CN220297133U - Frock clamp of silicon nitride sucking disc free-form surface - Google Patents
Frock clamp of silicon nitride sucking disc free-form surface Download PDFInfo
- Publication number
- CN220297133U CN220297133U CN202321783791.0U CN202321783791U CN220297133U CN 220297133 U CN220297133 U CN 220297133U CN 202321783791 U CN202321783791 U CN 202321783791U CN 220297133 U CN220297133 U CN 220297133U
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- Prior art keywords
- adjusting
- longitudinal
- clamp
- supporting beam
- sucker
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 21
- 238000009434 installation Methods 0.000 claims description 15
- 239000000919 ceramic Substances 0.000 description 4
- 230000001788 irregular Effects 0.000 description 4
- 241000252254 Catostomidae Species 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a fixture for a free curved surface of a silicon nitride sucker, which comprises: the clamp supporting beam is characterized in that two ends of the clamp supporting beam are arranged on the clamping platform through mounting columns, a plurality of sucker fixing clamps are arranged on the clamp supporting beam, the sucker fixing clamps are arranged on the clamp supporting beam through clamp adjusting devices, sucker conveying devices are arranged on the lower sides of the clamp supporting beam, the sucker fixing clamps comprise clamping jaw mounting plates, the upper ends of the clamping jaw mounting plates are arranged on the clamp adjusting devices, the lower ends of the clamping jaw mounting plates are arranged on the clamp mounting cross bars, a plurality of clamp supporting rods are arranged on the clamp mounting cross bars, and the clamp supporting rods are arranged on the clamp mounting cross bars through supporting rod fixing seats.
Description
Technical Field
The utility model relates to the technical field of semiconductor production equipment, in particular to a fixture for a free-form surface of a silicon nitride sucker.
Background
A semiconductor refers to a material whose conductivity can be controlled, ranging from an insulator to a conductor. The ceramic thin sucker is produced by adopting a high-performance ceramic material as a carrier and adding special nano-scale ceramic powder. The ceramic thin sucker is characterized in that: the carrier is made of high-performance ceramic material, has higher mechanical strength, good wear resistance and smaller friction coefficient. Has good thermal stability, high temperature resistance and corrosion resistance, and can be used in severe environment. The nano-scale ceramic powder has better permeability and adsorptivity, and can adsorb heavier substances.
The Chinese patent discloses a special-shaped silicon nitride structure processing fixing clamp (patent number: 201821105054.4), which belongs to the technical field of silicon nitride structure processing and comprises a structure object placing plate, wherein four evenly-distributed object placing plate support posts are fixedly connected to the lower end of the structure object placing plate, a movable plate base is arranged on the lower side of the structure object placing plate and fixedly connected with the lower end of the object placing plate support post, a sliding translation groove is formed in the upper side of the movable plate base, two translation sliding blocks are connected in the sliding translation groove in a sliding mode, driven sliding plates are fixedly connected to the upper ends of the two translation sliding blocks, but clamping and transferring efficiency is low, and processing efficiency is seriously affected.
Disclosure of Invention
The utility model solves the technical problem of providing a fixture for the free curved surface of the silicon nitride sucker, so as to solve the problems in the background technology.
The technical problems solved by the utility model are realized by adopting the following technical scheme: a tool clamp for a free-form surface of a silicon nitride sucker, comprising: the clamp supporting beam, clamp supporting beam both ends are installed on the clamp platform through the installation stand, the clamp platform is installed on platform braced frame, be equipped with sucking disc limiting plate on the clamp platform, be equipped with a plurality of sucking disc mounting fixtures on the clamp supporting beam, sucking disc mounting fixtures passes through clamp adjusting device and installs on clamp supporting beam, clamp supporting beam downside is equipped with sucking disc conveyor, sucking disc mounting fixtures include the clamping jaw mounting plate, clamping jaw mounting plate upper end is installed on clamp adjusting device, clamping jaw mounting plate lower extreme is installed on the clamp installation horizontal pole, be equipped with a plurality of clamp bracing pieces on the clamp installation horizontal pole, the clamp bracing piece passes through the bracing piece fixing base and installs on the clamp installation horizontal pole, be equipped with a plurality of vacuum fixation discs on the clamp bracing piece, the vacuum fixation disc is installed on the vacuum suction pipe, the vacuum suction pipe passes through the suction pipe fixing base and installs on the clamp bracing piece.
