CN219417871U - Scanning actuator and optical fiber scanner - Google Patents
Scanning actuator and optical fiber scanner Download PDFInfo
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- CN219417871U CN219417871U CN202223207628.8U CN202223207628U CN219417871U CN 219417871 U CN219417871 U CN 219417871U CN 202223207628 U CN202223207628 U CN 202223207628U CN 219417871 U CN219417871 U CN 219417871U
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Abstract
The utility model discloses a scanning actuator, which comprises a piezoelectric bimorph and an adhesive part, wherein the plane of the piezoelectric bimorph is used as a horizontal plane, the fixed end of the piezoelectric bimorph is used as a rear end, the front end of the piezoelectric bimorph is used as a free end, the adhesive part is arranged on the left side or the right side of the piezoelectric bimorph, and one sides of two piezoelectric ceramic plates of the piezoelectric bimorph are fixedly connected into a whole by the adhesive part. An optical fiber scanner employing the scanning actuator is also disclosed. The two piezoelectric ceramic plates of the piezoelectric bimorph simultaneously have synchronous equal-length telescopic motion components and synchronous reverse telescopic motion components, and the free end of the piezoelectric bimorph is driven to vibrate in the horizontal direction and the vertical direction simultaneously. Two-dimensional scanning is realized through the bimorph; the scanning actuator is composed of a piezoelectric bimorph and an adhesive part, an additional correction structure is not required to be arranged, the components are convenient to manufacture and process, and consistency of product specifications, performances and parameters is easy to ensure in mass production.
Description
Technical Field
The present utility model relates to the field of optical fiber scanning display devices, and in particular, to a scanning actuator and an optical fiber scanner.
Background
The optical fiber scanner is a display technology for emitting a pattern by controlling the swing of an optical fiber by using a scanning actuator, and the technology irradiates the pattern with sharp saturation, high contrast, high brightness and very small structural volume, and is mainly used in the optical Fiber Scanning Display (FSD) technology and the optical Fiber Scanning Endoscope (FSE) technology.
The actuator of the grid type optical fiber scanner mainly comprises a second actuating part serving as a fast shaft and a first actuating part serving as a slow shaft, wherein two ends of the second actuating part and the first actuating part are respectively a fixed end and a free end, and the fixed end of the second actuating part is fixedly connected with the free end of the first actuating part. In order to obtain a stable scanning range and accurately control the scanning track, the scanning track at the tail end of the actuator needs to have accurate consistency with the scanning track of the first actuating part and the scanning track of the second actuating part, and the machining error of any actuating part can make the vibration of the actuator difficult to control or generate a disordered vibration component. How to avoid uncontrolled or spurious vibration components is one of the important factors to improve the scanning quality.
In order to make the actuating portion in the slow axis direction meet the slow axis scanning frequency and the actuating portion in the fast axis direction meet the fast axis scanning frequency, the shape and the size of the conventional scanner actuator are correspondingly designed, which leads to the actuator being irregularly shaped.
A scanning actuator as disclosed in chinese patent CN111830702a, which is a generally tubular piezoelectric actuator, is designed to be a special-shaped structure, which is quite disadvantageous for mass production of the actuator, difficult to process, and the consistency of the process cannot be ensured, as is limited by the above factors. Another example is a scanning actuator disclosed in chinese patent CN209784655U, which is a piezoelectric actuator in a sheet shape, and is also in consideration of performance, and the actuator is also configured to have a special-shaped structure, which also has the technical problems that it is difficult to precisely process and the consistency of processing is poor.
At the same time, how to avoid the vibration coupling between the slow axis actuator and the fast axis actuator is also a technical problem to be considered. The two prior art techniques described above have no corresponding design as to how to reduce the vibrational coupling between the slow axis actuator and the fast axis actuator.
Therefore, on the premise that each actuating part meets performance parameters and vibration coupling cannot be generated, the actuator is easy to process, mass production is easy, mass production consistency is good, and the technical problem to be solved is solved.
