CN220214816U - Liquid mixing device and semiconductor process equipment - Google Patents

Abstract

The application discloses a liquid mixing device and semiconductor process equipment, in the liquid mixing device, a first infusion tube and a second infusion tube are both communicated with a liquid mixing container, an overflow inlet of a first overflow pipeline is communicated with the bottom surface of the liquid mixing container, a part of the first overflow pipeline is positioned at a preset height of the liquid mixing container, and a first switch valve is arranged on the first overflow pipeline; the first infusion tube is used for conveying first liquid into the liquid mixing container in an emptying state, and when the actual liquid level of the first liquid is greater than a preset height, the first switch valve is opened, so that the first liquid can be discharged from the first overflow pipeline until the liquid level in the liquid mixing container is level with the preset height; the second infusion tube is provided with a first metering device, the first switch valve is closed under the condition that the actual liquid level is reduced to a preset height, and the second infusion tube is used for conveying a preset volume of second liquid controlled by the first metering device into the liquid mixing container. The liquid mixing device has higher measurement precision, so that the mixed liquid can meet the use requirement.

Description

Liquid mixing device and semiconductor process equipment

Technical Field

The application relates to the technical field of semiconductor process equipment, in particular to a liquid mixing device and semiconductor process equipment.

Background

A semiconductor cleaning apparatus is an apparatus that cleans a wafer. When the semiconductor cleaning equipment cleans the wafer, the concentration requirements of the cleaning liquid medicine are different for different process requirements.

In order to obtain the cleaning liquid with different concentrations, the cleaning liquid needs to be mixed in a liquid mixing device. When the cleaning liquid is disposed, different liquids are required to be input into the process tank through different pipelines according to a certain proportion for mixing. In the related art, liquid level sensors with different heights are arranged in a liquid mixing container, when liquid is mixed, first liquid is firstly input into the liquid mixing container, after the liquid level sensor with a lower liquid level trigger position of the first liquid is arranged, the first liquid is stopped being input into the liquid mixing container, then second liquid is input into the liquid mixing container, and when the liquid level sensor with a higher liquid level trigger position of the mixed liquid in the liquid mixing container is arranged, the second liquid is stopped being input into a process tank. Because the liquid mixing device measures the volumes of different liquids by means of the liquid level sensor in the process tank, the measurement error of the volumes of the liquids is relatively large, and therefore the actually required mixed liquid cannot be obtained accurately.

Disclosure of Invention

An object of the embodiment of the application is to provide a liquid mixing device and a semiconductor process device, so as to solve the problem that in the related art, the liquid mixing device has larger measurement error due to the fact that the liquid mixing device detects the volumes of first liquid and second liquid required by liquid level sensor, and then the mixed liquid cannot meet the use requirement.

In a first aspect, embodiments of the present application disclose a liquid mixing device comprising a first infusion tube, a second infusion tube, a liquid mixing container, and a first overflow line; wherein:

the liquid discharge end part of the first infusion tube and the liquid discharge end part of the second infusion tube are communicated with the liquid mixing container, an overflow inlet of the first overflow pipeline is communicated with the bottom surface of the liquid mixing container, a part of the first overflow pipeline is positioned at a preset height of the liquid mixing container, and a first switch valve is arranged on the first overflow pipeline;

the first infusion tube is used for conveying first liquid into the liquid mixing container in an emptying state, and when the actual liquid level of the first liquid is greater than the preset height, the first switch valve is opened, so that the first liquid can be discharged from the first overflow pipeline until the liquid level in the liquid mixing container is level with the preset height;

The second infusion tube is provided with first metering equipment, and when the actual liquid level is reduced to the preset height, the first switch valve is closed, and the second infusion tube is used for conveying second liquid with a preset volume controlled by the first metering equipment into the liquid mixing container.

In a second aspect, an embodiment of the application discloses a semiconductor process device, which includes a wafer cleaning tank and the above-mentioned liquid mixing device, the wafer cleaning tank and the liquid mixing container are communicated through a liquid mixing conveying pipe, and the liquid mixing conveying pipe is provided with a sixth switch valve.

The embodiment of the application discloses a liquid mixing device is through setting up first overflow pipeline and first ooff valve, a part of first overflow pipeline is located the height of predetermineeing of mixing liquid container, first overflow pipeline is located to first ooff valve, at the in-process of first transfer line in to mixing liquid container input first liquid, when the actual liquid level of the first liquid in the mixing liquid container is greater than predetermineeing the height, stop carrying first liquid in the mixing liquid container, through opening first ooff valve for first liquid can be discharged from first overflow pipeline, with the actual liquid level of messenger's first liquid falls to predetermineeing the height, thereby utilize the overflow effect of first overflow pipeline to make the actual liquid level of first liquid comparatively accurately be in predetermineeing the height, make the volume of the first liquid in the mixing liquid container satisfy the parameter of predetermineeing. And then, the second liquid is conveyed to the liquid mixing container through the second infusion tube, and the volume of the second liquid input into the liquid mixing container is accurately controlled through the first metering equipment, so that the volumes of the first liquid and the second liquid conveyed to the liquid mixing container are accurately controlled, and the actually required mixed liquid can be accurately obtained.

