CN220410594U - Crystal box storage box and crystal box transportation trolley - Google Patents
Crystal box storage box and crystal box transportation trolley Download PDFInfo
- Publication number
- CN220410594U CN220410594U CN202321710171.4U CN202321710171U CN220410594U CN 220410594 U CN220410594 U CN 220410594U CN 202321710171 U CN202321710171 U CN 202321710171U CN 220410594 U CN220410594 U CN 220410594U
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- Prior art keywords
- box
- crystal
- limiting plate
- cassette
- storage box
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- 239000013078 crystal Substances 0.000 title claims abstract description 48
- 238000007789 sealing Methods 0.000 claims description 13
- 230000035939 shock Effects 0.000 claims description 7
- 239000011435 rock Substances 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 74
- 238000000034 method Methods 0.000 description 23
- 238000013016 damping Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a crystal box storage box and a crystal box transport trolley. The wafer cassette storage box comprises: the box body is provided with an opening at the top; the door leaf is arranged at the top of the box body so as to seal the box body; the limiting plate is obliquely fixed at the bottom of the box body and used for limiting the position of the crystal box; the guardrail is arranged on the surface of the limiting plate and used for fixing the crystal box. Through set up the fixed limiting plate of slope bottom half, place the crystal box in on the limiting plate, can prevent that the wafer from sliding out in the transportation, through limiting plate surface sets up the guardrail can further fix the crystal box, prevents that the crystal box from taking place to rock in the transportation and causing the wafer to pollute.
Description
Technical Field
The utility model relates to the field of semiconductor processing, in particular to a crystal box storage box and a crystal box transportation trolley.
Background
In the semiconductor integrated circuit manufacturing process, wafers are stored in a wafer carrier or front opening cassette and then transported in a cart.
In the prior art, a cart with a plurality of layers of fixed type is generally adopted for carrying, however, the existing cart has obvious defects in design structure, can not seal the wafer box, can not fix the position of the wafer box, easily causes the wafer box to move or even fall down in the transportation process, and causes wafer pollution or breakage.
Disclosure of Invention
The utility model aims to solve the technical problem of providing a crystal box storage box and a crystal box transport trolley, which can not only seal the crystal box, but also fix the position of the crystal box.
In order to solve the above-mentioned problems, the present utility model provides a cassette storage box comprising: the box body is provided with an opening at the top; the door leaf is arranged at the top of the box body so as to seal the box body; the limiting plate is obliquely fixed at the bottom of the box body and used for limiting the position of the crystal box; the guardrail is arranged on the surface of the limiting plate and used for fixing the crystal box.
In some embodiments, a sealing strip is attached to a side of the door leaf facing the box.
In some embodiments, the limiting plate has an inclination angle with the bottom of the case ranging from 5 ° to 15 °.
In some embodiments, the guard rail is a plurality of guard rails.
In order to solve the above-mentioned problems, the present utility model also provides a wafer cassette transport cart, the wafer cassette transport cart including a wafer cassette storage box, the wafer cassette storage box including: the box body is provided with an opening at the top; the door leaf is arranged at the top of the box body so as to seal the box body; the limiting plate is obliquely fixed at the bottom of the box body; the guardrail is arranged on the surface of the limiting plate and used for fixing the crystal box.
In some embodiments, a gas source storage box is further included, the gas source storage box being secured below the cassette storage box.
In some embodiments, a gas line is also included that extends through the gas source storage box and the cassette storage box.
In some embodiments, a base is also included for supporting the gas source storage tank.
In some embodiments, the gas source storage box further comprises a damping component, wherein the damping component is arranged at the bottom of the gas source storage box, one end of the damping component is fixedly connected with the gas source storage box, and the other end of the damping component is fixedly connected with the base.
In some embodiments, a wheel is also included, the wheel being secured to the bottom of the base.
In some embodiments, the wheels include front wheels configured as universal wheels and rear wheels configured as directional wheels.
According to the technical scheme, the door leaves are respectively arranged at the top of the box body of the crystal box storage box, and the inclined and fixed limiting plates are arranged at the bottom of the box body, so that when the crystal box is stored, the crystal box is placed on the limiting plates, and then the door leaves are closed, so that the crystal box can be stored in a sealing manner, wafers in the crystal box can be prevented from sliding out in the transportation process, and when the wafers need to be taken out, the door leaves are opened, the wafers can be vertically taken out from the crystal box, and the wafers are prevented from sliding out in the storage process; through the limiting plate surface sets up the guardrail, can further fix the crystal box, prevent that the crystal box from taking place to rock and causing the wafer pollution in the transportation.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the utility model as claimed. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate.
