CN115138229B - Liquid medicine preparation device - Google Patents

Liquid medicine preparation device Download PDF

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Publication number
CN115138229B
CN115138229B CN202211071379.6A CN202211071379A CN115138229B CN 115138229 B CN115138229 B CN 115138229B CN 202211071379 A CN202211071379 A CN 202211071379A CN 115138229 B CN115138229 B CN 115138229B
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Prior art keywords
liquid
liquid medicine
preparation
container
volume
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CN115138229A (en
Inventor
陈海祥
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Beijing Naura Microelectronics Equipment Co Ltd
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Beijing Naura Microelectronics Equipment Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/49—Mixing systems, i.e. flow charts or diagrams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/40—Mixing liquids with liquids; Emulsifying
    • B01F23/405—Methods of mixing liquids with liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2112—Level of material in a container or the position or shape of the upper surface of the material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2212—Level of the material in the mixer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/22—Control or regulation
    • B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
    • B01F35/2217—Volume of at least one component to be mixed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • B01F35/83—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Medical Preparation Storing Or Oral Administration Devices (AREA)

Abstract

The embodiment of the invention provides a liquid medicine preparation device, which comprises: the continuous liquid level measuring sensor is inserted into the liquid medicine in the liquid preparation container and detects the liquid level height in real time; an overflow mechanism for discharging the liquid medicine exceeding a preset liquid level; the controller is used for controlling the inlet valve according to the liquid level height detected by the continuous liquid level measuring sensor in real time so as to inject the first liquid medicine with the preset liquid level height into the liquid preparation container, and controlling the overflow mechanism to discharge the first liquid medicine with the liquid level height exceeding the preset liquid level height; controlling the metering pump to inject the second liquid medicine with the required volume so as to obtain the liquid medicine according with the first preparation information, and controlling the outlet valve to discharge the liquid medicine according with the first preparation information after the preparation is finished. By using the device, the liquid medicine can be accurately prepared and quantitatively supplied according to the required concentration on the basis of different concentrations of the liquid medicine in factories, the capacity calibration is not required to be carried out again, and the concentration of the liquid medicine in the process tank can be flexibly changed on line to test different process effects.

Description

Liquid medicine preparation device
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to a liquid medicine preparation device.
Background
Wafer cleaning in the semiconductor manufacturing process refers to a process of removing pollutants and oxides on the surface of a wafer by a physical or chemical method before oxidation, photoetching, epitaxy, diffusion and other processes so as to obtain the surface of the wafer meeting the cleanliness requirement. In the prior art, two methods are generally adopted for preparing the wafer cleaning liquid medicine, one of the two methods is that the process has no strict requirement on concentration control, and meanwhile, the liquid medicine with larger dosage is prepared before entering the machine table end, and after the liquid medicine is prepared to the required concentration, the liquid medicine is directly pumped into a process tank from a factory, and constant volume and quantification are carried out by depending on a liquid level sensor of the process tank, so that the method is generally used for preparing base liquid with larger process dosage; the second step is as follows: for non-base liquid preparation, the requirement for concentration control is high, a Buffer bottle (Buffer Tank) is generally arranged at the machine station end, constant volume quantification is performed through the liquid level of the Buffer bottle, quantified liquid medicine is injected into base liquid by gravity, the amount of the liquid medicine injected each time is the same volume which is calibrated, and for higher requirement for capacity control, a metering pump is generally adopted for liquid medicine pumping injection. However, the existing liquid medicine preparation method for the cleaning machine is difficult to realize the compatibility of various factory liquid medicines with different concentrations on the same prepared machine, capacity calibration and other operations are required to be carried out again even if the factory liquid medicines are compatible, and the problem of inaccurate liquid preparation due to large concentration error of the prepared liquid medicine exists.
Disclosure of Invention
In view of the above, embodiments of the present invention are proposed to provide a liquid medicine dispensing device that overcomes or at least partially solves the above-mentioned problems.
In order to solve the above problems, an embodiment of the present invention discloses a liquid medicine preparing apparatus, including:
the liquid preparation container is used for containing liquid medicine;
one end of the first pipeline is used for feeding a first liquid medicine, the other end of the first pipeline is connected with the liquid preparation container, and an inlet valve is arranged on the first pipeline;
one end of the second pipeline is used for feeding a second liquid medicine, the other end of the second pipeline is connected with the liquid preparation container, and the second pipeline is provided with a metering pump;
the third pipeline is connected with the liquid preparation container and is used for discharging liquid medicine; an outlet valve is arranged on the third pipeline;
the continuous liquid level measuring sensor is inserted into the liquid medicine of the liquid preparation container and is used for detecting the liquid level height of the liquid preparation container in real time;
the overflow mechanism is used for discharging liquid medicine with the height exceeding the preset liquid level;
the controller is used for controlling the inlet valve according to the liquid level height detected by the continuous liquid level measuring sensor in real time so as to inject the first liquid medicine with the preset liquid level height into the liquid preparation container, and controlling the overflow mechanism to discharge the first liquid medicine with the liquid level height exceeding the preset liquid level height; controlling the metering pump to inject the second liquid medicine with the required volume so as to obtain the liquid medicine according with the first preparation information, and controlling the outlet valve to discharge the liquid medicine according with the first preparation information after the preparation is finished.
Optionally, the controller is configured to determine an injection volume of the first medical fluid according to the preset liquid level height; and determining the volume required to be injected by the second liquid medicine according to the first preparation information and the injection volume of the first liquid medicine, so as to control the metering pump to inject the second liquid medicine with the required volume to obtain the liquid medicine according with the first preparation information.
Optionally, the overflow mechanism comprises:
the overflow pipe is inserted into the liquid distribution container from the lower part of the liquid distribution container, one end of the overflow pipe is positioned inside the liquid distribution container, the other end of the overflow pipe is positioned outside the liquid distribution container, and the one end of the overflow pipe is provided with an overflow port;
the overflow valve is arranged on an overflow pipe outside the liquid preparation container and is used for controlling the circulation of the liquid medicine;
the telescopic mechanism is arranged on an overflow pipe outside the liquid distribution container and used for driving the overflow valve and the overflow pipe to enable the overflow port to move up and down;
and one end of the telescopic corrugated pipe is sleeved on an overflow pipe inside the liquid preparation container, and the other end of the telescopic corrugated pipe is hermetically connected with the bottom of the liquid preparation container and used for sealing the overflow pipe and the liquid preparation container.
Optionally, the controller is further configured to control the telescopic mechanism to move the overflow port to the preset liquid level height when the first liquid medicine is injected into the liquid preparation container; when the liquid level of the injected first liquid medicine is higher than the preset liquid level, controlling the overflow valve to be opened for preset time so as to discharge the first liquid medicine higher than the preset liquid level through the overflow pipe; or
The controller is also used for determining a first expected liquid level height of the liquid medicine according with the first preparation information, controlling the telescopic mechanism to move the overflow port to a position higher than the first expected liquid level height, and controlling the overflow valve to keep closed.
Optionally, the controller is configured to obtain a mapping relationship between a liquid level of the liquid preparation container and a liquid medicine injection volume, and a liquid level of the first liquid medicine in the liquid preparation container detected by the continuous liquid level measurement sensor; and determining the injection volume of the first liquid medicine according to the mapping relation between the liquid level height of the liquid preparation container and the injection volume of the liquid medicine and the liquid level height of the first liquid medicine in the liquid preparation container, and determining the injection volume required by the second liquid medicine according to the first preparation information and the injection volume of the first liquid medicine.
Optionally, the controller is further configured to determine a volume of the remaining liquid medicine when the liquid medicine conforming to the first preparation information is prepared and the liquid preparation container has the remaining liquid medicine conforming to the first preparation information; determining the injection volume of the first liquid medicine required currently and determining the injection volume of the second liquid medicine required currently according to the volume of the residual liquid medicine and the first preparation information; and controlling the inlet valve to inject the first liquid medicine into the required volume, and controlling the metering pump to inject the second liquid medicine into the required volume to obtain the mixed liquid medicine according with the first preparation information.
