CN208110151U - A kind of F-Theta camera lens - Google Patents
A kind of F-Theta camera lens Download PDFInfo
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- CN208110151U CN208110151U CN201820712082.6U CN201820712082U CN208110151U CN 208110151 U CN208110151 U CN 208110151U CN 201820712082 U CN201820712082 U CN 201820712082U CN 208110151 U CN208110151 U CN 208110151U
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Abstract
The utility model discloses a kind of F-Theta camera lenses, and including the first lens, the second lens, the third lens and the diaphragm set gradually along light incident direction, the first lens are positive lens, and the second lens are negative lens, and the third lens are positive lens.The utility model F-Theta camera lens can be used for drilling processing, be able to satisfy drilling requirements, and particularly suitable for the production of small size pores, circularity height, hole of uniform size can be obtained.
Description
Technical field
The utility model relates to a kind of F-Theta camera lens (also referred to as scanning lens or field lens, hereinafter referred to as field lens), main
To be applied to the drilling processing of PCB, belong to optical field.
Background technique
Field lens is a kind of and matching used optical scanner amasthenic lens of galvanometer, and the major diameter light beam that will be incident on galvanometer passes through
After the reflector alignment incident angle of galvanometer, workpiece surface is focused on, realization in a specific range drills to workpiece, welds
Connect, cut, marking, it is interior carving etc. processing operation.
The important technological parameters of field lens have：Optical maser wavelength, focal length (FFL), scanning range, flange distance (BFL), working distance
(WD) and launching spot diameter etc.；Have with the associated parameter of galvanometer：Back gauge is leaned on away from, Y reflective mirror in the center of bis- reflective mirrors of XY
It returns the benefit with after.Main performance index has：The flat field of focusing surface, the size of focal beam spot, circularity, uniformity and depth of focus etc.；With
The associated performance indicator of laser energy has：Threshold for resisting laser damage, laser energy transmitance, permeability uniformity and focus temp
Drift characteristic.
Different applications has different emphasis to the performance indicator of F-Theta, without all to all index faces face
It arrives, otherwise cost will greatly improve.In drilling field, it is desirable that each hole must be cylindrical hole rather than conical bore, while
Center hole and marginal position hole will keep in the same size in job area, and the circularity requirement in hole is very high.Common F-
Theta is not able to satisfy boring requirement.
Utility model content
In order to solve the defects of F-Theta is not able to satisfy boring requirement in the prior art, the utility model provides a kind of F-
Theta camera lens.
In order to solve the above technical problems, technical solution used by the utility model is as follows：
A kind of F-Theta camera lens, the first lens, the second lens, third including setting gradually along light incident direction are saturating
Mirror and diaphragm, the first lens are positive lens, and the second lens are negative lens, and the third lens are positive lens.
Above-mentioned F-Theta camera lens is able to satisfy the particular requirement of bore operation.
In order to further increase the accuracy of F-Theta camera lens, the first lens, the second lens and the third lens are germainium lens
Or zinc selenide lens.
In order to further increase the uniformity and centrality of the positioning of high beam focus, along light incident direction, the first lens
Including opposite first surface and the second curved surface, the radius of curvature of first surface is 680mm, and the radius of curvature of the second curved surface is
680mm, the center thickness of the first lens are 7mm；Along light incident direction, the second lens include opposite third curved surface and the 4th
Curved surface, the radius of curvature of third curved surface are -282mm, and the radius of curvature of the second curved surface is -282mm, the center thickness of the second lens
For 7mm；Along light incident direction, the third lens include opposite the 5th curved surface and the 6th curved surface, the radius of curvature of the 5th curved surface
For infinity, the radius of curvature of the 6th curved surface is 406mm, and the center thickness of the third lens is 11mm.
In order to further increase the accuracy of beam focus positioning, the center spacing between the first lens and the second lens is
4.6mm, center spacing between the second lens and the third lens are 70.94mm, between the center between the third lens and diaphragm
Away from for 3.27mm.
The application can be assembled using existing method, and microscope base can use existing microscope base, preferably, microscope base
It can be the bell mouth shape of the one end one end great Kou osculum, the first lens and the second lens are installed in the osculum end in microscope base, third
Lens and diaphragm are installed in the big opening end in microscope base.
