CN220438664U - Scanning actuator and optical fiber scanner - Google Patents
Scanning actuator and optical fiber scanner Download PDFInfo
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- CN220438664U CN220438664U CN202222566309.XU CN202222566309U CN220438664U CN 220438664 U CN220438664 U CN 220438664U CN 202222566309 U CN202222566309 U CN 202222566309U CN 220438664 U CN220438664 U CN 220438664U
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 33
- 239000000919 ceramic Substances 0.000 claims abstract description 226
- 238000004519 manufacturing process Methods 0.000 abstract description 16
- 238000000034 method Methods 0.000 abstract description 11
- 230000008878 coupling Effects 0.000 abstract description 8
- 238000010168 coupling process Methods 0.000 abstract description 8
- 238000005859 coupling reaction Methods 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 description 7
- 230000010287 polarization Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 5
- 238000004026 adhesive bonding Methods 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 230000035939 shock Effects 0.000 description 2
- 238000010420 art technique Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
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Abstract
The utility model discloses a scanning actuator and an optical fiber scanner, wherein the scanning actuator comprises a first piezoelectric ceramic plate, a second piezoelectric ceramic plate, a third piezoelectric ceramic plate and a fourth piezoelectric ceramic plate which are all plate-shaped, the first piezoelectric ceramic plate is provided with a first actuating area positioned at the front side and a second actuating area positioned at the rear side, the left side and the right side of the first actuating area are respectively provided with a first telescopic area and a second telescopic area, the second piezoelectric ceramic plate is fixedly arranged in the second actuating area, the third piezoelectric ceramic plate is fixedly arranged in the first telescopic area, and the fourth piezoelectric ceramic plate is fixedly arranged in the second telescopic area. The single ceramic chip is convenient to manufacture and process, and the consistency of product specification, performance and parameters is easy to ensure in mass production; the sheet structure enables the characteristic frequency value difference of the actuator in the horizontal direction and the vertical direction to be large, and vibration coupling of the actuator in two vibration directions can be greatly reduced.
Description
Technical Field
The present utility model relates to the field of optical fiber scanning display devices, and in particular, to a scanning actuator and an optical fiber scanner.
Background
The optical fiber scanner is a display technology for emitting a pattern by controlling the swing of an optical fiber by using a scanning actuator, and the technology irradiates the pattern with sharp saturation, high contrast, high brightness and very small structural volume, and is mainly used in the optical Fiber Scanning Display (FSD) technology and the optical Fiber Scanning Endoscope (FSE) technology.
The actuator of the grid type optical fiber scanner mainly comprises a second actuating part as a fast axis and a first actuating part as a slow axis, the two ends of the second actuating part and the first actuating part are respectively a fixed end and a free end, and the fixed end of the second actuating part is fixedly connected with the free end of the first actuating part. In order to obtain a stable scanning range and accurately control the scanning track, the scanning track at the tail end of the actuator needs to have accurate consistency with the scanning track of the first actuating part and the scanning track of the second actuating part, and the machining error of any actuating part can make the vibration of the actuator difficult to control or generate a disordered vibration component. How to avoid uncontrolled or spurious vibration components is one of the important factors to improve the scanning quality.
In order to make the actuating portion in the slow axis direction meet the slow axis scanning frequency and the actuating portion in the fast axis direction meet the fast axis scanning frequency, the shape and the size of the conventional scanner actuator are correspondingly designed, which leads to the actuator being irregularly shaped.
A scanning actuator as disclosed in chinese patent CN111830702a, which is a generally tubular piezoelectric actuator, is designed to be a special-shaped structure, which is quite disadvantageous for mass production of the actuator, difficult to process, and the consistency of the process cannot be ensured, as is limited by the above factors. Another example is a scanning actuator disclosed in chinese patent CN209784655U, which is a piezoelectric actuator in a sheet shape, and is also in consideration of performance, and the actuator is also configured to have a special-shaped structure, which also has the technical problems that it is difficult to precisely process and the consistency of processing is poor.
