CN111722271B - Annular cantilever piezoelectric detector core - Google Patents
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- CN111722271B CN111722271B CN201910219557.7A CN201910219557A CN111722271B CN 111722271 B CN111722271 B CN 111722271B CN 201910219557 A CN201910219557 A CN 201910219557A CN 111722271 B CN111722271 B CN 111722271B
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- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
- G01V1/181—Geophones
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Abstract
The invention provides an annular cantilever piezoelectric detector core, which comprises a central shaft and a substrate arranged on the radial outer peripheral surface of the central shaft, wherein a piezoelectric wafer is arranged on the substrate, and an output lead is led out from the piezoelectric wafer to output signals; the end of the substrate far away from the center is connected with a mass body; the center of gravity of the mass body passes through the central axis of the central shaft; the top surface of the substrate is perpendicular to the central axis of the central shaft. The annular cantilever piezoelectric detector has the advantages of low resonant frequency of the movement, flexible piezoelectric crystal and easiness in receiving low-frequency signals.
Description
Technical Field
The invention relates to the field of seismic exploration, in particular to a ring cantilever piezoelectric detector core.
Background
The geophone is a special sensor applied to the fields of geological exploration and engineering measurement, which converts direct waves of an artificial excitation source or reflected waves of each stratum into electric signals and then inputs the electric signals into a seismic instrument. The working principle of the sensor can be divided into magneto-electric type, vortex type, piezoelectric type and other detectors. The application environment can be divided into land exploration geophone, underwater geophone applied to exploration in rivers, lakes and seas and well geophone applied to seismic logging. The energy conversion mechanism is divided into a speed type detector and an acceleration type detector. The exploration method can be divided into a longitudinal wave detector, also called a vertical detector, and a transverse wave detector, also called a horizontal detector, and a three-component detector. In addition, geophones can be divided into active and passive geophones. The traditional mechanical moving coil type and the traditional vortex detector belong to passive detectors, and the piezoelectric detector belongs to active detectors.
At present, the most widely used in China is the traditional analog geophone, the analog signal is output by the seismic wave sensing device, and the conventional or super-speed geophone is mainly used on land. The detectors are basically magneto-electric detectors and eddy-current detectors, the internal structures of the detectors are composed of permanent magnets and coils, and the electromagnetic induction principle is basically applied, so that the purpose of seismic exploration is achieved through interaction of the coils and the permanent magnets. The detectors have high elastic structures such as coils, and large relative movement among the components is easy to generate deformation, so waveforms are easy to generate deformation, signal distortion is further caused, and the permanent magnets are not long in service life and are easily influenced by environment due to the fact that the performances of the permanent magnets are changed and the magnetism is fading along with time, and the detectors are low in stability, so that the requirements of high-precision and high-resolution seismic exploration cannot be met. As a first step of seismic signal acquisition procedure, the detector device cannot obtain better original seismic signals, directly influences the quality of acquired seismic data, limits the capacity of obtaining complex geological structures by adopting a seismic exploration method, and becomes one of main bottlenecks for restricting the development of petroleum geophysical prospecting technology. With the improvement of high-precision oil and gas exploration technology and the increase of oil and gas exploration complexity, the geophone is developing towards low distortion, high sensitivity and wide frequency band, has large dynamic range, wide frequency response, small equivalent input noise, small volume, light weight and strong electromagnetic interference resistance, meets the high-resolution acquisition requirement, and is a trend of the current geophone development. Various new detectors using different new technologies and materials are coming into existence.
The simply supported beam piezoelectric acceleration geophone is a novel geophone which appears in recent years. As shown in fig. 1, in the piezoelectric detector core of the conventional simply supported beam structure, the resonance frequency is greater than 600Hz, a mass body 4 is assembled in the middle of a piezoelectric crystal 5, then the assembly of the piezoelectric crystal and the mass body is mounted on a housing 100, and finally the edge of the piezoelectric crystal is tightly pressed by a gland 101. The piezoelectric wafer includes a piezoelectric crystal upper plate 51 and a piezoelectric crystal lower plate 52, and when the movement vibrates and receives an upward force, the central mass 4 moves downward due to inertia, and at this time, the upper plate is bent and compressed, and the lower plate is bent and stretched.
