CN220354841U - Heat insulation device for vacuum equipment - Google Patents
Heat insulation device for vacuum equipment Download PDFInfo
- Publication number
- CN220354841U CN220354841U CN202321890496.5U CN202321890496U CN220354841U CN 220354841 U CN220354841 U CN 220354841U CN 202321890496 U CN202321890496 U CN 202321890496U CN 220354841 U CN220354841 U CN 220354841U
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- Prior art keywords
- heat insulation
- thermal insulation
- vacuum
- heat
- insulation device
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- 238000009413 insulation Methods 0.000 title claims abstract description 94
- 239000002184 metal Substances 0.000 claims abstract description 34
- 239000012774 insulation material Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 4
- 238000003466 welding Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 239000004964 aerogel Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- -1 but not limited to Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
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- Thermal Insulation (AREA)
Abstract
The utility model provides a heat insulation device for vacuum equipment, which comprises at least one heat insulation board positioned in a vacuum cavity, wherein the heat insulation board comprises: the heat insulation filling unit is arranged in the metal shell, the heat insulation filling unit is made of a heat insulation material with low heat conductivity, and the metal shell is of a closed or semi-closed structure surrounded by a metal plate.
Description
[ field of technology ]
The utility model relates to the technical field of heat insulation, in particular to a heat insulation device for vacuum equipment.
[ background Art ]
In order to keep the substrate at a proper temperature, the existing vacuum equipment consumes excessive electric energy by the heater because the heat insulation performance of the cavity is weak, and heat generated by the heating plate reaches the upper cavity wall, the lower cavity wall and the side wall of the cavity in a conduction, radiation and convection mode, and is conducted to the outer side wall through the upper cavity wall, the lower cavity wall and the side wall of the cavity, and then the outer side wall consumes the heat in a conduction, radiation and convection mode, so that the heat is wasted greatly.
Accordingly, there is a need to develop a thermal insulation device for a vacuum apparatus to address the deficiencies of the prior art, to solve or mitigate one or more of the problems described above.
[ utility model ]
In view of this, the present utility model provides a thermal insulation device for a vacuum apparatus, which includes at least one thermal insulation board located in a vacuum chamber, for blocking a passage of heat directly conducted from one side of the thermal insulation board to the other side, thereby performing a thermal insulation function.
In one aspect, the present utility model provides a thermal insulation device for a vacuum apparatus, the thermal insulation device comprising at least one thermal insulation panel located within a vacuum chamber, the thermal insulation panel comprising: the heat insulation filling unit is arranged in the metal shell, the heat insulation filling unit is made of heat insulation materials, and the metal shell is of a closed or semi-closed structure surrounded by metal plates.
In the aspect and any possible implementation manner described above, there is further provided an implementation manner, wherein the metal shell is a closed structure surrounded by metal plates, the metal plates are welded into a whole through a vacuum welding process, and the internal pressure is in a range of 0.01torr-100 torr.
In the aspect and any possible implementation manner described above, there is further provided an implementation manner, the metal shell is a semi-closed structure surrounded by a metal plate, and an opening is further arranged on the metal shell and is directly or indirectly communicated with the vacuumizing system through the opening.
In aspects and any one of the possible implementations described above, there is further provided an implementation in which the insulating material in the insulating filling unit is a thermal gel.
In the aspect and any possible implementation manner described above, there is further provided an implementation manner, a heater is disposed in the vacuum cavity, and a surface of the heat insulation board, which is close to the heater, is a mirror surface.
In the aspect and any possible implementation manner, there is further provided an implementation manner, at least one end of the heat insulation board is of a bent structure, the closed or semi-closed structure forms a cavity, and corners of the cavity form inclined planes.
In the aspect and any possible implementation manner described above, there is further provided an implementation manner, where the heat insulation device further includes an internal pipeline, and two ends of the internal pipeline are respectively connected to the openings on different heat insulation boards, and are connected to the vacuumizing system through at least one opening.
Compared with the prior art, the utility model can obtain the following technical effects:
the heat insulating board of the present utility model is installed on the inner surface of the vacuum apparatus, and most of heat conducted, radiated and convected from the heater is received by the heat insulating board.
Of course, it is not necessary for any of the products embodying the utility model to achieve all of the technical effects described above at the same time.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a heat insulating apparatus for a vacuum apparatus according to an embodiment of the present utility model;
FIG. 2 is a diagram of an implementation of an insulating device according to one embodiment of the present utility model;
FIG. 3 is a diagram of one implementation of an insulated panel provided in one embodiment of the utility model;
FIG. 4 is a diagram of another implementation of the thermal insulation device according to one embodiment of the present utility model;
FIG. 5 is a diagram of another implementation of an insulated panel provided in one embodiment of the utility model;
fig. 6 is a diagram of another implementation of an insulated panel according to an embodiment of the present utility model.
