CN220555503U - Transmission mechanism and conveyer that silicon chip was carried usefulness - Google Patents
Transmission mechanism and conveyer that silicon chip was carried usefulness Download PDFInfo
- Publication number
- CN220555503U CN220555503U CN202322111561.6U CN202322111561U CN220555503U CN 220555503 U CN220555503 U CN 220555503U CN 202322111561 U CN202322111561 U CN 202322111561U CN 220555503 U CN220555503 U CN 220555503U
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- Prior art keywords
- conveying
- belt
- width adjusting
- synchronous
- silicon wafer
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 78
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 76
- 239000010703 silicon Substances 0.000 title claims abstract description 76
- 230000005540 biological transmission Effects 0.000 title claims abstract description 65
- 230000007246 mechanism Effects 0.000 title claims abstract description 34
- 235000012431 wafers Nutrition 0.000 claims abstract description 73
- 230000001360 synchronised effect Effects 0.000 claims abstract description 69
- 230000005570 vertical transmission Effects 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 7
- 238000005096 rolling process Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 12
- 230000008569 process Effects 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 208000032369 Primary transmission Diseases 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model provides a transmission mechanism for conveying silicon wafers and a conveyor, which comprise a width adjusting device, a conveying device and a power servo motor; the power servo motor is connected with a width adjusting device; the conveying device comprises a synchronous structure, and the synchronous structure is connected with the power servo motor; the width adjusting device is used for supporting the silicon wafer, and the conveying device is used for synchronizing the operation between the width adjusting device and the conveying device due to the fact that the silicon wafer is conveyed. The utility model has the beneficial effects that: the clamping and supporting silicon wafer avoids deflection in the conveying process, and improves the production efficiency of the silicon wafer.
Description
Technical Field
The utility model belongs to the field of silicon wafer production equipment, and particularly relates to a transmission mechanism for conveying silicon wafers and a conveyor.
Background
Silicon wafers have various sizes as main components of electronic devices. The silicon wafers are divided by the dividing mechanism and then are required to be transferred and placed in the flower basket for storage, and a specific interval is required to be kept between the silicon wafers in the transferring process so as to facilitate the insertion of the wafers into the flower basket. The current common transfer method is that the silicon wafer is transported forward by a belt conveyor, however, the existing conveyor has some problems in the process of conveying: the silicon chip often generates deflection and toppling phenomenon in the transportation process, so that the silicon chip cannot be smoothly inserted into the flower basket, thereby influencing the production efficiency and quality.
Disclosure of Invention
In view of the above, the utility model aims to provide a transmission mechanism and a conveyor for conveying silicon wafers, which are used for clamping and supporting the silicon wafers to avoid deflection in the conveying process and improve the production efficiency of the silicon wafers.
In order to achieve the above purpose, the technical scheme of the utility model is realized as follows:
a transmission mechanism for conveying silicon wafers.
Further, the device comprises a width adjusting device, a conveying device and a power servo motor; the power servo motor is connected with a width adjusting device; the conveying device comprises a synchronous structure, and the synchronous structure is connected with the power servo motor; the width adjusting device is used for supporting the silicon wafer, and the conveying device is used for synchronizing the operation between the width adjusting device and the conveying device due to the fact that the silicon wafer is conveyed.
Further, the width adjusting device comprises a vertical transmission shaft, a width adjusting synchronous belt and a clamping supporting synchronous belt; the vertical transmission shaft is connected with the power servo motor, one end of the width adjustment synchronous belt is connected with the vertical transmission shaft, and the other end of the width adjustment synchronous belt is connected with the clamping supporting synchronous belt.
Further, the width adjusting synchronous belt comprises a first main belt pulley and a first auxiliary belt pulley, and the first main belt pulley is connected to the top of the vertical transmission shaft through a shaft; the first slave pulley is connected with the clamping support synchronous belt shaft, and the transmission speed is synchronous.
Further, the conveying device comprises a conveying transmission synchronous belt and a synchronous structure; the synchronous structure comprises a second main belt pulley, a second auxiliary belt pulley, a transverse transmission shaft and a bevel gear; the transverse transmission shaft is synchronously connected with the vertical transmission shaft through a bevel gear, and the second main belt pulley is in shaft connection with the transverse transmission shaft; the upper belt surface of the conveying transmission synchronous belt is mutually perpendicular to the belt surface of the clamping supporting synchronous belt.