Optionally, the controller is further configured to determine a volume of the remaining liquid medicine when liquid medicine conforming to the second preparation information is prepared and the liquid preparation container has remaining liquid medicine conforming to the first preparation information; determining the injection volume of the first liquid medicine required currently according to the volume of the residual liquid medicine, the first preparation information and the second preparation information, and controlling the inlet valve to enable the first liquid medicine to be injected into the required volume, so as to obtain a mixed liquid medicine according with the second preparation information; the liquid medicine concentration of the second preparation information is smaller than that of the first preparation information.
Optionally, the controller is further configured to determine a volume of the remaining liquid medicine when liquid medicine conforming to the second preparation information is prepared and the liquid preparation container has remaining liquid medicine conforming to the first preparation information; determining the injection volume of the second liquid medicine required currently according to the volume of the residual liquid medicine, the first preparation information and the second preparation information, and controlling the metering pump to inject the second liquid medicine with the required volume to obtain mixed liquid medicine according with the second preparation information; the liquid medicine concentration of the second preparation information is larger than that of the first preparation information.
Optionally, the controller is configured to determine a volume of the mixed liquid medicine according to the second preparation information and the currently required injection volume of the first liquid medicine, determine a final liquid medicine level height according to a mapping relationship between the liquid level height of the liquid medicine injection volume and the liquid preparation container and the liquid level volume of the mixed liquid medicine, and control the inlet valve to inject the first liquid medicine to reach the final liquid medicine level height.
Optionally, a flow meter is further arranged on the third pipeline,
the controller is further used for controlling the inlet valve to enable the first liquid medicine to fill the liquid preparation container before liquid medicine is prepared if the liquid preparation container is a container with an irregular shape; acquiring the liquid level height of the first liquid medicine when the liquid preparation container is filled with the first liquid medicine; and controlling the outlet valve and the flowmeter to be opened, and acquiring the flow detected by the flowmeter and the liquid level height detected by the continuous liquid level measuring sensor at preset time intervals until the first liquid medicine is emptied to obtain the mapping relation between the liquid level height of the liquid preparation container and the injection volume of the liquid medicine.
Optionally, the controller is further configured to, if the liquid preparation container is a regular-shaped container, control the metering pump to inject a first preset volume of the second liquid medicine into the liquid preparation container before liquid medicine preparation, and obtain a first liquid level height corresponding to the first preset volume detected by the continuous liquid level measurement sensor; continuously injecting a preset second liquid medicine volume into the liquid preparation container, and acquiring a second liquid level height detected by the continuous liquid level measuring sensor; and determining the volume corresponding to the liquid level change of the unit height of the liquid preparation container as a mapping relation between the liquid level height and the liquid medicine injection volume according to the first liquid level height, the preset second liquid medicine volume and the second liquid level height.
Optionally, the controller is configured to control the outlet valve to open after the preparation is completed, obtain the liquid level height of the liquid preparation container detected by the continuous liquid level measurement sensor in real time, and control the outlet valve to close when the liquid level of the liquid preparation container reaches a second expected liquid level height.
Optionally, the first pipeline is located below the liquid preparation container, the second pipeline is located above the liquid preparation container, and the third pipeline is located below the liquid preparation container.
Optionally, the second medical fluid comprises one or more than one, and the second pipeline comprises one or more than one.
Optionally, the method further comprises:
and the flow baffle is connected with the bottom and the inner wall of the liquid distribution container and is provided with a through hole.
Optionally, one end of the first pipeline connected to the fluid preparation container, one end of the second pipeline connected to the fluid preparation container, and one end of the third pipeline connected to the fluid preparation container are located on one side of the flow baffle, and the continuous liquid level measurement sensor is located on the other side of the flow baffle.
Optionally, the method further comprises:
the exhaust filter is used for isolating tiny particles from entering the liquid preparation container;
the exhaust pipeline is positioned above the liquid preparation container, one end of the exhaust pipeline is inserted above the liquid medicine in the liquid preparation container, and the other end of the exhaust pipeline is connected with the exhaust filter; the exhaust pipeline is used for exhausting gas in the liquid preparation container when liquid medicine is injected into the liquid preparation container, or introducing gas when liquid medicine is exhausted from the liquid preparation container.
The embodiment of the invention has the following advantages:
in an embodiment of the present invention, there is provided a liquid medicine preparing apparatus including: the liquid preparation container is used for containing liquid medicine; one end of the first pipeline is used for feeding the first liquid medicine, the other end of the first pipeline is connected with the liquid preparation container, and an inlet valve is arranged on the first pipeline; one end of the second pipeline is used for feeding the second liquid medicine, the other end of the second pipeline is connected with the liquid preparation container, and the second pipeline is provided with a metering pump; a third pipeline connected with the liquid preparation container and used for discharging the liquid medicine; an outlet valve is arranged on the third pipeline; the continuous liquid level measuring sensor is inserted into the liquid medicine of the liquid preparation container and is used for detecting the liquid level height of the liquid preparation container in real time; the overflow mechanism is used for discharging liquid medicine with the height exceeding the preset liquid level; the controller is used for controlling the inlet valve according to the liquid level height detected by the continuous liquid level measuring sensor in real time so as to inject the first liquid medicine with the preset liquid level height into the liquid preparation container, and controlling the overflow mechanism to discharge the first liquid medicine with the liquid level height exceeding the preset liquid level height; controlling the metering pump to inject the second liquid medicine with the required volume so as to obtain the liquid medicine according with the first preparation information, and controlling the outlet valve to discharge the liquid medicine according with the first preparation information after the preparation is finished. The overflow mechanism discharges the redundant first liquid medicine exceeding the preset liquid level height, so that the volume of the obtained first liquid medicine cannot be controlled inaccurately due to the fluctuation of the liquid level, and the very accurate volume of the first liquid medicine can be obtained. By using the device, the liquid medicine can be conveniently and accurately prepared and quantitatively supplied according to the required concentration on the basis of different concentrations of the liquid medicine in different factories and services during liquid preparation, the operations such as capacity calibration and the like are not required to be carried out again, and the concentration of the liquid medicine in the process tank can be flexibly changed on line to test different process effects.
Drawings
FIG. 1 is a schematic view of a medical fluid dispensing apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic view of another medical fluid dispensing apparatus provided by an embodiment of the present invention;
fig. 3 is a schematic structural view of a flow baffle according to an embodiment of the present invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
The present invention is exemplified by cleaning of semiconductor wafers. The cleaning process accounts for more than 30% of the steps of the whole integrated circuit manufacturing process, and various different key links are involved from the front to the back, so that the quality of the wafer cleaning quality has important influence on the performance of the device.
Wafer cleaning equipment is mainly divided into single-wafer semiconductor cleaning equipment and tank type semiconductor cleaning equipment for batch cleaning. The tank type cleaning equipment is widely applied due to high passing rate and high productivity. In the process of cleaning the wafer, the groove type cleaning machine prepares different chemical liquid medicines in the cleaning groove according to different requirements of surface residual substances to be removed.
However, in the conventional chemical solution preparation method, no matter constant volume and quantification are performed by a liquid level sensor of a process tank or by the liquid level of a buffer container, it is difficult to realize compatibility of various factory chemicals with different concentrations on the same prepared machine, and operations such as capacity calibration and the like need to be performed again even if compatibility is achieved.
One of the core ideas of the embodiment of the invention is to provide a preparation device and a liquid preparation method which are compatible with various factory chemical liquid medicines with different concentrations. The concentration of the liquid medicine in the process tank can be flexibly changed on line to test different process effects without operations such as capacity calibration and the like. Therefore, the problems that the compatibility of various factory medicines with different concentrations is difficult to realize on the same prepared machine table by the traditional liquid medicine preparation method of the cleaning machine, and the operation of capacity calibration and the like needs to be carried out again even if the compatibility is realized are solved.
