CN220399291U - Microscopic imaging measurement system and optical device - Google Patents

Abstract

The utility model provides a microscopic imaging measuring system and an optical device, wherein the microscopic imaging measuring system comprises: an objective lens, a first lens group, a second lens group and a first movable platform; according to the microscopic imaging measurement system, the position of at least one lens in the second lens group in the plane perpendicular to the light transmission direction is changed through operating the first movable platform, so that the position of a region to be measured in an image of a real space or an image of a momentum space of a sample to be measured can be adjusted and selected according to an actual application scene, signals of the region to be measured can be effectively detected, and the microscopic imaging measurement system is convenient to operate and high in efficiency.

Description

Microscopic imaging measurement system and optical device

Technical Field

The utility model relates to the technical field of imaging and optical measurement, in particular to a microscopic imaging measurement system with an optical path adjusting function and optical equipment comprising the microscopic imaging measurement system.

Background

With the development of scientific research and the upgrading of the photonic industry, a strong need for being able to finely characterize the optical properties of materials on a mesoscale and to be able to obtain sample information rapidly in real time will promote the advancement of related detection techniques. The optical device generally used for optical measurement uses laser as an excitation light source, enters a microscopic module after passing through an excitation light path, irradiates the surface of a sample, and collects and processes signal light generated by the sample through a collection light path after passing through the microscopic module. In chinese patent publication No. CN218728344U, an imaging measurement system and an optical apparatus are disclosed, in which optical axes of respective lenses coincide; the position of the collecting device for receiving the signal light is fixed and is positioned at the optical axis; the region to be measured corresponding to each modulation unit in the modulation module is always positioned at the optical axis, and the position of the region to be measured is not changed by switching different modulation units by the mobile modulation module. The signal cannot be effectively collected when the optical path deviates from the optical axis; nor can it be effectively measured for the region to be measured that deviates from the optical axis.

Disclosure of Invention

The utility model provides a microscopic imaging measurement system, comprising:

the objective lens can receive signal light from a sample to be tested, the objective lens is provided with a rear focal plane of the objective lens, and the sample to be tested is provided with a sample surface;

the first lens group can image the rear focal plane of the objective lens on a first momentum space imaging surface and is matched with the objective lens to image the sample surface on a first real space imaging surface;

the second lens group can image a first imaging plane on a second imaging plane, and the first imaging plane is the first real space imaging plane or the first momentum space imaging plane;

a first movable stage for mounting at least one lens of the second lens group and moving the at least one lens to change the position of the image in the second imaging plane.

Optionally, a collecting device is further included to collect information of the second imaging plane.

Optionally, the collecting device includes a light input window, the light input window is disposed at the second imaging plane, and the first movable platform can change a relative position between the image in the second imaging plane and the light input window; or alternatively

The microscopic imaging measurement system also comprises a modulation module which is arranged at the first imaging surface and can modulate the region to be measured, and the first movable platform can change the position of the image of the region to be measured in the second imaging surface; or alternatively

The collection device comprises a light input window, the light input window is arranged at the second imaging surface, the microscopic imaging measurement system further comprises a modulation module, the modulation module is arranged at the first imaging surface and can modulate a region to be measured, and the first movable platform can move the image of the region to be measured in the second imaging surface to the light input window.

Optionally, the device further comprises a second movable platform for installing the modulation module and moving the modulation module to adjust the position of the region to be measured in the first imaging plane.

Optionally, the first movable platform is translatable in a first direction and/or a second direction; the second movable platform can translate along the first direction and/or the second direction, the first direction and the second direction are perpendicular to each other and are perpendicular to the transmission direction of light, and the moving directions of the first movable platform and the second movable platform are the same or different.

Optionally, the light input window is a slit or a small hole or an optical fiber light inlet; the modulation module comprises an aperture or SLM.

Optionally, the first lens group is a first convex lens; or the first lens group includes a second convex lens and a first convex lens disposed along a light transmission direction.

Optionally, the second lens group is a third convex lens; or the second lens group includes a fourth convex lens and a third convex lens disposed along a light transmission direction.

