CN220166269U

CN220166269U - Sample stage start-stop control device of magnetron sputtering coating machine

Info

Publication number: CN220166269U
Application number: CN202321663675.5U
Authority: CN
Inventors: 余望超; 宋学锋
Original assignee: Southwest University of Science and Technology
Current assignee: Southwest University of Science and Technology
Priority date: 2023-06-28
Filing date: 2023-06-28
Publication date: 2023-12-12
Anticipated expiration: 2033-06-28

Abstract

The utility model relates to the technical field of magnetron sputtering coating machines, in particular to a sample stage start-stop control device of a magnetron sputtering coating machine. According to the utility model, through the cooperation of the air pipe, the piston, the compression bar, the spring, the outer ring and the annular scraping strip, the device pumps air in the sample box through the vacuum pump to form a high vacuum environment, then metal substances are evaporated to form ion gas with certain pressure, the ion gas is accelerated and sprayed into the sample box under the action of an external magnetic field, the ion beam is impacted on a workpiece on the rotary table, the formed film can cover the surface of the workpiece layer by layer, and when the ion beam needs to be stopped, the ion beam can be controlled through the controller.

Description

Sample stage start-stop control device of magnetron sputtering coating machine

Technical Field

The utility model relates to the technical field of magnetron sputtering coating machines, in particular to a sample stage start-stop control device of a magnetron sputtering coating machine.

Background

The magnetron sputtering coating machine is high-grade film preparation equipment widely applied to material surface treatment and preparation, and can uniformly cover films of materials such as metal, alloy, oxide and the like on the surface of a substrate, so that the performance of the material surface such as hardness, wear resistance, optical property and the like is improved, and therefore, the magnetron sputtering coating machine is widely applied to the fields of semiconductors, photoelectricity, magnetic materials and the like;

the vacuum magnetron sputtering coating machine disclosed in the authorization publication No. CN206692724U comprises a vacuum pumping system, a vacuum chamber door, a workpiece rotating frame arranged in the vacuum chamber and used for placing a coating product, and a magnetron sputtering device arranged in the vacuum chamber, wherein the magnetron sputtering device comprises a magnetron target flange fixedly connected with the vacuum chamber, and the vacuum magnetron sputtering coating machine further comprises a nano powder leading-in device arranged near the magnetron sputtering device. After the technical scheme is adopted, the utility model has the beneficial effects that: coatings can be made with high hardness, good abrasion resistance, and can include a variety of other properties.

The device has the advantages of simple structure, reasonable design, simple control mode, convenient maintenance and strong practicability, can meet the requirements of users, and has great popularization value;

however, the above patent suffers from the following disadvantages:

the vacuum chamber of the coating machine is a sealing device for placing samples, which is also called a sample table, and when the magnetron sputtering coating is performed, the inner wall of the sample table is covered with a film layer, and the film layer thickness on the inner wall can be synchronously increased along with the increase of the processing times, so that the later cleaning is difficult over time.

Disclosure of Invention

The utility model aims to provide a sample stage start-stop control device of a magnetron sputtering coating machine, which aims to solve the problems in the background technology.

In order to achieve the above purpose, the present utility model provides the following technical solutions:

a sample stage start-stop control device of a magnetron sputtering coating machine comprises

The device comprises a workbench, wherein a base is fixedly arranged on one side of the top end of the workbench, a sample box is fixedly arranged on the top end of the base, a second connector is fixedly arranged on the outer side of the middle part of the top end of the sample box, and a nozzle is fixedly arranged at one end of the second connector, which is positioned in the sample box;

the equipment box is fixedly arranged at the top end of one side, far away from the base, of the workbench, a vacuum pump is fixedly arranged in one side, close to the base, of the equipment box, a controller is fixedly arranged on one side, far away from the vacuum pump, of the equipment box, and a motor is fixedly arranged outside the bottom end, close to the base, of the workbench;

the trachea, trachea fixed mounting is in the top both sides of sample box, two tracheal inside equal movable mounting has the piston, two equal fixed mounting in bottom of piston has the depression bar, two the bottom fixed mounting of depression bar has the outer lane, the bottom outside fixed mounting of outer lane has annular scraping strip.