Wherein, 1-a heat insulation board; 2-heating plate; 3-a metal housing; 4-a heat insulation filling unit; 5-a closed structure; 6-an internal pipe; 7, opening; 8-semi-closed structure.
[ detailed description ] of the utility model
For a better understanding of the technical solution of the present utility model, the following detailed description of the embodiments of the present utility model refers to the accompanying drawings.
It should be understood that the described embodiments are merely some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The terminology used in the embodiments of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used in this application and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
The utility model provides a heat insulation device for vacuum equipment, which is shown in figure 1, and comprises at least one heat insulation board 1 positioned in a vacuum cavity, wherein the heat insulation board 1 is of a closed structure or a semi-closed structure, and is shown in figures 3 and 5 respectively.
In one embodiment, as shown in fig. 1, fig. 1 is a schematic structural view of an insulation device for a vacuum apparatus, the insulation device includes a vacuum chamber, a heating plate 2 disposed in the vacuum chamber, and at least one insulation board 1, and the insulation board 1 is a closed structure. The vacuum degree and the cleanliness of the cavity are not affected by the heat-insulating board 1 with the closed structure, and after the cavity is vacuumized, the force for tearing the surface of the thermal interlayer is generated by the pressure difference between the inner part and the outer part of the heat-insulating board 1; the reciprocating force during vacuum pumping and breaking may damage the welded or bonded structure of the insulation panels. Therefore, on the basis, a plurality of reinforcing columns (not shown in the figure) can be added in the heat insulation board to avoid the surface layer from being torn.
In some embodiments, the number of the heat insulation boards 1 can be multiple, and as shown in fig. 2, the heat insulation boards 1 are arranged on the upper cavity wall, the side wall and the lower cavity wall of the vacuum cavity.
In some embodiments, as shown in fig. 3, the heat insulation board 1 includes a metal housing 3 and a heat insulation filling unit 4, the heat insulation filling unit 4 is disposed in the metal housing 3, the heat insulation filling unit 4 is a heat insulation material with low heat conductivity, the metal housing 3 is a closed structure 5 surrounded by metal plates, the metal plates are welded into a whole through a vacuum welding process, and the internal pressure is in the range of 0.01torr-100 torr.
In addition, in another embodiment, as shown in fig. 4, the vacuum heat insulation device includes a vacuum chamber, at least one heat insulation board 1 disposed in the vacuum chamber, which is different from the above embodiment in that the heat insulation board 1 is a semi-closed structure.
Specifically, as shown in fig. 4-5, the heat insulation board 1 includes a metal casing 3 and a heat insulation filling unit 4, the heat insulation filling unit 4 is disposed in the metal casing 3, the heat insulation filling unit 4 is made of a heat insulation material with low heat conductivity, the metal casing 3 is a semi-closed structure 8 surrounded by metal plates, and an opening 7 is further disposed on the metal casing 3. The heat insulation device further comprises an internal pipeline 6, two ends of the internal pipeline 6 are respectively connected with the openings on the heat insulation boards 1, and the openings 7 on the metal shell 3 at least are connected to a cavity vacuumizing system, so that the vacuumizing system vacuumizes the heat insulation boards 1, and the heat insulation effect is further improved.
In one particular embodiment, the insulation material in the insulation pack 4 is a low thermal conductivity insulation material, including, but not limited to, aerogel, thermal conductivity: 0.03W/m.K.
In addition, for the structure of the heat insulation board 1, it may be a linear type, or, as shown in fig. 6, at least one end of the heat insulation board 1 is a bent structure, and the corners of the cavity form an inclined plane, so as to further reduce heat dissipation at the corners of the vacuum cavity.
In one embodiment, the vacuum cavity further comprises a heating plate 2, and the surface of the heat insulation board 1 close to one side of the heating plate 2 is a mirror surface, so that heat can be reflected; the heat insulation boards 1 forming the heat insulation device are distributed on 1-6 surfaces of the cavity.
Considering that different vacuum devices have different requirements on vacuum degree, dust and the like in the cavity, the heat insulation board can have the following structures:
the heat insulation board 1 of the utility model can be of an open structure, namely, a middle layer of heat insulation materials is clamped between two metal plates, the heat insulation board is similar to a sandwich structure, the periphery of the heat insulation board is open and not closed, the heat insulation board of the structure possibly affects the vacuum degree and the cleanliness in a cavity, and the heat insulation board can be used in vacuum equipment with low requirements on the vacuum degree and the cleanliness in the cavity. The heat-insulating board can also be a closed structure and a reinforced column structure (not shown in the figure), wherein the reinforced column structure plays a role in increasing the integral strength in the heat-insulating board, namely, one side, the other side and the side wall of the heat-insulating board are made into a tightly sealed structure in a welding or bonding mode; the insulating material is encapsulated inside.
In one embodiment, the heat-insulating board can also be an interface of a closed structure and vacuumizing, and is connected to a vacuum system through a pipeline and a sealing ring to vacuumize together with the cavity.