And because first overflow pipeline communicates in the bottom of mixing liquid container to in-process that mixes first liquid and second liquid, remain the liquid in the first overflow pipeline can flow each other and mix with the liquid in the mixing liquid container all the time, on the one hand can guarantee that the concentration precision of the solution that mixes the formation is higher, on the other hand, when using the solution of mixing liquid container, along with the liquid level in the mixing liquid container continuously descends, the liquid that remains in the first overflow pipeline also can slowly flow back to in the mixing liquid container, thereby can not appear that the solution remains in the first overflow pipeline all the time, and the condition of causing the waste.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute an undue limitation to the application. In the drawings:

FIG. 1 is a schematic structural diagram of the prior art;

fig. 2 is a schematic structural diagram of a semiconductor processing apparatus according to an embodiment of the present disclosure;

FIG. 3 is a partial schematic view of a liquid mixing device disclosed in an embodiment of the present application;

fig. 4 is a schematic cross-sectional view of a first switching valve in a liquid mixing device according to an embodiment of the present disclosure.

Reference numerals:

10-liquid mixing container,

100-a first infusion tube, 130-a second switch valve,

200-a second infusion tube, 241-a liquid temporary storage tank, 250-a first metering device, 260-a second metering device,

300-liquid mixing container,

400-a first overflow pipeline, 411-a first connecting section, 412-a second connecting section, 413-a third connecting section, 420-a first switch valve, 421-a valve body 422-valve core, 423-first interface section, 424-second interface section, 425-overflow section, 430-three-way joint, 441-first joint, 442-second joint,

710-a first liquid level sensor, 720-a second liquid level sensor,

810-a second overflow pipeline, 820-a leak-proof disk, 840-a leak sensor, 850-a gas pipe, 860-an exhaust pipeline, 870-a third switch valve,

900-wafer cleaning tank, 910-inner tank, 920-outer tank, 930-mixed liquor conveying pipe, 940-sixth switch valve, 950-fluid supplementing pipeline, 960-seventh switch valve, 970-eighth switch valve, 980-emptying pipeline and 990-frame.

Detailed Description

The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings of the embodiments of the present application, and it is apparent that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.

The terms first, second and the like in the description and in the claims, are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged, as appropriate, such that embodiments of the present application may be implemented in sequences other than those illustrated or described herein, and that the objects identified by "first," "second," etc. are generally of a type and not limited to the number of objects, e.g., the first object may be one or more. Furthermore, in the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally means that the associated object is an "or" relationship.

As described in the background art, in the process of solving the technical problem, the inventor finds that other related technical schemes in the current technology can alleviate the technical problem.

Fig. 1 shows a schematic diagram of a technical solution of the prior art, in which 10 is a mixing container, 20 is an overflow pipe, 30 is an elastic connection structure, and 40 is a fixing component. Wherein the overflow pipe 20 is installed in the mixing container 10 through the elastic connection structure 30, and the position of the top pipe orifice of the overflow pipe 20 is communicated with the space in the mixing container 10, and the overflow pipe 20 and the mixing container 10 can be relatively fixed by the fixing assembly 40.

In the application process of the technical scheme, the height of the overflow pipe 20 can be determined based on parameters such as the corresponding liquid level height of the volume of the first liquid in the solution to be prepared in the mixed liquid container 10, and the position of the overflow pipe 20 is kept unchanged by the fixing assembly 40. In this case, the first liquid is overflowed from the overflow pipe 10 by injecting an excessive amount of the first liquid into the liquid mixing container 10 so that the liquid level of the first liquid is higher than the nozzle of the overflow pipe, and then opening the overflow pipe 10, thereby making the first liquid remaining in the liquid mixing container 10 equal to a desired preset value. Then, the second liquid corresponding to the required solution is injected into the mixed liquid container 10 by using the metering equipment, so that the first liquid and the second liquid are mixed in the mixed liquid container to form the solution with the required concentration. In the technical scheme, the volumes of the first liquid and the second liquid are respectively measured, so that the volume measurement accuracy of the first liquid and the volume measurement accuracy of the second liquid are relatively high.

However, after the present inventors studied this technical solution, they found that the above technical solution still has some technical drawbacks. Specifically, after the overflow of the first liquid is completed, the page of the first liquid in the liquid mixing container is flush with the pipe orifice of the overflow pipe, at this time, in the process of injecting the second liquid into the liquid mixing container, along with the continuous injection of the second liquid, the liquid in the liquid mixing container can continue to flow from the pipe orifice of the overflow pipe into the overflow pipe, if the volume of the second liquid is smaller, the liquid overflowed into the overflow pipe after the injection of the second liquid can not be filled into the overflow pipe, so that the liquid in the overflow pipe can not flow with the liquid in the liquid mixing container in an alternating manner, and the concentration of the liquid in the liquid mixing container still has a difference from the required concentration due to the fact that the liquid flowing into the overflow pipe is not uniformly mixed, and the liquid flowing into the overflow pipe can not be effectively utilized due to the fact that one end of the overflow pipe deviating from the pipe orifice is a discharge end, so that the liquid medicine is wasted; even if the volume of the second liquid is large, the overflow pipe is closed after the overflow of the first liquid is completed because the end of the overflow pipe away from the pipe opening is a discharge end, so that the overflow pipe can be communicated with the space in the liquid mixing container only through the pipe opening in the liquid mixing container, the liquid in the overflow pipe is difficult to uniformly mix with the liquid in the liquid mixing container, and the concentration of the liquid in the liquid mixing container is different from the required concentration.