Referring to fig. 1, a block diagram of a chemical solution preparing apparatus according to an embodiment of the present invention is shown, and may include: a liquid preparation container 101 for containing a liquid medicine; a first pipeline 102, one end of the first pipeline 102 is used for feeding a first liquid medicine, the other end of the first pipeline 102 is connected with the liquid preparation container 101, and an inlet valve 103 is arranged on the first pipeline 102; a second pipeline 104, one end of the second pipeline 104 is used for feeding a second liquid medicine, the other end of the second pipeline 104 is connected to the liquid preparation container 101, and the second pipeline 104 is provided with a metering pump 105; a third pipe 106, the third pipe 106 being connected to the liquid preparation container 101, for discharging the liquid medicine; an outlet valve 107 is arranged on the third pipeline 106; the continuous liquid level measuring sensor 108 is inserted into the liquid medicine of the liquid preparation container, and is used for detecting the liquid level height of the liquid preparation container in real time; the overflow mechanism 109 is used for discharging the liquid medicine exceeding the preset liquid level height; a controller 110, configured to control the inlet valve 103 to inject the first medical fluid at the preset fluid level into the fluid preparation container 101 according to the fluid level detected by the continuous fluid level measuring sensor 108 in real time, and control the overflow mechanism 109 to discharge the first medical fluid exceeding the preset fluid level; the metering pump 105 is controlled to inject the second medical fluid of a desired volume to obtain the medical fluid in accordance with the first preparation information, and the outlet valve 107 is controlled to discharge the medical fluid in accordance with the first preparation information after the preparation is completed.
In this embodiment, the first preparation information may be a volume ratio of the first medical fluid and the second medical fluid, and the controller 110 may determine the injection volume of the first medical fluid in various ways, which is not limited herein.
In the embodiment of the present invention, the controller 110 may control to open the inlet valve 103 on the first pipeline 102, so as to inject the first medical fluid into the fluid preparation container 101 through the first pipeline 102; the metering pump 105 on the second pipeline 104 can be controlled to be opened, and the metering pump 105 is controlled to inject a preset volume of second liquid medicine into the liquid preparation container 101 through the second pipeline 104; the on/off of the outlet valve 107 of the third pipeline 106 can be controlled to control the flow of the liquid medicine in the liquid preparation container 101.
Illustratively, the continuous liquid level measuring sensor 108 is inserted into the liquid medicine in the liquid preparation container 101, and the liquid level height in the liquid preparation container 101 can be detected in real time. The controller 110 may control the inlet valve 103 to inject the first chemical solution into a desired volume according to the level of the first chemical solution in the solution preparation container 101 detected by the continuous level measurement sensor 108 in real time.
Illustratively, the volume of the first liquid medicine to be injected can be determined according to first preparation information of the liquid medicine, during the liquid preparation process, the inlet valve 103 can be controlled to be opened and the outlet valve 107 can be controlled to be closed, so that the first liquid medicine is injected into the liquid preparation container 101, meanwhile, the continuous liquid level measuring sensor 108 detects the liquid level height of the first liquid medicine in the liquid preparation container in real time, and when the injected first liquid medicine exceeds the preset liquid level height, the overflow mechanism 109 is controlled to discharge the first liquid medicine exceeding the preset liquid level height, thereby obtaining a relatively accurate volume of the first liquid medicine.
For example, the controller 110 may control the metering pump 105 to inject the required volume of the second medical fluid to prepare the medical fluid according to the first preparation information, and control the outlet valve 107 of the third line 106 to open and discharge the prepared mixed solution after the preparation is completed.
In one embodiment of the present invention, the controller is configured to determine an injection volume of the first medical fluid according to the preset fluid level; and determining the volume of the second liquid medicine required to be injected according to the first preparation information and the injection volume of the first liquid medicine, so that the metering pump is controlled to inject the second liquid medicine with the required volume to obtain the liquid medicine according with the first preparation information.
For example, the injection volume of the first medical fluid may be determined according to the preset liquid level height after the overflow mechanism discharges the first medical fluid exceeding the preset liquid level height. The volume of the first medical fluid obtained at this time is not controlled inaccurately due to fluctuation of the liquid level, and a very accurate volume of the first medical fluid can be obtained.
For example, it is possible to determine the volume of the second medical fluid to be injected for preparing the mixed medical fluid based on the first preparation information and the volume of the first medical fluid that has been injected, control the metering pump to inject the second medical fluid of the required volume to obtain the medical fluid corresponding to the first preparation information, and control the outlet valve 107 to discharge the medical fluid corresponding to the first preparation information after the preparation is completed.
As an example, the liquid distribution container 101 may be welded or assembled by a container and a cover plate, or may be integrally formed by a process according to actual needs. The liquid preparation container 101 may have a regular shape such as a cylinder, a rectangular parallelepiped, or other irregular shapes. The forming manner, shape, and volume of the liquid preparation container 101 may be designed by those skilled in the art according to actual needs, and the embodiments of the present invention are not limited herein.
As an example, the continuous level measurement sensor 108 may include, but is not limited to, an N2 bubble level gauge. The function of the continuous level measurement sensor 108 is to continuously detect the height of the liquid level in the liquid dispensing container 101, which may be in millimeters.
As an example, the material of the liquid preparation container 101, the first pipe 102, the inlet valve 103, the second pipe 104, the third pipe 106, the outlet valve 107, the continuous liquid level measuring sensor 108, etc. in the liquid preparation device, which is in contact with the liquid medicine, may be selected according to the characteristics of the chemical liquid medicine to be prepared, and the material includes, but is not limited to, soluble Polytetrafluoroethylene (PFA), polytetrafluoroethylene (PTFE), polyethylene (PE), polyvinyl chloride (PVC), quartz, etc.
As shown in fig. 2, which is a structural diagram of another chemical solution preparing apparatus according to an embodiment of the present invention, in an embodiment of the present invention, the overflow mechanism 109 includes: an overflow pipe 1091, the overflow pipe 1091 being inserted into the liquid distribution container from below the liquid distribution container, one end of the overflow pipe being located inside the liquid distribution container, the other end of the overflow pipe being located outside the liquid distribution container, the one end of the overflow pipe having an overflow port; an overflow valve 1092, wherein the overflow valve 1092 is arranged on an overflow pipe 1091 outside the liquid preparation container and is used for controlling the circulation of the liquid medicine; the telescopic mechanism 1093 is arranged on an overflow pipe 1091 outside the liquid distribution container, and is used for driving the overflow valve 1092 and the overflow pipe 1091 to enable the overflow port to move up and down; and one end of the telescopic corrugated pipe 1094 is sleeved on an overflow pipe 1091 inside the liquid distribution container, and the other end of the telescopic corrugated pipe 1094 is hermetically connected with the bottom of the liquid distribution container 101 and used for sealing the overflow pipe 1091 and the liquid distribution container 101.
For example, the overflow mechanism 109 may be composed of an overflow pipe 1091, an overflow valve 1092, a telescopic mechanism 1093, a telescopic bellows 1094, and the like. The overflow mechanism 109 mainly functions to control the telescopic mechanism 1093 to drive the overflow valve 1092 and the overflow pipe 1091 to realize the precise up-and-down movement of the overflow port, thereby realizing the precise control of the height of the overflow port. The telescopic corrugated pipe 1094 is sleeved outside the overflow pipe 1091 and plays a role of the dynamic sealing overflow mechanism 109.
As an example, the extensible corrugated tube 1094 may be integrally formed of PFA, PTFE, or the like.
As an example, the telescoping mechanism 1093 may be an electric telescoping mechanism driven by a servo motor or a stepper motor plus an encoder to control and feedback the real-time height of the overflow port.
