CN220456388U - Bearing and driving mechanism for micro-display chip detection - Google Patents
Bearing and driving mechanism for micro-display chip detection Download PDFInfo
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- CN220456388U CN220456388U CN202321494596.6U CN202321494596U CN220456388U CN 220456388 U CN220456388 U CN 220456388U CN 202321494596 U CN202321494596 U CN 202321494596U CN 220456388 U CN220456388 U CN 220456388U
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- 238000001514 detection method Methods 0.000 title abstract description 18
- 238000006073 displacement reaction Methods 0.000 claims abstract description 39
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 238000012360 testing method Methods 0.000 description 19
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000005457 optimization Methods 0.000 description 1
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Abstract
The utility model provides a bearing and driving mechanism for detecting a micro-display chip, which comprises: the chip fixing tool is used for bearing and fixing the chip; the circumferential manual adjusting table is connected below the chip fixing tool and is horizontally arranged and used for adjusting the circumferential angle of a chip placed on the chip fixing tool; the Z-direction electric displacement platform is connected below the circumferential manual adjustment platform and is used for driving a chip placed on the chip fixing tool to displace in the Z direction; the Y-direction electric displacement table is connected below the Z-direction electric displacement table and is used for driving a chip placed on the chip fixing tool to displace in the Y direction. The utility model can improve the detection efficiency and reduce the risk of damaging the chip caused by manual operation.
Description
Technical Field
The utility model relates to the technical field of semiconductor detection equipment, in particular to a bearing and driving mechanism for detecting a micro-display chip.
Background
At present, a purely manual detection table is mainly adopted for detecting a single micro-display chip after scribing; each chip needs to be manually adjusted in position before and during detection, detection efficiency is low, and excessive manual operation in the detection process has the risk of damaging the chip.
Disclosure of Invention
In order to solve at least one technical problem in the prior art, the embodiment of the utility model provides a bearing and driving mechanism for detecting a micro-display chip, which can improve the detection efficiency and reduce the risk of damaging the chip caused by manual operation. In order to achieve the technical purpose, the technical scheme adopted by the embodiment of the utility model is as follows:
the embodiment of the utility model provides a bearing and driving mechanism for detecting a micro-display chip, which comprises the following components:
the chip fixing tool is used for bearing and fixing the chip;
the circumferential manual adjusting table is connected below the chip fixing tool and is horizontally arranged and used for adjusting the circumferential angle of a chip placed on the chip fixing tool;
the Z-direction electric displacement platform is connected below the circumferential manual adjustment platform and is used for driving a chip placed on the chip fixing tool to displace in the Z direction;
the Y-direction electric displacement table is connected below the Z-direction electric displacement table and is used for driving a chip placed on the chip fixing tool to displace in the Y direction.
Further, the bearing and driving mechanism for detecting the micro-display chip further comprises an XY direction fine adjustment mechanism, and the XY direction fine adjustment mechanism is connected between the circumferential manual adjustment table and the Z direction electric displacement table.
Further, the XY direction fine adjustment mechanism comprises an X direction manual fine adjustment table and a Y direction manual fine adjustment table; the X-direction manual fine adjustment platform is arranged on the lifting block of the Z-direction electric displacement platform, the middle carrier plate is connected above the X-direction manual fine adjustment platform, and the Y-direction manual fine adjustment platform is arranged on the middle carrier plate.
Specifically, the X-direction manual fine adjustment table comprises an X-direction adjusting bolt, a first bolt seat and an X-direction fine adjustment table; the X-direction adjusting bolt is arranged along the X direction and penetrates through the first bolt seat, and is connected with the X-direction fine adjustment table through the connecting block, and the X-direction fine adjustment table is arranged above the lifting block of the Z-direction electric displacement table; the middle carrier plate is connected above the X-direction fine adjustment table.
Specifically, the Y-direction manual fine adjustment table comprises a Y-direction adjusting bolt, a second bolt seat, a Y-direction fine adjustment table and a connecting rod, wherein the second bolt seat is connected with the middle carrier plate, and the Y-direction adjusting bolt and the connecting rod respectively penetrate through the second bolt seat from the Y direction and the X direction and are connected with each other; the connecting rod is connected with the Y-direction fine adjustment table, and a chute for the connecting rod to move in the Y direction is arranged in the second bolt seat.
More preferably, the top of the chip fixing tool is provided with a positioning groove matched with the chip in shape; the positioning groove can determine the circumferential angle of the chip.
