CN220347449U - Ultraviolet laser telecentric scanning field lens - Google Patents
Ultraviolet laser telecentric scanning field lens Download PDFInfo
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- CN220347449U CN220347449U CN202322327735.2U CN202322327735U CN220347449U CN 220347449 U CN220347449 U CN 220347449U CN 202322327735 U CN202322327735 U CN 202322327735U CN 220347449 U CN220347449 U CN 220347449U
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- 230000001681 protective effect Effects 0.000 claims abstract description 35
- 230000005499 meniscus Effects 0.000 claims abstract description 20
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 210000001747 pupil Anatomy 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 5
- 239000005357 flat glass Substances 0.000 claims description 3
- 239000005350 fused silica glass Substances 0.000 claims description 3
- 238000012545 processing Methods 0.000 abstract description 30
- 238000005553 drilling Methods 0.000 abstract description 5
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 101100335307 Xenopus laevis foxe4 gene Proteins 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 201000009310 astigmatism Diseases 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
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Abstract
The utility model discloses an ultraviolet laser telecentric scanning field lens, and relates to the technical field of scanning field lenses. The ultraviolet laser telecentric scan field lens comprises: the optical lens comprises a first protective lens with a flat plate structure, a first lens with a meniscus structure and a focal length of negative, a second lens with a meniscus structure and a focal length of positive, a third lens with a meniscus structure and a focal length of positive, a fourth lens with a biconvex structure and a focal length of positive, a fifth lens with a meniscus structure and a focal length of positive and a second protective lens with a flat plate structure, which are sequentially arranged along the light beam propagation direction. The utility model can provide the ultraviolet laser telecentric scanning field lens with smaller telecentricity, is beneficial to improving the processing precision in the field of laser fine processing, and further optimizes the drilling inclination under the processing breadth of a single field lens.
Description
Technical Field
The utility model relates to the technical field of scanning field lenses, in particular to an ultraviolet laser telecentric scanning field lens.
Background
The application of ultrafast laser is often accompanied by beam scanning, and in the field of laser fine machining, beam scanning can be broadly divided into two structures, namely a cutting head system and a field lens system. The optical path of the cutting head system is as follows: laser-fiber/mirror-focusing optic, while beam scanning relies on the axial motion of the cutting head. The standard optical path of the field lens system is as follows: the laser, the beam expander, the galvanometer system and the laser scanning field lens are characterized in that different reflecting mirrors are arranged between each optical piece in front of the galvanometer system (the field lens is directly assembled on the galvanometer) according to different internal designs of equipment to conduct light paths.
The vibrating mirror system in the field mirror system is mainly composed of 2 reflecting mirrors capable of rotating around the axis and a micro motor for controlling the deflection of the reflecting mirrors, and the light path in the vibrating mirror system in the non-electrified zeroing state is as follows: the laser beam is horizontally incident on the side surface, the first reflector reflects the light path to the other reflector, and the laser beam is vertically emergent on the bottom surface through the second reflector. The first reflecting mirror is responsible for x-axis beam scanning in the galvanometer system, the second reflecting mirror is responsible for y-axis beam scanning, emergent light of the galvanometer system in a non-energized and zero-returning state is vertical, and emergent laser of the galvanometer system in a working state can deflect in a cone angle space at a light outlet at the bottom of the galvanometer.
The laser scanning field lens is an optical piece assembled behind the galvanometer system and is used for focusing the light beams deflected by the galvanometer system (a series of light beams with different incident angles for the field lens) on a processing surface so as to realize the material reduction processing of the ultrafast laser on the material.
Laser scanning mirrors can be broadly divided into two types, namely a "laser scanning flat mirror" and a "laser scanning telecentric flat mirror", the former is often colloquially called a "flat mirror", and the latter is often colloquially called a "telecentric mirror". The term "telecentric" in the field of laser scanning field mirrors refers to the Angle between the Angle of incidence of a laser beam exiting through the field mirror and focused on the processing surface and the normal vector of the processing surface, which is also commonly referred to as the Chief Ray Angle (CRA).
The laser scanning flat field lens is not provided with a telecentric design, only light rays emitted from the center of the field lens (when the vibrating lens does not deflect the light beam) can be vertically focused on the processing surface, and light rays emitted from the edge of the field lens (when the vibrating lens deflects the light beam) can be obliquely focused on the processing surface. The optical design of a laser scanning telecentric flat field lens requires that the CRA of the whole focal plane (namely the surface processing surface of the material) is designed to be smaller in value (< 5 degrees), so that the laser beams emitted from the center and the edge of the field lens can be vertically focused on the processing surface. The outgoing angles of outgoing rays of different areas of the focal plane of the conventional laser scanning field lens are not consistent, which leads to inconsistent hole inclination processed by the different areas when the conventional laser scanning field lens is used for laser drilling, and compared with the conventional field lens, the telecentric field lens has the advantages that light beams under the whole outgoing breadth of the telecentric field lens can be kept almost perpendicular to a processing surface, and consistent drilling inclination of the whole processing surface is kept.
