CN220356562U - Differential pressure sensor - Google Patents

Differential pressure sensor Download PDF

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Publication number
CN220356562U
CN220356562U CN202321228763.2U CN202321228763U CN220356562U CN 220356562 U CN220356562 U CN 220356562U CN 202321228763 U CN202321228763 U CN 202321228763U CN 220356562 U CN220356562 U CN 220356562U
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China
Prior art keywords
pressure
cavity
partition wall
pressure sensor
differential pressure
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CN202321228763.2U
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Chinese (zh)
Inventor
王小平
杨军
曹万
王红明
赵鹍
洪鹏
汪灏
张超军
梁世豪
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Wuhan Finemems Inc
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Wuhan Finemems Inc
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Abstract

The present application provides a pressure sensor capable of effectively isolating a pressure element from other electronic elements, comprising: the inner cavity of the shell is hermetically partitioned into a first cavity and a second cavity by a partition wall integrally connected with the shell, and two pressure holes are formed in the partition wall; the electronic element module is arranged in the second cavity and is electrically connected to the outside of the shell through a plurality of contact pins of which one ends extend into the second cavity; the two pressure detection units are arranged in the first cavity and are used for blocking the two pressure holes in a one-to-one correspondence manner, are electrically connected with the electronic element module through a plurality of second electric connecting pieces penetrating through the partition wall in a sealing manner, and are provided with pressure elements extending into the pressure holes; and two pressure joint pipes connected to the shell, wherein one end of the inner side of each pressure joint pipe extends into the second cavity and is sealed on the partition wall, and the inner cavities of the pressure joint pipes are coupled to the corresponding pressure elements through the two pressure holes in a one-to-one correspondence manner.

