CN102569637B - Piezoelectric drive and piezoelectric motor - Google Patents
Piezoelectric drive and piezoelectric motor Download PDFInfo
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- CN102569637B CN102569637B CN201210014777.4A CN201210014777A CN102569637B CN 102569637 B CN102569637 B CN 102569637B CN 201210014777 A CN201210014777 A CN 201210014777A CN 102569637 B CN102569637 B CN 102569637B
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Abstract
The invention provides a piezoelectric drive and a piezoelectric motor. The piezoelectric drive comprises a piezoelectric body, wherein the piezoelectric body has a square plate structure, and is polarized along the thickness direction; a first electrode layer is arranged on a first end main plane in the thickness direction of the piezoelectric body, a second electrode layer is arranged on a second end main plane in the thickness direction of the piezoelectric body; and the first electrode layer comprises a plurality of electrode areas which are electrically isolated with one another, so that under the action of a preset driving voltage applied to each electrode layer, the piezoelectric drive is excited to generate two mutually orthogonal first-order bending vibrations at the same time, and the two mutually orthogonal first-order bending vibrations are synthesized with each other to generate elliptical orbit movements. The piezoelectric drive is simple in structure and convenient to manufacture, and can work in a first-order bending vibration mode under the preset driving voltage, so that the driving circuit power consumption can be effectively reduced.
Description
Technical field
The present invention relates to piezo-electric motor technology, relate in particular to a kind of piezoelectric actuator and piezo-electric motor.
Background technology
Piezo-electric motor is inverse piezoelectric effect and the elastomeric ultrasonic vibration that utilizes piezoelectric element, by the rubbing action between stator and movable body (mover), elastomeric micro breadth oscillation is converted to the rectilinear motion of movable body macroscopic view, directly promote load, and piezo-electric motor has the advantages such as compact conformation, volume be little, be widely applied.Wherein, piezo-electric motor mainly comprises piezoelectric actuator and slide assemblies, and piezoelectric actuator is stator, slide assemblies is mover, by drive circuit, for piezoelectric actuator provides driving voltage, just can make piezoelectric actuator produce certain motion, and then promote slide assemblies motion.
At present, Linear piezoelectric motor generally adopts the work of piezoelectricity L1-B2 Dual vibration modes principle, during piezo-electric motor work, piezoelectric actuator is operated in the first rank compressional vibration pattern (L1) and second-order beam mode (B2), by the first rank compressional vibration and the synthetic elliptical orbit that produces of second-order flexural vibrations producing, move, thereby by elliptical orbit, moved and promoted slide assemblies and do rectilinear motion, can be widely used in accurate straight line location, superminiature camera lens is accurate to be driven etc.But, there is following problem in the Linear piezoelectric motor of existing employing piezoelectricity L1-B2 Dual vibration modes principle: (1) keeps working in the first rank compressional vibration pattern and second-order beam mode for guaranteeing piezoelectric actuator, piezoelectric actuator will have specific length-width ratio and size, make the complex structure of piezoelectric actuator, and piezoelectric actuator physical dimension control precision requires high, cause piezoelectric actuator complex manufacturing technology, be unfavorable for the extensive making of piezoelectric actuator, increased the cost of manufacture of piezoelectric actuator; (2) when piezoelectric actuator is operated in the first rank compressional vibration pattern and second-order beam mode, the resonance frequency of two kinds of mode of operations may be disturbed asynchronous because of extraneous factor, thereby the synthetic elliptical orbit motion that causes piezoelectricity to produce is disorderly, makes to drive and loses efficacy; (3) when piezoelectric actuator microminiaturization is during to mm size, the L1 pattern of piezoelectric actuator because being operated in, its resonance frequency is often too high, and this can increase the power consumption of drive circuit, and brings certain difficulty for the making of drive circuit.
To sum up, existing piezo-electric motor adopts and is operated in the Piezoelectric Driving motor of the first rank compressional vibration pattern and second-order beam mode, and piezoelectric actuator complex structure is made required precision high, make piezoelectric actuator complex manufacturing technology, be unfavorable for the extensive making of piezo-electric motor; Meanwhile, when piezoelectric actuator works in the first rank compressional vibration pattern, resonance frequency is too high, causes drive circuit power consumption large, and drive circuit is made difficulty; In addition, piezoelectric actuator works in two kinds of patterns, is easily subject to external interference and causes and drive to lose efficacy.