The telecentricity design performance of the existing laser scanning telecentric field lens is basically controlled to be about 2 degrees to 5 degrees, and along with the rapid development of a laser fine processing technology, the telecentricity is insufficient to meet the processing requirement in a laser fine drilling system, so that an ultraviolet laser telecentric field lens with smaller telecentricity is required.
Disclosure of Invention
The utility model aims to provide an ultraviolet laser telecentric scanning field lens which can provide an ultraviolet laser telecentric scanning field lens with smaller telecentricity, is beneficial to the field of laser fine processing to improve the processing precision, and further optimizes the drilling inclination under the processing breadth of a single field lens.
In order to achieve the above object, the present utility model provides the following solutions:
an ultraviolet laser telecentric scan field lens comprising:
the optical lens comprises a first protective lens with a flat plate structure, a first lens with a meniscus structure and a focal length of negative, a second lens with a meniscus structure and a focal length of positive, a third lens with a meniscus structure and a focal length of positive, a fourth lens with a biconvex structure and a focal length of positive, a fifth lens with a meniscus structure and a focal length of positive and a second protective lens with a flat plate structure, which are sequentially arranged along the light beam propagation direction.
Optionally, the ultraviolet laser telecentric scan field lens further includes: an entrance pupil plane and an image plane; the entrance pupil plane and the first protective mirror are arranged along the beam propagation direction, and the second protective mirror and the image plane are arranged along the beam propagation direction; the air interval between the entrance pupil plane and the first protective lens is 40.27mm, the air interval between the first protective lens and the first lens is 12.38mm, the air interval between the first lens and the second lens is 9.89mm, the air interval between the second lens and the third lens is 2.69mm, the air interval between the third lens and the fourth lens is 1.70mm, the air interval between the fourth lens and the fifth lens is 1.70mm, the air interval between the fifth lens and the second protective lens is 6.14mm, and the air interval between the second protective lens and the image plane is 136.97mm.
Optionally, the first protective mirror and the second protective mirror are both plate glass with the thickness of 4 mm.
Optionally, the front and rear side curvature radius of the first lens is-25.92 mm and-242.45 mm respectively, and the center thickness of the first lens is 3.20mm.
Optionally, the radius of curvature of the front side and the rear side of the second lens are-65.77 mm and-38.61 mm respectively, and the center thickness of the second lens is 11.10mm.
Optionally, the radius of curvature of the front side and the rear side of the third lens are-316.01 mm and-55.66 mm respectively, and the center thickness of the third lens is 12.99mm.
Optionally, the curvature radius of the front side and the rear side of the fourth lens is 352.03mm and-151.40 mm respectively, and the center thickness of the fourth lens is 13.21mm.
Optionally, the front and rear side curvature radii of the fifth lens are 147.31mm and 415.70mm, respectively, and the center thickness of the fifth lens is 14.00mm.
Optionally, the effective focal length of the ultraviolet laser telecentric scan field lens is 105.01mm.
Optionally, the first protective lens, the first lens, the second lens, the third lens, the fourth lens, the fifth lens and the second protective lens are all made of fused silica glass, and the abbe number is 67.8.
According to the specific embodiment provided by the utility model, the utility model discloses the following technical effects:
the ultraviolet laser telecentric scanning field lens provided by the utility model comprises a first protective lens with a flat plate structure, a first lens with a meniscus structure and a negative focal length, a second lens with a meniscus structure and a positive focal length, a third lens with a meniscus structure and a positive focal length, a fourth lens with a biconvex structure and a positive focal length, a fifth lens with a meniscus structure and a positive focal length and a second protective lens with a flat plate structure, which are sequentially arranged along the light beam propagation direction.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions of the prior art, the drawings that are needed in the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an ultraviolet laser telecentric scan field lens structure provided by the utility model;
FIG. 2 is an astigmatism evaluation chart obtained by processing an ultraviolet laser telecentric scan field lens provided by an embodiment of the utility model by simulation software;
FIG. 3 is an F-THETA distortion evaluation chart obtained by adopting simulation software to process the ultraviolet laser telecentric scanning field lens provided by the embodiment of the utility model;
fig. 4 is a focal plane point list obtained by processing the ultraviolet laser telecentric scan field lens provided by the embodiment of the utility model by simulation software.