Preferably, a mechanical seal is fixedly arranged in the middle of the top end of the sample box, and a rotary table is fixedly arranged at the output shaft end of the motor through the mechanical seal;

preferably, a spring is fixedly arranged at the outer side of the bottom end of the piston, and the bottom end of the spring is fixedly connected with the bottom end of the inner side of the air pipe;

preferably, two ends of the vacuum pump are respectively provided with an air inlet and an air outlet, the right side of the middle part of the top end of the sample box is provided with a first joint, and the first joint is communicated with the air outlet through a pipeline;

preferably, a mounting seat is arranged on the left side of the middle part of the top end of the sample box, a vacuum pressure sensor is fixedly arranged on the top end of the mounting seat, and a detection head is arranged at the bottom end of the vacuum pressure sensor penetrating through the mounting seat and positioned in the sample box;

preferably, a placing opening is formed in one side, far away from the equipment box, of the sample box, a box door is movably mounted on the outer side of the placing opening, and toughened glass is fixedly mounted on one side, far away from the box door and the equipment box, of the sample box.

Compared with the prior art, the utility model has the beneficial effects that:

1. the utility model provides a magnetron sputtering coating machine sample platform opens stops controlling means, through the trachea, the piston, the depression bar, the cooperation is used between spring, outer lane and the annular scraping strip, this device is through the vacuum pump machine with the inside air of sample box take out and form high vacuum environment, then evaporate the metal substance, form the ionic gas of certain pressure, carry out the acceleration under the effect of external magnetic field and spray into in the sample box, the work piece on the ion beam striking revolving stage, the film that forms can cover on the work piece surface one by one, when stopping as required, can control through the controller.

2. This magnetron sputtering coating machine sample platform opens stops controlling means uses through the cooperation between sample box, vacuum pump machine, the motor, nozzle and the controller, after processing, through motorised valve adjustment passageway, vacuum pump machine can get into the trachea with outside air compression like this, when the inside back push down piston of air admission trachea, the piston drives the depression bar and pushes down in step, can drive annular through the outer lane like this and scrape the strip and scratch the remaining rete on the sample box inner wall, after the inside gas of trachea is taken out, the spring can drive annular and scrape the strip and reset to rise, so can cut the clearance of rubbing from top to bottom, thereby reach the purpose of being convenient for clearance.

Drawings

FIG. 1 is a schematic overall elevational view of the present utility model;

FIG. 2 is a schematic overall sectional view of the present utility model;

FIG. 3 is an enlarged schematic view of the present utility model at A in FIG. 2;

fig. 4 is an enlarged schematic view of the present utility model at B in fig. 2.

In the figure: 1. a work table; 2. a base; 3. a sample box; 4. a second joint; 5. a nozzle; 6. an equipment box; 7. a vacuum pump; 8. a controller; 9. a motor; 10. an air pipe; 11. a piston; 12. a compression bar; 13. an outer ring; 14. an annular scraping strip; 15. mechanical sealing; 16. a rotary table; 17. a spring; 18. an air inlet and an air outlet; 19. an air outlet; 20. a first joint; 21. a mounting base; 22. a vacuum pressure sensor; 23. a detection head; 24. a placement port; 25. a door; 26. tempered glass.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be understood that the terms "top," "bottom," "inner," "outer," and the like indicate an orientation or a positional relationship based on that shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the apparatus or elements in question must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model.

In the description of this patent, it should be noted that, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "disposed" are to be construed broadly, and may be fixedly connected, disposed, detachably connected, disposed, or integrally connected, disposed, for example. The specific meaning of the terms in this patent will be understood by those of ordinary skill in the art as the case may be.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a number" is two or more, unless explicitly defined otherwise.

