CN220473405U

CN220473405U - Whole-disc substrate surface defect detection tool

Info

Publication number: CN220473405U
Application number: CN202321920112.XU
Authority: CN
Inventors: 冯保华; 王金洞; 杨媛
Original assignee: Beijing Aerospace Era Laser Navigation Technology Co ltd
Current assignee: Beijing Aerospace Era Laser Navigation Technology Co ltd
Priority date: 2023-07-20
Filing date: 2023-07-20
Publication date: 2024-02-09
Anticipated expiration: 2033-07-20

Abstract

The utility model relates to a defect detection tool for the surface of a whole disc substrate, which comprises a worm wheel, a worm, a connecting shaft, a pair of rotating support rods, a tray connecting rod, a sliding rod, a base and a rocker, wherein the rocker is coaxially connected with the worm in a rotating way to drive the worm wheel to rotate, the worm wheel drives the connecting shaft which is coaxial with the worm wheel to rotate, further drives the pair of rotating support rods to rotate, the sliding rod to slide, and simultaneously drives the tray connecting rod to rotate, and the tray connecting rod is connected with the tray through a key slot so as to drive the tray to rotate; when the substrate is regulated to form a certain angle with the side light of the microscope, the defect condition on the substrate is clearly detected. The utility model solves the problem that the existing substrate is difficult to detect in shallow and thin scribing ways, and improves the accuracy and efficiency of detecting the defects of the substrate.

Description

Whole-disc substrate surface defect detection tool

Technical Field

The utility model belongs to the technical field of detection of surface defects of polished parts, and relates to a whole disc substrate surface defect detection tool.

Background

The laser gyroscope is mainly a precise optical instrument for measuring the rotation angle based on the Sagnac effect, and the laser gyroscope is characterized by being a sealed annular resonant cavity which is composed of a plurality of high-reflection diaphragms, a glass cavity, a cathode and an anode and the like. The resonant cavity is filled with high-purity helium-neon gas in a certain proportion, and the high-voltage discharge between the cathode and the anode breaks down the gas to form laser.

The reflective film (hereinafter, collectively referred to as "substrate") is divided into a photoresist region and a film region according to the region of use. The polishing quality of the photoresist area is directly affected by the sealing reliability of the resonant cavity. The film area is used for changing the direction of a laser light path, and the polishing quality of the film area directly influences the film coating quality and the non-uniform loss of the resonant cavity, thereby influencing the locking effect of the laser gyro. Therefore, a higher polishing quality is required for both the photoresist region and the film region. Defects are one of the metrics of good or bad polishing quality of a substrate, and generally include scratches, pits, printing, pits, and the like.

At present, the scattering microscope for printing is used for detecting, the detection accuracy is higher, and the integrated microscope for detecting the scratch, the pit point and the like is used for detecting, the shallow scratch and the very small pit point are difficult to see according to the existing detection method, and the shallow thin scratch can be detected only after the substrate is optically glued to the gyroscope in the later stage and even after the gyroscope is aged, so that the problem of low substrate detection accuracy exists, the gyroscope repair rate is higher, the production efficiency is reduced, and the waste of disposable parts such as electrodes, spring frames and the like is caused. It is therefore necessary to improve the accuracy of substrate inspection.

The existing substrate defects are usually detected by adopting a single-chip substrate detection tool which is horizontally arranged on a microscope platform and is detected by side light and vertical light. After the qualified substrate is inspected by the method and the optical cement is on the gyroscope or the gyroscope is aged, the optical cement area is found to have a thin scratch for many times, and the scratch is confirmed to be positioned on the substrate. Therefore, the inspection method has the problem that the shallow thin scribe line is difficult to detect. Secondly, need carry out angle modulation to the substrate during the detection, the monolithic substrate detects if directly adopts original frock, need the manual angle of adjustment of holding, and not only the angle can not be fixed, and every piece all needs to adjust moreover, and detection efficiency is low. The whole disc substrate is not found to exist in the detection tool at present.

Disclosure of Invention

The utility model solves the technical problems that: the defect detection tool for the surface defects of the whole disc substrate solves the problems that the existing substrate is difficult to detect in shallow and thin scribing ways and the single-chip substrate is low in detection efficiency, and improves the accuracy and the efficiency of detecting the defects of the substrate.