Optionally, the third convex lens is disposed on the first movable platform.

The utility model also provides an optical device comprising the microscopic imaging measurement system.

The utility model also provides a microscopic imaging measurement system and optical equipment, wherein the microscopic imaging measurement system changes the position of at least one lens in the second lens group in a plane perpendicular to the transmission direction of light by operating the first movable platform, so that the position of a region to be measured in an image of a real space or an image of a momentum space of a sample to be measured can be adjusted and selected according to an actual application scene, signals of the region to be measured can be effectively detected, and the microscopic imaging measurement system is convenient to operate and high in efficiency.

Drawings

FIG. 1 is a block diagram of the optical path structure of a microscopic imaging measurement system provided by the utility model;

FIG. 2 is a block diagram of the optical path structure of another microscopic imaging measurement system provided by the present utility model;

fig. 3 is a schematic view of an initial optical path structure of a microscopic imaging measurement system according to embodiment 1 of the present utility model;

fig. 4 is a schematic diagram of an optical path structure of the microscopic imaging measurement system according to embodiment 1 of the present utility model after adjustment;

fig. 5 is a schematic view of an initial optical path structure of a microscopic imaging measurement system according to embodiment 2 of the present utility model;

fig. 6 is a schematic diagram of the optical path structure of the microscopic imaging measurement system after calibration according to embodiment 2 of the present utility model;

fig. 7 is a schematic diagram of an initial optical path structure of a microscopic imaging measurement system according to embodiment 3 of the present utility model;

fig. 8 is a schematic view of the optical path structure of the microscopic imaging measurement system according to embodiment 3 of the present utility model during scanning;

fig. 9 is a schematic diagram of an optical path structure of the microscopic imaging measurement system according to embodiment 4 of the present utility model after adjustment;

fig. 10 is a schematic diagram of an optical path structure of the microscopic imaging measurement system according to embodiment 5 of the present utility model after adjustment;

FIG. 11 is a schematic view of a first movable platform and a lens thereon according to the present utility model;

fig. 12 is a schematic structural diagram of a second movable platform and a modulation module thereon according to the present utility model.

Reference numerals illustrate: 10. the device comprises a sample to be measured, a 20 objective lens, a 30 first lens group, a 31 first convex lens, a 32 second convex lens, a 40 second lens group, a 41 third convex lens, a 50 modulation module, a 51 region to be measured, a 52 image of the region to be measured, a 60 collecting device, a 61 light input window, a 71 first movable platform, a 72 second movable platform, a 100 optical axis, a S1 sample plane, a S2 objective lens back focal plane, a S3 first real space imaging plane, a S4 first momentum space imaging plane and a S5 second imaging plane.

Detailed Description

Fig. 1 is a block diagram of the optical path structure of a microscopic imaging measurement system provided by the utility model. Fig. 2 is a block diagram of the optical path structure of another microscopic imaging measurement system provided by the present utility model. As shown in fig. 1 and 2, the microscopic imaging measurement system includes:

an objective lens 20, capable of receiving signal light from a sample 10 to be tested, the objective lens 20 having an objective lens back focal plane S2, the sample 10 to be tested having a sample surface S1;

a first lens group 30, capable of imaging the objective lens back focal plane S2 on a first momentum space imaging surface S4, and cooperating with the objective lens 20 to image the sample surface S1 on a first real space imaging surface S3;

a second lens assembly 40 for imaging a first imaging plane on a second imaging plane S5, wherein the first imaging plane is a first real space imaging plane S3 or a first momentum space imaging plane S4;

a first movable stage 71 for mounting at least one lens in the second lens group 40 and moving the at least one lens to change the position of the image in the second imaging plane S5.

Typically, the microscopic imaging measurement system further comprises a collecting device 60 capable of collecting information of the second imaging plane S5. Optionally, the microscopic imaging measurement system further includes a sample stage (not shown), on which the sample 10 to be measured is disposed.

