CN219978625U

CN219978625U - Optical fiber scanner

Info

Publication number: CN219978625U
Application number: CN202320346416.3U
Authority: CN
Inventors: 请求不公布姓名
Original assignee: Chengdu Idealsee Technology Co Ltd
Current assignee: Chengdu Idealsee Technology Co Ltd
Priority date: 2023-02-28
Filing date: 2023-02-28
Publication date: 2023-11-07
Anticipated expiration: 2033-02-28

Abstract

The utility model discloses an optical fiber scanner, which comprises a scanning actuator and an optical fiber, wherein the scanning actuator comprises a first piezoelectric ceramic plate and a second piezoelectric ceramic plate, the second piezoelectric ceramic plate is fixedly attached to the rear side of the upper surface or the lower surface of the first piezoelectric ceramic plate, and the free end of the scanning actuator performs two-dimensional scanning vibration relative to the fixed end of the scanning actuator under the driving of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate; the optical fiber is fixedly arranged at the front end part of the first piezoelectric ceramic piece in a cantilever supporting mode. The single ceramic chip is convenient to manufacture and process, and the consistency of product specification, performance and parameters is easy to ensure in mass production.

Description

Optical fiber scanner

Technical Field

The utility model relates to the technical field of optical fiber scanning, in particular to an optical fiber scanner.

Background

The optical fiber scanner is a display technology for emitting a pattern by controlling the swing of an optical fiber by using a scanning actuator, and the technology irradiates the pattern with sharp saturation, high contrast, high brightness and very small structural volume, and is mainly used in the optical Fiber Scanning Display (FSD) technology and the optical Fiber Scanning Endoscope (FSE) technology.

The actuator of the grid type optical fiber scanner mainly comprises a second actuating part serving as a fast shaft and a first actuating part serving as a slow shaft, wherein two ends of the second actuating part and the first actuating part are respectively a fixed end and a free end, and the fixed end of the second actuating part is fixedly connected with the free end of the first actuating part. In order to obtain a stable scanning range and accurately control the scanning track, the scanning track at the tail end of the actuator needs to have accurate consistency with the scanning track of the first actuating part and the scanning track of the second actuating part, and the machining error of any actuating part can make the vibration of the actuator difficult to control or generate a disordered vibration component. How to avoid uncontrolled or spurious vibration components is one of the important factors to improve the scanning quality.

In order to make the actuating portion in the slow axis direction meet the slow axis scanning frequency and the actuating portion in the fast axis direction meet the fast axis scanning frequency, the shape and the size of the conventional scanner actuator are correspondingly designed, which leads to the actuator being irregularly shaped.

A scanning actuator as disclosed in chinese patent CN111830702a, which is a generally tubular piezoelectric actuator, is designed to be a special-shaped structure, which is quite disadvantageous for mass production of the actuator, difficult to process, and the consistency of the process cannot be ensured, as is limited by the above factors. Another example is a scanning actuator disclosed in chinese patent CN209784655U, which is a piezoelectric actuator in a sheet shape, and is also in consideration of performance, and the actuator is also configured to have a special-shaped structure, which also has the technical problems that it is difficult to precisely process and the consistency of processing is poor.

At the same time, how to avoid the vibration coupling between the slow axis actuator and the fast axis actuator is also a technical problem to be considered. The two prior art techniques described above have no corresponding design as to how to reduce the vibrational coupling between the slow axis actuator and the fast axis actuator.

Therefore, on the premise that each actuating part meets the performance parameters and vibration coupling is not generated, the actuator is easy to process, mass production is easy, mass production consistency is good, and the technical problem to be solved is that

Disclosure of Invention

The embodiment of the utility model provides an optical fiber scanner which is used for at least solving the technical problems that an actuator with good anti-vibration coupling is not easy to mass production and has poor mass production consistency.

In order to achieve the above object, the present utility model provides an optical fiber scanner comprising a scanning actuator and an optical fiber, the scanning actuator comprising a first piezoelectric ceramic plate and a second piezoelectric ceramic plate each having a plate shape,

the plane where the first piezoelectric ceramic plate is positioned is taken as a horizontal plane, and the front end and the rear end of the first piezoelectric ceramic plate are respectively a free end and a fixed end of the scanning actuator;

the length of the second piezoelectric ceramic plate in the front-back direction is smaller than that of the first piezoelectric ceramic plate in the front-back direction, the second piezoelectric ceramic plate is fixedly attached to the rear side of the upper surface or the lower surface of the first piezoelectric ceramic plate,

The free end of the scanning actuator performs two-dimensional scanning vibration relative to the fixed end of the scanning actuator under the driving of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate;

the optical fiber is fixedly arranged at the front end part of the first piezoelectric ceramic plate in a cantilever supporting mode, and the part of the front end of the optical fiber extending out of the front end part of the first piezoelectric ceramic plate becomes an optical fiber cantilever.

The two-dimensional scanning actuator is formed by bonding the two piezoelectric ceramic plates, the first piezoelectric ceramic plate and the second piezoelectric ceramic plate of the two components are single ceramic plates, the manufacturing and the processing are convenient, the consistency of product specifications, performances and parameters is easy to ensure in mass production, and the consistency of the actuator is good for the optical fiber scanning imaging technology, so that the actuator is one of key factors of mass production of the optical fiber scanner.

Meanwhile, the sheet structure enables the characteristic frequency value difference of the actuator in the horizontal direction and the vertical direction to be large, and vibration coupling of the actuator in two vibration directions can be greatly reduced.