Disclosure of Invention
The embodiment of the utility model provides a scanning actuator and an optical fiber scanner adopting the same, which are used for at least solving the technical problems that the actuator is not easy to produce in batches and has poor consistency in batch production.
In order to achieve the above object, a first aspect of the present utility model provides a scan actuator, including a piezoelectric bimorph and an adhesive member, wherein a plane where the piezoelectric bimorph is located is a horizontal plane, and a fixed end of the piezoelectric bimorph is a rear end, and then a front end of the piezoelectric bimorph is a free end, the adhesive member is disposed on a left side or a right side of the piezoelectric bimorph, and the adhesive member fixedly connects one sides of two piezoelectric ceramic sheets of the piezoelectric bimorph into a whole.
Therefore, when the two piezoelectric ceramic plates of the piezoelectric bimorph synchronously extend and retract in equal length, the two piezoelectric ceramic plates synchronously extend and retract in equal length to drive the free ends of the piezoelectric bimorph to vibrate along the horizontal direction because the bonding part fixedly connects one sides of the two piezoelectric ceramic plates of the piezoelectric bimorph into a whole; when the two piezoelectric ceramic plates of the piezoelectric bimorph synchronously and reversely stretch, the free ends of the piezoelectric bimorph are driven to vibrate in the vertical direction.
Therefore, when the two piezoelectric ceramic plates of the piezoelectric bimorph simultaneously have a synchronous equal-length telescopic motion component and a synchronous opposite-telescopic motion component, the free end of the piezoelectric bimorph is driven to vibrate in the horizontal direction and the vertical direction simultaneously.
Generally, the piezoelectric bimorph includes two piezoelectric ceramic pieces that overlap laminating about, and the upper and lower surface of every piezoelectric ceramic piece has all plated conductive film, forms two upper and lower surface electrodes respectively, and two piezoelectric ceramic pieces are fixed laminating as an organic wholely to the left side or the right side of two piezoelectric ceramic pieces are simultaneously with bonding part fixed connection. Both piezoelectric ceramic plates are polarized in the thickness direction (i.e., the vertical direction).
Optionally, the connection mode of the piezoelectric bimorph access circuit is as follows: the electrode on the upper surface and the electrode on the lower surface of the first piezoelectric ceramic plate on the upper layer in the piezoelectric bimorph are respectively connected with a first driving circuit for generating a first control signal through electrode leads, and the electrode on the upper surface and the electrode on the lower surface of the second piezoelectric ceramic plate on the lower layer in the piezoelectric bimorph are respectively connected with a second driving circuit for generating a second control signal through electrode leads.
Alternatively, the polarization directions of the two piezoelectric ceramic plates are opposite, and the connection mode of the piezoelectric bimorph access circuit is as follows: the electrode on the upper surface of the first piezoelectric ceramic plate on the upper layer in the piezoelectric bimorph is connected with the positive electrode of the first control signal through an electrode lead, the electrode on the lower surface of the second piezoelectric ceramic plate on the lower layer in the piezoelectric bimorph is connected with the positive electrode of the second control signal through an electrode lead, and the electrode on the lower surface of the first piezoelectric ceramic plate is directly connected with the electrode on the upper surface of the second piezoelectric ceramic plate and grounded.
The first piezoelectric ceramic plate simultaneously performs synchronous isometric telescopic movement and synchronous reverse telescopic movement with the second piezoelectric ceramic plate under the drive of a first drive signal; the second piezoelectric ceramic plate simultaneously performs synchronous isometric telescopic movement and synchronous reverse telescopic movement with the first piezoelectric ceramic plate under the drive of a second drive signal.