The inventor provides a liquid mixing device which is claimed to be protected by the following embodiments of the application through further creative labor based on the research of the current technical scheme. Referring to fig. 2 and 3, an embodiment of the present application discloses a liquid mixing device, which includes a first infusion tube 100, a second infusion tube 200, a liquid mixing container 300, and a first overflow pipe 400. In addition, the liquid mixing device may be further provided with a controller to improve the automation degree of the liquid mixing device, where the controller is a device for controlling the first overflow pipeline 400 in the liquid mixing device, specifically for controlling the on-off state of the first switch valve 420 on the first overflow pipeline 400, and of course, in this application, the controller may also be used to control the working states of the devices such as the first infusion tube 100 and the second infusion tube 200, which is not limited herein. In the liquid mixing device according to the embodiment of the present application, the controller may not be provided, and the on/off state of the devices such as the first switch valve 420 may be controlled by a manual control method, and for convenience of description, the controller is used to control the first switch valve 420.

The liquid mixing container 300 is a place where the first liquid and the second liquid are mixed, the liquid discharge end of the first infusion tube 100 and the liquid discharge end of the second infusion tube 200 are both communicated with the liquid mixing container 300, the first liquid can enter the liquid mixing container 300 through the first infusion tube 100, and the second liquid can enter the liquid mixing container 300 through the second infusion tube 200. It should be noted that, in the first liquid and the second liquid, the first liquid is a solvent, which may be water generally, and the second liquid is a liquid solute, i.e. a liquid to be diluted, and the specific kind thereof may be determined according to actual requirements.

The overflow inlet of the first overflow pipe 400 is communicated with the bottom of the liquid mixing container 300, and a part of the first overflow pipe 400 is located at a preset height of the liquid mixing container 300, that is, the overflow height of the first overflow pipe 400 is a preset height, which may be a manually preset height. The first overflow line 400 is provided with a first switching valve 420, specifically, the first switching valve 420 is provided at a position in the middle of the first overflow line 400, and the first switching valve 420 divides the first overflow line 400 into a first connection section 411 and a second connection section 412. When the liquid level in the liquid mixing container 300 is higher than the preset height and the first switch valve 420 is opened, the first liquid in the liquid mixing container 300 higher than the preset height overflows and is discharged from the first overflow pipeline 400, so that the liquid level of the first liquid in the liquid mixing container 300 is reduced to the preset height. The preset height is the corresponding liquid level height of the volume of the first liquid in the mixing container 300 required during mixing.

Specifically, the first overflow line 400 may be connected to the bottom of the mixing vessel 300, which may ensure that the first overflow line 400 can communicate with the bottom surface of the mixing vessel 300. In another embodiment of the present application, the first overflow pipe 400 may be connected to the side of the mixing container 300, and the purpose of communicating the first overflow pipe 400 with the bottom of the mixing container 300 may be satisfied by connecting the first overflow pipe 400 to a position with a lower height in the side of the mixing container 300. In the case where the first overflow line 400 is connected to the side of the mixing tank 300, the installation work of the mixing tank 300 is facilitated, and the presence of the first overflow line 400 is prevented from interfering with the layout of the devices for supporting the mixing tank 300. In addition, the first overflow pipe 400 has a bent structure, so that a portion of the first overflow pipe 400 can extend upward and be located at a predetermined height of the mixing container 300.

The first infusion tube 100 is used for delivering the first liquid into the liquid mixing container 300 in the empty state, so that the actual liquid level of the first liquid is greater than a preset height, and meanwhile, under the condition that the first switch valve 420 is in the open state, the first liquid higher than the preset height in the liquid mixing container 300 can enter the first overflow pipeline from the overflow inlet of the first overflow pipeline 400 and be discharged through the first switch valve 420, and typically, the first liquid is a solvent such as water, so as to improve the precision of the solution formed by mixing.

Specifically, the first infusion tube 100 delivers the first liquid into the mixing container 300 in the empty state, and the controller controls the first switch valve 420 to be in the closed state at this time, and of course, the first switch valve 420 may be also in the open state under some special requirements. When the actual liquid level of the first liquid is greater than the preset height, the input of the first liquid to the liquid mixing container 300 can be stopped, the controller controls the first switch valve 420 to be opened, under the action principle of the communicating vessel, the first liquid higher than the first overflow pipeline 400 in the liquid mixing container 300 can flow into the first overflow pipeline through the overflow inlet of the first overflow pipeline 400 and is discharged through the first switch valve 420, so that the liquid level of the first liquid in the liquid mixing container 300 is reduced to the preset height, and after the overflow of the first liquid in the liquid mixing container 300 is reduced to the preset height through the overflow pipeline, the controller controls the first switch valve 420 to be closed.

The second infusion tube 200 is provided with a first metering device 250, and when the actual liquid level drops to a preset height, the first switch valve 420 is in a closed state, so that the first liquid with a corresponding volume obtained based on the concentration measurement of the required solution is ensured to be reserved in the mixed liquid container 300. In this case, the second transfer line 200 is used to deliver a predetermined volume of the second liquid controlled by the first metering device 250 into the mixing vessel 300. The first metering device 250 may be a positive displacement flow meter, an impeller flow meter, a momentum flow meter, or the like.

In a specific mixing process, the first switch valve 420 may be in a closed state, the first infusion tube 100 conveys the first liquid into the mixing container 300 in an empty state, when the actual liquid level of the first liquid in the mixing container 300 is greater than a preset height, the first switch valve 420 is opened at this time, and since the actual liquid level is greater than the preset height, the first liquid is discharged from the first overflow pipeline 400, so that the actual liquid level of the first liquid is reduced to the preset height, and after the liquid level of the first liquid is reduced to the preset height, the first switch valve 420 is closed. The second liquid is then delivered to the mixing vessel 300 through the second infusion tube 200, and the volume of the second liquid input to the mixing vessel 300 is controlled by the first metering device 250. After a predetermined volume of the second liquid is inputted into the mixing container 300, the second liquid is stopped from being supplied into the mixing container 300.