Further, the clamp adjusting device comprises a transverse adjusting driving belt, one end of the transverse adjusting driving belt is arranged on a supporting wheel, the other end of the transverse adjusting driving belt is arranged on a driving wheel, the supporting wheel is arranged on a clamp supporting beam through a supporting wheel mounting seat, the driving wheel is arranged on the output end of a transverse adjusting driving motor, a shell of the transverse adjusting driving motor is fixed on the clamp supporting beam through a motor mounting seat, one side of the transverse adjusting driving belt is provided with a longitudinal adjusting bracket mounting plate, and a longitudinal adjusting bracket is arranged on the longitudinal adjusting bracket mounting plate.
Further, be equipped with the horizontal guiding device that adjusts between vertical regulation support mounting panel and the anchor clamps supporting beam, the horizontal guiding device that adjusts includes horizontal regulation guide rail, be equipped with a plurality of horizontal regulation guide slide blocks on the horizontal regulation guide rail, horizontal regulation guide rail fixed mounting is on anchor clamps supporting beam, horizontal regulation guide slide block fixed mounting is on vertical regulation support mounting panel.
Further, the longitudinal adjustment support comprises a longitudinal adjustment driving cylinder, a cylinder body of the longitudinal adjustment driving cylinder is fixed on a longitudinal adjustment support mounting plate, a longitudinal adjustment driving plate is arranged at the output end of the longitudinal adjustment driving cylinder, and a longitudinal adjustment guiding device is arranged between the longitudinal adjustment driving plate and the longitudinal adjustment support mounting plate.
Further, the direction adjusting guide device comprises a longitudinal adjusting guide sliding rail, a plurality of longitudinal adjusting guide sliding blocks are arranged on the longitudinal adjusting guide sliding rail, the longitudinal adjusting guide sliding rail is fixedly arranged on a longitudinal adjusting bracket mounting plate, and the longitudinal adjusting guide sliding blocks are fixedly arranged on a longitudinal adjusting driving plate.
Further, the sucker conveying device comprises a conveying supporting frame, a plurality of sucker conveying rollers are arranged on the conveying supporting frame, and the lower end of the conveying supporting frame is installed on the conveying supporting legs through a frame fixing plate.
Further, a plurality of adjusting support cushion feet are arranged on the lower sides of the platform support frame and the sucker conveying device, the adjusting support cushion feet comprise adjusting support cushion plates, and the upper ends of the adjusting support cushion plates are installed in screw holes on the platform support frame and the sucker conveying device through double-headed screws.
Compared with the prior art, the utility model has the beneficial effects that: the utility model not only can realize the rapid fixation of the irregular silicon nitride sucker, but also can realize the rapid transfer of the irregular silicon nitride sucker, and can greatly improve the processing efficiency of products.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
Fig. 2 is a schematic structural view of a chuck fixing clamp according to the present utility model.
Fig. 3 is a schematic structural view of the clamp adjusting device of the present utility model.
Fig. 4 is a schematic structural view of a sucker conveying device of the present utility model.
Detailed Description
In order that the manner in which the features and objects and functions of the utility model are attained and can be readily understood, a further description of the utility model will be seen in connection with the accompanying drawings, in which the terms "mounted," "connected," and "connected" are to be understood broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected via an intermediate medium, or communicate between the two elements unless otherwise specifically indicated and defined.
