CN220354840U - Vacuum heat insulation cavity - Google Patents
Vacuum heat insulation cavity Download PDFInfo
- Publication number
- CN220354840U CN220354840U CN202321890477.2U CN202321890477U CN220354840U CN 220354840 U CN220354840 U CN 220354840U CN 202321890477 U CN202321890477 U CN 202321890477U CN 220354840 U CN220354840 U CN 220354840U
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- China
- Prior art keywords
- cavity
- heat
- heat insulation
- insulating
- vacuum
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- 238000009413 insulation Methods 0.000 title claims description 61
- 238000007789 sealing Methods 0.000 claims abstract description 26
- 238000004321 preservation Methods 0.000 claims abstract description 19
- 238000010438 heat treatment Methods 0.000 claims abstract description 14
- 238000004891 communication Methods 0.000 claims description 12
- 239000004964 aerogel Substances 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 7
- 238000003466 welding Methods 0.000 description 7
- 238000000605 extraction Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Thermal Insulation (AREA)
Abstract
The utility model provides a vacuum heat-insulating cavity which comprises a heating structure and a heat-insulating structure arranged on a cavity wall, wherein the heat-insulating structure consists of a groove positioned on the cavity wall, a heat-insulating layer filled in the groove and a sealing plate arranged on the groove. The utility model can reduce the heat loss of the vacuum equipment, thereby achieving the purpose of heat preservation.
Description
[ field of technology ]
The utility model relates to the technical field of heat insulation, in particular to a vacuum heat insulation cavity.
[ background Art ]
The heater is arranged in the vacuum equipment to heat the to-be-coated carrier plate, so that on one hand, water vapor carried by the carrier plate outside can be removed, and on the other hand, the silicon wafer on the carrier plate can reach the process temperature, and preparation is made for the manufacturing process. In the existing vacuum equipment, in order to keep the carrier plate at a proper temperature, the electric energy consumed by the heater is too large, because the heat preservation performance of the cavity is weak, heat generated by the heating plate reaches all inner side walls of the cavity in a conduction, radiation and convection mode, is conducted to outer side walls through the inner side walls of the cavity, and then the outer side walls consume the heat in a conduction, radiation and convection mode, so that the heat is wasted greatly.
Accordingly, there is a need to develop a vacuum insulated cavity that addresses the deficiencies of the prior art to solve or mitigate one or more of the problems described above.
[ utility model ]
In view of the above, the utility model provides a vacuum heat insulation cavity which can reduce heat loss so as to achieve the purpose of heat insulation.
In one aspect, the utility model provides a vacuum heat-insulating cavity, which comprises a heating structure and a heat-insulating structure arranged on a cavity wall, wherein the heat-insulating structure consists of a groove positioned on the cavity wall, a heat-insulating layer filled in the groove and a sealing plate arranged on the groove.
In aspects and any one of the possible implementations described above, there is further provided an implementation, wherein the insulation layer is an aerogel.
In aspects and any one of the possible implementations described above, there is further provided an implementation in which the cavity wall and the sealing plate are both metallic materials.
In accordance with aspects and any one of the possible implementations described above, there is further provided an implementation, the vacuum insulated cavity further including an interconnecting conduit; the heat insulation and preservation structure is provided with communication holes, at least two communication holes on the heat insulation and preservation structure are communicated through the interconnection pipeline, and at least one communication hole on the heat insulation and preservation structure is connected with a vacuumizing system so as to perform vacuumizing treatment on the heat insulation and preservation structure.
In aspects and any one of the possible implementations described above, there is further provided an implementation in which a surface of the sealing plate adjacent to a side of the heating plate is a mirror surface.
In aspects and any possible implementation manner as described above, there is further provided an implementation manner, wherein the heating structure is a heating plate.
Compared with the prior art, the utility model can obtain the following technical effects:
the vacuum heat-insulating cavity is characterized in that a heat-insulating layer is arranged in the vacuum side of the cavity, the heat-insulating layer is covered by a sealing plate, and the sealing plate and the cavity are integrated by welding (not limited to welding) and the like. The vacuum heat-insulating cavity has the advantages that the heat is conducted, radiated and convected from the heater to the outer side wall of the cavity, and is separated by the heat-insulating layer, so that the heat loss in the cavity is greatly reduced, and the heat insulation purpose is achieved. And the heat insulation layer is packaged in the cavity, so that the vacuum degree and the cleanliness in the cavity are not affected.
Of course, it is not necessary for any of the products embodying the utility model to achieve all of the technical effects described above at the same time.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a perspective view of a vacuum insulated cavity provided in accordance with one embodiment of the present utility model;
FIG. 2 is a cross-sectional view of a vacuum insulated cavity provided in accordance with one embodiment of the present utility model;
FIG. 3 is a schematic view of a sidewall structure according to an embodiment of the present utility model;
FIG. 4 is a perspective view of a cavity interconnect tubing connection provided in one embodiment of the present utility model;
fig. 5 is a schematic diagram of a cavity interconnection pipeline connection according to an embodiment of the present utility model.