The solution of the utility model is as follows: a defect detection tool for the surface of a whole disc substrate comprises a worm wheel, a worm, a connecting shaft, a pair of rotating support rods, a tray connecting rod, a sliding rod and a base, wherein the whole disc substrate is placed on the tray;

the two ends of the worm penetrate through the base and are arranged at the lower end of the base;

the worm wheel is meshed with the worm and is coaxially connected with the connecting shaft;

the two ends of the connecting shaft penetrate through the base and are fixed in the middle of the base, and the axis of the connecting shaft is perpendicular to the axis of the worm;

the lower ends of the pair of rotary support rods are respectively fixedly connected to two ends of the connecting shaft, and the upper ends of the pair of rotary support rods support the lower end face of the tray and form a preset included angle with the tray;

the sliding rod passes through the mounting block arranged on the lower end surface of the tray and is in sliding connection with the pair of rotating support rods, so that the tray is ensured to synchronously rotate along with the rotating support rods;

two ends of the tray connecting rod are arranged at the upper end of the base and connected with the center of the lower end face of the tray through key grooves to provide support points for overturning the tray;

the worm rotates to drive the worm wheel to rotate, and the worm wheel drives the connecting shaft to rotate, and then drives a pair of rotation support rods to rotate and the sliding rod to slide, and simultaneously drives the tray connecting rod to rotate, so that the tray is overturned.

Further, the sliding rod passes through the installation block arranged on the lower end surface of the tray and is in sliding connection with the pair of rotating support rods, and the sliding rod is specifically: the lower end face of the tray is provided with two mounting blocks at the corresponding positions of the rotary support rods, each mounting block is provided with a first slot, and the first slots are transversely formed along the mounting blocks; the upper end of each rotary supporting rod is provided with a second slot, and the second slot extends downwards along the upper end of the rotary supporting rod; when the tray is in a horizontal state, the sliding rod passes through the first end of the first slot of each mounting block and the upper end of the second slot of each rotating support rod; when the rotary support rod rotates along with the connecting shaft, the sliding rod slides along the second slot to the lower end of the second slot, and simultaneously slides along the first slot to the second end of the first slot, so that the included angle between the rotary support rod and the tray changes, the tray connecting rod rotates, and the tray connecting rod is connected with the tray key slot to drive the tray to turn over.

Further, the device also comprises a rocker, wherein the rocker is coaxially connected with the first end of the worm, and the rocker is rocked to drive the worm to rotate.

Further, the bottom of the base is a fixed end, and the section size of the fixed end is larger than that of the base main body.

Further, the device further comprises a limit nut, wherein the limit nut is arranged at the second end of the worm, is in threaded connection with the worm, is attached to the fixed end of the base in the vertical direction, and is used for limiting the rotation of the worm and preventing the tray from returning to the horizontal position under the action of the gravity of the substrate to be tested.

Further, still include the clamp plate, the clamp plate sets up in the bottom of base for the base is fixed on check out test set.

Further, the coaxiality of the connecting shaft and the worm gear is less than or equal to 0.01mm.

Further, the tray is made of aluminum.

Further, the tolerance of the positions of the mounting holes of the worm wheel and the worm is within-0.01 mm.

Compared with the prior art, the utility model has the beneficial effects that:

the utility model realizes the purpose that the whole disc and the single chip substrate can be quickly adjusted to a certain angle and maintained at the angle by designing the defect detection tool for the whole disc and the single chip substrate, thereby clearly and accurately detecting the scribing of the substrate. Compared with the previous method of manually lifting and maintaining at a certain angle, the defect detection tool provided by the utility model greatly reduces labor force, is convenient and easy to operate, and greatly reduces the defect omission rate of the substrate.

Drawings

FIG. 1 is a front view of the entire disc substrate defect detection tool of example 1;

FIG. 2 is a back view of the entire disc substrate defect detection tool of example 1.

Detailed Description

The utility model is further illustrated in the following figures and examples.

Example 1

The whole-disc substrate surface defect detection tool shown in fig. 1 and 2 comprises a worm wheel 1, a worm 2, a connecting shaft 3, a pair of rotating support rods 4, a tray 5, a tray connecting rod 6, a sliding rod 7, a base 8, a rocker 9 and a pressing plate 10.

