CN220515723U - Optical head device for processing articles - Google Patents
Optical head device for processing articles Download PDFInfo
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- CN220515723U CN220515723U CN202321771126.XU CN202321771126U CN220515723U CN 220515723 U CN220515723 U CN 220515723U CN 202321771126 U CN202321771126 U CN 202321771126U CN 220515723 U CN220515723 U CN 220515723U
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- lens
- beam expander
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- light source
- optical head
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- 238000012545 processing Methods 0.000 title claims abstract description 45
- 230000003287 optical effect Effects 0.000 title claims abstract description 33
- 238000012544 monitoring process Methods 0.000 claims abstract description 16
- 238000003384 imaging method Methods 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 238000002834 transmittance Methods 0.000 description 6
- 239000006059 cover glass Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 206010057469 Vascular stenosis Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Abstract
The utility model discloses an optical head device for processing articles, which comprises a first light source, a phase delay plate, a first beam expander, a second beam expander and a focusing lens unit, wherein the first light source, the phase delay plate, the first beam expander, the second beam expander and the focusing lens unit are sequentially arranged; the first beam expander is used for focusing an incident beam and expanding the cross section size of the beam according to the multiplying power, and the second beam expander expands the beam expanded by the first beam expander according to the multiplying power; the focusing lens unit is used for focusing the light beams expanded by the first beam expander and the second beam expander on a processed object to form a condensed light spot; the processing article is also provided with a monitoring unit for monitoring the processing state of the processing article. The utility model can reduce the size of the laser spot on the processed article and monitor the processing state of the article.
Description
Technical Field
The utility model relates to the technical field of optical heads, in particular to an optical head device for processing articles.
Background
In general, an optical head device for processing an article is operated by irradiating a laser beam to a processed article placed on a two-dimensional or three-dimensional processing table to process the processed article into a desired pattern of a fine size, such as a holder (steps) and a template (step). Wherein the stent is an auxiliary device for treating vascular stenosis, is a cylindrical member of a mesh structure, and has a diameter which can be expanded from about 9 mm to 35 mm by the auxiliary device. In order not to damage the blood vessel, the pattern of the stent must be in a closed curve shape, so the processing difficulty is great. In addition, a stencil is an apparatus for applying solder paste (paste) in the production of printed circuit boards, which refers to a printed board that forms a pattern corresponding to a solder paste application position.
Referring to fig. 1, the conventional optical head device for processing an article includes a first light source 1 for irradiating laser light, a beam expansion telescope 2, a focusing lens unit 3, and a processed article 5 placed on a processing table 4, the focusing lens unit 3 for focusing incident light on the processed article 5 to form a spot. The beam expansion telescope 2 converts the divergent incident laser light into collimated light and expands it into a beam of approximately 6-fold diameter. Here, the spot size focused by the focusing lens unit 3 is determined by the wavelength, divergence angle, magnification of the beam expansion telescope 2, and optical path of the light emitted from the first light source 1.
However, the conventional optical head device for processing an article has a limit in reducing the size of a spot by expanding incident light using a beam expansion telescope with a fixed magnification, and thus it is difficult to form a fine pattern by cutting a laser on a holder and a template. In addition, the conventional optical head device for processing an article is not equipped with a vision system for recognizing the processing state of the processed article, particularly, based on the movement of a two-dimensional or three-dimensional processing table and the modulation of a laser light source.
Disclosure of Invention
In view of the shortcomings of the prior art, the utility model aims to provide an optical head device for processing an article, which utilizes laser to process the article with a micro-size pattern, can reduce the size of a laser spot on the processed article, and can monitor the processing state of the article.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows: an optical head device for processing articles comprises a first light source, a phase delay plate, a first beam expander, a second beam expander and a focusing lens unit which are sequentially arranged, wherein the first light source is used for irradiating laser beams; the phase delay plate is used for delaying the phase of the light beam irradiated by the first light source, and the phase delay plate is used for converting the linearly polarized light beam into a circularly polarized light beam; the first beam expander is used for focusing an incident beam and expanding the cross section size of the beam according to magnification, the second beam expander is arranged at intervals with the first beam expander, and the second beam expander expands the beam expanded by the first beam expander according to magnification; the focusing lens unit is used for focusing the light beams expanded by the first beam expander and the second beam expander on a processed object to form a condensed light spot; the optical head device also comprises a monitoring unit for monitoring the processing state of the processed object, and the monitoring unit is arranged at the processed object.
As a preferable scheme, the monitoring unit comprises a second light source, a dichroic mirror, a condensing lens unit and a display unit which are sequentially arranged, wherein the second light source is arranged around a processing object, a light beam emitted by the second light source is reflected by the processing object and then faces to the direction of the dichroic mirror, the dichroic mirror is arranged between a second beam expander and the condensing lens unit, the condensing lens unit is used for focusing the light beam incident through the dichroic mirror, and the display unit is used for imaging and displaying the light beam focused by the condensing lens unit.