At the same time, how to avoid the vibration coupling between the slow axis actuator and the fast axis actuator is also a technical problem to be considered. The two prior art techniques described above have no corresponding design as to how to reduce the vibrational coupling between the slow axis actuator and the fast axis actuator.
Therefore, on the premise that each actuating part meets the performance parameters and vibration coupling is not generated, the actuator is easy to process, mass production is easy, mass production consistency is good, and the technical problem to be solved is that
Disclosure of Invention
The embodiment of the utility model provides a scanning actuator and an optical fiber scanner, which are used for at least solving the technical problems that an actuator with good anti-vibration coupling is not easy to mass production and has poor mass production consistency.
In order to achieve the above object, a first aspect of an embodiment of the present utility model provides a scan actuator including a first piezoelectric ceramic plate, a second piezoelectric ceramic plate, a third piezoelectric ceramic plate and a fourth piezoelectric ceramic plate each having a plate shape,
the plane where the first piezoelectric ceramic plate is positioned is taken as a horizontal plane, and the front end and the rear end of the first piezoelectric ceramic plate are respectively a free end and a fixed end of the scanning actuator;
the first piezoelectric ceramic plate is provided with a first actuating area positioned at the front side and a second actuating area positioned at the rear side, the left side and the right side of the first actuating area are respectively provided with a first telescopic area and a second telescopic area,
the second piezoelectric ceramic plate and the first piezoelectric ceramic plate are arranged in parallel and fixedly attached to be right above or right below a second actuating area of the first piezoelectric ceramic plate, the third piezoelectric ceramic plate and the first piezoelectric ceramic plate are arranged in parallel and fixedly attached to be right above or right below a first telescopic area of the first piezoelectric ceramic plate, and the fourth piezoelectric ceramic plate and the first piezoelectric ceramic plate are arranged in parallel and fixedly attached to be right above or right below a second telescopic area of the first piezoelectric ceramic plate;
the free end of the scanning actuator is driven by the first piezoelectric ceramic plate, the second piezoelectric ceramic plate, the third piezoelectric ceramic plate and the fourth piezoelectric ceramic plate to do two-dimensional scanning vibration relative to the fixed end of the scanning actuator.
The two-dimensional scanning actuator with the two-layer structure is formed by laminating four piezoelectric ceramic plates, each component of the two-dimensional scanning actuator is a single ceramic plate, the two-dimensional scanning actuator is convenient to manufacture and process, the consistency of product specifications, performances and parameters is easy to ensure in mass production, and the consistency of the actuator is good for the optical fiber scanning imaging technology, so that the two-dimensional scanning actuator is one of key factors of mass production of an optical fiber scanner.
Meanwhile, the sheet structure enables the characteristic frequency value difference of the actuator in the horizontal direction and the vertical direction to be large, and vibration coupling of the actuator in two vibration directions can be greatly reduced.
Specifically, the first piezoelectric ceramic piece, the second piezoelectric ceramic piece, the third piezoelectric ceramic piece and the fourth piezoelectric ceramic piece are polarized along the thickness direction, the upper surfaces and the lower surfaces of the second actuating area, the second piezoelectric ceramic piece, the third piezoelectric ceramic piece and the fourth piezoelectric ceramic piece of the first piezoelectric ceramic piece are correspondingly provided with upper electrodes and lower electrodes in a matched mode, and the upper electrodes and the lower electrodes are connected with corresponding external driving circuits through electrode leads so as to respectively drive the second actuating area, the second piezoelectric ceramic piece, the third piezoelectric ceramic piece and the fourth piezoelectric ceramic piece of the first piezoelectric ceramic piece to stretch along the front-back direction;
and the second actuating area of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate synchronously and reversely stretch and contract, and the third piezoelectric ceramic plate and the fourth piezoelectric ceramic plate synchronously and reversely stretch and contract.