Similarly, when the movement vibrates and receives a downward force, the center mass 4 moves upward due to inertia, and at this time, the piezoelectric crystal upper plate 51 is bent and stretched, and the piezoelectric crystal lower plate 52 is bent and compressed. The surfaces of the upper piezoelectric crystal plate 51 and the lower piezoelectric crystal plate 52 generate opposite charges, respectively, and output charges. Similarly, when the movement vibrates and receives a downward force, the center mass 4 moves upward due to inertia, and at this time, the piezoelectric crystal upper plate 51 is bent and stretched, and the piezoelectric crystal lower plate 52 is bent and compressed. The surfaces of the upper piezoelectric crystal plate 51 and the lower piezoelectric crystal plate 52 generate opposite charges, respectively, and output charges.
The piezoelectric detector core of the simple beam structure is designed in the middle of the inner part of the core. The low-frequency detector core is designed, the resonant frequency of the core steel type coupling needs to be reduced, and under the condition that the K value of the piezoelectric crystal is unchanged (in order to ensure that the sensitivity of the core output is unchanged under the same condition), the resonant frequency formula of the piezoelectric acceleration detector is adopted:
in the formula, fn is the resonant frequency of the piezoelectric acceleration detector, k is the equivalent stiffness coefficient of the detector, m is the mass of the mass body, the volume of the mass body needs to be increased, the inner space of the simple beam structure movement is limited, and the structure is not very well realized, so that the resonant frequency of the movement is high, and the piezoelectric crystal is not easy to bend and receive signals with low frequency.
Disclosure of Invention
The invention aims to solve the technical problems that the resonance frequency of the conventional piezoelectric geophone core is low, a piezoelectric crystal is flexible, and a low-frequency signal is easy to receive.
The technical scheme adopted by the invention is as follows.
The annular cantilever piezoelectric detector core comprises a central shaft and a substrate arranged on the radial outer peripheral surface of the central shaft, wherein a piezoelectric wafer is arranged on the substrate, and an output lead is led out of the piezoelectric wafer to output signals; the end of the substrate far away from the center is connected with a mass body; the center of gravity of the mass body passes through the central axis of the central shaft; the top surface of the substrate is perpendicular to the central axis of the central shaft.
As a preferable technical scheme, a circular cylinder-shaped substrate is arranged on the radial outer peripheral surface of the central shaft; the radial outer peripheral surface of the substrate is connected with a circular cylinder-shaped mass body; the central axes of the mass body, the substrate and the central shaft are on the same straight line.
As a preferable technical scheme, the piezoelectric wafer comprises a circular cylinder-shaped piezoelectric crystal upper piece and a circular cylinder-shaped piezoelectric crystal lower piece; the piezoelectric crystal upper piece and the piezoelectric crystal lower piece are respectively connected to the top surface and the bottom surface of the substrate; the upper piezoelectric crystal sheet and the lower piezoelectric crystal sheet are respectively led out of output leads to output signals, or,
the piezoelectric wafer only comprises a ring-shaped columnar piezoelectric crystal upper piece, and the piezoelectric crystal upper piece is connected to the top surface of the substrate; the piezoelectric crystal upper plate leads out an output lead for outputting signals, or alternatively,
the piezoelectric wafer only comprises a ring-shaped cylinder-shaped piezoelectric crystal lower piece, and the piezoelectric crystal lower piece is connected to the bottom surface of the substrate; the lower piece of the piezoelectric crystal leads out an output lead to output signals.
As a preferable technical scheme, the central axis of the mass body, the central axis of the substrate, the central axis of the piezoelectric crystal lower piece, the central axis of the piezoelectric crystal upper piece and the central axis of the central shaft are on the same straight line.
As a preferable technical scheme, the diameter of the inner hole of the mass body is larger than the outer diameters of the piezoelectric crystal lower piece and the piezoelectric crystal upper piece.
As a preferable technical scheme, a top cap is arranged at the top end of the central shaft; the radial periphery of the bottom end of the central shaft is connected with a compression nut in a threaded manner; the substrate is mounted between the top cap and the compression nut on the radially outer peripheral surface of the central shaft.
As the preferable technical scheme, a blind hole with an upward opening is arranged on the centroid of the top cap; the blind hole is connected with a horizontal through hole; the top end of the output wire passes through the horizontal through hole and the top end is positioned above the top end of the blind hole.