Summary of the invention
The invention provides a kind of piezoelectric actuator and piezo-electric motor, the piezoelectric actuator that can effectively overcome two kinds of mode of operations of existing employing exists complex manufacturing technology, power consumption to be subject to greatly and easily the problem of external interference, piezoelectric actuator is simple in structure, easy to make, and can work in the first rank beam mode.
The invention provides a kind of piezoelectric actuator, comprising:
Piezoelectricity body, described piezoelectricity body is square plate structure, described piezoelectricity body through-thickness polarization;
The first end primary flat of described piezoelectricity body on thickness direction is provided with the first electrode layer, and the second end primary flat of described piezoelectricity body on thickness direction is provided with the second electrode lay;
Described the first electrode layer comprises a plurality of electrode zones that electricity isolation arranges, make to be applied under the default driving voltage effect of each electrode layer, described piezoelectric actuator excites simultaneously and produces two mutually orthogonal first-order bending vibrations, and the synthetic elliptical orbit that produces of described two mutually orthogonal first-order bending vibrations moves.
The invention provides a kind of piezo-electric motor, comprise piezoelectric actuator and slide assemblies, the piezoelectric actuator of described piezoelectric actuator for adopting the invention described above to provide;
Described slide assemblies comprises: guide rail, and the slide unit that slides and arrange along described guide rail;
On described piezoelectric actuator, be provided with friction head and elastic compression parts, under the thrust effect that described friction head provides at described elastic compression parts with described slide unit Elastic Contact;
Described friction head is installed on the piezoelectricity body of described piezoelectric actuator and does not arrange on the side of electrode layer.
Piezoelectric actuator provided by the invention and piezo-electric motor, by adopting the piezoelectricity body of square plate structure, and through-thickness this piezoelectricity body that polarizes, piezoelectric actuator simple in structure, easy to make, can realize the large-scale production of piezoelectric actuator; By a plurality of electrode zones being set in piezoelectricity body end, make piezoelectric actuator under default driving voltage drives, to excite and to produce two mutually orthogonal first-order bending vibrations, can effectively reduce the operating frequency of piezoelectric actuator, reduce drive circuit manufacture difficulty and power consumption, and piezoelectric actuator only works in the first rank beam mode, the external interference existing in the time of can avoiding working in two kinds of patterns and the piezoelectric actuator that causes drives Problem of Failure.
Accompanying drawing explanation
Fig. 1 is the structural representation of piezo-electric motor provided by the invention;
The structural representation of the piezoelectric actuator that Fig. 2 A provides for the embodiment of the present invention one;
Fig. 2 B is the mode of motion schematic diagram of piezoelectricity body while only having the first region territory and third electrode region to apply voltage in Fig. 2 A;
Fig. 2 C is the mode of motion schematic diagram of piezoelectricity body while only having the second electrode region and the 4th electrode zone to apply voltage in Fig. 2 A;
Fig. 2 D is the resultant motion track schematic diagram that in the embodiment of the present invention, piezoelectricity body produces at friction head place;
The structural representation of the piezoelectric actuator that Fig. 3 provides for the embodiment of the present invention two;
The structural representation of the piezoelectric actuator that Fig. 4 provides for the embodiment of the present invention three;
The structural representation of the piezoelectric actuator that Fig. 5 provides for the embodiment of the present invention four;
The structural representation of the piezoelectric actuator that Fig. 6 provides for the embodiment of the present invention five;
The structural representation of the piezoelectric actuator that Fig. 7 provides for the embodiment of the present invention six;
The structural representation of the piezoelectric actuator that Fig. 8 provides for the embodiment of the present invention seven.
Embodiment
In view of tradition adopts in the piezo-electric motor of piezoelectricity L1-B2 Dual vibration modes, there is structure and complex manufacturing technology in piezoelectric actuator, the large-scale production cost of piezoelectric actuator is higher, the invention provides a kind of piezoelectric actuator, can make piezoelectric actuator work in the single mode of operation of first-order bending vibration, can effectively simplify the structure of piezoelectric actuator.Single mode of operation and very simple square structure, can effectively reduce the manufacturing cost of piezoelectric actuator; Simultaneously also can simplified driving circuit design, and can avoid working in two kinds of patterns time because there is driving the problem losing efficacy in external interference.
