CN220340010U - Long optical path optical cavity - Google Patents

Long optical path optical cavity Download PDF

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Publication number
CN220340010U
CN220340010U CN202320690634.9U CN202320690634U CN220340010U CN 220340010 U CN220340010 U CN 220340010U CN 202320690634 U CN202320690634 U CN 202320690634U CN 220340010 U CN220340010 U CN 220340010U
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China
Prior art keywords
light source
reflecting mirror
detector
diaphragm hole
air chamber
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CN202320690634.9U
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Chinese (zh)
Inventor
陈海永
杨清永
张伟华
徐春杰
祖兵雷
赵丽艳
王军锋
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Hanwei Electronics Group Corp
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Hanwei Electronics Group Corp
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Priority to CN202320690634.9U priority Critical patent/CN220340010U/en
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Abstract

The utility model provides a long-optical-path optical cavity, which comprises a light source, an air chamber, a detector, a first reflecting mirror, a second reflecting mirror, a first diaphragm hole and a second diaphragm hole, wherein the first diaphragm hole is arranged on the first reflecting mirror; the first reflecting mirror and the second reflecting mirror are respectively arranged at two ends of the air chamber, the first reflecting mirror and the second reflecting mirror are concave mirrors, and the first reflecting mirror, the second reflecting mirror and the air chamber form a closed space; the first diaphragm hole is arranged at the center of the first reflecting mirror, and the second diaphragm hole is arranged at the center of the second reflecting mirror; the detector is arranged at the rear end of the first diaphragm hole, the light source is arranged at the rear end of the second diaphragm hole, and the light source is a light source with a divergence angle. The long-optical-path optical cavity has the advantages of longer optical path and more balanced structure of the optical cavity.