Further, the second primary pulley is the same size as the first primary pulley, and the second secondary pulley is the same size as the first secondary pulley for synchronizing the belt speed between the clamping and supporting synchronous belt and the conveying and driving synchronous belt.
Further, the device further comprises a width adjusting cylinder, wherein at least two width adjusting cylinders are symmetrically fixed on the transmission mechanism and support the clamping and supporting synchronous belt for initial width setting of the width adjusting device.
Further, a silicon wafer conveyor comprises a transmission mechanism, a material frame and a roller roll, wherein the transmission mechanism, the material frame and the roller roll are used for conveying silicon wafers, and the material frame is loaded with the silicon wafers and is positioned at the starting end of the conveying device and used for stacking the silicon wafers on the conveying device; the roller coil is positioned at the tail end of the conveying device and is used for rolling away the silicon wafer on the conveying device.
Compared with the prior art, the transmission mechanism and the conveyor for conveying the silicon wafers have the following beneficial effects:
(1) The transmission mechanism and the conveyor for conveying the silicon wafers prevent the silicon wafers from deflecting or tilting in the forward conveying process, and can be compatible with the silicon wafers with different specifications for conveying;
(2) According to the transmission mechanism and the conveyor for conveying the silicon wafers, the synchronous structure is connected with the power servo motor by using the bevel gears with the same pitch and size, so that the width adjusting device and the conveying device can synchronously run at the same speed;
(3) According to the transmission mechanism and the conveyor for conveying the silicon wafers, the silicon wafers receive the friction force of the front bottom surface conveying transmission synchronous belt and the friction force of the front side surface clamping supporting synchronous belt in the conveying process, and the silicon wafers cannot be torn due to uneven pulling because the belt speeds of the bottom surface and the side surfaces of the silicon wafers are the same as each other;
(4) According to the transmission mechanism and the conveyor for conveying the silicon wafers, the extending distance of the width adjusting cylinder is preset manually, and the initial width setting is carried out on the width adjusting device so as to adapt to the size of the silicon wafers to be conveyed.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model. In the drawings:
FIG. 1 is an axial view schematically showing a transmission mechanism for conveying silicon wafers according to an embodiment of the present utility model;
FIG. 2 is an axial view schematically showing a transmission mechanism for conveying silicon wafers according to an embodiment of the present utility model;
FIG. 2-A is a schematic view of a partial axial view of a transmission mechanism for transporting silicon wafers according to an embodiment of the present utility model;
FIG. 3 is a schematic top view of a transmission mechanism for transporting silicon wafers according to an embodiment of the present utility model;
FIG. 4 is a schematic diagram of a shaft view of a silicon wafer conveyor according to an embodiment of the present utility model;
FIG. 5 is an isometric view of a transmission according to an embodiment of the present utility model;
FIG. 6 is an isometric view of a transmission according to an embodiment of the present utility model;
fig. 6-B is a schematic view of a partial axial view of a transmission mechanism according to an embodiment of the present utility model.
Reference numerals illustrate:
1-a power servo motor; 2-a vertical transmission shaft; 3-clamping and supporting the synchronous belt; 4-width adjusting synchronous belts; 401-a first primary pulley; 402-a first slave pulley; 5-conveying a transmission synchronous belt; 601-a second primary pulley; 602-a second slave pulley; 603-transverse drive shafts; 604-bevel gear; 7-a width adjusting cylinder; 8-rolling wheel rolls.
Detailed Description
It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other.
The utility model will be described in detail below with reference to the drawings in connection with embodiments.
The belt clamping type silicon wafer transmission mechanism is a device for clamping and conveying silicon wafers through a belt when the silicon wafers are inserted into a flower basket, and mainly solves the problem of preventing the phenomenon that the silicon wafers are inclined or toppled in the forward conveying process, and meanwhile, the belt clamping type silicon wafer transmission mechanism can be compatible with conveying silicon wafers of different specifications.
As shown in fig. 1, the transmission mechanism mainly comprises three parts of a width adjusting device, a conveying device and a power servo motor 1. The power servo motor 1 is a main driving piece and is connected with a width adjusting device through a vertical transmission shaft 2 to output torque to improve power. The conveyor comprises a synchronizing structure which is connected to the power servo motor 1 by means of two bevel gears 604 of the same pitch and size, so that the width adjustment device and the conveyor can run synchronously at the same speed.
