CN220151489U - Pressure leakage air leakage piezoelectric micropump - Google Patents

Abstract

The utility model discloses a piezoelectric micropump for pressurizing and releasing air, which comprises: the pressure maintaining chamber, the first air outlet chamber, the second air outlet chamber and the air leakage chamber can be inflated and pressurized, and can also be used for air leakage and air leakage. The inlet channel of the inlet is a contracted expansion pipe, namely the width of the inlet end is smaller than that of the outlet end, so that gas backflow can be reduced, a certain angle is formed between the inlet channel and the inlet chamber, and the gas forms vortex after entering the inlet chamber. Most of the parts are flat, easy to process and form, and easy to miniaturize and thin the piezoelectric micropump; each part is manufactured in a split mode, then is attached and packaged, and process control in batch production is facilitated; in the air leakage process, air flows out through the air leakage holes which are arranged laterally, the air leakage holes are arranged laterally, and the mounting surface connected with the peripheral air storage device is flat, so that the mounting of the peripheral air storage device is facilitated.

Description

Pressure leakage air leakage piezoelectric micropump

Technical Field

The utility model relates to the technical field of fluid control, in particular to a piezoelectric micropump for pressurizing, releasing and leakage.

Technical Field

In recent years, with the rapid development of micro-electro-mechanical system technology, a micro-fluidic control system, which is an important branch of the micro-electro-mechanical system technology, is favored because of high control accuracy, small size and low power consumption. Micropumps are important components that make up a fluid control system that can precisely control the flow of fluid.

Compared with other micropumps driven by the piezoelectric micropump, the piezoelectric micropump has the advantages of simple structure, small volume, light weight, low noise, no electromagnetic interference, capability of controlling output flow by applying different voltages and frequencies, and the like, and has wide application prospects in the fields of fluid transportation, synthesis, micro-fluid synthesis and precise control.

The piezoelectric micropump can realize rapid inflation and deflation, can be widely applied to intelligent wearing equipment such as wrist type sphygmomanometers, intelligent watches and intelligent bracelets, and the performance of the pump is improved to become a key factor for improving the performance of products. In order to realize structural microminiaturization, the piezoelectric micropump applied to intelligent wearing equipment adopts a valve plate to divide a pump cavity into an air inlet side and an air outlet side, and realizes the air charging and discharging process by controlling the pressure of the air inlet side and the air outlet side of the pump.

The main problems of the existing micropump are as follows:

1. loose structure, difficult manufacture and assembly, unfavorable process control, and difficulty in further reducing the rejection rate in the production process, thereby causing higher resource waste;

2. the miniaturization and the frivolity of the piezoelectric micropump are not easy to realize;

3. after the piezoelectric micropump is inflated and pressurized, the air leakage is difficult to carry out.

Disclosure of Invention

The utility model aims to solve the problems that the prior piezoelectric micropump product is difficult to control the process and reduce the rejection rate in the production process due to loose structure, difficult manufacture and assembly and realize microminiaturization and thinness, and provides a pressurized air leakage piezoelectric micropump capable of inflating and pressurizing and discharging air and leakage.

A pressurized and deflated piezoelectric micropump comprising: the piezoelectric vibrator comprises an inlet 1, a gasket 2, a piezoelectric vibrator, a pump body and a gas storage device;

the gasket 2 is provided with a second air inlet hole 22 communicated with the inlet 1, and one side surface of the gasket 2 is also provided with a gasket bulge 23 serving as a lead;

the pump body include: an upper pump body 6, a valve plate 7 and a lower pump body 8;

the upper pump body 6 is provided with a first concave part 61 and a second concave part 62, which are respectively provided with a vent hole, and the second concave part 62 is provided with a bulge 621;

the lower pump body 8 is provided with a third concave part 81 and a fourth concave part 82 which are communicated through a channel 83 and are provided with a second air outlet hole 831 and an air outlet pipe 85; the fourth recess 82 is provided with a vent hole 822;

the valve plate 7 is provided with a round hole 72;

the first concave part 61 and the valve plate 7 form a pressure maintaining chamber, and a first air outlet cavity is formed with the second concave part 62 of the upper pump body; the round hole 72 of the valve plate and the boss 621 of the lower pump body form a valve;

