CN220366930U

CN220366930U - Resonant pressure sensor structure

Info

Publication number: CN220366930U
Application number: CN202321673145.9U
Authority: CN
Inventors: 程继光; 巫晟逸; 周强; 刘秋实; 赵岷江
Original assignee: TXC (NINGBO) CORP
Current assignee: TXC (NINGBO) CORP
Priority date: 2023-06-29
Filing date: 2023-06-29
Publication date: 2024-01-19
Anticipated expiration: 2033-06-29

Abstract

The utility model relates to a resonant pressure sensor structure, which comprises an upper cover and a base, wherein a core module and an upper cover are arranged at the upper end of the base, the core module is covered by the upper cover, the core module comprises a chip module, the chip module comprises a pressure rod, a chip and two electrode columns, a chip lower clamp is arranged at the upper end of the base, one electrode column is vertically arranged at two sides of the chip lower clamp on the base, the chip is clamped at the upper end of the chip lower clamp, two sides of the chip are correspondingly connected with the two electrode columns respectively, the pressure rod is arranged at the upper end of the chip, and the upper end of the pressure rod penetrates through the upper cover. The utility model uses the AT cut quartz material as the core component of the sensitive unit, fixes the position of the chip through the fixing structure, transmits the external pressure to the chip through the pressure rod, the chip electrode is communicated with the fixing clamps AT the two sides, and the fixing clamps lead out the signal from the structure through the electrode column and conduct electrifying and signal transmitting, and the response time is very fast.

Description

Resonant pressure sensor structure

Technical Field

The utility model relates to the technical field of pressure sensors, in particular to a resonant pressure sensor structure.

Background

The importance of sensor technology is presented by the development of a calculator and communication technology, the importance of sensor technology is also generalized into three major keys of the information field, the sensor starts from an early mechanical structure type sensor, such as a resistance strain sensor, and the sensor has the functions of self detection, calibration, data processing and the like by utilizing the mode that the resistance value changes along with the deformation of a metal material, is simple and widely applied, is early and mature in development, extends to a solid sensor after the development of the semiconductor industry, expands to various fields, comprises dielectrics, magnetism, piezoelectric materials and the like, can integrate various materials and structures into a whole, and generates the birth of an intelligent sensor after the development of network technology.

In the process of rapid rising of various demands, new sensor technologies are also sequentially released to the market, and in terms of the piezoelectric field, the precision, the sensitivity, the response time and the hysteresis phenomenon all have trends better than those of the traditional strain gauge type sensor, and further, the resonance principle generated by the piezoelectric effect or the inverse piezoelectric effect is further utilized in the sensor, so that the sensor is more outstanding in terms of response time performance, and is a new appearance of a future new generation sensor.

Because the resonant sensor has the characteristics of high precision, high sensitivity, quick response and low hysteresis, the resonant sensor mainly applies the piezoelectric principle to generate vibration wave signals in the modern industry, manufacturing industry, aviation space and other industries, continuous vibration generated by continuous power on has a natural frequency, the frequency is between tens of Hz and hundreds of MHz, the response speed is very fast, the resonant sensor is suitable for the modern higher-precision and quick monitoring requirement, piezoelectric materials are used as sensitive unit cores, quartz, ceramic, metal composites and the like are common, and in quartz materials, cut-off crystals with low temperature influence can be selected to avoid the interference of environmental temperature, and the detection precision is improved.

In the application field of pressure sensors, the conventional strain gauge type pressure sensor can achieve high precision, but has unavoidable defects in terms of response speed, and when the detection speed is greater than 400Hz, the strain gauge type sensor cannot meet the requirement, and a resonant sensor with faster response time is required to be used.

Disclosure of Invention

The utility model aims to solve the technical problem of providing a resonant pressure sensor structure, which uses an AT cut quartz material as a core component of a sensitive unit, fixes the position of a chip through a fixing structure, transmits external pressure to the chip through a pressure rod, and leads a signal out of the structure through an electrode column by the fixing clamp and is electrified and transmitted with the signal, and the response time is very fast.

The technical scheme adopted for solving the technical problems is as follows: the utility model provides a resonant pressure sensor structure, including upper cover and base, base upper end install core module and upper cover, this upper cover covers core module, core module include chip module, this chip module includes pressure bar, chip and two electrode columns, the base upper end be equipped with chip lower part anchor clamps, the equal vertical electrode column of installing in both sides that lie in chip lower part anchor clamps on this base, chip lower part anchor clamps upper end joint have the chip, the both sides of this chip correspond with two electrode columns respectively and link to each other, chip upper end install the pressure bar, this pressure bar upper end runs through the upper cover.

As a supplement to the technical scheme of the utility model, the chip is a square chip, and the thickness of the chip is between 10 and 100 um.

As a supplement to the technical scheme of the utility model, the chip is made of piezoelectric material, and inorganic quartz, ceramic, a compound thereof or an organic polymer such as PVDF and the like are adopted.

As a supplement to the technical scheme of the utility model, the chip is made of an AT cut quartz material.

As a supplement to the technical scheme of the utility model, the core module further comprises a fixing device, the fixing device is cylindrical, the fixing device is arranged at the upper end of the base, a central groove is formed in the middle of the upper end of the fixing device, electrode column grooves matched with the electrode columns are formed in two sides of the fixing device, and a through hole for accommodating a clamp at the lower part of the chip and the chip is formed in the fixing device and is positioned below the central groove.

As a supplement to the technical scheme of the utility model, the side edge of the chip is communicated with the corresponding electrode column through a fixing clamp, one end of the fixing clamp is connected with the electrode column, two clamping jaws are symmetrically arranged on the upper side and the lower side of the other end of the fixing clamp, the side edge of the chip is clamped by the two clamping jaws, a through groove is formed between the central groove and the electrode column groove at the upper end of the fixing device, and the fixing clamp is arranged in the through groove.

As a supplement to the technical scheme of the utility model, the upper end of the chip lower clamp is provided with a chip lower clamping groove which clamps the lower end of the chip.

As a supplement to the technical scheme of the utility model, the lower end of the pressure rod is provided with a chip upper clamp, the lower end of the chip upper clamp is provided with a chip upper clamping groove, and the chip upper clamping groove clamps the chip upper end.

As a supplement to the technical scheme of the utility model, the middle part of the upper end of the base is provided with an adjusting hole for inserting the clamp at the lower part of the chip, the bottom of the adjusting hole is provided with a round hole, a cap-free screw is screwed in the round hole, and the upper end of the cap-free screw props against the clamp at the lower part of the chip.

The beneficial effects are that: the utility model relates to a resonant pressure sensor structure, which uses an AT cut quartz material as a sensitive unit core component, fixes the position of a chip through a fixing structure, transmits external pressure to the chip through a pressure rod, and leads a signal out of the structure through an electrode column by the fixing clamp and electrifies and transmits the signal; meanwhile, the sensor has the characteristic of high directivity by adopting a thickness tangential sensing mode, and the response time of the sensor is faster.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic view of the structure of the base according to the present utility model;

FIG. 3 is a schematic view of the structure of the present utility model with the upper cover removed;

FIG. 4 is a schematic view of a fixing device according to the present utility model;

FIG. 5 is a schematic view of the structure of the present utility model with the upper cover and the securing means removed;

FIG. 6 is a schematic view of the structure of the upper chip clamp according to the present utility model;

FIG. 7 is a schematic view of the structure of the lower chip clamp according to the present utility model;

FIG. 8 is a schematic view of the structure of the fixing clamp according to the present utility model;

fig. 9 is a schematic view of a base according to the present utility model at different angles.

The diagram is: 11. upper cover, 12, base, 13, pressure bar perforation, 14, electrode perforation, 15, adjustment hole, 16, round hole, 20, core module, 21, fixing device, 22, electrode column groove, 23, through groove, 24, center groove, 25, through hole, 30, chip module, 31, pressure bar, 32, chip upper clamp, 33, chip upper clamp groove, 34, chip, 35, fixing clamp, 36, clamping jaw, 37, chip lower clamp, 38, chip lower clamp groove, 39, electrode column.

Detailed Description

The utility model will be further illustrated with reference to specific examples. It is to be understood that these examples are illustrative of the present utility model and are not intended to limit the scope of the present utility model. Further, it is understood that various changes and modifications may be made by those skilled in the art after reading the teachings of the present utility model, and such equivalents are intended to fall within the scope of the claims appended hereto.

The embodiment of the utility model relates to a resonant pressure sensor structure, as shown in fig. 1-9, the resonant pressure sensor structure comprises an upper cover 11 and a base 12, wherein a core module 20 and an upper cover 11 are arranged at the upper end of the base 12, the upper cover 11 covers the core module 20, the core module 20 comprises a chip module 30, the chip module 30 comprises a pressure rod 31, a chip 34 and two electrode columns 39, a chip lower clamp 37 is arranged at the upper end of the base 12, the electrode columns 39 are vertically arranged at two sides of the chip lower clamp 37 on the base 12, a chip 34 is clamped at the upper end of the chip lower clamp 37, two sides of the chip 34 are respectively correspondingly connected with the two electrode columns 39, a pressure rod 31 is arranged at the upper end of the chip 34, the upper end of the pressure rod 31 penetrates through the upper cover 11, and a pressure rod through hole 13 for the pressure rod 31 to pass through is formed in the upper cover 11.

The upper cover 11 and the base 12 can be screwed by adopting threads or can be in various detachable structures such as clamping and buckling.

The chip 34 is a square chip, and the thickness of the chip 34 is between 10 um and 100 um.

The chip 34 is made of piezoelectric material, and is made of inorganic quartz, ceramic, a compound thereof or an organic polymer such as PVDF.

The core module 20 also comprises a fixing device 21, the fixing device 21 has the functions of fixing and protecting the chip module 30, the fixing device 21 is cylindrical, the fixing device 21 is fixedly arranged at the upper end of the base 12, a central groove 24 is formed in the middle of the upper end of the fixing device 21, electrode column grooves 22 matched with the electrode columns 39 are formed in two sides of the fixing device 21, and through holes 25 for accommodating the chip lower clamp 37 and the chip 34 are formed in the lower portion of the central groove 24 inside the fixing device 21.

The side of chip 34 and electrode post 39 that corresponds between switch on through mounting fixture 35, mounting fixture 35 one end link to each other through spot welding with electrode post 39, can also be mounting fixture 35 and electrode post 39 integrated into one piece, the upper and lower both sides symmetry of the mounting fixture 35 other end have arranged two clamping jaws 36, the side of chip 34 is cliied to two clamping jaws 36, fixing device 21 upper end be located between centre tank 24 and the electrode post groove 22 and seted up logical groove 23, mounting fixture 35 install in logical groove 23.

The upper end of the chip lower clamp 37 is provided with a chip lower clamping groove 38, and the chip lower clamping groove 38 clamps the lower end of the chip 34; the lower end of the pressure rod 31 is provided with a chip upper clamp 32, the lower end of the chip upper clamp 32 is provided with a chip upper clamping groove 33, and the chip upper clamping groove 33 clamps the upper end of the chip 34; the lower chip clamping groove 38 is matched with the upper chip clamping groove 33 to fix the chip 34; the upper die clamp 32 and the pressure bar 31 are located within the central slot 24.

The middle part of the upper end of the base 12 is provided with an adjusting hole 15 for inserting a chip lower clamp 37, the bottom of the adjusting hole 15 is provided with a round hole 16, the round hole 16 is internally screwed with a cap-free screw, the upper end of the cap-free screw props against the chip lower clamp 37, the lower part of the chip lower clamp 37 can slide up and down along the inner wall of the adjusting hole 15, and the upper position and the lower position of the chip 34 can be adjusted by rotating the cap-free screw, so that the chip lower clamp belongs to fine adjustment. The upper end of the base 12 is provided with an electrode perforation 14 on each side of the adjustment hole 15, and the electrode perforation 14 is used for installing an electrode column 39.

The utility model adopts the upper cover 11 and the base 12 as the outer shell, the core module 20 comprises a chip module 30, external pressure is transmitted to two ends of the chip 34 through a pressure rod 31, an AT cut quartz material is used as the material of the chip 34, a metal electrode film is plated on the chip 34, the chip 34 oscillates in a thickness shearing mode, electric conduction and signal transmission are carried out through a structure of a fixed clamp 35 and an electrode column 39, the electrode column 39 passes through an electrode perforation 14 to be connected with a circuit, when the external pressure is applied to the pressure rod 31, the chip 34 senses the external pressure, the resonance frequency is changed, a signal is changed, the signal is transmitted to an external circuit through the electrode column 39, and a correct pressure value is obtained after calculation through an external processing unit.

In the description of the present utility model, it should be understood that the azimuth or positional relationships indicated by the azimuth terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal", and "top, bottom", etc., are generally based on the azimuth or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and these azimuth terms do not indicate and imply that the apparatus or elements referred to must have a specific azimuth or be constructed and operated in a specific azimuth, and thus should not be construed as limiting the scope of protection of the present utility model; the orientation word "inner and outer" refers to inner and outer relative to the contour of the respective component itself.

Spatially relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". The device may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

In addition, the terms "first", "second", etc. are used to define the components, and are only for convenience of distinguishing the corresponding components, and the terms have no special meaning unless otherwise stated, and therefore should not be construed as limiting the scope of the present utility model.

The foregoing has outlined a detailed description of a resonant pressure sensor structure provided herein, wherein specific embodiments are presented to aid in understanding the principles and embodiments of the present application, and the above examples are merely intended to aid in understanding the method and core concepts of the present application; meanwhile, as those skilled in the art will have modifications in the specific embodiments and application scope in accordance with the ideas of the present application, the present description should not be construed as limiting the present application in view of the above.

Claims

1. A resonant pressure sensor structure comprising an upper cover (11) and a base (12), characterized in that: the utility model provides a core module (20) and upper cover (11) are installed to base (12) upper end, this upper cover (11) covers core module (20), core module (20) include chip module (30), this chip module (30) include pressure bar (31), chip (34) and two electrode post (39), base (12) upper end be equipped with chip lower part anchor clamps (37), all vertically install one electrode post (39) in the both sides that lie in chip lower part anchor clamps (37) on this base (12), chip lower part anchor clamps (37) upper end joint have chip (34), the both sides of this chip (34) link to each other with two electrode post (39) respectively, chip (34) upper end install pressure bar (31), this pressure bar (31) upper end runs through upper cover (11).

2. A resonant pressure sensor structure according to claim 1, characterized in that: the chip (34) is a square chip, and the thickness of the chip (34) is between 10 and 100 um.

3. A resonant pressure sensor structure according to claim 1, characterized in that: the chip (34) is made of piezoelectric material, and adopts inorganic quartz, ceramic, and a compound or organic polymer thereof.

4. A resonant pressure sensor structure according to claim 3, characterized in that: the chip (34) is made of an AT cut quartz material.

5. A resonant pressure sensor structure according to claim 1, characterized in that: the core module (20) also include fixing device (21), fixing device (21) be cylindricly, this fixing device (21) is installed in base (12) upper end, fixing device (21) upper end middle part seted up centre groove (24), electrode column groove (22) with electrode column (39) complex are seted up to both sides of this fixing device (21), fixing device (21) inside below in centre groove (24) set up through-hole (25) that hold chip lower part anchor clamps (37) and chip (34).

6. The resonant pressure sensor structure of claim 5, wherein: the side of chip (34) and electrode post (39) that correspond between switch on through mounting fixture (35), mounting fixture (35) one end link to each other with electrode post (39), two clamping jaw (36) have been arranged to the upper and lower both sides symmetry of this mounting fixture (35) other end, the side of chip (34) is cliied to two clamping jaw (36), fixing device (21) upper end be located between centre tank (24) and electrode post groove (22) and seted up logical groove (23), mounting fixture (35) install in logical groove (23).

7. A resonant pressure sensor structure according to claim 1, characterized in that: the upper end of the chip lower clamp (37) is provided with a chip lower clamping groove (38), and the chip lower clamping groove (38) clamps the lower end of the chip (34).

8. A resonant pressure sensor structure according to claim 1, characterized in that: the lower end of the pressure rod (31) is provided with a chip upper clamp (32), the lower end of the chip upper clamp (32) is provided with a chip upper clamping groove (33), and the chip upper clamping groove (33) clamps the upper end of the chip (34).

9. A resonant pressure sensor structure according to claim 1, characterized in that: the middle part of the upper end of the base (12) is provided with an adjusting hole (15) for inserting the chip lower clamp (37), the bottom of the adjusting hole (15) is provided with a round hole (16), the round hole (16) is internally connected with a cap-free screw, and the upper end of the cap-free screw props against the chip lower clamp (37).