 12, and regulates the extension spring parameters by adjusting knob 17; Mass locking device 14 is in order to lock inertial mass, in order to do being convenient to transportation under the sensor off working state.Quiet demarcation seat 16 carries out quiet demarcation in order to insert and fixedly clock gauge or dial gauge to range, connects the bottom that screw 18 is arranged on sensor, is convenient to sensor is fixed on the tested vibrating mass.Current vortex target and casing are fixed.
Figure 11 shows that cantilever draws hangs simple oscialltor moving-target differential structure, two current vortex targets 6 and constant weight object are added that adjustable counter balance 9 constitutes an inertial mass M, this mass is by taper that has damping or date core shaped extension spring 10, " cross " spring is made up of paired rectangle spring leaf, cross fixation is between casing and inertial mass, the extension spring latch mechanism is installed between inertial mass and casing, two probe coils 8 and fore-lying device 7 thereof be combined into one and casing 1 fixing, the amplitude of vibrating mass 3 is directly proportional with two range variable quantity absolute value sums.
Figure 12 shows that bicylindrical stage clip simple oscialltor moving-target plain type structure, a current vortex target 6 and constant weight object are added or do not add counterweight constitute an inertial mass M, descend two ends to be suspended in the casing thereon by two cylindrical stage clips 19, the probe coil 8 and the fore-lying device 7 thereof of current vortex target 6 correspondences are combined into one, fix with casing, the amplitude of vibrating mass is directly proportional with the variable quantity of range.
Figure 13 shows that two-man act sheet simple oscialltor moving-coil plain type structure, be combined into one object with constant weight of one probe coil 8 and fore-lying device 7 thereof is added or do not add counterweight and constitutes an inertial mass M, be suspended between two circular reed 20, damper r can add or not add as required.Current vortex target and casing 1 are fixing, and the amplitude of vibrating mass 3 is directly proportional with the variable quantity of range.
Another embodiment of the invention is that the probe coil of the inertia current vortex amplitude sensor of above-mentioned various versions and current vortex target are replaced it with two battery lead plates of electric capacity, simultaneously the fore-lying device of electric vortex type is replaced it with the metering circuit of capacitance type sensor.The changes in capacitance amount can adopt polar plate spacing change type or area change type two kinds, and above-mentioned metering circuit comprises modulation circuit, FM circuit and pulse width modulation circuit.
In sum, technical scheme of the present invention makes the monitoring of the tested vibrating mass amplitude strong interference immunity that becomes, and is highly sensitive, frequency range is broad and need not static reference point, and its practicality, novelty and creativeness are need not query.

Claims (19)