According to the liquid mixing device disclosed by the embodiment of the application, the first overflow pipeline 400 and the first switch valve 420 are arranged, a part of the first overflow pipeline 400 is located at the preset height of the liquid mixing container 300, the first switch valve 420 is arranged on the first overflow pipeline 400, when the actual liquid level of the first liquid in the liquid mixing container 300 is greater than the preset height in the process of inputting the first liquid into the liquid mixing container 300 through the first infusion tube 100, the first liquid is stopped from being conveyed into the liquid mixing container 300, the first switch valve 420 is opened, the first liquid can be discharged from the first overflow pipeline 400, the actual liquid level of the first liquid is reduced to the preset height, and therefore the actual liquid level of the first liquid can be accurately located at the preset height by utilizing the overflow effect of the first overflow pipeline 400, and the volume of the first liquid in the liquid mixing container 300 can meet preset parameters. Then, the second liquid is delivered to the liquid mixing container 300 through the second infusion tube 200, and the volume of the second liquid input into the liquid mixing container 300 is controlled accurately through the first metering device 250, so that the volumes of the first liquid and the second liquid delivered to the liquid mixing container 300 are controlled accurately, and the actually required mixed liquid can be obtained accurately.

In addition, since the first overflow pipe 400 is connected to the bottom of the liquid mixing container 300, in the process of mixing the first liquid and the second liquid, the liquid retained in the first overflow pipe 400 can always flow with the liquid in the liquid mixing container 300 to be mixed, on the one hand, the concentration precision of the solution formed by mixing can be ensured to be higher, on the other hand, when the solution in the liquid mixing container 300 is used, the liquid retained in the first overflow pipe 400 can slowly flow back into the liquid mixing container 300 along with the continuous decrease of the liquid level in the liquid mixing container 300, so that the condition that the solution remains in the first overflow pipe 400 all the time and is wasted is avoided.

Alternatively, the first infusion tube 100 and the second infusion tube 200 may be provided with a manual valve and an electric control valve, through which the on-off of the first infusion tube 100 and the second infusion tube 200 may be controlled. When the liquid mixing device is overhauled and maintained, the liquid mixing device needs to be powered off, and the electric control valve can lose control due to the power off, so that the liquid mixing device can be manually controlled through the manual valve.

As described above, the first overflow line 400 includes the first connection section 411 and the second connection section 412, and a certain portion of the first connection section 411 and/or the second connection section 412 may be located at a predetermined height during installation of the first overflow line 400.

In another embodiment of the present application, the first switch valve 420 may be located at a preset height, and specifically, the overflow port of the first switch valve 420 is located at a preset height. Specifically, as shown in fig. 4, the first switching valve 420 includes a valve body 421, a spool 422, a first port section 423, a second port section 424, and an overflow section 425.

The valve body 421 is a main body portion of the first switch valve 420, a cavity is disposed in the valve body 421, the valve core 422 and the overflow section 425 are both disposed in the valve body 421, the overflow section 425 extends along a vertical direction, and the valve core 422 can be plugged into a top opening of the overflow section 425 in an openable manner, so as to control an opened and closed state of the first switch valve 420. In the first overflow pipe, a first end of the first connecting section 411 is connected to the bottom of the liquid mixing container 300, the first connecting section 423 and the second connecting section 424 are both connected to the valve body 421, the first end of the first connecting section 423 is connected to a second end of the first connecting section 411, and the first end of the second connecting section 424 is connected to a first end of the second connecting section 412, so that the first switch valve 420 can be connected to the first overflow pipe. Specifically, the first and second interface sections 423, 424 and the relief section 425 may each be in a fixed connection relationship with the valve body 421 by welding or screwing.

Meanwhile, the second end of the first interface section 423 is communicated with the overflow section 425, so that the liquid in the first interface section 423 can flow into the overflow section 425, and the second end of the second interface section 424 is communicated with the top opening of the overflow section 425, so that after the liquid in the overflow section 425 overflows from the top opening, the liquid can flow into the second connection section through the second interface section 424, and the purpose of overflow is achieved. Moreover, the first connecting section, the second connecting section, the first interface section 423 and the second interface section 424 are all located below the top opening of the overflow section 425, and the top opening of the overflow section 425 is located at a preset height, and the top opening of the overflow section 425 is arranged flush with the horizontal plane, so that under the condition that the top opening of the overflow section 425 is used as an overflow standard, the precision of the overflow process can be greatly improved, and the concentration precision of the formed solution is further improved.

Optionally, the first overflow pipe 400 is movably disposed in the mixing container 300, so that a height of a portion of the first overflow pipe 400 located at a predetermined height of the mixing container 300 is adjustable. Specifically, at least a portion of the first overflow line 400 may be movable relative to the mixing vessel 300 to adjust a height of a portion of the first overflow line 400 located at a predetermined height (i.e., a predetermined height). Optionally, the first overflow line 400 includes a flexible line, so that the height of a portion of the structure in the first overflow line 400 is adjustable. Alternatively, the first overflow line 400 may further include a telescopic structure, so that the height of a part of the structure in the first overflow line 400 is adjusted by means of telescopic deformation.