And the third piezoelectric ceramic piece and the fourth piezoelectric ceramic piece synchronously and reversely stretch and retract to drive the free end of the first piezoelectric ceramic piece to vibrate in the left-right direction.
Optionally, the upper surface of the third piezoelectric ceramic plate is provided with a first upper electrode, the lower surface of the third piezoelectric ceramic plate is provided with a first lower electrode, the upper surface of the fourth piezoelectric ceramic plate is provided with a second upper electrode, the lower surface of the fourth piezoelectric ceramic plate is provided with a second lower electrode, the upper surface of the second actuating area of the first piezoelectric ceramic plate is provided with a third upper electrode, the lower surface of the second actuating area of the first piezoelectric ceramic plate is provided with a third lower electrode, the upper surface of the second piezoelectric ceramic plate is provided with a fourth upper electrode, and the lower surface of the second piezoelectric ceramic plate is provided with a fourth lower electrode.
Alternatively, the third piezoelectric ceramic sheet and the fourth piezoelectric ceramic sheet may have a common electrode lead. Because the third piezoelectric ceramic plate and the fourth piezoelectric ceramic plate synchronously and reversely stretch, if the polarization directions of the third piezoelectric ceramic plate and the fourth piezoelectric ceramic plate are the same, the first upper electrode and the second lower electrode can share one electrode lead, and the first lower electrode and the second upper electrode share one electrode lead, so that one path of driving signal passes through the two leads, and the first stretching region and the second stretching region can be simultaneously driven to synchronously and reversely stretch. If the polarization directions of the third piezoelectric ceramic plate and the fourth piezoelectric ceramic plate are opposite, the first upper electrode and the second upper electrode correspondingly share one electrode lead, and the first lower electrode and the second lower electrode correspondingly share one electrode lead.
Optionally, the second actuating area of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate may have a common intermediate electrode, where the intermediate electrode is disposed between the second actuating area and the second piezoelectric ceramic plate, and the intermediate electrode is not only an upper electrode of the second actuating area, but also a lower electrode of the second piezoelectric ceramic plate, so that the second actuating area of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate only have three electrode leads, simplifying a circuit, and driving the second actuating area and the second piezoelectric ceramic plate to perform synchronous reverse expansion and contraction by two driving signals respectively. On the basis, it is further preferable that the polarization direction of the second actuating area of the first piezoelectric ceramic plate is the same as that of the second piezoelectric ceramic plate, and the second actuating area and the second piezoelectric ceramic plate synchronously and reversely stretch, so that besides the second actuating area and the second piezoelectric ceramic plate can share one middle electrode, the two remaining electrodes of the second actuating area and the second piezoelectric ceramic plate can also share one electrode lead, and one driving signal can drive the second actuating area and the second piezoelectric ceramic plate synchronously and reversely stretch through the two leads at the same time.
In some embodiments of the present application, in order to improve strength, stability and shock resistance of the actuator, a dielectric layer is disposed between the first piezoelectric ceramic plate and the second piezoelectric ceramic plate, the second piezoelectric ceramic plate and the first piezoelectric ceramic plate are tightly attached to the dielectric layer and are fixedly connected, and the second piezoelectric ceramic plate and the dielectric layer, the dielectric layer and the first piezoelectric ceramic plate are fixedly connected through adhesive bonding, and also can be fixedly connected through ultrasonic welding or other modes without limitation. Further optionally, the dielectric layer is a conductive dielectric layer or an insulating dielectric layer. Therefore, when the dielectric layer is a conductive dielectric layer, the second actuation region of the first piezoceramic wafer and the second piezoceramic wafer can use the conductive dielectric layer as a common electrode for both. Namely, the lower electrode of the second actuating area of the first piezoelectric ceramic plate and the upper electrode of the second piezoelectric ceramic plate are the same electrode, and the common electrode is a conductive medium layer.