As a preferable technical scheme, an upper lead sheet, an insulating sheet, a lower lead sheet, an upper conducting sheet, a piezoelectric crystal upper sheet, a substrate, a piezoelectric crystal lower sheet, a lower conducting sheet and a compression nut are sleeved on the radial outer peripheral surface of the central shaft from top to bottom in sequence; the upper lead sheet and the lower lead sheet respectively lead out output leads to output signals.
As a preferable technical scheme, the mass body comprises an upper mass body ring and a lower mass body ring which are connected together, and the end, far away from the center, of the substrate is clamped between the upper mass body ring and the lower mass body ring.
As a preferable technical scheme, the upper mass body ring and the lower mass body ring are connected through threads.
As the preferable technical proposal, two insulating spacing rings are arranged between the upper mass body ring and the lower mass body ring; the end of the substrate far from the center shaft is positioned between the two spacing rings.
Preferably, the substrate is a copper substrate.
As a preferable technical scheme, the central shaft is made of stainless steel, and the screw thread of the part above the compression nut 6 of the central shaft is covered with an insulating material.
The beneficial effects of the invention are as follows: because the center of the piezoelectric crystal is fixedly connected, the annular mass body is designed on the edge of the piezoelectric crystal substrate, the mass body can be furthest improved under the condition that the inner space of the simply supported beam structure movement is limited, the resonance frequency of the mass body movement is low, and the piezoelectric crystal is easy to bend and easy to receive signals with low frequency. The detector based on the invention has the advantages of high sensitivity, wide dynamic range, portability, durability and the like, has stronger anti-interference capability due to small difference in the horizontal direction, and is more reliable and wide in application in the fields of land seismic exploration, underground trough seismic exploration and the like.
Drawings
Fig. 1 is a schematic structural diagram of a piezoelectric detector core of a simple beam structure in the prior art.
Fig. 2 is a schematic perspective view of a preferred embodiment of the ring cantilever piezoelectric detector core of the present invention.
Fig. 3 is a top view of the ring cantilever piezoelectric detector cartridge of fig. 2.
Fig. 4 is a cross-sectional view of the ring cantilever piezoelectric detector cartridge of fig. 3 taken along A-A'.
Fig. 5 is a partial enlarged view of a portion B of fig. 4.
Fig. 6 is a partial enlarged view of a portion C of fig. 4.
Fig. 7 is a top view of the ring cantilever piezoelectric detector core of fig. 2 after attachment of a piezoelectric wafer to a substrate.
Fig. 8 is a front view of the piezoelectric wafer of fig. 7 after attachment to a substrate.
Fig. 9 is a schematic perspective view of a preferred embodiment of the ring cantilever piezoelectric detector core of the present invention.
Fig. 10 is a partial enlarged view of a portion D of fig. 9.
FIG. 11 is a schematic perspective view of a preferred embodiment of the ring cantilever piezoelectric detector core of the present invention.
Fig. 12 is a partial enlarged view of a portion E of fig. 11.
Wherein: a central axis-1; a substrate-2; an output wire-3; mass body-4; an upper mass ring-41; a lower mass ring-42; a spacer ring-43; a piezoelectric wafer-5; piezoelectric crystal upper sheet-51; piezoelectric crystal lower sheet-52; a compression nut-6; top cap-7; a blind hole-71; horizontal through holes-72; an upper lead sheet-8; an insulating sheet 9; a lower lead sheet-10; an upper conductive sheet-11; a lower conductive sheet-12; a housing-100; gland-101.
Detailed Description
For a clearer understanding of technical features, objects and effects of the present invention, a detailed description of embodiments of the present invention will be made with reference to the accompanying drawings.
Example 1. As shown in fig. 2-8, a ring cantilever piezoelectric detector core is characterized in that: the device comprises a central shaft 1 and a substrate 2 arranged on the radial outer peripheral surface of the central shaft 1, wherein a piezoelectric wafer 5 is arranged on the substrate 2, and an output wire 3 is led out of the piezoelectric wafer 5 to output signals; the end, far away from the central shaft 1, of the substrate 2 is connected with a mass body 4; the center of gravity of the mass body 4 passes through the central axis of the central shaft 1; the top surface of the substrate 2 is perpendicular to the central axis of the central shaft 1.