Description

Differential pressure sensor
Technical Field
The application relates to the technical field of pressure sensors, in particular to a differential pressure sensor.
Background
Differential pressure sensors have two pressure channels that each introduce a fluid under test. Two pressure channels are coupled to opposite two pressure sensing faces of the same pressure sensitive element, as disclosed, for example, in KR101486518B1, CN102914403A, CN115507997 a; or as in CN109506828A, two pressure channels are coupled to the first pressure sensing face of two different pressure sensitive elements, and the first pressure sensing face is coupled to the vacuum chamber or the same chamber to obtain the same reference pressure. In measuring differential pressure of severe media such as high-temperature automobile exhaust, other electronic components on a circuit board except for pressure sensitive components are easily corroded to fail. Similar problems exist with absolute and gauge pressure sensors.
Disclosure of Invention
In response to the deficiencies of the prior art, the present application provides a differential pressure sensor to effectively isolate pressure sensitive elements from other electronic components.
In order to achieve the above purpose, the present application provides the following technical solutions: a differential pressure sensor, comprising:
the inner cavity of the shell is hermetically partitioned into a first cavity and a second cavity by a partition wall integrally connected with the shell, and two pressure holes are formed in the partition wall;
the electronic element module is arranged in the second cavity and is electrically connected to the outside of the shell through a plurality of contact pins of which one ends extend into the second cavity;
the two pressure detection units are arranged in the first cavity and are used for blocking the two pressure holes in a one-to-one correspondence manner, are electrically connected with the electronic element module through a plurality of second electric connecting pieces penetrating through the partition wall in a sealing manner, and are provided with pressure elements extending into the pressure holes;
and two pressure joint pipes connected to the shell, wherein one end of the inner side of each pressure joint pipe extends into the second cavity and is sealed on the partition wall, and the inner cavities of the pressure joint pipes are coupled to the corresponding pressure elements through the two pressure holes in a one-to-one correspondence manner.
Preferably, the top end of the partition wall forms a partition groove in which the first sealing body is encapsulated, and the second electric connecting piece penetrates through the partition groove and the first sealing body.
Preferably, a plurality of slits which are opened towards the top end side are respectively arranged on two sides of the separation groove, and the second electric connecting piece correspondingly penetrates through the slits.
Preferably, the shell comprises a shell body and a top cover, a circle of first sealing grooves are formed in the top end of the shell body, and a circle of inner surrounding walls are formed on the inner sides of the first sealing grooves; the top cover comprises a cover plate, a circle of flange and a rib plate, wherein the top end of the circle of flange is connected to the cover plate, the flange stretches into the first sealing groove, and the rib plate stretches into the separation groove.
Preferably, the pressure detection unit includes:
a second circuit board perpendicular to the pressure hole;
one end of the barrier is fixed on one side of the second circuit board, which is close to the partition wall, and the other end of the barrier stretches into the pressure hole, and a third sealing body is filled and sealed between the barrier and the second circuit board and between the barrier and the partition wall; the pressure element is fixed on one side of the second circuit board close to the partition wall and is positioned in the barrier.
Preferably, the barrier has a support portion formed on an outer wall thereof to be supported on the partition wall.
Preferably, the inner wall of the first chamber is provided with a positioning portion for positioning the pressure detection unit.
Preferably, the first chamber is connected to a bottom side of the housing through a first atmosphere communication hole, the bottom of which is covered with the first waterproof breathable film.
Preferably, the shell further comprises a bottom cover which is connected to the bottom of the shell in a sealing way, a sealed fifth cavity is formed between the bottom cover and the bottom of the shell in a surrounding way, the fifth cavity is communicated with the second cavity through a steel ball hole, and one end of the steel ball hole, which is positioned in the second cavity, is sealed through a steel ball; the bottom cover is provided with a second atmosphere communication hole, and a second waterproof breathable film is covered on the second atmosphere communication hole.
Preferably, the electronic component module comprises a first circuit board, wherein one side of the bottom of the first circuit board is fixedly supported on a supporting surface formed at the bottom of the second cavity, and one side of the top of the electronic component module is provided with an electronic component, a second electric connection part electrically connected with the second electric connection piece and a first electric connection part electrically connected with the contact pin.
Drawings
FIG. 1 is an exploded schematic view of a differential pressure sensor according to a preferred embodiment of the present utility model;