Particularly, piezoelectric actuator provided by the invention can comprise piezoelectricity body, and this piezoelectricity body is square plate structure, and the polarization of piezoelectricity body through-thickness; The first end primary flat of this piezoelectricity body on thickness direction is provided with the first electrode layer, piezoelectricity body is provided with the second electrode lay at the second end primary flat of thickness direction, and the first electrode layer is divided into a plurality of electrode zones that electricity isolation arranges, make to be applied under the default driving voltage effect of each electrode layer, this piezoelectric actuator can excite simultaneously and produce two mutually orthogonal first-order bending vibrations, and these two mutually orthogonal first-order bending vibrations are synthetic can produce elliptical orbit motion.Piezoelectric actuator provided by the invention adopts the piezoelectricity body of square plate structure, piezoelectric actuator is simple in structure, easy to make, by the primary flat at piezoelectricity body, a plurality of electrode zones are set simultaneously, piezoelectric actuator can be worked under the first rank beam mode under default driving voltage, avoid conventional piezoelectric driver because operating frequency is excessive, to cause drive circuit to make difficulty and the larger problem of power consumption.
Fig. 1 is the structural representation of piezo-electric motor provided by the invention.As shown in Figure 1, piezo-electric motor provided by the invention comprises piezoelectric actuator 10 and slide assemblies, and slide assemblies comprises slide unit 201 and guide rail 202, and this slide unit 201 can slide along guide rail 202, this guide rail 202 is line slideway, makes the slide unit 201 can be along guide rail 202 moving linearlies; On this piezoelectric actuator 10, be provided with friction head 30 and elastic compression parts 40, under the thrust F effect that this friction head 30 can provide at elastic compression parts 40, with slide unit 201 Elastic Contact; Friction head 30 is installed on the side that electrode layer is not set on piezoelectric actuator 10, when piezoelectric actuator 10 produces elliptical orbit motion, friction head 30 can be done elliptical orbit motion with piezoelectric actuator 10, thereby can rely on the CONTACT WITH FRICTION between friction head 30 and slide unit 201, drive slide unit 201 to do rectilinear motion along guide rail 202.
In piezo-electric motor provided by the invention, that described friction head 30 can be is spherical, hemisphere, cylindrical or other shapes, and made by high-abrasive material, in the present embodiment, friction head 30 is cylindrical, and together with this friction head 30 can be bonded and fixed at piezoelectric actuator 10 by epoxy resin; Described elastic compression parts 40 can be spring, and pretightning force that can be suitable is pressed in piezoelectric actuator 10 and friction head 30 on slide unit 201.
In piezo-electric motor provided by the invention, can comprise the drive circuit 50 being connected with each electrode on piezoelectric actuator, can be piezoelectric actuator provides and produces the elliptical orbit required default driving voltage that moves.
By take the concrete structure of piezoelectric actuator, be example below, technical solution of the present invention is described in detail.
The structural representation of the piezoelectric actuator that Fig. 2 A provides for the embodiment of the present invention one.The piezoelectric actuator that the present embodiment provides can be used as the driver in piezo-electric motor shown in above-mentioned Fig. 1, can produce the elliptical orbit motion that drives slide unit motion, particularly, as shown in Figure 2 A, the present embodiment piezoelectric actuator comprises: piezoelectricity body 1, this piezoelectricity body 1 through-thickness polarization, and the polarised direction of whole piezoelectricity body is consistent, polarised direction A direction as shown in Figure 1; The first end primary flat of piezoelectricity body 1, the front end face of piezoelectricity body 1 as shown in Figure 1, is provided with the first electrode layer 21, the second end primary flat of piezoelectricity body 1, the rear end face of piezoelectricity body 1 as shown in Figure 1, is provided with the second electrode lay 22; The first electrode layer 21 comprises 4 electrode zones, be respectively the first region territory 211, the second electrode region 212, third electrode region 213 and the 4th electrode zone 214, and two relative electrode zones are symmetrical arranged along the symmetrical center line parallel with the limit of first end primary flat, be that the first region territory 211 and third electrode region 213 are symmetrical arranged, the second electrode region 212 and the 4th electrode zone 214 are symmetrical arranged; The second electrode lay 22 is integrated the electrode zone of shape, and the first the second electrode lay 22 electrodes are structure as a whole.