Specifically, the sample surface S1 of the sample 10 to be measured on the sample stage is disposed at the front focal plane of the objective lens 20, and the signal light (including active light emission, stimulated light emission, reflected light, etc.) emitted by the sample 10 to be measured is collected by the objective lens 20, and then sequentially passes through the first lens group 30 and the second lens group 40 and is collected by the collecting device 60. The objective lens 20 can perform fourier transformation on real space information of light emitted by the sample 10 to be measured, and momentum space information of signal light emitted by the sample 10 to be measured is obtained at the back focal plane S2 of the objective lens, that is, an image of the momentum space of the sample 10 to be measured in the back focal plane S2 of the objective lens. The objective lens 20 is also capable of magnifying the image of the sample surface S1. In general, the magnification of the objective lens 20 may be 10 times or 20 times or 50 times or 100 times, or the like.

The first lens group 30 and the objective lens 10 cooperate to image the sample surface S1 (with real space information of the sample 10 to be measured) on the first real space imaging surface S3; i.e. the first real space imaging plane S3 has an image of the real space of the sample 10 to be measured. The first lens group 30 images the objective lens back focal plane S2 on the first momentum space imaging surface S4, that is, the first momentum space imaging surface S4 has an image of the momentum space of the sample 10 to be measured. The first lens group 30 and the objective lens 10 having different structures may have the first real space imaging surface S3 and the first momentum space imaging surface S4 located at different positions. Optionally, a first real space imaging surface S3 is located between the first lens group 30 and the first momentum space imaging surface S4 (as shown in fig. 1 and 2). The first real space imaging surface S3 or the first momentum space imaging surface S4 is a first imaging surface. The image in the first imaging plane is an image of the real space or of the momentum space of the sample 10 to be measured. The positions of the first lens group 30, the first real space imaging surface S3, and the first momentum space imaging surface S4 in the optical path are all fixed. In an exemplary embodiment, the first lens group 30 is composed of one or more lenses, for example, 1, 2, 3, 4, or the like. The lens may be a convex lens or a concave lens. Optionally, all lenses in the first lens group 30 have the same optical axis 100. The first real space imaging plane S3 is perpendicular to the light transmission direction Z. The first momentum space imaging surface S4 is parallel to the first real space imaging surface S3 and perpendicular to the light transmission direction Z.

The second lens group 40 images the first imaging plane (i.e., the first real space imaging plane S3 or the first momentum space imaging plane S4) onto the second imaging plane S5. When the first imaging plane is the first real space imaging plane S3, the second imaging plane S5 is the second real space imaging plane, and has an image of the real space of the sample 10 to be measured. When the first imaging plane is the first momentum space imaging plane S4, the second imaging plane S5 is the second momentum space imaging plane, and has an image of the momentum space of the sample 10 to be measured. The image in the second imaging plane S5 is an image of the real space or an image of the momentum space of the sample 10 to be measured. The second lens group 40 is fixed in position in the light transmission direction Z in the optical path, and the second imaging surface S5 is fixed in position in the light transmission direction Z in the optical path. Alternatively, the second lens group 40 is constituted by one or more lenses, for example, 1, 2, 3, 4, or the like. The lens may be a convex lens or a concave lens.

At least one lens of the second lens group 40 is disposed on the first movable platform 71. The first movable stage 71 is operated to move at least one lens thereon to change the position of the image in the second imaging plane S5, i.e. to change the position of the image in real space or in momentum space of the sample 10 to be measured there. The second imaging plane S5 is perpendicular to the light transmission direction Z. The first movable platform 71 is translatable in a first direction X and/or a second direction Y (not shown in fig. 1); the first direction X and the second direction Y are perpendicular to each other and to the light transmission direction Z. That is, the first movable stage 71 is a one-dimensional translation stage or a two-dimensional translation stage. Fig. 11 is a schematic structural diagram of a first movable platform and a lens thereon according to the present utility model. Wherein the first movable stage 71 is a two-dimensional translation stage.