Optionally, a through hole for the optical fiber to pass through is arranged between the first piezoelectric ceramic plate and the second piezoelectric ceramic plate, the through hole is a through hole extending and penetrating along the front-back direction, and the optical fiber part at the rear side of the optical fiber cantilever extends backwards and is correspondingly and fixedly arranged on the upper surface of the first piezoelectric ceramic plate and in the through hole along the front-back direction.

The optical fibers are linearly distributed along the front-back direction, the fixing structure of the optical fibers cannot be bent, and the light transmission efficiency of the optical fibers is improved.

Alternatively, the optical fiber part at the rear side of the optical fiber cantilever extends backward and is correspondingly and fixedly arranged on the lower surface of the first piezoelectric ceramic plate along the front-to-back direction.

The optical fiber and the first piezoelectric ceramic piece can be fixedly connected through adhesive bonding, and can also be fixedly connected through ultrasonic welding and other modes, so that the method is not limited. The lower surface of the first piezoelectric ceramic piece is a plane, so that the fixing structure of the optical fiber cannot bend, and the light transmission efficiency is improved. Further optionally, a groove (not shown in the figure) for fixing the optical fiber is provided on the lower surface of the first piezoceramic sheet, and a corresponding portion of the optical fiber is fixedly disposed in the groove.

The rear end of the optical fiber extends backwards from the rear end of the lower surface of the first piezoelectric ceramic plate and is connected with a light source, the optical fiber cantilever is driven by the scanning actuator to perform two-dimensional scanning, and the light source emits light of a corresponding pixel point according to the scanning position of the optical fiber cantilever, so that two-dimensional scanning imaging of the optical fiber is realized.

Alternatively, the optical fiber part at the rear side of the optical fiber cantilever extends backwards and is correspondingly and fixedly arranged on the upper surface of the first piezoelectric ceramic plate and the upper surface of the second piezoelectric ceramic plate along the front-to-back direction.

Specifically, the first piezoelectric ceramic plate and the second piezoelectric ceramic plate are polarized along the thickness direction, the first piezoelectric ceramic plate is provided with a first actuating area positioned at the front side and a second actuating area positioned at the rear side, and the second piezoelectric ceramic plate and the first piezoelectric ceramic plate are arranged in parallel and fixedly attached to be arranged right above the second actuating area of the first piezoelectric ceramic plate.

The second piezoelectric ceramic piece and the first piezoelectric ceramic piece can be fixedly connected through adhesive bonding, and the second piezoelectric ceramic piece and the first piezoelectric ceramic piece can be fixedly connected through ultrasonic welding and the like, so that the method is not limited.

The left and right sides of the first actuating area are respectively provided with a first telescopic area and a second telescopic area,

the upper surface and the lower surface of the second actuating area, the first telescopic area, the second telescopic area and the second piezoelectric ceramic plate of the first piezoelectric ceramic plate are correspondingly matched and provided with an upper electrode and a lower electrode, and each upper electrode and each lower electrode are connected with a corresponding external driving circuit through an electrode lead so as to respectively drive the second actuating area, the first telescopic area, the second telescopic area and the second piezoelectric ceramic plate of the first piezoelectric ceramic plate to stretch along the front-back direction;

the second actuating area of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate synchronously and reversely stretch, and the first stretching area and the second stretching area of the first piezoelectric ceramic plate synchronously and reversely stretch;

The perforation is arranged between the second actuating area of the first piezoelectric ceramic piece and the second piezoelectric ceramic piece;

the optical fiber part positioned at the rear side of the optical fiber cantilever is correspondingly and fixedly arranged on the upper surface of the first actuating area of the first piezoelectric ceramic plate and in the perforation along the front-to-rear direction.

Preferably, the optical fiber is fixedly arranged at the middle position of the first actuating area in the left-right direction, and the perforation is arranged at the middle position of the whole formed by the second actuating area of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate in the vertical direction. Thus, the influence of the optical fiber on the deformation of the first telescopic region and the second telescopic region and the influence of the optical fiber on the deformation of the second actuating region and the second piezoelectric ceramic plate are reduced to the maximum extent.

The rear end of the optical fiber extends backwards from the perforated rear end and is connected with a light source, the optical fiber cantilever is driven by the scanning actuator to perform two-dimensional scanning, and the light source emits light of a corresponding pixel point according to the scanning position of the optical fiber cantilever, so that two-dimensional scanning imaging of the optical fiber is realized.

And the first telescopic area and the second telescopic area of the first piezoelectric ceramic piece synchronously and reversely telescopic drive the free end of the first piezoelectric ceramic piece to vibrate along the left and right directions.

Optionally, the upper surface of the first expansion region of the first piezoelectric ceramic piece is provided with a first upper electrode, the lower surface is provided with a first lower electrode, the upper surface of the second expansion region of the first piezoelectric ceramic piece is provided with a second upper electrode, the lower surface is provided with a second lower electrode, the upper surface of the second actuation region of the first piezoelectric ceramic piece is provided with a third upper electrode, the lower surface is provided with a third lower electrode, and the upper surface of the second piezoelectric ceramic piece is provided with a fourth upper electrode, and the lower surface is provided with a fourth lower electrode. Of course, it is common knowledge in the art that the third upper electrode and the fourth lower electrode need to be provided with insulating structures, such as an insulating layer coated on the surface of the electrodes. For each upper electrode and each lower electrode of the application are generally electrode layers coated on a piezoelectric ceramic plate, and the coating area of the electrode layers can be adjusted according to working conditions.