In the present embodiment, as shown in Figure 2 A, each electrode zone on the first electrode layer 21 can connect the input voltage that in piezo-electric motor, drive circuit provides, the second electrode lay 22 can be used as voltage and holds, by apply default driving voltage on the first electrode layer 21 and the second electrode lay 22, just can excite two mutually orthogonal first-order bending vibrations of piezoelectricity body 1 whole generation, make piezoelectric actuator integral body can under these two first-order bending vibrations are synthetic, produce elliptical orbit motion.
In the present embodiment, in the driving voltage that drive circuit on piezo-electric motor provides, can comprise four input voltages, be applied to respectively each electrode zone on the first electrode layer 21, particularly, as shown in Figure 2 A, the first region territory 211 on the first electrode layer 21, the second electrode region 212, third electrode region 213 and the 4th electrode zone 214 are connected with respectively input driving voltage+Vsin ω t ,-Vcos ω t ,-Vsin ω t ,+Vcos ω t; The second electrode lay 22 ground connection, like this, be applied on the first region territory 211 and third electrode region 213+Vsin ω t and-Vsin ω t effect under, piezoelectricity body 1 can produce first-order bending vibration in Y-direction as shown in Figure 2 A.Similarly, be applied on the second electrode region 212 and the 4th electrode zone 214-Vcos ω t and+Vcos ω t effect under, piezoelectricity body 1 can produce first-order bending vibration at directions X as shown in Figure 2 A, like this, piezoelectricity body 1 integral body will be under two mutually orthogonal first-order bending vibration synthesis, generation elliptical orbit motion, wherein said directions X and Y-direction be exactly with the first electrode layer both direction in the plane.
Fig. 2 B is the mode of motion schematic diagram of piezoelectricity body while only having the first region territory and third electrode region to apply voltage in Fig. 2 A; Fig. 2 C is the mode of motion schematic diagram of piezoelectricity body while only having the second electrode region and the 4th electrode zone to apply voltage in Fig. 2 A; Fig. 2 D is the resultant motion track schematic diagram that in the embodiment of the present invention, piezoelectricity body produces at friction head place.As shown in Figure 2 A and 2B, when alternating voltage Vsin ω t and-Vsin ω t is while being applied to respectively the first region territory 211 and third electrode region 213, part corresponding with the first region territory 211 on piezoelectricity body 1 through-thickness can shorten along directions X, the part corresponding with third electrode region 213 can be extended along directions X, and its result will make in a Y-direction of piezoelectricity body 1 whole generation crooked; Because a pair of voltage applying is alternation, this just forces piezoelectricity body 1 to produce Y along the first-order bending vibration of direction; Similarly, as shown in Fig. 2 A and Fig. 2 C, when alternating voltage Vcos ω t and-Vcos ω t is while being applied to respectively the second electrode region 212 and the 4th electrode zone 214, part corresponding with the 4th electrode zone 214 on piezoelectricity body 1 through-thickness can shorten along Y-direction, the part corresponding with the second electrode region 212 can be extended along Y-direction, and its result will make the whole first-order bending vibration producing on a directions X of piezoelectricity body 1.Can see, when alternating voltage ± Vsin ω t and ± Vcos ω t is while being applied to each electrode zone on the first electrode layer 21 simultaneously, piezoelectricity body 1 will excite the first-order bending vibration of two quadratures simultaneously in directions X and Y-direction, synthesizing of they just produced an elliptical orbit motion, as shown in Figure 2 D.
In the present embodiment, because the polarised direction of piezoelectricity body 1 integral body is identical, for making on piezoelectricity body 1, the part that two symmetrical electrode zones are corresponding produces flexural vibrations, only need to apply at symmetrical electrode zone two alternating voltages of opposite direction; Meanwhile, in order to make, piezoelectricity body 1 is whole produces two mutually orthogonal first-order bending vibrations, and the alternating voltage that two adjacent electrode zones apply should be quadrature voltage.