Symbol description:
an entrance pupil plane-1, a first protective LENS-SG 1, a first LENS-LENS 1, a second LENS-LENS 2, a third LENS-LENS 3, a fourth LENS-LENS 4, a fifth LENS-LENS 5, a second protective LENS-SG 2, a focal plane-2.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description.
As shown in fig. 1, an embodiment of the present utility model provides an ultraviolet laser telecentric scan field lens, including:
the first protection LENS SG1 with a flat plate structure, the first LENS1 with a meniscus structure and a positive focal length, the second LENS2 with a meniscus structure and a positive focal length, the third LENS3 with a meniscus structure and a positive focal length, the fourth LENS4 with a biconvex structure and a positive focal length, the fifth LENS5 with a meniscus structure and a positive focal length and the second protection LENS SG2 with a flat plate structure are sequentially arranged along the light beam propagation direction (optical axis direction). The protective lens has the function of separating the outside from the inside lens to prevent smoke dust generated in the processing process from polluting and damaging the surface of the lens.
In practical application, the ultraviolet laser telecentric scan field lens further comprises: the two virtual surfaces are respectively an entrance pupil surface 1 arranged at the deflection position of the galvanometer beam and an image surface arranged at the focal plane 2 of the field lens; the entrance pupil plane 1 and the first protection mirror SG1 are arranged along the beam propagation direction, the entrance pupil plane 1 is arranged at the front end of the first protection mirror SG1 along the beam propagation direction, the second protection mirror SG2 and the image plane are arranged along the beam propagation direction, and the image plane is arranged at the rear end of the second protection mirror SG2 along the beam propagation direction; the air gap between the entrance pupil plane 1 and the first protective LENS SG1 is 40.27mm, the air gap between the first protective LENS SG1 and the first LENS1 is 12.38mm, the air gap between the first LENS1 and the second LENS2 is 9.89mm, the air gap between the second LENS2 and the third LENS3 is 2.69mm, the air space between the third LENS3 and the fourth LENS4 is 1.70mm, the air space between the fourth LENS4 and the fifth LENS5 is 1.70mm, the air space between the fifth LENS5 and the second protective LENS SG2 is 6.14mm, and the air space between the second protective LENS SG2 and the image plane is 136.97mm.
In practical application, the first protection lens SG1 and the second protection lens SG2 are both sheet glass with a thickness of 4 mm.
In practical application, the front and rear side curvature radiuses of the first LENS1 are-25.92 mm and-242.45 mm respectively, and the center thickness of the first LENS1 is 3.20mm.
In practical application, the front and back side curvature radiuses of the second LENS2 are-65.77 mm and-38.61 mm respectively, and the center thickness of the second LENS2 is 11.10mm.
In practical application, the radius of curvature of the front side and the rear side of the third LENS3 are respectively-316.01 mm and-55.66 mm, and the center thickness of the third LENS3 is 12.99mm.
In practical application, the radii of curvature of the front side and the rear side of the fourth LENS4 are 352.03mm and-151.40 mm respectively, and the center thickness of the fourth LENS4 is 13.21mm.
In practical application, the radii of curvature of the front side and the rear side of the fifth LENS5 are 147.31mm and 415.70mm, respectively, and the center thickness of the fifth LENS5 is 14.00mm.
In practical applications, the first protective LENS SG1, the first LENS1, the second LENS2, the third LENS3, the fourth LENS4, the fifth LENS5 and the second protective LENS SG2 are all made of fused silica glass, and have a refractive index of 1.46 and an abbe number of 67.8.
In practical application, the effective focal length of the ultraviolet laser telecentric scan field lens provided by the embodiment of the utility model is 105.01mm, the design wavelength is 355nm, the maximum incident laser beam diameter (entrance pupil diameter) can be supported to be 10mm, the scan field 2 w=42°, and the geometric optical structure is shown in table 1.
Table 1 lens geometry optical structure parameter table
The ultraviolet laser telecentric scanning field lens provided by the embodiment of the utility model is suitable for working environment of 355nm ultraviolet high-power picosecond pulse laser material reduction processing, and is used as an optical system (laser lens), a series of laser beams with different emergence angles, which are deflected by a front optical piece 'galvanometer', are focused on the same focal plane (processing surface) perpendicular to an optical axis in a light path, the aberration correction at 355nm wavelength is good, the maximum galvanometer deflection angle can be supported to be 21 degrees, the edge telecentricity of the focal plane is less than 0.5 degrees, and the telecentricity of the focal plane is closer to the central area and is less than 0.1 degrees. As shown in fig. 2, the astigmatism is smaller than 50um, so that the reduction of processing precision caused by the lower roundness of a focusing light spot of laser in out-of-focus processing is avoided; as shown in FIG. 3, the maximum F-THETA distortion is not more than 1.06%, so that the calibration degree of the front-end optical element galvanometer system can be effectively reduced; as shown in table 2, the telecentricity of the emergent beam is smaller than 0.45 degrees, which is beneficial to keeping the consistency of the processing taper under the single galvanometer block processing breadth; as shown in fig. 4, the focal plane RMS diffuse spot diameter on the axis of the field lens is smaller than 3.4um, the edge focal plane RMS diffuse spot diameter is smaller than 3.997um, and the processing fineness and the laser processing line width consistency under the single galvanometer block processing breadth are good.
