CN220272458U - Silicon chip detects buffer memory device - Google Patents
Silicon chip detects buffer memory device Download PDFInfo
- Publication number
- CN220272458U CN220272458U CN202321708385.8U CN202321708385U CN220272458U CN 220272458 U CN220272458 U CN 220272458U CN 202321708385 U CN202321708385 U CN 202321708385U CN 220272458 U CN220272458 U CN 220272458U
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- China
- Prior art keywords
- streamline
- guide rail
- horizontal guide
- buffer
- silicon wafer
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 41
- 239000010703 silicon Substances 0.000 title claims abstract description 41
- 230000007246 mechanism Effects 0.000 claims abstract description 30
- 230000003139 buffering effect Effects 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims abstract description 14
- 230000002457 bidirectional effect Effects 0.000 claims description 15
- 238000007689 inspection Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 26
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 125000003003 spiro group Chemical group 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a silicon wafer detection buffer device, which comprises a first streamline and a second streamline, wherein the first streamline and the second streamline are arranged in parallel, a horizontal guide rail is arranged between the first streamline and the second streamline, two ends of the horizontal guide rail are respectively positioned above the first streamline and the second streamline, and a guide mechanism is arranged below the horizontal guide rail; the horizontal guide rail is provided with a transverse moving seat in a sliding manner, and the transverse moving seat can reciprocate along the horizontal guide rail under the drive of the first driving piece; the vertical guide rail is fixedly arranged on the transverse moving seat, the lifting seat is slidably arranged on the vertical guide rail, the lifting seat can reciprocate along the vertical guide rail under the drive of the second driving piece, and the lower end of the lifting seat is provided with the buffering flower basket. Through setting up two streamlines to install a plurality of horizontal guide rails that have liftable buffering basket of flowers between two streamlines, when buffering material loading is in to a buffering basket of flowers, another buffering basket of flowers can be at another streamline buffering unloading, improved the production efficiency of equipment.
Description
Technical Field
The utility model relates to the technical field of silicon wafer detection devices, in particular to a silicon wafer detection buffer device.
Background
Silicon wafers are widely used as important industrial raw materials in the production and manufacture of solar cells, circuit boards and other products. To ensure the quality of the product manufactured from the silicon wafer, the silicon wafer needs to be detected and sorted. In the silicon chip sorting and detecting process, if the production beats of front and rear end equipment are not matched, the silicon chip is backlogged, and the silicon chip is polluted or damaged, so that a buffer device is required to be arranged on the silicon chip sorting and detecting equipment.
However, when the existing silicon wafer is inserted into the cache basket, the front and rear positions of the existing silicon wafer are uneven, so that the subsequent detection operation is affected; and after the fixed screw is unscrewed through the manual work in the current buffer memory support size adjustment, manual regulation buffer memory basket of flowers's support, the regulation precision is poor, and regulation efficiency is low.
Disclosure of Invention
The utility model aims to provide a silicon wafer detection buffer device for solving the technical problems in the background art, and the utility model is realized by the following technical scheme:
the silicon wafer detection buffer device comprises a first streamline and a second streamline, wherein the first streamline and the second streamline are arranged in parallel, a horizontal guide rail is arranged between the first streamline and the second streamline, two ends of the horizontal guide rail are respectively positioned above the first streamline and the second streamline, and a guide mechanism is arranged below the horizontal guide rail; the horizontal guide rail is provided with a transverse moving seat in a sliding manner, and the transverse moving seat can reciprocate along the horizontal guide rail under the drive of the first driving piece; the vertical guide rail is fixedly arranged on the transverse moving seat, the lifting seat is slidably arranged on the vertical guide rail, the lifting seat can reciprocate along the vertical guide rail under the drive of the second driving piece, and the lower end of the lifting seat is provided with the buffering flower basket.
Further, the buffering basket of flowers includes the buffering support, and two buffering supports are vertical and parallel arrangement each other, and two adjacent one side of buffering support is provided with the interface.