It will be understood by those skilled in the art that the amplitude of above-mentioned each input voltage, the size of voltage V, can set suitable value as required, to guarantee piezoelectric actuator when work, can drive the slide unit motion on piezo-electric motor; Simultaneously, for can being excited simultaneously, piezoelectric actuator produces two mutually orthogonal first-order bending vibrations, drive circuit in piezo-electric motor should be the driving voltage that piezoelectric actuator provides two-way or two pairs of quadratures, Mei road or every pair of driving voltage effect lower piezoelectric driver all can produce first-order bending vibration, two first-order bending vibration quadratures that produce under Qie Mei road or every pair of driving voltage.
In the present embodiment, piezoelectricity body 1 be shaped as square, can be to be laminated by a plurality of piezoelectric patches, wherein, the material of piezoelectricity body 1 can be piezoceramic material or monocrystalline piezoelectric material, or the material of this piezoelectricity body 1 can be piezoceramic material or monocrystalline piezoelectric material; The structure of piezoelectricity body 1 can be also the composite plate structure that elastic sheet metal and piezoelectric ceramic or piezoelectric crystal plate form.In the present embodiment, the piezoelectric ceramic plate that piezoelectricity body 1 is made for piezoceramic material.
In the present embodiment, as shown in Figure 2 A, the first region territory 211 on the first electrode layer 21, the second electrode region 212, third electrode region 213 and the 4th electrode zone 214 are trapezoid area structure, and the center of these 4 electrode zones also can be provided with central electrode region 215, this central electrode region 215 be shaped as square, and with other electrode zone electricity isolation.It will be understood by those skilled in the art that this part also can be white space, does not have the region of electrode.In practical application, for ease of the making of each electrode zone, can be first at the whole surface-coated electrode layer of piezoelectricity body 1 first end primary flat, and obtain each electrode zone by the mode of etching; Also can, by the method for screen printing electrode, once prepare all electrode patterns.
In summary it can be seen, the piezoelectric actuator that the embodiment of the present invention provides, by adopting the piezoelectricity body of square plate structure, and through-thickness this piezoelectricity body that polarizes, piezoelectric actuator simple in structure, easy to make, can realize the large-scale production of piezoelectric actuator; By a plurality of electrode zones being set in piezoelectricity body end, make piezoelectric actuator under default driving voltage drives, to excite and to produce two mutually orthogonal first-order bending vibrations, can effectively reduce the operating frequency of piezoelectric actuator, reduce drive circuit manufacture difficulty and power consumption, and piezoelectric actuator only works in the first rank beam mode, the external interference existing in the time of can avoiding working in two kinds of patterns and the piezoelectric actuator that causes drives Problem of Failure.
The structural representation of the piezoelectric actuator that Fig. 3 provides for the embodiment of the present invention two.Different from above-mentioned Fig. 2 A illustrated embodiment technical scheme is, as shown in Figure 3, in the present embodiment, on piezoelectricity body 1 through-thickness, the polarised direction of 2 relative electrode zone corresponding parts is contrary, the polarised direction that is the first region territory 211 and third electrode region 213 corresponding parts is contrary, direction B1 as shown in Figure 3 and direction B2, same, the polarised direction of the second electrode region 212 and the 4th electrode zone 214 corresponding parts is contrary (not shown) also.
In the present embodiment, the polarised direction of symmetrically arranged two electrode zones corresponding part on piezoelectricity body is contrary, for making piezoelectricity body 1 can produce first-order bending vibration, symmetrically arranged two electrode zones can apply identical input voltage, particularly, as shown in Figure 3, the first region territory 211 can be connected alternating voltage Vsin ω t with third electrode region 213 simultaneously, the second electrode region 212 is connected alternating voltage Vcos ω t with the 4th electrode zone 214 simultaneously, the second electrode lay 22 is ground connection still, under the alternating voltage Vsin ω t effect applying, piezoelectricity body 1 can produce first-order bending vibration as shown in Figure 2 B, under the alternating voltage Vcos ω t effect applying, piezoelectricity body 1 can produce first-order bending vibration as shown in Figure 2 C, like this, under two alternating voltage Vsin ω t that apply and Vcos ω t effect, piezoelectricity body 1 just can produce two mutually orthogonal first-order bending vibrations simultaneously, and move by the synthetic elliptical orbit that produces of two mutually orthogonal first-order bending vibrations.