FIG. 2 is a bottom view of a differential pressure sensor in accordance with a preferred embodiment of the present utility model;
FIG. 3 is a cross-sectional view of a differential pressure sensor along A-A shown in FIG. 2 in accordance with a preferred embodiment of the present utility model;
FIG. 4 is a top view of a differential pressure sensor in accordance with a preferred embodiment of the present utility model;
FIG. 5 is a cross-sectional view of a differential pressure sensor according to a preferred embodiment of the utility model, taken along B-B shown in FIG. 4;
FIG. 6 is a partial structural perspective view of a pressure sensing assembly in accordance with a preferred embodiment of the present utility model;
in the figure: 101. an inner peripheral wall; 102. a first seal groove; 103. a partition groove; 104. a third chamber; 105. a fourth chamber; 106. a first atmosphere communication hole; 108. a first pressure chamber; 109. a second pressure chamber; 110. a slit; 111. steel balls; 112. a support surface; 113. a first waterproof breathable film; 114. a second atmosphere communication hole; 115. a second waterproof breathable film; 116. an extension; 117. a steel ball hole; 118. a second separator; 119. a groove; 11. partition walls; 120. a pressure channel; 121. a pressure hole; 122. a reference pressure hole; 126. a positioning part; 127. a first separator; 128. a fifth chamber; 12. a pressure joint pipe; 14. a second chamber; 15. a first chamber; 161. a contact pin; 16. an end button; 170. a metal bushing; 17. a mechanical connection; 1. a housing; 201. a second circuit board; 202. a pressure element; 203. a barrier; 204. a support part; 205. a bonding wire; 206. a third electrical connection; 20. a pressure detection unit; 210. a first circuit board; 211. a conditioning element; 212. other electronic components; 213. a second electrical connection; 214. a first electrical connection; 21. an electronic component module; 22. a second electrical connection; 23. a third sealing body; 24. a first electrical connection; 2. a pressure detection assembly; 31. a cover plate; 32. a flange; 33. rib plates; 3. a top cover; 4. a bottom cover; 5. a first sealing body; 6. and a second sealing body.
Detailed Description
The technical solutions of the present application will be clearly and completely described below with reference to the accompanying drawings. The following examples are illustrative only and are not to be construed as limiting the present application. In the following description, the same reference numerals are used to designate the same or equivalent elements, and duplicate descriptions are omitted.
In the description of the present application, it should be understood that the azimuth or positional relationship indicated by the terms "upper", "lower", "inner", "outer", "left", "right", etc. are based on the azimuth or positional relationship shown in the drawings, or the azimuth or positional relationship in which the product of the present application is conventionally put in use, or the azimuth or positional relationship as is conventionally understood by those skilled in the art, are merely for convenience of description of the present application and for simplification of description, and are not indicative or implying that the apparatus or element to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and therefore should not be construed as limiting the present application.
In addition, the terms "mounted," "connected," "coupled," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application can be understood as appropriate by one of ordinary skill in the art.
It should be further understood that the term "and/or" as used in this specification and the corresponding claims refers to any and all possible combinations of one or more of the listed items.
Please refer to fig. 1. In a preferred embodiment of the utility model, the differential pressure sensor includes a housing. The housing comprises at least a shell 1 and a top cover 3. The top end of the shell 1 is provided with a circle of first sealing groove 102, and the inner side of the first sealing groove 102 is oppositely provided with a circle of inner surrounding wall 101. The top cover 3 comprises a cover plate 31, a circle of flanges 32 and a rib plate 33, wherein the top ends of the flanges 32 are connected to the cover plate 31, the flanges 32 extend into the first sealing groove 102, and the rib plate 33 extends into the separating groove 103. The inner cavity of the housing is hermetically partitioned into a first cavity 15 and a second cavity 14 by a partition wall 11 integrally connected with the housing, and two pressure holes 121 are formed in the partition wall 11.
Please refer to fig. 2, fig. 3 and fig. 6 in combination. The differential pressure sensor further comprises a pressure sensing assembly 2. The pressure detection assembly 2 comprises an electronics module 21 arranged in the second chamber 14 and two pressure detection units 20 arranged in the first chamber 15. The two pressure detection units 20 are disposed at intervals in the lateral direction (left-right direction in fig. 2). The electronic component module 21 is electrically connected to the outside of the housing through a plurality of pins 161 having one end protruding into the second cavity to be connected to an external device. The two pressure detecting units 20 are plugged at the pressure holes 121 in a one-to-one correspondence manner, are electrically connected with the electronic element modules 21 through a plurality of second electrical connectors 22 penetrating through the partition wall 11 in a sealing manner, and are provided with pressure elements 202 extending into the pressure holes 121. Wherein, the outside of the shell 1 can be provided with a mechanical connecting part 17 which is mechanically connected with the outside, at least one connecting hole is arranged on the mechanical connecting part 17, and a metal bushing 170 can be arranged in the connecting hole. The opposite end of the exterior of the housing 1 is provided with a terminal button 16, a pin 161 is fixed in the terminal button 16, and one end of the inner side of the pin 161 extends into the second cavity 14 and is electrically connected with the electronic component module 21.