a second air outlet cavity formed by the third concave part 81 and the valve plate 7;

a fourth concave part 82 and a valve plate 7 form a gas leakage cavity; the bulge 821 and the valve plate 7 form a valve for controlling pressurization and air leakage;

the piezoelectric vibrator comprises a substrate 3, ceramics 4 and a wire 5;

the base plate 3 divide into outer Zhou Jiban and disc base plate, and the periphery base plate is fixed on the upper pump body, and the centre is a base plate disc, and the disc base plate links to each other with outer Zhou Jiban through hinge 31, and pottery 4 is fixed on the base plate disc, and the opposite side of disc base plate is equipped with circular bellied reflection stratum 32, is equipped with the air vent between hinge 31.

The vent hole 611 of the first concave portion 61 of the upper pump body 6 is a plurality of array holes, and is used for elastically deforming the valve plate to block the vent hole 822 when air is taken in;

the valve plate 7 is made of a silicon rubber material, and has a thickness of 50-150 microns.

A plurality of arch-shaped openings 21 are arranged around the second air inlet holes 22 on the gasket 2, and the gasket 2 is made of stainless steel.

The inlet 1 is provided with a plurality of air inlet channels 11, the tail end of each air inlet channel 11 is provided with a first air inlet hole 111 penetrating through, the other end of each air inlet channel is connected to an air inlet cavity 12, and arch-shaped grooves 13 are arranged between the air inlet channels;

the air inlet chamber 12 is communicated with a second air inlet hole 22 on the gasket 2, and the arch groove 13 corresponds to an arch opening part 21 on the gasket 2;

the air inlet channel 11 of the inlet 1 is a contracted expansion pipe, namely the width of the air inlet end is smaller than that of the air outlet end, so that the air backflow can be reduced, a certain angle is formed between the air inlet channel 11 and the air inlet chamber 12, and the air enters the air inlet chamber 12 to form vortex.

A protruding part 821 is provided in the middle of the third recess 81 of the lower pump body 8, and a through air leakage hole 822 is provided on the protruding part 821.

The circular groove 64 of the upper pump body 6 is internally provided with an annular protrusion 641 which forms a pump cavity with the piezoelectric vibrator, and can prevent glue from overflowing during bonding.

The utility model provides a piezoelectric micropump for pressurizing and releasing air, which comprises: the pressure maintaining chamber, the first air outlet chamber, the second air outlet chamber and the air leakage chamber can be inflated and pressurized, and can also be used for air leakage and air leakage. The inlet channel of the inlet is a contracted expansion pipe, namely the width of the inlet end is smaller than that of the outlet end, so that the gas backflow can be reduced, a certain angle is formed between the inlet channel and the inlet chamber, and the gas forms vortex after entering the inlet chamber 12.

After the technical scheme is adopted, the utility model has the following beneficial effects:

1. the piezoelectric micropump can detect the forward opening performance and the reverse stopping performance of the performance key evaluation indexes, control the quality of the final product in the middle process, further reduce the rejection rate and avoid the waste of resources such as raw materials, manpower and the like caused by the subsequent production process based on the rejection;

2. most of the parts are flat, easy to process and form, and easy to microminiaturize and thin and light in weight, meanwhile, each part is manufactured separately and then is attached and packaged, so that the process control in mass production is facilitated;

3. in the air leakage process, air flows out through the air leakage holes arranged in the lateral direction, the air leakage holes are arranged in the lateral direction, avoiding of the air leakage holes is not needed to be considered during installation of the peripheral device, the installation surface of the air hole, which is connected with the peripheral air storage device, is smooth, installation of the peripheral air storage device is facilitated, and product applicability is improved.