In the present embodiment, drive circuit in piezo-electric motor can be symmetrically arranged two electrode zones identical alternating voltage is provided, and the alternating voltage that two adjacent electrode zones apply should be quadrature voltage, so that piezoelectricity body produces two mutually orthogonal first-order bending vibrations under two alternating voltage effects.
The structural representation of the piezoelectric actuator that Fig. 4 provides for the embodiment of the present invention three.Different from above-mentioned Fig. 2 A illustrated embodiment technical scheme is, as shown in Figure 4, in the present embodiment, 4 electrode zones that arrange on the first electrode layer 21 are arc, in practical application, can be at the first end primary flat of piezoelectricity body 1 electrode coated layer, and by etching, be divided into the arc areas of 4 electricity isolation; Or directly by the method for screen printing electrode, once prepare all electrode zones.
In the present embodiment, on piezoelectricity body 1, can apply and identical as shown in Figure 2 A driving voltage, make the first region territory 211, the second electrode region 212, third electrode region 213 and the 4th electrode zone 214 on the first electrode layer 21 of piezoelectricity body 1, can be under the driving voltage effect applying, excite and produce two mutually orthogonal first-order bending vibrations, and under two mutually orthogonal first-order bending vibration synthesis, the whole elliptical orbit that produces moves.
The structural representation of the piezoelectric actuator that Fig. 5 provides for the embodiment of the present invention four.Different from above-mentioned Fig. 2 A illustrated embodiment technical scheme, as shown in Figure 5, in the present embodiment, 4 electrode zones that arrange on the first electrode layer 21 are rectangular area.In practical application, can be at the first end primary flat of piezoelectricity body 1 electrode coated layer, and by etching, be divided into the rectangular areas of 4 electricity isolation; Or directly by the method for screen printing electrode, once prepare all electrode zones.
In the present embodiment, on piezoelectricity body 1, can apply and identical as shown in Figure 2 A driving voltage, make the first region territory 211, the second electrode region 212, third electrode region 213 and the 4th electrode zone 214 on the first electrode layer 21 of piezoelectricity body 1, can be under the driving voltage effect applying, excite and produce two mutually orthogonal first-order bending vibrations, and under two mutually orthogonal first-order bending vibration synthesis, the whole elliptical orbit that produces moves.
The structural representation of the piezoelectric actuator that Fig. 6 provides for the embodiment of the present invention five.Different from above-mentioned Fig. 2 A illustrated embodiment technical scheme is, as shown in Figure 6, in the present embodiment, 4 electrode zones that arrange on the first electrode layer 21 are delta-shaped region, in practical application, can be at the first end primary flat of piezoelectricity body 1 electrode coated layer, and by cutting apart and obtain by cross one another two diagonal on the first end primary flat at piezoelectricity body 1.
In the present embodiment, on piezoelectricity body 1, can apply and identical as shown in Figure 2 A driving voltage, make the first region territory 211, the second electrode region 212, third electrode region 213 and the 4th electrode zone 214 on the first electrode layer 21 of piezoelectricity body 1, can be under the driving voltage effect applying, excite and produce two mutually orthogonal first-order bending vibrations, and under two mutually orthogonal first-order bending vibration synthesis, the whole elliptical orbit that produces moves.
It will be understood by those skilled in the art that 4 electrode zones that arrange on above-mentioned the first electrode layer are overseas except being rectangular area, trapezoid area, arc area and delta, also can be other shapes, at this and be not particularly limited.
The structural representation of the piezoelectric actuator that Fig. 7 provides for the embodiment of the present invention six.Different from above-mentioned Fig. 2 A illustrated embodiment technical scheme, in the present embodiment, the second electrode lay is identical with the first electrode layer, also has 4 electrode zones.Particularly, as shown in Figure 7, wherein a represents the overall schematic of piezoelectricity body 1, b represents that the electrode layer of piezoelectricity body 1 rear and front end face is the schematic diagram of the first electrode layer 21 and the second electrode lay 22, the first electrode layer 21 and the second electrode lay 22 have identical structure, be that the second electrode lay 22 also has 4 electrode zones, be respectively the 5th electrode zone 221, the 6th electrode zone 222, the 7th electrode zone 223 and the 8th electrode zone 224.
