CN218547117U - Switchable imaging measurement system and optical device - Google Patents

Abstract

The utility model provides a changeable formation of image measurement system and optical equipment, this changeable formation of image measurement system includes: the objective table, the objective lens, the switching device, the first convex lens, the modulation module, the first lens group and the collecting device are positioned in the same optical path and are sequentially arranged along the propagation direction of light; the system is capable of switching between a first mode of operation (real space modulation, real space collection) and a second mode of operation (momentum space modulation, momentum space collection); and for the optical path of light with a single and fixed wavelength, the positions of the modulation module and the collection device are kept unchanged during the switching process.

Description

Switchable imaging measurement system and optical device

Technical Field

The utility model relates to an image formation and optical measurement technical field, in particular to changeable image formation measurement system including optical lens and contain the optical equipment of this system.

Background

With the development of scientific research and the upgrading of the photonic industry, the strong demand for being able to finely characterize the optical properties of materials at the mesoscopic scale and being able to acquire all mode information in real time and transient state will promote the progress of the related detection technology, and among various detection technologies, the detection of the optical response of the materials can well characterize the properties of the materials. However, the existing detection technology for momentum space and real space imaging is not mature enough. In the imaging measurement technology of the real space and the momentum space in the prior art, an objective lens is used as a Fourier transform element to form momentum space imaging on a back focal plane of the objective lens, and signal collection is carried out after the real space or the momentum space is imaged for one time or multiple times, but modulation is not carried out, or the modulation and the signal collection are positioned at the same position. In addition, how to provide an imaging measurement system compatible with multiple spatial modulation/signal collection operation modes is an urgent problem to be solved.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a changeable formation of image measurement system, include: the objective table, the objective lens, the switching device, the first convex lens, the modulation module, the first lens group and the collecting device are positioned in the same optical path and are sequentially arranged along the propagation direction of light;

the objective table is used for bearing a sample to be detected, and the sample is provided with a sample surface;

the objective lens is used for receiving signal light from a sample to be detected and is provided with an objective lens back focal plane;

the switching device is provided with a fourth convex lens which can move the fourth convex lens into or out of the light path; when the fourth convex lens is moved out of the light path, the first convex lens images the sample plane on a first real space imaging plane at the back focal plane of the first convex lens, and the first lens group images the first real space imaging plane on a second real space imaging plane; when the fourth convex lens is moved into the light path, the back focal plane of the objective lens is positioned on the front focal plane of the fourth convex lens, the fourth convex lens and the first convex lens form a second lens group, the back focal plane of the objective lens is imaged on a first momentum space imaging plane at the back focal plane of the first convex lens, and the first lens group images the first momentum space imaging plane on a second momentum space imaging plane; the second real space imaging plane and the second momentum space imaging plane are both located at the first position;

the modulation module is arranged at the back focal plane of the first convex lens and modulates the area to be measured;

the collecting device is disposed at a first location.

Optionally, the first lens group includes a second convex lens and a third convex lens, the third convex lens is located between the second convex lens and the collecting device, the back focal plane of the first convex lens is located at the front focal plane of the second convex lens, and the back focal plane of the third convex lens is located at the first position.

Optionally, the focal length of the first convex lens is f1, the focal length of the second convex lens is f2, and the focal length of the third convex lens is f3, where f3= f2= f1.

Optionally, the modulation module is a diaphragm or an SLM.

Optionally, the modulation module includes one or more modulation units.

Optionally, the modulation unit is a pinhole or SLM.

Optionally, the modulation module includes more than two modulation units; the switchable imaging measurement system further comprises a movable platform, and the modulation module is arranged on the movable platform and used for switching different modulation units.

Optionally, the switchable imaging measurement system further includes a control module, the switching device includes a driving module and an installation table, the fourth convex lens is fixed on the installation table, and the control module sends a control signal to the driving module to drive the installation table to move, so as to move the fourth convex lens into or out of the light path.

Optionally, all lenses in the switchable imaging measurement system are achromatic lenses.

The utility model also provides an optical device, including foretell changeable formation of image measurement system.

The utility model provides a switchable imaging measurement system which can be switched between a first working mode (real space modulation, real space collection) and a second working mode (momentum space modulation, momentum space collection); and for the optical path of light with a single and fixed wavelength, the positions of the modulation module and the collection device are kept unchanged during the switching process.