Drawings
In order to more clearly illustrate the technical solutions of the specific manner of the present utility model, the drawings that are required to be used in the embodiments of the present utility model will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person of ordinary skill in the art.
FIGS. 1A-1D are schematic diagrams illustrating a first embodiment of a cassette storage box according to the present utility model;
FIGS. 2A-2D are schematic diagrams illustrating a second embodiment of a cassette storage box according to the present utility model;
FIGS. 3A-3D are schematic diagrams illustrating a third embodiment of a cassette storage box according to the present utility model;
FIGS. 4A-4D are schematic diagrams illustrating a fourth embodiment of a cassette storage box according to the present utility model;
fig. 5A to 5D are schematic views of a first embodiment of the cassette transport cart according to the present utility model.
Detailed Description
The technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are only some of the implementation manners of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring now to fig. 1A to 1D, fig. 1A is a front view of an embodiment of a cassette storage box according to the present utility model, fig. 1B is a top view of an embodiment of a cassette storage box according to the present utility model, fig. 1C is a side view of an embodiment of a cassette storage box according to the present utility model, fig. 1D is a cross-sectional view of an embodiment of a cassette storage box according to the present utility model, wherein fig. 1C and 1D omit a part of structures for facilitating viewing of internal structures.
As shown in fig. 1A to 1D, the cassette storage box includes: the door comprises a box body 10, a door leaf 11, a limiting plate 12 and a guardrail 13. The top of the box body 10 is opened; the door leaf 11 is installed at the top of the case 10 to seal the case 10; the limiting plate 12 is obliquely fixed to the bottom of the case 10, and is used for limiting the position of a wafer cassette (not shown in the figure); the guard rail 13 is disposed on the surface of the limiting plate 12, and is used for fixing the crystal box.
In the actual production and transportation process, the common crystal box storage box can not seal and store the crystal box, can not fix the storage position of the crystal box, and easily causes the sliding-out and pollution of wafers in the transportation process. According to the technical scheme, the door leaf 11 is arranged at the top of the box body 10, the limiting plate 12 which is obliquely fixed is arranged at the bottom of the box body 10, when the wafer box is stored, the wafer box is placed on the limiting plate 12, and then the door leaf 11 is closed, so that the wafer box can be stored in a sealing mode, wafers in the wafer box can be prevented from sliding out in the transportation process, and when the wafers need to be taken out, the door leaf 11 is opened, the wafers can be vertically taken out from the wafer box, and the wafers are prevented from sliding out in the storage process; through set up at limiting plate 12 surface guardrail 13 can further fix the crystal box, prevents that the crystal box from taking place to rock and causing the wafer pollution in the transportation.
As shown in fig. 1A to 1B, in the present embodiment, the door 11 is detachably connected to the case 10 by a buckle 14. After the cassette is put in, the door leaf is closed, and the door leaf 11 is connected with the box body 10 through the buckle 14, so that the door leaf 11 can be prevented from being opened in the transportation process. In this embodiment, a sealing strip (not shown) is further attached to the side of the door leaf 11 facing the box 10. By attaching a sealing strip to the junction between the door leaf 11 and the case 10, the case 11 can be further sealed to prevent dust from entering the case 10.
As shown in fig. 1C to 1D, in the present embodiment, the inclination angle of the stopper plate 12 with respect to the bottom of the case 10 is 5 °. The limiting plate 12 is obliquely fixed to the bottom of the case 10, so that the wafer can be prevented from sliding out during transportation. Further, the inclination direction of the limiting plate 12 is consistent with the opening direction of the wafer to be stored. In other embodiments, the angle of inclination of the limiting plate with the bottom of the case ranges from 5 ° to 15 °.
As shown in fig. 1C to 1D, in the embodiment, the number of guardrails 13 is 1. The guard rail 13 is arranged on the surface of the limiting plate 12, so that the wafer box can be further fixed, and the wafer box is prevented from shaking in the transportation process, so that the wafer is prevented from being polluted. In other embodiments, the number of guardrails 13 may be plural, and the number of guardrails 13 may be selected according to the size of the cassette storage box and the size of the cassette.
