KR20130030682A

KR20130030682A - Laser processing device

Info

Publication number: KR20130030682A
Application number: KR1020110094313A
Authority: KR
Inventors: 신원호; 미나미다 카즈히로; 윤영수
Original assignee: 삼성전기주식회사
Priority date: 2011-09-19
Filing date: 2011-09-19
Publication date: 2013-03-27

Abstract

The present invention relates to a laser processing apparatus. According to an embodiment of the present invention, a laser beam generation unit for generating a laser beam, an optical modulation unit for receiving a laser beam, branching and outputting the received laser beam, and refraction of a branched laser beam by receiving a branched laser beam There is provided a laser processing apparatus including a refractive amplifier for increasing the angle and outputting the laser beam output by the refractive amplifier and receiving a laser beam to be irradiated to the processing target.

Description

Laser processing device {LASER PROCESSING DEVICE}

The present invention relates to a laser processing apparatus.

The laser processing apparatus can remove, mark, process and surface a desired target without surrounding damage by irradiating a laser beam at a very local place in a non-contact manner to the object to be processed.

The quality of such laser processing is affected by the material and size of the object to be processed, the intensity distribution of the irradiated laser beam, and the accuracy of the irradiated position. In particular, Japanese Laid-Open Patent Publication No. 2005-161327 discloses a method of correcting the axial deviation of a laser beam by using an acoustic optical element (AOM), which is an acoustic optical element, for the accuracy of the position of the laser beam. Alternatively, a plurality of optical systems, such as a mirror and an objective lens, are used to correct the position of the laser beam. However, as the number of uses of the optical system increases, the path of the laser beam becomes more complicated and increased.

The present invention is to provide a laser processing apparatus that can increase the refractive index of the laser beam.

The present invention relates to a laser processing apparatus that can reduce the number of uses of the optical system by increasing the refractive index of the laser beam.

The present invention relates to a laser processing apparatus capable of reducing the path of a laser beam by increasing the refractive index of the laser beam.

According to an aspect of the present invention, a laser beam generating unit for generating a laser beam, an optical modulator for receiving a laser beam, and branching and outputting the received laser beam, refraction of the branched laser beam by receiving a branched laser beam There is provided a laser processing apparatus including a refractive amplifier for increasing the angle and outputting the laser beam output by the refractive amplifier and receiving a laser beam to be irradiated to the processing target.

The optical modulator may include an acoustic optic modulator (AOM).

The light modulator may branch and output the laser beam received from the laser beam generator into a plurality of laser beams having a first refractive angle.

The refractive amplifier may be formed of a refractive amplifier module.

The refractive amplifier may have a convex shape in which an incident surface on which the laser beam branched from the light modulator is received receives a predetermined angle from an upper surface and a lower surface of the center of the refractive amplifier.

The refractive amplifier may have a concave shape in which an output surface on which the laser beam branched from the light modulator is output, has a predetermined angle at an upper surface and a lower surface with respect to the center of the refractive amplifier.

The refractive amplifier may adjust the refractive angle by at least one of an incident surface or an output surface on which the laser beam branched from the light modulator is received based on the center of the refractive amplifier.

When the laser beam branched from the light modulator enters the center of the refractive amplifier, the refractive amplifier may have a refractive angle of 0 degrees when the branched laser beam is output.

The refractive amplifier may include at least one of zirconium (Zr), germanium (Ge), or zinc serenide (ZnSe).

The laser beam generator may be provided at a predetermined point on the laser beam path between the laser generator and the light modulator, and further include a beam extender for extending the width of the laser beam.

The laser beam generator may further include a beam shaper provided at a predetermined point on the laser beam path between the laser generator and the light modulator to convert an energy distribution of the laser beam into a flat top format.

A mask may be provided at a predetermined point on the laser beam path between the laser generator and the light modulator, and may pass through the laser beam in a predetermined pattern.

The features and advantages of the present invention will become more apparent from the following detailed description based on the accompanying drawings.

Prior to that, terms and words used in the present specification and claims should not be construed in a conventional and dictionary sense, and the inventor may properly define the concept of the term in order to best explain its invention It should be construed as meaning and concept consistent with the technical idea of the present invention.

Laser processing apparatus according to an embodiment of the present invention can increase the refractive index of the laser beam.

Laser processing apparatus according to an embodiment of the present invention can reduce the number of use of the optical system by increasing the refractive index of the laser beam.

Laser processing apparatus according to an embodiment of the present invention can reduce the path of the laser beam by increasing the refractive index of the laser beam.