More preferably, the bottom of the positioning groove of the chip fixing tool is provided with a vacuum adsorption channel for adsorbing and fixing the chip.
The technical scheme provided by the embodiment of the utility model has the beneficial effects that:
1) The chip to be tested can be positioned, the chip to be tested is automatically driven to contact with the test signal connection tool, and the risk that the chip is possibly damaged by manual operation is reduced.
2) The detection efficiency is remarkably improved.
Drawings
Fig. 1 is a schematic structural diagram of a bearing and driving mechanism for detecting a micro-display chip according to an embodiment of the utility model.
Fig. 2 is a partial enlarged view of a bearing and driving mechanism for detecting a micro-display chip according to an embodiment of the utility model.
Detailed Description
The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
In the description of the embodiments of the present utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," and the like indicate an orientation or a positional relationship based on that shown in the drawings, and are merely for convenience of description and to simplify the description, and do not indicate or imply that the apparatus or elements to be referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" should be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; the two components can be directly connected or indirectly connected through an intermediate medium, or can be communicated inside the two components, or can be connected wirelessly or in a wired way. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.
In the following embodiments, the micro display chip is simply referred to as a chip.
As shown in fig. 1, a carrying and driving mechanism 100 for detecting a micro-display chip according to an embodiment of the present utility model is disposed below a chip detecting mechanism 200, and includes:
a chip fixing tool 110 for carrying and fixing a chip;
a circumferential manual adjustment table 120 connected below the die-holding tool 110 and horizontally disposed for adjusting a circumferential angle of a die placed on the die-holding tool 110;
the Z-direction electric displacement table 140 is connected below the circumferential manual adjustment table 120, and is used for driving the chip placed on the chip fixing tool 110 to displace in the Z-direction;
a Y-direction electric displacement table 150 connected below the Z-direction electric displacement table 140 for driving the chip placed on the chip fixing tool 110 to displace in the Y-direction;
in one embodiment, the chip detection mechanism 200 includes: a test signal connection tool 210 and a detection camera 220, both of which are mounted on an X-direction motorized displacement stage 230; wherein the test signal connection tool 210 is located under the lens of the detection camera 220; the test signal connection tool 210 may employ a test pin card, which mainly provides a power signal and a chip driving signal for a chip to light the chip;
in the embodiment shown in fig. 1, the left-right direction is the X direction, the front-back direction is the Y direction, and the up-down direction is the Z direction; the micro-display chip detection load and drive mechanism 100 may be mounted on the base plate 300, and the chip detection mechanism 200 may be mounted on the base plate 300 by a rack; wherein the Y-direction electric displacement stage 150 can drive the Z-direction electric displacement stage 140, the circumferential manual adjustment stage 120 and the die-holding tool 110 mounted thereon to move together in the Y-direction, so that the die placed on the die-holding tool 110 is displaced in the Y-direction; the Z-direction electric displacement table 140 can drive the circumferential manual adjustment table 120 installed above the Z-direction electric displacement table to move together with the die-holding tool 110 in the Z-direction, so that the die placed on the die-holding tool 110 is displaced in the Z-direction; the circumferential manual adjustment table 120 can drive the chip fixing tool 110 mounted thereon to perform circumferential adjustment in a horizontal plane, so that a circumferential angle of a chip placed on the chip fixing tool 110 can be adjusted, and a test point on the chip and the test signal connection tool 210 are aligned in a circumferential direction;
the bearing and driving mechanism 100 for detecting the micro-display chip provided by the embodiment of the utility model can automatically position and displace the chip during subsequent chip detection only through simple calibration, so that the test point on the chip to be detected can be accurately contacted with the test signal connecting tool 210, and the chip is lightened; during calibration, for example, the circumferential manual adjustment stage 120 is manually adjusted to enable a chip placed on the chip fixing tool 110 to be aligned with the test signal connection tool 210 in the circumferential direction, the forward in-place strokes of the Y-direction electric displacement stage 150 and the X-direction electric displacement stage 230 are set to enable the chip to be just below the test signal connection tool 210 when the Y-direction electric displacement stage 150 and the X-direction electric displacement stage 230 are in place each time, and the Z-direction electric displacement stage 140 is set to be lifted to an in-place stroke to enable a test point on the chip to be just contacted with the test signal connection tool 210 when the Z-direction electric displacement stage 140 is lifted to be in place each time;