Drawings

Fig. 1 is a schematic structural diagram of a switchable imaging measurement system provided by the present invention;

fig. 2 is a schematic diagram of an optical path of the switchable imaging measurement system provided by the present invention in the first working mode;

fig. 3 is a schematic diagram of an optical path of the switchable imaging measurement system provided by the present invention in the second operating mode;

fig. 4 is a schematic diagram of a connection structure of the switching device and the control module provided by the present invention.

Description of reference numerals:

1: stage, 2: objective lens, 3: switching device, 31: fourth convex lens, 4: first convex lens, 41: back focal plane of the first convex lens, 5: modulation module, 6: first lens group, 61: second convex lens, 62: third convex lens, 7: collecting device, 33: mounting table, 32: drive module, 8: control module, S1: sample surface, S2: objective back focal plane, S3: first real-space imaging plane, S4: first momentum space imaging plane, S5: second real space imaging plane, S6: second momentum space imaging plane, LP: optical path, P: first position, R: direction of propagation of light, V: perpendicular to the direction of the optical path.

Detailed Description

Fig. 1 is a schematic structural diagram of the switchable imaging measurement system provided by the present invention. Fig. 2 is a schematic diagram of an optical path of the switchable imaging measurement system provided by the present invention in the first working mode. Fig. 3 is a schematic diagram of an optical path of the switchable imaging measurement system provided by the present invention in the second working mode. With reference to fig. 1, 2 and 3, the present invention provides a switchable imaging measurement system, including: the objective table 1, the objective lens 2, the switching device 3, the first convex lens 4, the modulation module 5, the first lens group 6 and the collecting device 7 are positioned in the same light path LP and are sequentially arranged along the light propagation direction R;

the object stage 2 is used for carrying a sample to be tested (not shown in the figure), and the sample is provided with a sample surface S1;

the objective lens 2 is used for receiving signal light from a sample to be detected, and the objective lens 2 is provided with an objective lens back focal plane S2;

the switching device 3 is provided with a fourth convex lens 31, which can move the fourth convex lens 31 into or out of the light path LP; when the fourth convex lens 31 is moved out of the light path LP, the first convex lens 4 images the sample plane S1 on a first real space imaging plane S3 at the back focal plane 51 of the first convex lens 4, and the first lens group 6 images the first real space imaging plane S3 on a second real space imaging plane S5; when the fourth convex lens 31 is moved into the light path LP, the objective lens back focal plane S2 is located at the front focal plane of the fourth convex lens 31, the fourth convex lens 31 and the first convex lens 4 form a second lens group (not shown) to image the objective lens back focal plane S2 on a first momentum space imaging plane S4 at the back focal plane 41 of the first convex lens 4, and the first lens group 6 images the first momentum space imaging plane S4 on a second momentum space imaging plane S6; the second real space imaging surface S5 and the second momentum space imaging surface S6 are both located at the first position P;

the modulation module 5 is arranged at the back focal plane 41 of the first convex lens 4 and modulates the region to be measured;

the collecting device 7 is arranged at a first position P.

Specifically, the sample surface S1 of the sample on the stage 1 is set on the front focal plane of the objective lens 2, and the light emitted by the sample is collected by the objective lens 2, and then sequentially passes through the fourth convex lens 31 (when the fourth convex lens 31 is moved into the light path LP), the first convex lens 4, the modulation module 5, and the first lens group 6, and then is collected by the collecting device 7. The objective lens 2 is capable of fourier transforming real space information of the light emitted by the sample, and momentum space information of the light emitted by the sample is obtained at the objective lens back focal plane S2. The objective lens 2 can also magnify the image of the sample surface S1. In general, the magnification of the objective lens 2 may be 10 times, 20 times, 40 times, or the like.

When the fourth convex lens 31 is moved out of the light path LP, the first convex lens group 4 and the objective lens 2 together image the sample surface S1 on the first real space imaging surface S3, i.e. the first real space imaging. According to the imaging principle, the first real space imaging plane S3 is located at the back focal plane 41 of the first convex lens 4.

