CN220306209U - Tubular radio frequency vacuum ionization device - Google Patents
Tubular radio frequency vacuum ionization device Download PDFInfo
- Publication number
- CN220306209U CN220306209U CN202321690672.0U CN202321690672U CN220306209U CN 220306209 U CN220306209 U CN 220306209U CN 202321690672 U CN202321690672 U CN 202321690672U CN 220306209 U CN220306209 U CN 220306209U
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- China
- Prior art keywords
- radio frequency
- flange
- utility
- ionization device
- free copper
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052802 copper Inorganic materials 0.000 claims abstract description 18
- 239000010949 copper Substances 0.000 claims abstract description 18
- 239000000919 ceramic Substances 0.000 claims abstract description 17
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 11
- 238000007747 plating Methods 0.000 claims abstract description 11
- 229910052709 silver Inorganic materials 0.000 claims abstract description 11
- 239000004332 silver Substances 0.000 claims abstract description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 11
- 230000008569 process Effects 0.000 abstract description 11
- 238000004891 communication Methods 0.000 abstract description 3
- 238000009296 electrodeionization Methods 0.000 abstract description 3
- 230000010485 coping Effects 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 11
- 239000000498 cooling water Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Abstract
The utility model relates to a tubular radio frequency vacuum ionization device. The conventional electrode ionization device also adopts the traditional linear and planar ion sources, so that the problems of poor ion energy concentration and low ionization rate exist, and the problem of difficulty in coping with the process working conditions with higher requirements is solved. The utility model comprises an inlet flange and an outlet flange, wherein the inlet flange is filled with gas to be ionized, and the utility model is characterized in that an insulating ceramic cylinder is arranged between the inlet flange and the outlet flange for communication, a hollow oxygen-free copper coil is wound around the periphery of the insulating ceramic cylinder, two silver plating electrodes are arranged on the hollow oxygen-free copper coil at intervals, and a radio frequency power supply is connected to the silver plating electrodes. Compared with the traditional linear and planar ion sources, the utility model adopts tubular high-frequency ionization, so that the ion energy is more concentrated, the ionization rate is higher, and the corresponding process working conditions are better matched.
Description
Technical Field
The utility model relates to a vacuum ionization device suitable for vacuum equipment and used for pretreatment and process realization, in particular to a tubular radio frequency vacuum ionization device.
Background
In various fields of vacuum coating, there are various demands, including ion cleaning suitable for pretreatment of a process, surface activation of a workpiece, and the like, in the process implementation, a part of target products cannot be implemented in a physical vapor deposition mode, but must be in a form of gas phase as a precursor, and then ions are generated after being ionized by an ionization device, and finally the corresponding film products are generated by combining the corresponding ions on the surface of the workpiece.
The film deposition mode has high requirements on the ionization capacity of ionization equipment and the pollution influence of the equipment on products. The current ionization means mainly comprise electrode ionization, high-voltage ionization, arc ionization, dielectric barrier plasma discharge and other forms. The dielectric barrier plasma discharge mode has the advantages of minimum pollution to products and strong ionization capability, and is concerned by manufacturers and scientific researchers.
The conventional electrode ionization device also adopts the traditional linear and planar ion sources, so that the problems of poor ion energy concentration and low ionization rate exist, and the problem of difficulty in coping with the process working conditions with higher requirements are solved.
Disclosure of Invention
Aiming at the problems, the utility model provides a tubular radio frequency vacuum ionization device which can enable ion energy to be more concentrated, ionization rate to be higher and better match corresponding process working conditions.
Therefore, the utility model adopts the following technical scheme: the tubular radio frequency vacuum ionization device comprises an inlet flange and an outlet flange, wherein gas to be ionized is introduced into the inlet flange, and the tubular radio frequency vacuum ionization device is characterized in that an insulating ceramic cylinder is arranged between the inlet flange and the outlet flange for communication, a hollow oxygen-free copper coil is wound around the periphery of the insulating ceramic cylinder, two silver plating electrodes are arranged on the hollow oxygen-free copper coil at intervals, and a radio frequency power supply is connected to the silver plating electrodes.
Preferably, the silver-plated electrode is connected with a radio frequency power supply with the frequency of 300-500 MHz.
Preferably, the hollow oxygen-free copper coil is externally connected with a water inlet pipe and a water outlet pipe.
Preferably, the hollow oxygen-free copper coil is connected with an outlet flange through a first elbow, the outlet flange is connected with an inlet flange through a second elbow, and the inlet flange is connected with a water outlet pipe.
Preferably, the insulating ceramic cylinder is made of alumina ceramic or zirconia material.
The beneficial effects of the utility model are as follows: compared with the traditional linear and planar ion sources, the tubular high-frequency ionization is adopted, so that the ion energy is more concentrated, the ionization rate is higher, and the corresponding process working conditions are better matched. And the tubular winding structure can provide water supply for the inlet and outlet flanges and the copper pipe cooling water.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the present utility model.
Fig. 2 is a schematic diagram of the front structure of the present utility model.
Fig. 3 is a schematic view of another angle structure of the present utility model.
In the figure: 1. the device comprises an inlet flange 2, an outlet flange 3, a cooling water pipe 4, a water inlet pipe 5, a water outlet pipe 6, a first silver-plated electrode 7, a second silver-plated electrode 8, a hollow oxygen-free copper coil 9, an insulating ceramic cylinder 10, a first bent pipe 11 and a second bent pipe.