1, absolute type amplitude sensor device, combine with ticker by non-contact displacement transducer, ticker is made up of inertial mass, spring, damper and casing, inertial mass is suspended in the casing by spring, damper, and the physical quantity that sensor is measured draws the absolute amplitude value of tested vibrating mass by signal processor.
2, according to the absolute type amplitude sensor device of claim 1, it is characterized in that: non-contact displacement transducer is an eddy current displacement sensor, add cored in its probe coil, the signal processor of probe is a fore-lying device, make an integral body with probe, the counterweight on N inertial mass all refers to adjustable pouring weight, and N is 1 to 20 integer (as follows), the mass latch mechanism is installed between mass and casing, and the amplitude of tested vibrating mass is directly proportional with signal of sensor.
3, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: structure is the moving-coil plain type, by N probe coil respectively and fore-lying device be combined into one, add or do not add counterweight with the object of constant weight separately and constitute an inertial mass, by means of taper that has damping or date core shaped extension spring, " cross " spring is made up of paired rectangle spring leaf, cross fixation is between casing and inertial mass, the extension spring latch mechanism is installed between inertial mass and casing, and N current vortex target and casing are fixed.
4, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: be combined into one with its fore-lying device respectively by N probe coil, add or do not add counterweight with the object of constant weight separately and constitute an inertial mass, be suspended between two cylinder stage clips, N current vortex target and casing are fixed.
5, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: be combined into one with its fore-lying device respectively by N probe coil, add or do not add counterweight with the object of constant weight separately and constitute an inertial mass, be suspended between two circular reed, N current vortex target and casing are fixed.
6, absolute type amplitude sensor device according to claim 2, it is characterized in that: structure is the moving-coil differential type, be combined into one by per two and its fore-lying device in 2N the probe coil, wherein per two is one group, every group of object with constant weight adds or do not add counterweight and constitute an inertial mass, by means of taper that has damping or date core shaped extension spring, " cross " spring is made up of paired rectangle spring leaf, cross fixation is between casing and inertial mass, the extension spring latch mechanism is installed between inertial mass and casing, and per two in 2N current vortex target are one group and fix with casing.
7, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: be combined into one by per two and its fore-lying device in 2N the probe coil, wherein per two is one group, every group of object with constant weight adds or do not add counterweight and constitute an inertial mass, be suspended between two cylinder stage clips, per two in 2N current vortex target are one group and fix with casing.
8, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: be combined into one by per two and its fore-lying device in 2N the probe coil, wherein per two is one group, every group of object with constant weight adds or do not add counterweight and constitute an inertial mass, be suspended between two circular reed, per two in 2N current vortex target are one group and fix with casing.
9, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: structure is the moving-target plain type, add or do not add counterweight with the object of constant weight separately by N current vortex target and constitute an inertial mass, by means of taper that has damping or date core shaped extension spring, " cross " spring is made up of paired rectangle spring leaf, cross fixation is between casing and inertial mass, the extension spring latch mechanism is installed between inertial mass and casing, and N probe coil and its fore-lying device are combined into one and casing is fixed.
10, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: add or do not add counterweight with the object of constant weight separately by N current vortex target and constitute an inertial mass, be suspended between two cylindrical stage clips, N probe coil and its fore-lying device are combined into one and casing is fixed.
11, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: add or do not add counterweight with the object of constant weight separately by N current vortex target and constitute an inertial mass, be suspended between two circular reed, N probe coil and its fore-lying device are combined into one and casing is fixed.
12, absolute type amplitude sensor device according to claim 2, it is characterized in that: structure is the moving-target differential type, by per two in 2N the current vortex target is one group, every group of object with constant weight adds or do not add counterweight and constitute an inertial mass, by means of taper that has damping or date core shaped extension spring, " cross " spring is made up of paired rectangle spring leaf, cross fixation is between casing and inertial mass, the extension spring latch mechanism is installed between inertial mass and casing, 2N probe coil and its fore-lying device are combined into one, and wherein per two coils and its fore-lying device are one group to be fixed with casing.
13, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: by per two in 2N the current vortex target is one group, every group of object with constant weight adds or do not add counterweight and constitute an inertial mass, be suspended between two cylindrical stage clips, 2N probe coil and fore-lying device thereof are combined into one, and wherein per two coils and its fore-lying device are one group to be fixed with casing.
14, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: by per two in 2N the current vortex target is one group, every group of object with constant weight adds or do not add counterweight and constitute an inertial mass, be suspended between two circular reed, wherein per two coils and its fore-lying device are one group to be fixed with casing.
15, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: the top of casing is provided for the dial gauge socket of quiet demarcation.
16, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: casing is provided with the internal and external threads coupling arrangement.
17, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: the top of casing and bottom are provided with bonding plane.
18, according to the absolute type amplitude sensor device of claim 2, it is characterized in that: fore-lying device adopts dedicated IC chip, and is provided with shield assembly.
19, according to the absolute type amplitude sensor device of claim 1, it is characterized in that: non-contact displacement transducer is the capacity plate antenna displacement transducer, one of them pole plate and inertial mass are suspended in the casing by spring and damper, another pole plate and casing are fixed, and the amplitude of tested vibrating mass is directly proportional with the capacitance variations value that changes because of pole span or the pole plate area change is caused.
CN 94217820 1994-07-30 1994-07-30 Absolute amplitude sensor device Expired - Fee Related CN2205963Y (en)

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Application Number Priority Date Filing Date Title
CN 94217820 CN2205963Y (en) 1994-07-30 1994-07-30 Absolute amplitude sensor device

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Application Number Priority Date Filing Date Title
CN 94217820 CN2205963Y (en) 1994-07-30 1994-07-30 Absolute amplitude sensor device

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102778584A (en) * 2011-05-11 2012-11-14 重庆师范大学 Magnetorheological fluid acceleration sensor
CN103557915A (en) * 2013-10-23 2014-02-05 国家电网公司 Mass measurement equipment used for measuring tiny mass
CN109471160A (en) * 2018-11-29 2019-03-15 江苏集萃微纳自动化系统与装备技术研究所有限公司 The moving-coil detector of velocity and acceleration is detected simultaneously

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102778584A (en) * 2011-05-11 2012-11-14 重庆师范大学 Magnetorheological fluid acceleration sensor
CN103557915A (en) * 2013-10-23 2014-02-05 国家电网公司 Mass measurement equipment used for measuring tiny mass
CN103557915B (en) * 2013-10-23 2015-04-08 国家电网公司 Mass measurement equipment used for measuring tiny mass
CN109471160A (en) * 2018-11-29 2019-03-15 江苏集萃微纳自动化系统与装备技术研究所有限公司 The moving-coil detector of velocity and acceleration is detected simultaneously
CN109471160B (en) * 2018-11-29 2020-07-24 江苏集萃微纳自动化系统与装备技术研究所有限公司 Moving coil detector for simultaneously detecting speed and acceleration

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