In an embodiment of the present invention, the controller 110 is further configured to control the telescopic mechanism 1093 to move the overflow port to the preset liquid level height when the first liquid medicine is injected into the liquid preparation container; when the liquid level of the injected first liquid medicine is higher than the preset liquid level, controlling the overflow valve 1092 to be opened for preset time so as to discharge the first liquid medicine higher than the preset liquid level through the overflow pipe 1091; alternatively, the controller 110 is further configured to determine a first expected liquid level of the liquid medicine according to the first preparation information, control the expansion mechanism 1093 to move the overflow port to a position higher than the first expected liquid level, and control the overflow valve 1092 to remain closed.
As an example, in the liquid preparation process, the telescopic mechanism 1093 may be controlled to move the overflow port to a preset first liquid level position, the first liquid is injected into the liquid preparation container, and after the liquid reaches a preset liquid level height, the first liquid is continuously injected, for example, the time is delayed by 2 to 3 seconds, so that after the first liquid exceeds the preset liquid level height, the first liquid inlet valve is closed, the overflow valve may be opened for 5 seconds (the time of opening the overflow valve can be adjusted through testing), so that the first liquid exceeding the preset liquid level height flows out through the overflow port, and the overflow valve is closed after the overflow is completed. The amount of the base liquid obtained at this time is not controlled inaccurately due to fluctuation of the liquid level, and a very precise amount of the base liquid can be obtained.
As an example, when injecting the second medical fluid into the fluid dispensing container, the overflow port is first moved to a position higher than the first desired fluid level by controlling the telescopic mechanism 1093 and keeping the overflow valve 1092 closed. Then the second medical fluid is injected. The second liquid medicine can be injected by a metering pump with the volume accuracy reaching up to milli-scale, so that the second liquid medicine with the very accurate volume can be obtained.
In an embodiment of the present invention, the controller 110 is configured to control the outlet valve 107 to open after the preparation is completed, obtain the liquid level height of the dispensing container 101 detected by the continuous liquid level measuring sensor 108 in real time, and control the outlet valve 107 to close when the liquid level of the dispensing container 101 reaches a second expected liquid level height.
In an embodiment of the present invention, the first pipeline 102 is located below the liquid preparation container 101, the second pipeline 104 is located above the liquid preparation container 101, and the third pipeline 106 is located below the liquid preparation container 101.
As one example, the first medical fluid may be a base fluid and the second medical fluid may be a non-base fluid. The base solution is a chemical solution to be prepared in a relatively large amount, and the amount of the chemical solution is generally determined by volume. The non-base liquid is a liquid other than the base liquid in the liquid mixture ratio.
As an example, during the process of injecting the first chemical liquid into the liquid preparation container 101, since the liquid level height measured by the continuous liquid level measurement sensor 108 in real time needs to be obtained, if the liquid inlet is disposed above the liquid preparation container 101, the liquid level may fluctuate greatly due to splashing of the liquid during the injection of the first chemical liquid, which may cause inaccurate liquid level measurement. Therefore, the liquid inlet of the first pipeline 102 and the inlet valve 103 in the liquid preparation device can be arranged below the liquid preparation container 101 to reduce the disturbance of the liquid level and improve the measurement stability of the continuous liquid level measurement sensor 108.
As an example, since the second medical fluid is injected into the fluid preparation container 101 through the metering pump 105, the liquid level height is not measured using the continuous liquid level measuring sensor 108 during the injection, and the disturbance of the liquid level caused by the liquid feeding may not be considered, the liquid feeding port of the second medical fluid may be disposed above the fluid preparation container 101 to reduce the pressure when the metering pump injects the medical fluid.
Fig. 2 is a structural diagram of another chemical solution preparing apparatus according to an embodiment of the present invention, which further includes: and the flow baffle 111 is connected with the bottom and the inner wall of the liquid preparation container 101 and is provided with a through hole.
For example, as shown in fig. 3, a schematic view of a flow baffle structure provided by an embodiment of the present invention is shown, wherein 1111 is a through hole, 1111 is a two-sided liquid medicine flow channel formed by the flow baffle 111 and a part of the bottom wall inside the liquid distribution container 101 and a part of the side wall inside the liquid distribution container 101, and the flow baffle 111 and the through hole 1111 are configured to reduce disturbance of vortex generated during liquid inlet and liquid outlet on the liquid level measured by the continuous liquid level measuring sensor 108.
The shape of the through hole may include, but is not limited to, a regular shape such as a circle, a rectangle, and the like, and other irregular shapes, and the size of the through hole may be set according to actual conditions, which is not limited herein in the embodiments of the present invention.
It should be noted that the flow baffle in the preparation device plays a role in stabilizing the liquid level in the device, and can be selectively installed or not installed according to the influence degree of the fluctuation of the liquid inlet fluid on the liquid level measured by the continuous liquid level measuring sensor.
In one embodiment of the present invention, one end of the first pipe 102 connected to the liquid preparation container 101, one end of the second pipe 104 connected to the liquid preparation container 101, and one end of the third pipe 106 connected to the liquid preparation container 101 are located on one side of the flow baffle 111, and the continuous liquid level measuring sensor 108 is located on the other side of the flow baffle.
As an example, when the first medical fluid is fed from the first pipeline 102 and/or the second medical fluid is fed from the second pipeline 104, or the medical fluid is discharged from the fluid dispensing container 101, a vortex generated by the flow of the medical fluid may be blocked by the baffle plate 111 and dispersed to the medical fluid circulation through holes 1111 at two sides of the baffle plate 111, so that the liquid level fluctuation range is reduced at the side of the continuous liquid level measuring sensor 108, which plays a role in stabilizing the measured liquid level and reducing the measurement error of the continuous liquid level measuring sensor 108.
In one embodiment of the present invention, the method further comprises: an exhaust filter 113 for isolating fine particulate matter from entering the dispensing container; the exhaust pipeline 112 is positioned above the liquid preparation container 101, one end of the exhaust pipeline 112 is inserted above the liquid medicine in the liquid preparation container 101, and the other end of the exhaust pipeline 112 is connected with the exhaust filter 113; the exhaust duct 112 is used to exhaust gas from the liquid preparation container 101 when a chemical liquid is injected into the liquid preparation container 101, or introduce gas when a chemical liquid is discharged from the liquid preparation container 101.
Illustratively, as shown in fig. 2, which is a structural diagram of another chemical solution dispensing device provided in an embodiment of the present invention, a corresponding air exhaust pipe 112 in the dispensing device is used as a channel communicating with the outside, and is used for exhausting air in the dispensing container 101 when a chemical solution is injected into the dispensing container 101, or introducing air when a liquid is discharged from the dispensing container 101. The exhaust filter 113 on the exhaust pipe 112 is used to isolate the tiny particles outside the liquid preparation container, so as to avoid the contamination to the liquid preparation container 101.
In an embodiment of the present invention, the controller 110 is configured to obtain a mapping relationship between a liquid level of the liquid preparation container 101 and a liquid medicine injection volume, and a liquid level of the first liquid medicine in the liquid preparation container 101 detected by the continuous liquid level measurement sensor 108; determining the injection volume of the first liquid medicine according to the mapping relation between the liquid level height of the liquid preparation container 101 and the injection volume of the liquid medicine and the liquid level height of the first liquid medicine in the liquid preparation container 101, and determining the injection volume required by the second liquid medicine according to the first preparation information and the injection volume of the first liquid medicine.
For example, a mapping relation between the liquid level height of the liquid preparation container 101 and the injection volume of the liquid medicine and the liquid level height of the first liquid medicine in the liquid preparation container detected by the continuous liquid level measurement sensor 108 may be obtained, an actual injection volume of the first liquid medicine entering the liquid preparation container 101 may be determined according to the mapping relation between the liquid level height of the liquid preparation container 101 and the injection volume of the liquid medicine and the liquid level height of the first liquid medicine in the liquid preparation container 101, and an injection volume required for the second liquid medicine may be calculated according to the first preparation information and the injection volume of the first liquid medicine.