In order to further increase the stability of assembly, it is ensured that the lens face shape deflection precision for assembling front and back, in the osculum end of microscope base
End be equipped with retaining ring, less than the outer diameter of the first lens, the first lens are close to retaining ring setting for the internal diameter of retaining ring, the first lens and the
Two lens are fixed in microscope base by the first spacer ring interval, the second lens by the first pressing ring；Diaphragm is solid by window bar
It is scheduled on the end in big opening end, the third lens and diaphragm to fix by the second transition ring and the second pressing ring interval, enter along light
Direction is penetrated, the third lens, the second transition ring, the second pressing ring and diaphragm are followed successively by.
The application spacer ring is retaining ring, spacer ring, pressing ring, window bar, transition ring and elasticity in order to which two parts spaces come
Washer is existing commercially available components.
In order to further increase the stability of assembly, while lens damage is prevented, is set between the first pressing ring and the second lens
There are First Transition circle and elastic washer, along light incident direction, is followed successively by the second lens, First Transition circle, elastic washer and
One pressing ring.
The application F-Theta camera lens, focal length 150mm, wavelength are 9.4 μm, telecentricity≤2.23 °, optical scan angle
It is 22.6 °, focal beam spot size is 126-128 μm, incident beam diameter 20mm.
With the rapid development of the modern industry and science and technology, material big using hardness, that fusing point is high is more and more, and passes
The processing method of system has been unable to meet certain technique requirements, and compared with conventional punching means, the application has following significant excellent
Point：Trepanning velocity is fast, high-efficient, good in economic efficiency；It can get big aspect ratio；It can be enterprising in the various types of materials such as hard, crisp, soft
Row；Without tool loss；It is suitable for that quantity is more, highdensity group's hole machined；Can on difficult-to-machine material inclined surface machining small.
The unmentioned technology of the utility model is referring to the prior art.
The utility model F-Theta camera lens can be used for drilling processing, be able to satisfy drilling requirements, obtain all size hole
Production, the especially production hole of 0.25mm (diameter be less than) of small size pores, and the circularity in gained hole is high, uniform in size；It is suitable
In the drilling of various materials, especially hard and frangible material, such as ceramics and jewel.
Detailed description of the invention
Fig. 1 is the index path of the utility model F-Theta camera lens；
Fig. 2 is the point range figure of the utility model F-Theta camera lens；
Fig. 3 be the utility model F-Theta camera lens+- 0.4mm defocus point range figure；
Fig. 4 is that the light of the utility model F-Theta camera lens fans figure；
Fig. 5 is the wave front chart of the utility model F-Theta camera lens；
Fig. 6 is the curvature of field distortion figure of the utility model F-Theta camera lens；
Fig. 7 is the scanning light spot figure of the utility model F-Theta camera lens；
Fig. 8 is the structural schematic diagram of the utility model F-Theta camera lens；
Fig. 9 is the left view of Fig. 8；
Figure 10 is the striograph of the actual job peripheral field point set of the utility model F-Theta camera lens；
In figure, 1. microscope bases, 2. first spacer rings, 3. First Transition circles, 4. elastic washers, 5. first pressing rings, 6. second spacer rings,
7. the second transition ring, 8. lock-screws, 9. handles, 10. elastic washers, 11. window bars, 12. second pressing rings, 13. positioning rings,
14.O type circle, 15. third pressing rings, 16. diaphragms, 17. the third lens, 18. second lens, 19. first lens.
Specific embodiment
The utility model in order to better understand furthers elucidate the content of the utility model below with reference to embodiment, but
The content of the utility model is not limited solely to the following examples.