As a preferred aspect, the display unit includes an imaging element for imaging a shape of the work object and outputting image information, and a monitor for displaying an image signal output by the imaging element.
As a preferable mode, the first beam expander comprises a first lens and a second lens which are arranged in sequence, wherein the first lens has negative refractive power and is used for expanding an incident beam of the first light source, and the second lens has positive refractive power and is used for focusing the incident beam expanded by the first lens into a parallel beam.
As a preferred mode, the second beam expander comprises a third lens, a fourth lens and a fifth lens which are arranged in sequence, wherein the third lens has negative refractive power and is used for expanding the incident beam of the first beam expander, and the fourth lens and the fifth lens have positive refractive power and are used for focusing the beam expanded by the fourth lens.
As a preferable mode, the focusing lens unit includes a sixth lens having negative refractive power, a seventh lens having positive refractive power, and a barrier glass disposed in this order, the barrier glass being disposed between the seventh lens and the work object.
Compared with the prior art, the utility model has the beneficial effects that: the utility model utilizes the laser to process the object with the micro-size pattern, can reduce the size of the laser spot on the processed object, and can monitor the processing state of the object.
Drawings
FIG. 1 is a schematic view of an optical layout of a conventional optical head device for article processing;
FIG. 2 is a schematic view showing the optical layout of an optical head device for processing articles according to the present utility model;
FIG. 3 is a schematic view of the structure of the first beam expander of the present utility model;
FIG. 4 is a schematic diagram of a second beam expander of the present utility model;
fig. 5 is a schematic view of a structure of a focus lens unit in the present utility model;
FIG. 6 is a beam profile schematic of an X-section of a beam focused by a focusing lens unit onto a work object in accordance with the present utility model;
FIG. 7 is a beam profile schematic of a Y-section of a beam focused by a focusing lens unit on a work piece in accordance with the present utility model;
wherein the accompanying figures identify a list: the optical system comprises a first light source 1, a beam expansion telescope 2, a focusing lens unit 3, a processing table 4, a processing object 5, a phase delay plate 6, a first beam expander 7, a second beam expander 8, a monitoring unit 9, a second light source 10, a dichroic mirror 11, a condensing lens unit 12, a display unit 13, an imaging element 14, a monitor 15, a first lens 16, a second lens 17, a third lens 18, a fourth lens 19, a fifth lens 20, a sixth lens 21, a seventh lens 22, and a baffle glass 23.
Detailed Description
The utility model is further described below in connection with specific embodiments. The following examples are only for more clearly illustrating the technical aspects of the present utility model, and are not intended to limit the scope of the present utility model.
Examples
As shown in fig. 2, an optical head device for article processing includes a first light source 1, a phase delay plate 6, a first beam expander 7, a second beam expander 8, and a focusing lens unit 3, which are disposed in this order, the first light source 1 being for irradiating a laser beam; the phase delay plate 6 is used for delaying the phase of the light beam irradiated by the first light source 1, and the phase delay plate 6 is used for converting the linearly polarized light beam into a circularly polarized light beam; the first beam expander 7 is used for focusing an incident beam and expanding the cross section size of the beam by multiplying power, the second beam expander 8 is arranged at a distance from the first beam expander 7, and the second beam expander 8 expands the beam expanded by the first beam expander 7 by multiplying power; the focusing lens unit 3 is used for focusing the light beams expanded by the first beam expander 7 and the second beam expander 8 on the processed object 5 to form a condensed light spot; the optical head device also comprises a monitoring unit 9 for monitoring the processing state of the processed object 5, wherein the monitoring unit 9 is arranged at the processed object 5
Specifically, the first light source 1 is a low power laser having an output power of about 4.5 w to 7.5 w, which is irradiated with a linearly polarized light beam in a TEM00 mode, and in this embodiment, a Nd: YAG pulse laser, a CO2 laser, or an Ultraviolet (UV) laser may be used as the first light source 1. Wherein the Nd: YAG pulse laser is a long wavelength laser suitable for a processed article 5 of a stainless steel (SUS) series material, the Ultraviolet (UV) laser is a short wavelength laser suitable for a processed article 5 of a Polyimide (Polyimide) film or the like material, and the CO2 laser is an infrared laser suitable for a processed article 5 of a stainless steel (SUS) series material or for welding the processed article 5. Further, in the present utility model, after the laser beam irradiated by the first light source 1 is expanded by the first beam expander 7 and the second beam expander 8 by the magnification, the power PO of the spot focused by the focusing lens unit 3 on the work piece 5 is about 100 watts to 150 watts, which is sufficient to cut the work piece 5 in a predetermined pattern.