When the fourth convex lens 31 is moved into the light path LP, the second lens group formed by the fourth convex lens 31 and the first convex lens 4 images the objective lens back focal plane S2 on the first momentum space imaging plane S4, that is, the first momentum space imaging. The objective lens back focal plane S2 is located at the front focal plane of the fourth convex lens 31, and the light passes through the fourth convex lens 31 and is parallel light, which is converged by the first convex lens 4 and imaged at the back focal plane 41 of the first convex lens 4, i.e., the first momentum space imaging plane S4. Thus, both the first real space imaging and the first momentum space imaging are done behind the first convex lens group 4 and in the same position (i.e. at the back focal plane 41 of the first convex lens 4). The first lens group 6 images the first real space image plane S3 on a second real space image plane S5, and images the first momentum space image plane S4 on a second momentum space image plane S6. Since the first real-space imaging plane S3 and the first momentum space imaging plane S4 are located at the same position (i.e., at the back focal plane 41 of the first convex lens 4), the second real-space imaging plane S5 and the second momentum space imaging plane S6 are also located at the same position (i.e., at the first position) during the process of moving the fourth convex lens 31 into or out of the optical path LP by the switching device 3.

In an exemplary embodiment, the first lens group 6 is composed of one or more than two lenses, for example, 1, 2, 3, or 4, etc. The lens can be a convex lens or a concave lens. Alternatively, all lenses in the first lens group 6 have the same optical axis. In an exemplary embodiment, the first lens group 6 comprises a second convex lens 61 and a third convex lens 62, the third convex lens 62 is located between the second convex lens 61 and the collecting means 7, the back focal plane 41 of the first convex lens 4 is located at the front focal plane of the second convex lens 61, and the back focal plane of the third convex lens 62 is located at the first position P. As described above, the first real space imaging plane S3 and the first momentum space imaging plane S4 are located at the back focal plane 41 of the first convex lens 4, and the back focal plane 41 of the first convex lens 4 is located at the front focal plane of the second convex lens 61, so that the first real space imaging plane S3 and the first momentum space imaging plane S4 are located at the front focal plane of the second convex lens 61. The light from the front focal plane of the second convex lens 61 passes through the second convex lens 61 to form parallel light, and the parallel light is focused by the third lens 62 to form an image (i.e., the second real space imaging plane S5 and the second momentum space imaging plane S6), which is located at the back focal plane of the third convex lens 62. That is, the first position P is located at the back focal plane of the third convex lens 62. In this way, the distance between the second lens 61 and the third convex lens 62 is any length, and can be adapted to scenes with different optical path length requirements.

In the embodiment shown in fig. 1-3, the modulation module 5 is arranged at the back focal plane 41 of the first convex lens 4 and modulates the area to be measured. When the fourth convex lens 31 is moved out of the light path LP, as shown in fig. 2, the first real space imaging plane S3 is located at the back focal plane 41 of the first convex lens 4. The modulation module 5 is located at the first real space imaging plane S3 and modulates the region to be measured in the sample plane S1. The modulation module 5 is used for modulating the first real space imaging and selecting the region to be observed or measured or analyzed. When the fourth convex lens 31 is moved into the optical path LP, as shown in fig. 3, the first momentum space imaging plane S4 is located at the back focal plane 41 of the first convex lens 4, and the modulation module 5 is disposed at the first momentum space imaging plane S4 and modulates the region to be measured in the back focal plane S2 of the objective lens. The modulation module 5 is used for modulating the first momentum space imaging and selecting a region to be observed or measured or analyzed.

In an exemplary embodiment, for an optical path of light having a single fixed wavelength, the focal length of the first convex lens 4 is fixed, the position of the first convex lens 4 and the position of the back focal plane 41 of the first convex lens 4 are fixed, the positions of the first real space imaging plane S3 and the first momentum space imaging plane S4 are fixed, and the position of the modulation module 5 in the optical path is fixed. In this case, the modulation module 5 can only modulate one of the first real space imaging and the first momentum space imaging to select the region to be observed or measured or analyzed. In another exemplary embodiment, the modulation module 5 can be moved along the direction of the light path LP for light paths with varying wavelengths or with a range of wavelength bands to accommodate the change in the focal length of the first convex lens 4 for light of different wavelengths.

The collecting device 7 is disposed at the first position P, and for a light path of light with a single fixed wavelength, the first position P where the first lens group 6 is located is fixed and unchanged, and the second real space imaging surface S5 and the second momentum space imaging surface S6 obtained by respectively imaging the first real space imaging surface S3 and the second real space imaging surface S4 by the first lens group 6 are obtained. So that the position of the collecting device 7 remains fixed.