Referring to fig. 2A to 2D, fig. 2A is a front view of a second embodiment of the cassette storage box of the present utility model, fig. 2B is a top view of the second embodiment of the cassette storage box of the present utility model, fig. 2C is a side view of the second embodiment of the cassette storage box of the present utility model, and fig. 2D is a cross-sectional view of the second embodiment of the cassette storage box of the present utility model, wherein fig. 2C and 2D omit a part of the structure for facilitating the viewing of the internal structure.
As shown in fig. 2A to 2D, the cassette storage box includes: the door comprises a box body 10, a door leaf 11, a limiting plate 12 and a guardrail 13. The top of the box body 10 is opened; the door leaf 11 is installed at the top of the case 10 to seal the case 10; the limiting plate 12 is obliquely fixed to the bottom of the case 10, and is used for limiting the position of a wafer cassette (not shown in the figure); the guard rail 13 is disposed on the surface of the limiting plate 12, and is used for fixing the crystal box.
As shown in fig. 2A to 2B, in the present embodiment, the door 11 is detachably connected to the case 10 by a buckle 14. After the cassette is put in, the door 11 is closed, and the door 11 is connected with the box 10 by the buckle 14, so that the door 11 can be prevented from being opened during transportation. In this embodiment, a sealing strip (not shown) is further attached to the side of the door leaf 11 facing the box 10. By attaching a sealing strip to the junction between the door leaf 11 and the case 10, the case 11 can be further sealed to prevent dust from entering the case 10.
As shown in fig. 2C to 2D, in the present embodiment, the inclination angle of the limiting plate 12 with respect to the bottom of the case 10 is 5 °. The limiting plate 12 is obliquely fixed to the bottom of the case 10, so that the wafer can be prevented from sliding out during transportation. Further, the inclination direction of the limiting plate 12 is consistent with the opening direction of the wafer to be stored. In other embodiments, the angle of inclination of the limiting plate with the bottom of the case ranges from 5 ° to 15 °.
As shown in fig. 2C to 2D, in the present embodiment, the number of guardrails 13 is 2. In this embodiment, the size of the cassette storage box may accommodate two cassettes, so the number of the guardrails 13 is set to 2, and the cassettes to be stored are fixed respectively. In other embodiments, the number of guardrails 13 may be 1, and the number of guardrails 13 may be selected according to the size of the cassette storage box and the size of the cassette.
Referring to fig. 3A to 3D, fig. 3A is a front view of a third embodiment of the cassette storage box of the present utility model, fig. 3B is a top view of the third embodiment of the cassette storage box of the present utility model, fig. 3C is a side view of the third embodiment of the cassette storage box of the present utility model, and fig. 3D is a cross-sectional view of the third embodiment of the cassette storage box of the present utility model, wherein fig. 3C and 3D omit a part of the structures for facilitating the viewing of the internal structures.
As shown in fig. 3A to 3D, the cassette storage box includes: the door comprises a box body 10, a door leaf 11, a limiting plate 12 and a guardrail 13. The difference from the embodiment shown in fig. 1 is that in this embodiment, the inclination angle between the limiting plate 12 and the bottom of the case 10 is 10 °, so that the position of the wafer cassette can be better limited, and the wafer in the wafer cassette is prevented from sliding out during transportation.
Referring to fig. 4A to 4D, fig. 4A is a front view of a fourth embodiment of the cassette storage box of the present utility model, fig. 4B is a top view of the fourth embodiment of the cassette storage box of the present utility model, fig. 4C is a side view of the fourth embodiment of the cassette storage box of the present utility model, and fig. 4D is a cross-sectional view of the fourth embodiment of the cassette storage box of the present utility model, wherein fig. 4C and 4D omit a part of the structure for facilitating the viewing of the internal structure.
As shown in fig. 4A to 4D, the cassette storage box includes: the door comprises a box body 10, a door leaf 11, a limiting plate 12 and a guardrail 13. The difference from the embodiment shown in fig. 1 is that in this embodiment, the inclination angle between the limiting plate 12 and the bottom of the box 10 is 10 °, so that the position of the wafer cassette can be better limited, and the wafer is prevented from sliding out during the transportation process; because the size of the box 10 can accommodate two crystal boxes, the number of the guardrails 13 is 2, so that the crystal boxes can be better fixed, and the crystal boxes are prevented from shaking in the transportation process, so that the pollution to wafers is caused.
Based on the same inventive concept, the utility model also provides a crystal box transport trolley.