Wherein, 1-vacuum heat insulation cavity in the figure; 2-a heat insulation layer; 3-sealing plates; 4-heating plate; 5-an air extraction pipeline; 6-grooves; 7-interconnecting the pipelines; 8-a hot plate lifting through hole; 9-communicating holes; 11-an upper chamber wall; 12-side walls; 13-lower chamber wall.
[ detailed description ] of the utility model
For a better understanding of the technical solution of the present utility model, the following detailed description of the embodiments of the present utility model refers to the accompanying drawings.
It should be understood that the described embodiments are merely some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The terminology used in the embodiments of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used in this application and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
As shown in fig. 1-3, the utility model provides a vacuum heat-insulating cavity, which comprises a heating structure and a heat-insulating structure arranged on a cavity wall, wherein the heat-insulating structure is composed of a groove 6 positioned on the cavity wall, a heat-insulating layer 2 filled in the groove 6 and a sealing plate 3 arranged on the groove. Specifically, a groove 6 is formed on the cavity wall, the heat insulation layer 2 is placed in the groove 6, and then the sealing plate 3 is welded on the cavity wall through a welding process, so that the heat insulation layer 2 is packaged in the groove 6. The cavity wall may be at least one of the upper cavity wall 11, the four side walls 12 and the lower cavity wall 13 of the cavity.
In one particular embodiment, the cavity walls provided with the insulating structure include an upper cavity wall 11, a lower cavity wall 13, and four side walls 12.
In a specific embodiment, the insulating layer is an aerogel.
In one embodiment, the cavity wall and the closure plate are both metallic materials.
In a specific embodiment, the heating structure is a heating plate.
In one embodiment, as shown in fig. 4-5, the vacuum insulated cavity further comprises an interconnecting conduit 7. In this embodiment, the area of the groove 6 is larger than the area of the sealing plate 3, and a communication hole (not shown in the figure) is arranged at a position where the heat insulation layer 2 is not arranged on the heat insulation structure, the communication hole is communicated with the interconnection pipe 7, so that at least two adjacent heat insulation structures are communicated through the interconnection pipe 7, and at least one communication hole 9 on the heat insulation structure is connected with a vacuumizing pipeline, so that vacuumizing treatment is performed on the heat insulation structure.
The vacuum heat-insulating cavity is as follows: a groove for installing the heat insulation layer is processed on the cavity, after the heat insulation layer is paved in the groove, the sealing plate is covered, and the sealing plate and the cavity are integrated in a welding (but not limited to welding) mode. The lower cavity wall is provided with an air extraction through hole 5 connected with the cavity vacuumizing system and a hot plate lifting through hole 8, and the heat insulation structure is not communicated with the air extraction through hole 5 and the hot plate lifting through hole 8 at the corresponding positions of the air extraction through hole 5 and the hot plate lifting through hole 8.
The vacuum heat-insulating cavity is a vacuum cavity, and a heat-insulating structure is arranged on the cavity wall of the cavity and comprises a heat-insulating layer and a sealing plate. Specifically, the inner side surfaces of the cavity are provided with heat insulation layers, the heat insulation layers are covered by sealing plates, and the sealing plates and the cavity are integrated by welding (not limited to welding) and the like. The heat insulation structure has the advantages that the heat is originally conducted, radiated and convected from the heater to the outer side wall of the cavity, and is separated by the heat insulation layer, so that the loss of heat in the cavity is greatly reduced, and the purpose of heat insulation is achieved. And the heat insulation layer is packaged in the cavity, so that the vacuum degree and the cleanliness in the cavity are not affected. The vacuum heat insulation cavity is of a sandwich structure and consists of a cavity body, a heat insulation layer and a sealing plate. The cavity and the closing plate are metal and the insulating layer is an insulating material with low thermal conductivity (including but not limited to aerogel, thermal conductivity: 0.03W/m.k) (in contrast, thermal conductivity of aluminum: 237W/m.k).
In some embodiments, the heat insulation and preservation structure is provided with communication holes 9, the communication holes 9 on adjacent heat insulation and preservation structures on the cavity can be communicated through the interconnection pipeline 7, and at least one communication hole 9 on the heat insulation and preservation structure is connected with a vacuumizing system so as to perform vacuumizing treatment on the heat insulation and preservation structure. For example, the side wall and the heat insulation structure on the lower cavity wall are vacuumized, namely, the space where the heat insulation layer 2 is located in the heat insulation structure is vacuumized. When the cavity is in a vacuum state, the heat insulation layer in the cavity is in the vacuum state; when the cavity is in an atmospheric state, the heat insulation layer in the cavity is in the atmospheric state. The heat insulation layer is not in pressure difference with the other side of the sealing plate, and the force for tearing the sealing plate does not exist, so that the heat insulation layer in the cavity is firm in structure, and the performance of the vacuum equipment is stable and superior.