More specifically, a phase delay plate 6 for delaying the phase of the laser beam irradiated by the first light source 1 is provided on the optical path between the first light source 1 and the first beam expander 7, the phase delay plate 6 converting the linearly polarized beam incident from the first light source 1 side into a circularly polarized beam, the phase delay plate 6 being a 1/4 wavelength plate for delaying the wavelength of the laser beam irradiated from the first light source 1 by 1/4 wavelength in this embodiment.
Further, the first beam expander 7 is located on the optical path between the phase delay plate 6 and the second beam expander 8, and the first beam expander 7 is configured to focus the incident beam and expand the cross-sectional size of the incident beam by a certain magnification.
Wherein in the present embodiment the work object 5 is mounted on a two-dimensional or three-dimensional work table 4.
Preferably, the monitoring unit 9 includes a second light source 10, a dichroic mirror 11, a condensing lens unit 12, and a display unit 13 sequentially disposed, where the second light source 10 is disposed around the processing article 5, a light beam emitted by the second light source 10 is reflected by the processing article 5 and faces the direction of the dichroic mirror 11, the dichroic mirror 11 is disposed between the second beam expander 8 and the focusing lens unit 3, the condensing lens unit 12 is used for focusing the light beam incident through the dichroic mirror 11, and the display unit 13 is used for imaging and displaying the light beam focused by the condensing lens unit 12.
Specifically, the second light source 10 emits a visible light beam for illuminating a light beam in a range of 600 nm to 700 nm; the dichroic mirror 11 is used to separate the incident laser beam and the visible beam such that the beam of the visible beam range is directed only towards the display unit 13, i.e. the laser beam of the incident beam from the work object 5 is reflected by the dichroic mirror 11, whereas the visible beam is transmitted by the dichroic mirror 11.
More preferably, the display unit 13 includes an imaging element 14 for imaging the shape of the work object 5 and outputting image information, and a monitor 15 for displaying an image signal output from the imaging element 14.
Specifically, the display unit 13 in this embodiment includes the imaging element 14 and the monitor 15, and the display unit may be directly observed with naked eyes without the imaging element 14 and the monitor 15 in practical use.
Further, by providing the monitor unit 9, the processing state of the processed article 5 by the laser beam emitted from the first light source 1 and the posture of the processed article 5 mounted on the two-dimensional or three-dimensional processing table 4 can be simultaneously observed.
Preferably, as shown in fig. 3, the first beam expander 7 includes a first lens 16 and a second lens 17 disposed in this order, the first lens 16 having a negative refractive power and being configured to expand the incident beam of the first light source 1, and the second lens 17 having a positive refractive power and being configured to focus the expanded incident beam of the first lens 16 into a parallel beam.
Specifically, the first beam expander 7 in this embodiment is a double beam expanding telescope optical system capable of expanding the cross-sectional width of an incident beam twice as large as the original, and halving the divergence angle. Further, the first lens 16 and the second lens 17 have a beam transmittance of about 99.8% or more for a range of about 1000 nm to 1110 nm and a beam transmittance of about 90% for a range of 632 nm, wherein the design data of the first beam expander 7 are shown in table 1 below.
Preferably, as shown in fig. 4, the second beam expander 8 includes a third lens 18, a fourth lens 19, and a fifth lens 20 disposed in this order, the third lens 18 having a negative refractive power and being configured to expand the incident beam of the first beam expander 7, and the fourth lens 19 and the fifth lens 20 having a positive refractive power and being configured to focus the beam expanded by the fourth lens 19.
Specifically, the second beam expander 8 in the present embodiment is a quadruple beam expander telescope optical system, and the second beam expander 8 expands the cross-sectional width of the incident beam four times as much as the original in order to further expand the beam expanded by the first beam expander 7. Further, the third lens 18, the fourth lens 19 and the fifth lens 20 have a beam transmittance of about 99.8% or more for a range of about 1000 nm to 1110 nm and a beam transmittance of about 90% for a range of 632 nm, wherein the design data of the second beam expander 8 are shown in table 1 below.
Preferably, as shown in fig. 5, the focusing lens unit 3 includes a sixth lens 21, a seventh lens 22, and a cover glass 23 sequentially disposed, the sixth lens 21 having a negative refractive power, the seventh lens 22 having a positive refractive power, and the cover glass 23 being disposed between the seventh lens 22 and the work item 5.
Specifically, the incident beam emitted by the first light source 1 passes through the first beam expander 7 and the second beam expander 8, and then is focused on the processed object 5 by the focusing lens unit 3 to form a light spot, where the cover glass 23 of the focusing lens unit 3 is used for protecting the sixth lens 21 and the seventh lens 22. Further, the incident surface and the exit surface of the sixth lens 21 and the seventh lens 22 have a transmittance of about 99.9% or more for the incident light beam emitted from the first light source 1 and a transmittance of about 90% or more for the visible light beam emitted from the second light source 10, respectively, wherein examples of design data of the focusing lens unit 3 are shown in table 1 below.