Referring to fig. 1-4, the present utility model provides a technical solution:

a sample stage start-stop control device of a magnetron sputtering coating machine comprises a workbench 1, a base 2 is fixedly arranged on one side of the top end of the workbench 1, a sample box 3 is fixedly arranged on the top end of the base 2, a second joint 4 is fixedly arranged on the outer side of the middle part of the top end of the sample box 3, a nozzle 5 is fixedly arranged on one end of the second joint 4 in the sample box 3, a device box 6 is fixedly arranged on the top end of one side of the workbench 1, which is far away from the base 2, a vacuum pump 7 is fixedly arranged on the inner side of one side of the device box 6, which is close to the base 2, a controller 8 is fixedly arranged on one side of the device box 6, which is far away from the vacuum pump 7, a motor 9 is fixedly arranged on the outer side of the bottom end of the workbench 1, which is close to the base 2, the middle part of the top end of the sample box 3 is fixedly provided with a mechanical seal 15, the output shaft end of a motor 9 passes through the mechanical seal 15 and is fixedly provided with a rotary table 16, two ends of a vacuum pump 7 are respectively provided with an air inlet and outlet 18 and an air outlet 19, the right side of the middle part of the top end of the sample box 3 is provided with a first connector 20, the first connector 20 is communicated with the air outlet 19 through a pipeline, the device pumps air in the sample box 3 through the vacuum pump 7 to form a high vacuum environment, then metal substances are evaporated to form ion gas with certain pressure, the ion gas is accelerated and sprayed into the sample box 3 under the action of an external magnetic field, the ion beam impacts a workpiece on the rotary table 16, and the formed film can be covered on the surface of the workpiece layer by layer and can be controlled through a controller 8 when the sample box needs to be stopped;

as shown in fig. 3 and 4, the air pipes 10 are fixedly arranged at two sides of the top end of the sample box 3, the pistons 11 are movably arranged in the two air pipes 10, the compression rods 12 are fixedly arranged at the bottom ends of the two pistons 11, the outer ring 13 is fixedly arranged at the bottom ends of the two compression rods 12, the annular scraping strip 14 is fixedly arranged at the outer side of the bottom ends of the outer ring 13, the springs 17 are fixedly arranged at the outer sides of the bottom ends of the pistons 11, the bottom ends of the springs 17 are fixedly connected to the inner side bottom ends of the air pipes 10, a placing opening 24 is formed in one side of the sample box 3, which is far away from the box door 25, and a toughened glass 26 is fixedly arranged at one side of the equipment box 6, after the processing is finished, a workpiece is taken away from the position of the placing opening 24, then an external pressurizing device is started to inject compressed air into the air pipe 10, the vacuum pump 7 in the device is connected with the air pipe 10 through a shunt pipe and an electric valve, after the processing is finished, the air pipe 10 is compressed by the vacuum pump 7 through the electric valve, after the air is introduced into the air pipe 10, the inner side of the air pipe 11 is pushed down, the annular scraping strip 11 is pushed down by the piston 11, the annular scraping strip is driven by the air pipe 13, and the annular scraping strip is pushed down by the air pipe 10, and the annular scraping strip is cleaned, and the inner wall of the air is cleaned up, and the inner wall of the air pipe 10 is cleaned;

as shown in fig. 3, a mounting seat 21 is arranged on the left side of the middle part of the top end of the sample box 3, a vacuum pressure sensor 22 is fixedly arranged on the top end of the mounting seat 21, a detection head 23 is arranged in the sample box 3 by passing through the mounting seat 21 at the bottom end of the vacuum pressure sensor 22, when air in the sample box 3 is pumped away, the vacuum pressure sensor 22 is detected by the detection head 23 and then is started by a motor 9 controlled by a controller 8, and the motor 9 drives a workpiece on a rotary table 16 to rotate after being started, so that the aim of facilitating automatic opening is fulfilled;

when the sample stage start-stop control device of the magnetron sputtering coating machine is used, the device pumps air in the sample box 3 through the vacuum pump 7 to form a high vacuum environment, then evaporates metal substances to form ion gas with certain pressure, the ion gas is accelerated to be sprayed into the sample box 3 under the action of an external magnetic field, the ion beam is impacted on a workpiece on the rotary table 16, the formed film can cover the surface of the workpiece layer by layer, when the workpiece needs to be stopped, the control can be performed through the controller 8, after the processing is finished, the workpiece is taken out from the position of the placing port 24, then an external pressurizing device is started to inject the compressed gas into the air pipe 10, the vacuum pump 7 in the device can also be connected with the sample box 3 through a shunt pipe and an electric valve, after the processing is finished, the workpiece is taken away from the position of the placing port 24, then an external pressurizing device is started to pour compressed gas into the air pipe 10, the vacuum pump 7 in the device can be connected with the air pipe 10 through a shunt pipe and an electric valve, after the processing is finished, the passage is regulated through the electric valve, the vacuum pump 7 can compress external air into the air pipe 10, when the air enters the air pipe 10, the piston 11 is pressed down, the piston 11 drives the pressing rod 12 to synchronously press down, the annular scraping strip 14 can be driven by the outer ring 13 to scrape a residual film layer on the inner wall of the sample box 3, and after the gas in the air pipe 10 is pumped away, the spring 17 can drive the annular scraping strip 14 to reset and lift, so that the scraping strip can be scraped up and down.