The stage 10, the objective lens 20, the first lens group 30, the second lens group 40, and the collection module 60 are in the same optical path and are sequentially distributed along the light transmission direction Z. Alternatively, the objective lens 20 and the first lens group 30 have the same optical axis 100. Optionally, the objective lens 20 is located on a first optical axis, and the first lens group 30 is located on a second optical axis, the first optical axis intersecting (e.g., perpendicularly intersecting) the second optical axis.

In summary, by operating the first movable platform 71 to change the position of at least one lens in the second lens group 40 in the plane perpendicular to the light transmission direction Z, the position of the region to be measured in the image of the real space or the image of the momentum space of the sample to be measured 10 can be adjusted and selected according to the actual application scene, so that the signal of the region to be measured can be effectively detected, and the operation is convenient and the efficiency is high.

The area to be measured can be selected according to the actual requirement of the user, for example, the area to be measured is selected on the first imaging surface, or the area to be measured is selected on the second imaging surface. The region to be measured is selected either, for example, in an image of the real space of the sample to be measured 10, or in an image of the momentum space of the sample to be measured 10.

In an exemplary embodiment, the collecting device 60 includes a light input window 61, the light input window 61 is disposed at the second imaging surface S5, and the first movable platform 71 can change the relative position of the image and the light input window 61 in the second imaging surface S5. At this time, the region of the second imaging surface S5 within the range of the light input window 61 in the image of the real space or the image of the momentum space of the sample 10 to be measured is the region to be measured that can be effectively measured. Changing the relative position of the image in the second imaging plane S5 and the light input window 61 enables selection of the area to be measured. For example, there is one region 51 to be measured in the first real space imaging surface S3 or the first momentum space imaging surface S4, and the second imaging surface S5 correspondingly has an image 52 of the region to be measured. When the image 52 of the region to be measured does not fall within the range of the light input window 61, the position of the image 52 of the region to be measured can be changed by changing the position of at least one lens in the second lens group 40 in a plane perpendicular to the light transmission direction Z by operating the first movable stage 71 until the image 52 of the region to be measured falls within the range of the light input window 61 (for example, the two overlap or center overlap). When the image 52 of the area to be measured is small or substantially the same with respect to the light input window 61, the first movable stage 71 needs to be operated to move so as to achieve that the image 52 of the area to be measured is moved within the range of the light input window 61. When the image 52 of the area to be measured is relatively large with respect to the light input window 61, the first movable platform 71 needs to be operated to move a plurality of times to realize that the image 52 of the area to be measured is moved into the range of the light input window 61 one by one, i.e. to realize the scanning measurement of the area to be measured. Especially when the image of the momentum space of the sample 10 to be measured (i.e. the first imaging plane is the first momentum space imaging plane) is measured in a larger range, the technical scheme provided by the utility model can realize rapid scanning measurement. The area to be measured is selected by a user according to the actual application scene. Optionally, the light input window 61 is a slit or a small hole or an optical fiber light inlet.

In an exemplary embodiment, the microscopic imaging measurement system further includes a modulation module 50 disposed at the first imaging plane and capable of modulating the region 51 to be measured, and the first movable platform 71 is capable of changing the position of the image 52 of the region to be measured in the second imaging plane S5. Typically, the modulation module 50 is disposed at the first real space imaging plane S3 or the first momentum space imaging plane S4 and is capable of modulating the region 51 to be measured. When the region to be measured 51 deviates from the optical axis 100 and the optical axes of the lenses in the second lens group 40 all coincide with the optical axis 100, the image 52 of the region to be measured in the second imaging plane S5 also deviates from the optical axis 100. Typically the optical axis 100 corresponds to the central region of the collecting means 60, being the optimal signal collecting region. The first movable stage 71 is operated to move at least one lens located thereon so that the image 52 of the region to be measured in the second imaging plane S5 is moved to a target region (e.g., at the optical axis 100 or the central region of the collecting device 60). The position of the modulation module 50 in the optical path is fixed, and the modulation module 50 can only modulate the region 51 to be measured in the first real space imaging surface S3 or the first momentum space imaging surface S4, and select the region to be observed or measured or analyzed.