Examples
As shown in fig. 1 to 4, a fixture for a free-form surface of a silicon nitride sucker, comprising: the fixture supporting beam 4, fixture supporting beam 4 both ends are installed on the centre gripping platform 2 through the installation stand, the centre gripping platform 2 is installed on platform braced frame 1, be equipped with sucking disc limiting plate 3 on the centre gripping platform 2, be equipped with a plurality of sucking disc mounting fixtures 5 on the fixture supporting beam 4, sucking disc mounting fixtures 5 pass through fixture adjustment device 6 and install on fixture supporting beam 4, fixture supporting beam 4 downside is equipped with sucking disc conveyor 7, sucking disc mounting fixtures 5 include clamping jaw mounting plate 51, clamping jaw mounting plate 51 upper end is installed on fixture adjustment device 6, clamping jaw mounting plate 51 lower extreme is installed on clamping jaw mounting horizontal pole 52, be equipped with a plurality of clamp bracing pieces 54 on the clamping jaw mounting horizontal pole 52, clamp bracing piece 54 passes through bracing piece fixing base 53 and installs on clamping jaw mounting horizontal pole 52, be equipped with a plurality of vacuum fixation discs 57 on the clamp bracing piece 54, vacuum fixation discs 57 install on vacuum suction tube 56, vacuum suction tube 56 passes through fixing base 55 and installs on clamp bracing piece 54.
Examples
As shown in fig. 1 to 4, a fixture for a free-form surface of a silicon nitride sucker, comprising: the fixture supporting beam 4, fixture supporting beam 4 both ends are installed on centre gripping platform 2 through the installation stand, centre gripping platform 2 is installed on platform braced frame 1, be equipped with sucking disc limiting plate 3 on the centre gripping platform 2, be equipped with a plurality of sucking disc mounting fixtures 5 on the fixture supporting beam 4, sucking disc mounting fixtures 5 pass through fixture adjusting device 6 and install on fixture supporting beam 4, fixture supporting beam 4 downside is equipped with sucking disc conveyor 7, fixture adjusting device 6 includes horizontal regulation drive belt 61, horizontal regulation drive belt 61 one end is installed on supporting wheel 62, the other end is installed on drive wheel 64, supporting wheel 62 passes through supporting wheel mount pad 63 and installs on fixture supporting beam 4, drive wheel 64 is installed on the output of horizontal regulation driving motor 65, the casing of horizontal regulation driving motor 65 passes through the motor mount pad to be fixed on fixture supporting beam 4, horizontal regulation drive belt 61 one side is equipped with vertical regulation support mounting plate 67, is equipped with vertical regulation support on the vertical regulation support mounting plate 67. The transverse adjusting guide device is arranged between the longitudinal adjusting bracket mounting plate 67 and the clamp supporting beam 4 and comprises a transverse adjusting guide sliding rail 611, a plurality of transverse adjusting guide sliding blocks 610 are arranged on the transverse adjusting guide sliding rail 611, the transverse adjusting guide sliding rail 611 is fixedly arranged on the clamp supporting beam 4, and the transverse adjusting guide sliding blocks 610 are fixedly arranged on the longitudinal adjusting bracket mounting plate 67. The longitudinal adjustment bracket comprises a longitudinal adjustment driving cylinder 69, a cylinder body of the longitudinal adjustment driving cylinder 69 is fixed on a longitudinal adjustment bracket mounting plate 67, a longitudinal adjustment driving plate 68 is arranged at the output end of the longitudinal adjustment driving cylinder 69, and a longitudinal adjustment guiding device is arranged between the longitudinal adjustment driving plate 68 and the longitudinal adjustment bracket mounting plate 67. The direction adjusting guide device comprises a longitudinal adjusting guide slide rail 612, a plurality of longitudinal adjusting guide sliding blocks 613 are arranged on the longitudinal adjusting guide slide rail 612, the longitudinal adjusting guide slide rail 612 is fixedly arranged on a longitudinal adjusting bracket mounting plate 67, and the longitudinal adjusting guide sliding blocks 613 are fixedly arranged on a longitudinal adjusting driving plate 68.