In a specific application, the liquid medicine volume of the liquid preparation container 101 can be calibrated by the continuous liquid level measuring sensor 108. The liquid medicine volume of the liquid preparation container 101 is calibrated by the continuous liquid level measuring sensor 108, and the linear or nonlinear relation between the liquid level and the liquid medicine volume can be obtained.
In an embodiment of the present invention, the controller 110 is further configured to determine a volume of the remaining liquid medicine when the liquid medicine according to the first preparation information is prepared and the liquid preparation container has the remaining liquid medicine according to the first preparation information; determining the injection volume of the first liquid medicine required currently and determining the injection volume of the second liquid medicine required currently according to the volume of the residual liquid medicine and the first preparation information; and controlling the inlet valve to inject the first liquid medicine into the required volume, and controlling the metering pump to inject the second liquid medicine into the required volume to obtain the mixed liquid medicine according with the first preparation information.
For example, when continuous dispensing is performed according to the first dispensing information and the dispensing container 101 for dispensing the liquid medicine has a remaining liquid medicine according to the first dispensing information, the volume of the remaining liquid medicine may be determined; and calculating the currently required injection volume of the first liquid medicine according to the volume of the residual liquid medicine and the first preparation information, and determining the currently required injection volume of the second liquid medicine according to the first preparation information.
As an example, when continuous dispensing is performed, the expansion mechanism 1093 may be controlled to move the overflow port to a position higher than the desired level of the mixed liquid medicine and keep the overflow valve 1092 closed. The volume of the residual liquid medicine can be determined according to the liquid level height of the residual liquid medicine and the mapping relation between the liquid level height of the liquid preparation container and the injection volume of the liquid medicine; the injection volume of the currently required first liquid medicine can be calculated according to the remaining liquid medicine volume and the first preparation information, the liquid level height corresponding to the currently required injection volume of the first liquid medicine is determined according to the mapping relation between the currently required injection volume of the first liquid medicine and the liquid level height of the liquid preparation container and the liquid injection volume of the liquid medicine, then the first liquid medicine is injected into the liquid preparation container 101, and the actually required liquid level height is the sum of the liquid level height corresponding to the currently required injection volume of the first liquid medicine and the liquid level height of the remaining liquid medicine. When the continuous level sensor 108 detects that the liquid level of the liquid medicine in the liquid preparation container reaches the liquid level height, indicating that the first liquid medicine injection volume is reached, the controller 110 may control the inlet valve to close and stop the injection of the first liquid medicine. Meanwhile, the volume of the second liquid medicine to be injected can be calculated according to the first preparation information and the volume of the residual liquid medicine, and the metering pump is controlled to inject the second liquid medicine with the required volume, so that the mixed liquid medicine according with the first preparation information is obtained.
Specifically, as in example 1:
for example, a machine tool process needs to use a volume ratio of 1: 100% hydrofluoric acid (HF) (first formulation information), assuming X% HF acid is supplied by the plant, the formulation process is as follows:
step 1: and opening the inlet valve and closing the outlet valve to enable deionized Water (DI Water, wherein the DI Water is used as base liquid and is first liquid medicine) to enter the liquid preparation container, detecting the liquid level height in the liquid preparation container in real time by the continuous liquid level measuring sensor, and calculating the volume of the DI Water entering the liquid preparation container in real time according to the mapping relation between the liquid level height and the liquid medicine volume. And when the volume of the DI Water entering the liquid preparation container reaches the pre-calculated liquid level height, closing the inlet valve, standing for 3 to 5 seconds to stabilize the liquid level measurement value, and determining the actual volume of the DI Water entering the liquid preparation container.
Step 2: calculating the volume of HF acid of the required mixed liquid medicine according to the actual volume of the DI Water entering the liquid preparation container obtained in the step 1:
in this case, the volume ratio is required to be 1:100, the required volume of HF acid = DI Water actual volume 1/100 entering the dispensing vessel, and the required volume of HF acid is injected into the dispensing vessel through the metering pump and the second line.
At the moment, the liquid medicine in the liquid preparation container is the liquid medicine with the volume ratio of 1: 100X% HF solution.
And step 3: when continuous liquid preparation is performed, it is assumed that a volume ratio of the volume a to the volume a is to be prepared of 1:100 percent of HF liquid medicine, and reading the liquid level height h of the rest liquid medicine 0 According to the mapping relation of liquid level height of liquid-mixing container and injection volume of liquid medicine to define that the volume of residual liquid medicine is Y, then (a) preparationa-Y) volume of HF solution:
calculating the actual volume of DI Water in the remaining liquid medicine as Y100/(100 + 1); the volume required to continue injecting DI Water is: (A-Y) 100/(100 + 1), the volume of HF to be injected is: (A-Y) { 1/(100 +1).
And 4, step 4: according to the mapping relation between the liquid level height of the liquid preparation container and the injection volume of the liquid medicine, determining that the liquid level height corresponding to the volume (A-Y) × 100/(100 + 1) of the DI Water to be continuously injected is delta h, then continuously injecting the DI Water with the volume (A-Y) × 100/(100 + 1), and finally achieving the liquid level height h = delta h + h of the liquid preparation container 0 。
And 5: and when the continuous liquid level measuring sensor detects that the liquid level height of the liquid medicine in the liquid preparation container reaches h, controlling the inlet valve to be closed, and stopping the injection of the first liquid medicine. Meanwhile, the metering pump is controlled to inject the second liquid medicine with the volume of (A-Y) × 1/(100 + 1).
In an embodiment of the present invention, the controller 110 is further configured to determine a volume of the remaining liquid medicine when the liquid medicine conforming to the second preparation information is prepared and the liquid preparation container has the remaining liquid medicine conforming to the first preparation information; determining the injection volume of the first liquid medicine required currently according to the volume of the residual liquid medicine, the first preparation information and the second preparation information, and controlling the inlet valve to enable the first liquid medicine to be injected into the required volume, so as to obtain a mixed liquid medicine according with the second preparation information; the liquid medicine concentration of the second preparation information is smaller than that of the first preparation information.
In an embodiment of the present invention, the second preparation information may be preparation information different from the first preparation information in terms of a volume ratio of the first medical fluid to the second medical fluid, that is, the second preparation information may be preparation information different from the first preparation information in terms of a concentration of the medical fluid.
Illustratively, when a drug solution having second formulation information needs to be formulated and a dispensing container has a remaining drug solution having the first formulation information, the formulation may be performed in two cases: the liquid medicine concentration of the second preparation information is smaller than that of the first preparation information, and the liquid medicine concentration of the second preparation information is larger than that of the first preparation information.
For example, if the liquid medicine concentration of the second preparation information is less than the liquid medicine concentration of the first preparation information, the volume of the remaining liquid medicine may be determined, the currently required injection volume of the first liquid medicine may be determined according to the volume of the remaining liquid medicine, the first preparation information and the second preparation information, and the inlet valve may be controlled to inject the first liquid medicine into the required volume, so as to obtain the mixed liquid medicine conforming to the second preparation information.
In an embodiment of the present invention, the controller 110 is configured to determine a mixed liquid medicine volume according to the second preparation information and the currently required injection volume of the first liquid medicine, determine a liquid level height of a final liquid medicine according to a mapping relationship between the liquid level height of the liquid medicine injection volume and the liquid preparation container and the liquid level volume of the mixed liquid medicine, and control the inlet valve to inject the first liquid medicine to reach the liquid level height of the final liquid medicine.