Alternatively, the first stretchable region and the second stretchable region of the first piezoelectric ceramic sheet may have a common upper electrode or lower electrode. For example, optionally, the fifth upper electrode coated on the upper surface of the first actuating area of the first piezoelectric ceramic plate covers the first telescopic area and the second telescopic area at the same time, and independent first lower electrodes and second lower electrodes are respectively arranged on the lower surface of the first actuating area of the first piezoelectric ceramic plate, so that the first telescopic area and the second telescopic area of the first piezoelectric ceramic plate only have three electrode leads, and the first telescopic area and the second telescopic area are respectively driven by two paths of driving signals to synchronously and reversely telescopic. Similarly, the fifth lower electrode coated on the lower surface of the first actuating area of the first piezoelectric ceramic plate covers the first telescopic area and the second telescopic area simultaneously, and independent first upper electrodes and second upper electrodes are respectively arranged on the upper surface of the first actuating area of the first piezoelectric ceramic plate, so that the first telescopic area and the second telescopic area of the first piezoelectric ceramic plate only have three electrode leads, and the first telescopic area and the second telescopic area are driven by two paths of driving signals to synchronously and reversely stretch. On the basis, it is further preferable that the polarization directions of the first stretching region and the second stretching region of the first piezoelectric ceramic sheet are opposite, and the first stretching region and the second stretching region of the first piezoelectric ceramic sheet are synchronous and reversely stretched, so that the first stretching region and the second stretching region of the first piezoelectric ceramic sheet can have a fifth upper electrode and a fifth lower electrode which are in common, namely, the fifth upper electrode coated on the upper surface of the first actuating region of the first piezoelectric ceramic sheet covers the first stretching region and the second stretching region simultaneously; the fifth lower electrode coated on the lower surface of the first actuating region covers both the first telescopic region and the second telescopic region. The common fifth upper electrode and the fifth lower electrode are respectively connected with one electrode lead, so that one driving signal can drive the first telescopic region and the second telescopic region to synchronously and reversely telescopic through the two leads.

Similarly, alternatively, the second actuating region of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate may have a common intermediate electrode, where the intermediate electrode is disposed between the second actuating region and the second piezoelectric ceramic plate, and as shown in the figure, the intermediate electrode is not only an upper electrode of the second actuating region, but also a lower electrode of the second piezoelectric ceramic plate, so that the second actuating region of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate only have three electrode leads, simplifying a circuit, and driving the second actuating region and the second piezoelectric ceramic plate to perform synchronous and reverse expansion respectively by two paths of driving signals. On the basis, it is further preferable that the polarization direction of the second actuating area of the first piezoelectric ceramic plate is the same as that of the second piezoelectric ceramic plate, and the second actuating area and the second piezoelectric ceramic plate synchronously and reversely stretch, so that besides the second actuating area and the second piezoelectric ceramic plate can share one middle electrode, the two remaining electrodes of the second actuating area and the second piezoelectric ceramic plate can also share one electrode lead, and one driving signal can drive the second actuating area and the second piezoelectric ceramic plate synchronously and reversely stretch through the two leads at the same time.

In some embodiments of the present utility model, in order to improve strength, stability and shock resistance of the actuator, a dielectric layer is disposed between the first piezoelectric ceramic plate and the second piezoelectric ceramic plate, and the through holes are disposed in the dielectric layer. The second piezoelectric ceramic piece and the first piezoelectric ceramic piece are tightly attached to the dielectric layer and are fixedly connected, the second piezoelectric ceramic piece and the dielectric layer, and the dielectric layer and the first piezoelectric ceramic piece are fixedly connected through adhesive bonding, and the ultrasonic welding and other modes can be adopted to realize the fixed connection, so that the method is not limited. Further optionally, the dielectric layer is a conductive dielectric layer or an insulating dielectric layer. Therefore, when the dielectric layer is a conductive dielectric layer, the second actuation region of the first piezoceramic wafer and the second piezoceramic wafer can use the conductive dielectric layer as a common electrode for both. In the embodiment shown in the drawings, the lower electrode of the second actuation area of the first piezoceramic wafer and the upper electrode of the second piezoceramic wafer are the same electrode, and the common electrode is a conductive medium layer.

One or more technical solutions in the embodiments of the present utility model at least have the following technical effects or advantages:

When the optical fiber is arranged on the perforation or on the lower surface of the first piezoelectric ceramic piece, the fixing structure of the optical fiber cannot be bent, and the light transmission efficiency is improved.

The second actuating area of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate only synchronously and reversely stretch, and the left end face and the right end face are not bound, so that the synchronous and reversely stretch only can cause vibration in the vertical direction, and vibration components in the horizontal left and right directions are not generated; similarly, the first expansion region and the second expansion region of the first piezoelectric ceramic sheet only synchronously and reversely expand and contract, and the upper surface and the lower surface are not bound, so that the synchronous and reversely expand and contract only can vibrate horizontally and horizontally, and vibration components in the vertical direction cannot be generated. The actuator of the present application does not require additional corrective structure.

According to the utility model, the left and right sides of the first actuating area of the first piezoelectric ceramic plate are respectively provided with the first telescopic area and the second telescopic area, and the two areas are respectively provided with the driving electrode, so that the area of the driving electrode is greatly reduced, the capacitance of the driving electrode is reduced, and the driving power consumption is greatly reduced.

