CN220121785U - Wafer conveying box grabbing and lifting mechanism - Google Patents

Abstract

The utility model relates to a wafer transfer box grabbing and lifting mechanism which consists of an upright post, a vertical lifting component, a sliding table and a grabbing mechanism, wherein the two clamping claws grab the wafer transfer box when being close to each other, and release the wafer transfer box when being far away from each other. The opening from the bottom of the claw can be convenient for installing the identification block into the installation groove, and the identification block can be replaced when required. The identification block is matched with the identification groove on the side surface of the fixing plate at the top of the wafer conveying box, so that the type of the wafer conveying box can be identified through the shape of the identification groove.

Description

Wafer conveying box grabbing and lifting mechanism

Technical Field

The utility model belongs to the technical field of wafer manufacturing equipment, and particularly relates to a grabbing and lifting mechanism of a wafer conveying box.

Background

The front opening wafer cassette (Front Opening Unified Pod) is a carrier container for storing wafer baskets containing wafers, and serves as a protective and transport mechanism during semiconductor fabrication. Chinese patent application CN217606793U discloses an automatic handling device for FOUPs, in which fig. 10 and 11 and paragraph 0047 disclose a wafer cassette gripping mechanism. The wafer cassette gripping mechanism is also disclosed in fig. 23 and 24 in the autonomous mobile transfer robot disclosed in chinese patent document CN 208629426U.

In use, an unprocessed wafer is transported into the processing apparatus from the first cassette, processed, and then transported to the next step from the second cassette. If the loading and unloading mechanisms are integrally arranged, the wafer cassette grabbing mechanism is required to distinguish which wafer cassette is. However, none of the above-described cassette gripping mechanisms can identify the type of cassette being gripped.

Disclosure of Invention

The utility model aims to solve the technical problems that: in order to solve the defects in the prior art, the wafer conveying box grabbing and lifting mechanism capable of distinguishing types is provided.

The technical scheme adopted for solving the technical problems is as follows:

a wafer cassette gripping and lifting mechanism comprising:

a column;

the vertical lifting assembly is fixed on the upright post;

the sliding table is arranged on the vertical lifting assembly and can do lifting motion along the vertical lifting assembly;

the mounting plate is arranged on the sliding table;

the grabbing mechanism comprises a driving piece arranged on the mounting plate, a sliding rail and two clamping jaws arranged on the sliding rail, wherein the driving piece can drive the two clamping jaws to be close to or far away from each other; the clamping jaw is provided with a clamping groove on one surface opposite to the clamping jaw, the center of the clamping groove is provided with a mounting groove arranged in the vertical direction, an identification block is mounted in the mounting groove, and an opening of the mounting groove is positioned at the bottom of the clamping jaw; the identification block is matched with the identification groove on the side surface of the fixing plate at the top of the wafer conveying box.

Preferably, in the wafer transfer box grabbing and lifting mechanism, the identification groove is in a V shape, and the identification block is in a triangular shape.

Preferably, in the wafer transfer box grabbing and lifting mechanism, the bottom wall of the mounting groove is an inclined plane.

Preferably, in the wafer transfer box grabbing and lifting mechanism, through holes are formed in clamping claws close to the mounting plate, and the mounting plate extends into the through holes. I.e. the mounting plate provides the mounting basis for the card gripping mechanism.

Preferably, in the wafer transfer box grabbing and lifting mechanism of the present utility model, the driving member is a rodless cylinder.

Preferably, in the wafer cassette grabbing and lifting mechanism of the present utility model, the width of the front end of the mounting plate is smaller.

Preferably, in the wafer transfer box grabbing and lifting mechanism, the clamping jaw far away from the mounting plate is provided with a through hole, so that the air pipe of the driving piece conveniently penetrates out of the through hole.

Preferably, in the wafer transfer box grabbing and lifting mechanism, through holes are formed in both clamping claws, and the mounting plate passes through the through holes.