1 is a block diagram showing a laser processing apparatus according to an embodiment of the present invention.
2 is an exemplary view showing a refractive amplifier according to an embodiment of the present invention.
Figure 3 is an exemplary view showing a laser processing apparatus according to an embodiment of the present invention.
Figure 4 is an exemplary view showing a laser processing apparatus according to another embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The objectives, specific advantages and novel features of the present invention will become more apparent from the following detailed description and examples taken in conjunction with the accompanying drawings. It should be noted that, in the present specification, the reference numerals are added to the constituent elements of the drawings, and the same constituent elements are assigned the same number as much as possible even if they are displayed on different drawings.

In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail. In this specification, the terms first, second, etc. are used to distinguish one element from another, and the element is not limited by the terms.

Hereinafter, a laser processing apparatus according to an exemplary embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram showing a laser processing apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the laser processing apparatus 100 may include a laser beam generator 110, an optical modulator 120, a refractive amplifier 130, and a mirror 140.

The laser beam generator 110 may generate a laser beam. The laser beam generator 110 according to an embodiment of the present invention may be a YAG laser or a CO 2 laser. However, the type of the laser beam generator 110 is not limited thereto, and may be easily changed by those skilled in the art. As described above, the laser beam generated by the laser beam generator 110 may be output to the light modulator 120.

The light modulator 120 may receive the laser beam output from the laser beam generator 110. The light modulator 120 may branch the laser beam to adjust the amount of energy of the received laser beam or to separate the path of the laser beam. In this case, the light modulator 120 may branch and output the first laser beam and the second laser beam to be formed by refracting the received laser beam at a predetermined angle in opposite directions with respect to the central axis. In an embodiment of the present invention, the laser beam is divided into the first laser beam and the second laser beam by way of example, but is not limited thereto. That is, the number of branches of the laser beam may vary according to the type of the light modulator 120.

In an embodiment of the present invention, the optical modulator 120 may branch an laser beam path and include an AOM (Acoustic Optic Modulator). Although the light modulator 120 includes the AOM in an embodiment of the present invention, the present invention is not limited thereto. That is, the type of the light modulating unit 120 for branching the path of the laser beam may be changed within the range in which the technical idea of the present invention is maintained. As such, the light modulator 120 may receive the laser beam, and output the first laser beam and the second laser beam having the branched shape by refracting the received laser beam at a predetermined first refraction angle. Here, the predetermined first refraction angle at which the laser beams are each branched by the AOM may be, for example, 4 degrees. The first refraction angle is 4 degrees, according to one embodiment of the present invention. The first refraction angle may vary according to the type of the light modulation unit 120. The branched laser beam of the light modulator 120 may be output to the refractive amplifier 130.

The refractive amplifier 130 may receive the branched laser beam. The refractive amplifier 130 may increase the refractive index of the received branched laser beam. The refractive amplifier 130 may increase the refractive index of the branched laser beam having the respective paths, thereby changing the path of the branched laser beam from the first refractive angle to the path corresponding to the second refractive angle with the increased refractive index. . That is, the refractive amplifier 130 may increase the refractive index of each branched laser beam, thereby increasing the first refractive angle of the light modulator 120 to the second refractive angle. By increasing the first refraction angle of the laser beam to be branched in the light modulator 120 to the second refraction angle, the optical system such as a mirror or the like used to irradiate the laser beam by the small angle to the processing target The number and path length can be reduced. As such, the branched laser beam irradiated by the refractive amplifier 130 to the path having the increased refractive index may be output to the mirror unit 140.

The mirror unit 140 may reflect the branched laser beam output from the refractive amplifier 130 at a predetermined reflection angle. The mirror unit 140 may adjust the reflection angle at which the branched laser beam is reflected, so that the branched laser beam may be irradiated to each processing target.

As described above, the laser processing apparatus according to the embodiment of the present invention has a small refraction angle of the light modulating unit 120, so that the use of a complicated and large number of optical systems used when irradiating a laser beam to a processing target can be reduced. have.

2 is an exemplary view showing a refractive amplifier according to an embodiment of the present invention.

Referring to FIG. 2, the refractive amplifier may be formed of the refractive amplifier module 131. The refractive amplifier module 131 may include an incident surface 133 to which the branched laser beams 201 and 203 are incident and an output surface 134 to which the incident laser beams 201 and 203 are output.

The incident surface 133 may be formed in a convex shape in which the top and bottom surfaces thereof respectively have a predetermined angle with respect to the center 132 of the refractive amplifier module 131. The predetermined angle of the incident surface 133 may be an inclination of the upper or lower surface of the incident surface 133 from a vertical line of the center 132 of the refractive amplifier module 131. That is, the predetermined angle of the incident surface 133 may be α shown in FIG.

The output surface 134 may be formed in a concave shape having an upper surface and a lower surface having a predetermined angle with respect to the center of the refractive amplifier module 131. The predetermined angle of the output surface 134 may be an inclination of the upper or lower surface of the output surface 134 from the vertical line of the center 132 of the refractive amplifier module 131. That is, the predetermined angle of the output surface 134 may be β shown in FIG.