As shown in fig. 1-4, the main working principle of the silicon wafer transmission mechanism in the application is as follows:
the entire transmission is immersed in water (not shown in the figures) and the primary transmission work takes place in the body of water. And placing a material frame filled with a plurality of silicon wafers at a specific position at the starting end of the conveying device, and starting the power servo motor 1 to output torque to drive the vertical transmission shaft 2 to rotate. In the synchronous configuration, the transverse drive shafts 603 perpendicular to the vertical drive shaft 2 are connected to each other by two bevel gears 604. The vertical transmission shaft 2 rotates and simultaneously drives the transverse transmission shaft 603 to synchronously rotate due to the connection effect of the bevel gear 604. The transverse transmission shaft 603 will drive the second driving wheel and the second driven wheel, so that the conveying and driving synchronous belt 5 is tensioned to start continuous conveying and conveying actions, at this time, the silicon wafer group at a specific position starts to be contacted by the conveying and driving synchronous belt 5, and as the silicon wafer group is absorbed onto the belt surface of the conveying and driving synchronous belt 5 one by one in water, and starts to be conveyed forwards like a pipeline conveyor belt. The roller roll 8 is arranged at the tail end of the conveying and driving synchronous belt 5, when the silicon wafer is conveyed to the tail end of the conveying and driving synchronous belt 5, the silicon wafer is absorbed by the continuously working roller roll 8 to be rolled out of the driving mechanism and leaves the water body, and the silicon wafer starts to enter the next silicon wafer production process.
As shown in fig. 5-6, the width adjusting device is used as an auxiliary device to mainly limit the position and orientation of the silicon wafer on the conveying synchronous belt 5, so as to prevent the phenomenon that the silicon wafer is deflected or toppled in the forward conveying process, and to convey the silicon wafers with different specifications. Since the first main belt pulley 401 of the width adjusting device is connected to the top of the vertical transmission shaft 2 through a shaft, the first main belt pulley 401 is driven by the vertical transmission shaft 2 at the start of the power servo motor 1, and then drives the first auxiliary belt pulley 402, so that the width adjusting synchronous belt 4 performs belt transmission work. The first slave pulley 402 is connected with the clamping and supporting synchronous belt 3, and the clamping and supporting synchronous belt 3 starts to carry out belt transmission along with the operation of the width-adjusting synchronous belt 4 so as to support the silicon wafer which is clamped and moved forward. Because the transverse transmission shaft 603 is synchronously connected with the vertical transmission shaft 2 through the bevel gear 604, and the second main belt pulley 601 is in shaft connection with the transverse transmission shaft 603, the upper belt surface of the conveying transmission synchronous belt 5 is mutually perpendicular to the belt surface of the clamping supporting synchronous belt 3; meanwhile, the second main belt pulley 601 and the first main belt pulley 401 are the same in size, and the second auxiliary belt pulley 602 and the first auxiliary belt pulley 402 are the same in size, so that the belt speeds between the clamping and supporting synchronous belt 3 and the conveying transmission synchronous belt 5 are synchronous, and the phenomenon that silicon wafers are deflected and toppled in the transportation process is avoided. In summary, the silicon wafer receives the friction force of the front and bottom surface conveying transmission synchronous belt 5 and the friction force of the front and side surface clamping supporting synchronous belt 3 in the conveying process, and the belt speed of the bottom surface and the side surface due to the synchronous mechanism is the same, so that the silicon wafer cannot be torn due to uneven pulling.
The width adjustment device may be initially set according to the size of the silicon wafer to be transported as shown in fig. 6-B, and in one embodiment, at least two or more width adjustment cylinders 7 are symmetrically disposed on the width adjustment device. The extending end of the width adjusting cylinder 7 is propped against the clamping supporting synchronous belt 3, and before the power servo motor 1 is started, the extending distance of the width adjusting cylinder 7 is set manually in advance, and the width adjusting device is set to be the initial width so as to adapt to the size of the silicon wafer to be conveyed.