Description

Long optical path optical cavity
Technical Field
The utility model relates to the technical field of optical gas sensors, in particular to a long-optical-path optical cavity.
Background
In the technical field of optical gas sensors, the development of the sensor is towards long service life, high precision, small volume, poisoning resistance and the like, wherein the high precision and the small volume are a pair of parameters which are mutually contained, and the proper balance of the two is always pursued by a person skilled in the art.
The core component that determines the sensor volume and performance is the optical cavity.
Therefore, in order to improve the performance on the premise of controlling the volume to be as small as possible, the most direct means is to modify the optical cavity.
Currently, the optical cavity mainly includes a classical white cavity, for example, an utility model patent with application number 201920322342.3, in which a large concave mirror is used on one side, and two small concave mirrors are used on the other side, so that the optical path is prolonged by multiple reflections.
Another example is a classical white cavity, such as the utility model of application number 201310282801.7, which uses two large concave mirrors to extend the optical path through multiple reflections.
The incident end and the receiving end of the two classical white cavities are positioned at the upper end and the lower end of the same side, and the structure of the classical white cavities is solidified, so that the extension degree of the optical path is limited.
In order to solve the above problems, an ideal technical solution is always sought.
Disclosure of Invention
The utility model aims at overcoming the defects of the prior art, and provides a long-optical-path optical cavity with longer optical path and more balanced structure.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows: a long-optical-path optical cavity comprises a light source, an air chamber, a detector, a first reflecting mirror, a second reflecting mirror, a first diaphragm hole and a second diaphragm hole;
the first reflecting mirror and the second reflecting mirror are respectively arranged at two ends of the air chamber, the first reflecting mirror and the second reflecting mirror are concave mirrors, and the first reflecting mirror, the second reflecting mirror and the air chamber form a closed space;
the first diaphragm hole is arranged at the center of the first reflecting mirror, and the second diaphragm hole is arranged at the center of the second reflecting mirror;
the receiving surface of the detector is arranged at the rear end of the first diaphragm hole, the emitting surface of the light source is arranged at the rear end of the second diaphragm hole, and the light source is a light source with a divergence angle;
the off-axis light in the light beam is reflected by the first reflecting mirror and the second reflecting mirror for N times, is converged to the first diaphragm hole and is projected on the receiving surface of the detector, wherein N is more than or equal to 2.
The light source and the detector are both positioned on the same axis where the first diaphragm aperture and the second diaphragm aperture are connected.
The light source is a mes light source.
The first diaphragm hole is formed on the first reflecting mirror, and the second diaphragm hole is formed on the second reflecting mirror.
The diameters of the first diaphragm hole and the second diaphragm hole are 1mm-3mm.
The air inlet and the air outlet of the air chamber are arranged at two ends of the side part of the air chamber.
Based on the above, the outer diameters of the first reflecting mirror and the second reflecting mirror are more than or equal to 90% of the inner diameters of the two ends of the air chamber, and the outer peripheral surfaces of the first reflecting mirror and the second reflecting mirror are in sealing connection with the two ends of the air chamber through sealing rings.
And the reflectivity of the coating film is more than or equal to 95 percent.
The light source fixing seat and the detector fixing seat are respectively arranged at two ends of the air chamber, the light source is arranged in the light source fixing seat, the light source end cover is arranged outside the light source fixing seat, the rear end of the light source is connected with the light source tube needle through the light source circuit board, and the fixed end of the light source, the light source circuit board and the light source tube needle are fixed on the light source fixing seat through epoxy resin sealing glue; the detector is installed in the detector fixing seat through the insulating spacer ring, the detector end cover is installed outside the detector fixing seat, the rear end of the detector is connected with the detector tube needle through the detector circuit board, and the detector, the detector circuit board and the detector tube needle are fixed on the detector fixing seat through epoxy resin sealing glue.
Compared with the prior art, the utility model has substantial characteristics and progress, and in particular has the following advantages:
1. the two reflectors are respectively arranged at two ends of the air chamber, the light source and the detector are arranged at the rear of the two reflectors, the light path is in and out of the two reflectors, the reflection path of the effective light path of the off-axis light beam is longer than the direct outgoing path of the beamlets.
2. The light source is a mems light source, the light source has a certain divergence angle, the size of the two diaphragm holes is smaller, only a light beam with a very small duty ratio can directly enter the receiving surface of the detector along the axis, and the rest light beams reach the receiving surface of the detector through multiple reflections of the two reflectors, so that the optical path can be effectively prolonged.
Drawings
FIG. 1 is a schematic diagram of a long path optical cavity of the present utility model.
Fig. 2 is an exploded view of a long path optical cavity of the present utility model.
Fig. 3 is a schematic diagram of the optical path of a long path optical cavity of the present utility model.
Fig. 4 is an optical simulation of a long path optical cavity in accordance with the present utility model.
Fig. 5 is a diagram of the detector end configuration of the long path optical cavity of the present utility model.
Fig. 6 is a view showing a light source end structure of the long optical path optical cavity of the present utility model.
In the figure: 1. a probe pin; 2. a detector cover plate; 3. a detector circuit board; 4. a detector; 5. an insulating spacer; 6. a detector fixing seat; 7. a first mirror; 8.O ring; 9. a gas chamber; 10. an air inlet pipe joint; 11. the air outlet pipe joint; a arms light source window; 13. a second mirror; 14. a light source fixing seat; 15. a light source; 16. a light source circuit board; 17. a light source cover plate; 18. a first diaphragm aperture; 19. a second diaphragm aperture; 20. a light source tube needle; 21. incident light; 22. light is emitted.
Detailed Description