Referring to FIG. 2, the laser beams 201 and 203 may be received by the refractive amplifier module 131 from the light modulator 120. At this time, the laser beam 201 is the first refraction angle

It may be received on the upper surface of the incident surface 133 by a path having a. As such, when the laser beam 203 received with the first refractive angle is output from the refractive amplification module 131,

The refractive index of may be output at an amplified angle. In addition, when the laser beam 203 is received by the refractive amplification module 131, when the first refractive angle is 0 degrees, the laser beam 203 may be output from the refractive amplification module 131 without refraction.

As described above, the second refraction angle, which is the output refraction angle of the refraction amplification module 131, may be adjusted by α of the incident surface 133 and β of the output surface. For example, the second refractive angle of the refractive amplification module 131

According to Snell's law can be defined as [Equation 1] below.

[Formula 1]

here,

Is a first refractive angle which is an incident angle of the laser beam incident on the refractive amplification module 131,

Is a second refractive angle which is an output angle of the laser beam output from the refractive amplification module 131. Also,

Is the refractive index of the refractive amplifier module 131 itself.

The refractive amplifier module 131 of the refractive amplifier according to an embodiment of the present invention may be formed including at least one of zirconium (Zr), germanium (Ge) or zinc serenide (ZnSe).

[Table 1] shows the second refractive angles according to α and β of the refractive amplification module 131 formed of germanium according to the embodiment of the present invention.

alpha β

Amplification 0.0 0.0 4.0 1.0 0.0 5.0 19.7 4.9 0.0 10.0 39.8 10.0 1.0 5.0 25.4 6.3 1.0 10.0 48.2 12.0 2.0 5.0 31.3 7.8 2.0 10.0 59.2 14.8

As can be seen from Table 1, the refractive amplification module 131 according to the embodiment of the present invention can confirm that the refractive index of the laser beam 201 can be amplified by 10 times or more.

Figure 3 is an exemplary view showing a laser processing apparatus according to an embodiment of the present invention.

Referring to FIG. 3, the laser processing apparatus may include a laser beam generator 110, an AOM 121, a refractive amplifier module 131, a first mirror 141, and a second mirror 142. The path of a laser beam can be confirmed from such a laser processing apparatus.

The laser beam generator 110 may generate the laser beam 200. The laser beam generator 110 according to an embodiment of the present invention may be a YAG laser or a CO 2 laser.

The AOM 121 may receive the laser beam 200 output from the laser beam generator 110 and may branch the received laser beam 200. The AOM 121 may branch the laser beam 200 into the first laser beam 201 and the second laser beam 202 having a path of the first refraction angle.

The first laser beam 201 and the second laser beam 202 branched by the AOM 121 may be output to the refractive amplifier module 131.

The refractive amplification module 131 may increase the first refraction angle of the received first laser beam 201 and the second laser beam 202 to a second refraction angle. As such, the paths of the first laser beam 201 and the second laser beam 202 may be changed to paths having a second refractive angle by the refractive amplifier module 131. The first laser beam 201 and the second laser beam 202 changed by the refractive amplification module 131 into a path having a second refractive angle are respectively the first mirror 141 and the second mirror on each traveling path. And output to 142, respectively.

The first mirror 141 receives the first laser beam 201 whose path is changed due to the refractive index increase by the refractive amplifier module 131. The first mirror 141 may reflect and output the incident first laser beam 201 at a predetermined reflection angle. The predetermined reflection angle is an angle at which the first laser beam 201 can be irradiated to the first object to be processed 151.

The second mirror 142 receives the second laser beam 202 whose path is changed due to the refractive index increase by the refractive amplification module 131. The second mirror 142 may reflect and output the incident second laser beam 202 at a predetermined reflection angle. The predetermined reflection angle is an angle at which the second laser beam 202 can be irradiated to the second processing object 152.

Figure 4 is an exemplary view showing a laser processing apparatus according to another embodiment of the present invention.

Referring to FIG. 4, the laser processing apparatus includes a laser beam generator 110, a beam expander 161, a beam shaper 162, a beam mask 163, an AOM 121, a refractive amplifier module 131, and a first The first mirror 141, the second mirror 142, and the damper 164 may be included. The path of a laser beam can be confirmed from such a laser processing apparatus.

The laser beam generator 110 may generate a laser beam. The laser beam generator 110 according to an embodiment of the present invention may be a YAG laser or a CO 2 laser.

The beam extension unit 161 may receive the laser beam generated by the laser beam generator 110. The beam extension 161 may expand the width of the received laser beam 200. That is, the beam extension 161 may enlarge the size of the laser beam 200 to match the size of the region to be processed.