Specifically, the first control signal comprises a first group of control signals for driving the first piezoelectric ceramic plate to do synchronous equilong telescopic motion with the second piezoelectric ceramic plate and a second group of control signals for driving the first piezoelectric ceramic plate to do synchronous reverse telescopic motion with the second piezoelectric ceramic plate, wherein the first control signals are formed by overlapping the first group of control signals and the second group of control signals; the second control signals comprise a third group of control signals for driving the second piezoelectric ceramic plates to do synchronous equilong telescopic motion with the first piezoelectric ceramic plates and a fourth group of control signals for driving the second piezoelectric ceramic plates to do synchronous reversing telescopic motion with the first piezoelectric ceramic plates, and the second control signals are formed by overlapping the third group of control signals and the fourth group of control signals.
Preferably, the first control signal is composed of two sets of sinusoidal voltage signals, specifically, the first set of control signals S AX ＝VA 1 *sin(ω x *t+φ a1 ) Correspondingly, a third group of controlThe signal is S BX ＝VB 1 *sin(ω x* t+φ b1 ) The method comprises the steps of carrying out a first treatment on the surface of the Second set of control signals S AY ＝VA 2 *sin(ω y* t+φ a2 ) Correspondingly, the fourth group of control signals is S BY ＝VB 2 *sin(ω y* t+φ b2 )。
Further, the first control signal is: s is S A ＝S AX +S AY ＝VA 1 *sin(ω x* t+φ a1 )+VA 2 *sin(ω y* t+φ a2 ) The second control signal is: s is S B ＝S BX +S BY ＝VB 1 *sin(ω x* t+φ b1 )+VB 2 *sin(ω y* t+φ b2 )。
Wherein: VA (vertical alignment) 1 For the control signal S AX VA of the voltage amplitude, VA of (a) 2 For the control signal S Ay Is phi, the voltage amplitude of (a) a1 For the control signal S AX Is phi a2 For the control signal S Ay VB of (B) 1 For the control signal S BX Voltage amplitude, VB 2 For the control signal S By Is phi, the voltage amplitude of (a) b1 For the control signal S BX Is phi b2 For the control signal S By Is used to determine the initial phase of the phase. Theoretically, phi a1 And phi b1 Is 0 DEG or 180 DEG phi a1 And phi b1 Is 0 ° or 180 °; according to the polarization direction of the first piezoelectric ceramic sheet and the mode of accessing the circuit, phi is correspondingly adjusted a1 And phi b1 Difference of (d), phi a2 And phi b2 The difference of the two piezoelectric ceramic plates can realize the synchronous equal-length telescopic movement and the synchronous opposite-direction telescopic movement, and obviously, phi is selected according to the requirements and the working conditions a1 And phi b1 Difference of (d), phi a2 And phi b2 The differences of (c) are within the ordinary skill of the art. However, the problem of distortion of the scanning track is likely to occur due to the variation in the processing accuracy of the piezoelectric bimorph and the adhesion of the adhesive member. Namely, only a first group of control signals are applied to the first piezoelectric ceramic piece,In the case where only the third set of control signals is applied to the second piezoelectric ceramic wafer, the inventors found from practical operation that the scanning locus of the free end of the piezoelectric bimorph is not a straight line along the X direction but an ellipse with the major axis along the X direction, and found that the piezoelectric bimorph is formed by increasing or decreasing phi a1 And phi b The scanning track of the free end of the piezoelectric bimorph can be corrected to be a straight line along the X direction; alternatively, in the case where only the second group of control signals is applied to the first piezoelectric ceramic sheet and only the fourth group of control signals is applied to the second piezoelectric ceramic sheet, the inventors found that, in practice, the scanning locus of the free end of the piezoelectric bimorph is not a straight line along the Y direction but an ellipse with the major axis along the Y direction, and in this case, the scanning locus is obtained by increasing or decreasing Φ a2 And phi b2 The difference of the two can correct the scanning track of the free end of the piezoelectric bimorph to be a straight line along the Y direction.
When the scanner is used in the raster scanning mode, the second set of control signals and the fourth set of control signals are not sinusoidal signals, and the waveforms of the second set of control signals and the fourth set of control signals are ensured to be the same.