A second aspect of the present application provides an optical fiber scanner, which includes the scanning actuator and an optical fiber, where the optical fiber is fixedly disposed at a front end portion of the first piezoceramic sheet in a cantilever support manner. The other end of the optical fiber is connected with a light source, the optical fiber cantilever is driven by the scanning actuator to perform two-dimensional scanning, and the light source emits light of a corresponding pixel point according to the scanning position of the optical fiber cantilever, so that the optical fiber two-dimensional scanning imaging is realized.
One or more technical solutions in the embodiments of the present utility model at least have the following technical effects or advantages:
the two-dimensional scanning actuator with the two-layer structure is formed by laminating four piezoelectric ceramic plates, each component of the two-dimensional scanning actuator is a single ceramic plate, the two-dimensional scanning actuator is convenient to manufacture and process, the consistency of product specifications, performances and parameters is easy to ensure in mass production, and the consistency of the actuator is good for the optical fiber scanning imaging technology, so that the two-dimensional scanning actuator is one of key factors of mass production of an optical fiber scanner.
Meanwhile, the sheet structure enables the characteristic frequency value difference of the actuator in the horizontal direction and the vertical direction to be large, and vibration coupling of the actuator in two vibration directions can be greatly reduced.
The left side and the right side of the first actuating area of the first piezoelectric ceramic piece are respectively provided with the third piezoelectric ceramic piece and the fourth piezoelectric ceramic piece, and the area of the driving electrode is greatly reduced through the structure, so that the capacitance of the driving electrode is reduced, and the driving power consumption is greatly reduced.
Drawings
FIG. 1 is a schematic diagram of a scan actuator according to the present utility model;
FIG. 2 is a schematic structural view of a first piezoelectric ceramic sheet according to the present utility model;
FIG. 3 is a schematic view of an electrode structure of a scan actuator according to the present utility model;
FIG. 4 is a schematic diagram of a structure in which the second piezoelectric ceramic plate and the second actuating region of the first piezoelectric ceramic plate share an intermediate electrode;
FIG. 5 is a schematic diagram of a scan actuator with a dielectric layer disposed thereon;
FIG. 6 is a schematic diagram of a structure in which the second piezoelectric ceramic plate and the second actuating region of the first piezoelectric ceramic plate share a conductive dielectric layer as a common electrode;
FIG. 7 is a schematic diagram of a fiber scanner of the present utility model;
fig. 8 is a schematic structural view of another embodiment of the scan actuator of the present utility model.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1, a first aspect of the embodiment of the present utility model provides a scan actuator including a first piezoelectric ceramic sheet 100, a second piezoelectric ceramic sheet 200, a third piezoelectric ceramic sheet 600 and a fourth piezoelectric ceramic sheet 700 each having a plate shape,
taking the plane of the first piezoelectric ceramic plate 100 as a horizontal plane, and taking the front end and the rear end of the first piezoelectric ceramic plate 100 as the free end and the fixed end of the scanning actuator respectively;
as shown in fig. 2, the first piezoelectric ceramic sheet 100 has a first actuating region 101 at the front side and a second actuating region 102 at the rear side, the first actuating region 101 is provided with a first extension region 1011 and a second extension region 1012 at the left and right sides thereof,
the second piezoelectric ceramic sheet 200 is arranged in parallel with the first piezoelectric ceramic sheet 100 and fixedly attached to the right above or right below the second actuation area 102 of the first piezoelectric ceramic sheet 100, the third piezoelectric ceramic sheet 600 is arranged in parallel with the first piezoelectric ceramic sheet 100 and fixedly attached to the right above or right below the first expansion area 1011 of the first piezoelectric ceramic sheet 100, and the fourth piezoelectric ceramic sheet 700 is arranged in parallel with the first piezoelectric ceramic sheet 100 and fixedly attached to the right above or right below the second expansion area 1012 of the first piezoelectric ceramic sheet 100;
the free end of the scanning actuator is driven by the first piezoelectric ceramic plate, the second piezoelectric ceramic plate, the third piezoelectric ceramic plate and the fourth piezoelectric ceramic plate to do two-dimensional scanning vibration relative to the fixed end of the scanning actuator.