Detailed Description
The utility model will be further illustrated with reference to specific examples.
The tubular radio frequency vacuum ionization device comprises an inlet flange 1 and an outlet flange 2, wherein gas to be ionized is introduced into the inlet flange 1, an insulating ceramic cylinder 9 is arranged between the inlet flange 1 and the outlet flange 2 for communication, a hollow oxygen-free copper coil 8 is wound around the periphery of the insulating ceramic cylinder 9, two silver-plated electrodes are arranged on the hollow oxygen-free copper coil at intervals, and a radio frequency power supply is connected to the silver-plated electrodes. The hollow oxygen-free copper coil can provide integral cooling and the introduction of a radio frequency power supply, and the silver-plated electrode can provide good electric conduction performance and conduct radio frequency energy to the coil.
In one embodiment, the insulating ceramic cylinder 9 is made of alumina ceramic or zirconia material. Provides good insulation effect, insulation voltage exceeds 10000V, provides good mechanical strength, can bear atmospheric pressure, provides good air tightness, and leakage rate is lower than 1 x 10 < -9 > mbar x L/s.
Specifically, the number of silver plating electrodes is two, and the silver plating electrode comprises a first silver plating electrode 6 and a second silver plating electrode 7, and a radio frequency power supply with the frequency of 300-500MHz is connected to the silver plating electrodes.
In one embodiment, the hollow oxygen-free copper coil is externally connected with a cooling water pipe 3, and the cooling water pipe comprises a water inlet pipe 4 and a water outlet pipe 5. The hollow oxygen-free copper coil is communicated through the cooling water pipe to realize cooling of the insulating ceramic cylinder.
In one embodiment, the hollow oxygen-free copper coil is connected to an outlet flange via a first elbow 10, the outlet flange is connected to an inlet flange via a second elbow 11, and the inlet flange is connected to a water outlet pipe. Cooling of the inlet flange and the outlet flange is achieved by a rational planning design of the first elbow 10 and the second elbow 11.
The working process of the utility model is as follows: the gas to be ionized is introduced from the inlet flange. The silver-plated electrode is connected with a radio frequency power supply with the frequency of 300-500 MHz. The insulating ceramic cylinder is used for connecting the inlet flange and the outlet flange, and the insulating ceramic cylinder is preferably an alumina ceramic piece and is used for structural support and sealing insulating shielding.
In the working state, the insulating ceramic cylinder is not in a low vacuum state, the gas pressure is about 2 x 10 < -2 > mbar, then a radio frequency power supply is connected to the silver plating electrode, and the gas atoms in the insulating ceramic cylinder vibrate at high frequency under the electromagnetic field generated by the radio frequency power supply, so that corresponding ions and electrons are generated by ionization. The corresponding plasma is ejected from the outlet under the pushing of the air flow.
The beneficial effects of the utility model are as follows: compared with the traditional linear and planar ion sources, the tubular high-frequency ionization is adopted, so that the ion energy is more concentrated, the ionization rate is higher, and the corresponding process working conditions are better matched.
The utility model effectively improves the energy density introduced by radio frequency, can support 2kw of energy output at the highest in unit volume, and meets the corresponding process requirements in the semiconductor industry.
It is to be understood that these examples are illustrative of the present utility model and are not intended to limit the scope of the present utility model. Further, it is understood that various changes and modifications may be made by those skilled in the art after reading the teachings of the present utility model, and such equivalents are intended to fall within the scope of the claims appended hereto.
Claims (5)
1. The utility model provides a tubular radio frequency vacuum ionization device, includes entry flange (1) and export flange (2), and gas that needs the ionization is let in to entry flange (1), its characterized in that entry flange (1) and export flange (2) between set up insulating ceramic cylinder (9) and communicate, the peripheral winding cavity oxygen-free copper coil (8) of insulating ceramic cylinder (9), cavity oxygen-free copper coil on the interval set up two silvering electrodes, the silvering electrode on the radio frequency power supply.
2. The tubular radio frequency vacuum ionization device according to claim 1, wherein the silver plating electrode is connected with a radio frequency power supply with the frequency of 300-500 MHz.
3. The tubular radio frequency vacuum ionization device according to claim 2, wherein the hollow oxygen-free copper coil is externally connected with a water inlet pipe (4) and a water outlet pipe (5).
4. A tubular radio frequency vacuum ionization device according to claim 3 wherein the hollow oxygen-free copper coil is connected to an outlet flange through a first elbow (10), said outlet flange is connected to an inlet flange through a second elbow (11), said inlet flange is in turn connected to a water outlet pipe.
5. A tubular radio frequency vacuum ionization device according to any one of claims 1-4, characterized in that the insulating ceramic cylinder (9) is made of alumina ceramic or zirconia material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321690672.0U CN220306209U (en) | 2023-06-29 | 2023-06-29 | Tubular radio frequency vacuum ionization device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321690672.0U CN220306209U (en) | 2023-06-29 | 2023-06-29 | Tubular radio frequency vacuum ionization device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220306209U true CN220306209U (en) | 2024-01-05 |
Family
ID=89354229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321690672.0U Active CN220306209U (en) | 2023-06-29 | 2023-06-29 | Tubular radio frequency vacuum ionization device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220306209U (en) |
-
2023
- 2023-06-29 CN CN202321690672.0U patent/CN220306209U/en active Active
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