Drawings

FIG. 1 is a schematic diagram of an optical fiber scanner according to the present utility model;

FIG. 2 is a schematic structural view of a first piezoelectric ceramic sheet according to the present utility model;

FIG. 3 is a schematic view of an electrode structure of a scan actuator according to the present utility model;

FIG. 4 is a schematic view of a structure of a first actuation area common upper electrode of a first piezoceramic wafer;

FIG. 5 is a schematic view of the structure of the first piezoelectric ceramic plate with the first actuating region sharing the lower electrode;

FIG. 6 is a schematic view of a structure in which the first actuation region of the first piezoelectric ceramic wafer shares both the upper electrode and the lower electrode;

FIG. 7 is a schematic diagram of a structure in which the second piezoelectric ceramic sheet and the second actuating region of the first piezoelectric ceramic sheet share an intermediate electrode;

FIG. 8 is a schematic diagram of a scan actuator with a dielectric layer disposed thereon;

FIG. 9 is a schematic diagram of a structure in which the second piezoelectric ceramic plate and the second actuating region of the first piezoelectric ceramic plate share a conductive dielectric layer as a common electrode;

FIG. 10 is a schematic diagram of a second embodiment of a fiber scanner according to the present utility model;

FIG. 11 is a schematic diagram of the front view of the embodiment of FIG. 10;

fig. 12 is a schematic diagram of a third fiber scanner embodiment of the present utility model.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Example 1:

as shown in fig. 1, an embodiment of the present utility model provides an optical fiber scanner including a scanning actuator including a first piezoelectric ceramic sheet 100 and a second piezoelectric ceramic sheet 200 each having a plate shape,

taking the plane of the first piezoelectric ceramic plate 100 as a horizontal plane, and taking the front end and the rear end of the first piezoelectric ceramic plate 100 as the free end and the fixed end of the scanning actuator respectively;

The length of the second piezoelectric ceramic sheet 200 in the front-rear direction is smaller than that of the first piezoelectric ceramic sheet 100 in the front-rear direction, the second piezoelectric ceramic sheet 200 is fixedly attached to the rear side of the upper surface or the lower surface of the first piezoelectric ceramic sheet 100,

driven by the first piezoelectric ceramic sheet 100 and the second piezoelectric ceramic sheet 200, the free end of the scanning actuator performs two-dimensional scanning vibration relative to the fixed end thereof;

the optical fiber 500 is fixedly arranged at the front end part of the first piezoelectric ceramic plate 100 in a cantilever supporting manner, the part of the front end of the optical fiber 500 extending out of the front end part of the first piezoelectric ceramic plate 100 becomes an optical fiber cantilever 501,

a through hole 600 for the optical fiber 500 to pass through is arranged between the first piezoelectric ceramic plate 100 and the second piezoelectric ceramic plate 200, the through hole 600 is a through hole extending and penetrating along the front-back direction, and the optical fiber part positioned at the rear side of the optical fiber cantilever 501 extends backwards and is correspondingly and fixedly arranged on the upper surface of the first piezoelectric ceramic plate 100 and in the through hole 600 along the front-back direction.

The optical fiber 500, the second piezoelectric ceramic piece 200 and the through hole 600 may be fixedly connected by adhesive bonding, or may be fixedly connected by ultrasonic welding or the like, which is not limited thereto.

The two piezoelectric ceramic plates are bonded to form the two-dimensional scanning actuator, the two components of the two piezoelectric ceramic plates, namely the first piezoelectric ceramic plate 100 and the second piezoelectric ceramic plate 200, are single ceramic plates, the manufacturing and the processing are convenient, the consistency of product specifications, performances and parameters is easy to ensure in mass production, and the consistency of the actuator is good for the optical fiber scanning imaging technology, so that the actuator is one of key factors of mass production of the optical fiber scanner.

The optical fiber 500 is linearly arranged along the front-rear direction, the fixing structure of the optical fiber cannot be bent, and the light transmission efficiency of the optical fiber is improved.

Specifically, the first piezoceramic sheet 100 and the second piezoceramic sheet 200 are polarized in the thickness direction, and as shown in fig. 2, the first piezoceramic sheet 100 has a first actuation area 101 located on the front side and a second actuation area 102 located on the rear side, and the second piezoceramic sheet 200 is disposed parallel to the first piezoceramic sheet 100 and fixedly attached directly above the second actuation area 102 of the first piezoceramic sheet 100.

The second piezoelectric ceramic sheet 200 and the first piezoelectric ceramic sheet 100 may be fixedly connected by adhesive bonding, or may be fixedly connected by ultrasonic welding or the like, which is not limited thereto.

A first expansion and contraction region 1011 and a second expansion and contraction region 1012 are provided on the left and right sides of the first actuation region 101,

the upper surface and the lower surface of the second actuating region 102, the first stretching region 1011, the second stretching region 1012 and the second piezoelectric ceramic sheet 200 of the first piezoelectric ceramic sheet 100 are respectively provided with an upper electrode and a lower electrode in a corresponding fit manner, and each upper electrode and each lower electrode are respectively used for being connected with a corresponding external driving circuit through an electrode lead wire so as to respectively drive the second actuating region 102, the first stretching region 1011, the second stretching region 1012 and the second piezoelectric ceramic sheet 200 of the first piezoelectric ceramic sheet 100 to stretch in the front-rear direction;

and the second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200 are synchronously and reversely stretched, and the first stretching region 1011 and the second stretching region 1012 of the first piezoceramic sheet 100 are synchronously and reversely stretched.

The through hole 600 is disposed between the second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200, and the optical fiber portion located at the rear side of the optical fiber cantilever 501 is correspondingly and fixedly disposed on the upper surface of the first actuating region 101 of the first piezoceramic sheet 100 and in the through hole 600 along the front-to-rear direction.

Preferably, the optical fiber 500 is fixedly arranged at a central position in the left-right direction of the first actuating region 101, and the through hole is arranged at a central position in the vertical direction of the whole formed by the second actuating region 102 of the first piezoceramic wafer 100 and the second piezoceramic wafer 200. Thus, the effect of the optical fiber on the deformation of the first and second telescoping regions 1011, 1012 and on the deformation of the second actuation region 102 and the second piezoceramic sheet 200 is minimized.

