CN220318036U - Heater for single crystal furnace - Google Patents
Heater for single crystal furnace Download PDFInfo
- Publication number
- CN220318036U CN220318036U CN202321691442.6U CN202321691442U CN220318036U CN 220318036 U CN220318036 U CN 220318036U CN 202321691442 U CN202321691442 U CN 202321691442U CN 220318036 U CN220318036 U CN 220318036U
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- Prior art keywords
- heating
- base
- rotary
- installation base
- single crystal
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- 239000013078 crystal Substances 0.000 title claims abstract description 37
- 238000010438 heat treatment Methods 0.000 claims abstract description 72
- 238000009434 installation Methods 0.000 claims abstract description 44
- 238000009413 insulation Methods 0.000 claims abstract description 18
- 239000010453 quartz Substances 0.000 claims abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000007789 sealing Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000002425 crystallisation Methods 0.000 description 6
- 230000008025 crystallization Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a heater for a single crystal furnace, which relates to the technical field of single crystal furnaces and comprises a heating furnace, wherein a quartz crucible is arranged in the heating furnace, an installation base is arranged on the outer surface of the lower end of the heating furnace, a sliding groove is arranged on the outer surface of the front end of the installation base, two groups of adjusting handles are arranged in the middle of the sliding groove, heat insulation boards are arranged at the rear ends of the two groups of adjusting handles, a heating disc is arranged in the installation base, and a plurality of groups of heating rods are arranged in the heating disc. According to the heater for the single crystal furnace, heat is generated from the heating rods in the heating plate in the installation base, is transmitted into the heating furnace through the installation base, and the adjusting handle is slid in the middle of the sliding groove, so that the heat insulation plate can be controlled to move at the upper end of the installation base, the size of the heat transmission outlet at the upper end of the installation base is changed, and the size of the heat in the heating furnace can be adjusted.
Description
Technical Field
The utility model relates to the technical field of single crystal furnaces, in particular to a heater for a single crystal furnace.
Background
In the production of semiconductor silicon single crystals, a Czochralski method is generally employed, in which a raw material polysilicon ingot is placed in a quartz crucible, heated and melted in a single crystal furnace, and a rod-like seed crystal (called seed crystal) having a diameter of only 10mm is immersed in the melt. At a proper temperature, silicon atoms in the melt form regular crystals on solid-liquid interfaces along the silicon atom array structure of the seed crystal to form single crystals. The rotation of the seed crystal is slightly lifted upwards, and silicon atoms in the melt can be continuously crystallized on the single crystal formed before and continue to have a regular atomic arrangement structure. If the whole crystallization environment is stable, crystals can be formed repeatedly, and finally a cylindrical silicon single crystal with orderly atomic arrangement, namely a silicon single crystal ingot is formed.
The existing heater is unstable due to fixation in the process of Czochralski, the phenomenon that the crystal seeds shake is likely to cause crystallization defects, and the heating quantity of the heater is difficult to adjust when the heater is heated, so that certain adverse effects are brought to the use process of people, and in order to solve the defects in the prior art, the heater for the single crystal furnace is provided.
Disclosure of Invention
The utility model mainly aims to provide a heater for a single crystal furnace, which can effectively solve the problems in the background technology.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:
the utility model provides a heater for single crystal growing furnace, includes the heating furnace, the inside of heating furnace is provided with quartz crucible, the lower extreme surface of heating furnace is provided with the installation base, the front end surface of installation base is provided with the sliding tray, the centre of sliding tray is provided with two sets of regulation handles, two sets of the rear end of adjusting the handle is provided with the heat insulating board, the inside of installation base is provided with the heating plate, the inside of heating plate is provided with multiunit heating rod.
Preferably, the upper end surface of heating furnace is provided with sealed lid, the upper end surface of sealed lid is provided with the fixing base, the centre of fixing base is provided with the motor, the front end of motor is provided with the driving gear, the upper end of driving gear is provided with driven gear, driven gear's centre is provided with rotatory telescopic, rotatory telescopic inside is provided with the threaded rod, rotatory telescopic lower extreme surface is provided with rotating base, the lower extreme surface of threaded rod is provided with the connecting block, the lower extreme of connecting block is provided with bar-shaped seed crystal.
Preferably, a mounting interface is arranged between the heating furnace and the mounting base, the heating furnace is detachably connected with the mounting base through the mounting interface, a sliding groove is arranged between the heat insulation plate and the mounting base, the heat insulation plate is slidably connected with the mounting base through the sliding groove, a connecting interface is arranged between the adjusting handle and the heat insulation plate, and the adjusting handle is detachably connected with the heat insulation plate through the connecting interface.
Preferably, a mounting interface is arranged between the heating plate and the mounting base, the heating plate is detachably connected with the mounting base through the mounting interface, a connecting port is arranged between the heating rod and the heating plate, and the heating rod is detachably connected with the heating plate through the connecting port.
Preferably, a rotating groove is formed between the rotating sleeve and the rotating base, the rotating sleeve is rotationally connected with the rotating base through the arranged rotating groove, a connecting port is formed between the driven gear and the rotating sleeve, the driven gear is detachably connected with the rotating sleeve through the arranged connecting port, and the motor is rotationally connected with the rotating sleeve through the arranged driving gear and the driven gear.