Optionally, the microscopic imaging measurement system further includes a second movable platform 72 for mounting the modulation module 50 and moving the modulation module 50 to adjust the position of the region 51 to be measured in the first imaging plane. When the modulation module 50 is disposed at the first real-space imaging surface S3 (as shown in fig. 1), the region 51 to be measured in the image of the real space of the sample 10 to be measured is modulated. At this time, the region 51 to be measured is located in the first real space imaging plane S3. Operation of the second movable stage 72 can move the modulation module 50 to adjust the position of the region 51 to be measured within the first real space imaging plane S3. When the modulation module 50 is disposed at the first momentum space imaging surface S4 (as shown in fig. 2), the region 51 to be measured in the image of the momentum space of the sample 10 to be measured is modulated. At this time, the region 51 to be measured is located in the first momentum space imaging plane S4. Operation of the second movable stage 72 can move the modulation module 50 to adjust the position of the region 51 to be measured within the first momentum space imaging surface S4. The target position of the area 51 to be measured is set by the user. Optionally, the second movable platform 72 is translatable in the first direction X and/or the second direction Y. That is, the second movable stage 72 is a one-dimensional translation stage or a two-dimensional translation stage. The moving directions of the first movable platform 71 and the second movable platform 72 are the same or different (e.g., parallel). Alternatively, the first movable platform 71 is a manual platform or an electric platform. The second movable platform 72 is a manual platform or an electric platform. Optionally, the modulation module 50 comprises an aperture or SLM (Spatial Light Modulator ). Here, the modulation may be to select different locations, different sized areas, and/or different transmittance within the imaging plane. Fig. 12 is a schematic structural diagram of a second movable platform and a modulation module thereon according to the present utility model. The second movable stage 72 is a one-dimensional translation stage and the modulation module 50 includes an aperture.

In an exemplary embodiment, the collecting device 60 includes a light input window 61, where the light input window 61 is disposed at the second imaging surface S5, and the microscopic imaging measurement system further includes a modulation module 50 disposed at the first imaging surface and capable of modulating the area 51 to be measured, and the first movable platform 71 is capable of moving the image 52 of the area to be measured in the second imaging surface S5 to the light input window 61. At this time, the first imaging plane is provided with the modulation module 50, and the second imaging plane S5 is provided with the light input window 61, which both select the region to be measured of the real space image or the momentum space image of the sample 10 to be measured, and the final effective measurement region is the overlapping region of the two. The target position of the region 51 to be measured selected by the modulation module 50 at the image of the second imaging surface S5 (i.e. the image 52 of the region to be measured) is the light input window 61. I.e. the first movable stage 71 is operated to be able to move at least one lens located thereon such that the image 52 of the area to be measured in the second imaging plane S5 is moved into the light input window 61. The position of the light input window 61 in space is fixed, typically at the optical axis 100. When the area 51 to be measured deviates from the optical axis 100 and the optical axes of the lenses in the second lens group 40 are all coincident with the optical axis 100, the image 52 of the area to be measured in the second imaging plane S5 also deviates from the optical axis 100, and the image 52 of the area to be measured in the second imaging plane S5 is outside the light input window 61, the collecting device 60 will not collect the signal effectively. By operating the first movable stage 71 to move the image 52 of the region to be measured in the second imaging plane S5 into the light input window 61, the collecting device 60 is enabled to collect signals efficiently. The center of the light input window 61 is generally disposed opposite to the center of the image 52 of the region to be measured in the second imaging plane S5. Generally, the direction of movement of the second movable platform 72 and the first movable platform 71 are parallel. Optionally, both the second movable platform 72 and the first movable platform 71 are translatable parallel to the first direction X; and/or the second movable platform 72 and the first movable platform 71 are each translatable parallel to the second direction Y.