The rear end of the optical fiber 500 continues to extend backwards from the rear end of the perforation 600 and is connected with a light source, the optical fiber cantilever 501 is driven by a scanning actuator to perform two-dimensional scanning, and the light source emits light of a corresponding pixel point according to the scanning position of the optical fiber cantilever 501, so that optical fiber two-dimensional scanning imaging is realized.

It should be noted that, it should be understood that the terms "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, and are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Taking the relative position of the second piezoceramic sheet 200 and the first piezoceramic sheet 100 as an example, the scanning actuator is rotated 180 ° along the axis extending in the front-back direction, the second piezoceramic sheet 200 is disposed below the first piezoceramic sheet 100, and the optical fiber is fixedly disposed on the lower surface of the first actuation area 101.

Thus, the second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200 synchronously and reversely stretch to drive the free end of the first piezoceramic sheet 100 to vibrate in the vertical direction, and the first stretching region 1011 and the second stretching region 1012 of the first piezoceramic sheet 100 synchronously and reversely stretch to drive the free end of the first piezoceramic sheet 100 to vibrate in the left-right direction.

The second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200 are only synchronously and reversely stretched, and the left and right end surfaces are not bound, so that the synchronous and reversely stretched only causes vibration in the vertical direction, and does not generate vibration components in the horizontal left and right directions; similarly, the first expansion and contraction region 1011 and the second expansion and contraction region 1012 of the first piezoelectric ceramic sheet 100 are only synchronously and reversely expanded and contracted, and the upper and lower surfaces are not bound, so that the synchronous and reversely expanded and contracted only causes vibration in the horizontal and horizontal directions, and does not generate vibration components in the vertical directions. The actuator of the present application does not require additional corrective structure.

According to the application, the left side and the right side of the first actuating region 101 of the first piezoelectric ceramic sheet 100 are respectively provided with the first telescopic region 1011 and the second telescopic region 1012, and the two regions are respectively provided with the driving electrodes, so that the area of the driving electrodes is greatly reduced by the structure, the capacitance of the driving electrodes is reduced, and the driving power consumption is greatly reduced.

In the embodiment shown in fig. 3, the first upper electrode 301 is disposed on the upper surface of the first expansion region 1011 of the first piezoelectric ceramic sheet 100, the first lower electrode 302 is disposed on the lower surface, the second upper electrode 303 is disposed on the upper surface of the second expansion region 1012 of the first piezoelectric ceramic sheet 100, the second lower electrode 304 is disposed on the lower surface, the third upper electrode 305 is disposed on the upper surface of the second actuation region 102 of the first piezoelectric ceramic sheet 100, the third lower electrode 306 is disposed on the lower surface, and the fourth upper electrode 307 is disposed on the upper surface of the second piezoelectric ceramic sheet 200, and the fourth lower electrode 308 is disposed on the lower surface. Of course, it is common knowledge in the art that the third upper electrode 305 and the fourth lower electrode 308 need to be provided with insulating structures, such as an insulating layer coated on the electrode surfaces. For each upper electrode and each lower electrode of the application are generally electrode layers coated on a piezoelectric ceramic plate, and the coating area of the electrode layers can be adjusted according to working conditions.

Alternatively, the first extension region 1011 and the second extension region 1012 of the first piezoelectric ceramic sheet 100 may have a common upper electrode or lower electrode. For example, as shown in fig. 4, the fifth upper electrode 309 coated on the upper surface of the first actuating region 101 of the first piezoelectric ceramic sheet 100 covers the first expansion region 1011 and the second expansion region 1012 at the same time, and the independent first lower electrode 302 and the independent second lower electrode 304 are respectively disposed only on the lower surface of the first actuating region 101 of the first piezoelectric ceramic sheet 100, so that the first expansion region 1011 and the second expansion region 1012 of the first piezoelectric ceramic sheet 100 have only three electrode leads, and the first expansion region 1011 and the second expansion region 1012 are driven by two driving signals to synchronously and reversely expand and contract respectively. Similarly, as shown in fig. 5, the fifth lower electrode 310 coated on the lower surface of the first actuating region 101 of the first piezoelectric ceramic sheet 100 covers the first expansion region 1011 and the second expansion region 1012 at the same time, and the independent first upper electrode 301 and the independent second upper electrode 303 are respectively disposed only on the upper surface of the first actuating region 101 of the first piezoelectric ceramic sheet 100, so that the first expansion region 1011 and the second expansion region 1012 of the first piezoelectric ceramic sheet 100 have only three electrode leads, and the first expansion region 1011 and the second expansion region 1012 are driven by two driving signals to synchronously and reversely expand and contract. Further preferably, the polarization directions of the first extension region 1011 and the second extension region 1012 of the first piezoelectric ceramic sheet 100 are opposite, and the first extension region 1011 and the second extension region 1012 are synchronously extended and retracted, so that the first extension region 1011 and the second extension region 1012 of the first piezoelectric ceramic sheet 100 may have the fifth upper electrode 309 and the fifth lower electrode 310 in common, that is, the fifth upper electrode 309 coated on the upper surface of the first actuation region 101 of the first piezoelectric ceramic sheet 100 covers both the first extension region 1011 and the second extension region 1012, as shown in fig. 6; the fifth lower electrode 310 coated on the lower surface of the first actuating region 101 covers both the first telescopic region 1011 and the second telescopic region 1012. The common fifth upper electrode 309 and fifth lower electrode 310 are connected to one electrode lead, respectively, so that a driving signal can simultaneously drive the first telescopic region 1011 and the second telescopic region 1012 to synchronously and reversely telescopic through the two leads.