Further, the lower extreme of lifting seat is provided with two-way lead screw module, and slidable mounting has two regulation seats on the two-way lead screw module, and two regulation seats can be close to or keep away from in step under the drive of third driving piece, and two buffer memory supports are fixed respectively in the lower extreme of two regulation seats.
Further, guide mechanism is located between first streamline and the second streamline, and guide mechanism includes the base, is fixed with two-way cylinder on the base, and the direction of extension of two-way cylinder is on a parallel with the direction of delivery of first streamline, and the locating lever is installed respectively at two ends of two-way cylinder, and the height of locating lever is greater than or equal to the height of buffering basket of flowers.
Further, the both sides level of base is provided with the butt post, and the lower extreme of locating lever is provided with adjusting screw, and adjusting screw and butt post coaxial setting.
Further, the first driving piece, the second driving piece and the third driving piece are all servo motors.
Further, the number of the horizontal guide rails is at least two.
The technical scheme provided by the embodiment of the application has at least the following technical effects or advantages:
1. the two streamline are arranged, and the guide mechanism is arranged between the two streamline to align the two ends of the silicon wafer on the cache basket, so that the precision of the placement position of the silicon wafer is improved;
2. through installing two buffer memory supports of buffering basket of flowers on two-way lead screw module, through the position between two buffer memory supports of servo motor control, improved convenience and the accuracy of buffering basket of flowers regulation.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model.
FIG. 1 is a schematic structural diagram of an embodiment of the present application;
FIG. 2 is a schematic diagram of the position of the buffer mechanism and the guide mechanism according to the embodiment of the present application;
FIG. 3 is a schematic diagram of a buffering mechanism according to an embodiment of the present application;
fig. 4 is a schematic structural diagram of a guide mechanism according to an embodiment of the present application.
The symbols in the drawings are: 1. a frame; 2. a first flow line; 3. a second flow line; 4. a buffer mechanism; 41. a horizontal guide rail; 42. a traversing seat; 43. a first driving member; 44. a vertical guide rail; 45. a lifting seat; 46. a second driving member; 47. a bidirectional screw module; 471. an adjusting seat; 48. a third driving member; 49. a buffer support; 491. an interface; 5. a guide mechanism; 51. a base; 52. a bidirectional cylinder; 53. a positioning rod; 54. abutting the column; 55. adjusting a screw; 6. a receiving box; 7. and (3) a silicon wafer.
Description of the embodiments
In order that the manner in which the above recited features of the present utility model can be better understood, a more particular description of the utility model will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the utility model, its application, or uses. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The silicon wafer detection buffer device shown in fig. 1 and 2 comprises a frame 1, a first flow line 2, a second flow line 3, a buffer mechanism 4, a guide mechanism 5 and a receiving box 6. The frame 1 is rectangular frame structure, and first streamline 2, second streamline 3 are two belt transfer chain, and two first streamlines 2 parallel mount are in the middle part of frame 1, and two second streamlines 3 symmetry are installed in the outside of two first streamlines 2. Six sets of buffer mechanisms 4 are mounted on the top of the frame 1 in two columns, and the buffer mechanisms 4 can reciprocate between the first flow line 2 and the second flow line 3. Six sets of guide mechanisms 5 are installed between the first flow line 2 and the second flow line 3 and are used for guiding the silicon wafers 7 on the buffer mechanism 4. A receiving box 6 is mounted downstream of the first flow line 2 for receiving rejected silicon wafers 7. The buffer mechanism 4 picks up a plurality of silicon wafers 7 from the first flow line 2, the silicon wafers 7 are guided by the guide mechanism 5 and then placed on the second flow line 3, and the broken silicon wafers 7 directly flow into the receiving box 6 from the tail end of the first flow line 2.