The two-dimensional scanning actuator with the two-layer structure is formed by laminating four piezoelectric ceramic plates, each component of the two-dimensional scanning actuator is a single ceramic plate, the two-dimensional scanning actuator is convenient to manufacture and process, the consistency of product specifications, performances and parameters is easy to ensure in mass production, and the consistency of the actuator is good for the optical fiber scanning imaging technology, so that the two-dimensional scanning actuator is one of key factors of mass production of an optical fiber scanner.
Meanwhile, the sheet structure enables the characteristic frequency value difference of the actuator in the horizontal direction and the vertical direction to be large, and vibration coupling of the actuator in two vibration directions can be greatly reduced.
The second piezoelectric ceramic sheet 200, the third piezoelectric ceramic sheet 600, or the fourth piezoelectric ceramic sheet 700 and the first piezoelectric ceramic sheet 100 may be fixedly connected by adhesive bonding, or may be fixedly connected by ultrasonic welding or the like, which is not limited thereto.
Specifically, the first piezoelectric ceramic sheet 100, the second piezoelectric ceramic sheet 200, the third piezoelectric ceramic sheet 600 and the fourth piezoelectric ceramic sheet 700 are polarized along the thickness direction, the upper surfaces and the lower surfaces of the second actuating region 102, the second piezoelectric ceramic sheet 200, the third piezoelectric ceramic sheet 600 and the fourth piezoelectric ceramic sheet 700 of the first piezoelectric ceramic sheet 100 are correspondingly provided with upper electrodes and lower electrodes in a matched manner, and each upper electrode and each lower electrode are connected with a corresponding external driving circuit through an electrode lead so as to respectively drive the second actuating region 102, the second piezoelectric ceramic sheet 200, the third piezoelectric ceramic sheet 600 and the fourth piezoelectric ceramic sheet 700 of the first piezoelectric ceramic sheet 100 to stretch along the front-rear direction;
and the second actuating region 102 of the first piezoceramic sheet 100 is synchronously and reversely stretched with the second piezoceramic sheet 200, and the third piezoceramic sheet 600 and the fourth piezoceramic sheet 700 are synchronously and reversely stretched.
It should be noted that, in the following embodiments, examples are given in which the second piezoelectric ceramic sheet 200, the third piezoelectric ceramic sheet 600 and the fourth piezoelectric ceramic sheet 700 are disposed above the first piezoelectric ceramic sheet 100, which are merely illustrative of technical solutions, but it is understood that one or more of the second piezoelectric ceramic sheet 200, the third piezoelectric ceramic sheet 600 and the fourth piezoelectric ceramic sheet 700 are disposed below the first piezoelectric ceramic sheet 100, which is also a similar technical solution, as will be apparent to those skilled in the art. It should be further understood that the terms "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, and are merely for purposes of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements being referred to must have a particular orientation, be configured and operated in a particular orientation, and thus should not be construed as limiting the present utility model. For example, in the embodiment shown in fig. 8, the second piezoelectric ceramic sheet 200 is disposed below the first piezoelectric ceramic sheet 100, the third piezoelectric ceramic sheet 600 is disposed below the first piezoelectric ceramic sheet 100, and the fourth piezoelectric ceramic sheet 700 is disposed above the first piezoelectric ceramic sheet 100; however, if the scan actuator of this embodiment is rotated 180 ° along the axis extending in the front-rear direction, the second piezoelectric ceramic sheet 200 is disposed above the first piezoelectric ceramic sheet 100, the third piezoelectric ceramic sheet 600 is disposed below the first piezoelectric ceramic sheet 100, and the fourth piezoelectric ceramic sheet 700 is disposed above the first piezoelectric ceramic sheet 100.