Similarly, alternatively, the second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200 may have a common middle electrode 311, where the middle electrode 311 is disposed between the second actuating region 102 and the second piezoceramic sheet 200, as shown in fig. 7, and the middle electrode 311 is both an upper electrode of the second actuating region 102 and a lower electrode of the second piezoceramic sheet, so that the second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200 have only three electrode leads, simplifying the circuit, and driving the second actuating region 102 and the second piezoceramic sheet 200 to synchronously and reversely extend and retract by two driving signals respectively. On the basis, it is further preferred that the polarization direction of the second actuating region 102 of the first piezoceramic sheet 100 is the same as that of the second piezoceramic sheet 200, and since the second actuating region 102 and the second piezoceramic sheet 200 synchronously and reversely stretch, besides the second actuating region 102 and the second piezoceramic sheet 200 can share one middle electrode 311, the two remaining electrodes of the second actuating region 102 and the second piezoceramic sheet 200 can also share one electrode lead, so that one driving signal can simultaneously drive the second actuating region 102 and the second piezoceramic sheet 200 to synchronously and reversely stretch through the two leads.

In some embodiments of the present application, in order to improve the strength, stability and shock resistance of the actuator, as shown in fig. 8, a dielectric layer 400 is disposed between the first piezoelectric ceramic plate and the second piezoelectric ceramic plate, and the through holes 600 are disposed in the dielectric layer 400. The second piezoelectric ceramic piece 200 and the first piezoelectric ceramic piece 100 are tightly adhered to the dielectric layer 400 and are fixedly connected, the second piezoelectric ceramic piece 200 and the dielectric layer 400 and the first piezoelectric ceramic piece 100 are fixedly connected through adhesive bonding, and the ultrasonic welding and other modes can be adopted to realize the fixed connection without limitation. Further optionally, the dielectric layer 400 is a conductive dielectric layer or an insulating dielectric layer. Therefore, when the dielectric layer 400 is a conductive dielectric layer, the second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200 can use the conductive dielectric layer as a common electrode for both. In the embodiment shown in fig. 9, the lower electrode of the second actuating region 102 of the first piezoceramic wafer 100 and the upper electrode of the second piezoceramic wafer 200 are the same electrode, and the common electrode is the conductive dielectric layer 400.

It should be noted that, when the second actuation area 102 of the first piezoceramic wafer 100 and two adjacent electrode layers of the second piezoceramic wafer 200 do not share one electrode lead, and the dielectric layer 400 is the conductive dielectric layer 400, an insulating layer is disposed between the second actuation area 102 of the first piezoceramic wafer 100 and two adjacent electrodes of the second piezoceramic wafer 200, that is, an insulating layer is disposed on an outer surface of at least one of the two adjacent electrodes, which is known to those skilled in the art, and will not be described herein.

Example 2:

as shown in fig. 10, an embodiment of the present utility model provides an optical fiber scanner including a scanning actuator including a first piezoelectric ceramic sheet 100 and a second piezoelectric ceramic sheet 200 each having a plate shape,

taking the plane of the first piezoelectric ceramic plate 100 as a horizontal plane, and taking the front end and the rear end of the first piezoelectric ceramic plate 100 as the free end and the fixed end of the scanning actuator respectively; the length of the second piezoelectric ceramic plate in the front-back direction is smaller than that of the first piezoelectric ceramic plate in the front-back direction, the second piezoelectric ceramic plate is fixedly attached to the rear side of the upper surface or the lower surface of the first piezoelectric ceramic plate,

the optical fiber 500 is fixedly disposed at the front end portion of the first piezoceramic sheet 100 in a cantilever supporting manner, the portion of the front end of the optical fiber 500 extending out of the front end portion of the first piezoceramic sheet 100 becomes the optical fiber cantilever 501, specifically, the first piezoceramic sheet 100 and the second piezoceramic sheet 200 are polarized along the thickness direction, and as shown in fig. 2, the first piezoceramic sheet 100 has a first actuation area 101 located at the front side and a second actuation area 102 located at the rear side, and the second piezoceramic sheet 200 is disposed parallel to the first piezoceramic sheet 100 and fixedly attached directly above the second actuation area 102 of the first piezoceramic sheet 100.

and the second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200 are synchronously and reversely stretched, and the first stretching region 1011 and the second stretching region 1012 of the first piezoceramic sheet 100 are synchronously and reversely stretched;

the optical fiber portion located at the rear side of the optical fiber cantilever 501 is fixedly disposed on the upper surface of the first actuating region 101 of the first piezoceramic sheet 100 and the upper surface of the second piezoceramic sheet 200 in the front-to-rear direction, respectively.

The optical fiber 500 and the second piezoelectric ceramic piece 200 and the first piezoelectric ceramic piece 100 may be fixedly connected by adhesive bonding, or may be fixedly connected by ultrasonic welding or the like, which is not limited thereto.

Optionally, grooves (not shown in the figure) for fixing optical fibers are provided on the upper surface of the first actuating region 101 of the first piezoceramic sheet 100 and the upper surface of the second piezoceramic sheet 200, and corresponding portions of the optical fibers are fixedly disposed in the grooves.

The rear end of the optical fiber 500 continues to extend backwards from the rear end of the upper surface of the second piezoelectric ceramic plate 200 and is connected with a light source, the optical fiber cantilever 501 is driven by a scanning actuator to perform two-dimensional scanning, and the light source emits light of a corresponding pixel point according to the scanning position of the optical fiber cantilever 501, so that optical fiber two-dimensional scanning imaging is realized.