as an optimization of this embodiment, the bearing and driving mechanism 100 for detecting a micro-display chip further includes an XY-direction fine adjustment mechanism 130, where the XY-direction fine adjustment mechanism 130 is connected between the circumferential manual adjustment stage 120 and the Z-direction electric displacement stage 140; the X-direction and/or Y-direction positions of the chips placed on the chip fixture 110 can be finely fine-tuned during calibration by the XY-direction fine-tuning mechanism 130 so that the test points on the chips more precisely contact the test signal connection tool 210;
specifically, as shown in fig. 1 and 2, the XY fine adjustment mechanism 130 includes an X-direction manual fine adjustment stage 131 and a Y-direction manual fine adjustment stage 132; the X-direction manual fine adjustment table 131 is arranged on a lifting block of the Z-direction electric displacement table 140, an intermediate carrier plate 133 is connected above the X-direction manual fine adjustment table 131, and the Y-direction manual fine adjustment table 132 is arranged on the intermediate carrier plate 133; both the X-direction manual fine adjustment table 131 and the Y-direction manual fine adjustment table 132 can be manually adjusted by using the adjusting bolts shown in FIG. 1;
in a specific embodiment, the X-direction manual fine adjustment stage 131 includes an X-direction adjustment bolt 1311, a first bolt mount 1312, and an X-direction fine adjustment stage 1313; the first bolt seat 1312 is connected with a lifting block of the Z-direction electric displacement table 140, the X-direction adjusting bolt 1311 is arranged along the X-direction and penetrates through the first bolt seat 1312, and is connected with the X-direction fine adjustment table 1313 through a connecting block, and the X-direction fine adjustment table 1313 is arranged above the lifting block of the Z-direction electric displacement table 140; the intermediate carrier plate 133 is connected above the X-direction fine adjustment table 1313;
in a specific embodiment, the Y-direction manual fine adjustment stage 132 includes a Y-direction adjusting bolt 1321, a second bolt seat 1322, a Y-direction fine adjustment stage 1323, and a connecting rod 1324, wherein the second bolt seat 1322 is connected to the intermediate carrier plate 133, and the Y-direction adjusting bolt 1321 and the connecting rod 1324 respectively pass through the second bolt seat 1322 from the Y-direction and the X-direction and are connected to each other; the connecting rod 1324 is connected to the Y-direction fine adjustment table 1323, and a chute for the connecting rod 1324 to move in the Y-direction is provided in the second bolt seat 1322;
the XY fine adjustment mechanism 130 can perform fine adjustment in the X direction or the Y direction, so that the chip placed on the chip fixture 110 can perform fine adjustment in the X direction and/or the Y direction;
more preferably, the top of the chip fixing tool 110 is provided with a positioning groove 111 matched with the shape of the chip; the positioning groove 111 can determine the circumferential angle of the chip; thus, when the circumferential manual adjustment table 120 finishes adjustment during calibration, after the chips placed on the chip fixing tool 110 are aligned to the test signal connection tool 210 in the circumferential direction, the circumferential angle of each chip can be kept consistent when the subsequent chips are placed into the positioning groove 111 of the chip fixing tool 110, without manually adjusting the circumferential angle of the chip each time, so that manual operation is reduced;
more preferably, a vacuum adsorption channel is arranged at the bottom of the positioning groove 111 of the chip fixing tool 110 for adsorbing and fixing the chip; the chip is fixed by vacuum adsorption, so that the chip is prevented from moving on the chip fixing tool 110 when the Y-direction electric displacement table 150 and/or the Z-direction electric displacement table 140 act;
when testing the chip, firstly, the step of calibration is completed, then, only the chip to be tested is placed in the positioning groove 111 of the chip fixing tool 110, the external vacuumizing device is opened, after the chip is adsorbed and fixed by vacuum, the Y-direction electric displacement table 150 and the X-direction electric displacement table 230 are started to advance to the right position, then the Z-direction electric displacement table 140 is started to ascend to the right position, the test point of the chip to be tested is just contacted with the test signal connecting tool 210, and the chip is lightened; the detection camera 220 shoots the display image of the chip, sends the display image to the display screen, and an operator observes the image on the display screen to judge the performance of the chip to be detected.
The micro-display chip detects with bearing and actuating mechanism 100 that this application provided can replace manual operation to a great extent, reduces the risk that manual operation probably damaged the chip to show and improved detection efficiency.