The heat insulation layer provided by the utility model cuts off a passage for directly conducting heat from the sealing plate layer to the outer side surface of the cavity, thereby playing a role in heat insulation and preservation. In this thermal-insulated heat preservation structure, there is the heat bridge effect in shrouding and the local department of linking of cavity, and heat can also be conducted to the cavity body through the shrouding, but this part heat only accounts for a small part of total heat, so can also play better heat preservation effect.
The heat insulation cavity is of a sandwich structure, and consists of a cavity body, a heat insulation layer and a sealing plate. The cavity and the sealing plate are made of metal, the heat insulation layer is made of heat insulation materials with low heat conductivity (including but not limited to aerogel), and the heat insulation layer is packaged in the cavity. The surface of the sealing plate near the side of the heater is a mirror surface, which is helpful for reflecting heat. The inside of the cavity is provided with an interconnection pipeline, a plurality of heat insulation layer spaces are mutually communicated through the interconnection pipeline, and the heat insulation layer spaces are communicated with the vacuumizing holes after being summarized and vacuumized together. The space of the heat insulation layer is the same as the state of the cavity, namely, no pressure difference exists, and no force for tearing the sealing plate is generated.
The heat insulation layer provided by the utility model cuts off a passage for directly conducting heat from the sealing plate layer to the outer side surface of the cavity, thereby playing a role in heat insulation and preservation. In this heat insulation structure, there is the heat bridge effect in the local junction of shrouding and cavity, and heat still can be through shrouding conduction to the cavity body, but this part heat only accounts for a small part of total heat, so can also play better heat preservation effect.
The vacuum heat insulation cavity provided by the embodiment of the application is described in detail. The above description of embodiments is only for aiding in understanding the method of the present application and its core ideas; meanwhile, as those skilled in the art will have modifications in the specific embodiments and application scope in accordance with the ideas of the present application, the present description should not be construed as limiting the present application in view of the above.
Certain terms are used throughout the description and claims to refer to particular components. Those of skill in the art will appreciate that a hardware manufacturer may refer to the same component by different names. The description and claims do not take the form of an element differentiated by name, but rather by functionality. As referred to throughout the specification and claims, the terms "comprising," including, "and" includes "are intended to be interpreted as" including/comprising, but not limited to. By "substantially" is meant that within an acceptable error range, a person skilled in the art is able to solve the technical problem within a certain error range, substantially achieving the technical effect. The description hereinafter sets forth the preferred embodiment for carrying out the present application, but is not intended to limit the scope of the present application in general, for the purpose of illustrating the general principles of the present application. The scope of the present application is defined by the appended claims.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a product or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such product or system. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a commodity or system comprising such elements.
It should be understood that the term "and/or" as used herein is merely one relationship describing the association of the associated objects, meaning that there may be three relationships, e.g., a and/or B, may represent: a exists alone, A and B exist together, and B exists alone. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship.
While the foregoing description illustrates and describes the preferred embodiments of the present application, it is to be understood that this application is not limited to the forms disclosed herein, but is not to be construed as an exclusive use of other embodiments, and is capable of many other combinations, modifications and environments, and adaptations within the scope of the teachings described herein, through the foregoing teachings or through the knowledge or skills of the relevant art. And that modifications and variations which do not depart from the spirit and scope of the present utility model are intended to be within the scope of the appended claims.
Claims (6)
1. The vacuum heat-insulating cavity is characterized by comprising a heating structure and a heat-insulating structure arranged on a cavity wall, wherein the heat-insulating structure comprises a groove positioned on the cavity wall, a heat-insulating layer filled in the groove and a sealing plate arranged on the groove; the cavity walls include at least one of an upper cavity wall, a side wall, and a lower cavity wall.
2. The vacuum insulated cavity of claim 1, wherein the insulating layer is aerogel.
3. The vacuum insulated cavity of claim 1, wherein the cavity wall and the closure plate are both metallic materials.
4. The vacuum insulated cavity of claim 1, further comprising an interconnecting conduit; the heat insulation and preservation structure is provided with communication holes, at least two communication holes on the heat insulation and preservation structure are communicated through the interconnection pipeline, and at least one communication hole on the heat insulation and preservation structure is connected with a vacuumizing system so as to perform vacuumizing treatment on the heat insulation and preservation structure.
5. The vacuum insulated cavity according to claim 1, wherein the surface of the sealing plate adjacent to the side of the heating structure is a mirror surface.
6. The vacuum insulated cavity of claim 1, wherein the heating structure is a heating plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321890477.2U CN220354840U (en) | 2023-07-18 | 2023-07-18 | Vacuum heat insulation cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321890477.2U CN220354840U (en) | 2023-07-18 | 2023-07-18 | Vacuum heat insulation cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220354840U true CN220354840U (en) | 2024-01-16 |
Family
ID=89477165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321890477.2U Active CN220354840U (en) | 2023-07-18 | 2023-07-18 | Vacuum heat insulation cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220354840U (en) |
-
2023
- 2023-07-18 CN CN202321890477.2U patent/CN220354840U/en active Active
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| GR01 | Patent grant | ||
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