A second aspect of an embodiment of the present utility model provides an optical fiber scanning actuator comprising a scanning actuator as described above and an optical fiber, the light-exiting end of the optical fiber being secured to the free end of the scanning actuator in a cantilever-supported manner.
Specifically, the part of the light emitting end of the optical fiber, which exceeds the free end of the scanning actuator, forms an optical fiber cantilever, and the part of the optical fiber, which is positioned at the rear side of the optical fiber cantilever, is fixedly connected with the scanning actuator.
Optionally, the optical fiber is fixed to the piezoelectric bimorph in a cantilever supporting manner; alternatively, the optical fiber is fixed to the adhesive member in a cantilever-supported manner.
As a preferred embodiment, the bonding component is a cured adhesive, that is, the left side or the right side of the two piezoelectric ceramic plates of the piezoelectric bimorph are fixedly connected into a whole through the cured adhesive, and the optical fibers are fixedly bonded through the cured adhesive. I.e. the part of the optical fiber located at the rear side of the optical fiber cantilever is bonded by the curing glue.
One or more technical solutions in the embodiments of the present utility model at least have the following technical effects or advantages:
according to the utility model, the free ends of the piezoelectric bimorphs are driven to vibrate along the horizontal direction by synchronous equal-length expansion and contraction of the two piezoelectric ceramic plates; when the two piezoelectric ceramic plates of the piezoelectric bimorph synchronously and reversely stretch, the free end of the piezoelectric bimorph is driven to vibrate in the vertical direction.
The utility model is composed of the piezoelectric bimorph and the bonding part, the components are convenient to manufacture and process, the consistency of product specification, performance and parameters is easy to ensure in mass production, and for the optical fiber scanning imaging technology, the consistency of the actuator is good, which is one of key factors for mass production of the optical fiber scanner. Meanwhile, the sheet structure enables the characteristic frequency value difference of the actuator in the horizontal direction and the vertical direction to be large, and vibration coupling of the actuator in two vibration directions can be greatly reduced.
The utility model increases or decreases phi a1 And phi b The scanning track of the free end of the piezoelectric bimorph can be corrected to be a straight line along the X direction by increasing or decreasing phi a2 And phi b2 The difference of the two can correct the scanning track of the free end of the piezoelectric bimorph to be a straight line along the Y direction. And an additional correction structure is not required, the processing difficulty is reduced, and the method is suitable for batch production.
Drawings
FIG. 1 is a schematic diagram of a scan actuator of the present utility model;
FIG. 2 is a schematic top view of a first piezoceramic wafer of the scanning actuator of the present utility model;
FIG. 3 is a schematic diagram of an electrode layout structure of a scan actuator according to the present utility model;
FIG. 4 is a schematic diagram of the drive wiring of the scan actuator of the present utility model;
FIG. 5 is a schematic view of another embodiment of a scan actuator of the present utility model;
fig. 6 is a schematic structural diagram of an optical fiber scanner according to the present utility model.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1 and 2, a first aspect of the present utility model provides a scan actuator, which includes a piezoelectric bimorph 100 and an adhesive member 200, wherein a plane where the piezoelectric bimorph 100 is located is a horizontal plane, and a fixed end of the piezoelectric bimorph 100 is a rear end, so that a front end of the piezoelectric bimorph 100 is a free end, the adhesive member 200 is disposed on a left side or a right side of the piezoelectric bimorph 100, and the adhesive member 200 fixedly connects one sides of two piezoelectric ceramic sheets of the piezoelectric bimorph 100 into a whole.