As shown in fig. 6, in a specific embodiment, the transmission mechanism includes two identical vertical transmission shafts 2 and one transverse transmission shaft 603, the power servo motor 1 is connected to one of the vertical transmission shafts 2, one end of the transverse transmission shaft 603 is synchronously connected to the vertical transmission shaft 2 through two bevel gears 604, and the other end of the transverse transmission shaft 603 is synchronously connected to the other vertical transmission shaft 2 through two identical bevel gears 604. The transverse transmission shaft 603 is connected with the second main belt pulley 601 through a shaft, and drives the conveying transmission synchronous belt 5 to carry out belt transmission under the combined action of the second main belt pulley 601 and the second auxiliary belt pulley 602. The top ends of the two vertical transmission shafts 2 are respectively connected with two identical first main pulleys 401, the two first main pulleys 401 are connected with two identical first auxiliary pulleys 402 through two identical width adjustment synchronous belts 4, and the two first auxiliary pulleys 402 are in shaft connection with the two clamping and supporting synchronous belts 3, so that the transmission speed of the two clamping and supporting synchronous belts 3 is synchronous with the driving transmission. The synchronous structure shown in fig. 6 is constructed in this way, and the width adjusting means and the conveying means are arranged in a central axis symmetrical fashion.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model, and are intended to be included within the scope of the appended claims and description.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.
Claims (7)
1. A transmission mechanism for conveying silicon wafers is characterized in that: comprises a width adjusting device, a conveying device and a power servo motor (1);
the power servo motor (1) is connected with a width adjusting device;
the conveying device comprises a synchronous structure, and the synchronous structure is connected with a power servo motor (1);
the width adjusting device is used for supporting the silicon wafer, and the conveying device is used for synchronizing the operation between the width adjusting device and the conveying device due to the fact that the silicon wafer is conveyed.
2. A silicon wafer transport transmission mechanism according to claim 1, wherein: the width adjusting device comprises a vertical transmission shaft (2), a width adjusting synchronous belt (4) and a clamping supporting synchronous belt (3);
the vertical transmission shaft (2) is connected with the power servo motor (1), one end of the width adjustment synchronous belt (4) is connected with the vertical transmission shaft (2), and the other end is connected with the clamping and supporting synchronous belt (3).
3. A silicon wafer transport transmission mechanism according to claim 2, wherein: the width adjustment synchronous belt (4) comprises a first main belt pulley (401) and a first auxiliary belt pulley (402), and the first main belt pulley (401) is connected to the top of the vertical transmission shaft (2) through a shaft;
a first slave pulley (402) is connected with the clamping supporting synchronous belt (3) in a shaft way, and the transmission speed is synchronous.
4. A silicon wafer transport drive according to claim 3, wherein: the conveying device comprises a conveying transmission synchronous belt (5) and a synchronous structure;
the synchronous structure comprises a second main belt pulley (601), a second auxiliary belt pulley (602), a transverse transmission shaft (603) and a bevel gear (604);
the transverse transmission shaft (603) is synchronously connected with the vertical transmission shaft (2) through a bevel gear (604), and the second main belt wheel (601) is in shaft connection with the transverse transmission shaft (603); the upper belt surface of the conveying transmission synchronous belt (5) is mutually perpendicular to the belt surface of the clamping and supporting synchronous belt (3).
5. The transmission mechanism for conveying silicon wafers according to claim 4, wherein: the second main belt pulley (601) has the same size as the first main belt pulley (401), and the second auxiliary belt pulley (602) has the same size as the first auxiliary belt pulley (402) and is used for synchronizing the belt speed between the clamping supporting synchronous belt (3) and the conveying transmission synchronous belt (5).
6. The transmission mechanism for conveying silicon wafers according to claim 5, wherein: the device also comprises width adjusting cylinders (7), wherein at least two width adjusting cylinders (7) are symmetrically fixed on the transmission mechanism and abut against the clamping supporting synchronous belt (3) for initial width setting of the width adjusting device.
7. A silicon wafer conveyor comprising a drive mechanism for conveying silicon wafers as claimed in any one of claims 1 to 6, characterized in that: the device comprises a material frame and a roller roll (8), wherein the material frame is loaded with silicon chips and is positioned at the starting end of the conveying device, and the material frame is used for stacking the silicon chips on the conveying device;
the roller coil (8) is positioned at the tail end of the conveying device and is used for rolling away the silicon wafer on the conveying device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322111561.6U CN220555503U (en) | 2023-08-07 | 2023-08-07 | Transmission mechanism and conveyer that silicon chip was carried usefulness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322111561.6U CN220555503U (en) | 2023-08-07 | 2023-08-07 | Transmission mechanism and conveyer that silicon chip was carried usefulness |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220555503U true CN220555503U (en) | 2024-03-05 |
Family
ID=90050825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322111561.6U Active CN220555503U (en) | 2023-08-07 | 2023-08-07 | Transmission mechanism and conveyer that silicon chip was carried usefulness |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220555503U (en) |
-
2023
- 2023-08-07 CN CN202322111561.6U patent/CN220555503U/en active Active
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