The technical scheme of the utility model is further described in detail through the following specific embodiments.
As shown in fig. 1 to 6, a long optical path optical cavity comprises a detector tube needle 1, a detector cover plate 2, a detector circuit board 3, a detector 4, an insulating spacer ring 5, a detector fixing seat 6, a first reflecting mirror 7, an O-ring 8, an air chamber 9, an air inlet tube connector 10, an air outlet tube connector 11, a mes light source window 12, a second reflecting mirror 13, a light source fixing seat 14, a light source 15, a light source circuit board 16, a light source cover plate 17, a first diaphragm hole 18 and a second diaphragm hole 19.
The first reflecting mirror 7 and the second reflecting mirror 13 are respectively arranged at two ends of the air chamber through O-shaped rings 8, and the outer diameters of the first reflecting mirror 7 and the second reflecting mirror 13 are close to the inner diameters of the two ends of the air chamber, and are usually more than or equal to 90%, so that the area of the reflecting surface is increased as much as possible.
The first reflecting mirror 7 and the second reflecting mirror 13 are concave mirrors, the surfaces of the concave mirrors are adhered with reflecting films, the reflecting films have high reflectivity for light of corresponding wave bands, generally more than or equal to 95%, and the first reflecting mirror 7, the second reflecting mirror 13 and the air chamber 9 form a closed space for light to be reflected for multiple times inside.
The first aperture 18 is disposed at the center of the first reflecting mirror 7, in this embodiment, is an aperture directly formed at the middle position of the first reflecting mirror 7, the second aperture 19 is disposed at the center of the second reflecting mirror, in this embodiment, is an aperture directly formed at the middle position of the second reflecting mirror 13, and the diameters of the two apertures are 1mm-3mm, so that only a small part of the light beam emitted from the light source directly irradiates the receiving surface of the detector at the center.
The detector 4 is disposed at the rear end of the first diaphragm hole 18, the light source 15 is disposed at the rear end of the second diaphragm hole 19, the light source is a mes light source, and has a certain divergence angle, in this embodiment, the emitting surfaces of the first diaphragm hole 18, the second diaphragm hole 19, the light source 15 and the receiving surface of the detector 4 are located on the same axis of the air chamber 9.
The air inlet and the air outlet of the air chamber are arranged at two ends of the side part of the air chamber, and an air inlet pipe joint 10 and an air outlet pipe joint 11 are respectively arranged at the air inlet and the air outlet.
The two ends of the air chamber 9 are respectively provided with a detachable light source fixing seat 14 and a detachable detector fixing seat 6, the light source 15 is arranged in the light source fixing seat 14, a light source end cover 17 is arranged outside the light source fixing seat 14, the rear end of the light source 15 is connected with a light source tube needle 20 through a light source circuit board 16, and the fixed end of the light source 15, the light source circuit board 16 and the light source tube needle 20 are fixed on the light source fixing seat 14 through epoxy resin sealing glue; the detector 4 is installed in the detector fixing seat 6 through the insulating spacer ring 5, the detector end cover 2 is installed outside the detector fixing seat 6, the rear end of the detector 4 is connected with the detector tube needle 1 through the detector circuit board 3, and the detector 4, the detector circuit board 3 and the detector tube needle 1 are fixed on the detector fixing seat 6 through epoxy resin sealing glue.
As shown in fig. 3, the outer diameter of the first mirror is set to D1, the radius of curvature of the concave surface is set to R1, the outer diameter of the second mirror is set to D2, the radius of curvature of the concave surface is set to R2, the inner diameter of the first aperture is D1, the inner diameter of the second aperture is D2, the distance between the center points of the two mirrors is L, the distance from the detector to the center of the curved surface of the first mirror is b, and the distance from the light source to the center of the curved surface of the second mirror is c.
The light source is a surface light source with a certain divergence angle, the light beam emitted by the mes light source passes through the shielding constraint of the second diaphragm hole on the second reflector to form a light beam with a certain divergence angle, after reaching the reflecting curved surface of the first reflector, the light beam is reflected back to the reflecting curved surface of the second reflector through the surface of the first reflector, the subsequent light beam is reflected back and forth between the two reflectors in sequence, finally, the infrared light beam is converged at the first diaphragm hole of the first reflector and is emitted out of the first diaphragm hole to reach the receiving surface of the detector, the reflection track of one beam of external light is shown in fig. 3, the incident light 21 is reflected for multiple times, and the emitted light 22 reaches the receiving surface of the detector 4.
On the one hand, since the incident light and the emergent light are reflected by the two concave mirrors at the centers of the two ends, the reflection of the two concave mirrors mainly depends on the peripheral area, and compared with the same-side in-out, the span which needs to be met by the in-out light (the span is limited because the light needs to cross the area of the in-out light in the reflecting process), therefore, the reflection utilization area of the light beam on the concave mirrors is increased (the reflecting span of the light is not limited, the light can be more compact), and the optical path is prolonged.
On the other hand, due to the mems light source, the number of incident light rays of the light beam is larger, and even if the number of reflections is limited, the optical path length after the reflection optical paths of all the light rays are superimposed is longer.
The optical path is lifted from both aspects, so that at a limited volume, the optical path is lengthened.
The reflecting times of the light beams between the two reflectors can be effectively controlled by adjusting the parameters L, R, R2, c, d1 and d2, so that a longer optical path is realized in a limited space.
Finally, it should be noted that the above-mentioned embodiments are only for illustrating the technical scheme of the present utility model and are not limiting; while the utility model has been described in detail with reference to the preferred embodiments, those skilled in the art will appreciate that: modifications may be made to the specific embodiments of the present utility model or equivalents may be substituted for part of the technical features thereof; without departing from the spirit of the utility model, it is intended to cover the scope of the utility model as claimed.