Therefore, when the two piezoelectric ceramic plates of the piezoelectric bimorph 100 synchronously extend and retract in equal length, as the bonding part 200 fixedly connects one sides of the two piezoelectric ceramic plates 101 and 102 of the piezoelectric bimorph 100 into a whole, the free ends of the piezoelectric bimorph 100 can be driven to vibrate in the horizontal direction by the synchronous equal length extension of the two piezoelectric ceramic plates; when the two piezoelectric ceramic plates of the piezoelectric bimorph 100 are synchronously and reversely stretched, the free end of the piezoelectric bimorph 100 is driven to vibrate in the vertical direction.
Therefore, when the two piezoelectric ceramic plates of the piezoelectric bimorph 100 have both a synchronous equal-length stretching motion component and a synchronous opposite-stretching motion component, the free end of the piezoelectric bimorph 100 is driven to vibrate in the horizontal direction and the vertical direction simultaneously.
Generally, the piezoelectric bimorph 100 includes two piezoelectric ceramic plates 101 and 102 that are overlapped and attached, the upper and lower surfaces of each piezoelectric ceramic plate are plated with conductive films, and two surface electrodes 103, 104, 105 and 106 are respectively formed, the two piezoelectric ceramic plates are fixedly attached as a whole, and the left side or the right side of the two piezoelectric ceramic plates are simultaneously fixedly connected with the adhesive member 200. Both piezoelectric ceramic plates are polarized in the thickness direction (i.e., the vertical direction).
Alternatively, as shown in fig. 3, the connection manner of the piezoelectric bimorph 100 to the circuit is as follows: the electrode 103 on the upper surface and the electrode 104 on the lower surface of the first piezoelectric ceramic sheet 101 on the upper layer in the piezoelectric bimorph 100 are connected to a first driving circuit for generating a first control signal through electrode leads, respectively, and the electrode 105 on the upper surface and the electrode 105 on the lower surface of the second piezoelectric ceramic sheet 102 on the lower layer in the piezoelectric bimorph 100 are connected to a second driving circuit for generating a second control signal through electrode leads, respectively.
Alternatively, as shown in fig. 4, the polarization directions of the two piezoelectric ceramic plates are opposite, and the connection mode of the piezoelectric bimorph 100 to the circuit is as follows: the electrode 103 on the upper surface of the first piezoelectric ceramic sheet 101 on the upper layer in the piezoelectric bimorph 100 is connected to the positive electrode of the first control signal through an electrode lead, and the electrode 106 on the lower surface of the second piezoelectric ceramic sheet 102 on the lower layer in the piezoelectric bimorph 100 is connected to the positive electrode of the second control signal through an electrode lead, and the electrode 103 on the lower surface of the first piezoelectric ceramic sheet 101 and the electrode 105 on the upper surface of the second piezoelectric ceramic sheet 102 are directly connected to each other and grounded.
The first piezoelectric ceramic piece 101 simultaneously performs synchronous isometric telescopic movement and synchronous reverse telescopic movement with the second piezoelectric ceramic piece 102 under the drive of the first drive signal; the second piezoelectric ceramic piece 102 simultaneously performs a synchronous and isometric telescopic motion and a synchronous and reverse telescopic motion with the first piezoelectric ceramic piece 101 under the drive of the second drive signal.
Specifically, the first control signal includes a first set of control signals for driving the first piezoelectric ceramic plate 101 to perform synchronous isometric telescopic motion with the second piezoelectric ceramic plate 102 and a second set of control signals for driving the first piezoelectric ceramic plate 101 to perform synchronous reverse telescopic motion with the second piezoelectric ceramic plate 102, where the first control signals are signals formed by overlapping the first set of control signals and the second set of control signals; the second control signal has a third group of control signals for driving the second piezoelectric ceramic plate 102 to do synchronous equilong telescopic motion with the first piezoelectric ceramic plate 101 and a fourth group of control signals for driving the second piezoelectric ceramic plate 102 to do synchronous reversing telescopic motion with the first piezoelectric ceramic plate 101, and the second control signal is a signal formed by overlapping the third group of control signals and the fourth group of control signals.