A base sheet 2 in the shape of a circular cylinder is mounted on the radial outer peripheral surface of the center shaft 1; the radial outer peripheral surface of the substrate 2 is connected with a circular cylinder-shaped mass body 4; the central axes of the mass body 4, the substrate 2 and the central shaft 1 are on the same straight line.
The piezoelectric wafer 5 includes a cylindrical piezoelectric crystal upper plate 51 and a cylindrical piezoelectric crystal lower plate 52; the piezoelectric crystal upper plate 51 and the piezoelectric crystal lower plate 52 are respectively connected to the top surface and the bottom surface of the substrate 2; the piezoelectric crystal upper plate 51 and the piezoelectric crystal lower plate 52 respectively draw out the output lead 3 to output signals.
The central axis of the mass body 4, the central axis of the substrate 2, the central axis of the piezoelectric crystal lower plate 52, the central axis of the piezoelectric crystal upper plate 51 and the central axis of the central shaft 1 are on the same straight line.
The diameter of the inner hole of the mass body 4 is larger than the outer diameters of the piezoelectric crystal lower plate 52 and the piezoelectric crystal upper plate 51.
The top end of the central shaft 1 is provided with a top cap 7; the radial periphery of the bottom end of the central shaft 1 is connected with a compression nut 6 in a threaded manner; the substrate 2 is mounted between the top cap 7 and the compression nut 6 on the radially outer peripheral surface of the center shaft 1.
A blind hole 71 with an upward opening is arranged on the centroid of the top cap 7; the bottom end of the blind hole 71 is connected with a horizontal through hole 72; the top end of the output wire 3 passes through the horizontal through hole 72 and the top end is located above the top end of the blind hole 71.
An upper lead sheet 8, an insulating sheet 9, a lower lead sheet 10, an upper conductive sheet 11, a piezoelectric crystal upper sheet 51, a substrate 2, a piezoelectric crystal lower sheet 52, a lower conductive sheet 12 and a compression nut 6 are sequentially sleeved on the radial outer peripheral surface of the central shaft 1 from top to bottom; the upper lead tab 8 and the lower lead tab 10 lead out the output wires 3, respectively, to output signals. The upper lead sheet 8 is in electrical communication with the central shaft 1 and simultaneously with the compression nut 6, the lower conductive sheet 12, and the piezoelectric crystal lower sheet 52. The lower lead sheet 10 and the upper conductive sheet 11 communicate with the piezoelectric crystal upper sheet 51. The lead-out wires 3 are a group of two connected wires, which are respectively communicated with the upper conductive sheet 11 and the lower conductive sheet 12.
The mass body 4 comprises an upper mass body ring 41 and a lower mass body ring 42 which are connected together, and the end of the substrate 2, which is far away from the central axis 1, is clamped between the upper mass body ring 41 and the lower mass body ring 42.
The upper mass body ring 41 and the lower mass body ring 42 are connected by screw threads.
Two insulating spacer rings 43 are arranged between the upper and lower mass body rings 41, 42; the end of the substrate 2 remote from the central axis 1 is located between two spacer rings 43.
And (3) center assembly: the piezoelectric crystal upper plate 51, the substrate 2 and the piezoelectric crystal lower plate 52 are combined into a combined body; an upper lead sheet 8 is put on the central shaft 3, an upper insulating sheet 9 and a lower lead sheet 10 are put in turn, and an upper conductive sheet 11 is put in turn; then the assembly of the upper piezoelectric crystal plate 51, the substrate 2 and the lower piezoelectric crystal plate 52 is put in, then the upper and lower conductive plates 12 are put in, and finally the compression nut 6 is used for fastening and solidifying. The screw thread at the bottom of the central shaft is used for fixing the movement on the framework at the bottom of the detector lower shell. The outer wall of the stainless steel central shaft is covered with an insulating material.
The substrate 2 is made of an elastic material, and is made of copper. The central shaft is made of stainless steel, and the screw thread of the part above the compression nut 6 is covered with insulating material. The screw thread at the bottom of the central shaft is used for fixedly connecting the movement to the lower shell framework of the detector.