Drawings

FIG. 1 is a schematic diagram of a piezoelectric micropump with pressure and air leakage in an embodiment of the present utility model;

FIG. 2 is a schematic view of an inlet in an embodiment of the utility model;

FIG. 3 is a schematic view of a substrate in an embodiment of the utility model;

FIG. 4 is a schematic view of another view of a substrate in an embodiment of the utility model;

FIG. 5 is a schematic view of another substrate according to an embodiment of the utility model;

FIG. 6 is a schematic diagram of another view of another substrate according to an embodiment of the utility model;

FIG. 7 is a schematic view of an upper pump body in an embodiment of the utility model;

FIG. 8 is a schematic view of another view of the upper pump body in an embodiment of the utility model;

FIG. 9 is a schematic view of a lower pump body in an embodiment of the utility model;

FIG. 10 is a schematic view of another view of the lower pump body in an embodiment of the utility model;

FIG. 11 is a schematic diagram of a pressurized air-leakage piezoelectric micropump inflation process in accordance with an embodiment of the present utility model;

fig. 12 is a schematic diagram of a pressure-release leakage piezoelectric micropump in an embodiment of the present utility model.

The labels in the above figures are as follows:

1. an inlet; 11. an air intake passage; 111. a first air inlet hole; 12. an air intake chamber; 13. an arch-shaped groove;

2. a gasket; 21. an arch-shaped opening portion; 22. a second air inlet hole; 23. a gasket projection;

3. a substrate; 31. a hinge; 32. a reflective layer;

4. a ceramic;

5. a metal wire;

6. an upper pump body; 61. a first concave portion; 611. a vent hole; 62. a second concave portion; 621. a protrusion; 622. a first air outlet hole; 63. a positioning pin; 64. a circular groove; 641. an annular protrusion; 65. a rectangular opening portion;

7. a valve plate; 71. valve plate locating holes; 72. a round hole;

8. a lower pump body; 81. a third recess; 82. a fourth concave portion; 821. a protruding portion; 822. a vent hole; 83. a channel; 831. a second air outlet hole; 84. a lower pump body positioning hole; 85. and an outlet pipe 85.

Detailed Description

The utility model will now be described in further detail with reference to the accompanying drawings. The drawings are simplified schematic representations which merely illustrate the basic structure of the utility model and therefore show only those features which are relevant to the utility model, and orientation and reference (e.g., up, down, left, right, etc.) may be used solely to aid in the description of the features in the drawings. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the claimed subject matter is defined only by the appended claims and equivalents thereof.

The utility model provides a piezoelectric micropump for pressurizing and deflating, which comprises: the piezoelectric vibrator comprises an inlet 1, a gasket 2, a piezoelectric vibrator and a pump body; wherein,

one side of the inlet 1 is provided with a plurality of air inlet channels 11, the air inlet channels 11 are contraction and expansion pipes, the specific number of the air inlet channels is not limited, fig. 2 shows four air inlet channels 11, the tail end of an air inlet chamber 12 is provided with a first air inlet hole 111 penetrating through, the other end of the air inlet chamber is connected to the air inlet chamber 12, and arch-shaped grooves 13 are arranged between the air inlet channels;

the air inlet channel 11 of the inlet 1 is a contracted expansion pipe, namely the width of the air inlet end is smaller than that of the air outlet end, so that the air backflow can be reduced, a certain angle is formed between the air inlet channel 11 and the air inlet chamber 12, and the air enters the air inlet chamber 12 to form vortex.

The gasket 2 is provided with an arch opening part 21 corresponding to the arch groove 13 of the bottom plate, a second air inlet hole 22 corresponding to the inlet air inlet cavity is arranged in the middle, and one side surface of the gasket is provided with a gasket protruding part 23 serving as a lead wire;

the piezoelectric vibrator consists of a substrate 3, ceramic 4 and a lead 5, wherein four pairs of hinges 31 are arranged on the substrate 3, the shape of the substrate hinges is shown in fig. 3, the shape of the substrate hinges can also be the shape shown in fig. 5, the substrate 3 is divided into an outer Zhou Jiban and a disc substrate, the outer periphery substrate is fixed on an upper pump body, a substrate disc is arranged in the middle of the outer periphery substrate, the disc substrate is connected with an outer Zhou Jiban through the hinges 31, and the ceramic 4 is fixed on the substrate disc. A vent hole is provided between the hinges 31.

A reflecting layer 32 with a circular bulge is arranged in the middle of one side, piezoelectric ceramics 4 are bonded on the middle disc of the substrate on the other side, and a metal wire 5 is welded on one side of the ceramics which is not bonded with the substrate;

the upper pump body 6 has a circular first concave portion 61, a second concave portion 62 and six positioning pins 63 on one side, the first concave portion 61 is provided with an array of vent holes 611, the number of the vent holes 611 is not limited, seven vent holes are shown in fig. 7, the second concave portion 62 is provided with a first vent hole 622, a protrusion 621 is arranged in the middle, a groove 63 corresponding to the piezoelectric vibrator and a rectangular opening 65 are arranged on the other side of the upper pump body and connected with one side, and are used for accommodating a set metal wire, an annular protrusion 641 is arranged in the groove and used for supporting the piezoelectric vibrator, so that a certain gap is kept between the piezoelectric vibrator and the upper pump body 6, a pumping chamber is formed, and the piezoelectric vibrator can vibrate freely, and a normal working state is maintained;

six positioning holes 71 corresponding to the upper pump body positioning pins 63 are formed in the valve plate 7 and used for positioning the valve plate, a pressure maintaining cavity is formed between the valve plate and the upper pump body first concave part 61 and a first air outlet cavity is formed between the valve plate and the upper pump body second concave part 62, and round holes 72 with smaller diameters and corresponding to the protrusions of the second concave part are formed in the valve plate and used for pumping out gas;

the lower pump body 8 is provided with six positioning holes 84 corresponding to the positioning pins of the upper pump body and used for positioning the lower pump body, the six positioning holes are matched with the upper pump body, one side of the lower pump body is provided with a third concave part 81 and a fourth concave part 82, the middle of the lower pump body is connected by a channel 83, the third concave part 81, the fourth concave part 82 and the valve plate 7 respectively form a second air outlet cavity and a vent cavity, the channel 83 is provided with a second air outlet hole 831, the middle of the vent cavity is provided with a protruding part 821, the protruding part is provided with a penetrating vent hole 822, the middle of the other side of the lower pump body is provided with an air outlet pipe 85, and the second air outlet hole penetrates through the air outlet pipe 85;

the inlet 1 is formed in a flat plate shape and is formed by a layer of flat plate, so that the process difficulty and the manufacturing cost are reduced, and the inlet 1 is made of a metal material and is required to have enough rigidity.

The gasket 2 is made of stainless steel metal, has good conductivity, one surface is bonded with the bottom plate 1, and the other surface is bonded with the substrate of the piezoelectric vibrator by conductive glue, so that current on the lead wire serving as the protruding part 23 on the gasket 2 can be transmitted to the substrate 3;

when the valve plate 7 is adhered to the upper pump body, the round hole on the valve plate 7 is tightly attached to the boss 621 on the pump body 6, so that a certain pressure is applied to push the valve plate 7 to pump out from the round hole when the gas is pumped out;

based on the above structure, the working process of the pressurizing and air leakage piezoelectric micropump of the embodiment is as follows:

when in inflation, the lead 5 and the gasket convex part 23 serving as a lead on the gasket 2 are respectively connected with the anode and the cathode of a power supply, the piezoelectric vibrator starts vibrating and works normally, gas enters from the first air inlet hole 111 of the inlet 1, enters the air inlet chamber 12 through the air inlet channel 11, forms vortex in the air inlet chamber, then enters the pumping chamber through the second air inlet hole 22 on the gasket 2 through the gap between the hinges 31 through vibrator vibration, one part of the gas is pumped into a pressure maintaining cavity formed by the first concave part 61 of the upper pump body 6 and the valve plate 7, the elastic deformation of the valve plate 7 is used for blocking the air outlet hole 811 of the air outlet cavity formed by the fourth concave part 82 of the lower pump body 8 and the valve plate 7, the air is prevented from leaking out, the pressure maintaining effect is achieved, and the other part of the gas enters from the first air outlet cavity formed by the second concave part 62 of the upper pump body 6 and the valve plate 7 through the first air outlet hole 622, the valve plate 7 is jacked up, the gas enters into a second air outlet cavity formed by the third concave part 81 of the lower pump body 8 and the valve plate 7 through the round hole 72 on the valve plate 7, and the second air outlet hole on the air outlet hole 83 enters into a peripheral valve plate 831; 0070. when the air is discharged, the power supply is disconnected, the piezoelectric vibrator stops working, the round hole 72 on the valve plate 7 is blocked by the boss 621 of the upper pump body 6, and air with certain pressure stored in the external air storage device reaches the channel 83 through the second air outlet 831, flows into the air discharge cavity, flows out through the air discharge hole 822 and completes air discharge.

Claims (9)

1. A pressurized and deflated piezoelectric micropump comprising: the piezoelectric vibrator comprises an inlet (1), a gasket (2), a piezoelectric vibrator and a pump body;

the gasket (2) is provided with a second air inlet hole (22) which is communicated with the inlet (1), and one side surface of the gasket (2) is also provided with a gasket bulge (23) serving as a lead;

the pump body include: an upper pump body (6), a valve plate (7) and a lower pump body (8);

the upper pump body (6) is provided with a first concave part (61) and a second concave part (62), the first concave part and the second concave part are respectively provided with a vent hole, and the second concave part (62) is provided with a bulge (621);

the lower pump body (8) is provided with a third concave part (81) and a fourth concave part (82) which are communicated through a channel (83), and a second air outlet hole (831) and an air outlet pipe (85) are arranged; the fourth concave part (82) is provided with a vent hole (822);

the valve plate (7) is provided with a round hole (72);

the first concave part (61) and the valve plate (7) form a pressure maintaining chamber, and a first air outlet cavity is formed with the second concave part 62 of the upper pump body; the round hole (72) of the valve plate and the bulge (621) of the lower pump body form a valve;

a second air outlet cavity formed by the third concave part (81) and the valve plate (7);

a venting cavity formed by the fourth concave part (82) and the valve plate (7); the venting hole (822) and the valve plate (7) form a valve to control pressurization and venting.

2. The piezoelectric micropump of claim 1, wherein the piezoelectric vibrator comprises a substrate (3), ceramic (4) and a wire (5);

the base plate (3) divide into outer Zhou Jiban and disc base plate, and the periphery base plate is fixed on the upper pump body, and the centre is a base plate disc, and the disc base plate links to each other with outer Zhou Jiban through hinge (31), and pottery (4) are fixed on the base plate disc, and the opposite side of disc base plate is equipped with circular bellied reflection stratum (32), is equipped with the air vent between hinge (31).

3. A piezoelectric micropump according to claim 2, wherein the vent hole (611) of the first recess (61) of the upper pump body (6) is a plurality of array holes, and the valve plate is used to elastically deform to block the vent hole (811) during air intake.

4. A piezoelectric micropump according to claim 3, wherein the valve plate (7) is made of a silicone rubber material and has a thickness of between 50 and 150 μm.

5. A piezoelectric micropump according to claim 4, wherein the gasket (2) is made of stainless steel, and a plurality of arch-shaped openings (21) are formed around the second air inlet hole (22) in the gasket (2).

6. The piezoelectric micropump of claim 5, wherein the inlet (1) is provided with a plurality of air inlet channels (11), the tail end of the air inlet channel (11) is provided with a first air inlet hole (111) penetrating through, the other end of the air inlet channel is connected to the air inlet chamber (12), and arch-shaped grooves (13) are arranged between the air inlet channels;

the air inlet chamber (12) is communicated with a second air inlet hole (22) on the gasket (2), and the arch groove (13) corresponds to an arch opening part (21) on the gasket (2).

7. The piezoelectric micropump of claim 6, wherein the inlet channel (11) of the inlet (1) is a convergent-divergent tube, i.e. the width of the inlet end is smaller than the width of the outlet end, so that the backflow of the gas can be reduced, a certain angle is formed between the inlet channel (11) and the inlet chamber (12), and the gas forms a vortex after entering the inlet chamber (12).

8. A piezoelectric micropump according to claim 7, characterized in that a protruding part (821) is provided in the middle of the third recess (81) of the lower pump body (8), and the protruding part (821) is provided with a through air leakage hole (822).

9. The piezoelectric micropump of claim 8, wherein the circular recess (64) of the upper pump body (6) has an annular protrusion (641) to form a pump cavity with the piezoelectric vibrator, and the piezoelectric micropump can prevent glue from overflowing during bonding.