Preferably, both ends of the worm 2 pass through the base 8 and are mounted at the lower end of the base 8; the worm wheel 1 is meshed with the worm 2 and is coaxially connected with the connecting shaft 3. The two ends of the connecting shaft 3 pass through the base 8 and are fixed in the middle of the base 8, and the axis of the connecting shaft 3 is vertical to the axis of the worm 2. The lower ends of a pair of rotation support rods 4 are respectively fixedly connected to the two ends of the connecting shaft 3, and the upper ends of the rotation support rods 4 support the lower end face of the tray 5 and form a certain included angle with the tray 5. In this embodiment, the angle between the rotary support rod 4 and the lower end surface of the tray 5 may take a value in the range of 40 ° to 50 °, and preferably the angle is 45 °.

The sliding rod 7 penetrates through the mounting block arranged on the lower end face of the tray 5 and is movably connected with the pair of rotating support rods 4, so that the tray 5 is guaranteed to synchronously rotate along with the rotating support rods 4. In this embodiment, the implementation is specifically as follows: the lower end surface of the tray 5 is provided with two mounting blocks at the corresponding positions of the rotary support rods 4, each mounting block is provided with a first slot, and the first slots are transversely formed along the mounting blocks; the upper end of each rotary supporting rod 4 is provided with a second slot, and the second slot extends downwards along the upper end of the rotary supporting rod 4; when the tray 5 is in a horizontal state, the sliding rod 7 passes through the first slotted end of each mounting block and the upper end of the second slotted of each rotating support rod 4; when the rotary support rod 4 rotates along with the connecting shaft 3, the sliding rod 7 slides along the second slot towards the lower end of the second slot, and simultaneously slides along the first slot towards the second end of the first slot, so that the included angle between the rotary support rod 4 and the tray 5 changes, the tray connecting rod 6 rotates, and the tray 5 is turned over due to the fact that the tray connecting rod 6 is connected with the key slot of the tray 5.

The two ends of the tray connecting rod 6 are arranged at the upper end of the base 8 and are connected with the center of the lower end face of the tray 5 through key grooves, so as to provide a supporting point for overturning the tray 5.

The rocker 9 is coaxially connected with the first end of the worm 2, and the rocker 9 is rocked to drive the worm 2 to rotate.

The bottom of base 8 is the stiff end, and stiff end cross-section size is greater than base 8 main part cross-section size, and stop nut 11 sets up at the second end of worm 2, with worm 2 threaded connection, and laminate in vertical direction with the stiff end of base 8 for keep tray 5 slope certain angle, prevent promptly to receive the gyration that the gravity effect of sample made worm 2 on the tray, lead to tray 5 to return horizontal position.

The clamp plate 10 sets up in the bottom of base 8, acts on the stiff end of base 8 for the fixed of base 8 on check out test set.

When the defect detection tool for the surface of the whole disc substrate is used for detecting angle adjustment, based on the worm gear transmission principle, the worm gear 1 is driven to rotate by rotating the rocker 9 coaxially connected with the worm 2, the worm gear 1 drives the connecting shaft 3 coaxial with the worm gear 1 to rotate, and then the pair of rotating support rods 4 are driven to rotate and the sliding rod 7 to slide, meanwhile, the tray connecting rod 6 is driven to rotate, and the tray connecting rod 6 is connected with the tray 5 through the key groove, so that the tray 5 is driven to rotate. In this embodiment, the tray 5 rotates through an angle in the range of 0-30 °.

The whole disc of substrate is placed on the tray 5, and the whole tool is placed on the microscope workbench, so that when the substrate and the side light of the microscope are regulated to form a certain angle, such as 10-15 degrees, the defect condition on the substrate can be clearly seen.

Preferably, the tolerance of the mounting hole positions of the worm wheel 1 and the worm 2 on the base 8 is required to be +/-0.01 mm.

Preferably, the coaxiality of the connecting shaft 3 and the worm wheel 1 is less than or equal to 0.01mm.

Preferably, the whole disc substrate surface defect detection tool is made of stainless steel, and only the tray 5 is made of aluminum, so that the supported weight is reduced.

For the same kind of products, the tool using method can quickly and efficiently detect other substrates by adjusting the angle once due to good height consistency.

Although the present utility model has been described in terms of the preferred embodiments, it is not intended to be limited to the embodiments, and any person skilled in the art can make any possible variations and modifications to the technical solution of the present utility model by using the methods and technical matters disclosed above without departing from the spirit and scope of the present utility model, so any simple modifications, equivalent variations and modifications to the embodiments described above according to the technical matters of the present utility model are within the scope of the technical matters of the present utility model.