Preferably, the rotary base is fixedly connected with the sealing cover, threaded holes are formed between the threaded rod and the rotary sleeve as well as between the threaded rod and the rotary base, and the threaded rod is detachably connected with the rotary sleeve and the rotary base respectively through the threaded holes.
Advantageous effects
Compared with the prior art, the utility model has the following beneficial effects:
according to the utility model, through the arranged threaded rod, the rotating sleeve and the rotating base, when the device heats and crystallizes raw materials, the process of upwards moving the crystal seeds is more gentle and stable, the possibility of shaking is reduced, the possibility of flaws of crystallization is also reduced, the driving gear is driven by the motor to rotate, the driving gear drives the rotating sleeve to rotate at the upper end of the rotating base through the driven gear, meanwhile, the threaded rod rotates relative to the rotating sleeve and the rotating base, and simultaneously, the threaded rod moves upwards gently through the threaded hole while rotating, and the threaded rod also drives the rod-shaped crystal seeds to rotate upwards through the connecting block, so that crystallization is more perfect.
According to the utility model, through the installation base and the heat insulation plate, people can adjust the heating quantity of the inside of the installation base, heat is generated from the heating rod in the heating disc in the installation base, the heat is transmitted to the inside of the heating furnace through the installation base, the adjusting handle is slid in the middle of the sliding groove, the heat insulation plate can be controlled to move at the upper end of the installation base, the quantity of the heat transmission outlet at the upper end of the installation base is changed, the quantity of the heat transmitted to the inside of the heating furnace can be adjusted, and the operation is convenient and quick.
Drawings
FIG. 1 is a schematic view of the overall structure of the present utility model;
FIG. 2 is a schematic view of the structure of the heating furnace of the present utility model;
FIG. 3 is a schematic view showing the disassembled structure of the crystallization apparatus according to the present utility model;
FIG. 4 is a schematic view of the mounting base structure of the present utility model;
in the figure: 1. a heating furnace; 2. sealing cover; 3. a fixing seat; 4. a motor; 5. rotating the sleeve; 6. a driven gear; 7. a drive gear; 8. a rotating base; 9. a threaded rod; 10. a mounting base; 11. a sliding groove; 12. adjusting the handle; 13. a heat insulating plate; 14. a heating plate; 15. a heating rod; 16. a connecting block; 17. a rod-shaped seed crystal; 18. a quartz crucible.
Description of the embodiments
The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.
As shown in fig. 1 to 4, a heater for a single crystal furnace comprises a heating furnace 1, a quartz crucible 18 is arranged in the heating furnace 1, an installation base 10 is arranged on the outer surface of the lower end of the heating furnace 1, an installation interface is arranged between the heating furnace 1 and the installation base 10, the heating furnace 1 is detachably connected with the installation base 10 through the installation interface, a sliding groove 11 is arranged on the outer surface of the front end of the installation base 10, two groups of adjusting handles 12 are arranged in the middle of the sliding groove 11, a heat insulation plate 13 is arranged at the rear end of the two groups of adjusting handles 12, a connecting port is arranged between the adjusting handles 12 and the heat insulation plate 13, the adjusting handles 12 are detachably connected with the heat insulation plate 13 through the connecting port, a sliding groove is arranged between the heat insulation plate 13 and the installation base 10, the heat insulation plate 13 is in sliding connection with the installation base 10 through the sliding groove, the inside of installation base 10 is provided with heating plate 14, be provided with the installation interface between heating plate 14 and the installation base 10, the heating plate 14 can be dismantled with installation base 10 through the installation interface that sets up and be connected, the inside of heating plate 14 is provided with multiunit heating rod 15, be provided with the connector between heating rod 15 and the heating plate 14, the heating rod 15 can be dismantled with the heating plate 14 through the connector that sets up and be connected, the heat produces from the heating rod 15 in the inside heating plate 14 of installation base 10, pass to the inside of heating furnace 1 through installation base 10, slide in the middle of the sliding tray 11 and adjust handle 12, can control heat insulating board 13 and remove in the upper end of installation base 10, change the size of the export of the heat transmission of installation base 10 upper end, can adjust the size of the heat that transmits to the inside of heating furnace 1.
As shown in fig. 1 to 4, the upper end outer surface of the heating furnace 1 is provided with a sealing cover 2, the upper end outer surface of the sealing cover 2 is provided with a fixing seat 3, a motor 4 is arranged in the middle of the fixing seat 3, the front end of the motor 4 is provided with a driving gear 7, the upper end of the driving gear 7 is provided with a driven gear 6, the middle of the driven gear 6 is provided with a rotary sleeve 5, a connecting port is arranged between the driven gear 6 and the rotary sleeve 5, the driven gear 6 is detachably connected with the rotary sleeve 5 through the arranged connecting port, the motor 4 is rotatably connected with the rotary sleeve 5 through the arranged driving gear 7 and the driven gear 6, a threaded rod 9 is arranged in the rotary sleeve 5, the lower end outer surface of the rotary sleeve 5 is provided with a rotary base 8, a rotary groove is arranged between the rotary sleeve 5 and the rotary base 8, threaded rod 9 is rotatably connected with the rotary sleeve 5 and the rotary base 8 through the arranged rotary groove, the threaded rod 9 is detachably connected with the rotary sleeve 5 and the rotary base 8 respectively, and the lower end outer surface of the 9 is provided with a bar-shaped connecting block 16, and the lower end of the bar-shaped connecting block 17 is arranged at 16.