It should be noted that, it should be understood that the terms "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, and are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Taking the relative position of the second piezoceramic sheet 200 and the first piezoceramic sheet 100 as an example, the scanning actuator is rotated 180 ° along the axis extending in the front-rear direction, the second piezoceramic sheet 200 is disposed below the first piezoceramic sheet 100, and the optical fibers are fixedly disposed on the lower surface of the first actuation area 101 and the lower surface of the second piezoceramic sheet.

In some embodiments of the present application, in order to improve the strength, stability and shock resistance of the actuator, as shown in fig. 8, a dielectric layer 400 is disposed between the first piezoelectric ceramic sheet and the second piezoelectric ceramic sheet, and the second piezoelectric ceramic sheet 200 and the first piezoelectric ceramic sheet 100 are tightly adhered to and fixedly connected with the dielectric layer 400, and the second piezoelectric ceramic sheet 200 and the dielectric layer 400, and the dielectric layer 400 and the first piezoelectric ceramic sheet 100 are fixedly connected by adhesive bonding, or by adopting an ultrasonic welding method or the like to realize the fixed connection without limitation. Further optionally, the dielectric layer 400 is a conductive dielectric layer or an insulating dielectric layer. Therefore, when the dielectric layer 400 is a conductive dielectric layer, the second actuating region 102 of the first piezoceramic sheet 100 and the second piezoceramic sheet 200 can use the conductive dielectric layer as a common electrode for both. In the embodiment shown in fig. 9, the lower electrode of the second actuating region 102 of the first piezoceramic wafer 100 and the upper electrode of the second piezoceramic wafer 200 are the same electrode, and the common electrode is the conductive dielectric layer 400.

Example 3:

as shown in fig. 11 and 12, an embodiment of the present utility model provides an optical fiber scanner, including a scanning actuator and an optical fiber 500, the scanning actuator including a first piezoceramic sheet 100 and a second piezoceramic sheet 200 each having a plate shape,

the optical fiber 500 is fixedly disposed at the front end of the first piezoceramic sheet 100 in a cantilever supporting manner, and a portion of the front end of the optical fiber 500 extending out of the front end of the first piezoceramic sheet 100 becomes an optical fiber cantilever 501, and an optical fiber portion located at the rear side of the optical fiber cantilever 501 extends backward and is correspondingly fixedly disposed on the lower surface of the first piezoceramic sheet 100 along the front-to-rear direction.

The optical fiber 500 and the first piezoelectric ceramic sheet 100 may be fixedly connected by adhesive bonding, or may be fixedly connected by ultrasonic welding or the like, which is not limited thereto. The lower surface of the first piezoelectric ceramic plate 100 is a plane, so that the fixing structure of the optical fiber cannot be bent, and the light transmission efficiency is improved. Further optionally, a groove (not shown in the figure) for fixing the optical fiber is provided on the lower surface of the first piezoceramic sheet 100, and a corresponding portion of the optical fiber is fixedly disposed in the groove.

The rear end of the optical fiber 500 continues to extend backwards from the rear end of the lower surface of the first piezoelectric ceramic plate 100 and is connected with a light source, the optical fiber cantilever 501 is driven by a scanning actuator to perform two-dimensional scanning, and the light source emits light of a corresponding pixel point according to the scanning position of the optical fiber cantilever 501, so that optical fiber two-dimensional scanning imaging is realized.

It should be noted that, it should be understood that the terms "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, and are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Taking the relative position of the second piezoelectric ceramic plate 200 and the first piezoelectric ceramic plate 100 as an example, the scanning actuator is rotated 180 ° along the axis extending in the front-back direction, the second piezoelectric ceramic plate 200 is disposed below the first piezoelectric ceramic plate 100, and the optical fiber is fixedly disposed on the upper surface of the first piezoelectric ceramic plate 100.

It should be noted that, when the second actuation area 102 of the first piezoceramic wafer 100 and two adjacent electrode layers of the second piezoceramic wafer 200 do not share one electrode lead, and the dielectric layer 400 is the conductive dielectric layer 400, an insulating layer is disposed between the second actuation area 102 of the first piezoceramic wafer 100 and two adjacent electrodes of the second piezoceramic wafer 200, that is, an insulating layer is disposed on an outer surface of at least one of the two adjacent electrodes, which is common knowledge for those skilled in the art, and the description thereof will not be repeated

It should be noted that the above-mentioned embodiments illustrate rather than limit the utility model, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" or "comprises" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the words first, second, third, etc. do not denote any order, and the words may be interpreted as names.

All of the features disclosed in this specification, except mutually exclusive features, may be combined in any manner.

Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. That is, each feature is one example only of a generic series of equivalent or similar features, unless expressly stated otherwise.

The utility model is not limited to the specific embodiments described above. The utility model extends to any novel one, or any novel combination, of the features disclosed in this specification, as well as to any novel one, or any novel combination, of the steps of the method or process disclosed.

Claims

1. An optical fiber scanner is characterized by comprising a scanning actuator and an optical fiber, wherein the scanning actuator comprises a first piezoelectric ceramic plate and a second piezoelectric ceramic plate which are both plate-shaped,

2. The optical fiber scanner according to claim 1, wherein a through hole for the optical fiber to pass through is provided between the first piezoelectric ceramic plate and the second piezoelectric ceramic plate, the through hole is a through hole extending in the front-rear direction and penetrating, and the optical fiber portion located at the rear side of the optical fiber cantilever extends rearward and is fixedly disposed on the upper surface of the first piezoelectric ceramic plate and in the through hole correspondingly in the front-rear direction.

3. The optical fiber scanner according to claim 1, wherein the optical fiber portion at the rear side of the optical fiber cantilever extends rearward and is fixedly disposed on the upper surface of the first piezoelectric ceramic plate and the upper surface of the second piezoelectric ceramic plate in a front-to-rear direction, respectively.