According to the embodiment of the application, the height of the partial structure of the first overflow pipeline 400 is adjustable, and specific parameters of the preset height can be changed, so that different requirements on the volume of the first liquid can be met according to actual needs, and the liquid mixing capacity of the liquid mixing device is improved.

Further, the first overflow pipe 400 further includes a third connection section 413 and a three-way joint 430, where a first end of the third connection section 413 is communicated with an upper portion of the liquid mixing container 300 and is higher than an alarm liquid level of the liquid mixing container 300, so as to ensure that the first end of the third connection section 413 is always located above a liquid level in the liquid mixing container 300.

Meanwhile, the second end of the first connection section 411, the second end of the third connection section 413 and the first connection section 423 of the first switching valve 420 are communicated through the three-way joint 430, so that the first overflow pipe 400 can be communicated with the mixing container 300. In addition, when the first switch valve 420 is in the closed state, the first connection section 411, the three-way joint 430 and the third connection section 413 form a communicating vessel with the liquid mixing container 300, and as the liquid level in the liquid mixing container 300 gradually changes, the liquid levels in the first connection section 411 and the second connection section 412 also change, so that in the process of injecting the second liquid into the liquid mixing container 300, the first connection section 411, the three-way joint 430 and the third connection section 413 are connected with each other to form a complete communicating loop with the liquid mixing container 300, and the mixing effect between the liquid in the first connection section 411 and the liquid in the liquid mixing container 300 is relatively good. Of course, if the liquid mixing container 300 is a closed container, the liquid mixing container 300 may be further connected with a gas discharge pipe 860 to discharge the gas of the liquid mixing container 300 through the gas discharge pipe 860 while delivering the liquid into the liquid mixing container 300, so as to ensure the constant pressure in the liquid mixing container 300.

Of course, when determining the preset height based on the first overflow pipe 400 with the above structure, the first overflow pipe 400 can meet the preset height by controlling the position of the first switch valve 420, and the first switch valve 420 may be a pneumatic valve specifically, so as to prevent the first switch valve 420 from being damaged by the liquid in the liquid mixing container 300. And, by making the first connection section 411 and the third connection section 413 be flexible pipes, the heights of the three-way joint 430 and the first switching valve 420 can be ensured to be adjustable, and on this basis, the three-way joint 430 and the first switching valve 420 can be stably maintained at a preset height by arranging a fixing device.

In another embodiment of the present application, the first connection section 411 and the third connection section 413 may be bellows, which has expansion and deformation capability, so that under the condition that the preset height needs to be adjusted, the respective expansion and contraction conditions of the first connection section 411 and the third connection section 413 may be changed, so as to achieve the purpose of changing the heights of the three-way joint 430 and the first switch valve 420, and further reduce the position fixing difficulty of the first overflow pipeline 400. More specifically, in determining the preset height, the means for providing the control height is specifically a closure port within the first on-off valve 420.

As described above, the first end of the third connection section 413 is communicated with the upper portion of the mixing vessel 300 and is located above the alarm liquid level of the mixing vessel 300. Optionally, the third connecting section 413 is connected to a side surface of the liquid mixing container 300, in another embodiment of the present application, the third connecting section 413 may be connected to a top surface of the liquid mixing container 300, in which case a height design size of the liquid mixing container 300 may be reduced, and a risk that the liquid in the liquid mixing container 300 flows into the third connecting section 413 from the first end of the third connecting section 413 may be reduced, thereby improving reliability of the liquid mixing device.

More specifically, the first connection section 411 may be connected to the side of the mixing container 300 by a first joint 441, and the third connection section 413 may be connected to the top surface of the mixing container 300 by a second joint 442, and the second end of the second connection section 412 is connected to a dosing overflow drain or device.

When the first liquid is input, overflow can only occur when the actual height of the first liquid is higher than the preset height, and if the first liquid is insufficiently input, the first liquid cannot overflow, and meanwhile the volume of the first liquid cannot meet the requirement of liquid mixing. To avoid insufficient first liquid input, the mixing device optionally further comprises a first liquid level sensor 710 and a controller. The first level sensor 710 may be provided to the mixing vessel 300. The first liquid level sensor 710 may be a capacitive sensor, and the capacitive sensor may penetrate through a wall of the mixing container 300 to enter the mixing container 300 to detect the liquid in the mixing container 300, and when the capacitive sensor detects the liquid, the capacitive sensor senses the liquid due to a change of capacitance. The first infusion tube 100 may be provided with the second switch valve 130, and the installation height of the first liquid level sensor 710 may be greater than a preset height, for example, may be greater than 4 to 6mm, although the installation height of the first liquid level sensor may be greater than the preset height or may be other heights. The controller may be connected to the first liquid level sensor 710 and the second switching valve 130, respectively, and the controller may control the second switching valve 130 to be closed in case the first liquid level sensor 710 is triggered. The second switching valve 130 may be an electrically controlled valve.

The embodiment of the application discloses a structure for controlling a first infusion tube 100 to stop supplying liquid when the actual liquid level of a first liquid is higher than a preset height, so that control is realized on the premise of ensuring that the input of the first liquid is enough, and the condition that the first liquid is insufficient can be better avoided.

In some embodiments, the mixing container 300 may be provided with an adjusting bracket, and the first liquid level sensor 710 may be movably disposed on the adjusting bracket, so that the position of the first liquid level sensor 710 in the height direction of the mixing container 300 may be adjustable. Specifically, the adjusting bracket may be provided with a guide groove or a guide hole along the height direction of the liquid mixing container 300, and the first liquid level sensor 710 is slidably matched with the guide groove or the guide hole, so that the position of the first liquid level sensor 710 along the sliding direction of the guide groove or the guide hole in the height direction of the liquid mixing container 300 is adjustable.