As a preferred embodiment, the first control signal consists of two sets of sinusoidal voltage signals, in particular, the first set of control signals S AX ＝VA 1 *sin(ω x *t+φ a1 ) Correspondingly, the third group of control signals is S BX ＝VB 1 *sin(ω x* t+φ b1 ) The method comprises the steps of carrying out a first treatment on the surface of the Second set of control signals S AY ＝VA 2 *sin(ω y* t+φ a2 ) Correspondingly, the fourth group of control signals is S BY ＝VB 2 *sin(ω y* t+φ b2 )。
Further, the first control signal is: s is S A ＝S AX +S AY ＝VA 1 *sin(ω x* t+φ a1 )+VA 2 *sin(ω y* t+φ a2 ) The second control signal is: s is S B ＝S BX +S BY ＝VB 1 *sin(ω x* t+φ b1 )+VB 2 *sin(ω y* t+φ b2 )。
Wherein: VA (vertical alignment) 1 For the control signal S AX VA of the voltage amplitude, VA of (a) 2 For the control signal S Ay Is phi, the voltage amplitude of (a) a1 For the control signal S AX Is phi a2 For the control signal S Ay VB of (B) 1 For the control signal S BX Voltage amplitude, VB 2 For the control signal S By Is phi, the voltage amplitude of (a) b1 For the control signal S BX Is phi b2 For the control signal S By Is used to determine the initial phase of the phase. Theoretically, phi a1 And phi b1 Is 0 DEG or 180 DEG phi a1 And phi b1 Is 0 ° or 180 °; according to the polarization direction of the first piezoelectric ceramic sheet 101 and the access circuitMode of correspondingly adjusting phi a1 And phi b1 Difference of (d), phi a2 And phi b2 The difference of the two piezoelectric ceramic plates can realize the synchronous equal-length telescopic movement and the synchronous opposite-direction telescopic movement, and obviously, phi is selected according to the requirements and the working conditions a1 And phi b1 Difference of (d), phi a2 And phi b2 The differences of (c) are within the ordinary skill of the art. However, the problem of distortion of the scanning track is likely to occur due to the variation in the processing accuracy of the piezoelectric bimorph 100 and the adhesion of the adhesive member 200. That is, in the case where only the first group of control signals is applied to the first piezoelectric ceramic sheet 101 and only the third group of control signals is applied to the second piezoelectric ceramic sheet, the inventor found that, in practice, the scanning locus of the free end of the piezoelectric bimorph 100 is not a straight line along the X direction but an ellipse along the X direction as the major axis, and that the increase or decrease of Φ is performed at this time a1 And phi b The difference of the two can correct the scanning track of the free end of the piezoelectric bimorph 100 into a straight line along the X direction; alternatively, in the case where only the second group of control signals is applied to the first piezoelectric ceramic sheet 101 and only the fourth group of control signals is applied to the second piezoelectric ceramic sheet, the inventors found from practical practice that the scanning locus of the free end of the piezoelectric bimorph 100 is not a straight line along the Y direction but an ellipse with the major axis along the Y direction, and that the distance between the two ends is increased or decreased by a2 And phi b2 The difference of (a) corrects the scanning trajectory of the free end of the piezoelectric bimorph 100 to a straight line along the Y direction.
When the scanner is used in the raster scanning mode, the second set of control signals and the fourth set of control signals are not sinusoidal signals, and the waveforms of the second set of control signals and the fourth set of control signals are ensured to be the same.
A second aspect of an embodiment of the present utility model provides an optical fiber scanning actuator comprising a scanning actuator as described above and an optical fiber 300, the light-exiting end of the optical fiber 300 being fixed to the free end of the scanning actuator in a cantilever-supported manner.