In the embodiment shown in fig. 1-3, the switching device 3 is movable in a direction V perpendicular to the light path to move the fourth convex lens 31 into or out of the light path LP. In another exemplary embodiment, the switching device 3 can be moved in other directions. However, regardless of the direction of movement, the position of the fourth convex lens 31 is fixed after being moved into the light path LP for the light path having a single fixed wavelength. The effective signal collecting surface of the collecting means 7 is arranged at the first position P and receives light from the third lens group 6. In this way, by the switching operation of the switching device 3, it is possible to switch two different operation modes of the first operation mode (real space modulation, real space signal collection) and the second operation mode (momentum space modulation, momentum space signal collection). In the switching process, the second real space imaging surface S5 and the second momentum space imaging surface S6 are both located at the same position, and the position of the collecting device 7 is fixed. That is, for a single fixed wavelength light in the optical path, the stage 1, the objective lens 2, the switching device 3, the first convex lens 4, the modulation module 5, the switching device 5, the first lens group 6 and the collecting device 7 on the propagation path of the light are fixed in distance from each other, so that the structure of the system is simplified, and the stability is improved.

The optical paths shown in FIGS. 1-3 are linear; in other embodiments, the optical path may be a broken line.

With specific reference to fig. 2, the present invention provides a switchable imaging measurement system, comprising in a first mode: the objective lens comprises an object stage 1, an objective lens 2, a first convex lens 4, a modulation module 5, a second convex lens 61, a third convex lens 62 and a collecting device 7. For an optical path of light with a single and fixed wavelength, the stage 1, the objective lens 2, the first convex lens 4, the modulation module 5, the second convex lens 61, the third convex lens 62 and the collecting device 7 are located in the same optical path LP and are arranged in sequence along the propagation direction R of light with a fixed relative distance from each other, where the relative distance refers to the propagation distance along the propagation direction R of light. Therefore, for the optical path of the light with single fixed wavelength, the positions of the modulation module and the collecting device are fixed, the system structure can be simplified, and the optical path can be kept stable. The objective table 1 is used for bearing a sample to be measured, the sample is provided with a sample surface S1, and the sample surface S1 is arranged on a front focal plane of the objective lens 2; the objective lens 2 is used for receiving signal light from a sample to be detected, and the objective lens 2 is provided with an objective lens back focal plane S2; the first convex lens 4 is configured to receive light from the objective lens and image the sample plane S1 on the first real space imaging plane S3, and the first real space imaging plane S3 is located at the back focal plane 41 of the first convex lens 4.

The modulation module 5 is disposed at the back focal plane of the first convex lens 4, that is, the first real space imaging plane S3, and for the light path of light with a single fixed wavelength, the position of the modulation module 5 may be kept unchanged, and the region to be measured in the sample plane S1 is modulated.

The first real-space imaging plane S3 is located at the front focal plane of the second convex lens 61; the first lens group 6 composed of the second convex lens 61 and the third convex lens 62 images the first real space imaging plane S3 on the second real space imaging plane S5, and the second real space imaging plane S5 is located at the back focal plane of the third convex lens 62. Specifically, a sample on the stage 1 is excited, signal light emitted from the sample surface S1 passes through the objective lens 2 and becomes parallel light, the parallel light passes through the first convex lens 4 and is converged to obtain a first real space imaging surface S3, the parallel light passes through the second convex lens 61 and becomes parallel light, and the parallel light passes through the third convex lens 62 and is converted to obtain a second real space imaging surface S5. The modulation module 5 is placed at the first real space imaging surface S3, real space information can be modulated, and an area to be measured or analyzed in the sample surface S1 is selected; the collecting device 7 is placed at the second real space imaging surface S5, and the real space information of the second real space imaging surface S5 is collected and analyzed, so that the effects of real space modulation and real space collection are achieved.

With particular reference to fig. 3, the present invention provides a switchable imaging measurement system comprising, in a second mode of operation: the objective lens comprises an object stage 1, an objective lens 2, a fourth convex lens 31, a first convex lens 4, a modulation module 5, a second convex lens 61, a third convex lens 62 and a collecting device 7. For an optical path of light with a single and fixed wavelength, the stage 1, the objective lens 2, the fourth convex lens 31, the first convex lens 4, the modulation module 5, the second convex lens 61, the third convex lens 62 and the collecting device 7 are located in the same optical path LP and are arranged in sequence along the propagation direction R of the light with a fixed relative distance to each other, where the relative distance refers to the propagation distance along the propagation direction R of the light. Therefore, for the optical path of the light with single fixed wavelength, the positions of the modulation module and the collecting device are fixed, the system structure can be simplified, and the optical path can be kept stable.

