CN219116589U

CN219116589U - Feeding assembly and magazine conveying device

Info

Publication number: CN219116589U
Application number: CN202223598403.XU
Authority: CN
Inventors: 何正鸿; 张超; 何林; 罗蓉; 李江桃
Original assignee: Forehope Electronic Ningbo Co Ltd
Current assignee: Forehope Electronic Ningbo Co Ltd
Priority date: 2022-12-30
Filing date: 2022-12-30
Publication date: 2023-06-02
Anticipated expiration: 2032-12-30

Abstract

The disclosure provides a material loading subassembly and magazine conveyor relates to the semiconductor technology field. The feeding assembly comprises a bracket, a lifting rod, a clamping piece and a first sensor, wherein the clamping piece is connected to the lifting rod; the lifting rod is used for driving the clamping piece to move towards the direction approaching or far away from the bracket, and a clamping space for accommodating the material box is formed between the bracket and the clamping piece; the first sensor is used for detecting whether the box cover of the material box is opened. The feeding assembly can detect whether the box cover of the material box is opened or not, so that the problem of feeding blockage caused by feeding the material box in the state that the box cover is closed is avoided, and the production quality and the efficiency of products are improved.

Description

Feeding assembly and magazine conveying device

Technical Field

The utility model relates to the technical field of semiconductors, in particular to a feeding assembly and a material box conveying device.

Background

In the manufacturing process of the semiconductor device, particularly in the substrate operation process, a loading device is required to be used for loading and transporting the material box, the situation that the box cover at the side edge of the material box is closed by mistake exists in the transportation process of the material box, if the material box is transported in the state that the box cover is closed, the substrate product is blocked during feeding, the product is deformed due to the blocking of the feeding, and the whole quality of the product is reduced.

Disclosure of Invention

The utility model aims to provide a feeding assembly and a material box conveying device, which can detect the feeding state of a material box, prevent feeding blockage, improve the conveying efficiency of the material box and improve the quality of a substrate product.

Embodiments of the present utility model are implemented as follows:

in a first aspect, the present utility model provides a feeding assembly, comprising:

a bracket;

a lifting rod;

the clamping piece is connected to the lifting rod; the lifting rod is used for driving the clamping piece to move towards a direction approaching to or away from the bracket, and a clamping space for accommodating the material box is formed between the bracket and the clamping piece;

the first sensor is used for detecting whether the box cover of the material box is opened or not.

In an alternative embodiment, the first sensor is disposed on the lifting rod, and the material box is located in the state of the clamping space, where the position of the first sensor corresponds to the position of the side edge of the material box, and the side edge of the material box is used for setting a box cover.

In an alternative embodiment, the feeding assembly comprises a second sensor, the second sensor is arranged on the support, and the second sensor is used for detecting whether the material box reaches the clamping space.

In an alternative embodiment, the bracket includes a first end, a second end, and a middle portion connected to the first end and the second end; the second inductor is arranged in the middle.

In an alternative embodiment, the first end is arranged close to the lifting rod, the second end is arranged far away from the lifting rod, the second end is located on the feeding side of the material box, and the second end is provided with a guide part.

In an alternative embodiment, the guide portion is arranged in a circular arc.

In an alternative embodiment, the feeding assembly further comprises a static removing structure, and the static removing structure is arranged on the clamping piece or the lifting rod.

In an alternative embodiment, the static-removing structure includes an ion emitter mounted to the clamping member.

In an alternative embodiment, the clamping member is provided with an emitting hole, and the position of the emitting hole is corresponding to that of the ion emitter.

In a second aspect, the present utility model provides a cartridge delivery device comprising a loading assembly according to any of the preceding embodiments.

The beneficial effects of the embodiment of the utility model include:

according to the feeding assembly provided by the embodiment of the utility model, the lifting rod drives the clamping piece to move, so that the clamping piece and the bracket can clamp the material box conveniently, and the transportation efficiency of the material box is improved. The setting of first inductor can detect whether the lid of magazine is opened to prevent the feeding under the state that the magazine closed, prevent the base plate product deformation scheduling problem that the feeding jam caused, improve magazine conveying efficiency and be favorable to promoting product production quality.