For example, if the liquid medicine concentration of the second preparation information is less than the first liquid medicine concentration, the mixed liquid medicine volume conforming to the second preparation information may be determined according to the currently required injection volume of the first liquid medicine and the second preparation information, the liquid level height of the final liquid medicine may be determined according to a mapping relationship between the liquid level height of the mixed liquid medicine volume and the liquid preparation container and the liquid medicine injection volume, and the inlet valve may be controlled to inject the first liquid medicine to the final liquid medicine level height.
Specifically, as in example 2:
for example, a machine tool process needs to use a volume ratio of 1: 100X% hydrofluoric acid (HF) (first formulation information), assuming that X% HF acid is supplied by the plant, if the process needs to be changed to 1: 200X% HF (second formulation information), the amount of DI Water that needs to be replenished is calculated as follows:
step 1: assuming that the volume ratio remaining in the liquid preparation container is 1: the volume of the X% HF liquid medicine of 100 is Y, and the volume of the X% HF is Y1/(100 + 1), then the volume of the DI Water which needs to be added again is: 200 (Y1/(100 + 1)) - (Y-Y1/(100 + 1)); the volume of the mixed liquid medicine after the liquid preparation is finished is as follows: (200 + 1) Y1/(100 + 1).
And 2, step: and calculating to obtain the final liquid level height of the liquid medicine through the mapping relation between the liquid level height of the liquid preparation container and the volume of the liquid medicine, opening the inlet valve, enabling the DI Water to enter the liquid preparation container, and obtaining the data of the liquid level height by the continuous liquid level measuring sensor at the moment.
And step 3: and when the liquid level reaches the liquid level height of the final liquid medicine obtained through calculation, closing the inlet valve. At this time, the liquid medicine in the liquid preparation container is the liquid medicine with the volume ratio of 1: 200X% HF.
As an example, before dispensing, the telescoping mechanism 1093 may be first controlled to move the overflow port above the desired level of mixed drug solution and to keep the overflow valve 1092 closed.
In an embodiment of the present invention, the controller 110 is further configured to determine a volume of the remaining liquid medicine when the liquid medicine conforming to the second preparation information is prepared and the liquid preparation container has the remaining liquid medicine conforming to the first preparation information; determining the injection volume of the second liquid medicine required currently according to the volume of the residual liquid medicine, the first preparation information and the second preparation information, and controlling the metering pump to inject the second liquid medicine with the required volume to obtain mixed liquid medicine according with the second preparation information; wherein the liquid medicine concentration of the second preparation information is greater than the liquid medicine concentration of the first preparation information.
For example, if the liquid medicine concentration of the second preparation information is greater than the first liquid medicine concentration, the currently required injection volume of the second liquid medicine may be determined according to the volume of the remaining liquid medicine, the first preparation information, and the second preparation information, and the metering pump may be controlled to inject the second liquid medicine of the required volume, so as to obtain the mixed liquid medicine according with the second preparation information.
Specifically, as in example 3:
for example, a machine tool process needs to use a volume ratio of 1: 100X% hydrofluoric acid (HF) (first formulation information), assuming that X% HF acid is supplied by the plant, if the process needs to be changed to 1: 20X% HF (second formulation information), then the amount of HF that needs to be replenished is calculated as follows:
step 1: assuming that the volume ratio remaining in the liquid preparation container is 1: the volume of 100X% HF chemical solution is Y, and the volume of X% HF in the remaining chemical solution is calculated as: y1/(100 + 1), the volume of DI Water in the rest liquid medicine is: y is 100/(100 + 1), then the volume of HF to be added again is: 1/20 x Y100/(100 + 1) - (Y1/(100 + 1)).
Step 2: the solution preparation container is filled with 1/20 x Y100/(100 + 1) - (Y1/(100 + 1)) volume of HF by a metering pump.
As an example, if the concentration ratio of the mixed liquid medicine needs to be changed, the liquid medicine can be re-prepared after calculating the first liquid medicine volume required by the new concentration ratio and the required second liquid medicine volume, or the first liquid medicine volume or the second liquid medicine volume can be quantitatively supplemented after calculating the concentration of the residual liquid, so that the concentration of the liquid medicine in the process tank 113 can be changed on line, and further the process effect under different liquid medicine concentrations can be tested on line. The skilled person can select the formulation according to the actual situation, and the examples of the present invention are not limited herein.
In one embodiment of the present invention, the second medical fluid includes one or more fluids, and the second line 104 includes one or more fluids.
Illustratively, if the liquid medicine to be prepared consists of a first liquid medicine and a plurality of second liquid medicines, a metering pump and a corresponding pipeline can be added. If a plurality of second liquid medicines need to be injected into the liquid preparation container, the corresponding liquid medicines can be sequentially injected by controlling each metering pump after the volume of each second liquid medicine is calculated according to the volume of the first liquid medicine.
In an embodiment of the present invention, the controller 110 is configured to control the outlet valve 107 to open after the preparation is completed, obtain the liquid level height of the liquid dispensing container 101 detected by the continuous liquid level measuring sensor 108 in real time, and control the outlet valve 107 to close when the liquid level of the liquid dispensing container 101 reaches the preset liquid level height.
For example, after the liquid medicine is prepared, the outlet valve 107 may be controlled to be opened, the liquid level height of the liquid preparation container 101 detected by the continuous liquid level measuring sensor 108 in real time is obtained, and when the liquid level of the liquid preparation container 101 reaches the preset liquid level height, the outlet valve 107 is controlled to be closed.
In an embodiment of the present invention, the third pipeline 106 is further provided with a flow meter 112, and the controller 110 is further configured to, if the liquid preparation container 101 is an irregularly shaped container, control the inlet valve 103 to fill the liquid preparation container with the first chemical liquid before the chemical liquid is prepared; acquiring the liquid level height of the first liquid medicine when the liquid preparation container 101 is filled with the first liquid medicine; controlling the outlet valve 107 and the flowmeter 112 to open, and obtaining the flow rate detected by the flowmeter 112 and the liquid level height detected by the continuous liquid level measuring sensor 108 at preset intervals until the first liquid medicine is emptied, so as to obtain a mapping relation between the liquid level height of the liquid preparation container 101 and the liquid medicine injection volume.
Illustratively, a flow meter 112 may be further provided on the third pipeline 106, and the flow meter 112 may be provided on the third pipeline 106 between the outlet valve 107 and the end far from the liquid dispensing container 101 for testing the flow rate of the liquid medicine when discharged.
For example, the liquid medicine volume of the liquid preparation container 101 may be calibrated by the continuous liquid level measuring sensor 108 before the liquid preparation device prepares liquid for the first time.
As an example, if the dispensing container 101 is an irregular-shaped container, before dispensing the chemical liquid, the inlet valve 103 of the first pipeline 102 is controlled to be opened and the outlet valve 107 of the third pipeline 106 is controlled to be closed, and the first chemical liquid is controlled to be injected into the dispensing container 101 until the dispensing container 101 is filled. The outlet valve 107 of the third pipeline 106 is controlled to be opened, the flow detected by the flow meter 112 and the liquid level height detected by the continuous liquid level measuring sensor 108 are obtained at preset time intervals until the first liquid medicine is emptied, a descending liquid level height value sequence and a corresponding flow value sequence are obtained, the volume of the liquid medicine at the unit liquid level height can be obtained by integrating the flow value in the unit liquid level height change interval, so that the linear or nonlinear relation between the liquid level height and the liquid medicine volume is obtained, and the obtained linear or nonlinear relation between the liquid level height and the liquid medicine volume can be used as the mapping relation between the liquid level height of the liquid distribution container 101 and the liquid medicine injection volume.