In some cases, the first level sensor 710 may fail or the first switch valve 420 may fail to open, resulting in a continuous rise in the liquid level within the mixing vessel 300, and a risk of excessive liquid level. To avoid risk of excessive fluid level, an alternative embodiment may further include a second fluid level sensor 720, where the second fluid level sensor 720 may be positioned higher than the first fluid level sensor 710. The liquid mixing device may further include a second overflow pipe 810, an overflow inlet of the second overflow pipe 810 may be higher than an overflow inlet of the first overflow pipe 400 and communicate with the liquid mixing container 300, an overflow outlet of the second overflow pipe 810 may communicate with a factory end outside the liquid mixing container 300, and the second liquid level sensor 720 may be higher than an overflow inlet of the second overflow pipe 810. The second overflow line 810 may be provided with a third switching valve 870, and the controller may be connected to the third switching valve 870, and in case the second liquid level sensor 720 is triggered, the controller may control the third switching valve 870 to be opened so that the liquid in the mixing container 300 overflows out of the mixing container through the overflow inlet of the second overflow line 810.

By providing the second liquid level sensor 720 and the second overflow pipe 810, the second liquid level sensor 720 can be higher than the first liquid level sensor 710, so that the controller can control the third switch valve 870 to be opened when the second liquid level sensor 720 is triggered, so that the liquid in the mixed liquid container 300 overflows out of the mixed liquid container 300 through the overflow inlet of the second overflow pipe 810, thereby preventing the danger caused by the overhigh liquid level, and meanwhile, the second liquid level sensor 720 can also be used as a high liquid level sensor.

In other embodiments, the mixing container 300 may have a problem of leakage, for example, the mixing container 300 may be damaged due to welding, corrosion, etc. of the mixing container 300, so that an operator may be timely prompted to intervene when the mixing container 300 leaks, and optionally, the mixing device may further include a leakage prevention disc 820, a leakage sensor 840, and an information prompt device. The mixing container 300 may be provided in the leakage preventing tray 820, and the leakage sensor 840 may be provided in the leakage preventing tray 820. The information prompting device sends out prompting information when the liquid in the leak-proof tray 820 triggers the leak sensor 840. Specifically, when the liquid in the leak-proof tray 820 triggers the leak sensor 840, the liquid mixing container 300 may have a problem of leaking, so that the liquid in the liquid mixing container 300 leaks to the leak-proof tray 820, and the leak sensor 840 disposed on the leak-proof tray 820 may be triggered when detecting that the leak-proof tray 820 has liquid, so that the information prompt device may timely send prompt information, so that an operator may intervene in time.

In some cases, such as servicing the mixing vessel 300, it may be desirable to empty the mixing vessel 300. The liquid mixing device further comprises an evacuation pipeline 980 and an eighth switch valve 970, wherein a liquid inlet of the evacuation pipeline 980 is communicated with the bottom wall of the liquid mixing container 300, and when liquid in the liquid mixing container 300 needs to be evacuated, the eighth switch valve 970 is opened and then closed after liquid discharge is completed. In order to determine whether the liquid in the liquid mixing container 300 is empty, optionally, a liquid level sensor is provided in the liquid mixing container 300, and the liquid level sensor is provided inside the bottom wall of the liquid mixing container 300. The empty level sensor is not triggered when the presence of liquid is detected and is triggered when the presence of liquid is not detected, so that whether the liquid in the liquid mixing container 300 is empty can be confirmed by the empty level sensor.

The second liquid used is different in different process environments and when a higher concentration of the second liquid is required, the volume of the second liquid required is relatively less, so that a more accurate control of the volume of the second liquid is required. In order to more precisely control the volume of the second liquid entering the mixing container 300, the second infusion tube 200 is optionally further provided with a liquid temporary storage tank 241 and a second metering device 260, the metering accuracy of the second metering device 260 being greater than the metering accuracy of the first metering device 250. The second metering device 260 may be a positive displacement flow meter, an impeller flow meter, a momentum flow meter, or the like.

The second metering device 260 may be a dosing pump, and the liquid temporary storage tank 241 and the dosing pump are sequentially disposed in the liquid discharge direction of the second infusion tube 200. By providing the liquid temporary storage tank 241, the second liquid can be directly stored in the liquid temporary storage tank 241, so that the second liquid can be more quickly conveyed into the liquid mixing container 300 when the second liquid needs to be conveyed to the second metering device 260.

Further, when the second liquid is a liquid to be diluted, such as a concentrated acid, the first liquid is a diluting liquid, such as ultrapure water, which requires a smaller volume of the second liquid, such as 3ml. The dosing pump can inject 2ml to 6ml of the second liquid into the mixing container 300 each time, and the volume error of the second liquid injected into the mixing container 300 is 1%. Specifically, by controlling the dosing pump, the dosing pump can inject any whole volume of the second liquid between 2ml and 6ml into the mixing container 300 at a time, and any volume between 2ml and 6ml can also be the second liquid with the precision of 0.1 or 0.01 value, for example, 2.1ml, 2.01ml and the like. The error in the volume of the second liquid injected into the mixing vessel 300 is 1%, for example, when 2ml of the second liquid is required to be injected, the error is 1%, that is, the actual volume of the injected second liquid is between 1.98ml and 2.02 ml.