The objective table 1 is used for bearing a sample to be detected, and the sample is provided with a sample surface S1; the objective lens 2 can be regarded as a fourier transform element, real space information of light emitted by the sample is subjected to fourier transform through the objective lens 2 to obtain momentum space information, and a plane bearing the momentum space information is an objective lens back focal plane S2. The second lens group is composed of a first convex lens 4 and a fourth convex lens 31, the fourth convex lens 31 is positioned between the objective lens 2 and the first convex lens 4, the objective lens back focal plane S2 is positioned at the front focal plane of the fourth convex lens 31, the first momentum space imaging plane S4 is positioned at the back focal plane 41 of the first convex lens 4, the first lens group 6 is composed of a second convex lens 61 and a third convex lens 62, and the first momentum space imaging plane S4 is positioned at the front focal plane of the second convex lens 4-2; the second momentum space imaging S6 plane is located at the back focal plane of the third convex lens 62. The second convex lens 61 is located between the first convex lens 4 and the third convex lens 62. The objective lens back focal plane S2 is located at the front focal plane of the fourth convex lens 31, so that the light from the objective lens back focal plane S2 is parallel light after passing through the fourth convex lens 31, and the parallel light is focused and imaged at the back focal plane 41 of the first convex lens 4 after passing through the first convex lens 4, that is, the first momentum space imaging plane S4. The first convex lens 4 and the fourth convex lens 31 have the same optical axis. In this way, the distance between the first convex lens 4 and the fourth convex lens 31 is any length, which can adapt to the scenes with different optical path lengths, and the first momentum space imaging plane S4 is fixed on the back focal plane 41 of the first convex lens 4.

The modulation module 5 is disposed at the back focal plane of the first convex lens 4, that is, the first momentum space imaging plane S4, and for the optical path of light with a single fixed wavelength, the position of the modulation module 5 can be kept unchanged, and the region to be measured in the objective back focal plane S2 is modulated.

The first momentum space imaging plane S4 is located at the front focal plane of the second convex lens 61, so that the light rays are parallel light after passing through the second convex lens 61, and the parallel light is focused and imaged at the back focal plane of the third convex lens 62 after passing through the third convex lens 62, that is, the second momentum space imaging plane S6. The second convex lens 61 and the third convex lens 62 have the same optical axis. In this way, the distance between the second convex lens 61 and the third convex lens 62 is any length, and the scene with different optical path length requirements can be adapted. Specifically, a sample (not shown in the figure) on the stage 1 is excited, signal light emitted from the sample surface S1 passes through the objective lens 2 to image momentum space information of the sample surface S1 on a back focal plane S2 of the objective lens 2, passes through the fourth convex lens 31 to obtain parallel light, and then passes through the first convex lens 4 to obtain a first momentum space imaging surface S4. The first momentum space imaging surface S4 is located on the front focal plane of the second convex lens 61 so that the light passing through the second convex lens 61 is parallel light, and the parallel light passes through the third convex lens 62 to obtain a second momentum space imaging surface S6. The modulation module 5 is placed on the first momentum space imaging plane S4, momentum space information can be modulated, and a region to be measured or analyzed in the objective lens back focal plane S2 is selected; the collecting device 7 is placed at the second momentum space imaging surface S6, and the momentum space information of the second momentum space imaging surface S6 is collected and analyzed, so that the effects of momentum space modulation and momentum space collection are achieved.

Fig. 4 is a schematic diagram of a connection structure of the switching device and the control module. As can be seen from fig. 1 to 4, the switchable imaging measurement system further includes a control module 8, the switching device 3 includes a driving module 32 and a mounting platform 33, the fourth convex lens 31 is fixed on the mounting platform 33, and the control module 8 sends a control signal to the driving module 32 to drive the mounting platform 33 to move, so as to move the fourth convex lens 31 into or out of the optical path. In an exemplary embodiment, the translation stage 33 moves along a direction V perpendicular to the light path LP. In another exemplary embodiment, the translation stage 33 moves in a direction oblique to the light path LP. The translation stage 33 can move in the horizontal direction, and can also move in the vertical direction or other directions.