Examples
As shown in fig. 1 to 4, a fixture for a free-form surface of a silicon nitride sucker, comprising: the fixture supporting beam 4, fixture supporting beam 4 both ends are installed on centre gripping platform 2 through the installation stand, centre gripping platform 2 is installed on platform braced frame 1, be equipped with sucking disc limiting plate 3 on the centre gripping platform 2, be equipped with a plurality of sucking disc mounting fixtures 5 on the fixture supporting beam 4, sucking disc mounting fixtures 5 pass through fixture adjusting device 6 and install on fixture supporting beam 4, fixture supporting beam 4 downside is equipped with sucking disc conveyor 7, sucking disc conveyor 7 includes and carries braced frame 71, carry and be equipped with a plurality of sucking disc conveying rollers 72 on the braced frame 71, carry braced frame 71 lower extreme through frame fixed plate 73 install on carrying supporting leg 74.
Examples
As shown in fig. 1 to 4, a fixture for a free-form surface of a silicon nitride sucker, comprising: the fixture supporting beam 4, fixture supporting beam 4 both ends are installed on centre gripping platform 2 through the installation stand, centre gripping platform 2 is installed on platform braced frame 1, be equipped with sucking disc limiting plate 3 on the centre gripping platform 2, be equipped with a plurality of sucking disc mounting fixtures 5 on the fixture supporting beam 4, sucking disc mounting fixtures 5 pass through fixture adjusting device 6 and install on fixture supporting beam 4, fixture supporting beam 4 downside is equipped with sucking disc conveyor 7, platform braced frame 1, sucking disc conveyor 7 downside are equipped with a plurality of regulation support pad feet 8, regulation support pad foot 8 is including adjusting the support backing plate, it installs in the screw on platform braced frame 1, sucking disc conveyor 7 through the double-end screw to adjust the support backing plate upper end.
According to the utility model, two ends of the clamp supporting beam 4 are arranged on the clamping platform 2 through the mounting upright posts, the clamping platform 2 is arranged on the platform supporting frame 1, the clamping platform 2 is provided with the sucker limiting plate 3, the clamp supporting beam 4 is provided with the plurality of sucker fixing clamps 5, the sucker fixing clamps 5 are arranged on the clamp supporting beam 4 through the clamp adjusting device 6, and the sucker conveying device 7 is arranged on the lower side of the clamp supporting beam 4, so that not only can the irregular silicon nitride suckers be quickly fixed, but also the irregular silicon nitride suckers can be quickly transferred, and the processing efficiency of products can be greatly improved.
The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (7)
1. A tool clamp for a free-form surface of a silicon nitride sucker, comprising: the fixture supporting beam (4), fixture supporting beam (4) both ends are installed on centre gripping platform (2) through the installation stand, its characterized in that: clamping platform (2) are installed on platform braced frame (1), be equipped with sucking disc limiting plate (3) on clamping platform (2), be equipped with a plurality of sucking disc mounting fixtures (5) on anchor clamps supporting beam (4), sucking disc mounting fixtures (5) are installed on anchor clamps supporting beam (4) through anchor clamps adjusting device (6), anchor clamps supporting beam (4) downside is equipped with sucking disc conveyor (7), sucking disc mounting fixtures (5) include clamping jaw mounting plate (51), clamping jaw mounting plate (51) upper end is installed on anchor clamps adjusting device (6), clamping jaw mounting plate (51) lower extreme is installed on anchor clamps installation horizontal pole (52), be equipped with a plurality of anchor clamps bracing pieces (54) on anchor clamps installation horizontal pole (52) on anchor clamps bracing piece (54) are equipped with a plurality of vacuum fixing plates (57), vacuum fixing plates (57) are installed on vacuum fixing base (56), vacuum suction pipe (56) are installed on anchor clamps (54) through anchor clamps (55).