Optionally, the liquid mixing device may further include a gas pipe 850, where an exhaust end of the gas pipe 850 may be disposed at the bottom of the liquid mixing container 300 and is in communication with the liquid mixing container 300. After the first liquid and the second liquid are introduced into the liquid mixing container 300, the mixing of the first liquid and the second liquid in the liquid mixing container 300 can be accelerated by supplying the gas to the bottom of the liquid mixing container 300, and the gas pipe 850 is relatively simple to provide. The gas pipe 850 may be configured to convey an inert gas, or may be configured to convey another gas that does not react with the liquid in the mixing vessel 300.

Further, the air discharge end of the air pipe 850 may extend along the bottom wall of the mixing container 300, and the air discharge end may be provided with a plurality of air discharge holes, which may be in communication with the mixing container 300. By extending the exhaust end portion of the gas pipe 850 along the bottom wall of the liquid mixing container 300, the exhaust end portion is provided with a plurality of exhaust holes, which communicate with the liquid mixing container 300, so that the gas can be mixed together from a plurality of positions, and the mixing efficiency can be improved.

As described above, the liquid mixing apparatus further includes the exhaust pipe 860, the first end of the exhaust pipe 860 may be communicated with the top wall of the liquid mixing container 300, the second end of the exhaust pipe 860 may be communicated with the external atmosphere, and when the gas pipe 850 inputs the gas into the liquid mixing container 300 to mix the liquid, the gas in the liquid mixing container 300 may be discharged from the exhaust pipe 860, so as to avoid the excessive air pressure in the liquid mixing container 300, thereby avoiding the first liquid and the second liquid from failing to enter the liquid mixing container 300 due to the excessive air pressure in the liquid mixing container 300, and avoiding the damage to the liquid mixing container 300 due to the excessive air pressure in the liquid mixing container 300.

Alternatively, the air pipe 850 may be provided with a manual valve and an electric control valve, through which the on-off of the air pipe can be controlled, thereby making the control redundancy better.

The application also discloses semiconductor process equipment, which comprises the liquid mixing device disclosed in the embodiment.

In an embodiment, the mixing tank 300 may be a wafer rinse tank 900.

In other embodiments, the mixing vessel 300 is not used as a place to clean the wafer, but is merely a vessel in which mixing is performed. The semiconductor process apparatus may further include a wafer cleaning tank 900, and the wafer cleaning tank 900 may be in communication with the liquid mixture container 300 through a liquid mixture transfer pipe 930, and the liquid mixture transfer pipe 930 may be provided with a sixth switching valve 940.

Specifically, before the wafer cleaning tank 900 cleans the wafer, the sixth switch valve 940 needs to be closed, the first liquid and the second liquid are respectively input into the liquid mixing container 300 by the first liquid pipe 100 and the second liquid pipe 200, the specific infusion sequence can refer to the foregoing embodiment, after the input is completed, the input of the first liquid and the second liquid into the liquid mixing device is stopped, and after the first liquid and the second liquid are mixed in the liquid mixing container, the sixth switch valve 940 can be opened, so that the liquid in the liquid mixing device enters the wafer cleaning tank 900.

In the process of cleaning the wafer in the wafer cleaning tank 900, the mixed liquid in the wafer cleaning tank 900 is consumed, so that the mixed liquid needs to be replenished to the wafer cleaning tank 900 in the cleaning process, however, after the mixed liquid in the wafer cleaning tank 900 cleans the wafer for a period of time, the concentration of the mixed liquid in the wafer cleaning tank 900 is different from the concentration of the mixed liquid in the mixed liquid container 300, so that the mixed liquid cannot be directly replenished to the area where the wafer is located in order to ensure the uniformity of the wafer cleaning in the wafer cleaning tank 900. Therefore, the wafer cleaning tank 900 may include an inner tank 910 and an outer tank 920, the inner tank 910 may be located in the tank of the outer tank 920, the notch of the inner tank 910 may be lower than the notch of the outer tank 920, the bottom wall of the outer tank 920 and the bottom wall of the inner tank 910 are communicated through a pipeline, and a driving pump is provided to drive the mixed liquid of the outer tank 920 into the inner tank 910, so as to form a dynamic circulation process. When the mixed liquid container 300 conveys the mixed liquid to the wafer cleaning tank 900, the mixed liquid is conveyed to the inner tank 910 to overflow to the outer tank 920, and the liquid feeding is stopped when the liquid level of the outer tank 920 is at a preset liquid level, so that the process is started. The mixed liquid container 300 is also communicated with the outer tank 920 through a liquid supplementing pipeline 950, the liquid supplementing pipeline 950 is provided with a seventh switch valve 960, when liquid supplementing to the wafer cleaning tank 900 is required, the seventh switch valve 960 is opened, liquid supplementing to the outer tank 920 through the liquid supplementing pipeline 950 is carried out until the liquid supplementing is at a preset liquid level, the supplemented mixed liquid is not directly contacted with the wafer at the moment, and the mixed liquid of the outer tank 920 is mixed with the mixed liquid of the inner tank 910 through the action of a driving pump, so that all local areas of the mixed liquid of the inner tank 910 are relatively uniform, and the uniformity of cleaning the wafer is ensured.