Claims

1. The whole-disc substrate surface defect detection tool is characterized by comprising a worm wheel (1), a worm (2), a connecting shaft (3), a pair of rotating support rods (4), a tray (5), a tray connecting rod (6), a sliding rod (7) and a base (8), wherein the whole-disc substrate is placed on the tray (5);

two ends of the worm (2) penetrate through the base (8) and are arranged at the lower end of the base (8);

the worm wheel (1) is meshed with the worm (2) and is coaxially connected with the connecting shaft (3);

the two ends of the connecting shaft (3) penetrate through the base (8) and are fixed in the middle of the base (8), and the axis of the connecting shaft (3) is perpendicular to the axis of the worm (2);

the lower ends of the pair of rotary support rods (4) are respectively fixedly connected to two ends of the connecting shaft (3), and the upper ends of the pair of rotary support rods (4) support the lower end face of the tray (5) and form a preset included angle with the tray (5);

the sliding rod (7) penetrates through a mounting block arranged on the lower end face of the tray (5) and is in sliding connection with the pair of rotating support rods (4), so that the tray (5) is ensured to synchronously rotate along with the rotating support rods (4);

two ends of the tray connecting rod (6) are arranged at the upper end of the base (8) and are connected with the center of the lower end face of the tray (5) through key grooves to provide a supporting point for overturning the tray (5);

the worm (2) drives the worm wheel (1) to rotate when rotating, the worm wheel (1) drives the connecting shaft (3) to rotate, and then drives the pair of rotating support rods (4) to rotate and the sliding rod (7) to slide, and simultaneously drives the tray connecting rod (6) to rotate, so that the tray (5) is overturned.

2. The whole-disc substrate surface defect detection tool according to claim 1, wherein the sliding rod (7) penetrates through a mounting block arranged on the lower end face of the tray (5) and is in sliding connection with the pair of rotating support rods (4), and specifically comprises the following components: the lower end surface of the tray (5) is provided with two mounting blocks at the corresponding positions of the rotary supporting rods (4), each mounting block is provided with a first slot, and the first slots are transversely formed along the mounting blocks; the upper end of each rotary supporting rod (4) is provided with a second slot, and the second slot extends downwards along the upper end of each rotary supporting rod (4); when the tray (5) is in a horizontal state, the sliding rod (7) passes through the first end of the first slot of each mounting block and the upper end of the second slot of each rotating supporting rod (4); when the rotary support rod (4) rotates along with the connecting shaft (3), the sliding rod (7) slides along the second slot to the lower end of the second slot, and simultaneously slides along the first slot to the second end of the first slot, so that the included angle between the rotary support rod (4) and the tray (5) changes, the tray connecting rod (6) rotates, the tray connecting rod (6) is connected with the key slot of the tray (5), and the tray (5) is driven to turn.

3. The tool for detecting the defects on the surface of the whole disc substrate according to claim 1, further comprising a rocker (9), wherein the rocker (9) is coaxially connected with the first end of the worm (2), and the rocker (9) is rocked to drive the worm (2) to rotate.

4. The tool for detecting defects on the surface of a whole disc substrate according to claim 1, wherein the bottom of the base (8) is a fixed end, and the section size of the fixed end is larger than that of the main body of the base (8).

5. The whole disc substrate surface defect detection tool according to claim 4, further comprising a limit nut (11), wherein the limit nut (11) is arranged at the second end of the worm (2), is in threaded connection with the worm (2), is attached to the fixed end of the base (8) in the vertical direction, and is used for limiting the rotation of the worm (2) and preventing the tray (5) from returning to the horizontal position under the action of gravity of the substrate to be detected.

6. The whole disc substrate surface defect detection tool according to claim 1, further comprising a pressing plate (10), wherein the pressing plate (10) is arranged at the bottom of the base (8) and is used for fixing the base (8) on detection equipment.

7. The tool for detecting the defects on the surface of the whole disc substrate according to claim 1, wherein the coaxiality of the connecting shaft (3) and the worm wheel (1) is less than or equal to 0.01mm.

8. The whole-disc substrate surface defect detection tool according to claim 1, wherein the tray (5) is made of aluminum.

9. The tool for detecting the defects on the surface of the whole disc substrate according to claim 1, wherein the position tolerance of the mounting holes of the worm wheel (1) and the worm (2) is within-0.01 mm.