Please refer to fig. 4 in combination. In other embodiments, the projection of the second chamber 14 onto a plane perpendicular to the top-to-bottom direction is preferably L-shaped as shown in FIG. 1, including a first portion perpendicular to the axial direction of the pressure fitting tube 12 and a second portion parallel to the axial direction of the pressure fitting tube 12. The length of the second portion occupies all or most of the width of the housing 1 in the axial direction of the pressure joint pipe 12, and the plurality of pins 161 extend vertically into the first portion. This can further reduce the size of the differential pressure sensor in the axial direction of the pressure joint pipe 12.
The differential pressure sensor also includes two pressure connector tubes 12 connected to the housing. The inner end of the pressure joint pipe 12 extends into the second chamber 14 and is sealed to the partition wall 11, the inner chamber of which forms pressure channels 120, and the two pressure channels 120 are respectively coupled to a corresponding pressure element 202 via a pressure hole 121.
The differential pressure sensor can realize the sealing and separation of the second cavity 14 and the first cavity 15 through the separation groove 103 between the cover 3 and the shell 1 and the first sealing body 5, so that other electronic components are isolated from the pressure sensitive components, and the erosion of the pressure medium to the other electronic components is reduced.
Preferably, the top end of the partition wall 11 forms a partition groove 103 in which the first sealing body 5 is encapsulated, and the second electrical connector 22 penetrates the partition groove 103 and the first sealing body 5. The first sealing body 5 may be cured from the poured sealant. This enables a good sealing separation between the second chamber 14 and the first chamber 15. Still more preferably, a plurality of slits 110 open toward the top end may be provided on both sides of the partition 103, and the second electrical connector 22 is correspondingly inserted through the slits 110. This allows the second electrical connector 22 to be inserted through the slot 110 and the second electrical connector 22 to be positioned and secured prior to the sealant being applied. Wherein the second electrical connector 22 may be an aluminum wire.
Please refer to fig. 6 in combination. In addition to the pressure element 202, the pressure detection unit 20 may further comprise a second circuit board 201, a barrier 203 and a third sealing body 23. The second circuit board 201 is disposed perpendicular to the pressure hole 121. One end of the barrier 203 is fixed to a side of the second circuit board 201 near the partition wall 11, and the other end protrudes into the pressure hole 121. The third sealing body 23 may be a cured sealant, and the third sealing body 23 is disposed between the barrier 203 and the second circuit board 201 and the partition wall 11. The pressure member 202 is electrically connected to a third electrical connection portion 206 provided on a corresponding side surface of the second circuit board 201 through a bonding wire 205. The pressure element 202 is fixed to a side of the second circuit board 201 near the partition wall 11, and the pressure element 202, the third electrical connection portion 206 and the bonding wire 205 are all located in the corresponding barrier 203.
The pressure element 202 may be a gauge pressure element, such as a semiconductor gauge pressure chip, and one side of the pressure element far away from the partition wall 11 may be communicated to the first cavity 15 through a reference pressure hole 122 formed on the second circuit board 201 to receive a reference pressure, and the other side receives the pressure of the pressure medium in the first pressure cavity 108 or the second pressure cavity 109; the first chamber 15 is preferably vented to atmosphere to bring the reference pressure to atmospheric pressure. In other embodiments, the pressure element 202 may also be an absolute pressure element, such as a semiconductor absolute pressure chip, with a vacuum chamber on one side and receiving the pressure of the pressure medium in the first pressure chamber 108 or the second pressure chamber 109 on the other side. In other embodiments, the pressure element may also be other forms of pressure elements, such as pressure strain gages, capacitive pressure sensitive elements, and the like.
Please refer to fig. 1. Preferably, the outer wall of the barrier 203 is formed with a support 204 supported on the partition wall 11. This enables the second circuit board 201 to be positioned with the partition wall 11 and a space to accommodate the third sealing body 23 to be formed.