Claims (10)

1. A long optical path optical cavity, characterized by: the device comprises a light source, an air chamber, a detector, a first reflecting mirror, a second reflecting mirror, a first diaphragm hole and a second diaphragm hole;
the first reflecting mirror and the second reflecting mirror are respectively arranged at two ends of the air chamber, the first reflecting mirror and the second reflecting mirror are concave mirrors, and the first reflecting mirror, the second reflecting mirror and the air chamber form a closed space;
the first diaphragm hole is arranged at the center of the first reflecting mirror, and the second diaphragm hole is arranged at the center of the second reflecting mirror;
the receiving surface of the detector is arranged at the rear end of the first diaphragm hole, the emitting surface of the light source is arranged at the rear end of the second diaphragm hole, and the light source is a light source with a divergence angle;
off-axis light in the light beam is converged to the first diaphragm hole after being reflected by the first reflecting mirror and the second reflecting mirror for N times and is projected on the receiving surface of the detector, wherein N is more than or equal to 2.
2. The long path optical cavity of claim 1, wherein: the first diaphragm hole and the second diaphragm hole are positioned on the same axis of the air chamber.
3. The long path optical cavity of claim 2, wherein: the emitting surface of the light source and the receiving surface of the detector are both positioned on the same axis where the first diaphragm hole and the second diaphragm hole are connected.
4. A long path optical cavity according to claim 1 or 2 or 3, wherein: the light source is a mes light source.
5. The long path optical cavity of claim 4, wherein: the first diaphragm hole is formed on the first reflecting mirror, and the second diaphragm hole is formed on the second reflecting mirror.
6. The long path optical cavity of claim 1 or 2 or 3 or 5, wherein: the diameters of the first diaphragm hole and the second diaphragm hole are 1mm-3mm.
7. The long path optical cavity of claim 6, wherein: the air inlet and the air outlet of the air chamber are arranged at two ends of the side part of the air chamber.
8. The long path optical cavity of claim 1 or 2 or 3 or 5 or 7, wherein: the outer diameters of the first reflecting mirror and the second reflecting mirror are more than or equal to 90% of the inner diameters of the two ends of the air chamber, and the outer peripheral surfaces of the first reflecting mirror and the second reflecting mirror are in sealing connection with the two ends of the air chamber through sealing rings.
9. The long path optical cavity of claim 8, wherein: and coating films on the reflecting surfaces of the first reflecting mirror and the second reflecting mirror, wherein the reflectivity of the coating films is more than or equal to 95 percent.
10. The long path optical cavity of claim 9, wherein: the two ends of the air chamber are respectively provided with a detachable light source fixing seat and a detachable detector fixing seat, the light source is arranged in the light source fixing seat, a light source end cover is arranged outside the light source fixing seat, the rear end of the light source is connected with a light source tube needle through a light source circuit board, and the fixed end of the light source, the light source circuit board and the light source tube needle are fixed on the light source fixing seat through epoxy resin sealing glue; the detector is installed in the detector fixing seat through the insulating spacer ring, the detector end cover is installed outside the detector fixing seat, the rear end of the detector is connected with the detector tube needle through the detector circuit board, and the detector, the detector circuit board and the detector tube needle are fixed on the detector fixing seat through epoxy resin sealing glue.
CN202320690634.9U 2023-03-31 2023-03-31 Long optical path optical cavity Active CN220340010U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320690634.9U CN220340010U (en) 2023-03-31 2023-03-31 Long optical path optical cavity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320690634.9U CN220340010U (en) 2023-03-31 2023-03-31 Long optical path optical cavity

Publications (1)

Publication Number Publication Date
CN220340010U true CN220340010U (en) 2024-01-12

Family

ID=89444964

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320690634.9U Active CN220340010U (en) 2023-03-31 2023-03-31 Long optical path optical cavity

Country Status (1)

Country Link
CN (1) CN220340010U (en)

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