The second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200 are thus synchronously and reversely telescopic to drive the free end of the first piezoceramic sheet 100 to vibrate in the vertical direction, and the third piezoceramic sheet 600 and the fourth piezoceramic sheet 700 are synchronously and reversely telescopic to drive the free end of the first piezoceramic sheet 100 to vibrate in the left-right direction.
The left side and the right side of the first actuating area 101 of the first piezoelectric ceramic piece 100 are respectively provided with the third piezoelectric ceramic piece 600 and the fourth piezoelectric ceramic piece 700, and the area of the driving electrode is greatly reduced by the structure, so that the capacitance of the driving electrode is reduced, and the driving power consumption is greatly reduced.
In the embodiment shown in fig. 3, the third piezoelectric ceramic sheet 600 has a first upper electrode 301 on the upper surface, a first lower electrode 302 on the lower surface, a second upper electrode 303 on the upper surface, a second lower electrode 304 on the lower surface, a third upper electrode 305 on the upper surface, a third lower electrode 306 on the lower surface, a fourth upper electrode 307 on the upper surface, and a fourth lower electrode 308 on the lower surface of the second actuation region 102 of the first piezoelectric ceramic sheet 100. Of course, it is common knowledge in the art that the third upper electrode 305 and the fourth lower electrode 308 need to be provided with insulating structures, such as an insulating layer coated on the electrode surfaces. For each upper electrode and each lower electrode in the application, the electrode layer is coated on the piezoelectric ceramic plate, and the coating area of the electrode layer can be adjusted according to working conditions.
Alternatively, the third piezoelectric ceramic sheet 600 and the fourth piezoelectric ceramic sheet 700 may have a common electrode lead. Since the third piezoelectric ceramic sheet 600 and the fourth piezoelectric ceramic sheet 700 are stretched in the synchronous and reverse directions, if the polarization directions of the third piezoelectric ceramic sheet 600 and the fourth piezoelectric ceramic sheet 700 are the same, the first upper electrode 301 and the second lower electrode 304 may share one electrode lead, and the first lower electrode 302 and the second upper electrode 303 may share one electrode lead, so that one driving signal may pass through the two leads, and the first stretching region 1011 and the second stretching region 1012 may be simultaneously driven to stretch in the synchronous and reverse directions. If the polarization directions of the third piezoelectric ceramic sheet 600 and the fourth piezoelectric ceramic sheet 700 are opposite, the first upper electrode 301 and the second upper electrode 303 are correspondingly made to share one electrode lead, and the first lower electrode 302 and the second lower electrode 304 are made to share one electrode lead.
Alternatively, the second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200 may have a common intermediate electrode 311, the intermediate electrode 311 being disposed between the second actuating region 102 and the second piezoceramic sheet 200, as shown in fig. 4, the intermediate electrode 311 being the upper electrode of both the second actuating region 102, the lower electrode of the second piezoelectric ceramic plate is also used, so that the second actuating area 102 of the first piezoelectric ceramic plate 100 and the second piezoelectric ceramic plate 200 only have three electrode leads, the circuit is simplified, and the two driving signals respectively drive the second actuating area 102 and the second piezoelectric ceramic plate 200 to synchronously and reversely stretch. On the basis, it is further preferred that the polarization direction of the second actuating region 102 of the first piezoceramic sheet 100 is the same as that of the second piezoceramic sheet 200, and since the second actuating region 102 and the second piezoceramic sheet 200 synchronously and reversely stretch, besides the second actuating region 102 and the second piezoceramic sheet 200 can share one middle electrode 311, the two remaining electrodes of the second actuating region 102 and the second piezoceramic sheet 200 can also share one electrode lead, so that one driving signal can simultaneously drive the second actuating region 102 and the second piezoceramic sheet 200 to synchronously and reversely stretch through the two leads.