Embodiment 1
As shown in Figure 8：A kind of F-Theta camera lens, including set gradually along light incident direction the first lens, second thoroughly
Mirror, the third lens and diaphragm, the first lens are positive lens, and the second lens are negative lens, and the third lens are positive lens；In Fig. 8,
The realization part parallel with the first lens, the second lens, the third lens and diaphragm other than various pressing rings, washer, transition ring,
Remaining is the stepped wheel profile of microscope base inner surface；
First lens include opposite first surface and the second curved surface, and the radius of curvature of first surface is 680mm, and second is bent
The radius of curvature in face is 680mm, and the center thickness of the first lens is 7mm；Second lens include opposite third curved surface and the 4th
Curved surface, the radius of curvature of third curved surface are -282mm, and the radius of curvature of the second curved surface is -282mm, the center thickness of the second lens
For 7mm；The third lens include opposite the 5th curved surface and the 6th curved surface, and the radius of curvature of the 5th curved surface is infinity, and the 6th is bent
The radius of curvature in face is 406mm, and the center thickness of the third lens is 11mm；Along light incident direction, the arrangement order of curved surface according to
It is secondary to be：First surface, the second curved surface, third curved surface, the 4th curved surface, the 5th curved surface and the 6th curved surface；
Center spacing between first lens and the second lens is 4.6mm, the center between the second lens and the third lens
Spacing is 70.94mm, and the center spacing between the third lens and diaphragm is 3.27mm；
First lens are germainium lens, and the second lens and the third lens are zinc selenide lens；
Above-mentioned F-Theta camera lens assembly will with reduce lens pressure distortion and temperature deformation as the main purpose, use
The modes such as location at spherical surface, transition ring, elastic washer, pressing ring, accessory used can be the materials such as aircraft aluminum, brass, excellent power glue,
Diaphragm uses separate structure, is conveniently replaceable, existing usual manner can be used in specific assembly method.
As shown, the microscope base of F-Theta camera lens can be such as flowering structure：Microscope base is the loudspeaker of the one end one end great Kou osculum
Mouth shape, the first lens and the second lens are installed in the osculum end in microscope base, and the third lens and diaphragm are installed in big in microscope base
Mouth end；End in the osculum end of microscope base is equipped with retaining ring, outer diameter of the internal diameter less than the first lens of retaining ring, the first lens abutting gear
By the first spacer ring interval, the second lens are fixed in microscope base by the first pressing ring for circle setting, the first lens and the second lens；Window
Mouth piece is fixed on the end in big opening end by window bar, and the third lens and diaphragm pass through the second transition ring and the second pressing ring
Interval is fixed, and along light incident direction, is followed successively by the third lens, the second transition ring, the second pressing ring and diaphragm；
First Transition circle and elastic washer is equipped between first pressing ring and the second lens to be followed successively by along light incident direction
Second lens, First Transition circle, elastic washer and the first pressing ring can play the role of further fixed and protection in this way；
Using the face deformation before and after the assembly of interferometer detection lens；The concentricity of lens uses reflective Spot detection
The center for monitoring every eyeglass is inclined, installs piecewise；The detection of the verticality of screw-on surface and optical centre axis carries out simultaneously.
Field lens detection method：Test material is acrylic transparent panel, and test scope 82x82 includes 33X33 point set, often
11 points of a point set, defocus ± 200u, ± 400u, ± 600u, ± 800u, ± 1mm each two, as shown in Figure 10, is surveyed by focus one
Test result：No matter center point set or marginal point are concentrated, and hot spot circularity all meets requirement after focal position, defocus, whole
Hot spot uniformity is good.
The technical parameter of above-mentioned F-Theta camera lens is as follows：
Focal length：150mm；Wavelength：9.4μm；Telecentricity：≤2.23°；Range：82×82mm2(square millimeter)；Optics is swept
Retouch angle：22.6°；Focal beam spot size：126-128μm；Incident beam diameter：20mm；
Galvanometer：M1-M2=26.4mm, M2-Surface (surface)=40.7mm；M1 is X-direction galvanometer reflective mirror, M2 Y
Direction galvanometer reflective mirror, Surface are field lens rear end face.
As can be seen from Figure 2, focal plane position, focal beam spot all very littles of center and peripheral point, within Airy, and
Hot spot circularity is relatively good；From figure 3, it can be seen that the hot spot after defocus is also within Airy；As can be seen from Figure 4, all field images
Dissipate, coma correction it is relatively good, have micro spherical aberration.As can be seen from Figure 5, all visual field wavefront differences are not more than 1/10 λ；It can from Fig. 6
Out, the curvature of field is within 0.2, and meridian and Sagittal field curvature are almost the same, has fully ensured that the circularity of hot spot；As can be seen from Figure 7,
Minimax spot diameter difference only has 1.4um, and uniformity is guaranteed；Figure 10 is the shadow of actual job peripheral field point set
As figure, have mark point be focal plane on point, remaining be respectively defocus ± 200um, ± 400um, ± 600um, ± 800um, ±
Effect after 1000um, circularity, depth of focus performance are good.