Specifically, the portion of the light emitting end of the optical fiber 300 beyond the free end of the scanning actuator constitutes an optical fiber cantilever 301, and the portion of the optical fiber 300 located at the rear side of the optical fiber cantilever 301 is fixedly connected to the scanning actuator. The free end of the scan actuator is the front end of the scan actuator. The other end of the optical fiber 300 is connected with a light source, the optical fiber cantilever is driven by the scanning actuator to perform two-dimensional scanning, and the light source emits light of a corresponding pixel point according to the scanning position of the optical fiber cantilever, so that the optical fiber two-dimensional scanning imaging is realized.
Optionally, the optical fiber 300 is fixed to the piezoelectric bimorph 100 in a cantilever-supported manner; alternatively, the optical fiber 300 is fixed to the adhesive member 200 in a cantilever-supported manner.
As a preferred embodiment, the adhesive member 200 is a cured adhesive 201, that is, the left side or the right side of the two piezoelectric ceramic plates of the piezoelectric bimorph 100 are fixedly connected together by the cured adhesive 201, and the optical fiber 300 is also fixedly adhered by the cured adhesive 201. I.e., the portion of the optical fiber 300 located at the rear side of the optical fiber cantilever 301 is bonded by the cured adhesive 201.
It should be noted that the above-mentioned embodiments illustrate rather than limit the utility model, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" or "comprises" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the words first, second, third, etc. do not denote any order, and the words may be interpreted as names.
All of the features disclosed in this specification, except mutually exclusive features, may be combined in any manner.
Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. That is, each feature is one example only of a generic series of equivalent or similar features, unless expressly stated otherwise.
The utility model is not limited to the specific embodiments described above. The utility model extends to any novel one, or any novel combination, of the features disclosed in this specification, as well as to any novel one, or any novel combination, of the steps of the method or process disclosed.
Claims (11)
1. The scanning actuator is characterized by comprising a piezoelectric bimorph and an adhesive part, wherein the plane where the piezoelectric bimorph is positioned is taken as a horizontal plane, the fixed end of the piezoelectric bimorph is taken as a rear end, the front end of the piezoelectric bimorph is taken as a free end, the adhesive part is arranged on the left side or the right side of the piezoelectric bimorph, and one sides of two piezoelectric ceramic plates of the piezoelectric bimorph are fixedly connected into a whole by the adhesive part.
2. A scanning actuator according to claim 1, wherein both piezoelectric ceramic plates of the piezoelectric bimorph have simultaneous equal-length telescoping motion components and simultaneous opposite-telescoping motion components, driving the free end of the piezoelectric bimorph to vibrate in both the horizontal and vertical directions.
3. A scanning actuator according to claim 1 or 2, wherein the electrode on the upper surface and the electrode on the lower surface of the first piezoelectric ceramic plate on the upper layer in the piezoelectric bimorph are connected to the first driving circuit for generating the first control signal through electrode leads, respectively, and the electrode on the upper surface and the electrode on the lower surface of the second piezoelectric ceramic plate on the lower layer in the piezoelectric bimorph are connected to the second driving circuit for generating the second control signal through electrode leads, respectively.
4. A scanning actuator according to claim 1 or 2, wherein the two piezoelectric ceramic plates of the piezoelectric bimorph are opposite in polarization direction, the electrode on the upper surface of the first piezoelectric ceramic plate on the upper layer in the piezoelectric bimorph is connected to the positive electrode of the first control signal through an electrode lead, the electrode on the lower surface of the second piezoelectric ceramic plate on the lower layer in the piezoelectric bimorph is connected to the positive electrode of the second control signal through an electrode lead, and the electrode on the lower surface of the first piezoelectric ceramic plate and the electrode on the upper surface of the second piezoelectric ceramic plate are directly connected to each other and grounded.
5. A scanning actuator according to claim 3, wherein the first piezo-ceramic plate is driven by the first driving signal to simultaneously perform a synchronous isometric telescoping motion and a synchronous reverse telescoping motion with the second piezo-ceramic plate; the second piezoelectric ceramic plate simultaneously performs synchronous isometric telescopic movement and synchronous reverse telescopic movement with the first piezoelectric ceramic plate under the drive of a second drive signal.