As shown in fig. 1 to 3, the buffer mechanism 4 includes a horizontal rail 41, the horizontal rail 41 is mounted on the top of the frame 1, and two ends of the horizontal rail 41 are respectively located above the first flow line 2 and the second flow line 3. The horizontal guide rail 41 is slidably provided with a traverse seat 42 via a slider, the horizontal guide rail 41 is provided with a first driving member 43, and the traverse seat 42 can be moved left and right along the horizontal guide rail 41 by the driving of the first driving member 43. The transverse moving seat 42 is fixedly provided with a vertical guide rail 44 through a bolt, the vertical guide rail 44 is provided with a lifting seat 45 in a sliding manner through a sliding block, one side of the vertical guide rail 44 is provided with a second driving piece 46, and the lifting seat 45 can move up and down along the vertical guide rail 44 under the driving of the second driving piece 46. The lower extreme level of lift seat 45 installs two-way lead screw module 47, and third driving piece 48 is installed to one end of two-way lead screw module 47, and two adjustment seats 471 are installed to the lower side slip of two-way lead screw module 47, and two adjustment seats 471 can be close to or keep away from under the drive of third driving piece 48 in step. The first driving member 43, the second driving member 46, and the third driving member 48 are all servo motors, and the servo motors drive the traversing seat 42, the lifting seat 45, and the adjusting seat 471 to move along the horizontal guide rail 41, the vertical guide rail 44, and the bi-directional screw module 47 respectively through ball screws.
The lower ends of the two adjusting seats 471 are respectively provided with a buffer bracket 49, the two buffer brackets 49 are vertically arranged and are parallel to each other, one side of each buffer bracket 49 adjacent to the other buffer bracket is provided with an inserting port 491, and the two inserting ports 491 are oppositely arranged to form a buffer basket for accommodating the silicon chip 7.
As shown in fig. 2 and 4, the guide mechanism 5 is installed between the first flow line 2 and the second flow line 3, the guide mechanism 5 includes a base 51, a bidirectional cylinder 52 is fixed on the upper side of the base 51, and the expansion and contraction direction of the bidirectional cylinder 52 is parallel to the conveying direction of the first flow line 2. The two ends of the bidirectional air cylinder 52 are respectively vertically provided with a positioning rod 53, the height of the positioning rods 53 is greater than or equal to the height of the buffering flower basket, and the bidirectional air cylinder 52 can drive the two vertical positioning rods 52 to approach or separate. The base 51 is provided with the butt post 54 horizontally on both sides, and the lower extreme of locating lever 53 downwardly extending has offered horizontal screw hole, threaded hole spiro union has adjusting screw 55. By controlling the screwing depth of the adjusting screw 55, the distance between the two positioning rods 53 when the bidirectional cylinder 52 is contracted can be adjusted so as to adapt to the alignment of silicon wafers 7 with different sizes. The adjusting screw 55 is screwed with a nut for fixing the position of the adjusting screw 55 and ensuring the accuracy of the guide position.
It should be noted that the photoelectric switches for identifying positions are installed at the positions of the first flow line 2, the second flow line 3, the horizontal guide rail 41, the vertical guide rail 44, the bidirectional screw module 47 and the bidirectional air cylinder 52, and the structure and the principle of the photoelectric switches are all the prior art and are not described herein.
The working principle of the embodiment of the application is as follows:
firstly, a buffer mechanism moves to the upper part of a first flow line and descends to the lowest position, silicon wafers on the first flow line are sequentially inserted into a buffer basket from top to bottom, and the front-stage equipment judges that unqualified silicon wafers do not insert the basket and directly flow into a receiving box from the tail end of the first flow line;
then, the buffer mechanism moves between two positioning rods of the guide mechanism, and the bidirectional cylinder contracts, so that the two positioning rods guide the silicon wafers in the buffer basket from two sides respectively, and the positions of the silicon wafers in the buffer basket are consistent;
and finally, the buffer mechanism moves to the position above a second flow line, and the second flow line withdraws the silicon chips in the buffer basket from bottom to top and conveys the silicon chips to the next detection station.
When the silicon wafers with different sizes are buffered, the two buffer brackets are driven to synchronously approach or separate by the third driving piece, so that the accurate adjustment of the size of the buffer basket can be realized.