Finally, it should be noted that the above-mentioned embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same, and although the present utility model has been described in detail with reference to the examples, it should be understood by those skilled in the art that modifications and equivalents may be made to the technical solution of the present utility model without departing from the spirit and scope of the technical solution of the present utility model, and all such modifications and equivalents are intended to be encompassed in the scope of the claims of the present utility model.
Claims (7)
1. A carrying and driving mechanism (100) for detecting a micro-display chip, comprising:
a chip fixing tool (110) for carrying and fixing a chip;
a circumferential manual adjustment table (120) connected below the chip fixing tool (110) and horizontally arranged for adjusting a circumferential angle of a chip placed on the chip fixing tool (110);
the Z-direction electric displacement table (140) is connected below the circumferential manual adjustment table (120) and is used for driving a chip placed on the chip fixing tool (110) to displace in the Z direction;
and the Y-direction electric displacement table (150) is connected below the Z-direction electric displacement table (140) and is used for driving the chip placed on the chip fixing tool (110) to displace in the Y direction.
2. The carrying and driving mechanism (100) for detecting a micro-display chip according to claim 1, wherein,
the bearing and driving mechanism (100) for detecting the micro-display chip further comprises an XY direction fine adjustment mechanism (130), and the XY direction fine adjustment mechanism (130) is connected between the circumferential manual adjustment table (120) and the Z direction electric displacement table (140).
3. The carrying and driving mechanism (100) for detecting a micro-display chip according to claim 2, wherein,
the XY direction fine adjustment mechanism (130) comprises an X direction manual fine adjustment table (131) and a Y direction manual fine adjustment table (132); the X-direction manual fine adjustment table (131) is arranged on a lifting block of the Z-direction electric displacement table (140), the middle carrier plate (133) is connected above the X-direction manual fine adjustment table (131), and the Y-direction manual fine adjustment table (132) is arranged on the middle carrier plate (133).
4. The carrying and driving mechanism (100) for detecting a micro-display chip according to claim 3, wherein,
the X-direction manual fine adjustment table (131) comprises an X-direction adjusting bolt (1311), a first bolt seat (1312) and an X-direction fine adjustment table (1313); the first bolt seat (1312) is connected with a lifting block of the Z-direction electric displacement table (140), the X-direction adjusting bolt (1311) is arranged along the X direction and penetrates through the first bolt seat (1312), the X-direction fine adjustment table (1313) is connected through a connecting block, and the X-direction fine adjustment table (1313) is arranged above the lifting block of the Z-direction electric displacement table (140); the intermediate carrier plate (133) is connected above the X-direction fine adjustment stage (1313).
5. The carrying and driving mechanism (100) for detecting a micro-display chip according to claim 3, wherein,
the Y-direction manual fine adjustment table (132) comprises a Y-direction adjusting bolt (1321), a second bolt seat (1322), a Y-direction fine adjustment table (1323) and a connecting rod (1324), wherein the second bolt seat (1322) is connected with the middle carrier plate (133), and the Y-direction adjusting bolt (1321) and the connecting rod (1324) respectively penetrate through the second bolt seat (1322) from the Y direction and the X direction and are connected with each other; the connecting rod (1324) is connected with the Y-direction fine adjustment table (1323), and a sliding groove for the connecting rod (1324) to move in the Y direction is arranged in the second bolt seat (1322).
6. The carrying and driving mechanism (100) for detecting a micro-display chip according to any one of claims 1 to 5, wherein,
a positioning groove (111) matched with the chip in shape is formed in the top of the chip fixing tool (110); the positioning groove (111) can determine the circumferential angle of the chip.
7. The carrying and driving mechanism (100) for detecting a micro-display chip according to claim 6, wherein,
the bottom of the positioning groove (111) of the chip fixing tool (110) is provided with a vacuum adsorption channel for adsorbing and fixing the chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321494596.6U CN220456388U (en) | 2023-06-13 | 2023-06-13 | Bearing and driving mechanism for micro-display chip detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321494596.6U CN220456388U (en) | 2023-06-13 | 2023-06-13 | Bearing and driving mechanism for micro-display chip detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220456388U true CN220456388U (en) | 2024-02-06 |
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ID=89739801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321494596.6U Active CN220456388U (en) | 2023-06-13 | 2023-06-13 | Bearing and driving mechanism for micro-display chip detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220456388U (en) |
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2023
- 2023-06-13 CN CN202321494596.6U patent/CN220456388U/en active Active
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