In an exemplary embodiment, the focal length of the first convex lens 4 is f1, the focal length of the second convex lens 61 is f2, and the focal length of the third convex lens 62 is f3, and f3= f2= f1.

In an exemplary embodiment, the modulation module 5 is an aperture or an SLM (Spatial Light Modulator).

In an exemplary embodiment, the modulation module 5 comprises one or more modulation units (not shown), optionally a pinhole or SLM. When the modulation module 5 includes more than two modulation units, the switchable imaging measurement system further includes a movable platform (not shown), and the modulation module 5 is disposed on the movable platform and used for switching different modulation units.

In one exemplary embodiment, the lenses in the above examples are achromatic lenses. Thus, even if the wavelength of light in the optical path changes within a certain range or light of one wavelength band is included, the focal length of the achromatic lens is not changed.

The utility model also provides an optical device, including foretell changeable formation of image measurement system.

It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising a component of' 8230; \8230;" does not exclude the presence of additional identical elements in the process, method, article, or apparatus that comprises the element.

While the present invention has been described in detail with reference to the preferred embodiments thereof, it should be understood that the above description should not be taken as limiting the present invention. Numerous modifications and alterations will become apparent to those skilled in the art upon reading the foregoing description. Accordingly, the scope of the invention should be limited only by the attached claims.

Claims (10)

1. A switchable imaging measurement system, comprising: the objective table, the objective lens, the switching device, the first convex lens, the modulation module, the first lens group and the collection device are positioned in the same optical path and are sequentially arranged along the propagation direction of light;

the objective table is used for bearing a sample to be detected, and the sample is provided with a sample surface;

the objective lens is used for receiving signal light from the sample to be detected and is provided with an objective lens back focal plane;

the switching device is provided with a fourth convex lens which can move the fourth convex lens into or out of the light path; when the fourth convex lens is moved out of the optical path, the first convex lens images the sample plane on a first real space imaging plane at a back focal plane of the first convex lens, and the first lens group images the first real space imaging plane on a second real space imaging plane; when the fourth convex lens is moved into the light path, the objective lens back focal plane is located at the front focal plane of the fourth convex lens, the fourth convex lens and the first convex lens form a second lens group, the second lens group images the objective lens back focal plane on a first momentum space imaging plane at the back focal plane of the first convex lens, and the first lens group images the first momentum space imaging plane on a second momentum space imaging plane; the second real space imaging plane and the second momentum space imaging plane are both located at a first position;

the modulation module is arranged at the back focal plane of the first convex lens and modulates an area to be measured;

the collection device is disposed at the first location.

2. The switchable imaging measurement system of claim 1, wherein the first lens group comprises a second convex lens and a third convex lens, the third convex lens being located between the second convex lens and the collecting means, wherein the back focal plane of the first convex lens is located at the front focal plane of the second convex lens, and wherein the back focal plane of the third convex lens is located at the first position.

3. The switchable imaging measurement system of claim 1, wherein the focal length of the first convex lens is f1, the focal length of the second convex lens is f2, the focal length of the third convex lens is f3, and f3= f2= f1.

4. The switchable imaging measurement system of claim 1, wherein the modulation module is a diaphragm or an SLM.

5. The switchable imaging measurement system of claim 1, wherein the modulation module comprises one or more modulation units.

6. The switchable imaging measurement system of claim 5, wherein the modulation unit is a pinhole or an SLM.

7. The switchable imaging measurement system of claim 5, wherein the modulation module comprises more than two modulation units; the switchable imaging measurement system further comprises a movable platform, and the modulation module is arranged on the movable platform and used for switching different modulation units.

8. The switchable imaging measurement system of claim 1, further comprising a control module, wherein the switching device comprises a driving module and a mounting stage, the fourth convex lens is fixed on the mounting stage, and the control module sends a control signal to the driving module to drive the mounting stage to move, so as to move the fourth convex lens into or out of the optical path.

9. The switchable imaging measurement system of claim 1, wherein all lenses in the switchable imaging measurement system are achromatic lenses.

10. An optical device comprising a switchable imaging measurement system according to any of claims 1-9.

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