4. The optical fiber scanner according to claim 1, wherein the optical fiber portion at the rear side of the optical fiber cantilever extends rearward and is fixedly disposed on the lower surface of the first piezoelectric ceramic plate correspondingly in the front-to-rear direction.

5. The optical fiber scanner according to claim 1, 3 and 4, wherein the first piezoelectric ceramic plate and the second piezoelectric ceramic plate are polarized in the thickness direction, the first piezoelectric ceramic plate has a first actuation area on the front side and a second actuation area on the rear side, the second piezoelectric ceramic plate is disposed in parallel with the first piezoelectric ceramic plate and fixedly attached directly above the second actuation area of the first piezoelectric ceramic plate,

the upper surface and the lower surface of the second actuating area, the first telescopic area, the second telescopic area and the second piezoelectric ceramic plate of the first piezoelectric ceramic plate are correspondingly matched with an upper electrode and a lower electrode, and the second actuating area, the first telescopic area, the second telescopic area and the second piezoelectric ceramic plate of the first piezoelectric ceramic plate are telescopic along the front-back direction;

And the second actuating area of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate synchronously and reversely stretch, and the first stretching area and the second stretching area of the first piezoelectric ceramic plate synchronously and reversely stretch.

6. The optical fiber scanner according to claim 2, wherein the first piezoelectric ceramic plate and the second piezoelectric ceramic plate are polarized along the thickness direction, the first piezoelectric ceramic plate is provided with a first actuating area positioned at the front side and a second actuating area positioned at the rear side, the second piezoelectric ceramic plate is arranged in parallel with the first piezoelectric ceramic plate and fixedly attached to the first piezoelectric ceramic plate and is arranged right above the second actuating area of the first piezoelectric ceramic plate,

7. The optical fiber scanner according to claim 6, wherein the through hole is disposed between the second actuation area of the first piezoceramic sheet and the second piezoceramic sheet;

8. The optical fiber scanner according to claim 5, wherein the optical fiber portion at the rear side of the optical fiber cantilever is fixedly disposed on the upper surface of the first actuating region of the first piezoelectric ceramic plate and the upper surface of the second piezoelectric ceramic plate in the front-to-rear direction.

9. The optical fiber scanner according to claim 5, wherein the second actuating region, the first telescopic region, the second telescopic region and the upper and lower surfaces of the first piezoelectric ceramic plate are respectively provided with an upper electrode and a lower electrode correspondingly in a matched manner, and each upper electrode and each lower electrode are respectively used for being connected with a corresponding external driving circuit through an electrode lead wire so as to respectively drive the second actuating region, the first telescopic region, the second telescopic region and the second piezoelectric ceramic plate of the first piezoelectric ceramic plate to stretch along the front-rear direction.

10. The optical fiber scanner according to claim 6, wherein the second actuating region, the first telescopic region, the second telescopic region and the upper and lower surfaces of the first piezoelectric ceramic plate are respectively provided with an upper electrode and a lower electrode correspondingly in a matched manner, and each upper electrode and each lower electrode are respectively used for being connected with a corresponding external driving circuit through an electrode lead wire so as to respectively drive the second actuating region, the first telescopic region, the second telescopic region and the second piezoelectric ceramic plate of the first piezoelectric ceramic plate to stretch along the front-rear direction.

11. The optical fiber scanner of claim 7, wherein the optical fiber is fixedly arranged at a center position in a left-right direction of the first actuating region, and the through hole is arranged at a center position in a vertical direction of an entirety formed by the second actuating region of the first piezoelectric ceramic plate and the second piezoelectric ceramic plate.

12. The optical fiber scanner according to claim 9 or 10, wherein the first upper electrode is disposed on the upper surface of the first expansion region of the first piezoelectric ceramic plate, the first lower electrode is disposed on the lower surface of the first expansion region of the first piezoelectric ceramic plate, the second upper electrode is disposed on the upper surface of the second expansion region of the first piezoelectric ceramic plate, the second lower electrode is disposed on the lower surface of the second expansion region of the first piezoelectric ceramic plate, the third upper electrode is disposed on the upper surface of the second actuation region of the first piezoelectric ceramic plate, the third lower electrode is disposed on the lower surface of the second actuation region of the first piezoelectric ceramic plate, and the fourth upper electrode is disposed on the upper surface of the second piezoelectric ceramic plate, and the fourth lower electrode is disposed on the lower surface of the second piezoelectric ceramic plate.

13. The optical fiber scanner of claim 12, wherein the first telescoping region and the second telescoping region of the first piezoceramic wafer have a common upper electrode or lower electrode that covers both the first telescoping region and the second telescoping region.

14. The optical fiber scanner of claim 12, wherein the first telescoping region and the second telescoping region of the first piezoelectric ceramic plate are oppositely polarized, the first telescoping region and the second telescoping region having a common upper electrode and lower electrode.

15. The optical fiber scanner of claim 12, wherein the second actuation area of the first piezoceramic wafer and the second piezoceramic wafer have a common intermediate electrode;

the second actuating area of the first piezoelectric ceramic plate and the polarization direction of the second piezoelectric ceramic plate are the same, and the second actuating area and the two remaining electrodes of the second piezoelectric ceramic plate share one electrode lead.

16. The optical fiber scanner according to claim 12, wherein a dielectric layer is disposed between the first piezoelectric ceramic plate and the second piezoelectric ceramic plate; the dielectric layer is a conductive dielectric layer or an insulating dielectric layer.

17. The optical fiber scanner of claim 16, wherein the dielectric layer is a conductive dielectric layer that is a common electrode for the second actuation region of the first piezoelectric ceramic tile and the second piezoelectric ceramic tile.