In some embodiments of the present application, in order to improve strength, stability and shock resistance of the actuator, as shown in fig. 5, a dielectric layer 400 is disposed between the first piezoelectric ceramic plate and the second piezoelectric ceramic plate, the second piezoelectric ceramic plate 200 and the first piezoelectric ceramic plate 100 are tightly adhered to and fixedly connected with the dielectric layer 400, and the second piezoelectric ceramic plate 200 and the dielectric layer 400, and the dielectric layer 400 and the first piezoelectric ceramic plate 100 are fixedly connected by adhesive bonding, or by adopting an ultrasonic welding method or the like, the fixed connection is not limited. Further optionally, the dielectric layer 400 is a conductive dielectric layer or an insulating dielectric layer. Therefore, when the dielectric layer 400 is a conductive dielectric layer, the second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200 can use the conductive dielectric layer as a common electrode for both. In the embodiment shown in fig. 6, the lower electrode of the second actuating region 102 of the first piezoceramic wafer 100 and the upper electrode of the second piezoceramic wafer 200 are the same electrode, and the common electrode is the conductive dielectric layer 400.
It should be noted that, when the second actuation area 102 of the first piezoceramic wafer 100 and two adjacent electrode layers of the second piezoceramic wafer 200 do not share one electrode lead, and the dielectric layer 400 is the conductive dielectric layer 400, an insulating layer is disposed between the second actuation area 102 of the first piezoceramic wafer 100 and two adjacent electrodes of the second piezoceramic wafer 200, that is, an insulating layer is disposed on an outer surface of at least one of the two adjacent electrodes, which is known to those skilled in the art, and will not be described herein.
A second aspect of the present application provides an optical fiber scanner, as shown in fig. 7, which includes the scanning actuator and the optical fiber 500, where the optical fiber 500 is fixedly disposed at the front end of the first piezoceramic wafer 100 in a cantilever support manner. The other end of the optical fiber 500 is connected with a light source, the optical fiber cantilever is driven by the scanning actuator to perform two-dimensional scanning, and the light source emits light of a corresponding pixel point according to the scanning position of the optical fiber cantilever, so that the optical fiber two-dimensional scanning imaging is realized.
It should be noted that the above-mentioned embodiments illustrate rather than limit the utility model, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" or "comprises" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the words first, second, third, etc. do not denote any order, and the words may be interpreted as names.
All of the features disclosed in this specification, except mutually exclusive features, may be combined in any manner.
Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. That is, each feature is one example only of a generic series of equivalent or similar features, unless expressly stated otherwise.
The utility model is not limited to the specific embodiments described above. The utility model extends to any novel one, or any novel combination, of the features disclosed in this specification, as well as to any novel one, or any novel combination, of the steps of the method or process disclosed.
Claims (11)
1. A scanning actuator is characterized by comprising a first piezoelectric ceramic plate, a second piezoelectric ceramic plate, a third piezoelectric ceramic plate and a fourth piezoelectric ceramic plate which are all plate-shaped,
the plane where the first piezoelectric ceramic plate is positioned is taken as a horizontal plane, and the front end and the rear end of the first piezoelectric ceramic plate are respectively a free end and a fixed end of the scanning actuator;
the first piezoelectric ceramic plate is provided with a first actuating area positioned at the front side and a second actuating area positioned at the rear side, the left side and the right side of the first actuating area are respectively provided with a first telescopic area and a second telescopic area,
the second piezoelectric ceramic plate, the third piezoelectric ceramic plate and the fourth piezoelectric ceramic plate are all arranged in parallel with the first piezoelectric ceramic plate, the second piezoelectric ceramic plate is fixedly arranged right above or right below the second actuating area, the third piezoelectric ceramic plate is fixedly arranged right above or right below the first telescopic area, the fourth piezoelectric ceramic plate is fixedly arranged right above or right below the second telescopic area,
the free end of the scanning actuator is driven by the first piezoelectric ceramic plate, the second piezoelectric ceramic plate, the third piezoelectric ceramic plate and the fourth piezoelectric ceramic plate to do two-dimensional scanning vibration relative to the fixed end of the scanning actuator.