In the present embodiment, third electrode region 213, the 4th electrode zone 214, the 5th electrode zone 221 and the 6th electrode zone 222 can be electrically connected, and as grounding electrode, the first region territory 211, the 7th electrode zone 223 are electrically connected, meet input voltage Vsin ω t, the second electrode region 212 and the 8th electrode zone 224 are electrically connected, meet input voltage Vcos ω t.Like this, when only having input voltage Vsin ω t, piezoelectricity body 1 can produce first-order bending vibration as shown in Figure 2 B, when only having input voltage or Vcos ω t, piezoelectricity body 1 can produce first-order bending vibration as shown in Figure 2 C, therefore, two input voltage Vsin ω t that apply and or Vcos ω t effect under, piezoelectricity body 1 is whole just can produce two mutually orthogonal first-order bending vibrations, and under two mutually orthogonal first-order bending vibration synthesis, produces elliptical orbit motion.
In the present embodiment, on the first electrode layer 21, be positioned at the central electrode region 215 of each electrode zone center, and the second central electrode region 225 that is positioned at each electrode zone center on the second electrode lay 22 can be used as Voltage Feedback electrode.
The structural representation of the piezoelectric actuator that Fig. 8 provides for the embodiment of the present invention seven.Different from above-mentioned Fig. 2 A illustrated embodiment technical scheme, as shown in Figure 8, in the present embodiment, piezoelectric actuator can comprise the piezoelectricity body 1 of a plurality of stacked settings, and the electrode layer between each piezoelectricity body 1 on circuit for being connected in parallel.Like this, under identical predeterminated voltage drives, each piezoelectricity body 1 all can produce by two mutually orthogonal synthetic elliptical orbits of first-order bending vibration and move, and whole piezoelectric actuator just can produce needed elliptical orbit by the plurality of piezoelectricity body 1 and move.Wherein, the c in Fig. 8 represents the overall structure schematic diagram of piezoelectric actuator, and d represents piezoelectric actuator package assembly schematic diagram.
In the present embodiment, as shown in Figure 8, comprise 4 stacked piezoelectricity bodies, on each piezoelectricity body, can there is identical electrode layer, specifically can be identical with above-mentioned Fig. 2 A, and the electrode layer of correspondingly-shaped is involutory is set together, as the first piezoelectricity body 10 and the second piezoelectricity body 20 wherein, have the involutory setting of end face of 4 electrode zones, tertiary voltage body 30 and the 4th voltage body 40 also have identical set-up mode.It will be appreciated by those skilled in the art that, in the present embodiment, the structure of piezoelectricity body upper electrode layer also can be identical with Fig. 3-Fig. 6, the driving voltage of the driver of its formation can be with reference to the driving voltage of single piezoelectricity body in above-mentioned Fig. 3-Fig. 6, as long as can make whole driver produce elliptical orbit motion.
In the present embodiment, utilize multi-layer piezoelectric body structure can obtain following effect: (1), in the constant situation of thickness of each lamination electricity body, can improve the input power of piezoelectric actuator, thereby obtains larger actuating force; (2) in the constant situation of piezoelectric actuator gross thickness, sandwich construction can effectively reduce the operating voltage of piezoelectric actuator.
Each piezoelectric actuator that above-mentioned Fig. 2 A-Fig. 8 provides can be applicable in piezo-electric motor as shown in Figure 1, can under the default driving voltage that drive circuit provides in piezo-electric motor, work, produce two mutually orthogonal first-order bending vibrations, and under two mutually orthogonal first-order bending vibrations are synthetic, the whole elliptical orbit motion that produces the motion of driving slide unit.
Finally it should be noted that: each embodiment, only in order to technical scheme of the present invention to be described, is not intended to limit above; Although the present invention is had been described in detail with reference to aforementioned each embodiment, those of ordinary skill in the art is to be understood that: its technical scheme that still can record aforementioned each embodiment is modified, or some or all of technical characterictic is wherein equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution depart from the scope of various embodiments of the present invention technical scheme.