Edge assembly: placing an upper spacing ring 43 on the lower mass body ring 42, mounting the end, far away from the center, of the substrate of the assembled piezoelectric crystal upper sheet 51, the substrate 2 and the piezoelectric crystal lower sheet 52 on the spacing ring 10, and then placing an insulating spacing ring 43; finally, the upper mass body ring 41 is screwed into the lower mass body ring 42, and the assembled movement has a three-dimensional structure as shown in fig. 1 to 4.
In the low-frequency detector movement structure, only one annular piezoelectric wafer 6 is used, and the low-frequency detector movement works in the principle that the center of the piezoelectric wafer 6 is fixedly connected, and when longitudinal force F acts on the central shaft, the piezoelectric wafer 6 changes due to hysteresis of a mass body, and charges are generated on the surface of the crystal and output.
The design has the advantages that the annular mass body is designed at the edge of the piezoelectric crystal, the counterweight of the mass body can be made larger, and the resonance frequency formula of the piezoelectric acceleration detector is used
The resonance frequency of the movement is easy to be lowered, the designed resonance frequency of the whole movement is 500Hz, meanwhile, the mass of the mass body is increased, and the piezoelectric crystal is easy to bend and deform, so that the movement is facilitated to receive weak and small signals with low frequency.
Because the center of the piezoelectric crystal is consolidated, the annular mass body is designed on the edge of the piezoelectric crystal substrate, the resonance frequency of the movement is low, and the piezoelectric crystal is easy to bend and easy to receive signals with low frequency. The detector based on the invention has the advantages of high sensitivity, wide dynamic range, portability, durability and the like, has stronger anti-interference capability due to small difference in the horizontal direction, and is more reliable and wide in application in the fields of land seismic exploration, underground trough seismic exploration and the like.
Example 2. As shown in fig. 9 to 10, this embodiment is different from embodiment 1 in that: the piezoelectric wafer only comprises a ring-shaped columnar piezoelectric crystal upper plate 51, and the piezoelectric crystal upper plate 51 is connected to the top surface of the substrate 2; the piezoelectric crystal upper plate 51 draws out the output wire 3 for signal output. The working principle is that in the low-frequency detector movement structure, only one piezoelectric crystal is used, and the working principle of the low-frequency detector movement is that the center of the piezoelectric crystal upper plate 51 is fixedly connected, when a force along the central axis direction of the central axis acts on the central axis, the piezoelectric crystal upper plate 51 changes due to the hysteresis of a mass body, and charges are generated on the surface of the crystal and output charges.
Example 3. As shown in fig. 11 to 12, this embodiment is different from embodiment 1 in that: the piezoelectric wafer only comprises a lower piezoelectric crystal piece 52 in a circular cylinder shape, and the lower piezoelectric crystal piece 52 is connected to the bottom surface of the substrate 2; the piezoelectric crystal lower piece 52 draws out the output wire 3 for signal output. The working principle is that in the low-frequency detector movement structure, only one piezoelectric crystal is used, and the working principle of the low-frequency detector movement is that the center of the piezoelectric crystal lower piece 52 is fixedly connected, when a force along the central axis direction of the central axis acts on the central axis, the piezoelectric crystal lower piece 52 changes due to the hysteresis of a mass body, and charges are generated on the surface of the crystal and output charges.
The embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those having ordinary skill in the art without departing from the spirit of the present invention and the scope of the claims, which are to be protected by the present invention.