The beneficial effects of the utility model are as follows:

the utility model relates to a grabbing and lifting mechanism for a wafer conveying box, which consists of an upright post, a vertical lifting assembly, a sliding table and a grabbing mechanism, wherein the two clamping claws grab the wafer conveying box when being close to each other, and release the wafer conveying box when being far away from each other. The opening from the bottom of the claw can be convenient for installing the identification block into the installation groove, and the identification block can be replaced when required. The identification block is matched with the identification groove on the side surface of the fixing plate at the top of the wafer conveying box, so that the type of the wafer conveying box can be identified through the shape of the identification groove.

Drawings

The technical scheme of the utility model is further described below with reference to the accompanying drawings and examples.

FIG. 1 is a schematic view of a wafer cassette gripping and lifting mechanism according to an embodiment of the present utility model;

FIG. 2 is a schematic view of a gripping mechanism in one orientation according to an embodiment of the present utility model;

FIG. 3 is a schematic view of the gripping mechanism in another orientation according to an embodiment of the present utility model;

FIG. 4 is a schematic diagram of a cassette according to an embodiment of the present utility model;

the reference numerals in the figures are:

1. a column;

2. a vertical lifting assembly;

3. a sliding table;

4. a mounting plate;

5. a grabbing mechanism;

9. a wafer transfer box;

51. a claw;

52. a driving member;

53. a slide rail;

91. a fixing plate;

512. a mounting groove;

513. a via hole;

514. and a through hole.

Detailed Description

It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the scope of the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in a specific case.

The technical scheme of the present utility model will be described in detail below with reference to the accompanying drawings in combination with embodiments.

Examples

The present embodiment provides a wafer cassette grabbing and lifting mechanism, as shown in fig. 1, including:

a column 1;

the vertical lifting assembly 2 is fixed on the upright post 1; the vertical lifting assembly 2 consists of a motor (the motor is accommodated by a motor bin at the top in fig. 1), a guide rail and a screw rod (a standard component is used), the sliding table 3 is matched with the screw rod and is arranged on the guide rail, and the motor drives the screw rod to rotate so as to enable the sliding table 3 to move on the guide rail;

the sliding table 3 is arranged on the vertical lifting assembly 2 and can do lifting motion along the vertical lifting assembly 2;

the mounting plate 4 is arranged on the sliding table 3;

the grabbing mechanism 5 comprises a driving piece 52, a sliding rail 53 and two clamping claws 51, wherein the driving piece 52 is arranged on the mounting plate 4, and the two clamping claws 51 are arranged on the sliding rail 53, and the driving piece 52 can drive the two clamping claws 51 to be close to or far away from each other; the opposite sides of the clamping jaws 51 are provided with clamping grooves, the centers of the clamping grooves are provided with mounting grooves 512 which are arranged in the vertical direction, the inside of the mounting grooves 512 is provided with identification blocks, and the openings of the mounting grooves 512 are positioned at the bottoms of the clamping jaws 51, namely, the identification blocks can be conveniently mounted in the mounting grooves 512 from the openings at the bottoms of the clamping jaws 51 (the aperture of the identification blocks is slightly larger than that of the mounting grooves 512, so that the assembly can be realized); the identification block is matched with the identification groove on the side of the fixing plate 91 at the top of the wafer transfer box 9. Different wafer cassettes 9 may be provided with different identification slots, indicating that the wafer cassette 9 is misplaced when the unrecognizable block and identification slot cannot be matched.

The wafer transfer box grabbing and lifting mechanism of the embodiment comprises an upright column 1, a vertical lifting assembly 2, a sliding table 3 and a grabbing mechanism 5, wherein the two clamping claws 51 grab the wafer transfer box when being close to each other, and release the wafer transfer box when being far away from each other. The opening from the bottom of the claw 51 facilitates the mounting of the identification block into the mounting groove 512 and also allows replacement of the identification block when required. The identification block is matched with the identification groove on the side of the fixing plate 91 at the top of the wafer cassette 9, so that the type of the wafer cassette can be distinguished by the shape of the identification groove.