The material box conveying device provided by the embodiment of the utility model comprises the feeding assembly, so that the problems of deformation of a substrate product and the like caused by feeding blockage can be prevented, the conveying efficiency of the material box is improved, and the production quality of the product is improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic view of an application scenario of a feeding assembly according to an embodiment of the present utility model;

fig. 2 is a schematic diagram of an exploded structure of a cartridge applied to a feeding assembly according to an embodiment of the present utility model.

Icon: 100-feeding components; 101-clamping space; 110-a bracket; 111-a first end; 113-a second end; 115-middle; 117-guides; 120-lifting rod; 130-clamping piece; 140-a first inductor; 150-a second inductor; 160-ion emitter; 161-emitting holes; 200-material box; 210-lid.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal," "vertical," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Referring to fig. 1 and 2, the present embodiment provides a loading assembly 100 for loading and transporting a cartridge 200. The feeding assembly 100 comprises a bracket 110, a lifting rod 120, a clamping piece 130 and a first sensor 140, wherein the clamping piece 130 is connected with the lifting rod 120; the lifting rod 120 is used for driving the clamping piece 130 to move towards or away from the bracket 110, and a clamping space 101 for accommodating the material box 200 is formed between the bracket 110 and the clamping piece 130; the first sensor 140 is used to detect whether the cover 210 of the cartridge 200 is opened. The feeding assembly 100 can detect whether the box cover 210 of the material box 200 is opened or not, so that the problem of feeding blockage caused by feeding the material box 200 in a state that the box cover 210 is closed is avoided, and the production quality and the efficiency of products are improved.

The first sensor 140 is disposed on the lifting rod 120, and in a state that the cartridge 200 is located in the clamping space 101, a position of the first sensor 140 corresponds to a side position of the cartridge 200, wherein a side of the cartridge 200 is used for setting the box cover 210. It should be noted that, the cross section of the cartridge 200 is rectangular, the lid 210 of the cartridge 200 is located at the side of the cartridge 200, and in the feeding state, the lid 210 needs to be in an open state to smoothly feed. If the cap 210 is in a closed state, the feeding cannot be completed. For example, when the lid 210 is closed during substrate feeding, the substrate cannot enter the cartridge 200, and is blocked outside the cartridge 200, which easily causes deformation or damage of the substrate product. The first sensor 140 is disposed on the lifting rod 120, and the position of the first sensor 140 corresponds to the side of the cartridge 200, so as to detect whether the lid 210 of the cartridge 200 is in a closed state. If the cap 210 is in a closed state, the feeding is stopped, and the cap 210 is opened and then fed. Therefore, the feeding blockage can be avoided, the substrate is prevented from deforming, the feeding efficiency and quality are improved, and the product quality is further improved.

Alternatively, the first sensor 140 may employ a proximity switch, a laser sensor, an infrared sensor, or the like, as long as it recognizes both the opened and closed states of the cover 210, which is not particularly limited herein.

In this embodiment, the lifting rod 120 adopts a screw motor, the clamping member 130 is connected to the screw, and the motor rotates to drive the screw to rotate, so as to drive the clamping member 130 to move along the axial direction of the screw, thereby lifting the clamping member 130, i.e. moving the clamping member 130 in a direction away from or approaching the bracket 110. Of course, the lifting rod 120 may also adopt a rack and pinion, a lifting cylinder or other driving members, so long as the clamping member 130 can be driven to move up and down.

The clamp 130 may employ a clamp cylinder and a clamp block coupled to the clamp cylinder, the clamp block for the pick-up cartridge 200. It will be appreciated that the clamping cylinder moves the clamping blocks, which clamp the cartridge 200, allowing transport and transfer of the cartridge 200. Of course, the clamping member 130 is not limited thereto, and other structures such as a clamping jaw or a suction cup may be used, which are not particularly limited herein.