Claims (1)
1. An annular cantilever piezoelectric detector core which is characterized in that: the device comprises a central shaft and a substrate arranged on the radial outer peripheral surface of the central shaft, wherein a piezoelectric wafer is arranged on the substrate, and an output wire is led out of the piezoelectric wafer to output signals; the end of the substrate far away from the center is connected with a mass body; the center of gravity of the mass body passes through the central axis of the central shaft; the top surface of the substrate is perpendicular to the central axis of the central shaft;
a circular cylinder-shaped substrate is arranged on the radial outer peripheral surface of the central shaft; the radial outer peripheral surface of the substrate is connected with a circular cylinder-shaped mass body; the central axes of the mass body, the substrate and the central shaft are on the same straight line;
the piezoelectric wafer comprises an upper ring-column-shaped piezoelectric crystal piece and a lower ring-column-shaped piezoelectric crystal piece; the piezoelectric crystal upper piece and the piezoelectric crystal lower piece are respectively connected to the top surface and the bottom surface of the substrate; the upper piezoelectric crystal sheet and the lower piezoelectric crystal sheet are respectively led out of output wires for outputting signals;
the central axis of the mass body, the central axis of the substrate, the central axis of the piezoelectric crystal lower piece, the central axis of the piezoelectric crystal upper piece and the central axis of the central shaft are on the same straight line;
the diameter of the inner hole of the mass body is larger than the outer diameter of the lower piezoelectric crystal piece and the upper piezoelectric crystal piece;
the top end of the central shaft is provided with a top cap; the radial periphery of the bottom end of the central shaft is connected with a compression nut in a threaded manner; the substrate is arranged between the top cap and the compression nut on the radial outer peripheral surface of the central shaft;
a blind hole with an upward opening is arranged on the centroid of the top cap; the bottom end of the blind hole is connected with a horizontal through hole; the top end of the output wire passes through the horizontal through hole and is positioned above the top end of the blind hole;
an upper lead sheet, an insulating sheet, a lower lead sheet, an upper conducting sheet, a piezoelectric crystal upper sheet, a substrate, a piezoelectric crystal lower sheet, a lower conducting sheet and a compression nut are sleeved on the radial outer peripheral surface of the central shaft from top to bottom in sequence; the upper lead sheet and the lower lead sheet respectively lead out output leads to output signals; the upper lead sheet is electrically communicated with the central shaft and is simultaneously communicated with the compression nut, the lower conducting sheet and the piezoelectric crystal lower sheet; the lower lead wire piece is communicated with the upper conducting piece and the piezoelectric crystal upper piece; the lead-out wires are a group of two connected wires which are respectively communicated with the upper conductive sheet and the lower conductive sheet;
the mass body comprises an upper mass body ring and a lower mass body ring which are connected together, and the end, far away from the center, of the substrate is clamped between the upper mass body ring and the lower mass body ring;
the upper mass body ring and the lower mass body ring are connected through threads;
two insulating spacing rings are arranged between the upper mass body ring and the lower mass body ring; the end of the substrate far from the center is positioned between the two spacing rings;
and (3) center assembly: the piezoelectric crystal upper piece, the substrate and the piezoelectric crystal lower piece are combined into a combined body; placing an upper lead sheet on the central shaft, sequentially placing an upper insulating sheet and a lower lead sheet, and then placing an upper conducting sheet; then placing a combination body consisting of an upper piezoelectric crystal sheet, a substrate and a lower piezoelectric crystal sheet, then placing an upper conductive sheet and a lower conductive sheet, and finally fastening and solidifying by using a compression nut; the screw thread at the bottom of the central shaft is used for fixing the movement on the framework at the bottom of the detector lower shell; the outer wall of the stainless steel central shaft is covered with an insulating material;
the substrate is made of elastic material and copper; the central shaft is made of stainless steel, and the screw thread of the upper part of the compression nut is covered with an insulating material; the screw thread at the bottom of the central shaft is used for fixedly connecting the movement to the lower shell framework of the detector;
edge assembly: placing an upper spacing ring on the lower mass body ring, mounting the end, far away from the center, of the substrate of the assembled piezoelectric crystal upper sheet, the substrate and the piezoelectric crystal lower sheet on the spacing ring, and then placing an insulating spacing ring; and finally screwing the upper mass body ring into the lower mass body ring.
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| CN207799094U (en) * | 2018-02-08 | 2018-08-31 | 东营市智威石油技术有限责任公司 | A kind of piezoelectric type acceleration type wave detector movement |
| CN207833033U (en) * | 2018-01-15 | 2018-09-07 | 方聪 | A kind of piezoelectric seismometer movement |
| WO2019040000A1 (en) * | 2017-08-24 | 2019-02-28 | Agency For Science, Technology And Research | Gyroscope, methods of forming and operating the same |
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2019
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| CN2766252Y (en) * | 2004-12-31 | 2006-03-22 | 朱军 | Piezo-electric acceleration detector machine core |
| CN1800878A (en) * | 2004-12-31 | 2006-07-12 | 朱军 | Core of piezoelectric acceleration seismic detector |
| KR20060090021A (en) * | 2005-02-04 | 2006-08-10 | 엘지전자 주식회사 | Piezoelectric driven resistance-type rf mems switch and manufacturing method thereof |
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