In an embodiment of the present invention, the controller 110 is further configured to, if the liquid preparation container 101 is a regular-shaped container, before the liquid medicine is prepared, control the metering pump 105 to inject the second liquid medicine with a first preset volume into the liquid preparation container 101, and obtain a first liquid level height corresponding to the first preset volume detected by the continuous liquid level measurement sensor 108; continuously injecting a preset second liquid medicine volume into the liquid preparation container 101, and acquiring a second liquid level height detected by the continuous liquid level measuring sensor 108; and determining the volume corresponding to the liquid level change of the liquid preparation container 101 in unit height as a mapping relation between the liquid level height and the liquid medicine injection volume according to the first liquid level height, the preset second liquid medicine volume and the second liquid level height.
For example, if the liquid dispensing container 101 is a regular container, the inlet valve 103 of the first pipe 102 and the outlet valve 107 of the third pipe 106 may be controlled to be closed before dispensing the chemical liquid. In the calibration process, a first preset volume of second liquid medicine can be injected into the liquid preparation container by controlling the metering pump 105, and a first liquid level height corresponding to the first preset volume detected by the continuous liquid level measuring sensor 108 is obtained; the preset second liquid medicine volume can be injected into the liquid preparation container 101 again, and the second liquid level height detected by the continuous liquid level measuring sensor 108 is obtained; the volume corresponding to the liquid level change of the liquid preparation container 101 in unit height can be determined as the mapping relation between the liquid level height and the liquid medicine injection volume according to the first liquid level height, the preset second liquid medicine volume and the second liquid level height.
For example, a second liquid medicine with a volume of V1 is injected into the liquid preparation container through the metering pump 105 so that the liquid medicine passes through the lowest measurement point of the continuous liquid level measurement sensor 108, at this time, the liquid level height is measured and recorded as Xmm through the continuous liquid level measurement sensor 108, the second liquid medicine with a volume of V2 is continuously injected into the liquid preparation container 101, at this time, the liquid level height is measured and recorded as Ymm through the continuous liquid level measurement sensor 108, a volume value corresponding to each millimeter of liquid level change of the continuous liquid level measurement sensor 108 can be obtained through V2/(Y-X) calculation, and the volume value corresponding to each millimeter of liquid level change obtained through calculation can be used as a mapping relation between the liquid level height of the liquid preparation container 101 and the liquid medicine injection volume.
As an example, after calibration is complete, the container may be emptied of the medical fluid for calibration by opening the outlet valve 107, and closing the outlet valve after emptying to complete the device's readiness before activation.
As an example, the overflow port may be raised to a designed maximum height prior to calibration to prevent interference of the overflow mechanism 109 with subsequent calibration data.
In an embodiment of the present invention, there is provided a liquid medicine preparing apparatus including: the liquid preparation container is used for containing liquid medicine; one end of the first pipeline is used for feeding the first liquid medicine, the other end of the first pipeline is connected with the liquid preparation container, and an inlet valve is arranged on the first pipeline; one end of the second pipeline is used for feeding the second liquid medicine, the other end of the second pipeline is connected with the liquid preparation container, and the second pipeline is provided with a metering pump; a third pipeline connected to the liquid preparation container for discharging the liquid medicine; an outlet valve is arranged on the third pipeline; the continuous liquid level measuring sensor is inserted into the liquid medicine of the liquid preparation container and is used for detecting the liquid level height of the liquid preparation container in real time; the overflow mechanism is used for discharging liquid medicine exceeding the preset liquid level height; the controller is used for controlling the inlet valve to inject the first liquid medicine with the preset liquid level height into the liquid preparation container according to the liquid level height detected by the continuous liquid level measuring sensor in real time, and controlling the overflow mechanism to discharge the first liquid medicine exceeding the preset liquid level height; controlling the metering pump to inject the second liquid medicine with the required volume to obtain the liquid medicine according with the first preparation information, and controlling the outlet valve to discharge the liquid medicine according with the first preparation information after the preparation is finished. The overflow mechanism discharges the redundant first liquid medicine exceeding the preset liquid level height, so that the volume of the obtained first liquid medicine cannot be controlled inaccurately due to the fluctuation of the liquid level, and the very accurate volume of the first liquid medicine can be obtained. By using the device, the liquid medicine can be conveniently and accurately prepared and quantitatively supplied according to the required concentration on the basis of different concentrations of the liquid medicine in different factories and services during liquid preparation, the operations such as capacity calibration and the like are not required to be carried out again, and the concentration of the liquid medicine in the process tank can be flexibly changed on line to test different process effects.
The embodiments in the present specification are all described in a progressive manner, and each embodiment focuses on differences from other embodiments, and portions that are the same and similar between the embodiments may be referred to each other.
As will be appreciated by one skilled in the art, embodiments of the present invention may be provided as a method, apparatus, or computer program product. Accordingly, embodiments of the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, embodiments of the present invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
Embodiments of the present invention are described with reference to flowchart illustrations and/or block diagrams of methods, terminal devices (systems), and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing terminal to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing terminal, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing terminal to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing terminal to cause a series of operational steps to be performed on the computer or other programmable terminal to produce a computer implemented process such that the instructions which execute on the computer or other programmable terminal provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
While preferred embodiments of the present invention have been described, additional variations and modifications of these embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including the preferred embodiment and all changes and modifications that fall within the true scope of the embodiments of the present invention.
Finally, it should also be noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "include", "including" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or terminal device including a series of elements includes not only those elements but also other elements not explicitly listed or inherent to such process, method, article, or terminal device. Without further limitation, an element defined by the phrases "comprising one of \ 8230; \8230;" does not exclude the presence of additional like elements in a process, method, article, or terminal device that comprises the element.
The above detailed description is provided for the liquid medicine preparation device provided by the present invention, and the principle and the embodiment of the present invention are explained by applying specific examples, and the description of the above examples is only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.

Claims (16)

1. A liquid medicine preparing apparatus, comprising:
the liquid preparation container is used for containing liquid medicine;
one end of the first pipeline is used for feeding a first liquid medicine, the other end of the first pipeline is connected with the liquid preparation container, and an inlet valve is arranged on the first pipeline;
one end of the second pipeline is used for feeding a second liquid medicine, the other end of the second pipeline is connected with the liquid preparation container, and the second pipeline is provided with a metering pump;
the third pipeline is connected with the liquid preparation container and is used for discharging liquid medicine; an outlet valve is arranged on the third pipeline;
the continuous liquid level measuring sensor is inserted into the liquid medicine of the liquid preparation container and is used for detecting the liquid level height of the liquid preparation container in real time;
the overflow mechanism is used for discharging liquid medicine exceeding the preset liquid level height;
the controller is used for controlling the inlet valve according to the liquid level height detected by the continuous liquid level measuring sensor in real time so as to inject the first liquid medicine with the preset liquid level height into the liquid preparation container, and controlling the overflow mechanism to discharge the first liquid medicine with the liquid level height exceeding the preset liquid level height; controlling the metering pump to inject the second liquid medicine with the required volume so as to obtain liquid medicine according with first preparation information, and controlling the outlet valve to discharge the liquid medicine according with the first preparation information after the preparation is finished; the first pipeline is located below the liquid preparation container, the second pipeline is located above the liquid preparation container, and the third pipeline is located below the liquid preparation container.
2. The medical fluid dispensing device according to claim 1, wherein the controller is configured to determine an injection volume of the first medical fluid based on the preset fluid level height; and determining the volume of the second liquid medicine required to be injected according to the first preparation information and the injection volume of the first liquid medicine, so that the metering pump is controlled to inject the second liquid medicine with the required volume to obtain the liquid medicine according with the first preparation information.
3. The medical fluid dispensing device according to claim 2, wherein the overflow mechanism includes:
the overflow pipe is inserted into the liquid distribution container from the lower part of the liquid distribution container, one end of the overflow pipe is positioned inside the liquid distribution container, the other end of the overflow pipe is positioned outside the liquid distribution container, and the one end of the overflow pipe is provided with an overflow port;
the overflow valve is arranged on an overflow pipe outside the liquid preparation container and is used for controlling the circulation of the liquid medicine;
the telescopic mechanism is arranged on an overflow pipe outside the liquid distribution container and used for driving the overflow valve and the overflow pipe to enable the overflow port to move up and down;
and one end of the telescopic corrugated pipe is sleeved on an overflow pipe inside the liquid distribution container, and the other end of the telescopic corrugated pipe is hermetically connected with the bottom of the liquid distribution container and used for sealing the overflow pipe and the liquid distribution container.