Table 2 lens focal plane telecentricity parameter table
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.
The principles and embodiments of the present utility model have been described herein with reference to specific examples, the description of which is intended only to assist in understanding the methods of the present utility model and the core ideas thereof; also, it is within the scope of the present utility model to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the utility model.
Claims (10)
1. An ultraviolet laser telecentric scan field lens, comprising:
the optical lens comprises a first protective lens with a flat plate structure, a first lens with a meniscus structure and a focal length of negative, a second lens with a meniscus structure and a focal length of positive, a third lens with a meniscus structure and a focal length of positive, a fourth lens with a biconvex structure and a focal length of positive, a fifth lens with a meniscus structure and a focal length of positive and a second protective lens with a flat plate structure, which are sequentially arranged along the light beam propagation direction.
2. The ultraviolet laser telecentric scan field lens of claim 1, further comprising: an entrance pupil plane and an image plane; the entrance pupil plane and the first protective mirror are arranged along the beam propagation direction, and the second protective mirror and the image plane are arranged along the beam propagation direction; the air interval between the entrance pupil plane and the first protective lens is 40.27mm, the air interval between the first protective lens and the first lens is 12.38mm, the air interval between the first lens and the second lens is 9.89mm, the air interval between the second lens and the third lens is 2.69mm, the air interval between the third lens and the fourth lens is 1.70mm, the air interval between the fourth lens and the fifth lens is 1.70mm, the air interval between the fifth lens and the second protective lens is 6.14mm, and the air interval between the second protective lens and the image plane is 136.97mm.
3. The ultraviolet laser telecentric scan field lens of claim 1, wherein the first and second protection mirrors are both sheet glass having a thickness of 4 mm.
4. The ultraviolet laser telecentric scan field lens of claim 1, wherein the radius of curvature of the front and back sides of the first lens is-25.92 mm and-242.45 mm, respectively, and the center thickness of the first lens is 3.20mm.
5. The ultraviolet laser telecentric scan field lens of claim 1, wherein the radius of curvature of the front and rear sides of the second lens is-65.77 mm and-38.61 mm, respectively, and the center thickness of the second lens is 11.10mm.
6. The ultraviolet laser telecentric scan field lens of claim 1, wherein the radius of curvature of the front and rear sides of the third lens is-316.01 mm and-55.66 mm, respectively, and the center thickness of the third lens is 12.99mm.
7. The ultraviolet laser telecentric scan field lens of claim 1, wherein the front and back side radii of curvature of the fourth lens are 352.03mm and-151.40 mm, respectively, and the center thickness of the fourth lens is 13.21mm.
8. The ultraviolet laser telecentric scan field lens of claim 1, wherein the radius of curvature of the front and rear sides of the fifth lens is 147.31mm and 415.70mm, respectively, and the center thickness of the fifth lens is 14.00mm.
9. The ultraviolet laser telecentric scan field lens of claim 1, wherein the effective focal length of the ultraviolet laser telecentric scan field lens is 105.01mm.
10. The ultraviolet laser telecentric scan field lens of claim 1, wherein the first protective lens, the first lens, the second lens, the third lens, the fourth lens, the fifth lens and the second protective lens are all fused silica glass materials with abbe numbers of 67.8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322327735.2U CN220347449U (en) | 2023-08-29 | 2023-08-29 | Ultraviolet laser telecentric scanning field lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322327735.2U CN220347449U (en) | 2023-08-29 | 2023-08-29 | Ultraviolet laser telecentric scanning field lens |
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| Publication Number | Publication Date |
|---|---|
| CN220347449U true CN220347449U (en) | 2024-01-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322327735.2U Active CN220347449U (en) | 2023-08-29 | 2023-08-29 | Ultraviolet laser telecentric scanning field lens |
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| Country | Link |
|---|---|
| CN (1) | CN220347449U (en) |
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- 2023-08-29 CN CN202322327735.2U patent/CN220347449U/en active Active
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