When the heater for the single crystal furnace is used, the handle 12 is adjusted in the middle of the sliding groove 11 in a sliding mode, the heat insulation plate 13 can be controlled to move at the upper end of the installation base 10, the size of an outlet for heat transmission at the upper end of the installation base 10 is changed, the driving gear 7 is driven to rotate through the motor 4, the driving gear 7 drives the rotary sleeve 5 to rotate at the upper end of the rotary base 8 through the driven gear 6, meanwhile, the threaded rod 9 rotates relative to the rotary sleeve 5 and the rotary base 8, the threaded rod 9 moves upwards gradually through the threaded hole while rotating, and the threaded rod 9 also drives the rod-shaped seed crystal 17 to rotate upwards slowly through the connecting block 16 and move simultaneously to perform crystallization.
The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (6)
1. The utility model provides a heater for single crystal growing furnace, includes heating furnace (1), its characterized in that: the inside of heating furnace (1) is provided with quartz crucible (18), the lower extreme surface of heating furnace (1) is provided with installation base (10), the front end surface of installation base (10) is provided with sliding tray (11), the centre of sliding tray (11) is provided with two sets of regulation handles (12), two sets of the rear end of regulation handle (12) is provided with heat insulating board (13), the inside of installation base (10) is provided with heating dish (14), the inside of heating dish (14) is provided with multiunit heating rod (15).
2. The heater for a single crystal furnace according to claim 1, wherein: the heating furnace is characterized in that a sealing cover (2) is arranged on the outer surface of the upper end of the heating furnace (1), a fixing seat (3) is arranged on the outer surface of the upper end of the sealing cover (2), a motor (4) is arranged in the middle of the fixing seat (3), a driving gear (7) is arranged at the front end of the motor (4), a driven gear (6) is arranged at the upper end of the driving gear (7), a rotary sleeve (5) is arranged in the middle of the driven gear (6), a threaded rod (9) is arranged in the rotary sleeve (5), a rotary base (8) is arranged on the outer surface of the lower end of the rotary sleeve (5), a connecting block (16) is arranged on the outer surface of the lower end of the threaded rod (9), and a rod-shaped seed crystal (17) is arranged at the lower end of the connecting block (16).
3. The heater for a single crystal furnace according to claim 1, wherein: the heating furnace is characterized in that an installation interface is arranged between the heating furnace (1) and the installation base (10), the heating furnace (1) is detachably connected with the installation base (10) through the installation interface, a sliding groove is formed between the heat insulation plate (13) and the installation base (10), the heat insulation plate (13) is slidably connected with the installation base (10) through the sliding groove, a connection interface is arranged between the adjusting handle (12) and the heat insulation plate (13), and the adjusting handle (12) is detachably connected with the heat insulation plate (13) through the connection interface.
4. The heater for a single crystal furnace according to claim 1, wherein: the heating device is characterized in that a mounting interface is arranged between the heating plate (14) and the mounting base (10), the heating plate (14) is detachably connected with the mounting base (10) through the arranged mounting interface, a connecting port is arranged between the heating rod (15) and the heating plate (14), and the heating rod (15) is detachably connected with the heating plate (14) through the arranged connecting port.
5. The heater for a single crystal furnace according to claim 2, wherein: the rotary sleeve is characterized in that a rotary groove is formed between the rotary sleeve (5) and the rotary base (8), the rotary sleeve (5) is rotationally connected with the rotary base (8) through the rotary groove, a connecting port is formed between the driven gear (6) and the rotary sleeve (5), the driven gear (6) is detachably connected with the rotary sleeve (5) through the connecting port, and the motor (4) is rotationally connected with the rotary sleeve (5) through the driving gear (7) and the driven gear (6).
6. The heater for a single crystal furnace according to claim 2, wherein: the rotary base (8) is fixedly connected with the sealing cover (2), threaded holes are formed in the threaded rod (9), the rotary sleeve (5) and the rotary base (8), and the threaded rod (9) is detachably connected with the rotary sleeve (5) and the rotary base (8) through the set threaded holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321691442.6U CN220318036U (en) | 2023-06-30 | 2023-06-30 | Heater for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321691442.6U CN220318036U (en) | 2023-06-30 | 2023-06-30 | Heater for single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220318036U true CN220318036U (en) | 2024-01-09 |
Family
ID=89420051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321691442.6U Active CN220318036U (en) | 2023-06-30 | 2023-06-30 | Heater for single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220318036U (en) |
-
2023
- 2023-06-30 CN CN202321691442.6U patent/CN220318036U/en active Active
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