Optionally, the feeding assembly 100 includes a second sensor 150, where the second sensor 150 is disposed on the support 110, and the second sensor 150 is used for detecting whether the cartridge 200 reaches the clamping space 101. That is, the second sensor 150 is used to detect whether the cartridge 200 is in place, the second sensor 150 may be a contact sensor or a pressure sensor, and after the cartridge 200 enters the holding space 101, the second sensor 150 can touch the cartridge 200, indicating that the cartridge 200 is in place, or that the cartridge 200 is not in place. Alternatively, if the cartridge 200 enters the holding space 101, gravity of the cartridge 200 acts on the pressure sensor, and the pressure sensor determines whether the cartridge 200 is in place according to whether the pressure is detected. When the cartridge 200 is detected in place, the gripper 130 picks up the cartridge 200 again, transferring the cartridge 200.

Alternatively, the support 110 is a fixed structure, and may be fixed on a rack or other carrier, where the support 110 does not move along with the movement of the lifting rod 120. The support 110 is used to hold the cartridge 200. Wherein the bracket 110 includes a first end 111, a second end 113, and a middle portion 115, the middle portion 115 being connected to the first end 111 and the second end 113; the second sensor 150 is disposed in the middle portion 115 of the bracket 110, so that the sensing detection of the cartridge 200 is more sensitive, the detection precision is higher, and the detection result is more accurate.

Alternatively, the first end 111 is disposed close to the lifting rod 120, the second end 113 is disposed away from the lifting rod 120, the second end 113 is located on the feeding side of the cartridge 200, and the second end 113 is provided with a guide 117. That is, when the cartridge 200 enters the holding space 101, it enters from the second end 113 of the holder 110, and the guide portion 117 is provided in an arc shape, that is, the second end 113 is provided with a guide slope. In this way, the cartridge 200 can smoothly enter the bracket 110, that is, the cartridge 200 smoothly enters the clamping space 101, so that the feeding efficiency is improved. At the same time, wear on the cartridge 200 can be reduced.

The feeding assembly 100 further includes a static eliminating structure, which is disposed on the clamping member 130 or the lifting rod 120. The static-removing structure is used to dissipate static electricity around the magazine 200. It should be noted that, during the transportation of the cartridge 200, the charging of the cartridge 200 by the discharging component may be waited for a long time, or the cartridge 200 may have a long standing state in other processes, static electricity is easily accumulated during the standing or waiting for the charging of the cartridge 200, and static electricity around the cartridge 200 may cause the final product to be affected or damaged by the static electricity, which affects the product yield.

Optionally, the static-removing structure includes an ion emitter 160, the ion emitter 160 being mounted on the clamping member 130. The clamping member 130 is provided with an emission hole 161, and the emission hole 161 is positioned corresponding to the ion emitter 160. The ion emitter 160 may emit ions, which pass through the emission holes 161 to reach around the cartridge 200, thereby dispersing static electricity around the cartridge 200 and preventing the product inside the cartridge 200 from being affected by the static electricity.

In this embodiment, the ion emitter 160 is installed at the bottom of the clamping cylinder, that is, the side of the clamping cylinder near the support 110, so that the emitted ions can reach the periphery of the material box 200, the static electricity eliminating efficiency is higher, and the static electricity dissipation is more thorough.

The working process of the feeding assembly 100 provided by the embodiment of the utility model is as follows:

the cartridge 200 enters the clamping space 101 along the second end 113 of the bracket 110, and the second end 113 is provided with the guide part 117, so that the smooth entering of the cartridge 200 can be ensured, and the abrasion and damage to the cartridge 200 can be reduced. The first sensor 140 detects whether the cover 210 of the cartridge 200 is opened, and in a state where the cover 210 of the cartridge 200 is ensured to be opened, products such as a substrate are fed into the cartridge 200, preventing blockage and deformation damage of the fed products. The second sensor 150 detects whether the cartridge 200 is in place and, with the cartridge 200 secured in place, the clamping member 130 grips the cartridge 200 for transfer. The ion emitter 160 on the clamping member 130 may emit ions to dissipate static electricity around the cartridge 200, preventing the product in the cartridge 200 from being affected or disturbed by the static electricity.