In an exemplary embodiment, the modulation module 50 is not disposed at the first imaging surface, while the light input window 61 is not disposed at the second imaging surface S5. The area to be measured 51 is a feature area selected by the user. For example, the optical device includes an excitation light path system (not shown) and a microscopic imaging measurement system. The laser generated by the excitation light path system irradiates the sample 10 to be measured after passing through the objective lens 20, and the sample 10 to be measured enters the microscopic imaging measurement system after reflecting the laser, namely passes through the objective lens 20, the first lens group 30, the second lens group 40 and the collecting module 60 in sequence. If the center of the incident laser beam deviates from the optical axis of the objective lens 20, the center of the reflected laser beam also deviates from the optical axis of the objective lens 20, and further deviates from the optical axis 100 of the first lens group 30, and the center of the spot of the reflected laser beam on the collection module 60 deviates from the optical axis 100. At this time, the area 51 to be measured is the spot center of the reflected laser light, and the first movable platform 71 is operated to move at least one lens in the second lens group 40 to change the position of the image 52 of the area to be measured in the second imaging surface S5, so that the spot center of the reflected laser light moves to the center of the collecting module 60, and the correction of the laser light path is achieved. In an exemplary embodiment, the collection device 60 in the microscopic imaging measurement system provided in the above embodiments is a CCD image sensor (Charge coupled Device ) or a monochromator. The collecting device 60 is a CCD image sensor and can image real space information and momentum space information of a sample to be detected. The collecting device 60 is a monochromator, so that analysis of spectral information of a sample to be tested can be realized. The collection device 60 may also be a module of monochromator and CCD image sensor.

In summary, the first movable platform 71 is capable of moving at least one lens in the second lens group 40 to change the position of the image 52 of the region to be measured in the second imaging surface S5 to a target position (for example, the light input window 61 of the collecting device 60), so that the imaging measurement can be accurately performed even if the region to be measured 51 deviates from the optical axis, and the correction of the optical path and the measurement of the off-axis region are realized, which is simple, convenient and easy to operate.

The modulation module 50 may modulate the first real space imaging surface S3, or modulate the first momentum space imaging surface S4; the first lens group 30 and the second lens group 40 may be one lens or may be composed of a plurality of lenses. Optionally, the first lens group 30 is a first convex lens; or the first lens group 30 includes a second convex lens and a first convex lens disposed along the light transmission direction Z. Optionally, the second lens group 40 is a third convex lens; or the second lens group includes a fourth convex lens and a third convex lens disposed along the light transmission direction Z. Optionally, a third convex lens is disposed on the first movable platform 71.

The microscopic imaging measurement system and its operation are illustrated by several examples.

Example 1

Fig. 3 is a schematic view of an initial optical path structure of a microscopic imaging measurement system according to embodiment 1 of the present utility model; fig. 4 is a schematic diagram of an optical path structure of the microscopic imaging measurement system according to embodiment 1 after adjustment. The points that are the same as the microscopic imaging measurement system shown in fig. 1 are not repeated, and the difference is that the first lens group 30 is the first convex lens 31 and the second lens group 40 is the third convex lens 41 in embodiment 1.

Specifically, the sample 10 to be measured on the sample stage is irradiated with laser light, and the signal light from the sample surface S1 is changed into parallel light parallel to the optical axis 100 through the objective lens 20, and the parallel light is converged to the first real space imaging surface S3 (i.e., the first imaging surface) through the first convex lens 31, and then imaged to the second imaging surface S5 through the third convex lens 41. The modulation module 50 is placed at the first real space imaging surface S3, and can modulate real space information, and select a region 51 to be measured in the first real space imaging surface S3 (i.e., an image of a real space of a sample to be measured); the light input window 61 of the collecting device 60 is placed at the second imaging plane S5, and the real space information of the second imaging plane S5 is collected and analyzed. As shown in fig. 3, initially, the region 51 to be measured is deviated from the optical axis 100, and the image 52 of the region to be measured in the second imaging plane S5 is also deviated from the optical axis 100 and the light input window 61. As shown in fig. 4, after the adjustment, the region 51 to be measured is deviated from the optical axis 100, and the image 52 of the region to be measured in the second imaging plane S5 is moved into the light input window 61.