2. The tooling fixture for the free-form surface of the silicon nitride sucker according to claim 1, wherein: the clamp adjusting device (6) comprises a transverse adjusting driving belt (61), one end of the transverse adjusting driving belt (61) is installed on a supporting wheel (62), the other end of the transverse adjusting driving belt is installed on a driving wheel (64), the supporting wheel (62) is installed on a clamp supporting beam (4) through a supporting wheel installation seat (63), the driving wheel (64) is installed on the output end of a transverse adjusting driving motor (65), a shell of the transverse adjusting driving motor (65) is fixed on the clamp supporting beam (4) through a motor installation seat, a longitudinal adjusting bracket installation plate (67) is arranged on one side of the transverse adjusting driving belt (61), and a longitudinal adjusting bracket is arranged on the longitudinal adjusting bracket installation plate (67).
3. The tooling fixture of the free-form surface of the silicon nitride sucker according to claim 2, wherein: the device is characterized in that a transverse adjusting guide device is arranged between the longitudinal adjusting support mounting plate (67) and the clamp supporting beam (4), the transverse adjusting guide device comprises a transverse adjusting guide sliding rail (611), a plurality of transverse adjusting guide sliding blocks (610) are arranged on the transverse adjusting guide sliding rail (611), the transverse adjusting guide sliding rail (611) is fixedly mounted on the clamp supporting beam (4), and the transverse adjusting guide sliding blocks (610) are fixedly mounted on the longitudinal adjusting support mounting plate (67).
4. The tooling fixture of the free-form surface of the silicon nitride sucker according to claim 2, wherein: the longitudinal adjustment support comprises a longitudinal adjustment driving cylinder (69), a cylinder body of the longitudinal adjustment driving cylinder (69) is fixed on a longitudinal adjustment support mounting plate (67), a longitudinal adjustment driving plate (68) is arranged at the output end of the longitudinal adjustment driving cylinder (69), and a longitudinal adjustment guiding device is arranged between the longitudinal adjustment driving plate (68) and the longitudinal adjustment support mounting plate (67).
5. The fixture for the free-form surface of the silicon nitride sucker according to claim 4, wherein: the direction adjusting guide device comprises a longitudinal adjusting guide sliding rail (612), a plurality of longitudinal adjusting guide sliding blocks (613) are arranged on the longitudinal adjusting guide sliding rail (612), the longitudinal adjusting guide sliding rail (612) is fixedly arranged on a longitudinal adjusting support mounting plate (67), and the longitudinal adjusting guide sliding blocks (613) are fixedly arranged on a longitudinal adjusting driving plate (68).
6. The tooling fixture for the free-form surface of the silicon nitride sucker according to claim 1, wherein: the sucker conveying device (7) comprises a conveying supporting frame (71), a plurality of sucker conveying rollers (72) are arranged on the conveying supporting frame (71), and the lower end of the conveying supporting frame (71) is arranged on conveying supporting legs (74) through a frame fixing plate (73).
7. The tooling fixture for the free-form surface of the silicon nitride sucker according to claim 1, wherein: the adjustable support is characterized in that a plurality of adjusting support cushion feet (8) are arranged on the lower sides of the platform support frame (1) and the sucker conveying device (7), the adjusting support cushion feet (8) comprise adjusting support cushion plates, and the upper ends of the adjusting support cushion plates are arranged in screw holes on the platform support frame (1) and the sucker conveying device (7) through double-headed screws.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321783791.0U CN220297133U (en) | 2023-07-09 | 2023-07-09 | Frock clamp of silicon nitride sucking disc free-form surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321783791.0U CN220297133U (en) | 2023-07-09 | 2023-07-09 | Frock clamp of silicon nitride sucking disc free-form surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220297133U true CN220297133U (en) | 2024-01-05 |
Family
ID=89346051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321783791.0U Active CN220297133U (en) | 2023-07-09 | 2023-07-09 | Frock clamp of silicon nitride sucking disc free-form surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220297133U (en) |
-
2023
- 2023-07-09 CN CN202321783791.0U patent/CN220297133U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |