CN109023256B - Single-sided substrate vacuum coating equipment - Google Patents
Single-sided substrate vacuum coating equipment Download PDFInfo
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- CN109023256B CN109023256B CN201810970946.9A CN201810970946A CN109023256B CN 109023256 B CN109023256 B CN 109023256B CN 201810970946 A CN201810970946 A CN 201810970946A CN 109023256 B CN109023256 B CN 109023256B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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Abstract
The invention discloses a single-sided substrate vacuum coating device, wherein a vacuum generating device is connected with an evaporation chamber through a flexible vacuum pipeline, one side of the evaporation chamber is provided with an opening or a plurality of openings, one side of the opening is provided with a substrate to be coated, the substrate is sealed with the opening of the evaporation chamber, and a solution storage tank to be coated is connected with the vacuum generating device or the evaporation chamber; the substrate to be coated is close to the opening of the evaporation chamber, the vacuum generating device is pumped to a vacuum state, and the solution gasified in the evaporation chamber forms a film on the substrate to be coated. The method has the advantages of simple operation, no pollution, time and labor saving, thin film thickness and good uniformity.
Description
Technical Field
The invention particularly relates to a single-sided substrate vacuum coating device.
Background
With the increasing demand of the market for the performance of industrial materials and the advancement of coating material technology, the research and application of coating materials on the surface of industrial materials to improve their performance has become a hot spot in academia and industry in recent years. Such as antireflection coatings for solar glass sheet surfaces, antibacterial coatings for floors, sanitary ware, door handles, etc., easy-to-clean coatings for architectural glass, etc. The coating process of these coatings can be completed in the production line of industrial materials, or after the industrial materials are sold, installed, and used, the after-market secondary processing of the industrial materials can be performed. Examples of the latter include waterproof liquid for automobile rearview mirror glass on the market and the like. However, the aftermarket secondary processing of the coating is generally performed using a soft material having a washing liquid capability, such as a coating wheel, a sponge, a cloth, etc., and this coating method has some limitations in terms of the kind of coating material, the coating uniformity, etc.
For the surfaces of installed or in-use industrial materials, such as installed glass curtain walls, sold automobile glass and the like, secondary coating processing is usually limited to manual solution coating and the like.
Disclosure of Invention
In order to solve the technical problem, the invention provides a single-sided substrate vacuum coating device.
The technical scheme of the invention is as follows: a vacuum coating equipment for single-face substrate is characterized in that a vacuum generating device is connected with an evaporation chamber through a flexible vacuum pipeline, one face of the evaporation chamber is provided with an opening or a plurality of openings, a substrate to be coated is arranged on one side of the opening and used for sealing the opening face of the evaporation chamber, and a solution storage tank to be coated is connected with the vacuum generating device or the evaporation chamber.
Further, when the evaporation chamber is connected with a storage tank for the solution to be coated, the substrate to be coated is close to the opening of the evaporation chamber, the vacuum generating device is pumped to a vacuum state, the solution to be coated is input into a closed cavity defined by the evaporation chamber and the substrate to be coated for gasification, and a film is formed on the substrate to be coated.
Further, when the vacuum generating device is connected with the storage tank for the solution to be coated, the substrate to be coated is close to the opening of the evaporation chamber, the vacuum generating device is pumped to a vacuum state, the solution to be coated is input into the vacuum generating device, and the gasified solution enters the evaporation chamber through the flexible vacuum pipeline to form a film on the substrate to be coated.
Further, the vacuum generating device is a vacuum pump, a hydraulic cylinder, a motor-driven cylinder or a combination of a plurality of the vacuum generating devices.
Furthermore, the vacuum generating device comprises a cylinder, a first cavity, a second cavity, a third cavity, a first piston, a second piston and a third piston, wherein the interior of the cylinder is divided into the first cavity, the second cavity and the third cavity by two partition plates, the first piston is arranged in the first cavity in a sliding manner, the second piston is arranged in the second cavity in a sliding manner, the third piston is arranged in the third cavity in a sliding manner, and the first piston, the second piston and the third piston are connected through a piston rod; the first cavity and the third cavity are respectively communicated with the evaporation chamber, the second cavity is communicated with an oil inlet pipeline and an oil outlet pipeline, and the oil inlet pipeline and the oil outlet pipeline are connected through an oil pressure chamber valve; a first valve is arranged on a flexible vacuum pipeline connected with the first cavity and the evaporation chamber, and a second valve is arranged on a flexible vacuum pipeline connected with the third cavity and the evaporation chamber.
Further, a first cavity in the vacuum generating device is communicated with a storage tank of the solution to be coated.
Further, the work flow of the vacuum generating device is as follows:
A. when the first piston is at the A position, the oil pressure chamber valve, the first valve and the second valve are all closed;
B. when the first piston moves to the position C, the first cavity is in a vacuum state;
C. spraying a solution to be coated into the first cavity, and atomizing the liquid;
D. when the first piston moves to the position B, the value of the pressure gauge is 1 atmosphere, the second valve and the first valve are opened in sequence, so that the air in the evaporation chamber flows into the third cavity, and the steam in the first cavity flows into the evaporation chamber;
E. after the first piston moves to the position A, closing the first valve and the second valve, and standing for a period of time;
F. opening a first valve and a second valve, moving a first piston from the position A to the position C, allowing gas in the evaporation chamber to flow into a first cavity through a flexible vacuum pipeline, and discharging gas in a third cavity into the atmosphere;
G. and closing the first valve and the second valve, moving the first piston from the position C to the position A, and exhausting the gas in the first cavity into the atmosphere.
Furthermore, the first cavity and the third cavity are connected with a waste gas treatment device, and gas in the third cavity and the first cavity is discharged into the atmosphere through the waste gas treatment device.
Furthermore, the structure of the evaporation chamber is bowl-shaped, cube-shaped or sphere-shaped.
Furthermore, an electric heating wire or a fan is additionally arranged in the evaporation chamber.
The invention has the beneficial effects that: the vacuum generating device is pumped to a vacuum state, the solution in the solution storage tank to be coated is input into the closed cavity formed by the evaporation chamber and the base material to be coated, and the gasified solution completes film formation on the base material to be coated in the closed cavity.
Drawings
The invention is further illustrated by the following figures and examples.
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic structural view of the vacuum generating apparatus of the present invention.
Detailed Description
The following further describes the embodiments of the present invention with reference to the drawings, and the present embodiment is not to be construed as limiting the invention.
As shown in fig. 1, a single-sided substrate vacuum coating apparatus includes a vacuum generator 1, an evaporation chamber 2, a flexible vacuum pipeline 3, a substrate 4 to be coated, and a solution storage tank 5 to be coated.
The vacuum generating device 1 is connected with the evaporation chamber 2 through a flexible vacuum pipeline 3, and the flexible vacuum pipeline 3 separates the vacuum generating device 1 from the evaporation chamber 2, so that the effects of reducing the load on the substrate 4 to be coated and improving the use efficiency of the solution to be coated are achieved. The vacuum generating device 1 may be a vacuum pump, a hydraulic cylinder, a motor-driven cylinder, or a combination thereof. The flexible vacuum pipeline 3 can use pressure-resistant pipes such as corrugated pipes, and the middle section of the flexible vacuum pipeline can be provided with a valve to control the on-off of the vacuum flow.
The evaporation chamber 2 is designed to have an opening on one side or multiple sides, and a substrate 4 to be coated is disposed on one side of the opening. The evaporation chamber 2 can be designed into a bowl shape, a square shape, a sphere shape and the like, and can also be designed according to the shape of the surface of the substrate to be coated so as to form the shape fit with the substrate to be coated, and the evaporation chamber can be conveniently connected and sealed with the surface of the substrate 4 to be coated. The outer edge of the vapor deposition chamber 2 is fitted with a sealing material such as sealing rubber or silica gel. The evaporation chamber 2 can be provided with devices such as an electric heating wire and a fan, etc. to accelerate the film formation and solidification of the gas on the substrate 4 to be coated. The vapor deposition chamber 2 is provided with a pressure gauge 111.
The solution tank 5 to be coated is connected to the vacuum generating apparatus 1 or the evaporation chamber 2 for converting the liquid into gas. The solution tank 5 to be coated is provided with an ultrasonic nozzle to accelerate the vaporization of the solution. The coating solution is evaporated in vacuum after injection and then formed into a film on the substrate 4 to be coated. The solution inlet can be additionally provided with a metering device such as a flowmeter, a timer and the like so as to control the injection amount of the solution.
The working process of the solution storage tank 5 to be coated and the evaporation chamber 2 in the connection state is as follows: a substrate 4 to be coated is close to an opening of the evaporation chamber 2, the vacuum generating device 1 is pumped to a vacuum state, a solution in the solution storage tank 5 to be coated is input into a closed cavity formed by the evaporation chamber 2 and the substrate 4 to be coated, and the solution gasified in the cavity in the evaporation chamber 2 forms a film on the substrate 4 to be coated.
The working process of the solution storage tank 5 to be coated and the vacuum generating device 1 in the connection state is as follows: a substrate 4 to be coated is close to an opening of the evaporation chamber 2, the vacuum generation device 1 is pumped to a vacuum state, a solution in a solution storage tank 5 to be coated is input into the vacuum generation device 1, the gasified solution enters the evaporation chamber 2 through the flexible vacuum pipeline 3, and a film is formed on the substrate 4 to be coated.
The solution storage tank 5 to be coated is connected with the vacuum generating device 1, as shown in fig. 2, the vacuum generating device 1 includes a cylinder 101, a partition plate 102, a first cavity 103, a second cavity 104, a third cavity 105, a first piston 106, a second piston 107, a third piston 108, a piston rod 109, an activated carbon filter 110, a pressure gauge 111, an oil inlet pipeline 112, an oil outlet pipeline 113, an oil pressure chamber valve 114, a first valve 115, and a second valve 116.
The interior of the cylinder 101 is divided into a first cavity 103, a second cavity 104 and a third cavity 105 by two partition plates 102, and the volume of each cavity is 1000 mL. A first piston 106 is slidably arranged in the first cavity 103, a second piston 107 is slidably arranged in the second cavity 104, a third piston 108 is slidably arranged in the third cavity 105, and the first piston 106, the second piston 107 and the third piston 108 are rigidly connected by a piston rod 109.
The first cavity 103 is communicated with the evaporation chamber 2 and the solution storage tank 5 to be coated, and the first cavity 103 mainly functions to atomize the solution to be coated by vacuum.
The second cavity 104 is communicated with an oil inlet pipeline 112 and an oil outlet pipeline 113, and the oil inlet pipeline 112 is connected with the oil outlet pipeline 113 through an oil pressure chamber valve 114. The second piston 107 is driven to move in the second cavity 104 by controlling the flow of the hydraulic oil, and the first piston 106 is driven to move in the first cavity 103 and the third piston 108 is driven to move in the third cavity 105.
The third chamber 105 communicates with the evaporation chamber 2, and the main function of the third chamber 105 is to collect air flowing from the evaporation chamber 2. The third chamber 105 can be replaced by a space below the position of the first piston 106 in the first chamber 103.
The first cavity 103 and the third cavity 105 are connected to an exhaust gas treatment device, which may be an activated carbon filter 110, and exhaust gas in the cylinder is discharged through the movement of the first piston 106 and the third piston 108, and the discharged exhaust gas is treated by the activated carbon filter 110.
The flexible vacuum pipeline 3 connecting the first cavity 103 and the evaporation chamber 2 is provided with a first valve 115, the flexible vacuum pipeline 3 connecting the third cavity 105 and the evaporation chamber 2 is provided with a second valve 116, and the first valve 115 and the second valve 116 are used for controlling gas flow.
The working process of the embodiment of the invention is as follows:
(1) when the first piston 106 is in the a position, the oil pressure chamber valve 114, the first valve 115, and the second valve 116 are all closed;
(2) when the first piston 106 moves to the position C, the first chamber 103 is in a vacuum state;
(3) spraying 0.1-0.5mL of solution to be coated into the first cavity 103, and staying for 1 minute until the liquid is atomized;
(4) when first piston 106 is operated to the B position, the value of pressure gauge 111 is made to be about 1 atmosphere; the volume of the first cavity 103 should be 100mL-500mL theoretically (the volume is increased by 1000 times according to the liquid gasification);
(5) the second valve 116 and the first valve 115 are opened in this order, so that the air of the evaporation chamber 2 flows into the third chamber 105, and the steam of the first chamber 103 flows into the evaporation chamber 2. At the same time, the first piston 106 is compressed to position a to ensure that the reading of the pressure gauge 111 is higher than a safe value (not too low to cause glass breakage) but lower than atmospheric pressure (to ensure the negative pressure state of the evaporation chamber to ensure the hermetic contact between the evaporation chamber and the glass). After the vacuum pumping is completed and the solution to be coated is inputted into the vacuum generating apparatus 1, the first piston 106 in the cylinder 101 moves to the position a to compress the gasified solution in the first chamber 103, thereby increasing the gas density and the film forming speed. In this process, the opening degree of the first valve 115 is adapted to the operating speed of the first piston 106;
(6) after the first piston 106 moves to the position A, the first valve 115 and the second valve 116 are closed, and the mixture is kept still for 3 minutes;
(7) the first valve 115 and the second valve 116 are opened and the first piston 106 moves from the a position to the C position. In the process, the gas in the evaporation chamber 2 flows into the first cavity 103 through the flexible vacuum pipeline 3, and the gas in the third cavity 105 is exhausted through the activated carbon filter 110;
(8) when the first valve 115 and the second valve 116 are closed, the first piston 106 moves from the position C to the position a, the gas in the first chamber 103 is exhausted through the carbon filter 110, and the apparatus returns to the initial position.
The vacuum generator 1 and the evaporation chamber 2 may be equipped with a vacuum gauge and a thermometer for detecting the internal state of the chamber.
The present invention may be equipped with automated electrical connections to control the process flow including, but not limited to, process sequence, vacuum, solution volume, temperature, process time.
In the present invention, the substrate 4 to be coated is an automobile glass, an automobile rearview mirror, a solar cover glass, an architectural glass, a metal surface, or the like.
In the invention, when the substrate 4 to be coated is an automobile rearview mirror, the size of the evaporation chamber 2 is designed into two to three specifications according to different sizes of the automobile rearview mirror, and the volume of the inside of the evaporation chamber is not more than 100 mL.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the spirit and scope of the invention.
Claims (6)
1. A single-sided substrate vacuum coating equipment is characterized in that: the vacuum coating device comprises a vacuum generating device, an evaporation chamber, a flexible vacuum pipeline, a substrate to be coated and a storage tank for a solution to be coated, wherein the vacuum generating device is connected with the evaporation chamber through the flexible vacuum pipeline, one side of the evaporation chamber is provided with an opening or a plurality of openings, the substrate to be coated is arranged on one side of the opening and is sealed with the opening of the evaporation chamber, the vacuum generating device is connected with the storage tank for the solution to be coated, the substrate to be coated is close to the opening of the evaporation chamber, the vacuum generating device is pumped to a vacuum state, the solution to be coated is input into the vacuum generating device, the gasified solution enters the evaporation chamber through the flexible vacuum pipeline to form a film on the substrate to be coated, the vacuum generating device comprises a cylinder, a first cavity, a second cavity, a third cavity, a first piston, a second piston and a third piston, the interior of the cylinder is divided into the first cavity, the second cavity and the third cavity through two clapboards, the second piston is arranged in the second cavity in a sliding mode, the third piston is arranged in the third cavity in a sliding mode, and the first piston, the second piston and the third piston are connected through a piston rod; the first cavity and the third cavity are respectively communicated with the evaporation chamber, the second cavity is communicated with an oil inlet pipeline and an oil outlet pipeline, and the oil inlet pipeline and the oil outlet pipeline are connected through an oil pressure chamber valve; a first valve is arranged on a flexible vacuum pipeline connected with the first cavity and the evaporation chamber, and a second valve is arranged on a flexible vacuum pipeline connected with the third cavity and the evaporation chamber.
2. A single-sided substrate vacuum coating apparatus according to claim 1, wherein: and a first cavity in the vacuum generating device is communicated with a storage tank of the solution to be coated.
3. A single-sided substrate vacuum coating apparatus according to claim 1, wherein: the working process of the vacuum generating device is as follows:
A. when the first piston is at the A position, the oil pressure chamber valve, the first valve and the second valve are all closed;
B. when the first piston moves to the position C, the first cavity is in a vacuum state;
C. spraying a solution to be coated into the first cavity, and atomizing the liquid;
D. when the first piston moves to the position B, the value of the pressure gauge is 1 atmosphere, the second valve and the first valve are opened in sequence, so that the air in the evaporation chamber flows into the third cavity, and the steam in the first cavity flows into the evaporation chamber;
E. after the first piston moves to the position A, closing the first valve and the second valve, and standing for a period of time;
F. opening a first valve and a second valve, moving a first piston from the position A to the position C, allowing gas in the evaporation chamber to flow into a first cavity through a flexible vacuum pipeline, and discharging gas in a third cavity into the atmosphere;
G. and closing the first valve and the second valve, moving the first piston from the position C to the position A, and exhausting the gas in the first cavity into the atmosphere.
4. A single-sided substrate vacuum coating apparatus according to claim 3, wherein: the first cavity and the third cavity are connected with a waste gas treatment device, and gas in the third cavity and the first cavity is discharged into the atmosphere through the waste gas treatment device.
5. A single-sided substrate vacuum coating apparatus according to claim 1, wherein: the structure of the evaporation chamber is bowl-shaped, square or sphere-shaped.
6. A single-sided substrate vacuum coating apparatus according to claim 1, wherein: and an electric heating wire or a fan is additionally arranged in the evaporation chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810970946.9A CN109023256B (en) | 2018-08-24 | 2018-08-24 | Single-sided substrate vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810970946.9A CN109023256B (en) | 2018-08-24 | 2018-08-24 | Single-sided substrate vacuum coating equipment |
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| Publication Number | Publication Date |
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| CN109023256A CN109023256A (en) | 2018-12-18 |
| CN109023256B true CN109023256B (en) | 2020-12-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810970946.9A Active CN109023256B (en) | 2018-08-24 | 2018-08-24 | Single-sided substrate vacuum coating equipment |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112111707A (en) * | 2019-06-21 | 2020-12-22 | 合肥欣奕华智能机器有限公司 | Evaporation source and roll-to-roll evaporation device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2459091Y (en) * | 2001-01-16 | 2001-11-14 | 胡海轮 | High-presssure two-purpose machine for airless flameplating and washing |
| CN201529590U (en) * | 2009-06-15 | 2010-07-21 | 李成德 | High-pressure water spraying unit |
| CN104384040A (en) * | 2014-11-14 | 2015-03-04 | 江苏利诺科技发展有限公司 | Atomizing film plating device |
| CN204985153U (en) * | 2015-07-29 | 2016-01-20 | 桂林橡胶设计院有限公司 | Combination pneumatic cylinder and control system thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014062523A1 (en) * | 2012-10-15 | 2014-04-24 | Chelminski Research, Llc | Water gun |
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- 2018-08-24 CN CN201810970946.9A patent/CN109023256B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2459091Y (en) * | 2001-01-16 | 2001-11-14 | 胡海轮 | High-presssure two-purpose machine for airless flameplating and washing |
| CN201529590U (en) * | 2009-06-15 | 2010-07-21 | 李成德 | High-pressure water spraying unit |
| CN104384040A (en) * | 2014-11-14 | 2015-03-04 | 江苏利诺科技发展有限公司 | Atomizing film plating device |
| CN204985153U (en) * | 2015-07-29 | 2016-01-20 | 桂林橡胶设计院有限公司 | Combination pneumatic cylinder and control system thereof |
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| CN109023256A (en) | 2018-12-18 |
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