Example 2

Fig. 5 is a schematic view of an initial optical path structure of a microscopic imaging measurement system according to embodiment 2 of the present utility model; fig. 6 is a schematic diagram of the optical path structure of the microscopic imaging measurement system according to embodiment 2 of the present utility model after correction. The points that are the same as the microscopic imaging measurement system shown in fig. 1 are not repeated, and the difference is that the first lens group 30 is the first convex lens 31 and the second lens group 40 is the third convex lens 41 in embodiment 2.

Specifically, the sample 10 to be measured on the sample stage is irradiated with the laser light inclined to the optical axis of the objective lens 20, and the laser light reflected from the sample surface S1 is parallel light deviated and inclined to the optical axis 100 after passing through the objective lens 20, and the parallel light is converged to the first real space imaging surface S3 through the first convex lens 31, and then imaged to the second imaging surface S5 through the third convex lens 41. The modulation module 50 is placed at the first real space imaging surface S3, and can modulate real space information, and select the light spot of the reflected laser as the area 51 to be measured; the light input window 61 of the collecting device 60 is placed at the second imaging plane S5, and the real space information of the second imaging plane S5 is collected and analyzed. As shown in fig. 5, initially, the region 51 to be measured (i.e., the spot of the reflected laser light) is deviated from the optical axis 100, and the image 52 of the region to be measured in the second imaging plane S5 is also deviated from the optical axis 100 and the light input window 61. As shown in fig. 6, after correction, the region to be measured 51 deviates from the optical axis 100, and the image 52 of the region to be measured in the second imaging plane S5 is moved into the light input window 61; the spot center of the laser light finally reflected on the second imaging surface S5 falls within the light input window 61.

Example 3

Fig. 7 is a schematic diagram of an initial optical path structure of a microscopic imaging measurement system according to embodiment 3 of the present utility model; fig. 8 is a schematic view of the optical path structure of the microscopic imaging measurement system according to embodiment 3 of the present utility model during scanning. The points that are the same as the microscopic imaging measurement system shown in fig. 2 are not repeated, and the difference is that the first lens group 30 is the first convex lens 31 and the second lens group 40 is the third convex lens 41 in the embodiment 1; the first momentum space imaging surface S4 is not provided with a modulation module for selecting a region to be measured.

Specifically, the sample 10 to be measured on the sample stage is irradiated by the laser, the objective lens 20 performs fourier transform on real space information of light emitted by the sample 10 to be measured, and momentum space information of light emitted by the sample 10 to be measured is obtained at the back focal plane S2 of the objective lens, that is, an image of the momentum space of the sample 10 to be measured in the back focal plane S2 of the objective lens. The first convex lens 31 images the objective lens back focal plane S2 on the first momentum space imaging plane S4 (i.e. the first imaging plane), and then is imaged by the third convex lens 41 on the second imaging plane S5. The second imaging plane S5 has an image of the momentum space of the sample 10 to be measured. The light input window 61 of the collection device 60 is placed at the second imaging surface S5, and the momentum space information of the second imaging surface S5 is collected and analyzed. As shown in fig. 7, initially, the image 52 of the region to be measured in the second imaging plane S5 deviates from the light input window 61 and cannot be effectively measured. The area to be measured is selected by the user and may be larger than the light input window 61. As shown in fig. 8, scanning measurement of the image 52 of the region to be measured is achieved by operating the first movable stage 71 to gradually change the position of the third convex lens 41 in a plane perpendicular to the light transmission direction Z so that respective portions of the image 52 of the region to be measured in the second imaging plane S5 gradually move to the light input window 61.

Example 4

Fig. 9 is a schematic diagram of an optical path structure of the microscopic imaging measurement system according to embodiment 4 after adjustment. The points that are the same as those of the microscopic imaging measurement system shown in fig. 3 and 4 are not described in detail, except that the first lens group 30 in embodiment 4 includes a second convex lens 32 and a first convex lens 31 disposed along the light transmission direction Z.

Example 5

Fig. 10 is a schematic diagram of an optical path structure of the microscopic imaging measurement system according to embodiment 5 after adjustment. The points that are the same as those of the microscopic imaging measurement system shown in fig. 7 and 8 are not described in detail, except that the first lens group 30 in embodiment 5 includes a second convex lens 32 and a first convex lens 31 disposed along the light transmission direction Z; in addition, a modulation module 50 and a second movable stage 72 are provided at the first momentum space imaging surface S4. The second movable stage 72 moves the modulation module 50 to adjust the position of the region 51 to be measured in the first momentum space imaging surface S4.