The technical scheme in the embodiment of the application at least has the following technical effects or advantages:
1. the two streamline are arranged, and the guide mechanism is arranged between the two streamline to align the two ends of the silicon wafer on the cache basket, so that the precision of the placement position of the silicon wafer is improved;
2. through installing two buffer memory supports of buffering basket of flowers on two-way lead screw module, through the position between two buffer memory supports of servo motor control, improved convenience and the accuracy of buffering basket of flowers regulation.
In the description of the present utility model, it should be understood that the azimuth or positional relationships indicated by the azimuth terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal", and "top, bottom", etc., are generally based on the azimuth or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and these azimuth terms do not indicate and imply that the apparatus or elements referred to must have a specific azimuth or be constructed and operated in a specific azimuth, and thus should not be construed as limiting the scope of protection of the present utility model: the orientation word "inner and outer" refers to inner and outer relative to the contour of the respective component itself.
In addition, the terms "first", "second", etc. are used to define the components, and are only for convenience of distinguishing the corresponding components, and the terms have no special meaning unless otherwise stated, and therefore should not be construed as limiting the scope of the present utility model.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (7)
1. The silicon wafer detection buffer device is characterized by comprising a first streamline and a second streamline, wherein the first streamline and the second streamline are arranged in parallel, a horizontal guide rail is arranged between the first streamline and the second streamline, two ends of the horizontal guide rail are respectively positioned above the first streamline and the second streamline, and a guide mechanism is arranged below the horizontal guide rail; the horizontal guide rail is provided with a transverse moving seat in a sliding manner, and the transverse moving seat can reciprocate along the horizontal guide rail under the driving of the first driving piece; the horizontal moving seat is fixedly provided with a vertical guide rail, the vertical guide rail is provided with a lifting seat in a sliding manner, the lifting seat can reciprocate along the vertical guide rail under the driving of the second driving piece, and the lower end of the lifting seat is provided with a buffering flower basket.
2. The silicon wafer detection buffer device according to claim 1, wherein the buffer basket comprises buffer supports, the two buffer supports are arranged vertically and in parallel, and an inserting port is arranged on one side of each buffer support adjacent to the other buffer support.
3. The silicon wafer detection buffer device according to claim 2, wherein a bidirectional screw rod module is arranged at the lower end of the lifting seat, two adjusting seats are slidably mounted on the bidirectional screw rod module, the two adjusting seats can be synchronously close to or far away from each other under the driving of a third driving piece, and the two buffer supports are respectively fixed at the lower ends of the two adjusting seats.
4. The silicon wafer detection buffer device according to claim 1, wherein the guide mechanism is located between the first streamline and the second streamline, the guide mechanism comprises a base, a bidirectional cylinder is fixed on the base, the expansion direction of the bidirectional cylinder is parallel to the conveying direction of the first streamline, positioning rods are respectively installed at two ends of the bidirectional cylinder, and the height of each positioning rod is greater than or equal to the height of the buffer basket.
5. The silicon wafer detection buffer device according to claim 4, wherein two sides of the base are horizontally provided with abutting columns, the lower end of the positioning rod is provided with an adjusting screw, and the adjusting screw and the abutting columns are coaxially arranged.
6. The silicon wafer detection buffer device according to claim 3, wherein the first driving member, the second driving member and the third driving member are servo motors.
7. The silicon wafer inspection buffer device according to claim 1, wherein the number of the horizontal guide rails is at least two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321708385.8U CN220272458U (en) | 2023-07-03 | 2023-07-03 | Silicon chip detects buffer memory device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321708385.8U CN220272458U (en) | 2023-07-03 | 2023-07-03 | Silicon chip detects buffer memory device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220272458U true CN220272458U (en) | 2023-12-29 |
Family
ID=89306403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321708385.8U Active CN220272458U (en) | 2023-07-03 | 2023-07-03 | Silicon chip detects buffer memory device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220272458U (en) |
-
2023
- 2023-07-03 CN CN202321708385.8U patent/CN220272458U/en active Active
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