Please refer to fig. 3. To facilitate the installation of the pressure detecting unit 20, two first partitions 127 perpendicular to the lateral direction (left-right direction in fig. 2) may be provided in the first chamber 15, and two third chambers 104 may be defined between the two first partitions 127 and the side walls of the first chamber 15. The side wall of the third chamber 104 is provided with a positioning portion 126 for positioning the pressure detecting unit 20. The positioning portion 126 may be a bump or a ridge formed to protrude laterally from the sidewall of the third cavity 104, for positioning the top edge of the second circuit board 201 toward the bottom side. In this way, the pressure detecting unit 20 can be conveniently inserted into the corresponding third cavity 104, and after the second electrical connector 22 is clamped into the corresponding slit 110, the sealing glue is poured into the first sealing groove 102 and the separating groove 103, and then the top cover 3 is adhered to the casing 1. Preferably, the first cavity 15 is relatively formed with a fourth cavity 105, and the fourth cavity 105 is communicated with the third cavity 104 through a notch or hole provided on the first partition 127. Preferably, the fourth chamber 105 is connected to the bottom side of the housing 1 through the first atmosphere communication hole 106, and the bottom of the first atmosphere communication hole 106 is covered with the first waterproof and breathable film 113.
Please refer to fig. 1 and fig. 4 in combination. In other embodiments, the housing further includes a bottom cover 4 sealingly connected to the bottom of the housing 1, a fifth chamber 128 isolated from the second chamber 14 is enclosed between the bottom cover 4 and the bottom of the housing 1, and the second chamber 14 and the fifth chamber 128 may be isolated from each other by a pipe wall extending into the second chamber 14 through the pressure joint pipe 12 and a second partition 118 integrally connected to the housing 1. The bottom end of the housing 1 may be provided with a ring of first sealing grooves (not shown), the inner sides of which form a ring of inner peripheral walls. The bottom cover 4 may include a cover plate, a ring of flange with its bottom end connected to the cover plate, and a rib plate, where the flange extends into the first seal groove and the rib plate extends into the partition groove, where a second sealing body 6 is provided, and the second sealing body 6 may be cured sealant. The fifth chamber 128 communicates with the second chamber 14 through the ball hole 117. The bottom edge of the ball hole 117 is outwardly formed with an extension 116 protruding from the surface of the housing 1 and extending into the second chamber 14. One end of the steel ball hole 117 located in the second cavity 14 is sealed by the steel ball 111; the bottom cover 4 is provided with a second air communication hole 114, and the second air communication hole 114 is covered with a second waterproof and breathable film 115. This lifts the first chamber 15 from atmospheric moisture while allowing the first chamber 15 to communicate to atmosphere, thereby providing a more reliable barrier.
The electronic component module 21 includes a first circuit board 210 with a bottom side fixedly supported on a supporting surface 112 formed at the bottom of the second cavity 14, and a top side of the electronic component module 21 is provided with an electronic component, a second electrical connection portion 213 electrically connected to the second electrical connection member 22, and a first electrical connection portion 214 electrically connected to the pin 161. These electronic components may include conditioning components 211, as well as other electronic components 212, such as protection electronics. The first electrical connection 214 may be disposed within a portion of the second cavity 14 that is electrically connected to an end of the pin 161 that protrudes into the second cavity 14 by a plurality of first electrical connections 24.
Please refer to fig. 1 and fig. 5 in combination. In order to leave a gap between the supporting surface 112 and the electronic component module 21 for the steel ball hole 117 to communicate with the second cavity 14, a groove 119 axially parallel to the supporting surface 112 may be disposed on the supporting surface 112, and two ends of the groove 119 extend to the side walls of the partition wall 11 and the housing 1 respectively, and have lengths greater than the corresponding widths of the first circuit board 210, and one corresponding end of the steel ball hole 117 is lower than the height of the supporting surface 112 and extends into the groove 119. The differential pressure sensor in each of the embodiments described above may be more broadly referred to as a pressure sensor.
It will be readily understood by those skilled in the art that, based on the above embodiments, the pressure nipple 12 may be provided only one and the pressure detecting unit 20 provided only one, and the pressure passage 120 of the pressure nipple 12 communicates to the pressure member 202 of the pressure detecting unit 20. As such, it may be used to measure the absolute pressure of the pressure medium introduced from the pressure channel 120 or the gauge pressure relative to the reference pressure. In this case, the above-mentioned device may be specifically referred to as an absolute pressure sensor or a gauge pressure sensor. Further, two pressure detecting units 20 may be provided in total, and the pressure passage 120 of the pressure joint pipe 12 described above is connected to the pressure elements 202 of the two pressure detecting units 20, which can improve the reliability of the pressure measurement with respect to only one pressure detecting unit 20.
The scope of the present disclosure is defined not by the detailed description but by the claims and their equivalents, and all modifications within the scope of the claims and their equivalents are to be construed as being included in the present disclosure.