The utility model provides a heat insulation device for vacuum equipment, which comprises at least one heat insulation board positioned in a vacuum cavity, wherein a heating plate is arranged in the vacuum cavity, and the heat insulation device consists of a plurality of heat insulation boards and is used for isolating a passage for directly conducting heat from one side of the heat insulation board close to a heating plate 2 to the other side, thereby playing a role in heat insulation.
In one embodiment, in the heat insulation board of the closed structure, heat can be conducted to the side wall through one side of the heat insulation board close to the heating plate side, the side wall is conducted to the other side, and the other side is conducted to the cavity, but the heat accounts for only a small part of the total heat, so that a better heat insulation effect can be achieved.
A plurality of heat insulation boards are coated on 4-6 sides of the vacuum cavity. The side edges of the cavity entering and exiting the coated substrate are hollowed out to facilitate the substrate to enter and exit, or an independent heat insulation board is directly arranged above and below the opening of the side edges of the cavity entering and exiting the coated substrate, and no further explanation is provided.
The heat insulation device for the vacuum equipment provided by the embodiment of the application is described in detail above. The above description of embodiments is only for aiding in understanding the method of the present application and its core ideas; meanwhile, as those skilled in the art will have modifications in the specific embodiments and application scope in accordance with the ideas of the present application, the present description should not be construed as limiting the present application in view of the above.
Certain terms are used throughout the description and claims to refer to particular components. Those of skill in the art will appreciate that a hardware manufacturer may refer to the same component by different names. The description and claims do not take the form of an element differentiated by name, but rather by functionality. As referred to throughout the specification and claims, the terms "comprising," including, "and" includes "are intended to be interpreted as" including/comprising, but not limited to. By "substantially" is meant that within an acceptable error range, a person skilled in the art is able to solve the technical problem within a certain error range, substantially achieving the technical effect. The description hereinafter sets forth the preferred embodiment for carrying out the present application, but is not intended to limit the scope of the present application in general, for the purpose of illustrating the general principles of the present application. The scope of the present application is defined by the appended claims.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a product or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such product or system. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a commodity or system comprising such elements.
It should be understood that the term "and/or" as used herein is merely one relationship describing the association of the associated objects, meaning that there may be three relationships, e.g., a and/or B, may represent: a exists alone, A and B exist together, and B exists alone. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship.
While the foregoing description illustrates and describes the preferred embodiments of the present application, it is to be understood that this application is not limited to the forms disclosed herein, but is not to be construed as an exclusive use of other embodiments, and is capable of many other combinations, modifications and environments, and adaptations within the scope of the teachings described herein, through the foregoing teachings or through the knowledge or skills of the relevant art. And that modifications and variations which do not depart from the spirit and scope of the present utility model are intended to be within the scope of the appended claims.
Claims (7)
1. A thermal insulation device for a vacuum apparatus, the thermal insulation device comprising at least one thermal insulation board located within a vacuum chamber, the thermal insulation board comprising: the heat insulation filling unit is arranged in the metal shell, the heat insulation filling unit is made of heat insulation materials, and the metal shell is of a closed or semi-closed structure surrounded by metal plates.
2. The heat insulation device according to claim 1, wherein the metal shell is a closed structure surrounded by metal plates, the metal plates are welded into a whole by a vacuum welding process, and the internal pressure is in the range of 0.01Torr-100 Torr.
3. The heat insulation device according to claim 1, wherein the metal shell is a semi-closed structure surrounded by metal plates, and an opening is further formed in the metal shell and is directly or indirectly communicated with the vacuumizing system through the opening.
4. A thermal insulation device according to claim 2 or 3, wherein the thermal insulation material in the thermal insulation filling unit is a thermal gel.
5. A thermal insulation device according to claim 2 or 3, wherein a heater is arranged in the vacuum chamber, and one surface of the thermal insulation board adjacent to the heater is a mirror surface.
6. A thermal insulation device according to claim 2 or claim 3, wherein at least one end of the thermal insulation panel is of a bent configuration.
7. A thermal insulation device according to claim 3, further comprising an internal pipe having two ends connected to the openings of different thermal insulation panels, respectively, and connected to a vacuum evacuation system through at least one opening.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202321890496.5U CN220354841U (en) | 2023-07-18 | 2023-07-18 | Heat insulation device for vacuum equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202321890496.5U CN220354841U (en) | 2023-07-18 | 2023-07-18 | Heat insulation device for vacuum equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
CN220354841U true CN220354841U (en) | 2024-01-16 |
Family
ID=89477509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202321890496.5U Active CN220354841U (en) | 2023-07-18 | 2023-07-18 | Heat insulation device for vacuum equipment |
Country Status (1)
Country | Link |
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CN (1) | CN220354841U (en) |
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2023
- 2023-07-18 CN CN202321890496.5U patent/CN220354841U/en active Active
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