6. A scanning actuator according to claim 4, wherein the first piezoelectric ceramic plate is driven by the first driving signal to simultaneously perform a synchronous isometric telescopic motion and a synchronous reverse telescopic motion with the second piezoelectric ceramic plate; the second piezoelectric ceramic plate simultaneously performs synchronous isometric telescopic movement and synchronous reverse telescopic movement with the first piezoelectric ceramic plate under the drive of a second drive signal.
7. A scanning actuator according to claim 5 or 6, wherein the first control signal has a first set of control signals for driving the first piezo-ceramic plate to perform a telescoping motion of equal length in synchronization with the second piezo-ceramic plate and a second set of control signals for driving the first piezo-ceramic plate to perform a telescoping motion of opposite direction in synchronization with the second piezo-ceramic plate, the first control signals being signals formed by superimposing the first set of control signals and the second set of control signals;
the second control signals comprise a third group of control signals for driving the second piezoelectric ceramic plates to do synchronous equilong telescopic motion with the first piezoelectric ceramic plates and a fourth group of control signals for driving the second piezoelectric ceramic plates to do synchronous reversing telescopic motion with the first piezoelectric ceramic plates, and the second control signals are formed by overlapping the third group of control signals and the fourth group of control signals.
8. A scanning actuator as claimed in claim 7, characterized in that the first set of control signals S AX ＝VA 1 *sin(ω x *t+φ a1 ) Third group of controlsThe signal is S BX ＝VB 1 *sin(ω x* t+φ b1 ) The method comprises the steps of carrying out a first treatment on the surface of the Second set of control signals S AY ＝VA 2 *sin(ω y* t+φ a2 ) The fourth group of control signals is S BY ＝VB 2 *sin(ω y* t+φ b2 )；
The first control signal is: s is S A ＝S AX +S AY ＝VA 1 *sin(ω x* t+φ a1 )+VA 2 *sin(ω y* t+φ a2 ) The second control signal is: s is S B ＝S BX +S BY ＝VB 1 *sin(ω x* t+φ b1 )+VB 2 *sin(ω y* t+φ b2 )；
Wherein: VA (vertical alignment) 1 For the control signal S AX VA of the voltage amplitude, VA of (a) 2 For the control signal S Ay Is phi, the voltage amplitude of (a) a1 For the control signal S AX Is phi a2 For the control signal S Ay VB of (B) 1 For the control signal S BX Voltage amplitude, VB 2 For the control signal S By Is phi, the voltage amplitude of (a) b1 For the control signal S BX Is phi b2 For the control signal S By Is used to determine the initial phase of the phase.
9. A scanning actuator according to claim 8, wherein the scanning actuator is arranged to increase or decrease Φ a1 And phi b Correcting the scanning track of the free end of the piezoelectric bimorph to be a straight line along the X direction;
by increasing or decreasing phi a2 And phi b2 The difference of (2) corrects the scanning trajectory of the free end of the piezoelectric bimorph to a straight line in the Y direction.
10. An optical fiber scanner comprising a scanning actuator according to any one of claims 1 to 9 and an optical fiber, the light exit end of which is fixed to the free end of the scanning actuator in a cantilever-supported manner.
11. An optical fiber scanner according to claim 10, wherein the adhesive means is a cured adhesive, i.e. the left or right sides of the two piezoelectric ceramic plates of the piezoelectric bimorph are fixedly connected together by the cured adhesive, and the optical fiber is fixedly bonded by the cured adhesive, i.e. the portion of the optical fiber located at the rear side of the optical fiber cantilever is bonded by the cured adhesive.
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| CN202223207628.8U CN219417871U (en) | 2022-11-30 | 2022-11-30 | Scanning actuator and optical fiber scanner |
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| CN202223207628.8U CN219417871U (en) | 2022-11-30 | 2022-11-30 | Scanning actuator and optical fiber scanner |
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