Claims (10)

1. A differential pressure sensor, comprising:
the inner cavity of the shell is hermetically partitioned into a first cavity (15) and a second cavity (14) by a partition wall (11) integrally connected with the shell, and two pressure holes (121) are formed in the partition wall (11);
an electronic component module (21) disposed in the second chamber (14), the electronic component module (21) being electrically connected to the outside of the housing through a plurality of pins (161) having one end protruding into the second chamber;
two pressure detection units (20) which are arranged in the first cavity (15) and are used for blocking two pressure holes (121) in a one-to-one correspondence manner, wherein the two pressure detection units are electrically connected with the electronic element modules (21) through a plurality of second electric connecting pieces (22) which are sealed and penetrate through the partition wall (11), and each pressure detection unit is provided with a pressure element (202) which stretches into the pressure hole (121);
and two pressure joint pipes (12) connected to the shell, wherein one end of the inner side of each pressure joint pipe extends into the second cavity (14) and is sealed on the partition wall (11), and the inner cavities of the pressure joint pipes are coupled to corresponding pressure elements (202) through the two pressure holes (121) in a one-to-one correspondence manner.
2. The differential pressure sensor according to claim 1, characterized in that the top end of the partition wall (11) forms a partition groove (103) in which the first sealing body (5) is encapsulated, and the second electrical connection member (22) penetrates the partition groove (103) and the first sealing body (5).
3. The differential pressure sensor according to claim 2, wherein a plurality of slits (110) open toward the tip end side are provided on both sides of the partition groove (103), and the second electrical connector (22) is correspondingly inserted through the slits (110).
4. The differential pressure sensor according to claim 1, wherein the housing comprises a shell (1) and a top cover (3), a circle of first sealing grooves (102) are arranged at the top end of the shell (1), and a circle of inner surrounding walls (101) are formed on the inner sides of the first sealing grooves (102) oppositely; the top cover (3) comprises a cover plate (31), a circle of flange (32) and a rib plate (33), wherein the top end of the circle of flange (32) is connected to the cover plate (31), the flange (32) stretches into the first sealing groove (102), and the rib plate (33) stretches into the separation groove (103).
5. The differential pressure sensor according to claim 1, characterized in that the pressure detection unit (20) comprises:
a second circuit board (201) perpendicular to the pressure hole (121);
one end of the barrier (203) is fixed on one side of the second circuit board (201) close to the partition wall (11), and the other end of the barrier extends into the pressure hole (121), and a third sealing body (23) is encapsulated between the barrier and the second circuit board (201) and between the barrier and the partition wall (11); the pressure element (202) is fixed to the side of the second circuit board (201) close to the partition wall (11) and is located in the barrier (203).
6. The differential pressure sensor according to claim 1, characterized in that a supporting portion (204) supported on the partition wall (11) is formed on the outer wall of the barrier (203).
7. The differential pressure sensor according to claim 6, characterized in that the inner wall of the first chamber (15) is provided with a positioning portion (126) for positioning the pressure detection unit (20).
8. The differential pressure sensor according to claim 1, wherein the first chamber (15) is connected to a bottom side of the housing (1) through a first atmosphere communication hole (106), and the bottom of the first atmosphere communication hole (106) is covered with a first waterproof and breathable film (113).
9. The differential pressure sensor according to claim 8, wherein the housing further comprises a bottom cover (4) connected to the bottom of the housing (1) in a sealing manner, a sealed fifth cavity (128) is enclosed between the bottom cover (4) and the bottom of the housing (1), the fifth cavity (128) is communicated with the second cavity (14) through a steel ball hole (117), and one end of the steel ball hole (117) located in the second cavity (14) is sealed through a steel ball (111); the bottom cover (4) is provided with a second atmosphere communication hole (114), and a second waterproof breathable film (115) is covered on the second atmosphere communication hole (114).
10. The differential pressure sensor according to claim 1, characterized in that the electronics module (21) comprises a first circuit board (210) with a bottom side fixedly supported on a supporting surface (112) formed at the bottom of the second cavity (14), and that the electronics module (21) is provided with electronics, a second electrical connection (213) electrically connected to the second electrical connection (22) and a first electrical connection (214) electrically connected to the pin (161) on a top side.
CN202321228763.2U 2023-05-19 2023-05-19 Differential pressure sensor Active CN220356562U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202321228763.2U CN220356562U (en) 2023-05-19 2023-05-19 Differential pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202321228763.2U CN220356562U (en) 2023-05-19 2023-05-19 Differential pressure sensor

Publications (1)

Publication Number Publication Date
CN220356562U true CN220356562U (en) 2024-01-16

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ID=89501244

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202321228763.2U Active CN220356562U (en) 2023-05-19 2023-05-19 Differential pressure sensor

Country Status (1)

Country Link
CN (1) CN220356562U (en)

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