The semiconductor processing apparatus further includes a frame 990, and the liquid mixing device and the wafer cleaning tank 900 are mounted on the frame 990, and the liquid mixing device can be mounted above the wafer cleaning tank 900, and the frame 990 facilitates the overall installation, transfer, etc. of the semiconductor processing apparatus.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element. Furthermore, it should be noted that the scope of the methods and apparatus in the embodiments of the present application is not limited to performing the functions in the order shown or discussed, but may also include performing the functions in a substantially simultaneous manner or in an opposite order depending on the functions involved, e.g., the described methods may be performed in an order different from that described, and various steps may also be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

The embodiments of the present application have been described above with reference to the accompanying drawings, but the present application is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those of ordinary skill in the art without departing from the spirit of the present application and the scope of the claims, which are also within the protection of the present application.

Claims (10)

1. The liquid mixing device is characterized by comprising a first infusion tube (100), a second infusion tube (200), a liquid mixing container (300) and a first overflow pipeline (400); wherein:

the liquid discharge end part of the first infusion tube (100) and the liquid discharge end part of the second infusion tube (200) are communicated with the liquid mixing container (300), an overflow inlet of the first overflow pipeline (400) is communicated with the bottom surface of the liquid mixing container (300), a part of the first overflow pipeline (400) is positioned at a preset height of the liquid mixing container (300), and the first overflow pipeline (400) is provided with a first switch valve (420);

the first infusion tube (100) is used for conveying first liquid into the liquid mixing container (300) in an emptying state, and when the actual liquid level of the first liquid is larger than the preset height, the first switch valve (420) is opened, so that the first liquid can be discharged from the first overflow pipeline (400) until the liquid level in the liquid mixing container (300) is level with the preset height;

The second infusion tube (200) is provided with a first metering device (250), the first switch valve (420) is closed under the condition that the actual liquid level is reduced to the preset height, and the second infusion tube (200) is used for conveying a preset volume of second liquid controlled by the first metering device (250) into the liquid mixing container (300).

2. The mixing device according to claim 1, wherein the first overflow line (400) comprises a first connection section (411) and a second connection section (412), the first end of the first connection section (411) being in communication with the bottom of the mixing container (300); the first switching valve (420) comprises a valve body (421), a valve core (422), a first interface section (423), a second interface section (424) and an overflow section (425);

the valve core (422) and the overflow section (425) are both arranged in the valve body (421), the overflow section (425) extends along the vertical direction, the valve core (422) can be plugged in an opening at the top of the overflow section (425) in an opening and closing manner, the first interface section (423) and the second interface section (424) are both communicated with the valve body (421), the first end of the first interface section (423) is communicated with the second end of the first connection section (411), the second end of the first interface section (423) is communicated with the overflow section (425), the first end of the second interface section (424) is communicated with the first end of the second connection section (412), the second end of the second interface section (424) is communicated with the opening at the top of the overflow section (425), and the first connection section (411), the second connection section (412), the first interface section (423) and the second interface section (424) are both positioned below the opening at the top of the overflow section (425) and are positioned at the height of the opening at the top of the overflow section (425).

3. The liquid mixing device according to claim 2, wherein the first overflow line (400) is movably provided to the liquid mixing container (300) such that a height of the first overflow line (400) at a part of a preset height of the liquid mixing container (300) is adjustable.

4. A liquid mixing device according to claim 3, wherein the first overflow line (400) further comprises a third connection section (413) and a three-way joint (430), the first end of the third connection section (413) is communicated with the upper part of the liquid mixing container (300) and is higher than the alarm liquid level of the liquid mixing container (300), and the second end of the first connection section (411), the second end of the third connection section (413) and the first interface section of the first switch valve (420) are communicated through the three-way joint (430).

5. The mixing device according to claim 4, wherein the first end of the first connecting section (411) is connected to a side of the mixing container (300) and communicates with a bottom surface of the mixing container (300), and the first end of the third connecting section (413) is connected to a top surface of the mixing container (300).

6. The mixing device according to claim 1, further comprising a first liquid level sensor (710), wherein the first infusion tube (100) is provided with a second switching valve (130), wherein the first liquid level sensor (710) is mounted at a height greater than the preset height, and wherein the second switching valve (130) is closed in case the first liquid level sensor (710) is triggered.

7. The liquid mixing device according to claim 6, characterized in that the liquid mixing device further comprises a second liquid level sensor (720), the second liquid level sensor (720) being higher than the first liquid level sensor (710), the liquid mixing device further comprises a second overflow line (810), an overflow inlet of the second overflow line (810) being higher than an overflow inlet of the first overflow line (400) and being in communication with the liquid mixing container (300), the second overflow line (810) being provided with a third switch valve (870), the third switch valve (870) being opened in case the second liquid level sensor (720) is triggered.

8. The liquid mixing device according to claim 1, wherein the second infusion tube (200) is further provided with a liquid temporary storage tank (241) and a second metering device (260), the metering precision of the second metering device (260) is greater than that of the first metering device (250), the second metering device (260) is a metering pump, and the liquid temporary storage tank (241) and the metering pump are sequentially arranged in the liquid discharge direction of the second infusion tube (200).

9. The liquid mixing device according to claim 1, further comprising a gas pipe (850), wherein a gas discharge end of the gas pipe (850) is provided at a bottom of the liquid mixing container (300) and is in communication with the liquid mixing container (300).

10. A semiconductor process apparatus comprising a wafer cleaning tank (900) and the liquid mixing device according to any one of claims 1 to 9, wherein the wafer cleaning tank (900) is in communication with the liquid mixing container (300) via a liquid mixing delivery pipe (930), and the liquid mixing delivery pipe (930) is provided with a sixth switch valve (940).