The beam shaper 162 may receive the laser beam 200 enlarged in size by the beam extension 161. The beam shaper 162 may convert the energy distribution of the received laser beam 200 into a flat top format.

The beam mask 163 may receive the laser beam 200 converted into the flat top format. The beam mask 163 may be formed with a predetermined pattern. That is, as the laser beam 200 passes through the beam mask 163, a pattern of the laser beam 200 to be irradiated to the processing object may be formed.

The AOM 121 may receive a laser beam that has passed through the beam mask 163. The AOM 121 may branch the received laser beam 200. The AOM 121 may branch the laser beam 200 into the first laser beam 201 and the second laser beam 202 having a path of the first refraction angle. Also, the AOM 121 may output the third laser beam 203, which is the unrefractive laser beam 200. That is, the AOM 121 may branch the laser beam 200 into the first laser beam 201, the second laser beam 202, and the third laser beam 203.

The first to third laser beams 201 to 203 branched by the AOM 121 may be output to the refractive amplifier module 131.

In addition, the refractive amplifier module 131 may output the received third laser beam 203 without being refracted. As such, the unrefractive third laser beam 203 may be output to the damper 164.

The damper 164 may receive the third laser beam 203 output by the refractive amplifier module 131. The damper 164 may absorb the third laser beam 203 except for the laser beam 200 irradiated to the processing object, such as the first laser beam 201 and the second laser beam 202.

In the embodiment of the present invention, the mirror for changing the path by reflecting the laser beam at a predetermined angle is located after the refractive amplifier module, but the number and position of the mirrors used in the laser processing apparatus are not limited thereto. That is, the mirror may be located on any path of the laser beam in order to change the path of the laser beam in the laser processing apparatus, which can be easily changed by those skilled in the art.

Although the present invention has been described in detail by way of examples, it is intended to specifically describe the present invention, and the surface treatment method of the surface treatment liquid and the printed circuit board according to the present invention is not limited thereto. Those skilled in the art will appreciate that various modifications and changes can be made in the present invention without departing from the spirit and scope of the invention as set forth in the claims below.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

100: laser processing apparatus 110: laser beam generating unit
120: light modulator 121: AOM
130: refractive amplifier 131: refractive amplifier module
132: center of the refractive amplifier module 133: incident surface
134: output surface 140: mirror portion
141: first mirror 142: second mirror
151: first machining target 152: second machining target
161: beam extension 162: beam shaper
163: beam mask 164: damper
200: laser beam 201: first laser beam
202: second laser beam 203: second laser beam

Claims

A laser beam generator for generating a laser beam;
An optical modulator for receiving the laser beam and branching and outputting the received laser beam;
A refractive amplifier configured to receive the branched laser beam and increase the refractive angle of the branched laser beam to output the branched laser beam; And
And a mirror unit configured to receive the laser beam output by the refractive amplifier and irradiate the object to be processed.

The method according to claim 1,
The optical modulation unit is a laser processing apparatus, characterized in that the AOM (Acoustic Optic Modulator).

The method according to claim 1,
The light modulator
And a laser beam received from the laser beam generator for branching into a plurality of laser beams having a first refraction angle for output.

The method according to claim 1,
The refractive amplifier,
Laser processing apparatus, characterized in that formed by the refractive amplifier module.

The method according to claim 1,
The refractive amplifier,
And an incidence surface on which the laser beam branched from the light modulator is received has a convex shape in which an upper surface and a lower surface have a predetermined angle from a vertical line of the center with respect to the center of the refractive amplifier.

The method according to claim 1,
The refractive amplifier,
And an output surface at which the laser beam branched from the light modulator is output is concave, with upper and lower surfaces respectively having a predetermined angle from a vertical line of the center with respect to the center of the refractive amplifier.

The method according to claim 1,
The refractive amplifier,
And the refractive angle is adjusted by at least one of an incident surface and an output surface on which the laser beam branched from the light modulator is received based on the center of the refractive amplifier.

The method according to claim 1,
The refractive amplifier,
And the laser beam branched from the light modulator is incident to the center of the refractive amplifier, and when the branched laser beam is output, the angle of refraction is 0 degrees.

The method according to claim 1,
The refractive amplifier is
Laser processing apparatus, characterized in that formed including at least one of zirconium (Zr), germanium (Ge) or zinc serenide (ZnSe).

The method according to claim 1,
And a beam extender provided at a predetermined point on the laser beam path between the laser generator and the light modulator, for expanding the width of the laser beam.

The method according to claim 1,
And a beam shaper provided at a predetermined point on the laser beam path between the laser generator and the light modulator, and converting an energy distribution of the laser beam into a flat top format. Device.

The method according to claim 1,
And a mask provided at a predetermined point on the laser beam path between the laser generator and the light modulator, and configured to pass the laser beam in a predetermined pattern.