Referring to fig. 5A to 5D, fig. 5A is a front view of an embodiment one of the transporting cart for the wafer cassette of the present utility model, fig. 5B is a top view of an embodiment one of the transporting cart for the wafer cassette of the present utility model, fig. 5C is a side view of an embodiment one of the transporting cart for the wafer cassette of the present utility model, fig. 5D is a cross-sectional view of a storage box for the wafer cassette of an embodiment one of the transporting cart for the wafer cassette of the present utility model, wherein fig. 5C and 5D omit a part of the structure for facilitating the viewing of the internal structure.
As shown in fig. 5A to 5D, the cassette transport cart includes a cassette storage box 51. The cassette storage box 51 includes: box 511, door leaf 512, limiting plate 513, guardrail 514. The top of the box 511 is opened; the door leaf 512 is installed at the top of the case 511 to seal the case 511; the limiting plate 513 is obliquely fixed to the bottom of the case 511, for limiting the position of the cassette (not shown); the guard rail 514 is disposed on the surface of the limiting plate 513, and is used for fixing the wafer cassette.
As shown in fig. 5A to 5B, in the present embodiment, the door 512 is detachably connected to the case 511 by a buckle 515. After the cassette is put in, the door is closed, and the door 512 is connected to the case 511 by the buckle 512, so that the door 512 can be prevented from being opened during transportation. In this embodiment, a sealing strip (not shown) is further attached to the side of the door leaf 512 facing the case 511. By attaching a sealing strip to the junction between the door leaf 512 and the case 511, the case 511 can be further sealed, and dust is prevented from entering the case 511.
As shown in fig. 5C to 5D, in the present embodiment, the inclination angle of the stopper 513 with respect to the bottom of the case 511 is 5 °. The limiting plate 513 is obliquely fixed to the bottom of the case 511, so that the wafer can be prevented from slipping out during transportation. Further, the inclination direction of the limiting plate 513 is consistent with the opening direction of the wafer to be stored. In other embodiments, the angle of inclination of the limiting plate with the bottom of the case ranges from 5 ° to 15 °.
As shown in fig. 5C to 5D, in the present embodiment, the number of guardrails 514 is 2. In this embodiment, the size of the cassette storage box may accommodate two cassettes, so the number of the guardrails 514 is set to 2, and the cassettes to be stored are fixed respectively. In other embodiments, the number of guardrails 514 may be 1, and the number of guardrails 514 may be selected according to the size of the cassette storage box and the size of the cassette.
According to the technical scheme, the door leaf 512 is arranged at the top of the box body 511 of the wafer box storage box, and the inclined and fixed limiting plate 513 is arranged at the bottom of the box body 511, so that when the wafer box is stored, the wafer box is placed on the limiting plate 513, and then the door leaf 512 is closed, so that the wafer box can be stored in a sealing manner, wafers in the wafer box can be prevented from sliding out in the transportation process, and when the wafers need to be taken out, the door leaf 512 is opened, the wafers can be vertically taken out from the wafer box, and the wafers are prevented from sliding out in the storage process; the guard rails 514 are disposed on the surface of the limiting plate 513, so that the wafer cassette can be further fixed, and wafer pollution caused by shaking of the wafer cassette in the transportation process can be prevented.
In this embodiment, the cassette transport cart further includes a gas source storage box 52, and the gas source storage box 52 is fixed below the cassette storage box 51. A door leaf 521 and a door handle 522 are provided at one side of the gas source storage tank 52, and when the gas source needs to be replaced or the valve of the gas source is opened, the door leaf 521 is opened by pulling the door handle 522. In this embodiment, the cassette transport cart further includes a gas line (not shown) that penetrates the gas source storage box 52 and the cassette storage box 51. Further, the gas line is connected to the gas source storage tank 52. Specifically, after the wafer cassette is placed in the wafer cassette storage box 51, the door leaf 512 of the wafer cassette storage box 51 is closed, sealing strips are attached to seal the wafer cassette storage box, meanwhile, a valve of a gas source is opened, the gas source enters the wafer cassette storage box through a gas pipeline, the wafer cassette storage box 51 is guaranteed to be in a positive pressure environment, wafers are prevented from being polluted, and further sealing effects on the wafer cassette are achieved.
In this embodiment, the cassette transport cart further includes a base 53. The base 53 is for supporting the gas source storage tank 52. In this embodiment, the base 53 is subjected to a counterweight treatment, so as to prevent the pod transport cart from rollover.