It should be noted that, the identification block is not shown in fig. 2 and 3, and may be adapted according to the shape of the identification slot, for example, the cross section may be triangular, trapezoidal, or square. For example, the identification groove may be selected to be V-shaped, and the identification block may be selected to be triangular in shape.

Further, the bottom wall of the mounting groove 512 is inclined so that the fixing plate 91 can slide into the claw 51 when the wafer cassette is grasped.

Further, a through hole 513 is formed in the claw 51 near the mounting plate 4, and the mounting plate 4 extends into the through hole 513. I.e. the mounting plate 4 provides a mounting basis for the card gripping mechanism 5.

Further, through holes 513 are formed in both the claws 51, and the mounting plate 4 passes through the through holes 513. That is, both the claws 51 pass through the front end shrinking department of the mounting plate 4, and some limiting support structures may be further disposed on the mounting plate 4 to stabilize the claws 51, for example, some guide rail slider structures are disposed at the through holes 513 of the mounting plate 4.

Further, the driving member 52 is a rodless cylinder. The use of rodless cylinders can save installation space.

Further, the width of the front end of the mounting plate 4 becomes small, the portion of the width variation functions to abut against and limit the maximum movement distance of the claw 51, and the strength of the mounting plate 4 can also be ensured.

Further, a through hole 514 is provided on the claw 51 far from the mounting plate 4, so as to facilitate the air pipe of the driving member 52 to pass out of the through hole 514.

With the above-described preferred embodiments according to the present utility model as a teaching, the worker skilled in the art could make various changes and modifications without departing from the scope of the technical idea of the present application. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of claims.

Claims (8)

1. The utility model provides a wafer conveying box snatchs elevating system which characterized in that includes:

a column (1);

the vertical lifting assembly (2) is fixed on the upright post (1);

the sliding table (3) is arranged on the vertical lifting assembly (2) and can do lifting movement along the vertical lifting assembly (2);

the mounting plate (4) is arranged on the sliding table (3);

the grabbing mechanism (5) comprises a driving piece (52) arranged on the mounting plate (4), a sliding rail (53) and two clamping claws (51) arranged on the sliding rail (53), wherein the driving piece (52) can drive the two clamping claws (51) to be close to or far away from each other; a clamping groove is formed in the opposite surface of the clamping jaw (51), a mounting groove (512) which is arranged in the vertical direction is formed in the center of the clamping groove, an identification block is mounted in the mounting groove (512), and an opening of the mounting groove (512) is positioned at the bottom of the clamping jaw (51); the identification block is matched with an identification groove on the side surface of a fixed plate (91) at the top of the wafer conveying box (9).

2. The wafer cassette of claim 1, wherein the identification slot is V-shaped and the identification block is triangular in shape.

3. The cassette picking and lifting mechanism as defined in claim 1, wherein the bottom wall of said mounting slot (512) is beveled.

4. Wafer cassette grabbing and lifting mechanism according to claim 1, characterized in that the claws (51) close to the mounting plate (4) are formed with through holes (513), and the mounting plate (4) extends into the through holes (513).

5. The cassette picking and lifting mechanism as defined in claim 1, wherein said driving member (52) is a rodless cylinder.

6. Wafer cassette gripping and lifting mechanism according to claim 1, characterized in that the width of the front end of the mounting plate (4) is reduced.

7. Wafer cassette grabbing and lifting mechanism as claimed in claim 1, wherein the jaws (51) remote from the mounting plate (4) are provided with through holes (514) to facilitate the passage of the air tube of the driving member (52) out of the through holes (514).

8. Wafer cassette grabbing and lifting mechanism as claimed in claim 1, wherein both jaws (51) are formed with a through hole (513) and the mounting plate (4) passes through the through hole (513).