2. A scanning actuator according to claim 1, wherein the first piezoelectric ceramic plate, the second piezoelectric ceramic plate, the third piezoelectric ceramic plate and the fourth piezoelectric ceramic plate are polarized in the thickness direction, and the second actuation area of the first piezoelectric ceramic plate, the second piezoelectric ceramic plate, the third piezoelectric ceramic plate and the fourth piezoelectric ceramic plate are stretched in the front-rear direction; and the second actuating area of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate synchronously and reversely stretch and contract, and the third piezoelectric ceramic plate and the fourth piezoelectric ceramic plate synchronously and reversely stretch and contract.
3. The scan actuator of claim 1, wherein the second actuation area of the first piezoelectric ceramic plate, the second piezoelectric ceramic plate, the third piezoelectric ceramic plate, and the fourth piezoelectric ceramic plate are respectively provided with upper electrodes and lower electrodes correspondingly matched with each other, and each upper electrode and each lower electrode are respectively connected to a corresponding external driving circuit through electrode leads to respectively drive the second actuation area of the first piezoelectric ceramic plate, the second piezoelectric ceramic plate, the third piezoelectric ceramic plate, and the fourth piezoelectric ceramic plate to stretch in the front-rear direction.
4. A scanning actuator according to claim 3, wherein the third piezoelectric ceramic plate has a first upper electrode on its upper surface and a first lower electrode on its lower surface, the fourth piezoelectric ceramic plate has a second upper electrode on its upper surface and a second lower electrode on its lower surface, the first piezoelectric ceramic plate has a third upper electrode on its upper surface and a third lower electrode on its lower surface in its second actuation region, and the second piezoelectric ceramic plate has a fourth upper electrode on its upper surface and a fourth lower electrode on its lower surface.
5. A scanning actuator according to claim 4, wherein the third piezoceramic wafer and the fourth piezoceramic wafer have a common electrode lead.
6. A scanning actuator according to claim 4, wherein the second actuation area of the first piezoceramic wafer and the second piezoceramic wafer have a common intermediate electrode.
7. A scanning actuator according to claim 6, wherein the second actuation area of the first piezoceramic wafer is polarized in the same direction as the second piezoceramic wafer.
8. A scanning actuator according to claim 1, 2 or 3, wherein a dielectric layer is arranged between the first piezoelectric ceramic plate and the second piezoelectric ceramic plate, and the second piezoelectric ceramic plate and the first piezoelectric ceramic plate are tightly attached to and fixedly connected with the dielectric layer.
9. A scanning actuator according to claim 8, wherein the dielectric layer is a conductive dielectric layer or an insulating dielectric layer.
10. A scanning actuator according to claim 9, wherein when the dielectric layer is a conductive dielectric layer, the second actuation area of the first piezoceramic wafer and the second piezoceramic wafer use the conductive dielectric layer as a common electrode for both.
11. An optical fiber scanner comprising the scanning actuator according to any one of claims 1 to 10 and an optical fiber fixedly provided at a front end portion of the first piezoelectric ceramic plate in a cantilever-supported manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222566309.XU CN220438664U (en) | 2022-09-27 | 2022-09-27 | Scanning actuator and optical fiber scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222566309.XU CN220438664U (en) | 2022-09-27 | 2022-09-27 | Scanning actuator and optical fiber scanner |
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| Publication Number | Publication Date |
|---|---|
| CN220438664U true CN220438664U (en) | 2024-02-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222566309.XU Active CN220438664U (en) | 2022-09-27 | 2022-09-27 | Scanning actuator and optical fiber scanner |
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| CN (1) | CN220438664U (en) |
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- 2022-09-27 CN CN202222566309.XU patent/CN220438664U/en active Active
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