Claims (10)
1. a kind of F-Theta camera lens, it is characterised in that：Including set gradually along light incident direction the first lens, second thoroughly
Mirror, the third lens and diaphragm, the first lens are positive lens, and the second lens are negative lens, and the third lens are positive lens.
2. F-Theta camera lens as described in claim 1, it is characterised in that：First lens, the second lens and the third lens are germanium
Lens or zinc selenide lens.
3. F-Theta camera lens as claimed in claim 1 or 2, it is characterised in that：Along light incident direction, the first lens include
Opposite first surface and the second curved surface, the radius of curvature of first surface are 680mm, and the radius of curvature of the second curved surface is 680mm,
The center thickness of first lens is 7mm.
4. F-Theta camera lens as claimed in claim 1 or 2, it is characterised in that：Along light incident direction, the second lens include
Opposite third curved surface and the 4th curved surface, the radius of curvature of third curved surface are -282mm, the radius of curvature of the second curved surface is -
282mm, the center thickness of the second lens are 7mm.
5. F-Theta camera lens as claimed in claim 1 or 2, it is characterised in that：Along light incident direction, the third lens include
The radius of curvature of the 5th opposite curved surface and the 6th curved surface, the 5th curved surface is infinity, and the radius of curvature of the 6th curved surface is
406mm, the center thickness of the third lens are 11mm.
6. F-Theta camera lens as claimed in claim 1 or 2, it is characterised in that：Center between first lens and the second lens
Spacing is 4.6mm, and the center spacing between the second lens and the third lens is 70.94mm, between the third lens and diaphragm
Center spacing is 3.27mm.
7. F-Theta camera lens as claimed in claim 1 or 2, it is characterised in that：It further include microscope base, microscope base is the big mouth one in one end
The bell mouth shape of osculum is held, the first lens and the second lens are installed in the osculum end in microscope base, the third lens and diaphragm installing
Big opening end in microscope base.
8. F-Theta camera lens as claimed in claim 1 or 2, it is characterised in that：End in the osculum end of microscope base is equipped with gear
Circle, less than the outer diameter of the first lens, the first lens are close to retaining ring setting, the first lens and the second lens by for the internal diameter of retaining ring
One spacer ring interval, the second lens are fixed in microscope base by the first pressing ring；Diaphragm is fixed in big opening end by window bar
End, the third lens and diaphragm are fixed by the second transition ring and the second pressing ring interval, along light incident direction, are followed successively by
The third lens, the second transition ring, the second pressing ring and diaphragm.
9. F-Theta camera lens as claimed in claim 8, it is characterised in that：First is equipped between first pressing ring and the second lens
Transition ring and elastic washer are followed successively by the second lens, First Transition circle, elastic washer and the first pressing ring along light incident direction.
10. F-Theta camera lens as claimed in claim 1 or 2, it is characterised in that：Focal length is 150mm, and wavelength is 9.4 μm, far
Heart degree≤2.23 °, optical scan angle are 22.6 °, and focal beam spot size is 126-128 μm, incident beam diameter 20mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820712082.6U CN208110151U (en) | 2018-05-14 | 2018-05-14 | A kind of F-Theta camera lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820712082.6U CN208110151U (en) | 2018-05-14 | 2018-05-14 | A kind of F-Theta camera lens |
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| Publication Number | Publication Date |
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| CN208110151U true CN208110151U (en) | 2018-11-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108415147A (en) * | 2018-05-14 | 2018-08-17 | 南京波长光电科技股份有限公司 | A kind of F-Theta camera lenses |
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- 2018-05-14 CN CN201820712082.6U patent/CN208110151U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108415147A (en) * | 2018-05-14 | 2018-08-17 | 南京波长光电科技股份有限公司 | A kind of F-Theta camera lenses |
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