Claims (9)
1. a piezoelectric actuator, is characterized in that, comprising:
Piezoelectricity body, described piezoelectricity body is square plate structure, described piezoelectricity body through-thickness polarization;
The first end primary flat of described piezoelectricity body on thickness direction is provided with the first electrode layer, and the second end primary flat of described piezoelectricity body on thickness direction is provided with the second electrode lay;
Described the first electrode layer comprises a plurality of electrode zones that electricity isolation arranges, make to be applied under the default driving voltage effect of each electrode layer, described piezoelectric actuator excites simultaneously and produces two mutually orthogonal first-order bending vibrations, and the synthetic elliptical orbit that produces of described two mutually orthogonal first-order bending vibrations moves;
Described the first electrode layer comprises 4 electrode zones, relative and non-conterminous 2 electrode zones are symmetrical arranged along the symmetrical center line parallel with the limit of described first end primary flat, at symmetrical electrode zone, apply two alternating voltages of opposite direction, the alternating voltage that two adjacent electrode zones apply should be quadrature voltage.
2. piezoelectric actuator according to claim 1, is characterized in that, described piezoelectricity body integral body has identical polarised direction;
Or on described piezoelectricity body through-thickness, the polarised direction of relative pair of electrodes region corresponding part is contrary.
3. piezoelectric actuator according to claim 1, is characterized in that, also comprises the central electrode region of the center that is positioned at described 4 electrode zones, described central electrode region and other 4 electrode zone electricity isolation.
4. piezoelectric actuator according to claim 1, is characterized in that, described 4 electrode zones are rectangular area; Or described 4 electrode zones are arc area; Or described 4 electrode zones are trapezoid area; Or described 4 electrode zones are delta-shaped region.
5. piezoelectric actuator according to claim 1, is characterized in that, described piezoelectric actuator comprises the piezoelectricity body of a plurality of stacked settings;
Between each piezoelectricity body, be also provided with electrode layer, and be connected in parallel on circuit.
6. according to the arbitrary described piezoelectric actuator of claim 1-5, it is characterized in that, described the second electrode lay is integrated the electrode zone of shape; Or described the second electrode lay has identical structure with the first electrode layer.
7. piezoelectric actuator according to claim 1, is characterized in that, the material of described piezoelectricity body is piezoceramic material or monocrystalline piezoelectric material; Or, the described piezoelectricity body composite plate that to be elastic sheet metal form with piezoelectric ceramic piece or piezoelectric monocrystal sheet.
8. a piezo-electric motor, is characterized in that, comprises piezoelectric actuator and slide assemblies, and described piezoelectric actuator is for adopting the arbitrary described piezoelectric actuator of claim 1-7;
Described slide assemblies comprises: guide rail, and the slide unit that slides and arrange along described guide rail;
On described piezoelectric actuator, be provided with friction head and elastic compression parts, under the thrust effect that described friction head provides at described elastic compression parts with described slide unit Elastic Contact;
Described friction head is installed on the piezoelectricity body of described piezoelectric actuator and does not arrange on the side of electrode layer.
9. piezo-electric motor according to claim 8, is characterized in that, also comprises drive circuit, is used to each electrode layer on described piezoelectric actuator that default driving voltage is provided.
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| JP2017184297A (en) * | 2016-03-28 | 2017-10-05 | セイコーエプソン株式会社 | Piezoelectric actuator, piezoelectric motor, robot, hand and pump |
| CN111262471B (en) * | 2020-02-17 | 2022-02-11 | 北京大学 | Annular piezoelectric driver and piezoelectric motor |
| CN112290826B (en) * | 2020-10-09 | 2024-02-09 | 中国科学技术大学 | X-electrode split cross multidimensional piezoelectric motor and scanning probe microscope |
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| CN102185096A (en) * | 2011-04-02 | 2011-09-14 | 北京大学 | Piezoelectric actuator and linear piezoelectric motor |
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| CN102075112A (en) * | 2011-01-28 | 2011-05-25 | 南京航空航天大学 | Shearing effect-based straight-line supersonic motor |
| CN102118118A (en) * | 2011-03-18 | 2011-07-06 | 广东嘉和微特电机股份有限公司 | Linear type ultrasonic micromotor |
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