In an exemplary embodiment, the second lens group 40 includes a fourth convex lens (not shown) and a third convex lens 41 disposed along the light transmission direction Z. The third convex lens 41 is disposed on the first movable stage 71. The third convex lens 41 is the lens closest to the collecting module 60 in the second lens group 40.

The utility model also provides an optical device comprising the microscopic imaging measurement system.

It is noted that in this disclosure relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. In the present disclosure, the word "a" preceding a noun is merely a prefix when the noun first appears, and is not limiting on the number of nouns. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element. Without further limitation, "parallel" encompasses substantially parallel within the error range and "perpendicular" encompasses substantially perpendicular within the error range. Without further limitation, "and/or" means one or both of the front and rear elements; for example a and/or B, including three cases, a, B, a and B.

While the present utility model has been described in detail through the foregoing description of the preferred embodiment, it should be understood that the foregoing description is not to be considered as limiting the utility model. Many modifications and substitutions of the present utility model will become apparent to those of ordinary skill in the art upon reading the foregoing. Accordingly, the scope of the utility model should be limited only by the attached claims.

Claims (10)

1. A microscopic imaging measurement system, comprising:

the objective lens can receive signal light from a sample to be tested, the objective lens is provided with a rear focal plane of the objective lens, and the sample to be tested is provided with a sample surface;

the first lens group can image the rear focal plane of the objective lens on a first momentum space imaging surface and is matched with the objective lens to image the sample surface on a first real space imaging surface;

the second lens group can image a first imaging plane on a second imaging plane, and the first imaging plane is the first real space imaging plane or the first momentum space imaging plane;

a first movable stage for mounting at least one lens of the second lens group and moving the at least one lens to change the position of the image in the second imaging plane.

2. The microscopic imaging measurement system of claim 1, further comprising a collection device capable of collecting information from the second imaging plane.

3. The microscopic imaging measurement system of claim 2, wherein the collection device includes a light input window disposed at the second imaging plane, the first movable stage being capable of changing a relative position of the image in the second imaging plane and the light input window; or alternatively

The microscopic imaging measurement system also comprises a modulation module which is arranged at the first imaging surface and can modulate the region to be measured, and the first movable platform can change the position of the image of the region to be measured in the second imaging surface; or alternatively

The collection device comprises a light input window, the light input window is arranged at the second imaging surface, the microscopic imaging measurement system further comprises a modulation module, the modulation module is arranged at the first imaging surface and can modulate a region to be measured, and the first movable platform can move the image of the region to be measured in the second imaging surface to the light input window.

4. The microscopic imaging measurement system of claim 3, further comprising a second movable stage for mounting the modulation module and moving the modulation module to adjust the position of the region to be measured in the first imaging plane.

5. The microscopic imaging measurement system of claim 4, wherein the first movable platform is translatable in a first direction and/or a second direction; the second movable platform can translate along the first direction and/or the second direction, the first direction and the second direction are perpendicular to each other and are perpendicular to the transmission direction of light, and the moving directions of the first movable platform and the second movable platform are the same or different.

6. A microscopic imaging measurement system according to claim 3, wherein the light input window is a slit or a small hole or an optical fiber light inlet; the modulation module comprises an aperture or SLM.

7. The microscopic imaging measurement system of claim 1, wherein the first lens group is a first convex lens; or the first lens group includes a second convex lens and a first convex lens disposed along a light transmission direction.

8. The microscopic imaging measurement system of claim 1, wherein the second lens group is a third convex lens; or the second lens group includes a fourth convex lens and a third convex lens disposed along a light transmission direction.

9. The microscopic imaging measurement system of claim 8, wherein the third convex lens is disposed on the first movable stage.

10. An optical device comprising a microscopic imaging measurement system according to any of claims 1-9.