In this embodiment, the cassette transport cart further includes a shock absorbing member 54. The damping part 54 is disposed at the bottom of the gas source storage box 52, one end of the damping part 54 is fixedly connected with the gas source storage box 52, and the other end is fixedly connected with the base 53. In the present embodiment, the shock absorbing member 54 includes a shock absorber 541 and a shock absorbing coil 542. Through the cooperation of the shock absorber 541 and the shock-proof ring 542, the wafer transportation cart can be further prevented from being vibrated or collided in the transportation process to cause the wafer to be smooth or polluted, and even the wafer transportation cart is prevented from being turned on one's side.
In this embodiment, the cassette transport cart further includes wheels 55. The wheel 55 is fixed to the bottom of the base 53. In this embodiment, the wheels 55 include front wheels 551 and rear wheels 552. Further, the front wheels 551 are configured as universal wheels and the rear wheels 552 are configured as directional wheels. Front wheel 551 designs into the universal wheel can control to turn to, rear wheel 552 designs into the directional wheel can control the straight walking of crystal box transport vechicle in the transportation, avoids the crystal box transport vechicle to hit the barrier in less space region, prevents the roll-off and the pollution of wafer.
In this embodiment, the cassette transport cart further includes a handle 56. The handle 56 is disposed on a side of the cassette storage box 51 perpendicular to the door 521 of the gas source storage box 52 and close to the rear wheel 552.
It should be noted that in this document, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, the statement "comprises" and "comprising" does not exclude the presence of other elements than those listed in any process, method, article, or apparatus that comprises the element.
The embodiments of the present utility model are described in a related manner, and the same similar parts between the embodiments are all mutually referred, and each embodiment is mainly described in the differences from the other embodiments.
The foregoing description is only of the preferred embodiments of the present utility model and is not intended to limit the scope of the present utility model. It should be noted that modifications and adaptations to the present utility model may occur to one skilled in the art without departing from the principles of the present utility model and are intended to be comprehended within the scope of the present utility model.
Claims (11)
1. A cassette storage box comprising:
the box body is provided with an opening at the top;
the door leaf is arranged at the top of the box body so as to seal the box body;
the limiting plate is obliquely fixed at the bottom of the box body and used for limiting the position of the crystal box;
the guardrail is arranged on the surface of the limiting plate and used for fixing the crystal box.
2. The pod storage pod of claim 1, wherein the door leaf is affixed with a sealing strip toward a side of the pod.
3. The pod storage pod of claim 1, wherein the limiting plate has an angle of inclination with the bottom of the pod in the range of 5 ° to 15 °.
4. The pod storage pod of claim 1, wherein the guard rail is a plurality of.
5. The utility model provides a crystal box transport cart, its characterized in that, crystal box transport cart includes a crystal box storage box, crystal box storage box includes:
the box body is provided with an opening at the top;
the door leaf is arranged at the top of the box body so as to seal the box body;
the limiting plate is inclined to the bottom of the box body;
the guardrail is arranged on the surface of the limiting plate and used for fixing the crystal box.
6. The cassette transport cart of claim 5, further comprising a gas source storage box secured below the cassette storage box.
7. The cassette transport cart of claim 6, further comprising a gas line extending through the gas source storage box and the cassette storage box.
8. The pod transport cart of claim 6, further comprising a base for supporting the gas source storage tank.
9. The pod transportation cart of claim 8, further comprising a shock absorbing member disposed at a bottom of the gas source storage tank, wherein one end of the shock absorbing member is fixedly connected to the gas source storage tank and the other end is fixedly connected to the base.
10. The pod transport cart of claim 8, further comprising a wheel secured to a bottom of the base.
11. The pod transport cart of claim 10, wherein the wheels comprise front wheels configured as universal wheels and rear wheels configured as directional wheels.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321710171.4U CN220410594U (en) | 2023-06-30 | 2023-06-30 | Crystal box storage box and crystal box transportation trolley |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321710171.4U CN220410594U (en) | 2023-06-30 | 2023-06-30 | Crystal box storage box and crystal box transportation trolley |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220410594U true CN220410594U (en) | 2024-01-30 |
Family
ID=89648512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321710171.4U Active CN220410594U (en) | 2023-06-30 | 2023-06-30 | Crystal box storage box and crystal box transportation trolley |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220410594U (en) |
-
2023
- 2023-06-30 CN CN202321710171.4U patent/CN220410594U/en active Active
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