Table 1:
specifically, in the present embodiment, optical data and optical arrangement of the first beam expander 7, the second beam expander 8, and the focus lens unit 3 according to fig. 2 to 5 are shown in table 1, r1 to r16 in table 1 denote the radius of curvature of the entrance surface or the exit surface of each lens, and d1 to d15 denote the thickness of each lens or the pitch between adjacent lenses.
More specifically, in the present embodiment, as shown in fig. 6 to 7, the beam profile of the X-section and the Y-section of the beam passing through the focusing lens unit 3 has a single mode characteristic of TEM00, and the diameter Φ1 and the diameter Φ2 of the effective spot are about 10 micrometers, so that a fine pattern is formed.
In summary, the present utility model can reduce the size of the light spot to several tens micrometers by setting the first beam expander 7 and the second beam expander 8 to adjust the magnification of the incident beam of the first light source 1, and increase the power of the beam on the processing object 5 by the optimized focusing lens unit 3, so as to achieve the advantage of generating a high power light spot on the low power first light source 1, and in addition, by setting the monitoring unit 9, the processing state of the processing object 5 on the two-dimensional or three-dimensional processing table 4 can be conveniently known.
The foregoing is merely a preferred embodiment of the present utility model, and it should be noted that modifications and variations could be made by those skilled in the art without departing from the technical principles of the present utility model, and such modifications and variations should also be regarded as being within the scope of the utility model.
Claims (6)
1. An optical head device for processing articles, characterized in that: the device comprises a first light source, a phase delay plate, a first beam expander, a second beam expander and a focusing lens unit which are sequentially arranged, wherein the first light source is used for irradiating laser beams; the phase delay plate is used for delaying the phase of the light beam irradiated by the first light source, and the phase delay plate is used for converting the linearly polarized light beam into a circularly polarized light beam; the first beam expander is used for focusing an incident beam and expanding the cross section size of the beam according to magnification, the second beam expander is arranged at intervals with the first beam expander, and the second beam expander expands the beam expanded by the first beam expander according to magnification; the focusing lens unit is used for focusing the light beams expanded by the first beam expander and the second beam expander on a processed object to form a condensed light spot; the optical head device also comprises a monitoring unit for monitoring the processing state of the processed object, and the monitoring unit is arranged at the processed object.
2. An optical head apparatus for article processing according to claim 1, wherein: the monitoring unit comprises a second light source, a dichroic mirror, a condensing lens unit and a display unit which are sequentially arranged, the second light source is arranged around a processed object, a light beam emitted by the second light source is reflected by the processed object and faces the direction of the dichroic mirror, the dichroic mirror is arranged between the second beam expander and the condensing lens unit, the condensing lens unit is used for focusing the light beam incident through the dichroic mirror, and the display unit is used for imaging and displaying the light beam focused by the condensing lens unit.
3. An optical head apparatus for use in article processing according to claim 2, wherein: the display unit includes an imaging element for imaging a shape of the work object and outputting image information, and a monitor for displaying an image signal output by the imaging element.
4. An optical head apparatus for article processing according to claim 1, wherein: the first beam expander comprises a first lens and a second lens which are sequentially arranged, wherein the first lens has negative refractive power and is used for expanding an incident beam of the first light source, and the second lens has positive refractive power and is used for focusing the incident beam expanded by the first lens into a parallel beam.
5. An optical head apparatus for article processing according to claim 1, wherein: the second beam expander comprises a third lens, a fourth lens and a fifth lens which are sequentially arranged, wherein the third lens has negative refractive power and is used for expanding an incident beam of the first beam expander, and the fourth lens and the fifth lens have positive refractive power and are used for focusing the beam expanded by the fourth lens.
6. An optical head apparatus for article processing according to claim 1, wherein: the focusing lens unit comprises a sixth lens, a seventh lens and baffle glass which are sequentially arranged, the sixth lens has negative refractive power, the seventh lens has positive refractive power, and the baffle glass is arranged between the seventh lens and a processed object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321771126.XU CN220515723U (en) | 2023-07-07 | 2023-07-07 | Optical head device for processing articles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321771126.XU CN220515723U (en) | 2023-07-07 | 2023-07-07 | Optical head device for processing articles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220515723U true CN220515723U (en) | 2024-02-23 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321771126.XU Active CN220515723U (en) | 2023-07-07 | 2023-07-07 | Optical head device for processing articles |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220515723U (en) |
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- 2023-07-07 CN CN202321771126.XU patent/CN220515723U/en active Active
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