The foregoing has shown and described the basic principles, principal features and advantages of the utility model. It will be understood by those skilled in the art that the present utility model is not limited to the above-described embodiments, and that the above-described embodiments and descriptions are only preferred embodiments of the present utility model, and are not intended to limit the utility model, and that various changes and modifications may be made therein without departing from the spirit and scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. A sample stage start-stop control device of a magnetron sputtering coating machine is characterized in that: the sample stage start-stop control device of the magnetron sputtering coating machine comprises:

the device comprises a workbench (1), wherein a base (2) is fixedly arranged on one side of the top end of the workbench (1), a sample box (3) is fixedly arranged on the top end of the base (2), a second connector (4) is fixedly arranged on the outer side of the middle part of the top end of the sample box (3), and a nozzle (5) is fixedly arranged at one end of the second connector (4) positioned in the sample box (3);

the equipment box (6), equipment box (6) is fixedly arranged at the top end of one side, far away from the base (2), of the workbench (1), a vacuum pump (7) is fixedly arranged in one side, close to the base (2), of the equipment box (6), a controller (8) is fixedly arranged at one side, far away from the vacuum pump (7), of the equipment box (6), and a motor (9) is fixedly arranged outside the bottom end, close to the base (2), of the workbench (1);

the gas tube (10), trachea (10) fixed mounting is in the top both sides of sample tank (3), two the inside of trachea (10) is equal movable mounting has piston (11), two equal fixed mounting in bottom of piston (11) has depression bar (12), two the bottom fixed mounting of depression bar (12) has outer lane (13), the bottom outside fixed mounting of outer lane (13) has annular scraping strip (14).

2. The device for controlling the start and stop of a sample stage of a magnetron sputtering coating machine according to claim 1, wherein the device comprises: the middle part of the top end of the sample box (3) is fixedly provided with a mechanical seal (15), and the output shaft end of the motor (9) penetrates through the mechanical seal (15) and is fixedly provided with a rotary table (16).

3. The device for controlling the start and stop of a sample stage of a magnetron sputtering coating machine according to claim 1, wherein the device comprises: the outer side of the bottom end of the piston (11) is fixedly provided with a spring (17), and the bottom end of the spring (17) is fixedly connected with the inner bottom end of the air pipe (10).

4. The device for controlling the start and stop of a sample stage of a magnetron sputtering coating machine according to claim 1, wherein the device comprises: the vacuum pump is characterized in that two ends of the vacuum pump (7) are respectively provided with an air inlet and outlet (18) and an air outlet (19), a first connector (20) is arranged on the right side of the middle of the top end of the sample box (3), and the first connector (20) is communicated with the air outlet (19) through a pipeline.

5. The device for controlling the start and stop of a sample stage of a magnetron sputtering coating machine according to claim 1, wherein the device comprises: the vacuum pressure sensor is characterized in that an installation seat (21) is arranged on the left side of the middle of the top end of the sample box (3), a vacuum pressure sensor (22) is fixedly arranged on the top end of the installation seat (21), and a detection head (23) is arranged in the sample box (3) by penetrating through the installation seat (21) from the bottom end of the vacuum pressure sensor (22).

6. The device for controlling the start and stop of a sample stage of a magnetron sputtering coating machine according to claim 1, wherein the device comprises: the sample box (3) is kept away from one side of equipment box (6) and is offered and place mouth (24), the outside movable mounting of placing mouth (24) has chamber door (25), one side that chamber door (25) and equipment box (6) were kept away from to sample box (3) is fixed mounting has toughened glass (26).