4. The medical fluid dispensing apparatus according to claim 3,
the controller is also used for controlling the telescopic mechanism to move the overflow port to the preset liquid level height when the first liquid medicine is injected into the liquid preparation container; when the liquid level of the injected first liquid medicine is higher than the preset liquid level, controlling the overflow valve to be opened for preset time so as to discharge the first liquid medicine higher than the preset liquid level through the overflow pipe; or alternatively
The controller is also used for determining a first expected liquid level height of the liquid medicine according with the first preparation information, controlling the telescopic mechanism to move the overflow port to a position higher than the first expected liquid level height, and controlling the overflow valve to keep closed.
5. The medical fluid dispensing apparatus according to claim 2,
the controller is used for acquiring a mapping relation between the liquid level height of the liquid preparation container and the injection volume of the liquid medicine, and the liquid level height of the first liquid medicine in the liquid preparation container, which is detected by the continuous liquid level measuring sensor; and determining the injection volume of the first liquid medicine according to the mapping relation between the liquid level height of the liquid preparation container and the injection volume of the liquid medicine and the liquid level height of the first liquid medicine in the liquid preparation container, and determining the injection volume required by the second liquid medicine according to the first preparation information and the injection volume of the first liquid medicine.
6. The medical fluid dispensing apparatus according to any one of claims 1 to 5,
the controller is further used for determining the volume of the residual liquid medicine when the liquid medicine according with the first preparation information is prepared and the liquid preparation container has the residual liquid medicine according with the first preparation information; determining the injection volume of the first liquid medicine required currently and determining the injection volume of the second liquid medicine required currently according to the volume of the residual liquid medicine and the first preparation information; and controlling the inlet valve to inject the first liquid medicine into the required volume, and controlling the metering pump to inject the second liquid medicine into the required volume to obtain the mixed liquid medicine according with the first preparation information.
7. The medical fluid dispensing apparatus according to any one of claims 1 to 5,
the controller is further used for determining the volume of the residual liquid medicine when the liquid medicine conforming to the second preparation information is prepared and the liquid preparation container has the residual liquid medicine conforming to the first preparation information; determining the injection volume of the first liquid medicine required currently according to the volume of the residual liquid medicine, the first preparation information and the second preparation information, and controlling the inlet valve to enable the first liquid medicine to be injected into the required volume, so as to obtain a mixed liquid medicine according with the second preparation information; the liquid medicine concentration of the second preparation information is smaller than that of the first preparation information.
8. The medical fluid dispensing apparatus according to any one of claims 1 to 5,
the controller is further used for determining the volume of the residual liquid medicine when the liquid medicine according with the second preparation information is prepared and the liquid preparation container has the residual liquid medicine according with the first preparation information; determining the injection volume of the currently required second liquid medicine according to the volume of the residual liquid medicine, the first preparation information and the second preparation information, and controlling the metering pump to inject the second liquid medicine with the required volume to obtain a mixed liquid medicine according with the second preparation information; wherein the liquid medicine concentration of the second preparation information is greater than the liquid medicine concentration of the first preparation information.
9. The medical fluid dispensing apparatus according to claim 7,
the controller is configured to determine a mixed liquid medicine volume according to the second preparation information and the currently required injection volume of the first liquid medicine, determine a final liquid medicine level height according to a mapping relationship between the liquid level height of the mixed liquid medicine volume and the liquid preparation container and the liquid medicine injection volume, and control the inlet valve to inject the first liquid medicine to the final liquid medicine level height.
10. The liquid medicine preparing apparatus according to claim 1, wherein a flow meter is further provided on the third line,
the controller is further configured to control the inlet valve to fill the liquid preparation container with the first liquid medicine before liquid medicine preparation if the liquid preparation container is an irregularly-shaped container; acquiring the liquid level height of the first liquid medicine when the liquid preparation container is filled with the first liquid medicine; and controlling the outlet valve and the flowmeter to be opened, and acquiring the flow detected by the flowmeter and the liquid level height detected by the continuous liquid level measuring sensor at preset time intervals until the first liquid medicine is emptied to obtain the mapping relation between the liquid level height of the liquid preparation container and the injection volume of the liquid medicine.
11. The medical fluid dispensing apparatus according to claim 1,
the controller is further configured to control the metering pump to inject a first preset volume of the second liquid medicine into the liquid preparation container before liquid medicine preparation if the liquid preparation container is a regular-shaped container, and obtain a first liquid level height corresponding to the first preset volume detected by the continuous liquid level measurement sensor; continuously injecting a preset second liquid medicine volume into the liquid preparation container, and acquiring a second liquid level height detected by the continuous liquid level measuring sensor; and determining the volume corresponding to the liquid level change of the unit height of the liquid preparation container as a mapping relation between the liquid level height and the liquid medicine injection volume according to the first liquid level height, the preset second liquid medicine volume and the second liquid level height.
12. The medical fluid dispensing apparatus according to claim 1,
and the controller is used for controlling the outlet valve to be opened after the preparation is finished, acquiring the liquid level height of the liquid preparation container detected by the continuous liquid level measuring sensor in real time, and controlling the outlet valve to be closed when the liquid level of the liquid preparation container reaches a second expected liquid level height.
13. The medical fluid dispensing device of claim 1, wherein the second medical fluid includes one or more and the second conduit includes one or more.
14. The medical fluid dispensing apparatus according to claim 1, further comprising:
and the flow baffle is connected with the bottom and the inner wall of the liquid preparation container and is provided with a through hole.
15. The medical fluid preparation apparatus according to claim 14, wherein one end of said first pipe connected to said fluid preparation container, one end of said second pipe connected to said fluid preparation container, and one end of said third pipe connected to said fluid preparation container are located on one side of said flow baffle, and said continuous fluid level measuring sensor is located on the other side of said flow baffle.
16. The medical fluid dispensing apparatus according to claim 1, further comprising:
the exhaust filter is used for isolating tiny particles from entering the liquid preparation container;
the exhaust pipeline is positioned above the liquid preparation container, one end of the exhaust pipeline is inserted above the liquid medicine in the liquid preparation container, and the other end of the exhaust pipeline is connected with the exhaust filter; the exhaust pipeline is used for exhausting gas in the liquid preparation container when the liquid medicine is injected into the liquid preparation container, or introducing the gas when the liquid medicine is exhausted from the liquid preparation container.
CN202211071379.6A 2022-09-02 2022-09-02 Liquid medicine preparation device Active CN115138229B (en)

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Publication number Priority date Publication date Assignee Title
US6247838B1 (en) * 1998-11-24 2001-06-19 The Boc Group, Inc. Method for producing a liquid mixture having a predetermined concentration of a specified component
CN103521105B (en) * 2013-09-26 2015-09-23 奇瑞汽车股份有限公司 A kind of automotive fluid proportioning control system of proportion adjustable and control method thereof
CN203777952U (en) * 2014-04-04 2014-08-20 广东科创工程技术有限公司 Flexible automatic dosing system for coagulants
CN111214972B (en) * 2020-01-16 2022-06-14 北京北方华创微电子装备有限公司 Liquid medicine proportioning method and liquid medicine proportioning device
CN111760481A (en) * 2020-06-29 2020-10-13 北京北方华创微电子装备有限公司 Liquid medicine mixing arrangement and liquid medicine mix moisturizing system
CN113760020B (en) * 2021-09-26 2023-06-02 北京北方华创微电子装备有限公司 Pressure control device for semiconductor device and semiconductor device

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