The embodiment of the utility model also provides a conveying device for the cartridge 200, which comprises the feeding assembly 100 according to any one of the previous embodiments, and can realize loading and conveying of the cartridge 200. The first sensor 140 can detect the state of the cover 210 of the cartridge 200, and prevent the substrate feeding jam or the product deformation caused by the closing of the cover 210 when the product such as the substrate enters the cartridge 200. The second sensor 150 can detect whether the cartridge 200 is in place, so that after the cartridge 200 is in place, the clamping cylinder clamps the cartridge 200 again for grabbing and transferring, and the conveying efficiency of the cartridge 200 is improved. The ion emitter 160 provided on the clamping member 130 can dissipate static electricity around the cartridge 200 to prevent the product in the cartridge 200 from being affected or disturbed by the static electricity.

In summary, the feeding assembly 100 and the transporting device for the cartridge 200 provided by the embodiment of the utility model have the following beneficial effects:

according to the feeding assembly 100 provided by the embodiment of the utility model, the lifting rod 120 drives the clamping piece 130 to move, so that the clamping piece 130 and the bracket 110 can clamp the material box 200 conveniently, and the transportation efficiency of the material box 200 is improved. The first sensor 140 is configured to detect whether the lid 210 of the cartridge 200 is opened, thereby preventing feeding in a closed state of the cartridge 200, preventing deformation of a substrate product caused by blockage of feeding, improving conveying efficiency of the cartridge 200, and being beneficial to improving production quality of the product. The second sensor 150 can detect whether the cartridge 200 is in place, so that after the cartridge 200 is in place, the clamping cylinder clamps the cartridge 200 again for grabbing and transferring, and the conveying efficiency of the cartridge 200 is improved. The ion emitter 160 provided on the clamping member 130 can dissipate static electricity around the cartridge 200 to prevent the product in the cartridge 200 from being affected or disturbed by the static electricity.

The feeding assembly 100 provided by the embodiment of the utility model can prevent the problems of deformation of the substrate product caused by feeding blockage, improve the conveying efficiency of the feeding assembly 200, facilitate the improvement of the production quality of the product and eliminate the influence of static electricity.

The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A feeding assembly, characterized by comprising:

a bracket;

a lifting rod;

2. The feeding assembly of claim 1, wherein the first sensor is disposed on the lifting rod, and the cartridge is located in the clamping space, and the position of the first sensor corresponds to the position of the side edge of the cartridge, wherein the side edge of the cartridge is used for setting a box cover.

3. The feeding assembly of claim 1, wherein the feeding assembly comprises a second sensor disposed on the support, the second sensor being configured to detect whether the cartridge reaches the clamping space.

4. A loading assembly according to claim 3, wherein the bracket includes a first end, a second end, and a middle portion connected to the first end and the second end; the second inductor is arranged in the middle.

5. The feeding assembly of claim 4, wherein the first end is disposed proximate to the lifting bar and the second end is disposed distal to the lifting bar, the second end being located on the feed side of the cartridge, the second end being provided with a guide.

6. The loading assembly of claim 5, wherein the guide is configured as an arc.

7. The feeding assembly of any one of claims 1 to 6, further comprising a static-removing structure provided on the clamping member or the lifting rod.

8. The feed assembly of claim 7, wherein the static discharge structure comprises an ion emitter mounted to the clamp.

9. The feeding assembly of claim 8, wherein the clamping member is provided with an emission hole, and wherein the emission hole is positioned to correspond to the ion emitter.

10. Cartridge delivery device, characterized by comprising a loading assembly according to any one of claims 1 to 9.